JP7219495B2 - Ultrasonic bonding equipment - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic bonding apparatus for bonding workpieces such as metals and plastics by ultrasonic vibration.

Conventionally, ultrasonic bonding (ultrasonic welding) has been used to bond plastics used in food packs and the like, and metals such as battery parts. A general ultrasonic bonding apparatus performs bonding by ultrasonically vibrating the tip of a bonding tip and repeatedly applying pressure to the bonding target.

For example, the ultrasonic metal bonding apparatus disclosed in the following patent document includes an ultrasonic oscillator, a BLT transducer that generates ultrasonic vibration from an electrical signal oscillated by the ultrasonic oscillator, and transmits the ultrasonic vibration generated from the BLT transducer. It has a cone as a resonator, a horn as an ultrasonic resonator, and an ultrasonic bonding tool attached near the tip of the horn.

An anvil on which a metal to be welded is placed is arranged in parallel with the tip surface of the ultrasonic welding tool under the ultrasonic metal welding apparatus. The ultrasonic metal bonding apparatus is movable relative to the anvil, and the tip surface of the ultrasonic bonding tool is brought into contact with the upper surface of the bonding portion of the second copper plate to perform bonding in the tool length direction (downward). By applying lateral ultrasonic vibration while applying a load, the first copper plate and the second copper plate are ultrasonically bonded.

Patent Document 1: Japanese Patent No. 4874445

Also, in an ultrasonic bonding apparatus, there is a technique of processing the tip of a bonding tip to promote bonding. The tool horn has a cylindrical shape that connects a thick cylindrical part and a thin cylindrical part with a curved surface. and As a result, it is possible to apply pressure and ultrasonic vibration to the objects to be joined for a certain period of time to achieve stable solid-phase joining (see Japanese Patent Laid-Open No. 2014-213366).

However, when a projection is formed on the bonding tip as in the above-mentioned patent document (Japanese Patent Application Laid-Open No. 2014-213366), only the projection contacts the object to be bonded during bonding, and the other portions hardly contact. Therefore, in the bonding using such a bonding tip, there is a problem that the bonding surface is thinned by pushing the bonding target into the projection, and the bonding strength is lowered.

In addition, in the ultrasonic bonding apparatus, the bonding tip is generally vibrated in the horizontal direction (linear vibration) as in Patent Document 1, but the object to be bonded may be broken at the edge of the bonding tip. Sufficient bonding strength was not obtained.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an ultrasonic bonding apparatus capable of improving the bonding strength of workpieces.

According to the present invention, a plurality of works stacked between a first member and a second member arranged at a position facing the first member are pressed in a first direction perpendicular to the direction in which the first member presses. An ultrasonic bonding apparatus for bonding the plurality of workpieces by vibrating the first member with ultrasonic vibration that combines the vibration component of and the vibration component in the second direction orthogonal to the first direction, , a pressurizing part that applies pressure to the plurality of works via the first member, and an opening edge that is spaced apart from each other on the contact surface of at least one of the first member and the second member has a plurality of closed recesses, and the opening edge draws an elliptical ring shape by ultrasonic vibration generated by combining vibration components in the first direction and the second direction, and the opening edge in the first direction and the magnitude of the vibration component in the first direction, and the width of the opening edge in the second direction and the magnitude of the vibration component in the second direction are in correspondence.

In the ultrasonic bonding apparatus of the present invention, regardless of the arrangement direction (horizontal direction, inclined direction) of the first member and the second member, the pressure unit presses the first member against a plurality of workpieces to be bonded, The first member is vibrated by a combined vibration in which a vibration component in a first direction perpendicular to the pressing direction and a vibration component in a second direction perpendicular to the first direction are combined.

The ultrasonic bonding apparatus is provided with a plurality of recesses which are spaced apart from each other and whose opening edges are closed, on the contact surface of at least one of the first member and the second member. Since the concave portions are discretely arranged in an island shape, and the portions other than the concave portions (flat portions to be described later) are formed continuously, the pressing portions of the work are connected like a network, and the bonding strength is improved. . As a result, the stroke of the first member can be reduced compared to linear vibration. In addition, sufficient bonding strength can be obtained even if the amount of pressing of the work is smaller than that of pressing by the conventional convex portion.

The ultrasonic bonding apparatus of the present invention includes a sensor that acquires the pushing amount of the first member with respect to the plurality of works, and a control unit that receives signals from the sensor and controls the pressure unit. is preferred.

