JPWO2018003634A1 - 半導体集積回路装置 - Google Patents
半導体集積回路装置 Download PDFInfo
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- JPWO2018003634A1 JPWO2018003634A1 JP2018525098A JP2018525098A JPWO2018003634A1 JP WO2018003634 A1 JPWO2018003634 A1 JP WO2018003634A1 JP 2018525098 A JP2018525098 A JP 2018525098A JP 2018525098 A JP2018525098 A JP 2018525098A JP WO2018003634 A1 JPWO2018003634 A1 JP WO2018003634A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 66
- 239000002070 nanowire Substances 0.000 claims description 118
- 238000004519 manufacturing process Methods 0.000 description 34
- 239000000758 substrate Substances 0.000 description 20
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000000945 filler Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
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Abstract
Description
第1実施形態では、半導体集積回路装置は複数のスタンダードセルを備えており、この複数のスタンダードセルのうち少なくとも一部は、フィン型トランジスタを用いているものとする。
第2実施形態では、半導体集積回路装置は複数のスタンダードセルを備えており、この複数のスタンダードセルのうち少なくとも一部は、ナノワイヤFETを用いているものとする。
11a,11b,12a,12b,13a,13b,14a,14b フィン
15a,15b フィン(第1フィン)
20 ゲート
25 ダミーゲート
20a,20b,21a,21b,21c ゲート構造
25a ゲート構造(第1ゲート構造)
25b ゲート構造(第2ゲート構造)
26a,26b ゲート構造
50,51a,51b,52a,52b ナノワイヤ
55a,55b ナノワイヤ(第1ナノワイヤ)
60,61a,61b,62a,62b パッド
65a,65b パッド(第1パッド)
101,102,103,104 フィンの端部
601,602,603,604 パッドの端部
C,C1〜C7 セル
CE,CEa,CEb セル列終端セル
CR セル列
第1実施形態では、半導体集積回路装置は複数のスタンダードセルを備えており、この複数のスタンダードセルのうち少なくとも一部は、フィン型トランジスタを用いているものとする。
第2実施形態では、半導体集積回路装置は複数のスタンダードセルを備えており、この複数のスタンダードセルのうち少なくとも一部は、ナノワイヤFETを用いているものとする。
11a,11b,12a,12b,13a,13b,14a,14b フィン
15a,15b フィン(第1フィン)
20 ゲート
25 ダミーゲート
20a,20b,21a,21b,21c ゲート構造
25a ゲート構造(第1ゲート構造)
25b ゲート構造(第2ゲート構造)
26a,26b ゲート構造
50,51a,51b,52a,52b ナノワイヤ
55a,55b ナノワイヤ(第1ナノワイヤ)
60,61a,61b,62a,62b パッド
65a,65b パッド(第1パッド)
101,102,103,104 フィンの端部
601,602,603,604 パッドの端部
C,C1〜C7 セル
CE,CEa,CEb セル列終端セル
CR セル列
Claims (13)
- 複数のセルが第1方向に並んでなるセル列が、前記第1方向と垂直をなす第2方向において複数並べて配置された回路ブロックを備え、
前記回路ブロックにおいて、前記複数のセル列のうち少なくとも1つは、少なくとも一方の端部に、前記回路ブロックの論理機能に寄与しないセル列終端セルが配置されており、
前記セル列終端セルは、
前記第1方向に延びる複数のフィンと、
前記第2方向に延びており、前記回路ブロック内部側のセル端に配置された第1ゲート構造を含む、複数のゲート構造とを備え、
前記複数のフィンは、
