JPWO2014065401A1 - Cutting device - Google Patents

Abstract

A horn (35) provided with a pressing surface (35a) having an area smaller than the cutting range (Mc) by the cutting die (M) is used to cut the sheet-like member (S) (35 ), The sheet-like member (S) is continuously pressed while being vibrated in the pressing direction (Z) with an amplitude larger than the pressing distance (the thickness of the sheet-like member (S)), and the cutting die (M) and the sheet-like shape By moving the opposing position of each member (S) to the pressing surface (35a) relative to the pressing surface (35a) at a constant speed in the movement direction (Y), the pressing surface (35a) of the horn (35). ) Can continuously move the pressing position of the sheet-like member (S) at a constant speed, so that the cutting range (Mc) of the cutting die (M) is covered by the small horn (35). The sheet-like member (S) is efficiently backed up. Pressurized can be cut with respect to up surface (21).

Description

  The present invention relates to a cutting apparatus for cutting a sheet-like member into a predetermined shape using a cutting die while applying vibration.

  Conventionally, a sheet-like member is sandwiched between a cutting blade (cutting die) provided on one side of a sheet-like member such as a gel sheet and a pressing surface of a horn (pressing body) provided on the other side. An apparatus is known in which a horn is ultrasonically vibrated and ultrasonic vibration is applied in a pressed state, whereby a sheet-like member is cut into a predetermined shape (see, for example, Patent Document 1). In the apparatus configured as described above, the ultrasonic vibration is applied when the sheet-like member is cut by the cutting die, so that the sheet-like member is predetermined with a lower pressure than when no ultrasonic vibration is applied. The shape is cut with high accuracy.

JP-A-8-150600 (paragraphs 0010 to 0045, FIGS. 1 to 3, abstract, etc.)

  By the way, in the above-described apparatus, the sheet-like member is cut into a predetermined shape at once by being sandwiched between the pressing surface of the pressing body and the cutting die and pressed, but the sheet-like member is cut by a large cutting die. When cutting is performed over a wide range, there are the following problems. That is, when a large cutting die is used so that the sheet-like member can be cut over a wide range, the pressing surface of the pressing surface is set so that the sheet-like member can be pressed all at once over the entire cutting range of the cutting die. It is necessary to prepare a large pressing body having a large area. However, in this case, the amplitude of the pressing surface due to the ultrasonic vibration of the pressing body differs greatly between the distant positions on the pressing surface and the phase difference becomes large. It is difficult to uniformly apply ultrasonic vibration having the same amplitude to the sheet-like member over the entire range. In addition, as a large pressing body is prepared, the support means for supporting the pressing body needs to have a large structure, which causes a problem that the apparatus becomes large.

  Therefore, the area of the pressing surface is smaller than the cutting processing range by the cutting die, that is, the sheet-like member is formed by the pressing surface of the small pressing body configured to have a smaller area than the processing range of the sheet-like member by the cutting die. A configuration is also conceivable in which the sheet-like member is pressed over the entire cutting processing range of the cutting die by locally pressing the cutting die while sequentially moving the pressing position with respect to the cutting die. However, in this case, after the pressing body is moved away from the sheet-like member and the pressing is stopped, the relative position between the pressing surface and the sheet-like member is moved, and then the process of pressing the sheet-like member again with the pressing body is repeated. There was a problem that it had to be executed and was inefficient.

  The present invention has been made in view of the above-described problems, and cuts a sheet-shaped member by efficiently pressing a sheet-like member with a small pressing body provided with a pressing surface whose area is smaller than the cutting processing range by a cutting die. It aims at providing the technology to do.

In order to achieve the above-described object, a cutting apparatus according to the present invention is arranged in a cutting apparatus that cuts a sheet-like member into a predetermined shape using a cutting mold while applying vibration. A backup member having a backup surface, and a pressing surface that is formed in a smaller area than the cutting processing range by the cutting die and presses the sheet-like member in the pressing direction against the backup surface on which the cutting die is disposed. Movement that moves the opposed position of the provided pressing body and the pressing surface of each of the cutting die and the sheet-like member relative to the pressing surface at a constant speed in a moving direction orthogonal to the pressing direction. And vibration that vibrates the pressing body with an amplitude larger than the pressing distance in the pressing direction of the pressing body necessary for cutting the sheet-like member. It is characterized in that it comprises a forming unit (claim 1).

  Further, the vibration generating means ultrasonically vibrates the pressing body to apply ultrasonic vibrations from the pressing surface to the sheet-like member, and a pressing direction of the pressing body ultrasonically vibrated by the vibrator And pressurizing means that pressurizes the sheet-like member against the backup surface by the pressing surface, and the pressing means causes the pressing body to vibrate ultrasonically by the vibrator in the pressing direction. The sheet-like member may be continuously pressed while vibrating with an amplitude larger than the thickness of the sheet-like member (Claim 2).

  Further, the vibration generating means ultrasonically vibrates the pressing body to apply ultrasonic vibrations from the pressing surface to the sheet-like member, and a pressing direction of the pressing body ultrasonically vibrated by the vibrator And pressurizing means that presses the sheet-like member against the backup surface by the pressing surface, and the vibrator is larger than the thickness of the sheet-like member in the pressing direction of the pressing body. It is preferable to vibrate ultrasonically with an amplitude.

  The pressurizing means may drive the pressing body so that the pressure applied to the sheet-like member is constant at a predetermined value (claim 4).

  Further, it is desirable that the pressing surface is formed wider in the width direction perpendicular to the pressing direction and the moving direction and shorter in the moving direction than the cutting processing range by the cutting die. (Claim 5).

  The backup member includes a stage on which the sheet-like member is fixedly disposed on the backup surface so as to cover the cutting mold, and the moving means moves the stage in the moving direction at the constant speed. (Claim 6).

  In addition, the backup member includes a rotating drum having the backup surface formed by the outer peripheral surface thereof, and the moving means sandwiches the sheet-like member between the pressing surface of the outer peripheral surface of the rotating drum. The rotating drum may be rotated such that the moving drum moves at the constant speed in the moving direction.

  The cutting die may be provided with a cutting blade for cutting the sheet-like member and a base functioning as an anvil for the pressing surface of the pressing body (Claim 8).

  Further, the cutting method according to the present invention is a cutting method for cutting a sheet-like member into a predetermined shape using a cutting die while applying vibration, with respect to the backup surface of the backup member on which the cutting die is arranged. Then, when the sheet-like member is pressed in the pressing direction and pressed by the pressing surface of the pressing body formed with a smaller area than the cutting processing range by the cutting die, the pressing member is While pressing the sheet-like member continuously while vibrating with an amplitude larger than the pressing distance in the pressing direction of the pressing body necessary for cutting, the pressing surfaces of the cutting die and the sheet-like member, Are moved relative to the pressing surface at a constant speed in a moving direction orthogonal to the pressing direction (claim 9).

