JPWO2021070677A1 - - Google Patents
Info
- Publication number
- JPWO2021070677A1 JPWO2021070677A1 JP2021551305A JP2021551305A JPWO2021070677A1 JP WO2021070677 A1 JPWO2021070677 A1 JP WO2021070677A1 JP 2021551305 A JP2021551305 A JP 2021551305A JP 2021551305 A JP2021551305 A JP 2021551305A JP WO2021070677 A1 JPWO2021070677 A1 JP WO2021070677A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49575—Assemblies of semiconductor devices on lead frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
- B29C45/14655—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
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- B29C45/26—Moulds
- B29C45/2602—Mould construction elements
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- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/2608—Mould seals
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- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05218122A (ja) * | 1992-01-30 | 1993-08-27 | Nec Corp | 樹脂封止型半導体装置の樹脂封止金型 |
JPH05326594A (ja) * | 1992-05-22 | 1993-12-10 | Nec Corp | 半導体装置の樹脂封止金型と樹脂封止方法 |
JP2007042709A (ja) * | 2005-08-01 | 2007-02-15 | Seiko Epson Corp | 樹脂封止金型及び樹脂封止型電子部品 |
JP2010263066A (ja) * | 2009-05-07 | 2010-11-18 | Renesas Electronics Corp | 半導体装置の製造方法 |
JP2012146799A (ja) * | 2011-01-12 | 2012-08-02 | Renesas Electronics Corp | 半導体装置の製造方法 |
JP2013207083A (ja) * | 2012-03-28 | 2013-10-07 | Seiko Epson Corp | 電子デバイスの製造方法、及び樹脂成形型 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05218122A (ja) * | 1992-01-30 | 1993-08-27 | Nec Corp | 樹脂封止型半導体装置の樹脂封止金型 |
JPH05326594A (ja) * | 1992-05-22 | 1993-12-10 | Nec Corp | 半導体装置の樹脂封止金型と樹脂封止方法 |
JP2007042709A (ja) * | 2005-08-01 | 2007-02-15 | Seiko Epson Corp | 樹脂封止金型及び樹脂封止型電子部品 |
JP2010263066A (ja) * | 2009-05-07 | 2010-11-18 | Renesas Electronics Corp | 半導体装置の製造方法 |
JP2012146799A (ja) * | 2011-01-12 | 2012-08-02 | Renesas Electronics Corp | 半導体装置の製造方法 |
JP2013207083A (ja) * | 2012-03-28 | 2013-10-07 | Seiko Epson Corp | 電子デバイスの製造方法、及び樹脂成形型 |
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