DE102019124616A1 - Mehrlagige Beschichtung - Google Patents
Mehrlagige Beschichtung Download PDFInfo
- Publication number
- DE102019124616A1 DE102019124616A1 DE102019124616.4A DE102019124616A DE102019124616A1 DE 102019124616 A1 DE102019124616 A1 DE 102019124616A1 DE 102019124616 A DE102019124616 A DE 102019124616A DE 102019124616 A1 DE102019124616 A1 DE 102019124616A1
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- Prior art keywords
- coating
- substrate
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- layers
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- 239000000758 substrate Substances 0.000 claims abstract description 76
- 239000011247 coating layer Substances 0.000 claims abstract description 60
- 230000008569 process Effects 0.000 claims abstract description 28
- 238000000992 sputter etching Methods 0.000 claims abstract description 20
- 238000000168 high power impulse magnetron sputter deposition Methods 0.000 claims description 34
- 238000005240 physical vapour deposition Methods 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 10
- 229910007991 Si-N Inorganic materials 0.000 claims description 6
- 229910006294 Si—N Inorganic materials 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
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- 229910033181 TiB2 Inorganic materials 0.000 description 16
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- 238000001755 magnetron sputter deposition Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910052743 krypton Inorganic materials 0.000 description 3
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
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Images
Classifications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C—CHEMISTRY; METALLURGY
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102019124616.4A DE102019124616A1 (de) | 2019-09-12 | 2019-09-12 | Mehrlagige Beschichtung |
| CN202080064726.5A CN114423882B (zh) | 2019-09-12 | 2020-09-08 | 多层涂层 |
| PCT/EP2020/075095 WO2021048136A2 (de) | 2019-09-12 | 2020-09-08 | Mehrlagige beschichtung |
| US17/642,462 US12221687B2 (en) | 2019-09-12 | 2020-09-08 | Multi-layer coating |
| JP2022514620A JP7621342B2 (ja) | 2019-09-12 | 2020-09-08 | 多層コーティング |
| EP20780569.8A EP4028569A2 (de) | 2019-09-12 | 2020-09-08 | Mehrlagige beschichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102019124616.4A DE102019124616A1 (de) | 2019-09-12 | 2019-09-12 | Mehrlagige Beschichtung |
Publications (1)
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|---|---|
| DE102019124616A1 true DE102019124616A1 (de) | 2021-03-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102019124616.4A Pending DE102019124616A1 (de) | 2019-09-12 | 2019-09-12 | Mehrlagige Beschichtung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12221687B2 (https=) |
| EP (1) | EP4028569A2 (https=) |
| JP (1) | JP7621342B2 (https=) |
| CN (1) | CN114423882B (https=) |
| DE (1) | DE102019124616A1 (https=) |
| WO (1) | WO2021048136A2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026041379A1 (de) | 2024-08-20 | 2026-02-26 | Cemecon Ag | Beschichtung eines nichtleitenden oder gering leitfähigen substrats |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3163079A1 (fr) * | 2024-06-11 | 2025-12-12 | Airbus Operations Sas | Procédé et système de traitement de surface d’un élément de fixation, utilisant un dispositif de pulvérisation magnétron impulsionnelle à haute puissance. |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006019000A1 (de) * | 2006-04-25 | 2007-12-13 | Vtd Vakuumtechnik Dresden Gmbh | Einrichtung und Verfahren zur plasmagestützten Abscheidung von Hartstoffschichten |
| WO2009132822A2 (de) * | 2008-04-28 | 2009-11-05 | Cemecon Ag | Vorrichtung und verfahren zum vorbehandeln und beschichten von körpern |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5330853A (en) * | 1991-03-16 | 1994-07-19 | Leybold Ag | Multilayer Ti-Al-N coating for tools |
| JPH09118973A (ja) * | 1995-10-26 | 1997-05-06 | Ishikawajima Harima Heavy Ind Co Ltd | 薄膜の作成法および作成装置 |
| US8173278B2 (en) | 2006-04-21 | 2012-05-08 | Cemecon Ag | Coated body |
| EP2042261A3 (en) | 2007-09-26 | 2015-02-18 | Sandvik Intellectual Property AB | Method of making a coated cutting tool |
| JP2010102805A (ja) * | 2008-10-27 | 2010-05-06 | Hitachi Global Storage Technologies Netherlands Bv | トンネル接合型磁気抵抗効果ヘッド |
| JP6093363B2 (ja) | 2011-09-30 | 2017-03-08 | セメコン アーゲー | Ｈｉｐｉｍｓを用いた基材のコーティング |
| FR3025929B1 (fr) | 2014-09-17 | 2016-10-21 | Commissariat Energie Atomique | Gaines de combustible nucleaire, procedes de fabrication et utilisation contre l'oxydation. |
| MY179440A (en) * | 2015-06-02 | 2020-11-06 | Fuji Electric Co Ltd | Method for producing magnetic recording medium |
| CN108291299B (zh) * | 2015-11-27 | 2021-09-17 | 塞梅孔公司 | 用金刚石层和硬质材料层涂覆体 |
| DE102017111784A1 (de) * | 2017-05-30 | 2018-12-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtetes Substrat mit titanhaltiger Beschichtung und modifizierter Titanoxidbeschichtung |
| US20190088457A1 (en) | 2017-09-19 | 2019-03-21 | Applied Materials, Inc. | Sync controller for high impulse magnetron sputtering |
| DE102020116157A1 (de) * | 2020-06-18 | 2021-12-23 | Cemecon Ag. | Verfahren und Vorrichtung zum Aufbringen einer Beschichtung sowie beschichteter Körper |
-
2019
- 2019-09-12 DE DE102019124616.4A patent/DE102019124616A1/de active Pending
-
2020
- 2020-09-08 WO PCT/EP2020/075095 patent/WO2021048136A2/de not_active Ceased
- 2020-09-08 JP JP2022514620A patent/JP7621342B2/ja active Active
- 2020-09-08 EP EP20780569.8A patent/EP4028569A2/de active Pending
- 2020-09-08 US US17/642,462 patent/US12221687B2/en active Active
- 2020-09-08 CN CN202080064726.5A patent/CN114423882B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006019000A1 (de) * | 2006-04-25 | 2007-12-13 | Vtd Vakuumtechnik Dresden Gmbh | Einrichtung und Verfahren zur plasmagestützten Abscheidung von Hartstoffschichten |
| WO2009132822A2 (de) * | 2008-04-28 | 2009-11-05 | Cemecon Ag | Vorrichtung und verfahren zum vorbehandeln und beschichten von körpern |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026041379A1 (de) | 2024-08-20 | 2026-02-26 | Cemecon Ag | Beschichtung eines nichtleitenden oder gering leitfähigen substrats |
| DE102024123805A1 (de) * | 2024-08-20 | 2026-02-26 | Cemecon Ag. | Beschichtung eines nichtleitenden oder gering leitfähigen Substrats |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114423882A (zh) | 2022-04-29 |
| WO2021048136A2 (de) | 2021-03-18 |
| JP7621342B2 (ja) | 2025-01-24 |
| US12221687B2 (en) | 2025-02-11 |
| EP4028569A2 (de) | 2022-07-20 |
| JP2022547879A (ja) | 2022-11-16 |
| CN114423882B (zh) | 2024-10-11 |
| WO2021048136A3 (de) | 2021-05-14 |
| US20220307123A1 (en) | 2022-09-29 |
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