JPWO2019117313A1 - 光偏波素子およびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 230000010287 polarization Effects 0.000 claims description 76
- 230000003287 optical effect Effects 0.000 claims description 50
- 238000000034 method Methods 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 8
- 238000005253 cladding Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims 1
- 238000000926 separation method Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 11
- 230000005855 radiation Effects 0.000 description 11
- 238000004088 simulation Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000003786 synthesis reaction Methods 0.000 description 9
- 230000008033 biological extinction Effects 0.000 description 8
- 238000013461 design Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005094 computer simulation Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- -1 for example Chemical compound 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000003094 perturbing effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
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- G—PHYSICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2726—Optical coupling means with polarisation selective and adjusting means in or on light guides, e.g. polarisation means assembled in a light guide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
- G02B6/2773—Polarisation splitting or combining
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2808—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs
- G02B6/2813—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs based on multimode interference effect, i.e. self-imaging
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Abstract
Description
図1A、Bは、実施形態1に係る光偏波素子の模式図であり、図1Aは上面図、図1Bは図1AのX−X線断面図である。
図2A、Bは、実施形態2に係る光偏波素子の模式図であり、図2Aは上面図、図2(b)は図2Bの領域Aの拡大図である。
図5は、実施形態3に係る光偏波素子の模式図である。光偏波素子30は、第1ポート導波路31aと、多モード干渉導波路31bと、2つの第2ポート導波路31ca、31cbと、クラッド32とを備えている。
図7は、実施形態4に係る光偏波素子の模式図である。光偏波素子40は、第1ポート導波路41aと、多モード干渉導波路41bと、2つの第2ポート導波路41ca、41cbと、クラッド42とを備えている。
11a、21a、31a、41a 第1ポート導波路
11b、21b、31b、41b 多モード干渉導波路
11ba、11bb、21ba、21bb、31ba、41ba スリット
11ca、11cb、21ca、21cb、31ca、31cb、41ca、41cb 第2ポート導波路
12、22、32、42 クラッド
12a 下部クラッド
12b 上部クラッド
A 領域
L1、L2、L3 光
Claims (9)
- 第1ポート導波路と、
2つの第2ポート導波路と、
前記第1ポート導波路及び前記2つの第2ポート導波路と光学的に接続された多モード干渉導波路と、
を備え、前記多モード干渉導波路にはスリットが形成されており、該スリットは、前記第1ポート導波路から入力された互いに直交する偏波の光のそれぞれに対して、前記多モード干渉導波路が異なる実効屈折率を与え、これにより前記互いに直交する偏波の光が分離されて前記2つの第2ポート導波路のそれぞれから出力される形状に形成されていることを特徴とする光偏波素子。 - 前記スリットは、前記第1ポート導波路から前記2つの第2ポート導波路へ向かう方向に延伸していることを特徴とする請求項1に記載の光偏波素子。
- 前記スリットが複数形成されていることを特徴とする請求項1または2に記載の光偏波素子。
- 前記スリットは略直線状であることを特徴とする請求項1〜3のいずれか一つに記載の光偏波素子。
- 前記スリットの幅が0.3μm以上、5.0μm以下であることを特徴とする請求項1〜4のいずれか一つに記載の光偏波素子。
- 前記第1ポート導波路、前記第2ポート導波路および前記多モード干渉導波路の各導波路の外周を取り囲むクラッドを備えており、
前記クラッドに対する前記各導波路の比屈折率差が0.7%以上であることを特徴とする請求項1〜5のいずれか一つに記載の光偏波素子。 - 前記第1ポート導波路、前記第2ポート導波路および前記多モード干渉導波路はジルコニアを含む石英系ガラス材料からなることを特徴とする請求項1〜6のいずれか一つに記載の光偏波素子。
- 第1ポート導波路と、
2つの第2ポート導波路と、
前記第1ポート導波路及び前記2つの第2ポート導波路と光学的に接続された矩形の多モード干渉導波路と、
を備え、前記多モード干渉導波路には1以上のスリットが形成されており、該スリットは、前記第1ポート導波路から前記2つの第2ポート導波路へ向かう方向に略平行に延伸していることを特徴とする光偏波素子。 - 第1ポート導波路と、2つの第2ポート導波路と、前記第1ポート導波路及び前記2つの第2ポート導波路と光学的に接続された多モード干渉導波路との導波路形状を形成する工程と、
前記多モード干渉導波路にスリットを形成する工程と、
を含み、前記スリットを、前記第1ポート導波路から入力された互いに直交する偏波の光のそれぞれに対して、前記多モード干渉導波路が異なる実効屈折率を与え、これにより前記互いに直交する偏波の光が分離されて前記2つの第2ポート導波路のそれぞれから出力される形状に形成することを特徴とする光偏波素子の製造方法。
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