In the ultrasonic bonding apparatus of the present invention, when the first member applies pressure to the surface of the work for bonding, the sensor acquires the amount of pushing against the work. In addition, since the control unit receives the signal from the sensor and controls the pressure applied to the work by the first member, it is possible to prevent excessively high pressure from being applied to the joining surface of the work.

Further, in the ultrasonic bonding apparatus of the present invention, the width of the opening edge in the first direction and the magnitude of the vibration component in the first direction, and the width of the opening edge in the second direction and the magnitude of the second direction It is preferable that the magnitudes of the vibration components are in correspondence with each other.

For example, when the opening edge of the recess is elliptical, there is a correspondence between the width in the first direction (e.g., major axis width) and the magnitude of the vibration component in the first direction, and the opening edge of the recess is in the second direction. There is also a corresponding relationship between the width of (for example, width of the minor axis) and the magnitude of the vibration component in the second direction. Further, the first member is vibrated by a composite vibration in which the vibration component in the first direction is large corresponding to the width of the long axis of the opening edge and the vibration component in the second direction is small corresponding to the width of the short axis of the opening edge. As a result, the composite vibration is smoothed, it is possible to prevent the surface of the workpiece from being scraped by the concave portion, and to secure the thickness of the joint portion.

Moreover, in the ultrasonic bonding apparatus of the present invention, it is preferable that the opening edge of the concave portion is chamfered.

According to this configuration, the opening edge of the concave portion provided in the first member or the second member is chamfered, so that wrinkling or breakage of the workpiece surface during joining can be prevented. can.

Moreover, in the ultrasonic bonding apparatus of the present invention, it is preferable that the first member is a bonding tip and the second member is an anvil.

According to this configuration, the first member is the bonding tip, and for example, by providing a concave portion at the tip of the bonding tip, the workpiece can be reliably bonded by compound ultrasonic vibration while pressing the workpiece. can be done.

Further, in the ultrasonic bonding apparatus of the present invention, the bonding tip has at least one or more projections in a central region of the distal end portion, and has the plurality of recesses in an outer region outside the central region, It is preferable that the projection protrudes from the end surface of the tip of the bonding tip.

According to this configuration, the projecting portion provided in the central region of the tip portion of the joining tip protrudes from the end surface of the tip portion, so that the workpiece is pushed in with a static pressure applied immediately before joining. As a result, it is possible to reliably join the workpieces while suppressing slippage between the workpieces.

BRIEF DESCRIPTION OF THE DRAWINGS The figure explaining the whole structure of the ultrasonic bonding apparatus which concerns on embodiment of this invention. The figure explaining the detail of the horn chip|tip of an ultrasonic-bonding apparatus. (a) The figure which looked at the front-end|tip part of the horn tip from the bottom face side. (b) The figure which looked at the front-end|tip part of the horn tip from the side surface side. (a) A diagram for explaining compound vibration of a horn tip (circular dimple) during welding. (b) Enlarged view of region S1 in FIG. 3A(a). (a) A diagram for explaining compound vibration of a horn tip (elliptical dimple) during bonding. (b) Enlarged view of region S2 in FIG. 3B(a). The figure explaining the state of the cross section of a horn chip|tip and a workpiece|work at the time of joining (before pressurization). The figure explaining the state of the cross section of the horn chip|tip and a workpiece|work at the time of joining (after pressurization). The perspective view of the front-end|tip part of a horn tip (modification). The side view at the time of joining by a horn tip (modification). FIG. 11 is a perspective view of an anvil (modification); The side view at the time of joining by an anvil (modification).

An embodiment of the ultrasonic bonding apparatus of the present invention will be described below with reference to the drawings.

First, referring to FIG. 1, the overall configuration of an ultrasonic bonding apparatus 1 according to an embodiment of the present invention will be described. The ultrasonic bonding apparatus 1 is an apparatus for bonding (welding) objects to be bonded (workpieces) such as metal plates using ultrasonic complex vibrations, which will be described later. The ultrasonic bonding apparatus 1 is mainly used for bonding electrodes of lithium ion batteries, semiconductor elements and the like, and metals of the same or different types.

The ultrasonic bonding apparatus 1 includes an ultrasonic vibrator 2 , an ultrasonic expansion horn 3 , an ultrasonic LT (Langevin Type) horn 4 , a horn tip 6 and an anvil 7 . The oscillator 8 , pressure device 10 , sensor 12 , control device 13 and display device 14 are also part of the ultrasonic bonding apparatus 1 .

