JPWO2019199585A5 - - Google Patents

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JPWO2019199585A5
JPWO2019199585A5 JP2020555097A JP2020555097A JPWO2019199585A5 JP WO2019199585 A5 JPWO2019199585 A5 JP WO2019199585A5 JP 2020555097 A JP2020555097 A JP 2020555097A JP 2020555097 A JP2020555097 A JP 2020555097A JP WO2019199585 A5 JPWO2019199585 A5 JP WO2019199585A5
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Japan
Prior art keywords
overlay
weighing system
alignment
images
imaging system
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JP2020555097A
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Japanese (ja)
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JP7085642B2 (ja
JP2021521418A (ja
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Priority claimed from US15/948,941 external-priority patent/US10677588B2/en
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JP2020555097A 2018-04-09 2019-04-05 オーバレイ計量向けの局所的テレセントリシティ及び合焦最適化 Active JP7085642B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/948,941 US10677588B2 (en) 2018-04-09 2018-04-09 Localized telecentricity and focus optimization for overlay metrology
US15/948,941 2018-04-09
PCT/US2019/025917 WO2019199585A1 (en) 2018-04-09 2019-04-05 Localized telecentricity and focus optimization for overlay metrology

Publications (3)

Publication Number Publication Date
JP2021521418A JP2021521418A (ja) 2021-08-26
JPWO2019199585A5 true JPWO2019199585A5 (zh) 2022-04-08
JP7085642B2 JP7085642B2 (ja) 2022-06-16

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JP2020555097A Active JP7085642B2 (ja) 2018-04-09 2019-04-05 オーバレイ計量向けの局所的テレセントリシティ及び合焦最適化

Country Status (9)

Country Link
US (1) US10677588B2 (zh)
EP (1) EP3762900A4 (zh)
JP (1) JP7085642B2 (zh)
KR (1) KR102448698B1 (zh)
CN (1) CN111971712B (zh)
IL (1) IL277841B1 (zh)
SG (1) SG11202005972UA (zh)
TW (1) TWI781312B (zh)
WO (1) WO2019199585A1 (zh)

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