JPWO2017036622A5 - - Google Patents
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- JPWO2017036622A5 JPWO2017036622A5 JP2018511145A JP2018511145A JPWO2017036622A5 JP WO2017036622 A5 JPWO2017036622 A5 JP WO2017036622A5 JP 2018511145 A JP2018511145 A JP 2018511145A JP 2018511145 A JP2018511145 A JP 2018511145A JP WO2017036622 A5 JPWO2017036622 A5 JP WO2017036622A5
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- 239000006185 dispersion Substances 0.000 claims description 11
- 230000003287 optical Effects 0.000 claims 10
- 239000003365 glass fiber Substances 0.000 claims 8
- 230000000295 complement Effects 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 3
- 239000000969 carrier Substances 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
Description
[0023]分光器100の例示的な実施形態では、分散素子114は、透過回折格子、溝付き回折格子、ホログラフィック回折格子、および/または、プリズム、および/または、当該技術分野で公知または今後開発される他の適切な分散素子を備えている。例示的な実施形態では、分散素子114は、四角形又は正方形のプレートと、凹状円形反射・回折面であるアクティブ領域と、を備えている。
[0023] In an exemplary embodiment of the spectroscope 100, the dispersion element 114 is known or in the art as a transmission diffraction grating, a grooved diffraction grating, a holographic diffraction grating, and / or a prism, and / or It has other suitable dispersive elements to be developed. In an exemplary embodiment, the dispersion element 114 comprises a quadrilateral or square plate and an active region that is a concave circular reflection / diffraction surface.
Claims (18)
ハウジング(102)を備え、
前記ハウジング(102)は、該ハウジングの内部に対面する内面を有する壁部(104)を備え、
前記壁部は、第1の開口(106)と、第2の開口(108)と、第3の開口(110)と、を備え、
前記壁部は、前記第2の開口(108)の内側に向けて延在する少なくとも3つの突出部(122)を備え、
前記分光器(100)は、さらに、
前記第1の開口(106)のところに位置する入口スリット(112)であって、前記ハウジング(102)の前記内部において光路の第1の部分(LP1)に沿って光を方向付けるように構成された入口スリット(112)と、
前記第2の開口(108)のところに位置する分散素子(114)であって、前記光路の前記第1の部分(LP1)に沿った前記入口スリット(112)からの光を受け取り、前記ハウジング(102)の前記内部において前記光路の第2の部分(LP2)に沿って光を方向付けるように構成された分散素子(114)と
を備え、
前記分散素子(114)は、前記第2の開口(108)内へ延在する前記複数の突出部(122)に接触する寸法を有する輪郭部(124)を備え、
前記複数の突出部(122)および前記分散素子(114)の前記輪郭部(124)は、前記分散素子(114)が少なくとも部分的に前記第2の開口(108)内に位置する場合に前記分散素子(114)の前記輪郭部(124)が前記複数の突出部(122)の全てに接触するように、また、前記入口スリット(112)に対する前記分散素子(114)の向きが固定されるように相補的な寸法パラメータおよび相補的な公差パラメータを有し、
前記分光器(100)は、さらに、前記第3の開口(110)のところに位置する検出器(116)を備え、
前記検出器(116)は、前記光路の前記第2の部分(LP2)に沿った前記分散素子(114)からの光を受け入れるように構成された
分光器。 The spectroscope (100)
Equipped with a housing (102)
The housing (102) comprises a wall portion (104) having an inner surface facing the inside of the housing.
The wall portion comprises a first opening (106), a second opening (108), and a third opening (110).
The wall comprises at least three protrusions (122) extending inward of the second opening (108).
The spectroscope (100) further
An inlet slit (112) located at the first opening (106), configured to direct light along the first portion of the optical path (LP1) inside the housing (102). With the entrance slit (112)
A dispersion element (114) located at the second opening (108) that receives light from the inlet slit (112) along the first portion (LP1) of the optical path and receives the light from the housing. (102) includes a dispersion element (114) configured to direct light along the second portion (LP2) of the optical path inside the interior.