When a power supply voltage (not shown) is applied to the oscillation device 8, a voltage signal is transmitted to the + electrode and - electrode of the ultrasonic transducer 2, and the ultrasonic transducer 2 vibrates, causing ultrasonic vibration (about 20 KHz). occurs. Ultrasonic vibrations generated by the ultrasonic transducer 2 are transmitted to a cylindrical ultrasonic magnifying horn 3 attached to one end of the ultrasonic transducer 2, and the vibration amplitude is magnified. Further, the ultrasonic vibration is transmitted to a cylindrical ultrasonic LT horn 4 attached to one end of the ultrasonic expansion horn 3 (the end on the side other than the ultrasonic transducer 2).

Up to this point, the ultrasonic vibration generated by the ultrasonic transducer 2 was transmitted in the longitudinal direction of the ultrasonic expansion horn 3 and the ultrasonic LT horn 4 (longitudinal vibration of ultrasonic waves). A plurality of oblique slits 4a generate a vibration component converted from longitudinal vibration to lateral vibration. Then, the ultrasonic vibration (complex vibration) is generated by a horn tip 6 (the "bonding tip" and " (corresponding to "first member").

The horn tip 6 is composed of a truncated conical base portion 6a and a tip portion 6b that contacts the workpiece W during bonding. That is, by adjusting the phase of the ultrasonic vibration with the oscillation device 8, a compound vibration (for example, elliptical vibration) is generated at one end of the ultrasonic LT horn 4, and the tip 6b of the horn tip 6 touches the surface of the work W. It vibrates in an elliptical orbit. This vibration removes impurities from the surface of the work W and promotes plastic deformation of the surface of the work W. The horn tip 6 has various shapes, and can be used by exchanging it according to the type of the work W.

To supplement the composite vibration, when the tip portion 6b (end surface 6c) of the horn tip 6 presses the work W, the vibration component in the first direction perpendicular to the pressing direction and the second vibration component perpendicular to the first direction. This is a vibration combined with a directional vibration component. If the vibration component in the first direction and the vibration component in the second direction are 1:1, the vibration is circular, and if it is 2:1, the vibration is elliptical.

A pressurizing block (not shown) having high rigidity is in contact with the flange portion 3a of the ultrasonic magnifying horn 3. As shown in FIG. For this reason, the pressure device 10 (corresponding to the "pressure unit" of the present invention) is controlled by the control device 13 (corresponding to the "control unit" of the present invention), and the ultrasonic bonding is performed via a pressure block that moves up and down. The device 1 can be moved vertically. By placing the work W on the anvil 7 (an example of the "second member" of the present invention) which is a pedestal, the tip 6b of the horn tip 6 comes into contact with the work W and static pressure (bonding) is applied. 200 to 800 N) are added at times.

Furthermore, there is a sensor (stroke sensor) 12 for detecting the displacement of the pressing block, and acquires the pushing amount of the work W of the horn tip 6 . The sensor 12 feeds back changes in the vertical coordinates of the horn tip 6 during bonding to the control device 13 (a broken line is a feedback signal), so that the pressing amount is kept constant. For this reason, an actuator having a high response speed is used for the pressurizing device 10 .

The pushing amount can be set by the operator from the display device 14 . Also, a pressure sensor may be provided in addition to the sensor 12 and controlled to keep the static pressure constant. In this way, when the workpieces W are joined, by applying the combined vibration while adjusting the pushing amount or the static pressure, the joining (solid-phase joining) is promoted reliably.

Here, to supplement the solid-phase bonding, for example, the surfaces of metal atoms are covered with oil, an oxide film, etc., and are in a state in which the atoms are prevented from approaching each other. In ultrasonic bonding, ultrasonic vibration is applied to metal to generate a strong frictional force on the metal surface. As a result, oxide films and the like on the metal surface are removed, and clean and activated metal atoms appear on the joint surface.

In this state, by further applying ultrasonic vibration to the metal surface, the movement of atoms becomes active due to temperature rise due to frictional heat, mutual attraction between atoms is generated, and a state of solid phase bonding is generated.

Next, details of the horn chip 6 will be described with reference to FIGS. 2A and 2B.

