JPWO2016132594A1 - ヘテロ接合バイポーラトランジスタ - Google Patents
ヘテロ接合バイポーラトランジスタ Download PDFInfo
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- JPWO2016132594A1 JPWO2016132594A1 JP2017500277A JP2017500277A JPWO2016132594A1 JP WO2016132594 A1 JPWO2016132594 A1 JP WO2016132594A1 JP 2017500277 A JP2017500277 A JP 2017500277A JP 2017500277 A JP2017500277 A JP 2017500277A JP WO2016132594 A1 JPWO2016132594 A1 JP WO2016132594A1
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- 229910001218 Gallium arsenide Inorganic materials 0.000 claims abstract description 59
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 230000003321 amplification Effects 0.000 claims description 18
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 18
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 21
- 238000000034 method Methods 0.000 abstract description 18
- 230000007423 decrease Effects 0.000 abstract description 10
- 239000010410 layer Substances 0.000 description 132
- 238000005530 etching Methods 0.000 description 14
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 238000001039 wet etching Methods 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010295 mobile communication Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Description
2 サブコレクタ層(n型GaAs)
3 n型GaAsコレクタ層(n型GaAs)
4 p型GaAsPBiベース層
5 エミッタ層(n型InGaP)
6 コンタクト層(n型GaAs)
7 コンタクト層(n型InGaAs)
8 アイソレーション溝
9 コレクタ電極
10 ベース電極
11 エミッタ電極
12 コレクタ配線
13 ベース配線
14 エミッタ配線
15〜17 金属パッド
100A〜100D ヘテロ接合バイポーラトランジスタ(HBT)
20 エミッタバラスト抵抗層
30a,30b 組成グレーデッド層
300 電力増幅モジュール
310 入力端子
320,340,360 整合回路
330,350 増幅回路
370 出力端子
400,401 受動素子
410〜412 実装基板
420〜423 導体層
Claims (7)
- GaAs基板上にエミッタ層、ベース層、及びコレクタ層を有するヘテロ接合バイポーラトランジスタであって、
前記エミッタ層が、InGaPからなり、
前記ベース層が、GaAsと略格子整合する組成を有するGaAsPBiからなる、
ヘテロ接合バイポーラトランジスタ。 - 請求項1に記載のヘテロ接合バイポーラトランジスタであって、
前記ベース層のGaAs(1−Y−Z)P(Y)Bi(Z)の組成が、0<Z≦0.07である、
ヘテロ接合バイポーラトランジスタ。 - 請求項1または2に記載のヘテロ接合バイポーラトランジスタであって、
前記ベース層のGaAsPBiの格子定数と、GaAsの格子定数との差が、0.12%以内である、
ヘテロ接合バイポーラトランジスタ。 - 請求項1〜3の何れか一項に記載のヘテロ接合バイポーラトランジスタであって、
エミッタバラスト抵抗層をさらに有する、
ヘテロ接合バイポーラトランジスタ。 - 請求項4に記載のヘテロ接合バイポーラトランジスタであって、
前記エミッタバラスト抵抗層が、AlGaAsからなる、
ヘテロ接合バイポーラトランジスタ。 - 請求項1〜5の何れか一項に記載のヘテロ接合バイポーラトランジスタが並列接続されて構成された、
ヘテロ接合バイポーラトランジスタ。 - 請求項1〜6の何れか一項に記載のヘテロ接合バイポーラトランジスタを電力増幅素子として備える電力増幅モジュール。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2015028974 | 2015-02-17 | ||
JP2015028974 | 2015-02-17 | ||
PCT/JP2015/079022 WO2016132594A1 (ja) | 2015-02-17 | 2015-10-14 | ヘテロ接合バイポーラトランジスタ |
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JPWO2016132594A1 true JPWO2016132594A1 (ja) | 2017-07-20 |
JP6315300B2 JP6315300B2 (ja) | 2018-04-25 |
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US (1) | US10134842B2 (ja) |
JP (1) | JP6315300B2 (ja) |
CN (1) | CN107004600B (ja) |
TW (1) | TWI604530B (ja) |
WO (1) | WO2016132594A1 (ja) |
