JPWO2013021645A1 - End effector device and substrate transfer robot provided with the end effector device - Google Patents

Abstract

The present invention relates to an end effector device 1 attached to a tip of a robot arm, and includes a plurality of support units 3 and 3 on a blade 10. The support unit 3 changes a plurality of claw pieces 30 and 30 that support the peripheral portion of each semiconductor wafer 9 and a vertical gap between the claw pieces 30 so that a plurality of semiconductor wafers 9 are parallel and spaced apart from each other. A pitch changing mechanism 4 is provided. The pitch changing mechanism 4 includes a coil spring 40 that supports the plurality of claw pieces 30, 30 with a space therebetween in the vertical direction and elastically deforms in the vertical direction, and an operating mechanism 5 that elastically deforms the coil spring 40 in the vertical direction. Yes. The operating mechanism 5 includes a piston shaft 50 that is fitted to the coil spring 40 and moves up and down.

Description

  The present invention relates to a plate-like member, specifically an end effector device that is attached to the tip of a robot arm with a pitch changing mechanism that can change the vertical interval of a plurality of semiconductor wafers used in a semiconductor manufacturing process, and the end The present invention relates to a substrate transfer robot including an effector device, a substrate processing apparatus including the substrate transfer robot, and a substrate processing facility including the substrate processing apparatus.

The semiconductor manufacturing process includes a process of transferring a plurality of semiconductor wafers at a time from a hoop in which a plurality of semiconductor wafers are stored in an up-and-down arrangement to a processing shelf for performing a predetermined process on the semiconductor wafers. In the middle of this conveyance, the vertical interval (hereinafter referred to as “pitch”) between adjacent semiconductor wafers may be changed. To change this pitch, a pitch changing mechanism is used.
A conventional pitch changing mechanism includes a plurality of wafer holding trays that receive the entire lower surface of a semiconductor wafer, and a vertical axis provided at the base end of each wafer holding tray (see Patent Document 1). Each wafer holding tray moves up and down along the vertical axis and rotates in a horizontal plane around the vertical axis. In the pitch changing mechanism, the wafer holding tray holds the entire lower surface of the plurality of semiconductor wafers at a position facing the hoop and takes out them at a time. Thereafter, after the pitch changing mechanism moves in the horizontal direction, each wafer holding tray is lowered to reduce the pitch of adjacent semiconductor wafers. Next, each wafer holding tray rotates about the vertical axis, and all the semiconductor wafers are stored in the processing shelf.

Japanese Patent Publication No. 5-235147

The applicant has conceived that an end effector device incorporating such a pitch changing mechanism is attached to the tip of the robot arm to facilitate the transfer of the semiconductor wafer from the hoop to the processing booth. However, the conventional pitch changing mechanism is large because the wafer holding tray receives the entire lower surface of the semiconductor wafer, and is not suitable for incorporation into the end effector device.
The objective of this invention is providing the end effector apparatus provided with the mechanism which changes the space | interval of a semiconductor wafer.

  The present invention is an end effector device attached to a distal end portion of a robot arm, wherein the end effector device has a blade having a proximal end portion and a distal end portion, and is provided on the blade, and a plurality of plate-like members are connected to each other. A support unit configured to support the peripheral portion of each plate-like member and to change the interval between the plate-like members so as to be spaced in parallel and vertically is provided. Here, “provided to be located on the blade” is a concept including both a form directly provided on the blade and a form provided on other parts of the end effector device so as to be located on the blade. is there.

  According to the present invention, the peripheral portion of the plate-like member is supported by the support unit. That is, since the support unit does not need to receive the entire surface of the plate-like member, a portion where the support unit supports the plate-like member can be reduced in size. Thereby, the support unit for changing the interval between the plate-like members can be reduced in size so as to be suitable for incorporation into the end effector device. In the present application, the term “miniaturization” represents the meaning of including what has been impossible to realize in the past. In other words, it is not just a concept of reducing the size.

