JPWO2017036622A5 - - Google Patents
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- Publication number
- JPWO2017036622A5 JPWO2017036622A5 JP2018511145A JP2018511145A JPWO2017036622A5 JP WO2017036622 A5 JPWO2017036622 A5 JP WO2017036622A5 JP 2018511145 A JP2018511145 A JP 2018511145A JP 2018511145 A JP2018511145 A JP 2018511145A JP WO2017036622 A5 JPWO2017036622 A5 JP WO2017036622A5
- Authority
- JP
- Japan
- Prior art keywords
- spectroscope
- opening
- inlet slit
- protrusions
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000006185 dispersion Substances 0.000 claims description 11
- 230000003287 optical Effects 0.000 claims 10
- 239000003365 glass fiber Substances 0.000 claims 8
- 230000000295 complement Effects 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 3
- 239000000969 carrier Substances 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022007097A JP2022050664A (ja) | 2015-08-31 | 2022-01-20 | 分光器 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/840,537 | 2015-08-31 | ||
US14/840,537 US9863809B2 (en) | 2015-08-31 | 2015-08-31 | Spectrograph |
PCT/EP2016/063606 WO2017036622A1 (en) | 2015-08-31 | 2016-06-14 | Spectrograph |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022007097A Division JP2022050664A (ja) | 2015-08-31 | 2022-01-20 | 分光器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2018526648A JP2018526648A (ja) | 2018-09-13 |
JPWO2017036622A5 true JPWO2017036622A5 (ru) | 2022-02-21 |
JP7054671B2 JP7054671B2 (ja) | 2022-04-14 |
Family
ID=56132927
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018511145A Active JP7054671B2 (ja) | 2015-08-31 | 2016-06-14 | 分光器 |
JP2022007097A Pending JP2022050664A (ja) | 2015-08-31 | 2022-01-20 | 分光器 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022007097A Pending JP2022050664A (ja) | 2015-08-31 | 2022-01-20 | 分光器 |
Country Status (9)
Country | Link |
---|---|
US (1) | US9863809B2 (ru) |
EP (1) | EP3344960A1 (ru) |
JP (2) | JP7054671B2 (ru) |
KR (1) | KR20180048725A (ru) |
CN (1) | CN107923792B (ru) |
AU (1) | AU2016314503B2 (ru) |
CA (1) | CA2996453A1 (ru) |
RU (1) | RU2715485C2 (ru) |
WO (1) | WO2017036622A1 (ru) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2857810A1 (en) * | 2013-10-02 | 2015-04-08 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Monolith spectrometer |
US9863809B2 (en) | 2015-08-31 | 2018-01-09 | Mettler-Toledo Gmbh | Spectrograph |
DE102017206066A1 (de) * | 2017-04-10 | 2018-10-11 | Anvajo GmbH | Spektrometer |
CN108254075A (zh) * | 2018-01-04 | 2018-07-06 | 南京邮电大学 | 一种微型集成化cmos光纤光谱仪 |
JP7245633B2 (ja) * | 2018-11-08 | 2023-03-24 | 三星電子株式会社 | 分光光学系、分光計測システム、及び、半導体検査方法 |
CN114739905A (zh) * | 2022-04-06 | 2022-07-12 | 杭州佰腾电子科技有限公司 | 一种双光路光谱仪及测色装置与校准方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5042893A (en) | 1990-11-09 | 1991-08-27 | Hewlett-Packard Company | Direct mount coupling to a spectrophotometer |
US6320663B1 (en) | 1999-01-22 | 2001-11-20 | Cymer, Inc. | Method and device for spectral measurements of laser beam |
DE29906678U1 (de) * | 1999-04-15 | 1999-07-29 | Carl Zeiss Jena Gmbh, 07745 Jena | Spektrometer |
JP4372314B2 (ja) * | 2000-06-21 | 2009-11-25 | 大塚電子株式会社 | スペクトル測定装置 |
JP2003139611A (ja) * | 2001-11-06 | 2003-05-14 | Olympus Optical Co Ltd | 分光光度計 |
JP4409860B2 (ja) | 2003-05-28 | 2010-02-03 | 浜松ホトニクス株式会社 | 光検出器を用いた分光器 |
JP2007509319A (ja) * | 2003-10-17 | 2007-04-12 | アクサン・テクノロジーズ・インコーポレーテッド | 多チャネルラマン分光システムおよび方法 |
JP2005156343A (ja) * | 2003-11-26 | 2005-06-16 | Shimadzu Corp | 分光装置及び分光装置用光学フィルタ |
JP4627402B2 (ja) | 2003-11-28 | 2011-02-09 | 浜松ホトニクス株式会社 | 光検出器を用いた分光器 |
WO2007019460A2 (en) | 2005-08-08 | 2007-02-15 | Lambda Solutions | Linear fiber array mount to a spectrometer |
US7697137B2 (en) | 2006-04-28 | 2010-04-13 | Corning Incorporated | Monolithic Offner spectrometer |
JP5205241B2 (ja) | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュール |
RU81320U1 (ru) * | 2008-11-10 | 2009-03-10 | Общество С Ограниченной Ответственностью "Вмк-Оптоэлектроника" | Спектрометр |
US8387837B2 (en) | 2009-07-14 | 2013-03-05 | Scholle Corporation | Tap |
JP5609611B2 (ja) * | 2010-03-11 | 2014-10-22 | 株式会社リコー | 分光特性取得装置、画像評価装置、及び画像形成装置 |
DE102010015641B4 (de) | 2010-04-20 | 2013-02-28 | Imm Photonics Gmbh | Spektrometer |
US8339600B2 (en) * | 2010-07-02 | 2012-12-25 | Lawrence Livermore National Security, Llc | Dual waveband compact catadioptric imaging spectrometer |
JP6068039B2 (ja) * | 2012-08-06 | 2017-01-25 | 浜松ホトニクス株式会社 | 分光器 |
JP5484537B2 (ja) * | 2012-09-03 | 2014-05-07 | 大塚電子株式会社 | 分光特性測定装置および分光特性測定方法 |
US10514296B2 (en) * | 2015-07-29 | 2019-12-24 | Samsung Electronics Co., Ltd. | Spectrometer including metasurface |
US9863809B2 (en) | 2015-08-31 | 2018-01-09 | Mettler-Toledo Gmbh | Spectrograph |
US11391871B2 (en) | 2017-12-27 | 2022-07-19 | Hitachi High-Tech Corporation | Manufacturing method of concave diffraction grating, concave diffraction grating, and analyzer using the same |
-
2015
- 2015-08-31 US US14/840,537 patent/US9863809B2/en active Active
-
2016
- 2016-06-14 CN CN201680050405.3A patent/CN107923792B/zh active Active
- 2016-06-14 KR KR1020187007754A patent/KR20180048725A/ko not_active Application Discontinuation
- 2016-06-14 EP EP16729550.0A patent/EP3344960A1/en active Pending
- 2016-06-14 CA CA2996453A patent/CA2996453A1/en not_active Abandoned
- 2016-06-14 WO PCT/EP2016/063606 patent/WO2017036622A1/en active Application Filing
- 2016-06-14 RU RU2018110766A patent/RU2715485C2/ru active
- 2016-06-14 JP JP2018511145A patent/JP7054671B2/ja active Active
- 2016-06-14 AU AU2016314503A patent/AU2016314503B2/en active Active
-
2022
- 2022-01-20 JP JP2022007097A patent/JP2022050664A/ja active Pending
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