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US10109724B2 (en) * | 2017-02-22 | 2018-10-23 | Qualcomm Incorporated | Heterojunction bipolar transistor unit cell and power stage for a power amplifier |
US20190181251A1 (en) * | 2017-12-07 | 2019-06-13 | Qualcomm Incorporated | Mesh structure for heterojunction bipolar transistors for rf applications |
JP2020031191A (ja) * | 2018-08-24 | 2020-02-27 | 株式会社村田製作所 | ヘテロ接合バイポーラトランジスタ及び半導体装置 |
JP2020120080A (ja) * | 2019-01-28 | 2020-08-06 | 株式会社村田製作所 | 半導体素子 |
JP2020184580A (ja) * | 2019-05-08 | 2020-11-12 | 株式会社村田製作所 | 半導体装置 |
JP2021048250A (ja) * | 2019-09-18 | 2021-03-25 | 株式会社村田製作所 | 半導体装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH098405A (ja) * | 1995-06-16 | 1997-01-10 | Nippon Telegr & Teleph Corp <Ntt> | 半導体混晶 |
JP2001044212A (ja) * | 1999-07-30 | 2001-02-16 | Fujitsu Ltd | ヘテロ・バイポーラ半導体装置 |
JP2004071669A (ja) * | 2002-08-02 | 2004-03-04 | Sony Corp | 半導体装置 |
JP2005236259A (ja) * | 2004-01-19 | 2005-09-02 | Renesas Technology Corp | ヘテロ接合バイポーラトランジスタ及びその製造方法、及びそれを用いた電力増幅器 |
JP2007145643A (ja) * | 2005-11-28 | 2007-06-14 | Sharp Corp | 化合物、光電変換装置、発光装置および光通信用装置 |
Family Cites Families (1)
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US6768140B1 (en) | 2002-04-03 | 2004-07-27 | Skyworks Solutions, Inc. | Structure and method in an HBT for an emitter ballast resistor with improved characteristics |
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2015
- 2015-10-14 CN CN201580067957.0A patent/CN107004600B/zh active Active
- 2015-10-14 WO PCT/JP2015/079022 patent/WO2016132594A1/ja active Application Filing
- 2015-10-14 JP JP2017500277A patent/JP6315300B2/ja active Active
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2016
- 2016-02-16 TW TW105104449A patent/TWI604530B/zh active
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2017
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH098405A (ja) * | 1995-06-16 | 1997-01-10 | Nippon Telegr & Teleph Corp <Ntt> | 半導体混晶 |
JP2001044212A (ja) * | 1999-07-30 | 2001-02-16 | Fujitsu Ltd | ヘテロ・バイポーラ半導体装置 |
JP2004071669A (ja) * | 2002-08-02 | 2004-03-04 | Sony Corp | 半導体装置 |
JP2005236259A (ja) * | 2004-01-19 | 2005-09-02 | Renesas Technology Corp | ヘテロ接合バイポーラトランジスタ及びその製造方法、及びそれを用いた電力増幅器 |
JP2007145643A (ja) * | 2005-11-28 | 2007-06-14 | Sharp Corp | 化合物、光電変換装置、発光装置および光通信用装置 |
Also Published As
Publication number | Publication date |
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US10134842B2 (en) | 2018-11-20 |
TWI604530B (zh) | 2017-11-01 |
CN107004600B (zh) | 2020-06-19 |
US20170243939A1 (en) | 2017-08-24 |
TW201705284A (zh) | 2017-02-01 |
JP6315300B2 (ja) | 2018-04-25 |
CN107004600A (zh) | 2017-08-01 |
WO2016132594A1 (ja) | 2016-08-25 |
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