JPWO2019121899A5 - - Google Patents

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Publication number
JPWO2019121899A5
JPWO2019121899A5 JP2020534418A JP2020534418A JPWO2019121899A5 JP WO2019121899 A5 JPWO2019121899 A5 JP WO2019121899A5 JP 2020534418 A JP2020534418 A JP 2020534418A JP 2020534418 A JP2020534418 A JP 2020534418A JP WO2019121899 A5 JPWO2019121899 A5 JP WO2019121899A5
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JP
Japan
Prior art keywords
electrode
electrodes
temperature control
heat transfer
connecting piece
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JP2020534418A
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English (en)
Japanese (ja)
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JP2021507536A (ja
JP7274487B2 (ja
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Priority claimed from DE102017223592.6A external-priority patent/DE102017223592B4/de
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Publication of JPWO2019121899A5 publication Critical patent/JPWO2019121899A5/ja
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Publication of JP7274487B2 publication Critical patent/JP7274487B2/ja
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JP2020534418A 2017-12-21 2018-12-19 伝熱管を用いて電極を電気的に切り離された形で均一に温度制御するシステム及びそのようなシステムを備えた処理設備 Active JP7274487B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017223592.6 2017-12-21
DE102017223592.6A DE102017223592B4 (de) 2017-12-21 2017-12-21 System zur elektrisch entkoppelten, homogenen Temperierung einer Elektrode mittels Wärmeleitrohren sowie Bearbeitungsanlage mit einem solchen System
PCT/EP2018/085820 WO2019121899A1 (de) 2017-12-21 2018-12-19 System zur elektrisch entkoppelten, homogenen temperierung einer elektrode mittels wärmeleitrohren sowie bearbeitungsanlage mit einem solchen system

Publications (3)

Publication Number Publication Date
JP2021507536A JP2021507536A (ja) 2021-02-22
JPWO2019121899A5 true JPWO2019121899A5 (zh) 2023-04-17
JP7274487B2 JP7274487B2 (ja) 2023-05-16

Family

ID=64902075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020534418A Active JP7274487B2 (ja) 2017-12-21 2018-12-19 伝熱管を用いて電極を電気的に切り離された形で均一に温度制御するシステム及びそのようなシステムを備えた処理設備

Country Status (10)

Country Link
US (1) US20210090863A1 (zh)
EP (1) EP3729486B1 (zh)
JP (1) JP7274487B2 (zh)
KR (1) KR20200100749A (zh)
CN (2) CN209119039U (zh)
DE (1) DE102017223592B4 (zh)
EA (1) EA202000177A1 (zh)
ES (1) ES2960584T3 (zh)
SG (1) SG11202005224TA (zh)
WO (1) WO2019121899A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017223592B4 (de) * 2017-12-21 2023-11-09 Meyer Burger (Germany) Gmbh System zur elektrisch entkoppelten, homogenen Temperierung einer Elektrode mittels Wärmeleitrohren sowie Bearbeitungsanlage mit einem solchen System
DE102020124022A1 (de) 2020-09-15 2022-03-17 centrotherm international AG Werkstückträger, System und Betriebsverfahren für PECVD

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