JPWO2024241674A1 - - Google Patents

Info

Publication number
JPWO2024241674A1
JPWO2024241674A1 JP2025521818A JP2025521818A JPWO2024241674A1 JP WO2024241674 A1 JPWO2024241674 A1 JP WO2024241674A1 JP 2025521818 A JP2025521818 A JP 2025521818A JP 2025521818 A JP2025521818 A JP 2025521818A JP WO2024241674 A1 JPWO2024241674 A1 JP WO2024241674A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025521818A
Other languages
Japanese (ja)
Other versions
JPWO2024241674A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024241674A1 publication Critical patent/JPWO2024241674A1/ja
Publication of JPWO2024241674A5 publication Critical patent/JPWO2024241674A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/70—Passive compensation of pyrometer measurements, e.g. using ambient temperature sensing or sensing of temperature within housing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2025521818A 2023-05-25 2024-03-15 Pending JPWO2024241674A1 (https=)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023085975 2023-05-25
JP2023149273 2023-09-14
PCT/JP2024/010200 WO2024241674A1 (ja) 2023-05-25 2024-03-15 放射温度測定装置、放射温度測定方法及び放射温度測定装置用プログラム

Publications (2)

Publication Number Publication Date
JPWO2024241674A1 true JPWO2024241674A1 (https=) 2024-11-28
JPWO2024241674A5 JPWO2024241674A5 (https=) 2026-02-20

Family

ID=93589303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025521818A Pending JPWO2024241674A1 (https=) 2023-05-25 2024-03-15

Country Status (3)

Country Link
EP (1) EP4692742A1 (https=)
JP (1) JPWO2024241674A1 (https=)
WO (1) WO2024241674A1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4956538A (en) * 1988-09-09 1990-09-11 Texas Instruments, Incorporated Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors
JPH0469531A (ja) * 1990-07-09 1992-03-04 Tokyo Electron Ltd 放射温度計による温度測定方法
JPH0691144B2 (ja) * 1990-09-21 1994-11-14 株式会社日立製作所 ウエハ温度測定用の放射温度計およびウエハ温度測定方法
JPH06241907A (ja) * 1993-02-18 1994-09-02 Tokai Carbon Co Ltd 炉内物体の放射測温法および放射測温装置
JP4056148B2 (ja) * 1998-10-09 2008-03-05 東京エレクトロン株式会社 放射温度計を用いた温度測定方法
JP2000256848A (ja) * 1999-03-10 2000-09-19 Canon Inc 成膜方法及び装置
JP2002122480A (ja) * 2000-10-12 2002-04-26 Toshiba Corp 温度測定方法および装置、並びにプラズマ処理装置
EP4040122B1 (en) 2019-10-25 2026-02-18 HORIBA, Ltd. Radiation thermometer, temperature measurement method, and temperature measurement program
JPWO2022215417A1 (https=) * 2021-04-09 2022-10-13

Also Published As

Publication number Publication date
EP4692742A1 (en) 2026-02-11
WO2024241674A1 (ja) 2024-11-28

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250731