JPWO2021079565A5 - - Google Patents

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Publication number
JPWO2021079565A5
JPWO2021079565A5 JP2021554071A JP2021554071A JPWO2021079565A5 JP WO2021079565 A5 JPWO2021079565 A5 JP WO2021079565A5 JP 2021554071 A JP2021554071 A JP 2021554071A JP 2021554071 A JP2021554071 A JP 2021554071A JP WO2021079565 A5 JPWO2021079565 A5 JP WO2021079565A5
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JP
Japan
Prior art keywords
electrode layer
support electrode
layer
capacitor
counter electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021554071A
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English (en)
Japanese (ja)
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JP7248143B2 (ja
JPWO2021079565A1 (https=
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Priority claimed from PCT/JP2020/026830 external-priority patent/WO2021079565A1/ja
Publication of JPWO2021079565A1 publication Critical patent/JPWO2021079565A1/ja
Publication of JPWO2021079565A5 publication Critical patent/JPWO2021079565A5/ja
Application granted granted Critical
Publication of JP7248143B2 publication Critical patent/JP7248143B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021554071A 2019-10-24 2020-07-09 複合キャパシタ Active JP7248143B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019193612 2019-10-24
JP2019193612 2019-10-24
PCT/JP2020/026830 WO2021079565A1 (ja) 2019-10-24 2020-07-09 複合キャパシタ

Publications (3)

Publication Number Publication Date
JPWO2021079565A1 JPWO2021079565A1 (https=) 2021-04-29
JPWO2021079565A5 true JPWO2021079565A5 (https=) 2022-06-24
JP7248143B2 JP7248143B2 (ja) 2023-03-29

Family

ID=75619732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021554071A Active JP7248143B2 (ja) 2019-10-24 2020-07-09 複合キャパシタ

Country Status (3)

Country Link
US (1) US11955291B2 (https=)
JP (1) JP7248143B2 (https=)
WO (1) WO2021079565A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7151907B2 (ja) * 2019-09-25 2022-10-12 株式会社村田製作所 キャパシタおよびその製造方法
US11715594B2 (en) * 2021-05-27 2023-08-01 International Business Machines Corporation Vertically-stacked interdigitated metal-insulator-metal capacitor for sub-20 nm pitch
US12034039B2 (en) * 2021-10-18 2024-07-09 Globalfoundries Singapore Pte. Ltd. Three electrode capacitor structure using spaced conductive pillars

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003249417A (ja) * 2002-02-25 2003-09-05 Tdk Corp コンデンサ構造体およびその製造方法
JP4651355B2 (ja) 2004-10-27 2011-03-16 京セラ株式会社 可変容量コンデンサ
US7724498B2 (en) * 2006-06-30 2010-05-25 Intel Corporation Low inductance capacitors, methods of assembling same, and systems containing same
JP2014523841A (ja) * 2011-06-07 2014-09-18 ファーストキャップ・システムズ・コーポレイション ウルトラキャパシタのためのエネルギー貯蔵媒体
GB2501871B8 (en) 2012-05-03 2022-08-17 Dyson Technology Ltd Hybrid Capacitor
WO2017026233A1 (ja) 2015-08-10 2017-02-16 株式会社村田製作所 コンデンサ

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