In addition, the blade includes a holding portion that is provided at intervals in a direction perpendicular to each axis extending in one plane, and holds the peripheral portions of the plurality of plate-like members, respectively. A plurality of pitch changing mechanisms for converting the spacing in the direction perpendicular to the one plane of the plate-like member,
At least one pitch changing mechanism is provided in the support unit, and is provided so as to advance toward the distal end portion of the blade and to be retractable toward the proximal end portion, and the one pitch changing mechanism is located at the advanced position. The plate-like member is held and the plate-like member is released from being held at the retracted position.

  According to the present invention, when one pitch changing mechanism moves backward, the holding of the plate member by the holding portion of the pitch changing mechanism is released. As a result, the plurality of plate-like members whose intervals have been changed can be easily transferred to the next processing stage. In the following description, the configuration in which the pitch changing mechanism holds the plate member by pressing the peripheral edge of the plate member in the direction connecting the base end and the tip end of the blade is referred to as an edge grip type.

  In the present invention, the built-in support unit has a pitch changing function, and the plate-like member is supported at the peripheral edge. As a result, it was possible to reduce the size of the mechanism for changing the pitch in the end effector device.

1 is an overall perspective view of a substrate transfer robot. It is a perspective view which expands and shows an end effector apparatus. FIG. 3 is a plan view of the end effector device shown in FIG. 2. It is a perspective view of a nail piece. It is a side view in the state where a semiconductor wafer was held with a claw piece. It is a figure of another nail piece. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to one embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. It is the top view which looked at the lowest nail piece from the A1 direction of Fig.7 (a). (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. It is a perspective view of the nail | claw piece used for the pitch change mechanism of FIG. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. It is a side view of the cylindrical body used for the pitch change mechanism of FIG. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. It is a top view of the pitch change mechanism which concerns on other embodiment. It is a principal part perspective view of the pitch change mechanism shown in FIG. (a), (b) is the side view which looked at the pitch change mechanism shown in FIG. 18 from B1 direction, (a) shows the initial state with a large pitch, (b) shows the state with a small pitch, respectively. (a), (b) is a side view of a pitch changing mechanism according to another embodiment, (a) shows an initial state with a large pitch, and (b) shows a state with a small pitch. (c) is sectional drawing which fractured | ruptured in the surface containing arrow C1-C1 seeing (a) from the back, and was seen by the arrow. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. (a), (b) is a partially cutaway side view of the pitch changing mechanism according to another embodiment, (a) is an initial state with a large pitch, (b) is a state with a small pitch, respectively. Show. It is a disassembled perspective view of the pitch change mechanism which concerns on other embodiment. 25 (a) and 25 (b) are cross-sectional views of the pitch changing mechanism shown in FIG. 24 as viewed from the direction D1 in FIG. 24. FIG. 25 (a) shows an initial state with a large pitch, and FIG. Indicates a small state. It is a perspective view which expands and shows the end effector apparatus which concerns on other embodiment. (a), (b) is a top view which shows movement operation | movement of the support unit shown in FIG. (a), (b), (c) is a figure which shows rotation operation | movement of the pitch change mechanism shown in FIG. 26, and is the figure which looked at FIG. 26 from the B direction. (a), (b) is a figure which shows rotation operation | movement of another pitch change mechanism. It is a top view which shows the internal mechanism of an end effector apparatus. It is the enlarged view which looked at the drive source unit shown in FIG. 30 from D1 direction. (a), (b) is a figure which shows rotation operation | movement of a rocking | swiveling member. It is a figure which shows the structure of a linear guide member. (a), (b), (c) is the side view which looked at the 1st air cylinder shown in FIG. 30 from E1 direction. (a), (b) is a side view which shows another mechanism which makes a 2nd guide pin protrude from the lower surface of a braid | blade. (a), (b), (c) is a figure which shows another pitch change mechanism. It is the figure which looked at FIG.36 (b) from F1 direction. It is a figure which shows another pitch change mechanism. It is a top view of the substrate processing apparatus provided with the robot for substrate conveyance of FIG. 1, and the substrate processing equipment provided with this substrate processing apparatus.

