JP2006098295A - 放射率測定装置 - Google Patents
放射率測定装置 Download PDFInfo
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- JP2006098295A JP2006098295A JP2004286580A JP2004286580A JP2006098295A JP 2006098295 A JP2006098295 A JP 2006098295A JP 2004286580 A JP2004286580 A JP 2004286580A JP 2004286580 A JP2004286580 A JP 2004286580A JP 2006098295 A JP2006098295 A JP 2006098295A
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- emissivity
- hole
- detector
- radiant energy
- incident
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- 238000005259 measurement Methods 0.000 title claims abstract description 65
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000005855 radiation Effects 0.000 abstract description 16
- 238000012937 correction Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 37
- 238000000691 measurement method Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004590 computer program Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000282887 Suidae Species 0.000 description 1
- 238000007707 calorimetry Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 230000000704 physical effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
- G01J5/53—Reference sources, e.g. standard lamps; Black bodies
Abstract
【解決手段】 本発明の放射率測定装置10は、赤外光源11から放射エネルギーを入射させる入射穴12と、入射穴12からの入射方向Xと対向して配置され、開口周縁部が測定対象物13に当接される試料用穴14と、放射エネルギーを検出する検出器15が配置される検出穴16とを備える積分球18と、検出器15に接続される演算制御手段19とからなり、検出器15は、積分球18により多重散乱した測定対象物13からの放射エネルギーを検出穴16を介して検出し、演算制御手段19において既知の試料の放射率の測定値と比較して、測定対象物13の放射率を算出する。試料用穴14の開口周縁部に温度補正用の温度センサーが設けられている。
【選択図】 図1
Description
エネルギーのみを効果的に検出することが可能な位置として、例えば入射穴12と試料用穴14とを結ぶ線による軸に対して略90度方向の位置となる領域に配置されて開口形成されている。また、検出穴16の外側には、積分球13の周壁に取り付けられて、検出器15が設けられている。
11 赤外光源
12 入射穴
13 測定対象物
14 試料用穴
15 検出器
16 検出穴
17 積分球
18 演算制御手段
19 平行光照射手段
20 アンプ
21 A/Dコンバータ
22 画像表示部
23 CPU
24 RAM
25 ROM
X 入射方向
Claims (4)
- 赤外光源から放射エネルギーを入射させる入射穴と、該入射穴からの入射方向と対向して配置され、開口周縁部が測定対象物に当接される試料用穴と、放射エネルギーを検出する検出器が配置される検出穴とを備える積分球と、前記検出器に接続される演算制御手段とからなり、前記検出器は、前記積分球により多重散乱した測定対象物からの放射エネルギーを前記検出穴を介して検出し、前記演算制御手段において既知の試料の放射率の測定値と比較して、測定対象物の放射率を算出する放射率測定装置。
- 前記試料用穴の開口周縁部に温度センサーが設けられている請求項1に記載の放射率測定装置。
- 前記赤外光源と前記入射穴との間に、前記赤外光源からの放射エネルギーを平行光とするミラー又はレンズからなる平行光照射手段を備える請求項1又は2に記載の放射率測定装置。
- 前記赤外光源と前記検出器との間に光学フィルターを有しており、所定の波長範囲に分光した放射エネルギーを前記検出器で検出する請求項1〜3のいずれかに記載の放射率測定装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004286580A JP2006098295A (ja) | 2004-09-30 | 2004-09-30 | 放射率測定装置 |
EP05020719A EP1643225A1 (en) | 2004-09-30 | 2005-09-22 | Emissivity measuring device |
US11/237,941 US20060067376A1 (en) | 2004-09-30 | 2005-09-29 | Emissivity measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004286580A JP2006098295A (ja) | 2004-09-30 | 2004-09-30 | 放射率測定装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006098295A true JP2006098295A (ja) | 2006-04-13 |
Family
ID=35519811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004286580A Pending JP2006098295A (ja) | 2004-09-30 | 2004-09-30 | 放射率測定装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20060067376A1 (ja) |
EP (1) | EP1643225A1 (ja) |
JP (1) | JP2006098295A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012229925A (ja) * | 2011-04-25 | 2012-11-22 | Panasonic Corp | 放射率測定方法、放射率測定装置、検査方法、及び、検査装置 |
