JPWO2017085862A1 - 計測装置、計測方法及びコンピュータプログラム - Google Patents
計測装置、計測方法及びコンピュータプログラム Download PDFInfo
- Publication number
- JPWO2017085862A1 JPWO2017085862A1 JP2017551489A JP2017551489A JPWO2017085862A1 JP WO2017085862 A1 JPWO2017085862 A1 JP WO2017085862A1 JP 2017551489 A JP2017551489 A JP 2017551489A JP 2017551489 A JP2017551489 A JP 2017551489A JP WO2017085862 A1 JPWO2017085862 A1 JP WO2017085862A1
- Authority
- JP
- Japan
- Prior art keywords
- terahertz wave
- sample
- back surface
- irradiation
- refractive index
- Prior art date
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- 238000004590 computer program Methods 0.000 title claims description 21
- 238000000034 method Methods 0.000 title description 6
- 238000004364 calculation method Methods 0.000 claims abstract description 37
- 238000001514 detection method Methods 0.000 claims description 117
- 238000005259 measurement Methods 0.000 claims description 75
- 238000000691 measurement method Methods 0.000 claims description 16
- 230000008859 change Effects 0.000 claims description 13
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000000523 sample Substances 0.000 description 189
- 230000003287 optical effect Effects 0.000 description 40
- 230000014509 gene expression Effects 0.000 description 20
- 230000007246 mechanism Effects 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000003111 delayed effect Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Toxicology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2015/082690 WO2017085862A1 (fr) | 2015-11-20 | 2015-11-20 | Dispositif de mesure, procédé de mesure et programme informatique |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019161222A Division JP2019203905A (ja) | 2019-09-04 | 2019-09-04 | 計測装置、計測方法及びコンピュータプログラム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2017085862A1 true JPWO2017085862A1 (ja) | 2018-08-30 |
Family
ID=58718084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017551489A Pending JPWO2017085862A1 (ja) | 2015-11-20 | 2015-11-20 | 計測装置、計測方法及びコンピュータプログラム |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2017085862A1 (fr) |
| WO (1) | WO2017085862A1 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109932338B (zh) * | 2019-04-03 | 2021-06-04 | 北京环境特性研究所 | 基于太赫兹频段测量样品复折射率的方法和装置 |
| CN112985279A (zh) * | 2021-03-05 | 2021-06-18 | 深圳市华讯方舟光电技术有限公司 | 一种检测装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003270140A (ja) * | 2002-03-13 | 2003-09-25 | Matsushita Electric Ind Co Ltd | 相対屈折率の測定方法および相対屈折率測定装置 |
| JP2010533300A (ja) * | 2007-07-12 | 2010-10-21 | ピコメトリクス、エルエルシー | 時間領域データ内のパルスの通過時間位置を測定するシステムおよび方法 |
-
2015
- 2015-11-20 WO PCT/JP2015/082690 patent/WO2017085862A1/fr active Application Filing
- 2015-11-20 JP JP2017551489A patent/JPWO2017085862A1/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003270140A (ja) * | 2002-03-13 | 2003-09-25 | Matsushita Electric Ind Co Ltd | 相対屈折率の測定方法および相対屈折率測定装置 |
| JP2010533300A (ja) * | 2007-07-12 | 2010-10-21 | ピコメトリクス、エルエルシー | 時間領域データ内のパルスの通過時間位置を測定するシステムおよび方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017085862A1 (fr) | 2017-05-26 |
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Legal Events
| Date | Code | Title | Description |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180508 |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20181204 |
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| A02 | Decision of refusal |
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