JPWO2021048136A5 - - Google Patents

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Publication number
JPWO2021048136A5
JPWO2021048136A5 JP2022514620A JP2022514620A JPWO2021048136A5 JP WO2021048136 A5 JPWO2021048136 A5 JP WO2021048136A5 JP 2022514620 A JP2022514620 A JP 2022514620A JP 2022514620 A JP2022514620 A JP 2022514620A JP WO2021048136 A5 JPWO2021048136 A5 JP WO2021048136A5
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JP
Japan
Prior art keywords
coating
substrate
coating layer
thickness
bias voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2022514620A
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English (en)
Japanese (ja)
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JP2022547879A5 (https=
JP7621342B2 (ja
JP2022547879A (ja
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Priority claimed from DE102019124616.4A external-priority patent/DE102019124616A1/de
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Publication of JP2022547879A5 publication Critical patent/JP2022547879A5/ja
Publication of JPWO2021048136A5 publication Critical patent/JPWO2021048136A5/ja
Application granted granted Critical
Publication of JP7621342B2 publication Critical patent/JP7621342B2/ja
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JP2022514620A 2019-09-12 2020-09-08 多層コーティング Active JP7621342B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102019124616.4A DE102019124616A1 (de) 2019-09-12 2019-09-12 Mehrlagige Beschichtung
DE102019124616.4 2019-09-12
PCT/EP2020/075095 WO2021048136A2 (de) 2019-09-12 2020-09-08 Mehrlagige beschichtung

Publications (4)

Publication Number Publication Date
JP2022547879A JP2022547879A (ja) 2022-11-16
JP2022547879A5 JP2022547879A5 (https=) 2023-05-09
JPWO2021048136A5 true JPWO2021048136A5 (https=) 2023-05-09
JP7621342B2 JP7621342B2 (ja) 2025-01-24

Family

ID=72659158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022514620A Active JP7621342B2 (ja) 2019-09-12 2020-09-08 多層コーティング

Country Status (6)

Country Link
US (1) US12221687B2 (https=)
EP (1) EP4028569A2 (https=)
JP (1) JP7621342B2 (https=)
CN (1) CN114423882B (https=)
DE (1) DE102019124616A1 (https=)
WO (1) WO2021048136A2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3163079A1 (fr) * 2024-06-11 2025-12-12 Airbus Operations Sas Procédé et système de traitement de surface d’un élément de fixation, utilisant un dispositif de pulvérisation magnétron impulsionnelle à haute puissance.
DE102024123805A1 (de) * 2024-08-20 2026-02-26 Cemecon Ag. Beschichtung eines nichtleitenden oder gering leitfähigen Substrats

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5330853A (en) * 1991-03-16 1994-07-19 Leybold Ag Multilayer Ti-Al-N coating for tools
JPH09118973A (ja) * 1995-10-26 1997-05-06 Ishikawajima Harima Heavy Ind Co Ltd 薄膜の作成法および作成装置
US8173278B2 (en) 2006-04-21 2012-05-08 Cemecon Ag Coated body
DE102006019000A1 (de) * 2006-04-25 2007-12-13 Vtd Vakuumtechnik Dresden Gmbh Einrichtung und Verfahren zur plasmagestützten Abscheidung von Hartstoffschichten
EP2042261A3 (en) 2007-09-26 2015-02-18 Sandvik Intellectual Property AB Method of making a coated cutting tool
EP2272080B1 (de) * 2008-04-28 2012-08-01 CemeCon AG Vorrichtung und verfahren zum vorbehandeln und beschichten von körpern
JP2010102805A (ja) * 2008-10-27 2010-05-06 Hitachi Global Storage Technologies Netherlands Bv トンネル接合型磁気抵抗効果ヘッド
JP6093363B2 (ja) 2011-09-30 2017-03-08 セメコン アーゲー Ｈｉｐｉｍｓを用いた基材のコーティング
FR3025929B1 (fr) 2014-09-17 2016-10-21 Commissariat Energie Atomique Gaines de combustible nucleaire, procedes de fabrication et utilisation contre l'oxydation.
MY179440A (en) * 2015-06-02 2020-11-06 Fuji Electric Co Ltd Method for producing magnetic recording medium
CN108291299B (zh) * 2015-11-27 2021-09-17 塞梅孔公司 用金刚石层和硬质材料层涂覆体
DE102017111784A1 (de) * 2017-05-30 2018-12-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtetes Substrat mit titanhaltiger Beschichtung und modifizierter Titanoxidbeschichtung
US20190088457A1 (en) 2017-09-19 2019-03-21 Applied Materials, Inc. Sync controller for high impulse magnetron sputtering
DE102020116157A1 (de) * 2020-06-18 2021-12-23 Cemecon Ag. Verfahren und Vorrichtung zum Aufbringen einer Beschichtung sowie beschichteter Körper

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