As shown in FIG. 2A, the base portion 6a of the horn tip 6 has a height of 25.7 mm, the diameter of the flange portion 6a' connected to the ultrasonic LT horn 4 is 15 mm, and the diameter decreases toward the tip portion 6b. (10 mm). When the base portion 6a has such a shape, there is an effect of concentrating the vibration on a portion with a small cross-sectional area and expanding the ultrasonic vibration.

The tip portion 6b is a truncated cone-shaped projection (height: 2.0 mm) attached to the tip of the base portion 6a, and as shown in FIG. (corresponding to the "recess" of the present invention) are formed. The dimples D are formed inside the outer peripheral edge of the tip portion 6b (end surface 6c) with their opening edges separated from each other, ie, discretely arranged (total of 22 dimples).

In the horn tip 6, when the ratio of the total area of the openings of the dimples D to the total area of the end face 6c is in the range of 0.10 to 0.45 (standard value is 0.188), the static pressure during bonding is most appropriate. value. If the area ratio is smaller than the above range (the flat portion is wide), the horn tip 6 slides on the workpiece W. On the other hand, if the area ratio is larger than the above range (the flat portion is narrow), the pressure at the time of joining increases, and the joining portion becomes thin.

Further, as shown in FIG. 2B(b), the dimple D has a diameter of 0.4 mm and a depth of 0.1 mm. Of course, the size and number of dimples D are not limited to this.

The openings of the dimples D may be elliptical, polygonal, or the like as long as the opening edges are closed and are spaced apart from each other. By providing a plurality of dimples D on the end surface 6c of the horn tip 6, the static pressure applied to the workpiece W is made more uniform than the conventional knurls (convex portions), and the bonding area to which the pressure is applied is increased. Thereby, the bonding strength of the workpiece W can be improved.

Next, with reference to FIGS. 3A and 3B, the compound vibration of the horn tip 6 during bonding will be described.

FIG. 3A(a) shows the movement of one dimple D (the edge of the opening is indicated by a thick line) of the horn tip 6 when the workpiece W is viewed from above. Here, with the compound vibration of the horn tip 6, the opening edge of the dimple D draws a ring shape like the hatched portion. The amplitude of the horn tip 6 is usually 10 μm or less.

FIG. 3A(b) is an enlarged view of region S1 in FIG. 3A(a). In FIG. 3A(b), the circular arrow is the trajectory drawn by one point on the opening edge of the dimple D, and the area A ₁ (shaded portion) is pressed. A region _B1 is a portion inside the dimple D. As shown in FIG. Further, since the region _B2 is positioned outside the dimple D, it is pressed by the tip portion 6b (flat portion) of the horn tip 6, and the pressed portions are connected like a network.

In the conventional linear vibration, the horn tip 6 is reciprocated in one direction (for example, the x-axis direction), so it is necessary to switch the traveling direction while the horn tip 6 is vibrated. , broken parts, etc. may occur. In this regard, circular vibration does not require switching of the direction of travel, and when bonding the same surface area of the workpiece W, the stroke (rubbing width) of the horn tip 6 can be reduced compared to linear vibration. As a result, wrinkles and fractures occurring in the workpiece W can be reduced, and high joint strength can be obtained with no directionality of joint.

In circular vibration of a perfect circle, a correspondence relationship of V _x :V _y =1:1 is established, where V _x is the velocity vector in the x-axis direction and V _y is the velocity vector in the y-axis direction. However, one of the linear vibration components is usually larger. For example, if there is a relationship of V _x :V _y =2:1, the trajectory of the dimple D becomes an elliptical complex vibration (elliptical vibration) long in the x-axis direction.

Further, as shown in FIG. 3B(a), a dimple D' having an elliptical opening edge (thick line) can also be employed. In this case, it is preferable to control so that the opening edge of the dimple D' forms an elliptical ring shape like the hatched portion in accordance with the compound vibration of the horn tip 6. FIG.

As shown in the figure, the velocity vector V The relationship between the velocity vector V _y in _{the x} and y-axis directions is preferably V _x >V _y . More preferably, the correspondence relationship of V _x : V _y =a:b smoothes the elliptical vibration and reduces wrinkles and fractures that occur in the workpiece W during bonding.

FIG. 3B(b) is an enlarged view of region S2 in FIG. 3B(a). In FIG. 3B(b), the elliptical arrow is the trajectory drawn by one point on the opening edge of the dimple D', and the region A ₂ (shaded portion) is pressed. A region _B3 is a portion inside the dimple D'. Since the region _B4 is located outside the dimple D', it is pressed by the tip 6b of the horn tip 6, and the pressed portions are connected like a network.

