JPWO2020044685A1 - ステージ装置 - Google Patents
ステージ装置 Download PDFInfo
- Publication number
- JPWO2020044685A1 JPWO2020044685A1 JP2020540066A JP2020540066A JPWO2020044685A1 JP WO2020044685 A1 JPWO2020044685 A1 JP WO2020044685A1 JP 2020540066 A JP2020540066 A JP 2020540066A JP 2020540066 A JP2020540066 A JP 2020540066A JP WO2020044685 A1 JPWO2020044685 A1 JP WO2020044685A1
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- Prior art keywords
- guide
- slider
- axis direction
- air
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000012986 modification Methods 0.000 description 12
- 230000004048 modification Effects 0.000 description 12
- 238000005192 partition Methods 0.000 description 12
- 238000005339 levitation Methods 0.000 description 6
- KFYRPLNVJVHZGT-UHFFFAOYSA-N Amitriptyline hydrochloride Chemical compound Cl.C1CC2=CC=CC=C2C(=CCCN(C)C)C2=CC=CC=C21 KFYRPLNVJVHZGT-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004590 computer program Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/26—Fluid-pressure drives
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/74—Sealings of sliding-contact bearings
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
Description
以降、Z軸方向において第2ガイド16に対して第1ガイド12が設けられる側を上側として説明する。
実施の形態では、アクチュエータ14がエアサーボアクチュエータである場合について説明したが、これには限定されない。アクチュエータ14は、第1ガイド12をY軸方向に駆動できればよく、例えばリニアモータであっても、ボイスコイルモータであって、回転型のモータとボールネジとを組み合わせたものであってもよい。
実施の形態では、第2ガイド16がリニアガイドである場合について説明したが、これには限定されない。
実施の形態では、2つの第2ガイド16がアクチュエータ14に対して互いに反対側に位置するように第1ガイド12に固定される場合について説明したが、これには限定されず、ステージ装置100は第2ガイド16を1つだけ備えていても、3以上備えていてもよい。
Claims (4)
- エアサーボ駆動のスライダと、
前記スライダの第1方向の移動を案内する第1ガイドと、
前記第1ガイドを第2方向に駆動するアクチュエータと、
前記第1ガイドの前記第2方向の移動を案内する第2ガイドと、を備えることを特徴とするステージ装置。 - 前記第1方向と前記第2方向とが直交していることを特徴とする請求項1に記載のステージ装置。
- 前記第2ガイドは、前記アクチュエータの両側に設けられていることを特徴とする請求項1または2に記載のステージ装置。
- 前記第2ガイドはリニアガイドであることを特徴とする請求項1から3のいずれかに記載のステージ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018161393 | 2018-08-30 | ||
JP2018161393 | 2018-08-30 | ||
PCT/JP2019/020883 WO2020044685A1 (ja) | 2018-08-30 | 2019-05-27 | ステージ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020044685A1 true JPWO2020044685A1 (ja) | 2021-09-09 |
JP7328975B2 JP7328975B2 (ja) | 2023-08-17 |
Family
ID=69642959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020540066A Active JP7328975B2 (ja) | 2018-08-30 | 2019-05-27 | ステージ装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7328975B2 (ja) |
TW (1) | TWI821323B (ja) |
WO (1) | WO2020044685A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI806474B (zh) * | 2021-04-01 | 2023-06-21 | 日商住友重機械工業股份有限公司 | 工作臺裝置、曝光裝置、檢查裝置及元件製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11344585A (ja) * | 1998-03-31 | 1999-12-14 | Nippon Seiko Kk | 2軸移動装置 |
JP2002110523A (ja) * | 2000-09-29 | 2002-04-12 | Sumitomo Heavy Ind Ltd | 露光装置 |
JP2002353118A (ja) * | 2001-05-28 | 2002-12-06 | Nikon Corp | ステージ装置及び露光装置 |
JP2004119426A (ja) * | 2002-09-24 | 2004-04-15 | Nikon Corp | 特殊雰囲気用エアガイド、ステージ装置及び露光装置 |
JP2004319902A (ja) * | 2003-04-18 | 2004-11-11 | Advantest Corp | ステージ装置及び露光装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006033910A (ja) * | 2004-07-12 | 2006-02-02 | Sumitomo Heavy Ind Ltd | リニアモータ及びこのリニアモータを用いたステージ装置 |
JP4899469B2 (ja) * | 2005-12-22 | 2012-03-21 | ウシオ電機株式会社 | 平面ステージ装置 |
TWI457193B (zh) * | 2006-03-02 | 2014-10-21 | Sumitomo Heavy Industries | Stage device |
JP5242218B2 (ja) * | 2008-03-31 | 2013-07-24 | 住友重機械工業株式会社 | Xyステージ装置 |
TWI547333B (zh) * | 2013-02-04 | 2016-09-01 | 旭東機械工業股份有限公司 | 雷射切割設備 |
JP6704658B2 (ja) * | 2016-10-13 | 2020-06-03 | 住友重機械工業株式会社 | ステージ装置 |
-
2019
- 2019-05-27 WO PCT/JP2019/020883 patent/WO2020044685A1/ja active Application Filing
- 2019-05-27 JP JP2020540066A patent/JP7328975B2/ja active Active
- 2019-07-02 TW TW108123194A patent/TWI821323B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11344585A (ja) * | 1998-03-31 | 1999-12-14 | Nippon Seiko Kk | 2軸移動装置 |
JP2002110523A (ja) * | 2000-09-29 | 2002-04-12 | Sumitomo Heavy Ind Ltd | 露光装置 |
JP2002353118A (ja) * | 2001-05-28 | 2002-12-06 | Nikon Corp | ステージ装置及び露光装置 |
JP2004119426A (ja) * | 2002-09-24 | 2004-04-15 | Nikon Corp | 特殊雰囲気用エアガイド、ステージ装置及び露光装置 |
JP2004319902A (ja) * | 2003-04-18 | 2004-11-11 | Advantest Corp | ステージ装置及び露光装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI821323B (zh) | 2023-11-11 |
TW202009094A (zh) | 2020-03-01 |
JP7328975B2 (ja) | 2023-08-17 |
WO2020044685A1 (ja) | 2020-03-05 |
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