JPWO2016079818A1 - プラズマ処理方法 - Google Patents
プラズマ処理方法 Download PDFInfo
- Publication number
- JPWO2016079818A1 JPWO2016079818A1 JP2015533784A JP2015533784A JPWO2016079818A1 JP WO2016079818 A1 JPWO2016079818 A1 JP WO2016079818A1 JP 2015533784 A JP2015533784 A JP 2015533784A JP 2015533784 A JP2015533784 A JP 2015533784A JP WO2016079818 A1 JPWO2016079818 A1 JP WO2016079818A1
- Authority
- JP
- Japan
- Prior art keywords
- film
- etching
- plasma
- mask
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003672 processing method Methods 0.000 title claims abstract description 24
- 238000001020 plasma etching Methods 0.000 claims abstract description 51
- 238000009966 trimming Methods 0.000 claims abstract description 31
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 20
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000007789 gas Substances 0.000 claims description 77
- 239000011651 chromium Substances 0.000 claims description 54
- 229910052804 chromium Inorganic materials 0.000 claims description 12
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 12
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims description 10
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 10
- 239000001307 helium Substances 0.000 claims description 10
- 229910052734 helium Inorganic materials 0.000 claims description 10
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 6
- 229910001882 dioxygen Inorganic materials 0.000 claims description 6
- 230000000873 masking effect Effects 0.000 claims description 3
- 238000005549 size reduction Methods 0.000 abstract description 4
- 230000002265 prevention Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 289
- 238000005530 etching Methods 0.000 description 77
- 229920002120 photoresistant polymer Polymers 0.000 description 52
- 239000007795 chemical reaction product Substances 0.000 description 29
- 238000000034 method Methods 0.000 description 28
- 230000002829 reductive effect Effects 0.000 description 26
- 238000012545 processing Methods 0.000 description 25
- 239000000460 chlorine Substances 0.000 description 24
- 239000000463 material Substances 0.000 description 15
- 238000004380 ashing Methods 0.000 description 12
- 229910052801 chlorine Inorganic materials 0.000 description 12
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 230000009467 reduction Effects 0.000 description 8
- 239000010410 layer Substances 0.000 description 6
- 238000012806 monitoring device Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000003111 delayed effect Effects 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- VMTCKFAPVIWNOF-UHFFFAOYSA-N methane tetrahydrofluoride Chemical compound C.F.F.F.F VMTCKFAPVIWNOF-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/12—Gaseous compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- Hall/Mr Elements (AREA)
Abstract
Description
2 誘電体窓
3 エッチング処理室
4 整合器
5 ガス供給装置
6 電極
7 プラズマ
8 排気装置
9 ファラデーシールド
10 第一の高周波電源
11 第二の高周波電源
12 試料
13 発光モニタリング装置
14 大気ローダ
15 ロードロック室
16 アンロードロック室
17 真空搬送室
18 アッシング処理室
19 真空搬送ロボット
20 第一のカセット
21 第二のカセット
22 第三のカセット
23 AlTiC基板
24 MTJ膜
25 Ta膜
26 Cr膜
27 反射防止膜
28 ホトレジスト膜
29 反応生成物
Claims (5)
- レジストと前記レジストの下方に配置された反射防止膜と前記反射防止膜の下方に配置されたマスク用膜を用いてプラズマエッチングによりタンタル膜をトリミングするプラズマ処理方法において、
前記レジストをマスクとしてプラズマエッチングにより前記反射防止膜と前記マスク用膜をトリミングし、
前記トリミングされた反射防止膜と前記トリミングされたマスク用膜をプラズマにより除去し、
前記トリミングされたレジストと前記トリミングされた反射防止膜をプラズマにより除去した後のマスク用膜をマスクとしてプラズマエッチングにより前記タンタル膜をトリミングすることを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記マスク用膜の厚さは、前記タンタル膜の厚さの1/10以下であることを特徴とするプラズマ処理方法。 - 請求項2に記載のプラズマ処理方法において、
前記マスク用膜は、クロム膜であり、
前記反射防止膜と前記マスク用膜のトリミングは、塩素ガスと酸素ガスの混合ガスを用いたプラズマエッチングにより行われることを特徴とするプラズマ処理方法。 - 請求項3に記載のプラズマ処理方法において、
前記タンタル膜のトリミングは、塩素ガスと四フッ化メタンガスとヘリウムガスの混合ガスを用いたプラズマエッチングにより行われることを特徴とするプラズマ処理方法。 - レジストと前記レジストの下方に配置された反射防止膜と前記反射防止膜の下方に配置されたクロム膜を用いてプラズマエッチングによりタンタル膜をトリミングするプラズマ処理方法において、
前記レジストをマスクとして塩素ガスと酸素ガスの混合ガスを用いたプラズマエッチングにより前記反射防止膜と前記クロム膜をトリミングし、
前記トリミングされた反射防止膜と前記トリミングされたマスク用膜をプラズマにより除去し、
前記トリミングされたレジストと前記トリミングされた反射防止膜をプラズマにより除去した後のクロム膜をマスクとして塩素ガスと四フッ化メタンガスとヘリウムガスの混合ガスを用いたプラズマエッチングにより前記タンタル膜をトリミングすることを特徴とするプラズマ処理方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2014/080568 WO2016079818A1 (ja) | 2014-11-19 | 2014-11-19 | プラズマ処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6040314B2 JP6040314B2 (ja) | 2016-12-07 |