(First Embodiment of End Effector Device)
Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. The present invention relates to an end effector device attached to the tip of an arm of a substrate transfer robot. First, the entire transfer robot will be described. The embodiment of the present invention exemplifies a horizontal plane as “one plane” in the present invention. In addition, a disk-shaped semiconductor wafer is exemplified as the plate-shaped member that is transferred by the transfer robot, but the plate-shaped member is not limited to the semiconductor wafer. For example, the plate member may be a glass substrate for a thin liquid crystal display or an organic EL display processed by a semiconductor process. A semiconductor wafer is a substrate material for semiconductor devices, and includes a silicon wafer, a silicon carbide wafer, a sapphire wafer, and the like. Furthermore, the semiconductor wafer need not be a material, and a circuit or a structure may be formed on the plate-like member. The shape is not limited to a circular shape.
Further, the processing of the semiconductor wafer includes, for example, heat treatment and film formation in a processing booth. A plurality of semiconductor wafers before processing are stored in a horizontal position in a vertical position in a FOUP (Front Opening Unified Pod) separated from the processing booth.
A processing shelf for processing semiconductor wafers is provided in the processing booth to hold a plurality of semiconductor wafers vertically and horizontally. At the time of processing, a plurality of semiconductor wafers are taken out from the hoop at a time and transferred to a processing shelf. However, the pitch of semiconductor wafers adjacent to each other in the processing shelf may be different from the pitch of the semiconductor wafers in the hoop. Specifically, the pitch in the processing shelf may be shorter than the pitch in the hoop. . In such a case, a pitch changing mechanism is used that takes out a plurality of semiconductor wafers from the hoop and changes the pitch during the transfer to the processing shelf. This is the same as in the past.
The semiconductor wafers are not limited to FOUPs and processing shelves. In short, it is sufficient that the semiconductor wafers are stored at different pitches.

FIG. 1 is an overall perspective view of the substrate transfer robot 2. The substrate transfer robot 2 is a robot that transfers a plurality of semiconductor wafers aligned vertically, and is a so-called horizontal articulated three-axis robot, for example. The substrate transfer robot 2 includes an arm support 23 that can be moved up and down on a base 22 fixed to a semiconductor processing facility, and a first arm 20 that extends in the horizontal direction at the upper end of the arm support 23. One end is attached. The first arm 20 is rotatably provided with respect to the arm support portion 23, and one end portion of the second arm 21 is pivotally supported on the other end portion of the first arm 20.
An end effector device 1 to be described later is attached to the end portion of the second arm 21. When the first arm 20 rotates with respect to the arm support portion 23 and the second arm 21 rotates with respect to the first arm 20 in the horizontal plane, the end effector device 1 moves in the horizontal plane. The end effector device can move in the height direction by raising and lowering the arm support portion 23.
The substrate transfer robot 2 may be provided in a substrate processing apparatus. The substrate processing apparatus may be provided in a substrate processing facility. The substrate processing apparatus and the substrate processing equipment will be described later.

The end effector device 1 includes a blade 10 having a proximal end attached to a distal end portion of a second arm 21, and a plurality of, for example, three support units 3, 3, 3a extending upward from the blade 10 in FIG. . Each support unit 3, 3 a holds a plurality of semiconductor wafers 9 in a horizontal posture with a vertical interval therebetween. Note that the end effector device 1 provided with the support units 3 on the lower surface or both upper and lower surfaces of the blade 10 is also included in the technical scope of the present invention. However, for convenience of explanation, in the following example, the support unit 3 faces upward from the blade 10. Suppose that
FIG. 2 is an enlarged perspective view showing the end effector device 1, and FIG. 3 is a plan view thereof. Of the three support units 3, 3, 3 a, two support units are the distal-side support units 3, 3 located at the distal end of the blade 10, and the other one is a proximal end located at the proximal end of the blade 10 This is the side support unit 3a. A long hole 11 extending from the base end portion of the blade 10 toward the tip end side is opened at the base end portion of the blade 10, and the base end side support unit 3 a is formed on the tip end portion of the second arm 21. It is provided and protrudes upward from the blade 10 through the long hole 11. In this manner, the base end side support unit 3a is provided on the tip end portion of the second arm 21 and protrudes upward from the blade 10 through the long hole 11. It is included in the form “provided to be located on the blade 10”. The proximal-side support unit 3a is moved on the distal end portion of the second arm 21 or on the blade 10 by a plunger (not shown) provided on the second arm 21, and specifically toward the distal end of the blade 10. It moves between the advanced position that has moved and the retracted position that has moved from the advanced position toward the base end of the blade 10.
For convenience of explanation, in the above embodiment, the distal end side support units 3 and 3 are fixed on the blade 10, and the proximal end side support unit 3 a moves along the long hole 11. However, instead of this, one or both of the front end side support units 3 and 3 may be moved toward the center of the semiconductor wafer 9 or the base end portion of the blade 10. In short, the distance between the support units 3 and 3 should be small.