The dispersion element (114) comprises a contour portion (124) having dimensions in contact with the plurality of protrusions (122) extending into the second opening (108).
The contour portion (124) of the plurality of protrusions (122) and the dispersion element (114) is when the dispersion element (114) is at least partially located within the second opening (108). The contour portion (124) of the dispersion element (114) is in contact with all of the plurality of protrusions (122), and the orientation of the dispersion element (114) with respect to the inlet slit (112) is fixed. With complementary dimensional parameters and complementary tolerance parameters,
The spectroscope (100) further comprises a detector (116) located at the third aperture (110).
The detector (116) is a spectroscope configured to receive light from the dispersion element (114) along the second portion (LP2) of the optical path.
前記第2の開口(108)は、内側開口(2081)と外側開口(2082)とを備え、
前記内側開口(2081)は、前記外側開口(2082)よりも前記ハウジングの前記内部の近くに位置し、
前記複数の突出部(122)は、前記内側開口の内側に向けて延在する第1のグループの突出部(122A)と、前記外側開口の内側に向けて延在する第2のグループの突出部(122B)と、を備える
分光器。 The spectroscope (100) according to claim 1.
The second opening (108) comprises an inner opening (2081) and an outer opening (2082).
The inner opening (2081) is located closer to the interior of the housing than the outer opening (2082).
The plurality of protrusions (122) include a first group of protrusions (122A) extending inward of the inner opening and a second group of protrusions extending inward of the outer opening. A spectroscope comprising a section (122B).
前記第1のグループの突出部(122A)および前記第2のグループの突出部(122B)のうちの少なくとも一方は、少なくとも3つの突出部を備える
分光器。 The spectroscope (100) according to claim 2.
A spectroscope comprising at least one of the first group of protrusions (122A) and the second group of protrusions (122B) having at least three protrusions.
前記内側開口(2081)および前記外側開口(2082)は、異なる直径を有する 分光器。 The spectroscope (100) according to claim 2 or 3.
The inner opening (2081) and the outer opening (2082) are spectroscopes having different diameters.
前記検出器(116)は、第1のグループの感光領域(118)と第2のグループの感光領域(120)とを備え、
前記分光器(100)は、さらに、前記第1のグループの感光領域(118)を前記光路から分離するように位置決めされるカバー(105)を備え、
前記第2のグループの感光領域(120)は、前記光路にさらされる
分光器。 The spectroscope (100) according to any one of claims 1 to 3.
The detector (116) includes a first group of photosensitive regions (118) and a second group of photosensitive regions (120).
The spectroscope (100) further comprises a cover (105) positioned to separate the photosensitive region (118) of the first group from the optical path.
The photosensitive region (120) of the second group is a spectroscope exposed to the optical path.
前記検出器(116)は、電荷結合素子アレイ検出器、ライン電荷結合素子検出器、フォトダイオードアレイ検出器、および、相補的な金属酸化膜半導体検出器のうちの1つである
分光器。 The spectroscope (100) according to any one of claims 1 to 5.
The detector (116) is one of a charge-coupled device array detector, a line charge-coupled device detector, a photodiode array detector, and a complementary metal oxide semiconductor detector.
前記第1のグループの感光領域(118)は、第1の波長帯の光を検出し、
前記第2のグループの感光領域(120)は、第2の波長帯の光を検出し、
前記第1の波長帯と前記第2の波長帯とは異なっている
分光器。 The spectroscope (100) according to claim 5 or claim 6, which cites claim 5.
The photosensitive region (118) of the first group detects light in the first wavelength band.
The photosensitive region (120) of the second group detects light in the second wavelength band.
A spectroscope in which the first wavelength band and the second wavelength band are different.
前記第1のグループの感光領域(118)は、第1の波長帯の光を検出し、
前記第2のグループの感光領域(120)は、第2の波長帯の光を検出し、
前記第1の波長帯と前記第2の波長帯とは重複しない
分光器。 The spectroscope (100) according to claim 5 or claim 6, which cites claim 5.
The photosensitive region (118) of the first group detects light in the first wavelength band.
