JPWO2018100826A1 - 基板処理装置、半導体装置の製造方法及びプログラム - Google Patents
基板処理装置、半導体装置の製造方法及びプログラム Download PDFInfo
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- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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Abstract
Description
Claims (12)
- ボートに載置された状態の基板を加熱するヒータユニットと、所定の温度に維持するよう前記ヒータユニットを制御する温度制御部と、反応管に向けて供給するガスの流量を調整する制御バルブの開度を調整するバルブ制御部と、所定の昇温レートで前記所定の温度まで昇温させる昇温ステップ、前記所定の温度で前記基板を処理する処理ステップ、前記所定の温度から所定の降温レートで降温させる降温ステップを含むレシピを実行指示する制御部と、を備え、前記制御部は、前記ヒータユニットによる加熱及び前記制御バルブから供給されるガスによる冷却を並行させて、前記所定の昇温レート及び前記所定の降温レートに追従させるように、前記温度制御部及び前記バルブ制御部を制御するよう構成されている基板処理装置。
- 更に、複数の冷却ゾーンに分割され、前記冷却ゾーン毎に前記制御バルブを設けるクーリングユニットを有し、前記制御バルブは、前記冷却ゾーン毎に個別に開度が調整されるよう構成されている請求項1記載の基板処理装置。
- 前記制御ゾーンの数と前記冷却ゾーンの数が一致するように構成されている請求項2に記載の基板処理装置。
- 前記制御部は、前記ヒータユニットによる加熱及び前記制御バルブから供給されるガスによる冷却を並行させて、前記昇温ステップから前記処理ステップへの移行時において発生するオーバシュートの時間を短縮させるように、前記温度制御部及び前記バルブ制御部を制御するよう構成されている請求項1記載の基板処理装置。
- 前記制御部は、前記制御バルブから供給されるガスによる冷却により、前記降温ステップの時間を短縮させるように、前記バルブ制御部を制御するよう構成されている請求項1記載の基板処理装置。
- 前記制御ゾーン毎に設けられた熱電対を有し、前記制御部は、基準ゾーンに選択された基準ゾーンの温度を検出する熱電対と、基準ゾーン以外に設けられた熱電対との温度偏差がゼロになるように前記温度制御部及び前記制御バルブを制御するよう構成されている請求項1記載の基板処理装置。
- 前記温度制御部は、前記基準ゾーンの温度を検出する熱電対と前記制御部からの設定値から算出された基準設定値との偏差がゼロになるように前記制御バルブを制御するように構成されている請求項6記載の基板処理装置。
- 前記制御部は、前記ヒータユニットによる加熱及び前記制御バルブから供給されるガスによる冷却を並行させて、前記昇温ステップから前記処理ステップへの移行時において発生するオーバシュートの時間を短縮させるように、前記温度制御部及び前記バルブ制御部に制御するよう構成されている請求項1記載の基板処理装置。
- 前記制御部は、前記昇温ステップにおいて、前記所定の温度に到達する前に前記制御バルブから供給されるガスを停止させるように前記バルブ制御部を制御するよう構成されている請求項1に記載の基板処理装置。
- 更に、前記レシピは、複数枚の基板をボートに保持させて、前記反応管内に装入するボートロードステップを有し、前記制御部は、前記ヒータユニットによる加熱及び前記制御バルブから供給されるガスによる冷却を並行させて、前記ボートロードステップにおいて発生するオーバシュートの時間を短縮させるように、前記温度制御部及び前記バルブ制御部に制御するよう構成されている請求項1記載の基板処理装置。
- 複数枚の基板をボートに保持させて、反応管内に装入する工程と、前記反応管内の温度を所定の昇温レートで所定の温度にする昇温工程と、ヒータユニットにより前記所定の温度に制御しつつ、前記基板を処理する工程と、前記反応管内の温度を所定の降温レートで前記所定の温度よりも低い温度にする降温工程と、を有する半導体装置の製造方法であって、前記昇温工程において、前記ヒータユニットによる加熱及び制御バルブから供給されるガスによる冷却を並行させて前記所定の昇温レートに追従させ、前記降温工程において、前記ヒータユニットによる加熱及び制御バルブから供給されるガスによる冷却を並行させて前記所定の降温レートに追従させる半導体装置の製造方法。
- 反応管内の温度を所定の温度に維持するよう、前記反応管内に装入されたボートに載置された基板を加熱するヒータユニットを制御する温度制御部と、前記反応管に向けて供給されるガスの流量を調整する制御バルブの開度を調整するバルブ制御部と、を備えた基板処理装置に、複数枚の基板をボートに保持させる手順と、前記ボートを反応管に装入する手順と、前記反応管内の温度を所定の昇温レートで所定の温度に昇温する手順と、前記所定の温度に制御しつつ、前記基板を処理する手順と、前記反応管内の温度を所定の降温レートで前記所定の温度よりも低い温度に降温する手順と、を実行させるプログラムであって、前記昇温する手順において、前記ヒータユニットによる加熱及び前記制御バルブから供給されるガスによる冷却を並行させて前記所定の昇温レートに追従させ、前記降温する手順において、前記ヒータユニットによる加熱及び前記制御バルブから供給されるガスによる冷却を並行させて前記所定の降温レートに追従させるプログラム。
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US11043402B2 (en) * | 2017-09-12 | 2021-06-22 | Kokusai Electric Corporation | Cooling unit, heat insulating structure, and substrate processing apparatus |
JP6843087B2 (ja) * | 2018-03-12 | 2021-03-17 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置およびプログラム |
US10903096B2 (en) * | 2018-04-06 | 2021-01-26 | Varian Semiconductor Equipment Associates, Inc. | System and apparatus for process chamber window cooling |
KR102255315B1 (ko) * | 2019-06-17 | 2021-05-25 | 에스케이하이닉스 주식회사 | 기판 처리장치 및 기판 처리방법 |
KR20210132605A (ko) * | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 냉각 가스 공급부를 포함한 수직형 배치 퍼니스 어셈블리 |
CN111610714A (zh) * | 2020-05-20 | 2020-09-01 | 杭州舒尔姿氨纶有限公司 | 一种dcs对电加热器的线性控制方法 |
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WO2022070310A1 (ja) * | 2020-09-30 | 2022-04-07 | 株式会社Kokusai Electric | 基板処理装置、温度制御プログラム、半導体装置の製造方法及び温度制御方法 |
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