JPWO2021070007A5 - - Google Patents

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Publication number
JPWO2021070007A5
JPWO2021070007A5 JP2021550723A JP2021550723A JPWO2021070007A5 JP WO2021070007 A5 JPWO2021070007 A5 JP WO2021070007A5 JP 2021550723 A JP2021550723 A JP 2021550723A JP 2021550723 A JP2021550723 A JP 2021550723A JP WO2021070007 A5 JPWO2021070007 A5 JP WO2021070007A5
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JP
Japan
Prior art keywords
insulating layer
layer
transistor
metal oxide
region
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JP2021550723A
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English (en)
Japanese (ja)
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JPWO2021070007A1 (https=
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Publication date
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Priority claimed from PCT/IB2020/059121 external-priority patent/WO2021070007A1/ja
Publication of JPWO2021070007A1 publication Critical patent/JPWO2021070007A1/ja
Publication of JPWO2021070007A5 publication Critical patent/JPWO2021070007A5/ja
Priority to JP2025196433A priority Critical patent/JP2026027469A/ja
Withdrawn legal-status Critical Current

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JP2021550723A 2019-10-11 2020-09-30 Withdrawn JPWO2021070007A1 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025196433A JP2026027469A (ja) 2019-10-11 2025-11-17 半導体装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019187495 2019-10-11
JP2019226701 2019-12-16
PCT/IB2020/059121 WO2021070007A1 (ja) 2019-10-11 2020-09-30 半導体装置

Related Child Applications (1)

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JP2025196433A Division JP2026027469A (ja) 2019-10-11 2025-11-17 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2021070007A1 JPWO2021070007A1 (https=) 2021-04-15
JPWO2021070007A5 true JPWO2021070007A5 (https=) 2023-10-06

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ID=75436802

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JP2021550723A Withdrawn JPWO2021070007A1 (https=) 2019-10-11 2020-09-30
JP2025196433A Pending JP2026027469A (ja) 2019-10-11 2025-11-17 半導体装置

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JP2025196433A Pending JP2026027469A (ja) 2019-10-11 2025-11-17 半導体装置

Country Status (3)

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US (2) US12477837B2 (https=)
JP (2) JPWO2021070007A1 (https=)
WO (1) WO2021070007A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7710994B2 (ja) 2019-12-27 2025-07-22 株式会社半導体エネルギー研究所 半導体装置
TW202349459A (zh) * 2022-04-15 2023-12-16 日商半導體能源研究所股份有限公司 疊層體的製造方法及半導體裝置的製造方法

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