It is also conceivable that the opening edge of the dimple D' stands upright at a predetermined angle with respect to the x-axis. In this case, the width in the x-axis direction is width a _' and the width in the y-axis direction _is width b'. should be controlled.

Next, with reference to FIGS. 4A and 4B, the state of the cross section of the horn tip 6 and the work W at the time of bonding will be described.

FIG. 4A shows the state immediately before the horn tip 6 (tip 6b) pressurized by the pressurizing block applies static pressure to the workpiece W. FIG. As shown, the dimple D is a hemispherical recess, but its depth is shallower than the radius of the hemisphere. This is because if the dimple D is deep to some extent and the edge portion is substantially vertical, the surface of the workpiece W may be wrinkled or broken during bonding.

Further, as shown in region E, the edge portion of the dimple D has a chamfered curved surface shape. The radius of curvature of the edge portion is preferably in the range of 10-100 μm. By using such a shape and numerical values, the surface of the workpiece W is smoothed during joining, and wrinkles and the like are less likely to occur.

FIG. 4B shows the state when the horn tip 6 applies a static pressure to the work W and joins it. The ultrasonic bonding apparatus 1 controls the oscillator 8 (force trigger method) so that oscillation starts when the tip portion 6b of the horn tip 6 contacts the workpiece W and the static pressure reaches a peak. The work W is pressed by the static pressure and is depressed, but the dimple D portion has a smaller depression than the other portions. Further, the pressurizing device 10 can hold the pressing amount so that the work W does not come into contact with the inner upper surface of the dimple D.

In this way, by ultrasonically vibrating the horn tip 6 while static pressure is applied to the workpiece W, the regions R1 and R2 in FIG. 4B have a predetermined thickness and are efficiently joined. be. In addition, since the dimples D are spaced apart from each other, pressure-applied portions such as regions R1 and R2 are continuously generated. This makes it possible to obtain a sufficient bonding strength even if the amount of pressing of the work W is smaller than that of pressing by a conventional knurling.

Appropriate values are selected according to the physical properties of the workpiece W, such as the vibration velocity of the ultrasonic vibration, the static pressure, the control time, and the like, which are parameters for joining. Further, depending on the material of the work W, the work W may be joined while being in contact with the inner upper surface of the dimple D.

Next, a modification of the horn tip will be described with reference to FIGS. 5A and 5B.

FIG. 5A shows a perspective view of a horn tip 20 according to a modification. The horn tip 20 has a structure in which a plurality of dimples D2 are arranged around the outer periphery of the end surface 20c, and at least one or more projections P are arranged in the central portion. In the structure of only dimples D such as the horn tip 6 (see FIG. 2B), the surfaces of the workpieces may slip between each other immediately after the horn tip 6 is ultrasonically vibrated and before bonding is completed. However, in the horn tip 20, when a static pressure is applied, the protrusion P is pushed into the workpiece, thereby producing an effect of suppressing slippage.

Further, FIG. 5B shows a side view of bonding by the horn tip 20. As shown in FIG. In order to achieve the above effect and ensure the static pressure between the dimple surface _Db and the workpiece W, the tip _Pt of the projection P needs to protrude beyond the dimple surface _Db (end surface). Incidentally, the bottom surface _Pb of the projection P is preferably processed so as to be on the inner side of the dimple surface _Db .

In the horn chip 20, the projection P may be arranged around the outer periphery of the end surface 20c, and the plurality of dimples D2 may be arranged in the central portion of the end surface 20c, and various layouts are conceivable. In any aspect, the projections P hold down the work W, and the dimples D2 produce the effect of making the work W less slippery.

The projections P may be arranged separately from each other. Also, the area ratio of the end surface 20c, the protrusion P, and the dimple D2 is arbitrary, but if the area of the dimple D2 is maximized, the workpiece W is less likely to slip and the surface is less likely to be scratched.

Finally, another modification will be described with reference to FIGS. 6A and 6B.

FIG. 6A shows a perspective view of an anvil 30 according to a modification. The anvil 30 has a structure in which a plurality of dimples D3 are arranged on its upper surface 30a. The formation of the dimples D3 has the effect of holding down the work during joining and making it difficult for the surfaces of the work to slip. The dimple D3 preferably has a diameter of about 0.4 mm and a depth of about 0.1 mm, like the dimple D of the horn tip 6 . Of course, the size and number of dimples D3 are not limited to this.

