JPWO2021079589A1 - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JPWO2021079589A1 JPWO2021079589A1 JP2020568564A JP2020568564A JPWO2021079589A1 JP WO2021079589 A1 JPWO2021079589 A1 JP WO2021079589A1 JP 2020568564 A JP2020568564 A JP 2020568564A JP 2020568564 A JP2020568564 A JP 2020568564A JP WO2021079589 A1 JPWO2021079589 A1 JP WO2021079589A1
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- 239000000463 material Substances 0.000 claims abstract description 30
- 230000008021 deposition Effects 0.000 claims abstract description 4
- 230000010355 oscillation Effects 0.000 claims abstract description 4
- 238000004891 communication Methods 0.000 claims description 23
- 238000007740 vapor deposition Methods 0.000 abstract description 15
- 238000010586 diagram Methods 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 description 34
- 239000000758 substrate Substances 0.000 description 23
- 238000010438 heat treatment Methods 0.000 description 17
- 230000007723 transport mechanism Effects 0.000 description 13
- 239000013078 crystal Substances 0.000 description 12
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Polarising Elements (AREA)
- Glass Compositions (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
上記成膜源は、上記真空容器に収容される。
上記収容容器は、上記真空容器に収容され、上記真空容器内の圧力よりも高い圧力に維持することができる。
上記膜厚センサは、共振周波数を有する振動子を含み、上記膜厚センサには、上記振動子に上記成膜源から放出する成膜材料が堆積する。
上記膜厚コントローラは、上記収容容器に収容され、上記成膜材料の堆積による上記発振周波数の変化に基づいて、上記成膜源からの上記成膜材料の放出量を算出する。
上記主コントローラは、上記真空容器外に設けられ、上記リンク配管は、上記真空容器の内部で上記収容容器に連結され、上記リンク配管の内部に、上記通信配線が配設されてもよい。
10…真空容器
10h…開口
10…基板
20…成膜源
20m…成膜材料
21…噴出ノズル
30…加熱機構
40…膜厚センサ
41…膜厚コントローラ
41u…膜厚コントローラユニット
50…温度センサ
51…温度コントローラ
51u…温度コントローラユニット
60…主コントローラ
60u…主コントローラユニット
70、73…収容容器
71…コントローラモジュール
75…スペーサ
80…リンク配管
90…基板
90a…領域
92…基板支持機構
95、96…搬送機構
98…排気機構
401…アーム
411…配線
601、602、603…配線
801、802、803、804、805…配管
Claims (8)
- 真空容器と、
前記真空容器に収容された成膜源と、
前記真空容器に収容され、前記真空容器内の圧力よりも高い圧力に維持することが可能な収容容器と、
共振周波数を有する振動子を含み、前記振動子に前記成膜源から放出する成膜材料が堆積する膜厚センサと、
前記収容容器に収容され、前記成膜材料の堆積による前記発振周波数の変化に基づいて、前記成膜源からの前記成膜材料の放出量を算出する膜厚コントローラと
を具備する成膜装置。 - 請求項1に記載された成膜装置であって、
前記膜厚コントローラが算出する前記放出量に基づいて、前記成膜源から放出する前記成膜材料の放出量を制御する主コントローラをさらに具備する
成膜装置。 - 請求項2に記載された成膜装置であって、
互いに連結された複数の配管を有し、隣り合う配管同士が屈曲可能に連結されたリンク配管と、
前記膜厚コントローラと、前記主コントローラとの間を通信させる通信配線と
をさらに具備し、
前記主コントローラは、前記真空容器外に設けられ、
前記リンク配管は、前記真空容器の内部で前記収容容器に連結され、
前記リンク配管の内部に、前記通信配線が配設された
成膜装置。 - 請求項3に記載された成膜装置であって、
前記膜厚コントローラと前記主コントローラとが前記通信配線を通じてデジタル通信により通信をする
成膜装置。 - 請求項2に記載された成膜装置であって、
前記主コントローラが前記収容容器に収容された
成膜装置。 - 請求項1〜5のいずれか1つに記載された成膜装置であって、
前記収容容器の圧力が大気圧である
成膜装置。 - 請求項1〜6のいずれか1つに記載された成膜装置であって、
前記成膜源は、前記真空容器の内部で前記収容容器に連動して移動する