JP2013084403A (ja) * | 2011-10-07 | 2013-05-09 | Hitachi Appliances Inc | 誘導加熱調理器 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7696500B2 (en) * | 2008-03-20 | 2010-04-13 | Electro Optical Industries, Inc. | Fused test source |
WO2010084566A1 (ja) * | 2009-01-20 | 2010-07-29 | 大塚電子株式会社 | 量子効率測定装置および量子効率測定方法 |
DE102013010116B4 (de) | 2013-06-15 | 2019-01-24 | INPRO Innovationsgesellschaft für fortgeschrittene Produktionssysteme in der Fahrzeugindustrie mbH | Verfahren und Vorrichtung zum Messen des gerichteten Emissionsgrades eines Bauteils oder Prüfkörpers |
CN103344621B (zh) * | 2013-07-03 | 2015-12-02 | 重庆大学 | 一种荧光量子效率测量装置及其测量方法 |
CN105486711B (zh) * | 2015-11-20 | 2019-08-09 | 上海卫星装备研究所 | 基于红外热像仪的空间材料发射率测量系统及方法 |
CN106840411B (zh) * | 2017-02-06 | 2019-06-21 | 中国科学院上海光学精密机械研究所 | 红外透明材料法向光谱发射率测试装置 |
CN110174652A (zh) * | 2019-03-21 | 2019-08-27 | 上海航天测控通信研究所 | 一种星载微波成像仪天线在轨发射率的定标方法及装置 |
CN111272808B (zh) * | 2020-02-10 | 2023-01-13 | 渤海大学 | 红外积分球法向发射率测量模块 |
CN114184640B (zh) * | 2021-12-03 | 2023-07-04 | 渤海大学 | 一种基于积分球反射法的半球发射率测量方法 |
CN114184281A (zh) * | 2021-12-17 | 2022-03-15 | 矿冶科技集团有限公司 | 一种燃气介质下未知表面精准温控方法 |
CN114264375A (zh) * | 2022-01-04 | 2022-04-01 | 中国计量科学研究院 | 一种基于集成黑体法变飞行时间的材料发射率测量装置及测量方法 |
CN114878000B (zh) * | 2022-06-09 | 2022-11-18 | 中国计量科学研究院 | 一种基于透射式光路的多波长目标发射率分布特性测量装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5076663A (en) * | 1989-10-04 | 1991-12-31 | The United States Of America As Represented By The United States Department Of Energy | Corrosion protection for silver reflectors |
US5098195A (en) * | 1990-10-31 | 1992-03-24 | Information And Control Systems, Inc. | Directional spectral emissivity measurement system |
DE69312894T2 (de) * | 1992-12-29 | 1998-02-12 | Philips Electronics Nv | Pyrometer mit Emissionsmesser |
EP0605055B1 (en) * | 1992-12-29 | 1997-08-06 | Koninklijke Philips Electronics N.V. | Pyrometer including an emissivity meter |
US5326173A (en) * | 1993-01-11 | 1994-07-05 | Alcan International Limited | Apparatus and method for remote temperature measurement |
JPH07333064A (ja) * | 1994-06-07 | 1995-12-22 | Kobe Steel Ltd | 放射温度計 |
US5597237A (en) * | 1995-05-30 | 1997-01-28 | Quantum Logic Corp | Apparatus for measuring the emissivity of a semiconductor wafer |
US6461036B1 (en) * | 1999-03-29 | 2002-10-08 | Axcelis Technologies, Inc. | System and method for determining stray light in a thermal processing system |
US6781697B1 (en) * | 2002-01-16 | 2004-08-24 | Lockheed Martin Corporation | Portable system and method for determining one or more reflectance properties of a surface |
-
2004
- 2004-09-30 JP JP2004286580A patent/JP2006098295A/ja active Pending
-
2005
- 2005-09-22 EP EP05020719A patent/EP1643225A1/en not_active Ceased
- 2005-09-29 US US11/237,941 patent/US20060067376A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012229925A (ja) * | 2011-04-25 | 2012-11-22 | Panasonic Corp | 放射率測定方法、放射率測定装置、検査方法、及び、検査装置 |
JP2013084403A (ja) * | 2011-10-07 | 2013-05-09 | Hitachi Appliances Inc | 誘導加熱調理器 |
Also Published As
Publication number | Publication date |
---|---|
EP1643225A1 (en) | 2006-04-05 |
US20060067376A1 (en) | 2006-03-30 |
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