JPWO2022215417A1 - - Google Patents

Info

Publication number
JPWO2022215417A1
JPWO2022215417A1 JP2023512873A JP2023512873A JPWO2022215417A1 JP WO2022215417 A1 JPWO2022215417 A1 JP WO2022215417A1 JP 2023512873 A JP2023512873 A JP 2023512873A JP 2023512873 A JP2023512873 A JP 2023512873A JP WO2022215417 A1 JPWO2022215417 A1 JP WO2022215417A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023512873A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022215417A1 publication Critical patent/JPWO2022215417A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/806—Calibration by correcting for reflection of the emitter radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
JP2023512873A 2021-04-09 2022-03-08 Pending JPWO2022215417A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021066292 2021-04-09
PCT/JP2022/010056 WO2022215417A1 (ja) 2021-04-09 2022-03-08 放射温度測定装置及び放射温度測定方法

Publications (1)

Publication Number Publication Date
JPWO2022215417A1 true JPWO2022215417A1 (https=) 2022-10-13

Family

ID=83546052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023512873A Pending JPWO2022215417A1 (https=) 2021-04-09 2022-03-08

Country Status (4)

Country Link
US (1) US20240110834A1 (https=)
EP (1) EP4303547A4 (https=)
JP (1) JPWO2022215417A1 (https=)
WO (1) WO2022215417A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4040122B1 (en) * 2019-10-25 2026-02-18 HORIBA, Ltd. Radiation thermometer, temperature measurement method, and temperature measurement program
JPWO2024241674A1 (https=) * 2023-05-25 2024-11-28

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01202633A (ja) * 1988-02-08 1989-08-15 Minolta Camera Co Ltd 放射温度計
US4956538A (en) * 1988-09-09 1990-09-11 Texas Instruments, Incorporated Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors
JP2001056253A (ja) * 1999-08-20 2001-02-27 Toshiba Corp 温度測定方法及び温度測定装置
JP2002122480A (ja) * 2000-10-12 2002-04-26 Toshiba Corp 温度測定方法および装置、並びにプラズマ処理装置
US8152365B2 (en) * 2005-07-05 2012-04-10 Mattson Technology, Inc. Method and system for determining optical properties of semiconductor wafers
US7398693B2 (en) * 2006-03-30 2008-07-15 Applied Materials, Inc. Adaptive control method for rapid thermal processing of a substrate
JP4921057B2 (ja) * 2006-07-14 2012-04-18 大阪瓦斯株式会社 放射温度測定装置
JP2008292324A (ja) * 2007-05-24 2008-12-04 Toyota Motor Corp 表面温度測定方法および表面温度測定装置
JP5074972B2 (ja) * 2008-03-24 2012-11-14 大阪瓦斯株式会社 加熱調理器用の温度検出装置
KR101197790B1 (ko) * 2010-12-27 2012-11-05 주식회사 포스코 복사온도 측정장치
JPWO2016136844A1 (ja) * 2015-02-25 2017-12-07 国立大学法人 東京大学 温度測定装置及び温度測定方法
JP2017090351A (ja) 2015-11-13 2017-05-25 株式会社堀場製作所 放射温度計
CN106052880B (zh) * 2016-05-24 2018-10-30 中国航空工业集团公司北京长城计量测试技术研究所 基于等效黑体截面的辐射测温距离确定方法
JP2018132476A (ja) * 2017-02-17 2018-08-23 タキカワエンジニアリング株式会社 放射温度測定ユニット
JP2020085697A (ja) * 2018-11-27 2020-06-04 シャープ株式会社 赤外線検出装置、赤外線検出方法、コンピュータに実行させるためのプログラムおよびプログラムを記録したコンピュータ読み取り可能な記録媒体
JP2020085696A (ja) * 2018-11-27 2020-06-04 シャープ株式会社 赤外線検出装置、赤外線検出方法、コンピュータに実行させるためのプログラムおよびプログラムを記録したコンピュータ読み取り可能な記録媒体

Also Published As

Publication number Publication date
WO2022215417A1 (ja) 2022-10-13
EP4303547A1 (en) 2024-01-10
US20240110834A1 (en) 2024-04-04
EP4303547A4 (en) 2025-04-09

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