The photosensitive region (120) of the second group detects light in the second wavelength band.
A spectroscope that does not overlap the first wavelength band and the second wavelength band.
前記検出器(116)の前段に配置されたフィルタ(117)を備え、その結果、前記光路の前記第2の部分(LP2)に沿って移動する光は、まず前記フィルタ(117)を超え、次いで前記検出器(116)に達する
分光器。 The spectroscope (100) according to any one of claims 1 to 8.
The filter (117) arranged in front of the detector (116) is provided, and as a result, the light traveling along the second portion (LP2) of the optical path first exceeds the filter (117). A spectroscope that then reaches the detector (116).
前記カバー(105)は、前記ハウジング(102)の前記壁部と一体である
分光器。 The spectroscope (100) according to any one of claims 6, claim 7, claim 8 and claim 9 which directly or indirectly cites claim 5. hand,
The cover (105) is a spectroscope integrated with the wall portion of the housing (102).
前記カバー(105)は、前記ハウジング(102)の前記壁部と別体である
分光器。 The spectroscope (100) according to any one of claims 6, claim 7, claim 8 and claim 9 which directly or indirectly cites claim 5. hand,
The cover (105) is a spectroscope that is separate from the wall portion of the housing (102).
前記入口スリット(112)は、円筒の一部に軸方向に延びる平坦部(126)が設けられた円筒形状を有し、前記平坦部(126)は、前記第1の開口(106)がある前記ハウジング(102)の前記内面に対して角度付けられた平面に沿って延在し、
前記平坦部(126)は、前記光路の前記第1の部分(LP1)についての前記分散素子(114)に対する所定の向きで前記入口スリット(112)を固定するように構成される
分光器。 The spectroscope (100) according to any one of claims 1 to 11.
The inlet slit (112) has a cylindrical shape in which a flat portion (126) extending in the axial direction is provided in a part of the cylinder, and the flat portion (126) has the first opening (106) . Extending along a plane angled with respect to the inner surface of the housing (102),
The flat portion (126) is a spectroscope configured to fix the inlet slit (112) in a predetermined orientation with respect to the dispersion element (114) for the first portion (LP1) of the optical path.
前記入口スリット(112)は、前記平坦部(126)に対して90度の角度で延在する長手方向の隙間(113)を備える
分光器。 The spectroscope (100) according to claim 12.
The inlet slit (112) is a spectroscope having a longitudinal gap (113) extending at an angle of 90 degrees with respect to the flat portion (126).
光ファイバー(128)と組み合わせられ、
前記光ファイバー(128)は、光が前記光ファイバー(128)を通って前記分光器(100)内へ方向付けられるように構成され、
前記光ファイバー(128)は前記入口スリット(112)と光学的に連通する
分光器。 The spectroscope (100) according to any one of claims 1 to 13.
Combined with optical fiber (128),
The optical fiber (128) is configured such that light is directed through the optical fiber (128) into the spectroscope (100).
The optical fiber (128) is a spectroscope that optically communicates with the inlet slit (112).
前記入口スリットを所定の向きで固定するために前記入口スリット(112)の前記平坦部(126)に当接して位置決めされたネジ(130)を備える
分光器。 The spectroscope (100) according to any one of claims 12, 13, and 14, which directly or indirectly cites claim 12.
A spectroscope comprising a screw (130) positioned in contact with the flat portion (126) of the inlet slit (112) to secure the inlet slit in a predetermined orientation.
前記入口スリット(112)は、該入口スリット(112)の周囲にフランジ(132)を備え、
前記平坦部(126)は、前記フランジの平坦部である
分光器。 The spectroscope (100) according to claim 15.
The inlet slit (112) comprises a flange (132) around the inlet slit (112).
The flat portion (126) is a spectroscope that is a flat portion of the flange.
光ファイバー(128)と組み合わせられ、
前記光ファイバー(128)は、光が前記光ファイバー(128)を通って前記分光器内へ方向付けられるように構成され、
前記フランジ(132)は、前記入口スリット(112)と光学的に連通する前記光ファイバー(128)を収容するチューブ状部材を備える
分光器。 The spectroscope (100) according to claim 16.