  According to the first and ninth aspects of the present invention, when the sheet-like member is cut into a predetermined shape using the cutting die while applying vibration, the area is formed smaller than the cutting range by the cutting die. Vibration is applied to the sheet-like member in a state in which the sheet-like member is pressed in the pressing direction against the backup surface of the backup member on which the cutting die is disposed by the pressing surface of the pressed body. At this time, the vibration generating means vibrates the pressing body with an amplitude larger than the pressing distance in the pressing direction of the pressing body necessary for cutting the sheet-like member at a predetermined vibration cycle. Therefore, in the vibration cycle of the pressing body by the vibration generating means, the cutting die and the sheet are moved by the moving means at a timing when the pressing body is separated from the sheet-like member and the pressing force of the pressing surface against the backup surface by the pressing surface is weakened. The shaped member can be moved simultaneously relative to the pressing surface.

  Therefore, the following effects can be achieved by appropriately setting the relative moving speed of the cutting die and the sheet-like member and the pressing surface by the moving means and the vibration cycle of the pressing body by the vibration generating means. Can do. That is, the sheet-like member is continuously applied while vibrating the pressing body in the pressing direction while applying vibration to the sheet-like member by the pressing body provided with the pressing surface whose area is smaller than the cutting processing range by the cutting die. And press and pressurize the cutting die and the sheet-like member, respectively, so that their positions facing the pressing surface are moved relative to the pressing surface at a constant speed in a moving direction orthogonal to the pressing direction. be able to. Therefore, since the pressing position of the sheet-like member by the pressing surface of the pressing body can be continuously moved at a constant speed, the sheet-like member is efficiently used over the entire cutting processing range of the cutting die by the small pressing body. It can be cut by pressurizing well against the backup surface.

  According to the second aspect of the present invention, when the sheet-like member is cut into a predetermined shape by using the cutting die, a pressing surface having an area smaller than the cutting processing range by the cutting die is provided. The pressed body is driven in the pressing direction by the pressing means provided in the vibration generating means. The vibration generating means is in a state where the sheet-like member is pressed in the pressing direction by the pressing surface of the pressing body driven by the pressing means with respect to the backup surface of the backup member on which the cutting die is arranged. The ultrasonic vibration is applied to the sheet-like member from the pressing surface of the pressing body that is ultrasonically vibrated by the vibrator included in the sheet. At this time, the sheet-like member is continuously pressed by the pressing means while vibrating the pressing body that is ultrasonically vibrated by the vibrator at a predetermined vibration cycle with an amplitude larger than the thickness of the sheet-like member. . Therefore, in the vibration cycle of the pressing body by the pressurizing means, the cutting die and the sheet are moved by the moving means at a timing when the pressing body is separated from the sheet-like member and the pressure applied to the sheet-like member against the backup surface by the pressing surface becomes weak. The shaped member can be moved simultaneously relative to the pressing surface.

  Therefore, the following effects can be achieved by appropriately setting the relative moving speed of the cutting die and the sheet-like member and the pressing surface by the moving means and the vibration cycle of the pressing body by the pressing means. Can do. That is, while applying ultrasonic vibration to the sheet-like member by a pressing body provided with a pressing surface whose area is smaller than the cutting processing range by the cutting mold, the ultrasonic vibrating body is vibrated in the pressing direction. While pressing the sheet-like member continuously, the opposed positions of the cutting die and the sheet-like member with respect to the pressing surface are relative to the pressing surface at a constant speed in the moving direction orthogonal to the pressing direction by the moving means. Can be moved to. Therefore, since the pressing position of the sheet-like member by the pressing surface of the pressing body can be continuously moved at a constant speed, the sheet-like member is efficiently used over the entire cutting processing range of the cutting die by the small pressing body. It can be cut by pressurizing well against the backup surface.

  According to the invention described in claim 3, when the sheet-like member is cut into a predetermined shape by using the cutting die, a pressing surface having an area smaller than the cutting processing range by the cutting die is provided. The pressed body is driven in the pressing direction by the pressing means provided in the vibration generating means. The vibration generating means is in a state where the sheet-like member is pressed in the pressing direction by the pressing surface of the pressing body driven by the pressing means with respect to the backup surface of the backup member on which the cutting die is arranged. The ultrasonic vibration is applied to the sheet-like member from the pressing surface of the pressing body that is ultrasonically vibrated by the vibrator included in the sheet. At this time, while the vibrator causes the pressing body to vibrate ultrasonically with a larger amplitude than the thickness of the sheet-like member at a predetermined vibration period in the pressing direction, the pressing body that ultrasonically vibrates is driven in the pressing direction by the pressing means. Thus, the sheet-like member is continuously pressurized. Therefore, in the vibration cycle of the pressing body by the vibrator, the cutting body and the sheet shape are moved by the moving means at a timing when the pressing body is separated from the sheet-like member and the pressure applied to the sheet-like member against the backup surface by the pressing surface is weakened. The member can be moved simultaneously relative to the pressing surface.

  Therefore, the following effects can be achieved by appropriately setting the relative moving speed of the cutting die and the sheet-like member and the pressing surface by the moving means and the vibration cycle of the pressing body by the vibrator. it can. That is, while applying ultrasonic vibrations to the sheet-like member by a pressing body provided with a pressing surface whose area is smaller than the cutting processing range by the cutting die, the pressing body is pressed in the pressing direction from the thickness of the sheet-like member. The sheet-like member is continuously pressed while ultrasonically vibrating with a large amplitude, and the position facing the pressing surface of each of the cutting die and the sheet-like member is fixed at a constant speed in the moving direction perpendicular to the pressing direction by the moving means. Can be moved relative to the pressing surface. Therefore, since the pressing position of the sheet-like member by the pressing surface of the pressing body can be continuously moved at a constant speed, the sheet-like member is efficiently used over the entire cutting processing range of the cutting die by the small pressing body. It can be cut by pressurizing well against the backup surface.

  According to the invention of claim 4, since the pressing body vibrates in the pressing direction, the pressing body is pressed by the pressing means when the sheet-like member is pressed against the backup surface (cutting die) by the pressing body. It is difficult to accurately control the gap (gap) between the pressing surface of the pressing body and the backup surface (cutting die) when driven in the direction. Accordingly, the pressing means is controlled so that the pressing body is driven so that the pressure applied to the sheet-like member is constant at a predetermined value, so that the cutting die placed on the backup surface by the pressing body is excessive. Therefore, it is possible to prevent the cutting die from being pressed and damaged by the pressing body.

  According to the invention of claim 5, the pressing surface of the pressing body is formed wider in the width direction perpendicular to the pressing direction and the moving direction than the cutting processing range by the cutting die, and the length in the moving direction is shortened. Therefore, by moving the cutting mold and the sheet-like member placed on the backup surface relative to the pressing surface of the pressing body by the length of the cutting processing range in the moving direction by the moving means, The sheet-like member can be efficiently pressed against the backup surface and cut by the pressing surface of the body over the entire cutting processing range of the cutting die.

  According to the invention of claim 6, as the backup member, the stage in which the sheet-like member is fixedly arranged on the backup surface so as to cover the cutting mold is moved by the moving means at a constant speed in the moving direction, thereby cutting the cutting mold. In addition, it is possible to provide a cutting device having a practical configuration capable of moving the sheet-like member at a constant speed relative to the pressing surface.

  According to the invention of claim 7, as the backup member, a position where the sheet-like member is sandwiched between the rotary drum having the backup surface formed by the outer peripheral surface thereof and the pressing surface of the outer peripheral surface of the rotary drum by the moving means. Can be moved relatively at a constant speed relative to the pressing surface by rotating the cutting die placed on the outer peripheral surface of the rotating drum by rotating so as to move at a constant speed in the moving direction. A cutting device can be provided.