The support units 3 and 3a are arranged apart from each other in the vertical direction, and each of the plurality of claw pieces 30 and 30 that support the peripheral portion of the semiconductor wafer 9 and the vertical distance between the plurality of claw pieces 30 and 30 are provided. A pitch changing mechanism 4 for changing is provided. Three claw pieces 30, 30, 30 at the same height of the support units 3, 3 a support the peripheral edge of one semiconductor wafer 9.
As shown in FIG. 3, three claw pieces 30, 30, 30 at the same height of each support unit 3 are radially arranged with respect to the center C of the semiconductor wafer 9. Since the horizontal plane on which the semiconductor wafer 9 is to be located is determined by the three claw pieces 30, 30, 30, each semiconductor wafer 9 is stably supported substantially horizontally by the three claw pieces 30, 30, 30.
FIG. 4 is a perspective view of the claw piece 30. The claw piece 30 is configured in two steps by projecting the receiving piece 32 laterally from the lower end of the main body 31, and the upper surface of the receiving piece 32 forms a receiving surface 33 that receives the lower surface of the peripheral edge of the semiconductor wafer 9. The inner side surface of the main body 31 is substantially orthogonal to the receiving surface 33 and forms a contact surface 34 in contact with the peripheral end surface of the semiconductor wafer 9. Although the nail | claw piece 30 is formed from a synthetic resin, it is not restricted to this. The claw piece 30 is preferably formed of a material that does not damage the semiconductor wafer 9.

FIG. 5 is a side view of the state in which the semiconductor wafer 9 is held by the claw piece 30. As described above, the claw piece 30 is an edge grip type that holds the semiconductor wafer 9 stably by pushing the peripheral edge of the semiconductor wafer 9 inwardly at the contact surface 34.
When the support unit 3 is in the advanced position, the claw pieces 30, 30 at the same height position hold the semiconductor wafer 9. As a result, the position of the semiconductor wafer 9 in the horizontal plane is stabilized. Furthermore, even if the entire end effector apparatus 1 is conveyed at high speed, the semiconductor wafer 9 does not shift. As described above, the edge grip-type claw piece 30 is advantageous for stably holding and transporting the semiconductor wafer 9, but a claw piece 30 having another configuration shown in FIG. 6 is also conceivable.

(Application examples of nail pieces)
FIG. 6 is a side view showing another claw piece 30. The claw piece 30 is formed continuously from the upper end of the main body 31 with the first inclined surface 320 inclined inwardly downward and the first inclined surface 32 below the first inclined surface 320, and is directed downward. The second inclined surface 330 is inclined inward and has a gentler inclination angle than the first inclined surface 32. The peripheral edge of the semiconductor wafer 9 is placed and held on the boundary SM between the first slope 320 and the second slope 330 inside the claw piece 30.

  According to this configuration, when the semiconductor wafer 9 is held by the claw piece 30, the semiconductor wafer 9 slides on the first slope 320 of the claw piece 30 and is placed on the boundary SM between the first slope 320 and the second slope 330. . Thereby, the horizontal position and the horizontal attitude | position with respect to the pitch change mechanism 4 of the semiconductor wafer 9 are corrected, and it hold | maintains stably. Further, since the claw piece 30 and the semiconductor wafer 9 are in line contact, the contact area between the claw piece 30 and the semiconductor wafer 9 is small. Thereby, foreign matter adhesion to the semiconductor wafer 9 is reduced.