前記回路ブロック内部側の端部が、前記第1ゲート構造の近傍で、前記第1ゲート構造と平面視で重なりを持たない位置にあり、
前記回路ブロック外部側の端部が、前記複数のゲート構造のうち前記第1ゲート構造以外のいずれかと、平面視で重なりを持つ位置にある
ことを特徴とする半導体集積回路装置。 - 請求項1記載の半導体集積回路装置において、
前記セル列終端セルの前記回路ブロック内部側に隣接する第1セルは、前記第1方向に延びる複数の第1フィンを備えており、
前記複数の第1フィンは、前記セル列終端セルが有する前記複数のフィンとそれぞれ対向しており、かつ、対向するフィンとの間の間隔が同一である
ことを特徴とする半導体集積回路装置。 - 請求項1記載の半導体集積回路装置において、
前記複数のセル列は、それぞれ、両方の端部に、前記セル列終端セルが配置されている
ことを特徴とする半導体集積回路装置。 - 請求項1記載の半導体集積回路装置において、
前記複数のゲート構造は、前記回路ブロック外部側のセル端に配置された第2ゲート構造を含み、
前記複数のフィンは、前記回路ブロック外部側の端部が、前記第2ゲート構造と平面視で重なりを持つ位置にある
ことを特徴とする半導体集積回路装置。 - 請求項1記載の半導体集積回路装置において、
前記回路ブロックは、前記第1方向における両端の位置が揃っている複数のセル列からなる矩形領域を含み、
前記矩形領域を構成する複数のセル列の一方の端部にそれぞれ配置された複数の前記セル列終端セルは、前記第1方向におけるセルの寸法であるセル幅が互いに異なる、複数種類のセルを含む
ことを特徴とする半導体集積回路装置。 - 請求項5記載の半導体集積回路装置において、
前記複数種類のセルは、セル幅が互いに異なる第1セル列終端セルと第2セル列終端セルとを含み、
前記第2セル列終端セルが、所定数のセル列おきに、配置されている
ことを特徴とする半導体集積回路装置。 - 請求項5記載の半導体集積回路装置において、
前記セル列終端セルの前記回路ブロック内部側に隣接する第1セルは、前記第1方向に延びる複数の第1フィンを備えており、
前記複数の第1フィンは、前記セル列終端セルが有する前記複数のフィンとそれぞれ対向しており、かつ、対向するフィンとの間隔が同一である
ことを特徴とする半導体集積回路装置。 - 請求項5記載の半導体集積回路装置において、
前記矩形領域を構成する複数のセル列は、それぞれ、両方の端部に、前記セル列終端セルが配置されている
ことを特徴とする半導体集積回路装置。 - 請求項5記載の半導体集積回路装置において、
前記複数のゲート構造は、前記回路ブロック外部側のセル端に配置された第2ゲート構造を含み、
前記複数のフィンは、前記回路ブロック外部側の端部が、平面視で前記第2ゲート構造と重なりを持つ位置にある
ことを特徴とする半導体集積回路装置。 - 複数のセルが第1方向に並んでなるセル列が、前記第1方向と垂直をなす第2方向において複数並べて配置された回路ブロックを備え、
前記回路ブロックは、前記第1方向における両端の位置が揃っている複数のセル列からなる矩形領域を含み、
前記矩形領域を構成する複数のセル列の一方の端部に、それぞれ、前記回路ブロックの論理機能に寄与しない複数のセル列終端セルが配置されており、
前記複数のセル列終端セルは、それぞれ、
前記第1方向に延びる複数のナノワイヤと、
前記ナノワイヤと接続された複数のパッドと、
前記第2方向に延びており、前記回路ブロック内部側のセル端に配置された第1ゲート構造を含む、複数のゲート構造とを備え、
前記複数のパッドは、
前記回路ブロック内部側の端部が、前記第1ゲート構造の近傍で、前記第1ゲート構造と平面視で重なりを持たない位置にあり、
前記複数のセル列終端セルは、前記第1方向におけるセルの寸法であるセル幅が互いに異なる、複数種類のセルを含む
ことを特徴とする半導体集積回路装置。 - 請求項10記載の半導体集積回路装置において、
前記セル列終端セルの前記回路ブロック内部側に隣接する第1セルは、前記第1方向に延びる複数の第1ナノワイヤ、および前記第1ナノワイヤと接続された複数の第1パッドを備えており、
前記複数の第1パッドは、前記セル列終端セルが有する前記複数のパッドとそれぞれ対向しており、かつ、対向するパッドとの間の間隔が同一である
ことを特徴とする半導体集積回路装置。 - 請求項10記載の半導体集積回路装置において、
前記複数のセル列は、それぞれ、両方の端部に、前記セル列終端セルが配置されている
ことを特徴とする半導体集積回路装置。 - 請求項10記載の半導体集積回路装置において、
前記複数種類のセルは、セル幅が互いに異なる第1セル列終端セルと第2セル列終端セルとを含み、
前記第2セル列終端セルが、所定数のセル列おきに、配置されている
ことを特徴とする半導体集積回路装置。
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