  According to the invention of claim 8, since the cutting die is provided with the cutting blade for cutting the sheet-like member and the base functioning as the anvil for the pressing surface of the pressing body, a plurality of sheet-like members are provided. When the member is overlapped and formed, the sheet-like member is cut at a position sandwiched between the pressing surface of the pressing body and the cutting blade, and at the same time, between the pressing surface of the pressing body and the base. At the sandwiched position, a plurality of members forming the sheet-like member can be pressure bonded.

It is a side view showing the cutting device concerning a 1st embodiment of the present invention. It is the principal part enlarged view which looked at the cutting processing apparatus of FIG. 1 from the front. It is a figure for demonstrating the vibration aspect of a press body. It is a top view of a cutting type. It is a side view which shows the cutting processing apparatus concerning 2nd Embodiment of this invention. It is a side view which shows the head part and pressurization means of the cutting processing apparatus concerning 3rd Embodiment of this invention. It is a longitudinal cross-sectional view which shows the horn with which the cutting processing apparatus concerning 4th Embodiment of this invention is provided. It is a figure which shows the supply method of the release film in the cutting processing apparatus concerning 5th Embodiment of this invention. It is a perspective view which shows the cutting die with which the cutting processing apparatus concerning 6th Embodiment of this invention is provided. It is a figure which shows the cutting process in the cutting apparatus of FIG. 9, (a) shows the state before starting a cutting process, (b) shows the state after a cutting process is complete | finished. It is a figure for demonstrating the movement state of the stage in the pressurization period of the cutting processing apparatus concerning 7th Embodiment of this invention. It is a figure for demonstrating the movement state of the stage in the pressurization period of the cutting processing apparatus concerning 8th Embodiment of this invention.

<First Embodiment>
A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a side view showing a cutting apparatus according to a first embodiment of the present invention, and FIG. 2 is an enlarged view of a main part when the cutting apparatus of FIG. 1 is viewed from the front. FIG. 3 is a view for explaining a vibration mode of the pressing body, and FIG. 4 is a plan view of a cutting die.

(Cutting machine)
1 and 2 includes a ceramic green sheet, a semiconductor wafer, a circuit board, a laminated substrate made of synthetic resin, a metal plate, silicon, ferrite, quartz, glass, ceramic, a resin plate, and a single-layer metal thin film. , A metal foil, a non-woven fabric, paper, a resin sheet, and a sheet-like member S such as a laminate thereof are cut into a predetermined shape using a cutting die M, and a stage 2 on which the cutting die M is placed; The head unit 3 including the resonator 31 that applies ultrasonic vibration to the sheet-like member S, and the pressurizing unit that drives the resonator 31 supported by the support unit 33 to reciprocate in the arrow Z direction that is the pressing direction. 4, a moving means 5 that drives the stage 2 to reciprocate in the direction of the arrow Y that is the moving direction, and a control device (not shown) that controls each part of the cutting apparatus 1.

  The stage 2 (corresponding to the “backup member” of the present invention) has a backup surface 21 on which the cutting die M is arranged. The backup surface 21 includes a vacuum suction mechanism, an electrostatic suction mechanism, a mechanical chuck mechanism, and the like. A general holding mechanism (not shown) is provided, and the cutting die M is fixedly disposed on the backup surface 21 by being held by the holding mechanism. Further, both end portions in the arrow Y direction of the sheet-like member S arranged so as to cover the cutting die M fixedly arranged on the backup surface 21 are respectively a long plate-like clamp member 22 and an arrow Y of the stage 2. The sheet-like member S is fixedly disposed on the backup surface 21 by being sandwiched between the flange portions 23 formed on both side portions in the direction and tightened with screws or bolts not shown in the figure. .

  As shown in FIG. 4, the cutting die M is a Thomson blade die, etching blade die, or engraving in which a cutting blade Mb is provided in a predetermined plan view shape on one main surface of a substantially rectangular substrate Ma in plan view. It can be constituted by a general cutting die such as a blade die, a pinnacle die, etc., and has a predetermined cutting processing range Mc whose range is determined based on the installation range of the cutting blade Mb on one main surface of the substrate Ma. ing. The planar view shape of the substrate Ma and the cutting blade Mb may be any shape as long as the sheet-like member S can be cut into a predetermined shape by the cutting die M. As shown in FIG. The cutting blade Mb may be installed so that the sheet-like member S is punched into a predetermined shape in plan view, or the cutting blade Mb may be installed so as to separate the sheet-like member S at predetermined intervals, for example.

  In this embodiment, the sheet-like member S includes a general resin release film Sb having a thickness of about 50 μm to about 100 μm on one main surface of a metal foil Sa such as Cu, Al, Ag, or Au. It is formed by being provided.

  The head unit 3 includes a resonator 31 having a vibrator 32 (vibration generating means) connected to one end thereof, and a support means 33 that supports the resonator 31, and the vibrator 32 includes the resonator 31 (horn 35). Is applied to the sheet-like member S from the pressing surface 35a.

  Specifically, the resonator 31 is controlled by the control device and resonates with the ultrasonic vibration generated by the vibrator 32 and ultrasonically vibrates in the direction of its central axis. The other end of the booster 34 and one end of the horn 35 are connected by a headless screw so that the center axes of the boosters 34 are coaxial.

  In this embodiment, for example, the booster 34 is formed to have a length of one wavelength of the resonance frequency so that the substantially center position in the direction of arrow Z in FIG. Yes. At this time, two positions that are a quarter wavelength away from each maximum amplitude point in the arrow Z direction correspond to the first and second minimum amplitude points of the booster 34, respectively. Moreover, the booster 34 is formed in the column shape whose cross-sectional shape is circular. The vibrator 32 is connected to one end of the booster 34 by a headless screw so as to be coaxial with the central axis of the booster 34.

  In addition, concave grooves are formed along the respective circumferential directions on the outer peripheral surface of the booster 34 at positions corresponding to the first and second minimum amplitude points, whereby the booster 34 (resonator 31) is supported by the support means 33. A gripped portion is formed to be gripped. In this embodiment, the gripped portion is formed so that the cross-sectional shape substantially orthogonal to the central axis of the booster 34 is an octagonal shape, but the cross-sectional shape is a circular shape or other polygonal shape. A gripped portion may be formed.

  The horn 35 (corresponding to the “pressing body” of the present invention) is formed to have a smaller area than the cutting range Mc by the cutting die M, and the backup surface 21 of the stage 2 on which the cutting die M is disposed. The pressing surface 35a is pressed against the sheet member, and ultrasonic vibration is applied from the pressing surface 35a to the sheet-like member S by ultrasonic vibration. The horn 35 is formed to have a half wavelength length of the resonance frequency so that, for example, both end positions in the arrow Z direction in FIG. At this time, the substantially center position of the horn 35 in the arrow Z direction corresponds to the third minimum amplitude point. Moreover, as shown in FIG. 1 and FIG. 2, the horn 35 is formed in a rectangular parallelepiped shape. The pressing surface 35a of the horn 35 is wider than the severable range Mc of the cutting die M in the width direction X substantially perpendicular to the pressing direction Z and the moving direction Y (the width Wh of the horn 35 ≧ the severable range Mc And the length Lh in the moving direction Y is formed short (the length Lh of the horn 35 <the length Lm of the cuttable range Mc).