成膜装置。 - 請求項5〜7のいずれか1つに記載された成膜装置であって、
前記膜厚コントローラと前記主コントローラとは、前記収容容器の内部にコントローラモジュールとして一体となって構成されている
成膜装置。
Applications Claiming Priority (3)
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JP2019192061 | 2019-10-21 | ||
JP2019192061 | 2019-10-21 | ||
PCT/JP2020/030210 WO2021079589A1 (ja) | 2019-10-21 | 2020-08-06 | 成膜装置 |
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JPWO2021079589A1 true JPWO2021079589A1 (ja) | 2021-11-18 |
JP7080354B2 JP7080354B2 (ja) | 2022-06-03 |
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JP (1) | JP7080354B2 (ja) |
KR (1) | KR102615500B1 (ja) |
CN (1) | CN113302332B (ja) |
TW (1) | TWI813898B (ja) |
WO (1) | WO2021079589A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101097593B1 (ko) * | 2011-03-11 | 2011-12-22 | 주식회사 선익시스템 | 박막의 두께 제어의 정확도 향상을 위한 박막 증착 장치 |
JP2014070238A (ja) * | 2012-09-28 | 2014-04-21 | Hitachi High-Technologies Corp | 真空蒸着装置及びその蒸着方法 |
JP2016069694A (ja) * | 2014-09-30 | 2016-05-09 | キヤノントッキ株式会社 | 真空蒸着装置 |
Family Cites Families (4)
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GB9816796D0 (en) * | 1998-08-03 | 1998-09-30 | Henrob Ltd | Improvements in or relating to fastening machines |
JP2012111974A (ja) | 2010-11-19 | 2012-06-14 | Olympus Corp | 成膜方法および成膜装置 |
JP2013206820A (ja) | 2012-03-29 | 2013-10-07 | Samsung Display Co Ltd | 有機elデバイス製造装置及び有機elデバイス製造方法 |
KR102137181B1 (ko) * | 2013-12-06 | 2020-08-13 | 어플라이드 머티어리얼스, 인코포레이티드 | 증착 배열체, 증착 장치 및 그의 동작 방법들 |
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- 2020-08-06 WO PCT/JP2020/030210 patent/WO2021079589A1/ja active Application Filing
- 2020-08-06 KR KR1020217018296A patent/KR102615500B1/ko active IP Right Grant
- 2020-08-06 CN CN202080007249.9A patent/CN113302332B/zh active Active
- 2020-08-06 JP JP2020568564A patent/JP7080354B2/ja active Active
- 2020-08-19 TW TW109128154A patent/TWI813898B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101097593B1 (ko) * | 2011-03-11 | 2011-12-22 | 주식회사 선익시스템 | 박막의 두께 제어의 정확도 향상을 위한 박막 증착 장치 |
JP2014070238A (ja) * | 2012-09-28 | 2014-04-21 | Hitachi High-Technologies Corp | 真空蒸着装置及びその蒸着方法 |
JP2016069694A (ja) * | 2014-09-30 | 2016-05-09 | キヤノントッキ株式会社 | 真空蒸着装置 |
Also Published As
Publication number | Publication date |
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WO2021079589A1 (ja) | 2021-04-29 |
TWI813898B (zh) | 2023-09-01 |
CN113302332B (zh) | 2023-09-08 |
CN113302332A (zh) | 2021-08-24 |
KR102615500B1 (ko) | 2023-12-19 |
TW202129036A (zh) | 2021-08-01 |
KR20210089760A (ko) | 2021-07-16 |
JP7080354B2 (ja) | 2022-06-03 |
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