JPWO2014171545A1 - Ｉｎ−Ｇａ−Ｚｎ系複合酸化物焼結体およびその製造方法 - Google Patents

Ｉｎ−Ｇａ−Ｚｎ系複合酸化物焼結体およびその製造方法 Download PDF

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Publication number
JPWO2014171545A1
JPWO2014171545A1 JP2015512542A JP2015512542A JPWO2014171545A1 JP WO2014171545 A1 JPWO2014171545 A1 JP WO2014171545A1 JP 2015512542 A JP2015512542 A JP 2015512542A JP 2015512542 A JP2015512542 A JP 2015512542A JP WO2014171545 A1 JPWO2014171545 A1 JP WO2014171545A1
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Japan
Prior art keywords
sintered body
powder
capsule
density
mixed powder
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JP2015512542A
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English (en)
Japanese (ja)
Inventor
邦彦 中田
邦彦 中田
国孝 藤吉
国孝 藤吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukuoka Prefectural Government
Sumitomo Chemical Co Ltd
Original Assignee
Fukuoka Prefectural Government
Sumitomo Chemical Co Ltd
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Filing date
Publication date
Application filed by Fukuoka Prefectural Government, Sumitomo Chemical Co Ltd filed Critical Fukuoka Prefectural Government
Publication of JPWO2014171545A1 publication Critical patent/JPWO2014171545A1/ja
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/638—Removal thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • C04B35/6455—Hot isostatic pressing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3284—Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3286—Gallium oxides, gallates, indium oxides, indates, thallium oxides, thallates or oxide forming salts thereof, e.g. zinc gallate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/549—Particle size related information the particle size being expressed by crystallite size or primary particle size
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/608—Green bodies or pre-forms with well-defined density
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)
JP2015512542A 2013-04-19 2014-04-18 Ｉｎ−Ｇａ−Ｚｎ系複合酸化物焼結体およびその製造方法 Pending JPWO2014171545A1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013088273 2013-04-19
JP2013088273 2013-04-19
PCT/JP2014/061098 WO2014171545A1 (ja) 2013-04-19 2014-04-18 Ｉｎ－Ｇａ－Ｚｎ系複合酸化物焼結体およびその製造方法

Publications (1)

Publication Number Publication Date
JPWO2014171545A1 true JPWO2014171545A1 (ja) 2017-02-23

Family

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JP2015512542A Pending JPWO2014171545A1 (ja) 2013-04-19 2014-04-18 Ｉｎ−Ｇａ−Ｚｎ系複合酸化物焼結体およびその製造方法

Country Status (3)

Country Link
JP (1) JPWO2014171545A1 (zh)
TW (1) TW201509865A (zh)
WO (1) WO2014171545A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109207947B (zh) * 2018-09-28 2020-03-03 上海大学 一种靶材的制备方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03173705A (ja) * 1989-12-01 1991-07-29 Osaka Titanium Co Ltd 高密度焼結体の製造方法
JPH08245220A (ja) * 1994-06-10 1996-09-24 Hoya Corp 導電性酸化物およびそれを用いた電極
JP2002004036A (ja) * 2000-06-20 2002-01-09 Kobe Steel Ltd ＺｎＳ−ＳｉＯ２系ターゲット材およびその製造方法
WO2009157535A1 (ja) * 2008-06-27 2009-12-30 出光興産株式会社 ＩｎＧａＯ3（ＺｎＯ）結晶相からなる酸化物半導体用スパッタリングターゲット及びその製造方法
JP2011195924A (ja) * 2010-03-23 2011-10-06 Sumitomo Electric Ind Ltd Ｉｎ−Ｇａ−Ｚｎ系複合酸化物焼結体およびその製造方法
WO2012017659A1 (ja) * 2010-08-05 2012-02-09 三菱マテリアル株式会社 スパッタリングターゲットの製造方法およびスパッタリングターゲット

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03173705A (ja) * 1989-12-01 1991-07-29 Osaka Titanium Co Ltd 高密度焼結体の製造方法
JPH08245220A (ja) * 1994-06-10 1996-09-24 Hoya Corp 導電性酸化物およびそれを用いた電極
JP2002004036A (ja) * 2000-06-20 2002-01-09 Kobe Steel Ltd ＺｎＳ−ＳｉＯ２系ターゲット材およびその製造方法
WO2009157535A1 (ja) * 2008-06-27 2009-12-30 出光興産株式会社 ＩｎＧａＯ3（ＺｎＯ）結晶相からなる酸化物半導体用スパッタリングターゲット及びその製造方法
JP2011195924A (ja) * 2010-03-23 2011-10-06 Sumitomo Electric Ind Ltd Ｉｎ−Ｇａ−Ｚｎ系複合酸化物焼結体およびその製造方法
WO2012017659A1 (ja) * 2010-08-05 2012-02-09 三菱マテリアル株式会社 スパッタリングターゲットの製造方法およびスパッタリングターゲット

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WO2014171545A1 (ja) 2014-10-23

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