  In this embodiment, the resonator 31 is configured so that its resonance frequency is about 15 kHz to about 60 kHz and its vibration amplitude is about 2 μm to about 300 μm, and the ultrasonic vibration generated by the vibrator 32. When the resonator 31 is ultrasonically vibrated by resonance, ultrasonic vibration is applied to the sheet-like member S from the pressing surface 35a of the horn 35.

  The support means 33 includes a base portion 36 and a clamp means 37, and supports the resonator 31 by holding the gripped portion of the booster 34 with the clamp means 37. The base portion 36 includes the pressurizing means 4. A screw hole to be screwed into the ball screw 42 is formed in the arrow Z direction.

  The clamping means 37 is provided at two locations on the base portion 36 so that the two gripped portions formed on the booster 34 can be gripped. The clamp means 37 holds the gripped portions of the booster 34 respectively. Two members are provided. Specifically, the first and second members of the clamping means 37 are provided with recesses that match the cross-sectional shape of the gripped portion. And the 1st and 2nd of the clamp means 37 supported by the base part 36 in the concave groove | channel which forms a to-be-held part so that the to-be-held part of the booster 34 may be pinched by the recessed part of a 1st and 2nd member. The members are inserted and the first and second members are fixed with bolts, whereby the gripped portion of the booster 34 is gripped by the clamp means 37.

  Note that the configuration of the support means 33 that supports the resonator 31 is not limited to the clamp means 37 that is fixed with bolts while holding (clamping) the gripped portion formed on the booster 34 as described above. Any configuration that can support the gripped portion of the booster 34, such as a mechanical clamping mechanism configured to be electrically controlled or a clamping mechanism that can be attached with one touch, may be used.

  The position of the gripped portion formed in the resonator 31 is not limited to the minimum amplitude point, and the gripped portion may be formed at an arbitrary position of the resonator 31. The configuration of the gripped portion is not limited to a configuration in which a concave groove is formed along the circumferential direction on the outer peripheral surface of the resonator 31. For example, a convex shape along the circumferential direction is formed on the outer peripheral surface of the resonator 31. As long as it can be gripped by the support means 33, such as a configuration in which a flange is formed, the gripped portion may be configured in any shape. Further, the gripped portion may be supported by the support means 33 via an elastic member such as an O-ring or a diaphragm.

  The pressing unit 4 (vibration unit) drives the resonator 31 supported by the supporting unit 33 in the pressing direction Z so that the pressing surface 35 a of the horn 35 faces the backup surface 21 of the stage 2 to move the stage 2. And a drive motor 41 and a ball screw 42. In addition, a guide 43 is coupled to a support (not shown) standing on a gantry (not shown), and the pressurizing means 4 is connected to the support and the guide 43 via a frame 44.

  Then, when the drive motor 41 rotates under the control of the control device, the convex rail 43a provided on the guide 43 in the arrow Z direction and the guide (not shown) provided on the support means 33 are in sliding contact. Then, the support means 33 screwed into the ball screw 42 moves up and down in the movement direction Z, whereby the resonator 31 supported by the support means 33 moves closer to or away from the stage 2.

  Further, the pressurizing unit 4 adjusts the driving torque of the driving motor 41 based on the control by the control device, thereby bringing the resonator 31 supported by the supporting unit 33 close to the stage 2 with a predetermined pressing force. It is configured to be able to. Further, the pressurizing means 4 switches the drive motor 41 in the forward and reverse directions with a predetermined vibration cycle based on the control by the control device, thereby causing the resonator 31 supported by the support means 33 in the pressing direction Z. It is configured to be able to vibrate with a predetermined vibration period and amplitude.

  In addition, the support is provided with a linear encoder (not shown), whereby the height of the head unit 3 is detected, and the drive motor 41 is controlled by the control device based on the detection signal of the linear encoder, The height of the head part 3 can be adjusted.

  The direction of the center axis of the resonator 31 is substantially the same as the screw hole formed in the base portion 36, that is, the direction of the center axis of the resonator 31 and the moving direction of the resonator 31 by the pressing means 4 (pressing direction Z The resonator 31 is supported by the support means 33 so that the pressing surface 35a of the horn 35 faces the stage 2. Accordingly, when the base portion 36 is moved downward by the pressurizing means 4, the resonator 31 (horn 35) is driven in the pressing direction Z so as to be integrally close to the stage 2. Is added from the pressing surface 35 a to the sheet-like member S placed on the backup surface 21 of the stage 2, and the sheet-like member S is pressed against the backup surface 21 of the stage 2 by the pressing surface 35 a.

  Further, as shown in FIG. 1, the pressurizing unit 4 is configured to reduce the thickness of the sheet-like member S (with the cutting die M) at a predetermined vibration cycle (about 5 Hz to about 100 Hz) in the pressing direction Z. While the sheet-like member S is vibrated with an amplitude Ah (about 0.1 mm to about 2.0 mm) larger than the pressing distance Z in the pressing direction Z of the horn 35 necessary for cutting the sheet-like member S, the sheet-like member S is continuously used. Pressurize. In this embodiment, as indicated by the solid line in FIG. 3, the pressure applied to the sheet-like member S is applied during the period in which the pressure in the pressing direction Z is applied to the sheet-like member S in the vibration cycle of the resonator 31. The pressurizing means 4 is controlled by the control device so as to vibrate the resonator 31 so as to be constant at a predetermined value.

  The moving means 5 moves the stage 2 in the moving direction Y at a constant speed, so that the facing positions of the cutting mold M and the sheet-like member S with the pressing surface 35a are constant in the moving direction Y orthogonal to the pressing direction Z. A drive motor 51, a ball screw 52, a moving member 53 provided with a screw hole screwed to the ball screw 52, and a guide 54 are moved relative to the pressing surface 35a at a speed. I have.

  As shown in FIG. 2, the stage 2 is guided by guides 54 provided on both sides in the arrow X direction of the base 55 along the arrow Y direction so as to be reciprocally movable in the arrow Y direction (movement direction Y). In this state, it is supported from the lower surface side. The ball screw 52 is arranged so that the major axis direction thereof is along the arrow Y direction at a substantially central position in the arrow X direction of the base 55, and the ball screw 52 is arranged in the arrow Y direction of the base 55. Frames 56 provided on both sides are supported so as to be rotatable about the central axis as a rotation center. The moving member 53 is coupled to the lower surface of the stage 2 in a state of being screwed with the ball screw 52.

  Then, when the drive motor 51 connected to one end of the ball screw 52 is rotated by being controlled by the control device, the moving member 53 screwed with the ball screw 52 reciprocates in the moving direction Y, whereby the coupling member The stage 2 coupled to 53 reciprocates in the movement direction Y while being guided by the guide 54.

(Cutting processing)
Next, an example of the cutting process performed in the cutting apparatus 1 will be described.