(Operation of end effector device)
(Step 1)
The end effector device 1 is located at a position facing a hoop in which a plurality of semiconductor wafers 9 and 9 are stored with a vertical interval. Using the substrate transfer robot 2, a plurality of semiconductor wafers are positioned on the end effector device 1 with a vertical interval therebetween from the hoop. By the plunger, the base end side support unit 3a moves from the retracted position toward the advanced position, and grips the semiconductor wafer 9.
When the base end side support unit 3a in FIG. 2 is in the advanced position, each claw piece 30 of the base end side support unit 3a has a receiving surface 33 that receives the lower surface of the peripheral edge of the semiconductor wafer 9 and a contact surface 34. The peripheral edge surface of the semiconductor wafer 9 is pushed in the advance direction. The peripheral edge of the semiconductor wafer 9 is pressed against the contact surfaces 34, 34 of the claw pieces 30, 30 at the same height position of the front end side support unit 3, and the semiconductor wafer 9 is 3 in the end effector device 1. The claw pieces 30, 30, 30 hold the peripheral surface and the peripheral edge surface. That is, only a part of the lower surface of the peripheral edge of the semiconductor wafer 9 is received by the claw piece 30, and the claw piece 30 does not cover the entire lower surface of the semiconductor wafer 9.
(Step 2)
In this state, the first arm 20 and the second arm 21 (see FIG. 1) rotate, the arm support portion 23 moves up and down, and the plurality of semiconductor wafers 9 and 9 held by the end effector device 1 are made of semiconductor. It is transported before a processing shelf (not shown) in the processing booth. The processing shelf is provided with a support portion (not shown) that receives the lower surface of the semiconductor wafer 9.

(Step 3)
When the end effector device 1 transports a plurality of semiconductor wafers 9 and 9 to the semiconductor processing booth, the support portion is moved so as to face the lower surface of the semiconductor wafer 9, and the lower surface exposed portion of the semiconductor wafer 9 is exposed. Abut. When the base end side support unit 3 a is moved to the retracted position, the claw piece 30 of the base end side support unit 3 a is separated from the lower surface of the peripheral edge of the semiconductor wafer 9 and is no longer held by the claw piece 30. A plurality of semiconductor wafers 9 are supported by the support portion and transferred to a processing shelf in a processing booth, where heat treatment or film formation is performed. The arm support part 23 moves up and down, the first arm 20 and the second arm 21 rotate, and the end effector device 1 returns to the position facing the hoop.

  In the same manner as in the prior art, it is necessary to change the vertical distance between adjacent semiconductor wafers, specifically, to narrow them before a plurality of semiconductor wafers are transferred from the hoop to the processing shelf of the processing booth. As described above, the support unit 3 is provided with the pitch changing mechanism 4 for changing the vertical distance between the plurality of claw pieces 30 and 30 for this purpose. Various modes of the pitch changing mechanism 4 will be described below. For the sake of convenience of explanation, the pitch changing mechanism 4 of the front end side support unit 3 standing on the blade 10 will be described, but the base end side support unit 3a is also provided with the same pitch changing mechanism 4.

(First Embodiment of Pitch Change Mechanism)
7 (a) and 7 (b) are views in which the side surface of the pitch changing mechanism 4 according to the first embodiment is partially broken. FIG. 7 (a) shows an initial state with a large pitch, and FIG. 7 (b). Indicates a state where the pitch is small.
A piston shaft 50 having a circular cross section is provided on the blade 10 so as to be movable up and down, and a flange 51 is attached to an upper end portion of the piston shaft 50. A helical coil spring 40 extending vertically is fitted to the piston shaft 50, and the coil springs 40 are formed at equal intervals. The coil spring 40 is a single compression coil spring, and the plurality of claw pieces 30, 30 are arranged on the outer periphery of the coil spring 40 with a leading end directed toward the center of the semiconductor wafer 9 and spaced apart vertically. Yes. Specifically, five claw pieces 30 are provided, and the lowest claw piece 30 does not move up and down on the blade 10, and the other four claw pieces 30 and 30 move up and down. The number of claw pieces 30 is not limited to five.

