JPWO2018079174A1 - 化学物質濃縮器および化学物質検出装置 - Google Patents
化学物質濃縮器および化学物質検出装置 Download PDFInfo
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Abstract
Description
111 下基板
111A 内壁
112 上基板
12,12a〜12i 電極(第1の電極、第3の電極)
13,13a〜13i 電極(第2の電極、第4の電極)
14,14a〜14i 吸着材
141 ナノワイヤ
142 多孔質体
143 空隙
15 冷却部
16 断熱層
17,17a〜17i 材料層
18 電極(第3の電極)
19 電極(第4の電極)
20,20A,20B,20C,20D,20E 化学物質濃縮器
21 検出部
211 検出素子
22 電流供給部
23 制御部
25,25a〜25i,26,27 電極配線
40 化学物質検出装置
90 気体試料
92 化学物質
111 下基板
111A 内壁
112 上基板
12,12a〜12i 電極(第1の電極、第3の電極)
13,13a〜13i 電極(第2の電極、第4の電極)
14,14a〜14i 吸着材
141 ナノワイヤ
142 吸着材
143 空隙
15 冷却部
16 断熱層
17,17a〜17i 材料層
18 電極(第3の電極)
19 電極(第4の電極)
20,20A,20B,20C,20D,20E 化学物質濃縮器
21 検出部
211 検出素子
22 電流供給部
23 制御部
25,25a〜25i,26,27 電極配線
40 化学物質検出装置
90 気体試料
92 化学物質
Claims (18)
- 気体試料に含まれる化学物質を濃縮する化学物質濃縮器であって、
前記気体試料が流れる中空部分を構成し、前記中空部分に面する第1の内壁を有する流路と、
前記流路の前記第1の内壁上に設けられた第1の電極と、
前記第1の電極と離間して前記第1の内壁上に設けられた第2の電極と、
前記第1の電極と前記第2の電極とに接続されて、通電により熱を発生する第1の電極配線と、
前記第1の電極配線上に設けられて前記発生した熱を伝達する第1の材料層と、
前記第1の材料層上に設けられて、前記化学物質を吸着し、かつ前記伝達された熱により前記吸着した化学物質を脱離させる第1の吸着材と、
を備えた化学物質濃縮器。 - 前記第1の電極配線の長さは前記第1の電極と前記第2の電極との間の距離よりも長い、請求項1に記載の化学物質濃縮器。
- 前記第1の電極配線は、直線部と、前記直線部に繋がる折り返し部とを有する、請求項2に記載の化学物質濃縮器。
- 前記第1の電極配線はミアンダ形状を有する、請求項3に記載の化学物質濃縮器。
- 前記第1の電極配線は曲線部を有する、請求項2に記載の化学物質濃縮器。
- 前記第1の吸着材は導電性のナノワイヤよりなる、請求項1に記載の化学物質濃縮器。
- 前記ナノワイヤおよび前記第1の材料層は同じ金属酸化物を含む、請求項6に記載の化学物質濃縮器。
- 前記ナノワイヤは金属酸化物と、前記金属酸化物で覆われたカーボンナノチューブとを有する、請求項6に記載の化学物質濃縮器。
- 前記第1の吸着材は導電性の多孔質体よりなる、請求項1に記載の化学物質濃縮器。
- 前記第1の材料層上に設けられた第3の電極と、
前記第1の材料層上に設けられた第4の電極と、
をさらに備え、
前記第1の材料層は前記第1の電極と前記第2の電極とまで延び、
前記第1の材料層は前記第1の電極と前記第3の電極とで挟まれており、かつ前記第2の電極と前記第4の電極とで挟まれている、請求項1に記載の化学物質濃縮器。 - 前記第1の材料層は、前記第1の電極と前記第2の電極とが設けられた第1の表面と、前記第1の表面の反対側で前記第3の電極と前記第4の電極とが設けられた第2の表面と、前記第1の表面と前記第2の表面とに繋がる第1の側面と、前記第1の側面の反対側で前記第1の表面と前記第2の表面とに繋がる第2の側面とを有し、
前記第3の電極は前記第1の材料層の前記第1の表面の一部と前記第1の側面とを覆うとともに前記第1の電極と接触し、
前記第4の電極は前記第1の材料層の前記第2の表面の一部と前記第2の側面とを覆うとともに前記第2の電極と接触している、請求項10に記載の化学物質濃縮器。 - 前記第1の吸着材を冷却する冷却部をさらに備えた、請求項1から11のいずれか一項に記載の化学物質濃縮器。
- 前記第1の内壁と前記第1の材料層との間に設けられた断熱層をさらに備えた、請求項1から12のいずれか一項に記載の化学物質濃縮器。
- 前記流路は、前記中空部分に面してかつ前記中空部分を介して前記第1の内壁に対向する第2の内壁をさらに有する、請求項1に記載の化学物質濃縮器。
- 熱を伝達する第2の材料層と、
前記第2の材料層上に設けられて、前記化学物質を吸着し、かつ前記伝達された熱により前記吸着した化学物質を脱離させる第2の吸着材と、
をさらに備えた、請求項1に記載の化学物質濃縮器。 - 前記第1の吸着材と前記第2の吸着材とは、材料または表面に設けられた表面コートが互いに異なる、請求項15に記載の化学物質濃縮器。
- 前記流路内に設けられた第3の電極と、
前記第3の電極と離間して前記流路内に設けられた第4の電極と、
前記第3の電極と前記第4の電極とに接続されて、通電により熱を発生する第2の電極配線と、
前記第1の電極と前記前記第2の電極と前記第3の電極と前記第4の電極とに選択的に電流を供給する電流供給部と、
をさらに備え、
前記第2の材料層は、前記第2の電極配線上に設けられて前記第2の電極配線で発生した前記熱を伝達し、
前記第2の吸着材は、前記第2の材料層上に設けられて前記化学物質を吸着し、かつ前記伝達された熱により前記吸着した化学物質を脱離させる、請求項15または16に記載の化学物質濃縮器。 - 請求項1に記載の化学物質濃縮器と、
前記濃縮された化学物質を検出する検出部と、
を備えた、化学物質検出装置。
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US11169059B2 (en) | 2021-11-09 |
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