  First, after the sheet-like member S is fixedly arranged at a predetermined position on the backup surface 21 of the stage 2, the stage 2 is driven by the moving means 5, thereby moving the cutting die M (cutting range Mc) in the moving direction Y. Is positioned at a position facing the pressing surface 35a of the horn 35 (the left side as viewed in FIG. 1). Next, when the head unit 3 is driven in the pressing direction Z by the pressing unit 4, the sheet-like member S is pressed by the pressing surface 35 a of the horn 35 against the backup surface 21 of the stage 2 on which the cutting die M is arranged. Is pressed in the pressing direction Z and pressurized.

  Subsequently, application of ultrasonic vibration from the pressing surface 35a to the sheet-like member S is started when the vibrator 32 is driven and the resonator 31 is ultrasonically vibrated. The vibration with an amplitude larger than the thickness of the sheet-like member S in the pressing direction Z of the resonator 31 is started. When the stage 2 is driven by the moving means 5, the cutting die M and the sheet-like member S in the moving direction Y (leftward toward the paper surface of FIG. 1) with respect to the pressing surface 35a at a constant speed. The move starts.

  Next, the stage 2 is driven in the moving direction Y by the moving means 5, so that the rear end portion (on the right side as viewed in FIG. 1) of the cutting die M (cutting range Mc) in the moving direction Y is the horn 35. Is moved to a position opposite to the pressing surface 35a, the ultrasonic vibration of the resonator 31 by driving the vibrator 32 and the vibration of the resonator 31 by the pressurizing means 4 are stopped, and the resonator 31 is pressed. 4 is driven in a direction away from the stage 2 to move to a predetermined standby position, and the cutting process is completed.

  As described above, in this embodiment, when the sheet-like member S is cut into a predetermined shape using the cutting die M, the pressing surface formed with a smaller area than the cutting range Mc by the cutting die M. The horn 35 provided with 35 a is driven in the pressing direction Z by the pressing means 4. The sheet-like member S is pressed in the pressing direction Z by the pressing surface 35a of the horn 35 (resonator 31) driven by the pressing means 4 against the backup surface 21 of the stage 2 on which the cutting die M is arranged. In this state, ultrasonic vibration is applied to the sheet-like member S from the pressing surface 35a of the horn 35 that ultrasonically vibrates. At this time, the sheet-like member S is continuously pressurized by the pressurizing means 4 while vibrating the horn 35 that is ultrasonically vibrated with a larger amplitude than the thickness of the sheet-like member S in the pressing direction Z at a predetermined vibration period. The Therefore, in the vibration cycle of the horn 35 by the pressurizing means 4, the moving means 5 is at a timing when the horn 35 is separated from the sheet-like member S and the pressure applied to the sheet-like member S against the backup surface 21 by the pressing surface 35a becomes weak. Thus, the cutting die M and the sheet-like member S can be moved simultaneously relative to the pressing surface 35a.

  Therefore, the relative moving speed of the cutting die M and the sheet-like member S and the pressing surface 35a by the moving means 5 and the vibration cycle of the horn 35 (resonator 31) by the pressurizing means 4 are appropriately set. Thus, the following effects can be achieved. That is, while applying ultrasonic vibration to the sheet-like member S by the horn 35 provided with the pressing surface 35a formed with a smaller area than the cutting processing range Mc by the cutting die M, the ultrasonically vibrating horn 35 is pressed. The sheet-like member S is continuously pressed while being vibrated in the direction Z, and the moving positions of the cutting mold M and the sheet-like member S facing the pressing surfaces 35a are perpendicular to the pressing direction Z by the moving means 5. Y can be moved relative to the pressing surface 35a at a constant speed. Accordingly, the pressing position of the sheet-like member S by the pressing surface 35a of the horn 35 can be continuously moved at a constant speed, so that the sheet is spread over the entire cutting processing range Mc of the cutting die M by the small horn 35. The shaped member S can be efficiently pressed and cut against the backup surface 21.

  Further, since the pressurizing means 4 vibrates the horn 35 (resonator 31) that vibrates ultrasonically in the pressing direction Z, the sheet-like member S is pressed against the backup surface 21 (cutting mold M) by the horn 35. It is difficult to accurately control the gap (gap) between the pressing surface 35a of the horn 35 and the backup surface 21 (cutting mold M) when the horn 35 is driven in the pressing direction Z by the pressing means 4. It is. Therefore, the cutting die placed on the backup surface 21 by the horn 35 is controlled by the pressurizing means 4 so that the horn 35 is vibrated so that the pressure applied to the sheet-like member S is constant at a predetermined value. Since it is possible to prevent M from being excessively pressed and pressurized, it is possible to prevent the cutting die M from being pressed by the horn 35 and being damaged.

  Further, the pressing surface 35a of the horn 35 is formed wider in the width direction X perpendicular to the pressing direction Z and the moving direction Y than the cutting range Mc by the cutting die M, and the length Lh in the moving direction Y is shortened. Therefore, the moving means 5 moves the cutting mold M and the sheet-like member S placed on the backup surface 21 relative to the pressing surface 35a of the horn 35 by the length Lm of the cutting range Mc in the moving direction Y. The sheet-like member S can be efficiently pressed and cut with respect to the backup surface 21 by the pressing surface 35a of the horn 35 over the entire cutting processing range Mc of the cutting die M. .

  Further, as the backup member, the stage 2 on which the sheet-like member S is fixedly arranged on the backup surface 21 so as to cover the cutting die M is moved by the moving means 5 in the moving direction Y at a constant speed. The cutting device 1 having a practical configuration capable of moving the sheet-like member S at a constant speed relative to the pressing surface 35a can be provided.

Second Embodiment
A second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a side view showing a cutting apparatus according to the second embodiment of the present invention.

  This embodiment differs from the first embodiment described above in that, as shown in FIG. 5, the cutting device 100 is disposed at a position facing the pressing surface 35a of the horn 35 as a backup member of the present invention. The rotating drum 102 is provided with the outer peripheral surface 121 to form the backup surface of the present invention. The following description will focus on the differences from the first embodiment described above, and the other configurations and operations are the same as those of the first embodiment described above, and therefore the same reference numerals are used to omit the description of the configurations and operations.

  In this embodiment, as shown in FIG. 5, a plurality of cutting dies M are fixedly disposed along a circumferential surface at a predetermined position on the outer circumferential surface 121 of the rotary drum 102. The rotating drum 102 rotates in the direction of the arrow α with its central axis as the center of rotation by being driven by moving means configured by combining a drive motor, a pulley, etc. (not shown). Specifically, in the rotating drum 102 driven by the moving means, the position where the sheet-like member S is sandwiched between the outer peripheral surface 121 of the rotating drum 102 and the pressing surface 35a of the horn 35 is constant in the moving direction Y. Rotate to move. Further, the sheet-like member S is driven by a moving means constituted by a winding roller, a drive motor, etc. (not shown) and moves in the moving direction Y at the same speed as the peripheral speed of the rotating drum 102.

  As described above, in this embodiment, the same effects as those in the first embodiment described above can be obtained, and the following effects can be obtained. That is, as the backup member, the rotary drum 102 in which the backup surface on which a plurality of cutting dies M are arranged at predetermined positions is formed by the outer peripheral surface 121 is pressed against the outer peripheral surface 121 of the rotary drum 102 by a moving means (not shown). The cutting die M placed on the outer peripheral surface 121 of the rotary drum 102 is pressed by rotating the position where the sheet-like member S is sandwiched between the surface 35a and the moving direction Y at a constant speed. It is possible to provide a cutting device 100 having a practical configuration that can be moved at a constant speed relative to 35a.