Further, the interval between the adjacent claw pieces 30 and 30 is reduced equally from 10 mm to 6 mm, respectively, between the initial state and the conveyance to the processing booth. In the following description, when the upper claw pieces 30 are pressed down and reduced, To do. That is, the upper claw piece 30 is pushed down by 4 mm with respect to the lowermost claw piece 30, but the uppermost claw piece 30 is pushed down by 16 mm. Of course, the lower nail piece 30 may be pushed up to shorten the interval between the nail pieces 30 and 30. You may perform both pushing up and pushing down of the nail | claw piece 30. FIG.
In the present embodiment, the piston shaft 50 becomes a part of the operating mechanism 5 that elastically deforms the coil spring 40 in the vertical direction and changes the interval between the claw pieces 30 and 30. As a mechanism for raising and lowering the piston shaft 50, for example, a configuration in which the piston shaft 50 is connected to a solenoid or an air cylinder is conceivable.

In the initial state shown in FIG. 7A, the coil spring 40 is pressed lightly downward by a free length or a flange 51. The claw pieces 30 and 30 have a vertical interval equal to one spring pitch, and the claw pieces 30 and the coil spring 40 are integrally formed of synthetic resin. The uppermost claw piece 30 is in contact with the lower surface of the flange 51.
When the piston shaft 50 is lowered from the initial state shown in FIG. 7 (a), the flange 51 pushes the coil spring 40 downward, and the coil spring 40 contracts against the elastic biasing force until adjacent coils come into close contact with each other. Since the distance between pitches becomes short, the space | interval between adjacent claw pieces 30 and 30 also becomes short. As described above, since the claw piece 30 receives the lower surface of the peripheral edge of the semiconductor wafer 9, the interval between the semiconductor wafers 9 and 9 adjacent to each other in the vertical direction is also shortened. As a result, the plurality of semiconductor wafers taken out of the hoop are sent to the processing booth with the vertical interval shortened. After a plurality of semiconductor wafers are taken out at the processing booth, the end effector device 1 including the pitch changing mechanism 4 returns to a position facing the hoop. At that time, as shown in FIG. 7B to FIG. 7A, the piston shaft 50 rises. The coil spring 40 extends upward due to the elastic restoring force, the vertical gap between the adjacent claw pieces 30, 30 is widened, and the pitch changing mechanism 4 returns to the initial state. That is, even if the piston shaft 50 does not pull up the coil spring 40, the coil spring 40 returns to the initial state. Of course, the coil spring 40 may be attached to the flange 51 and the coil spring 40 may be pulled up by the piston shaft 50.

Here, since the piston shaft 50 has a circular cross section, the coil spring 40 and the claw piece 30 may rotate around the piston shaft 50 inadvertently. In this case, there is a possibility that the claw piece 3 rotates so as to be displaced from the lower surface of the semiconductor wafer 9 and cannot receive the semiconductor wafer 9. In view of this point, the anti-rotation configuration shown in FIG. 8 is provided on the blade 10.
FIG. 8 is a plan view of the lowest claw piece 30 as viewed from the direction A1 in FIG. 7 (a). On the blade 10, a rotation stop piece 12 is provided so as to surround the lowermost claw piece 30, and the lowermost claw piece 30 fits into a recess 13 formed in the rotation stop piece 12. The side portion of the claw piece 30 comes into contact with the inner wall of the recess 13, and the lowest claw piece 30 is restricted from rotating carelessly around the piston shaft 50. Since the claw piece 30 and the coil spring 40 are integrally formed, the rotation of the coil spring 40 around the piston shaft 50 is also restricted.

  The claw piece 30 supports only a part of the lower surface of the peripheral edge of the semiconductor wafer 9 and does not cover the entire lower surface of the semiconductor wafer 9. Therefore, the pitch change mechanism 4 can be made smaller and lighter than the conventional pitch change mechanism 4 that supports the entire lower surface of the semiconductor wafer 9. Thereby, the pitch changing mechanism 4 has a configuration suitable for being incorporated in the end effector device 1 attached to the tip of the robot arm.