Also, FIG. 6B shows a side view of the joining by the anvil 30. As shown in FIG. Here, when a static pressure is applied, the work _W1 is pushed in by the horn tip 21 having the protrusion P'. Furthermore, the work _W2 that is in contact with the upper surface of the anvil 30 is pressed from above during joining, and a portion of the lower surface enters the dimple D3 to hold down the work _W2 . This makes it difficult for the workpiece _W2 to slip on the anvil and between the workpieces, so that sufficient bonding strength can be obtained even if the amount of pressing of the horn tip 21 is reduced.

Protrusions may be provided on the anvil to prevent workpiece slippage. However, providing dimples on the anvil as in the above embodiment is advantageous in that the workpiece is less likely to be scratched.

The above description is part of the embodiments of the present invention, and various other embodiments are conceivable. The number of dimples is not particularly limited as long as the opening edge is closed, and the number of dimples may be plural. The depth of the dimples and the ratio of the total area of the opening edges to the total area of the flat portions also depend on the material of the workpiece to be processed.

The dimples may be provided on at least one abutment surface of the horn tip and the anvil arranged at a position opposite thereto. In FIGS. 1, 5B, and 6B, the workpiece is placed on the anvil and the horn tip is positioned above the workpiece (in the vertical direction), but the positional relationship is not limited to this. That is, the horn tip and anvil may be arranged horizontally or may be arranged in an oblique direction.

The workpiece is positioned between the horn tip and the anvil regardless of their orientation, and placed in contact with the anvil (or horn tip). Even in such a mode, the dimples provided on the contact surface of at least one of the horn tip and the anvil produce the effect of making the workpieces less slippery during joining.

Although the above-described horn chip 6 is an integral type in which the tip portion 6b that contacts the work W is provided at the tip of the base portion 6a, the long rod-like tip portion can be attached to the base portion 6a by screwing. . In this case, care should be taken so that the mounting position of the tip portion does not become a vibration node.

The pushing amount of the horn tip 6 may be detected by any method. For example, there is a method in which an encoder is attached to an actuator (servo motor) that drives a pressing block, and the pressing amount is detected from the displacement from the reference position.

DESCRIPTION OF SYMBOLS 1... Ultrasonic bonding apparatus 2... Ultrasonic vibrator 3... Ultrasonic expansion horn 3a... Flange part 4... Ultrasonic LT horn 4a... Oblique slit 6, 20, 21... Horn tip 6a... Substrate Part 6a'... Flange part 6b... Tip part 6c, 20c... End face 7, 30... Anvil 8... Oscillation device 10... Pressure device 12... Sensor 13... Control device 14... Display device D, D', D2, D3... Dimple, P, P'... Protrusion, W, _W1 , _W2 ... Work.

Claims (5)

A vibration component in a first direction perpendicular to a direction in which the first member presses a plurality of works stacked between a first member and a second member arranged at a position facing the first member. An ultrasonic bonding apparatus for bonding the plurality of works by vibrating the first member with ultrasonic vibration combined with a vibration component in a second direction orthogonal to the first direction,
A pressure unit that applies pressure to the plurality of works via the first member,
a plurality of recesses with closed opening edges that are spaced apart from each other on the contact surface of at least one of the first member and the second member;
The opening edge draws an elliptical ring shape by ultrasonic vibration generated by combining the vibration components in the first direction and the second direction, and the width of the opening edge in the first direction and the vibration component in the first direction. An ultrasonic bonding apparatus, wherein the size, the width of the opening edge in the second direction, and the magnitude of the vibration component in the second direction are in correspondence with each other. In the ultrasonic bonding apparatus according to claim 1,
a sensor that acquires the pushing amount of the first member with respect to the plurality of works;
and a control unit that receives a signal from the sensor and controls the pressure unit. In the ultrasonic bonding apparatus according to claim 1 or 2 ,
An ultrasonic bonding apparatus, wherein the opening edge of the recess is chamfered. In the ultrasonic bonding apparatus according to any one of claims 1 to 3 ,
The first member is a bonding tip,
The ultrasonic bonding apparatus, wherein the second member is an anvil. In the ultrasonic bonding apparatus according to claim 4 ,
Having at least one or more protrusions in the center region of the tip of the bonding tip, and having the plurality of recesses in the outer region outside the center region,
The ultrasonic bonding apparatus according to claim 1, wherein the projecting portion protrudes from an end surface of the distal end portion of the bonding tip.

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