  Further, since the sheet-like member S can be continuously cut by the plurality of cutting dies M provided on the outer peripheral surface 121 while rotating the rotary drum 102, the sheet-like member S is formed into a predetermined shape very efficiently. Can be cut.

<Third Embodiment>
A third embodiment of the present invention will be described with reference to FIG. FIG. 6 is a side view showing a head part and a pressurizing means of a cutting apparatus according to a third embodiment of the present invention.

  This embodiment differs from the first and second embodiments described above in that, as shown in FIG. 6, the pressurizing means 4 is provided with a cylinder 45, and the screw hole is screwed into the ball screw 42 of the pressurizing means 4. The base portion 36 a of the supporting means 33 and the base portion 36 b of the supporting means 33 provided with the clamping means 37 are connected via a cylinder 45. In this embodiment, the cylinder 45 has an inflow amount of fluid such as air so as to pressurize the base portion 36b with respect to the base portion 36a in the pressing direction Z (downward toward the same figure) with a predetermined constant pressure. Is set. Since other configurations and operations are the same as those in the first and second embodiments described above, the description of the configurations and operations is omitted by assigning the same reference numerals.

  As described above, in this embodiment, the same effects as those of the first and second embodiments described above can be obtained, and the following effects can be obtained. That is, in this embodiment, as shown in FIG. 6, when the resonator 31 is driven in the pressing direction Z by the pressing means 4 and the sheet-like member S is pressed by the pressing surface 35a of the horn 35, the sheet The shaped member S is pressed by the pressing surface 35a of the horn 35 with the same pressing force as the predetermined constant pressing force by which the cylinder 45 presses the base portion 36b. Therefore, the sheet-like member S can be pressed with higher accuracy with a predetermined constant pressure by the pressing surface 35a of the horn 35.

<Fourth embodiment>
A fourth embodiment of the present invention will be described with reference to FIG. FIG. 7: is a longitudinal cross-sectional view which shows the horn with which the cutting processing apparatus concerning 4th Embodiment of this invention is provided.

  This embodiment differs from the first and second embodiments described above in that the corners along the edge of the pressing surface 35a are chamfered as shown in FIG. The curved surface portion 35b is provided along the edge. Other configurations and operations are the same as those in the first to third embodiments described above, and thus the same reference numerals are used to omit descriptions of the configurations and operations.

  If a corner is provided along the edge of the pressing surface 35a of the horn 35, an edge is formed by this corner and the cutting edge of the cutting blade Mb. Therefore, the portion cut by the edge of the sheet-like member S is a corner portion of the edge of the pressing surface 35a as compared with the portion pressed against the cutting blade Mb by the pressing surface 35a of the horn 35 of the sheet-like member S. Since the sheet-like member S is slightly pushed and expanded in the direction of the edge along the apex of the sheet, the degree of plastic deformation is large, and the interval between the separated sheet-like members S is widened. Therefore, when the sheet-like member S is continuously pressed and cut by the pressing surface 35a of the pressing body 35 while moving in the moving direction Y, the portion cut by the edge of the sheet-like member S is sheet-like. Since the member S moves continuously as the member S moves in the moving direction Y, the distance between the separated sheet-like members S may be widened.

  However, as described above, by providing the curved surface portion 35b along the edge of the pressing surface 35a of the horn 35, there is no possibility that the sheet-like member S is pushed and spread in the edge direction by the edge. Therefore, the interval between the separated sheet-like members S can be reduced, and the sheet-like member S can be cut along the cutting line with high accuracy by the cutting blade Mb of the cutting die M.

<Fifth Embodiment>
A fifth embodiment of the present invention will be described with reference to FIG. FIG. 8 is a view showing a method for supplying a release film in the cutting apparatus according to the fifth embodiment of the present invention.

  This embodiment is different from the first to fourth embodiments described above. In the embodiment described above, the sheet-like member S is provided by providing the release film Sb on one main surface of the metal foil Sa to be cut. However, as shown in FIG. 8, the sheet-like member S is constituted only by members such as the metal foil Sa to be cut. Then, as shown in an example of the method for supplying the release film Sb in FIG. 8, the release film Sb wound around the supply roller 57a and the storage roller 57b is formed between the sheet-like member S on the stage 2 and the horn 35. It arrange | positions between the press surfaces 35a. Other configurations and operations are the same as those in the first to fourth embodiments described above, and therefore, the same reference numerals are given and descriptions of the configurations and operations are omitted.

  The release film Sb wound and held around the supply roller 57a and the storage roller 57b is moved by moving the stage 2 by rotating the storage roller 57b in a direction indicated by an arrow in the drawing by a drive means such as a drive motor (not shown). It can be moved in the moving direction Y at the same speed as the speed. With this configuration, the used release film Sb with the trace of the cutting die M used when the sheet-like member S is cut is accommodated in the accommodation roller 57b, and a new separation from the supply roller 57a. The mold film Sb can be supplied between the pressing surface 35a of the horn 35 and the sheet-like member S.

<Sixth Embodiment>
A sixth embodiment of the present invention will be described with reference to FIGS. FIG. 9 is a perspective view showing a cutting die provided in the cutting apparatus according to the sixth embodiment of the present invention. FIG. 10 is a diagram showing a cutting process in the cutting apparatus of FIG. 9, (a) shows a state before starting the cutting process, and (b) shows a state after the cutting process is completed. Indicates. 10A and 10B are cross-sectional views taken along line AA in FIG. 9, respectively.

  This embodiment differs from the first to fifth embodiments described above with the cutting blade Mb in the cutting range Mc provided on one main surface of the substrate Ma of the cutting mold M as shown in FIG. Is provided with a base Md. The upper surface of the base Md functions as an anvil with respect to the pressing surface 35 a of the horn 35.

  Also, as shown in FIGS. 10A and 10B, a sheet-like member S is formed by superposing two or more metal foils Sa. Therefore, the sheet-like member S formed by superimposing the plurality of metal foils Sa is cut at a position sandwiched between the pressing surface 35a of the horn 35 and the cutting blade Mb. The plurality of metal foils Sa forming the sheet-like member S are joined to each other by ultrasonic vibration at a position sandwiched between the pressing surface 35a of the horn 35 and the upper surface of the base Md. Since other configurations and operations are the same as those in the first to fifth embodiments described above, description of the configurations and operations is omitted by assigning the same reference numerals.

  As described above, in this embodiment, in the cutting process, the cutting die M and the sheet-like member S move in the movement direction Y from the position shown in FIG. 10A to the position shown in FIG. Thus, the sheet-like member S is cut at the position of the cutting blade Mb, and the plurality of metal foils Sa are joined to each other at the position of the base Md.

  In addition, as shown in above-mentioned FIG. 1, among several metal foil Sa which forms the sheet-like member S, a release film is on the main surface of metal foil Sa arrange | positioned in the position facing the press surface 35a of the horn 35. Sb may be provided. Further, as shown in FIG. 8 described above, a release film Sb may be supplied between the pressing surface 35a of the horn 35 and the sheet-like member S. As described in the first embodiment, the planar view shape of the substrate Ma and the planar view shapes of the cutting blade Mb and the base Mb are cut into a predetermined shape by the cutting die M. Any shape can be used as long as it can be processed or a plurality of metal foils Sa can be joined to each other at a predetermined position. Further, in order to improve the bonding property between the plurality of metal foils Sa, an uneven pattern may be formed on the upper surface of the base Md.