Combined with optical fiber (128),
The optical fiber (128) is configured to direct light through the optical fiber (128) into the spectroscope.
The flange (132) is a spectroscope comprising a tubular member accommodating the optical fiber (128) that optically communicates with the inlet slit (112).
請求項1ないし請求項17のいずれか一項に記載の分光器(100)と、
光源(502)と、
サンプルまたはサンプルキャリアを保持するように構成された測定領域(504)と、
前記光源(502)からの光を前記測定領域(504)へ方向付けるように構成された第1の光学素子(506)と、
前記測定領域(504)からの光を前記分光器(100)の前記入口スリット(112)へ方向付けるように構成された第2の光学素子(508)と
を備える
分光計。
It ’s a spectrometer (500),
The spectroscope (100) according to any one of claims 1 to 17, and the spectroscope (100).
Light source (502) and
A measurement area (504) configured to hold the sample or sample carrier, and
A first optical element (506) configured to direct light from the light source (502) toward the measurement region (504).
A spectroscope comprising a second optical element (508) configured to direct light from the measurement region (504) toward the inlet slit (112) of the spectroscope (100).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2022007097A JP2022050664A (en) | 2015-08-31 | 2022-01-20 | Spectrograph |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US14/840,537 | 2015-08-31 | ||
US14/840,537 US9863809B2 (en) | 2015-08-31 | 2015-08-31 | Spectrograph |
PCT/EP2016/063606 WO2017036622A1 (en) | 2015-08-31 | 2016-06-14 | Spectrograph |
Related Child Applications (1)
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JP2022007097A Division JP2022050664A (en) | 2015-08-31 | 2022-01-20 | Spectrograph |
Publications (3)
Publication Number | Publication Date |
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JP2018526648A JP2018526648A (en) | 2018-09-13 |
JPWO2017036622A5 true JPWO2017036622A5 (en) | 2022-02-21 |
JP7054671B2 JP7054671B2 (en) | 2022-04-14 |
Family
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Family Applications (2)
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JP2018511145A Active JP7054671B2 (en) | 2015-08-31 | 2016-06-14 | Spectrometer |
JP2022007097A Pending JP2022050664A (en) | 2015-08-31 | 2022-01-20 | Spectrograph |
Family Applications After (1)
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JP2022007097A Pending JP2022050664A (en) | 2015-08-31 | 2022-01-20 | Spectrograph |
Country Status (9)
Country | Link |
---|---|
US (1) | US9863809B2 (en) |
EP (1) | EP3344960A1 (en) |
JP (2) | JP7054671B2 (en) |
KR (1) | KR20180048725A (en) |
CN (1) | CN107923792B (en) |
AU (1) | AU2016314503B2 (en) |
CA (1) | CA2996453A1 (en) |
RU (1) | RU2715485C2 (en) |
WO (1) | WO2017036622A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2857810A1 (en) * | 2013-10-02 | 2015-04-08 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Monolith spectrometer |
US9863809B2 (en) | 2015-08-31 | 2018-01-09 | Mettler-Toledo Gmbh | Spectrograph |
DE102017206066A1 (en) * | 2017-04-10 | 2018-10-11 | Anvajo GmbH | spectrometer |
CN108254075A (en) * | 2018-01-04 | 2018-07-06 | 南京邮电大学 | A kind of micro integrated CMOS fiber spectrometers |
JP7245633B2 (en) * | 2018-11-08 | 2023-03-24 | 三星電子株式会社 | SPECTRAL OPTICAL SYSTEM, SPECTRAL MEASUREMENT SYSTEM, AND SEMICONDUCTOR INSPECTION METHOD |
