JPWO2017168534A1 - 基板貼り合わせ装置および基板貼り合わせ方法 - Google Patents
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Abstract
Description
特許文献1 特開2013−258377号公報
また、本実施例において「貼り合わせ」とは、本実施例に記載の方法で積層された二つの基板に設けられた端子が互いに接続され、これにより、二つの基板間に電気的な導通が確保された場合もしくは二つの基板の接合強度が所定の強度以上となる場合には、それらの状態を指す。また、本実施例に記載の方法で積層された二つの基板をその後にアニール等の処理を行うことにより、二つの基板が最終的に電気的に接続される場合もしくは二つの基板の接合強度が所定の強度以上となる場合は、「貼り合わせ」は、アニール等の処理前に二つの基板が一時的に結合している状態、すなわち仮接合されている状態を指す。
また、本実施例では、基板211、213間に閾値以上の位置ずれが生じる前に、接触領域の拡大を開始させる例を示したが、これに代えて、基板211、213の少なくとも一方に閾値以上の変形が生じる前に接触領域の拡大を開始してもよい。この場合、一方の基板のみが変形する場合は、基板211、213の一部同士が接触する前の状態もしくは基板211、213が位置合わせされた状態を基準として、その一方の基板に生じる変形量の大きさが、基板211、213の接続部間に適切な電気的接続や接合強度が得られないずれを発生する大きさにならないように、閾値が設定される。一方、基板211、213の両方が変形する場合は、変形量の差が、基板211、213の接続部間に適切な電気的接続や接合強度が得られないずれを発生する大きさにならないように、閾値が設定される。
Claims (16)
- 第1の基板の表面および第2の基板の表面のそれぞれの一部を互いに接触させ、前記表面の接触した接触領域が前記一部から拡大するように、前記第1の基板と前記第2の基板とを互いに貼り合わせる基板貼り合わせ装置であって、
少なくとも前記接触領域が拡大していく過程において、前記第1の基板および前記第2の基板の間に閾値以上の位置ずれが生じないように、前記第1の基板および前記第2の基板の少なくとも一方の温度を調節する温度調節部を備える基板貼り合せ装置。 - 前記温度調節部は、前記第1の基板および前記第2の基板のそれぞれの前記表面のまだ接触していない非接触領域の間に前記閾値以上の位置ずれが生じないように、前記第1の基板および前記第2の基板の少なくとも一方の前記非接触領域の温度を調節する請求項1に記載の基板貼り合せ装置。
- 前記温度調節部は、前記非接触領域が互いに接触するまで、前記非接触領域の間の温度差を所定の範囲内に維持する請求項2に記載の基板貼り合わせ装置。
- 前記温度調節部は、前記接触領域が拡大する過程で前記第1の基板および前記第2の基板の少なくとも一方の温度を検出し、検出した結果に基づいて温度調節を行う請求項1から3のいずれか一項に記載の基板貼り合わせ装置。
- 前記温度調節部は、前記接触領域が拡大する過程で生じる前記第1の基板および前記第2の基板の少なくとも一方の温度を予測し、予測した結果に基づいて温度調節を行う請求項1から3のいずれか一項に記載の基板貼り合わせ装置。
- 前記温度調節部は、前記第1の基板および前記第2の基板の貼り合わせ面の状態、前記一部が接触してから貼り合わせが完了するまでの時間、前記接触領域が拡大する速度、前記第1の基板および前記第2の基板の少なくとも一方の厚さ、および、前記第1の基板および前記第2の基板の少なくとも一方の内部の熱伝達速度、の少なくとも一つに基づいて、前記第1の基板および前記第2の基板の少なくとも一方の温度を予測する請求項5に記載の基板貼り合わせ装置。
- 前記温度調節部は、前記接触領域が拡大していく方向に沿って配列された複数のヒータを備え、前記複数のヒータの温度は、それぞれ前記接触領域の拡大に伴って変化する請求項1から6のいずれか一項に記載の基板貼り合わせ装置。
- 前記温度調節部は、前記第1の基板および前記第2の基板の少なくとも一方に、温度が調節された気体を噴射する請求項1から7のいずれか一項に記載の基板貼り合わせ装置。
- 第1の基板の表面および第2の基板の表面のそれぞれの一部を互いに接触させ、前記表面の接触した接触領域が前記一部から拡大するように、前記第1の基板と前記第2の基板とを互いに貼り合わせる基板貼り合わせ方法であって、
少なくとも前記接触領域が拡大していく過程において、前記第1の基板および前記第2の基板の間に閾値以上の位置ずれが生じないように、前記第1の基板および前記第2の基板の少なくとも一方の温度を調節する温度調節段階を含む基板貼り合せ方法。 - 前記温度調節段階は、前記第1の基板および前記第2の基板のそれぞれの前記表面のまだ接触していない非接触領域の間に前記閾値以上の位置ずれが生じないように、前記第1の基板および前記第2の基板の少なくとも一方の前記非接触領域の温度を調節する請求項9に記載の基板貼り合せ方法。
- 前記温度調節段階は、前記非接触領域が互いに接触するときに、前記非接触領域の間の温度差が所定の範囲内になるように調節する請求項10に記載の基板貼り合わせ方法。
- 前記温度調節段階は、前記接触領域が拡大する過程で前記第1の基板および前記第2の基板の少なくとも一方の温度を検出し、検出した結果に基づいて温度調節を行う請求項9から11のいずれか一項に記載の基板貼り合わせ方法。
- 前記温度調節段階は、前記接触領域が拡大する過程で生じる前記第1の基板および前記第2の基板の少なくとも一方の温度を予測し、予測した結果に基づいて温度調節を行う請求項9から11のいずれか一項に記載の基板貼り合わせ方法。
- 前記温度調節段階は、前記第1の基板および前記第2の基板の貼り合わせ面の状態、前記一部が接触してから貼り合わせが完了するまでの時間、前記接触領域が拡大する速度、前記第1の基板および前記第2の基板の少なくとも一方の厚さ、および、前記第1の基板および前記第2の基板の少なくとも一方の内部の熱伝達速度、の少なくとも一つに基づいて、前記第1の基板および前記第2の基板の少なくとも一方の温度を予測する請求項13に記載の基板貼り合わせ方法。
- 前記温度調節段階は、前記接触領域が拡大していく方向に沿って配列された複数のヒータを備え、前記複数のヒータの温度は、それぞれ前記接触領域の拡大に伴って変化する請求項9から14のいずれか一項に記載の基板貼り合わせ方法。
- 前記温度調節段階は、前記第1の基板および前記第2の基板の少なくとも一方に、温度が調節された気体を噴射する請求項9から15のいずれか一項に記載の基板貼り合わせ方法。
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