  As described above, in this embodiment, the same effects as those of the first to fifth embodiments described above can be obtained, and the following effects can be obtained. That is, in the cutting process, the sheet-like member S is cut into a predetermined shape, and at the same time, the plurality of metal foils Sa forming the sheet-like member S can be joined at a predetermined position.

<Seventh embodiment>
A seventh embodiment of the present invention will be described with reference to FIG. FIG. 11 is a view for explaining the moving state of the stage during the pressurizing period of the cutting apparatus according to the seventh embodiment of the present invention.

  This embodiment differs from the first to sixth embodiments described above in that the movement of the stage 2 by the moving means 5 during the pressurization period P is turned off as shown by the solid line in FIG. During this period, the stage 2 stops moving. Other configurations and operations are the same as the configurations and operations of the first to sixth embodiments described above, and thus the same reference numerals are used to omit descriptions of the configurations and operations.

  According to this embodiment, the same effects as those of the first to sixth embodiments described above can be obtained, and the following effects can be obtained. That is, in the pressing period P in which the sheet-like member S is pressed against the backup surface 21 (cutting die M) by the pressing surface 35a of the horn 35 and a large frictional force is generated, the sheet-like member S and the cutting die M are Since the movement of the stage 2 fixedly arranged on the backup surface 21 by the moving means 5 is stopped, it is held between the pressing surface 35 and the backup surface 21 (cutting mold M) by the frictional force generated during the pressurization period P. It is possible to prevent the sheet-like member S from being displaced and the sheet-like member S from being damaged.

  In this embodiment, by stopping the movement of the stage 2 in the pressurization period P, the moving speed of the stage 2 in the pressurization period P is in the period excluding the pressurization period P in one cycle of the low frequency vibration period. Although it is comprised so that it may fall rather than the moving speed of the stage 2, the moving speed of the stage 2 in the pressurization period P is made slower than the moving speed of the stage 2 in the period except the pressurization period P, and the stage 2 is made. It may be simply moved in the moving direction Y by the moving means 5. Even in this case, the moving means 5 of the stage 2 is applied during the pressurizing period P in which the sheet-like member S is pressed against the backup surface 21 (cutting mold M) by the pressing surface 35a of the horn 35 to generate a large frictional force. Therefore, the sheet-like member S sandwiched between the horn 35 and the backup surface 21 (cutting mold M) may be displaced due to the frictional force generated during the pressurization period P, or may be sheet-like. It is possible to prevent the member S from being damaged.

  Note that a pressure sensor constituted by a load cell or the like may be provided on the stage 2 or the head unit 3 so that the pressure applied to the sheet-like member S by the pressing surface 35a can be detected by the pressure sensor. In this case, the pressing period P is detected based on the detected pressing force by the pressing sensor by detecting the pressing force applied to the sheet-like member S by the pressing surface 35a by the pressing sensor, and the sheet-like member in the pressing period P is detected. You may comprise so that the moving speed of S (stage 2, cutting | disconnection type | mold M) may fall rather than the moving speed of the sheet-like member S in the period except the pressurization period P in 1 period of a low frequency vibration period. That is, the moving speed of the sheet-like member S (stage 2, cutting die M) may be adjusted based on the pressure applied by the pressure sensor.

  Further, when the sheet-like member S is not fixed to the stage 2 and the sheet-like member S is supplied to the cutting position in the same manner as shown in FIG. What is necessary is just to make it the movement speed of the sheet-like member S change synchronizing with the stage 2 by being driven by the moving means comprised by the motor etc.

<Eighth Embodiment>
An eighth embodiment of the present invention will be described with reference to FIG. FIG. 12 is a view for explaining the moving state of the stage during the pressurizing period of the cutting apparatus according to the eighth embodiment of the present invention.

  This embodiment is different from the seventh embodiment described above in that the pressurizing means 4 vibrates the resonator 31 in a rectangular wave shape at a low frequency as shown in FIG. Other configurations and operations are the same as the configurations and operations of the first to seventh embodiments described above, and thus the same reference numerals are used to omit descriptions of the configurations and operations.

  The pressurizing means 4 is driven based on a control signal output from the control device so as to vibrate at a low frequency in a rectangular wave shape as indicated by a dotted line in FIG. Note that a slight control delay may occur in the pressurizing unit 4 with respect to a control signal for driving the pressurizing unit 4 in a stepped manner. In this case, for example, the resonator 31 vibrates at low frequency with a slight control delay with respect to the rectangular-wave control signal (dotted line in FIG. 12) as indicated by the solid line in FIG. Then, similarly to the seventh embodiment described above, during the pressurization period P indicated by a thick solid line in FIG. 12, the movement of the stage 2 by the moving means 5 is turned off, and the stage 2 stops moving.

  In addition, when a control delay arises in the pressurizing means 4 as described above, the sheet-like member S (stage) is based on the detected pressurizing force by the pressurizing sensor that detects the pressurizing force applied to the sheet-like member S by the pressing surface 35a. It is preferable to adjust the moving speed of 2). If it does in this way, the moving speed of the sheet-like member S (stage 2) in the pressurization period P can be adjusted reliably. In the first to sixth embodiments described above, the resonator 31 may be vibrated at a low frequency in a rectangular wave shape. The duty ratio for causing the resonator 31 to vibrate at a low frequency in a rectangular wave shape may be set as appropriate according to the material of the sheet-like member S that is the object to be cut.

  According to this embodiment, the same effects as those of the seventh embodiment described above can be achieved.

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. You may combine.

  For example, in the first embodiment described above, similarly to the second embodiment, the sheet member S is moved at the same speed as the moving speed of the stage 2 by moving means constituted by a winding roller, a drive motor, etc. (not shown). Then, the sheet-like member S before being cut may be supplied between the pressing surface 35a of the horn 35 and the stage 2 by moving in the moving direction Y.

  Further, the moving direction of the present invention is not limited to the direction of the arrow Y described above, and the moving direction may be any direction as long as it is a direction orthogonal to the pressing direction Z.

  Further, the configuration of the pressing body and the shape of the pressing surface is not limited to the configuration of the horn 35 described above, but has a pressing surface and is configured to press the sheet-like member S against the backup surface with the pressing surface. If it exists, you may comprise a press body in what kind of shape. Further, the pressing force applied to the sheet-like member S by the pressing body may be set to an optimum pressing force as appropriate in accordance with the material and thickness of the sheet-like member S, the material of the cutting die M, and the like.

  Further, the pressurizing means and the moving means of the present invention are not limited to the above-described configuration, and a known actuator such as a linear motor or a cylinder is used as long as the stage 2, the rotary drum 102, and the resonator 31 can be moved. The pressurizing unit and the moving unit may be configured in any manner. Further, the moving means may be configured such that the head portion 2 moves relative to the sheet-like member S and the cutting die M, or both the head portion 2 and the sheet-like member and the cutting die M are provided. The moving means may be configured to move relative to each other.