CN114739905A (en) * | 2022-04-06 | 2022-07-12 | 杭州佰腾电子科技有限公司 | Double-light-path spectrometer, color measuring device and calibration method |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5042893A (en) | 1990-11-09 | 1991-08-27 | Hewlett-Packard Company | Direct mount coupling to a spectrophotometer |
US6320663B1 (en) | 1999-01-22 | 2001-11-20 | Cymer, Inc. | Method and device for spectral measurements of laser beam |
DE29906678U1 (en) * | 1999-04-15 | 1999-07-29 | Zeiss Carl Jena Gmbh | spectrometer |
JP4372314B2 (en) * | 2000-06-21 | 2009-11-25 | 大塚電子株式会社 | Spectrum measuring device |
JP2003139611A (en) | 2001-11-06 | 2003-05-14 | Olympus Optical Co Ltd | Spectrophotometer |
JP4409860B2 (en) | 2003-05-28 | 2010-02-03 | 浜松ホトニクス株式会社 | Spectrometer using photodetector |
JP2007509319A (en) | 2003-10-17 | 2007-04-12 | アクサン・テクノロジーズ・インコーポレーテッド | Multi-channel Raman spectroscopy system and method |
JP2005156343A (en) | 2003-11-26 | 2005-06-16 | Shimadzu Corp | Spectroscopic device and optical filter for spectroscopic device |
JP4627402B2 (en) | 2003-11-28 | 2011-02-09 | 浜松ホトニクス株式会社 | Spectrometer using photodetector |
WO2007019460A2 (en) | 2005-08-08 | 2007-02-15 | Lambda Solutions | Linear fiber array mount to a spectrometer |
US7697137B2 (en) | 2006-04-28 | 2010-04-13 | Corning Incorporated | Monolithic Offner spectrometer |
JP5205241B2 (en) | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | Spectroscopic module |
RU81320U1 (en) * | 2008-11-10 | 2009-03-10 | Общество С Ограниченной Ответственностью "Вмк-Оптоэлектроника" | SPECTROMETER |
US8387837B2 (en) | 2009-07-14 | 2013-03-05 | Scholle Corporation | Tap |
JP5609611B2 (en) | 2010-03-11 | 2014-10-22 | 株式会社リコー | Spectral characteristic acquisition device, image evaluation device, and image forming device |
DE102010015641B4 (en) | 2010-04-20 | 2013-02-28 | Imm Photonics Gmbh | spectrometer |
US8339600B2 (en) * | 2010-07-02 | 2012-12-25 | Lawrence Livermore National Security, Llc | Dual waveband compact catadioptric imaging spectrometer |
JP6068039B2 (en) | 2012-08-06 | 2017-01-25 | 浜松ホトニクス株式会社 | Spectrometer |
JP5484537B2 (en) * | 2012-09-03 | 2014-05-07 | 大塚電子株式会社 | Spectral characteristic measuring apparatus and spectral characteristic measuring method |
US10514296B2 (en) * | 2015-07-29 | 2019-12-24 | Samsung Electronics Co., Ltd. | Spectrometer including metasurface |
US9863809B2 (en) | 2015-08-31 | 2018-01-09 | Mettler-Toledo Gmbh | Spectrograph |
US11391871B2 (en) | 2017-12-27 | 2022-07-19 | Hitachi High-Tech Corporation | Manufacturing method of concave diffraction grating, concave diffraction grating, and analyzer using the same |
-
2015
- 2015-08-31 US US14/840,537 patent/US9863809B2/en active Active
-
2016
- 2016-06-14 RU RU2018110766A patent/RU2715485C2/en active
- 2016-06-14 CA CA2996453A patent/CA2996453A1/en not_active Abandoned
- 2016-06-14 WO PCT/EP2016/063606 patent/WO2017036622A1/en active Application Filing
- 2016-06-14 CN CN201680050405.3A patent/CN107923792B/en active Active
- 2016-06-14 JP JP2018511145A patent/JP7054671B2/en active Active
- 2016-06-14 KR KR1020187007754A patent/KR20180048725A/en not_active Application Discontinuation
- 2016-06-14 EP EP16729550.0A patent/EP3344960A1/en active Pending
- 2016-06-14 AU AU2016314503A patent/AU2016314503B2/en active Active
-
2022
- 2022-01-20 JP JP2022007097A patent/JP2022050664A/en active Pending
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