JPWO2016079818A1 true JPWO2016079818A1 (ja) | 2017-04-27 |
Family
ID=55961172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015533784A Active JP6040314B2 (ja) | 2014-11-19 | 2014-11-19 | プラズマ処理方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9506154B2 (ja) |
JP (1) | JP6040314B2 (ja) |
KR (1) | KR101794738B1 (ja) |
TW (1) | TWI568887B (ja) |
WO (1) | WO2016079818A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102273970B1 (ko) * | 2017-12-26 | 2021-07-07 | 주식회사 엘지화학 | 파라데이 상자를 이용한 플라즈마 식각 방법 |
US10475991B2 (en) * | 2018-02-22 | 2019-11-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fabrication of large height top metal electrode for sub-60nm magnetoresistive random access memory (MRAM) devices |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100434133B1 (ko) | 1995-07-14 | 2004-08-09 | 텍사스 인스트루먼츠 인코포레이티드 | 중간층리쏘그래피 |
JPH11271958A (ja) | 1998-02-06 | 1999-10-08 | Internatl Business Mach Corp <Ibm> | 高解像フォトマスクおよびその製造方法 |
JP2002299320A (ja) | 2001-03-29 | 2002-10-11 | Toshiba Corp | エッチング方法 |
JP2006080355A (ja) | 2004-09-10 | 2006-03-23 | Nec Electronics Corp | 半導体装置の製造方法 |
JP2007081383A (ja) | 2005-08-15 | 2007-03-29 | Fujitsu Ltd | 微細構造の製造方法 |
US7635546B2 (en) | 2006-09-15 | 2009-12-22 | Applied Materials, Inc. | Phase shifting photomask and a method of fabricating thereof |
JP4861947B2 (ja) * | 2007-09-26 | 2012-01-25 | 株式会社日立ハイテクノロジーズ | Al2O3膜のドライエッチング方法 |
KR100948770B1 (ko) | 2008-06-27 | 2010-03-24 | 주식회사 에스앤에스텍 | 블랭크 마스크, 포토마스크 및 이의 제조 방법 |
JP2012099589A (ja) | 2010-11-01 | 2012-05-24 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP2013077665A (ja) * | 2011-09-30 | 2013-04-25 | Toppan Printing Co Ltd | パターン形成方法及びパターン形成体 |
JP5815459B2 (ja) | 2012-04-23 | 2015-11-17 | 株式会社日立ハイテクノロジーズ | プラズマエッチング方法 |
US8747680B1 (en) * | 2012-08-14 | 2014-06-10 | Everspin Technologies, Inc. | Method of manufacturing a magnetoresistive-based device |
-
2014
- 2014-11-19 KR KR1020157020877A patent/KR101794738B1/ko active IP Right Grant
- 2014-11-19 WO PCT/JP2014/080568 patent/WO2016079818A1/ja active Application Filing
- 2014-11-19 JP JP2015533784A patent/JP6040314B2/ja active Active
- 2014-11-19 US US14/770,082 patent/US9506154B2/en active Active
-
2015
- 2015-08-13 TW TW104126391A patent/TWI568887B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW201619441A (zh) | 2016-06-01 |
KR101794738B1 (ko) | 2017-11-07 |
WO2016079818A1 (ja) | 2016-05-26 |
US20160138170A1 (en) | 2016-05-19 |
JP6040314B2 (ja) | 2016-12-07 |
US9506154B2 (en) | 2016-11-29 |
KR20160077012A (ko) | 2016-07-01 |
TWI568887B (zh) | 2017-02-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10438797B2 (en) | Method of quasi atomic layer etching | |
JP4579611B2 (ja) | ドライエッチング方法 | |
US7271107B2 (en) | Reduction of feature critical dimensions using multiple masks | |
US20040171272A1 (en) | Method of etching metallic materials to form a tapered profile | |
US20030180968A1 (en) | Method of preventing short circuits in magnetic film stacks | |
US8506834B2 (en) | Method for dry etching Al2O3 film | |
US9330935B2 (en) | Plasma etching method and plasma etching apparatus | |
US6911346B2 (en) | Method of etching a magnetic material | |
US6410451B2 (en) | Techniques for improving etching in a plasma processing chamber | |
JP6208017B2 (ja) | プラズマエッチング方法 | |
JP2024026599A (ja) | プラズマ処理装置 | |
JP2014107520A (ja) | プラズマエッチング方法 | |
KR20090008240A (ko) | Mram 디바이스 구조체에서 전기적 단락을 제거하기 위한 건식 식각정지 방법 | |
US10658192B2 (en) | Selective oxide etching method for self-aligned multiple patterning | |
US20110171833A1 (en) | Dry etching method of high-k film | |
JP6040314B2 (ja) | プラズマ処理方法 | |
JP4865361B2 (ja) | ドライエッチング方法 | |
JP5815459B2 (ja) | プラズマエッチング方法 | |
JP2001196355A (ja) | 半導体装置の製造方法 | |
JP4979430B2 (ja) | プラズマエッチング方法 | |
JP2004207286A (ja) | ドライエッチング方法および半導体装置の製造方法 | |
KR102448699B1 (ko) | 자기 정렬된 다중 패터닝을 위한 선택적 질화물 에칭 방법 | |
KR102660694B1 (ko) | 플라스마 처리 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160914 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20161011 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20161107 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6040314 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |