JPWO2017036622A5 - - Google Patents

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Publication number
JPWO2017036622A5
JPWO2017036622A5 JP2018511145A JP2018511145A JPWO2017036622A5 JP WO2017036622 A5 JPWO2017036622 A5 JP WO2017036622A5 JP 2018511145 A JP2018511145 A JP 2018511145A JP 2018511145 A JP2018511145 A JP 2018511145A JP WO2017036622 A5 JPWO2017036622 A5 JP WO2017036622A5
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JP
Japan
Prior art keywords
spectroscope
opening
inlet slit
protrusions
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018511145A
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English (en)
Japanese (ja)
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JP7054671B2 (ja
JP2018526648A (ja
Publication date
Priority claimed from US14/840,537 external-priority patent/US9863809B2/en
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Publication of JP2018526648A publication Critical patent/JP2018526648A/ja
Priority to JP2022007097A priority Critical patent/JP2022050664A/ja
Publication of JPWO2017036622A5 publication Critical patent/JPWO2017036622A5/ja
Application granted granted Critical
Publication of JP7054671B2 publication Critical patent/JP7054671B2/ja
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JP2018511145A 2015-08-31 2016-06-14 分光器 Active JP7054671B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022007097A JP2022050664A (ja) 2015-08-31 2022-01-20 分光器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/840,537 2015-08-31
US14/840,537 US9863809B2 (en) 2015-08-31 2015-08-31 Spectrograph
PCT/EP2016/063606 WO2017036622A1 (en) 2015-08-31 2016-06-14 Spectrograph

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022007097A Division JP2022050664A (ja) 2015-08-31 2022-01-20 分光器

Publications (3)

Publication Number Publication Date
JP2018526648A JP2018526648A (ja) 2018-09-13
JPWO2017036622A5 true JPWO2017036622A5 (ru) 2022-02-21
JP7054671B2 JP7054671B2 (ja) 2022-04-14

Family

ID=56132927

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2018511145A Active JP7054671B2 (ja) 2015-08-31 2016-06-14 分光器
JP2022007097A Pending JP2022050664A (ja) 2015-08-31 2022-01-20 分光器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2022007097A Pending JP2022050664A (ja) 2015-08-31 2022-01-20 分光器

Country Status (9)

Country Link
US (1) US9863809B2 (ru)
EP (1) EP3344960A1 (ru)
JP (2) JP7054671B2 (ru)
KR (1) KR20180048725A (ru)
CN (1) CN107923792B (ru)
AU (1) AU2016314503B2 (ru)
CA (1) CA2996453A1 (ru)
RU (1) RU2715485C2 (ru)
WO (1) WO2017036622A1 (ru)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2857810A1 (en) * 2013-10-02 2015-04-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Monolith spectrometer
US9863809B2 (en) 2015-08-31 2018-01-09 Mettler-Toledo Gmbh Spectrograph
DE102017206066A1 (de) * 2017-04-10 2018-10-11 Anvajo GmbH Spektrometer
CN108254075A (zh) * 2018-01-04 2018-07-06 南京邮电大学 一种微型集成化cmos光纤光谱仪
JP7245633B2 (ja) * 2018-11-08 2023-03-24 三星電子株式会社 分光光学系、分光計測システム、及び、半導体検査方法
CN114739905A (zh) * 2022-04-06 2022-07-12 杭州佰腾电子科技有限公司 一种双光路光谱仪及测色装置与校准方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5042893A (en) 1990-11-09 1991-08-27 Hewlett-Packard Company Direct mount coupling to a spectrophotometer
US6320663B1 (en) 1999-01-22 2001-11-20 Cymer, Inc. Method and device for spectral measurements of laser beam
DE29906678U1 (de) * 1999-04-15 1999-07-29 Carl Zeiss Jena Gmbh, 07745 Jena Spektrometer
JP4372314B2 (ja) * 2000-06-21 2009-11-25 大塚電子株式会社 スペクトル測定装置
JP2003139611A (ja) * 2001-11-06 2003-05-14 Olympus Optical Co Ltd 分光光度計
JP4409860B2 (ja) 2003-05-28 2010-02-03 浜松ホトニクス株式会社 光検出器を用いた分光器
JP2007509319A (ja) * 2003-10-17 2007-04-12 アクサン・テクノロジーズ・インコーポレーテッド 多チャネルラマン分光システムおよび方法
JP2005156343A (ja) * 2003-11-26 2005-06-16 Shimadzu Corp 分光装置及び分光装置用光学フィルタ
JP4627402B2 (ja) 2003-11-28 2011-02-09 浜松ホトニクス株式会社 光検出器を用いた分光器
WO2007019460A2 (en) 2005-08-08 2007-02-15 Lambda Solutions Linear fiber array mount to a spectrometer
US7697137B2 (en) 2006-04-28 2010-04-13 Corning Incorporated Monolithic Offner spectrometer
JP5205241B2 (ja) 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
RU81320U1 (ru) * 2008-11-10 2009-03-10 Общество С Ограниченной Ответственностью "Вмк-Оптоэлектроника" Спектрометр
US8387837B2 (en) 2009-07-14 2013-03-05 Scholle Corporation Tap
JP5609611B2 (ja) * 2010-03-11 2014-10-22 株式会社リコー 分光特性取得装置、画像評価装置、及び画像形成装置
DE102010015641B4 (de) 2010-04-20 2013-02-28 Imm Photonics Gmbh Spektrometer
US8339600B2 (en) * 2010-07-02 2012-12-25 Lawrence Livermore National Security, Llc Dual waveband compact catadioptric imaging spectrometer
JP6068039B2 (ja) * 2012-08-06 2017-01-25 浜松ホトニクス株式会社 分光器
JP5484537B2 (ja) * 2012-09-03 2014-05-07 大塚電子株式会社 分光特性測定装置および分光特性測定方法
US10514296B2 (en) * 2015-07-29 2019-12-24 Samsung Electronics Co., Ltd. Spectrometer including metasurface
US9863809B2 (en) 2015-08-31 2018-01-09 Mettler-Toledo Gmbh Spectrograph
US11391871B2 (en) 2017-12-27 2022-07-19 Hitachi High-Tech Corporation Manufacturing method of concave diffraction grating, concave diffraction grating, and analyzer using the same

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