  Further, the arrangement positions of the pressing body and the backup member are not limited to the above-described example arranged in the vertical direction toward the paper surface of FIG. 1, and the vertical positions of the pressing body and the backup member are interchanged. Alternatively, the pressing body and the backup member may be arranged side by side in the left-right direction toward the paper surface of FIG.

  In the embodiment described above, the horn 35 that is ultrasonically vibrated by the vibrator 32 is vibrated by the pressing means 4 with an amplitude larger than the thickness of the sheet-like member S in the pressing direction Z. Thus, the horn 35 may be ultrasonically vibrated with an amplitude larger than the thickness of the sheet-like member S in the pressing direction Z. Even if comprised in this way, there can exist an effect similar to embodiment mentioned above.

  Moreover, in above-mentioned embodiment, what provided the release film Sb in one main surface of metal foil Sa is comprised as the sheet-like member S, and the amplitude becomes larger than the thickness of this sheet-like member S. The horn 35 is configured to vibrate in the pressing direction Z. However, the release film Sb may not need to be cut while the metal foil Sa is cut. In this case, the metal foil Sa provided on the release film Sb is used as the sheet-like member S, and the horn 35 may be vibrated in the pressing direction Z so that the amplitude is larger than the thickness of the metal foil Sa. That is, the horn 35 may be vibrated in the pressing direction Z so that the amplitude is larger than the thickness of the portion cut by the cutting die M. In addition to the metal foil Sa, as described above, ceramic green sheets, semiconductor wafers, circuit boards, laminated substrates made of synthetic resin, metal plates, silicon, ferrite, quartz, glass, ceramics, resin plates, single-layer metals A thin film, a non-woven fabric, paper, a resin sheet, a laminate of these, and the like can be configured as the sheet-like member S.

  In the embodiment described above, the vibration generating means is configured to vibrate the horn 35 so that the amplitude is larger than the thickness of the sheet-like member S to be cut by the cutting die M. The means may vibrate the horn 35 with an amplitude larger than the pressing distance in the pressing direction Z of the horn 35 necessary for cutting the sheet-like member S. For example, when the sheet-like member S is a resin sheet, since the resin is less extensible than the metal, if the cutting edge of the cutting blade Mb of the cutting die M is bitten in the middle in the thickness direction of the sheet-like member S, The sheet-like member S can be separated by a cutting die M. Therefore, in order to cut the sheet-like member S with the cutting die M, it is not always necessary to vibrate the horn 35 so that the amplitude is larger than the thickness of the sheet-like member S, and the sheet-like member S is cut. What is necessary is just to vibrate the horn 35 by a vibration production | generation means with an amplitude larger than the pressing distance in the pressing direction Z of the horn 35 required for doing.

  Further, when the sheet-like member S is cut using the cutting die M, it is necessary to cut the sheet-like member S according to the material or thickness of the sheet-like member S. A sound wave vibration may be applied from the horn 35 to the sheet-like member S and the cutting die M. That is, the vibration mode of the horn 35 can be appropriately changed to the optimal vibration mode according to the material and thickness of the sheet-like member S.

  The present invention can be widely applied to a cutting apparatus that cuts a sheet-like member into a predetermined shape using a cutting die.

1,100 ... Cutting device 2 ... Stage (backup member)
21 ... Backup surface 32 ... Vibrator (vibration generating means)
35 ... Horn (pressing body)
35a ... Pressing surface 4 ... Pressurizing means (vibration generating means)
5 ... Moving means 102 ... Rotating drum (backup member)
121 ... Outer peripheral surface (backup surface)
Ah ... Amplitude Lh ... Length M ... Cutting mold Mb ... Cutting blade Mc ... Cutting range Md ... Base S ... Sheet-like member X ... Width direction Y ... Moving direction Z ... Pressing direction

Claims (9)

In a cutting device that cuts a sheet-like member into a predetermined shape using a cutting die while applying vibrations,
A backup member having a backup surface on which the cutting mold is disposed;
A pressing body provided with a pressing surface that is formed to have a smaller area than the cutting processing range by the cutting die and press the sheet-like member in a pressing direction against the backup surface on which the cutting die is disposed;
Moving means for moving the opposed positions of the cutting die and the sheet-like member to the pressing surface relative to the pressing surface at a constant speed in a moving direction orthogonal to the pressing direction;
And a vibration generating unit that vibrates the pressing body with an amplitude larger than a pressing distance of the pressing body in the pressing direction necessary for cutting the sheet-like member. The vibration generating means includes
A vibrator that ultrasonically vibrates the pressing body and applies ultrasonic vibration from the pressing surface to the sheet-like member;
A pressing means for driving the pressing body that vibrates ultrasonically with the vibrator in a pressing direction to press the sheet-like member against the backup surface by the pressing surface;
The pressurizing means is
2. The sheet-like member is continuously pressed while vibrating the pressing body that is ultrasonically vibrated by the vibrator with an amplitude larger than the thickness of the sheet-like member in the pressing direction. Cutting processing equipment. The vibration generating means includes
A vibrator that ultrasonically vibrates the pressing body and applies ultrasonic vibration from the pressing surface to the sheet-like member;
A pressing means for driving the pressing body that vibrates ultrasonically with the vibrator in a pressing direction to press the sheet-like member against the backup surface by the pressing surface;
The vibrator is
The cutting apparatus according to claim 1, wherein the pressing body is ultrasonically vibrated with an amplitude larger than a thickness of the sheet-like member in the pressing direction.   The cutting apparatus according to claim 2 or 3, wherein the pressurizing unit drives the pressing body so that the pressure applied to the sheet-like member is constant at a predetermined value. The pressing surface is
For the cutting process range by the cutting mold,
The cutting apparatus according to any one of claims 1 to 4, wherein the length in the moving direction is short in the width direction perpendicular to the pressing direction and the moving direction, and the length in the moving direction is short. As the backup member, comprising a stage on which the sheet-like member is fixedly arranged on the backup surface so as to cover the cutting mold,
The cutting apparatus according to claim 1, wherein the moving unit moves the stage in the moving direction at the constant speed. As the backup member, comprising a rotating drum having the backup surface formed by the outer peripheral surface thereof,
The moving means rotates the rotating drum so that a position where the sheet-like member is sandwiched between the outer peripheral surface of the rotating drum and the pressing surface moves at the constant speed in the moving direction. The cutting apparatus according to any one of claims 1 to 5.   8. The cutting die according to claim 1, wherein a cutting blade for cutting the sheet-like member and a base functioning as an anvil for the pressing surface of the pressing body are provided together. The cutting processing apparatus of crab. In a cutting method of cutting a sheet-like member into a predetermined shape using a cutting die while applying vibration,
With respect to the backup surface of the backup member on which the cutting die is disposed, the sheet-like member is pressed in the pressing direction by the pressing surface of the pressing body formed with a smaller area than the cutting processing range by the cutting die. When pressing
While pressing the sheet-like member continuously while vibrating the pressing body with an amplitude larger than the pressing distance in the pressing direction of the pressing body necessary for cutting the sheet-like member,
The cutting processing method characterized by moving relative positions of the cutting die and the sheet-like member to the pressing surface relative to the pressing surface at a constant speed in a moving direction orthogonal to the pressing direction. .

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