(Second Embodiment of Pitch Change Mechanism)
FIGS. 9A and 9B are views in which a side surface of the pitch changing mechanism 4 according to the second embodiment is partly broken, and FIG. 9A shows an initial state where the pitch is large, and FIG. Indicates a state where the pitch is small. In the pitch changing mechanism 4 of the present embodiment, the spring pitch of the coil spring 40 of the pitch changing mechanism 4 shown in FIG. 7A is short, specifically, halved, and claw pieces 30 are provided every other spring pitch. . Even in this example, when the piston shaft 50 is lowered from the initial state shown in FIG. 9A, the coil spring 40 is contracted and adjacent coils are brought into close contact with each other. The interval between adjacent claw pieces 30 and 30 is shortened, and as shown in FIG. 9B, the interval between adjacent semiconductor wafers 9 and 9 is also shortened. Thus, the plurality of wafers taken out from the hoop are sent to the processing booth with the vertical interval shortened. Since the subsequent operation of the pitch changing mechanism 4 is the same as that of the first embodiment, description thereof is omitted.

(Third embodiment of pitch changing mechanism)
FIGS. 10A and 10B are views in which a side surface of the pitch changing mechanism 4 according to the third embodiment is partly broken. FIG. 10A shows an initial state where the pitch is large, and FIG. Indicates a state where the pitch is small. In the present embodiment, the piston shaft 50 is a rectangular shaft having a rectangular cross section, and a plurality of coil springs 40, 40 are fitted to the piston shaft 50 in a stacked state. The coil spring 40 is a compression coil spring as in the first and second embodiments, but is shorter than the coil spring 40 of both embodiments. A claw piece 30 is attached to the upper end portion of each coil spring 40, and each claw piece 30 has its tip portion directed toward the center of the semiconductor wafer 9. One claw piece 30 and the coil spring 40 in contact with the upper surface of the claw piece 30 are connected, that is, the coil springs 40 adjacent in the vertical direction are connected to each other via the claw piece 30. Similar to the first embodiment, the claw pieces 30, 30 adjacent to each other in the vertical direction are arranged with a space in the vertical direction, and each claw piece 30 is fitted to the piston shaft 50 to be guided up and down. As shown in FIG. 10 (a), in the initial state where the distance between the claw pieces 30 is wide, the coil spring 40 is in a free length or a state where it is pressed lightly downward. Five claw pieces 3 are provided, the lowest claw piece 30a is a fixed claw piece fixed on the blade 10, and the other four claw pieces 30 and 30 are movable claw pieces that move up and down.

When the piston shaft 50 is lowered from the initial state shown in FIG. 10 (a), the coil spring 40 is pressed downward by the flange 51, and is contracted until the adjacent coils are in close contact against the upward elastic biasing force. Since the distance between the pitches of the coil springs 40 is reduced, the distance between the adjacent claw pieces 30 is shortened, and as shown in FIG. 10B, the distance between the upper and lower adjacent semiconductor wafers 9 is also shortened. Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened.
When the end effector device 1 provided with the pitch changing mechanism 4 returns from the processing booth to the position facing the hoop, the piston shaft 50 ascends as shown in FIG. The coil spring 40 pressed downward is extended upward by the elastic restoring force, and the vertical distance between the adjacent claw pieces 30 is increased.

The claw piece 30 and the coil spring 40 may be integrally formed, but are not necessarily formed integrally. Therefore, the claw piece 30 and the coil spring 40 can be formed of different materials, for example, the claw piece 30 can be made of synthetic resin and the coil spring 40 can be made of a metal wire. In general, the coil spring 40 is made of a metal wire and is distributed in the market as a general-purpose product. Therefore, the pitch changing mechanism 4 can be formed at low cost by using the metal coil spring 40 which is a general-purpose product.
Further, since the piston shaft 50 is a square shaft, the rotation of the claw piece 30 around the piston shaft 50 can be regulated using the piston shaft 50. FIG. 11 is a perspective view of the claw piece 30 used in the pitch changing mechanism 4 of the third embodiment. The main body 31 of the claw piece 30 is provided with a rectangular through hole 35 penetrating vertically, and the through hole 35 is slidably fitted to the piston shaft 50. This prevents the claw piece 30 from rotating around the piston shaft 50 inadvertently, and the claw piece 30 reliably supports the lower surface of the semiconductor wafer 9. In the first and second embodiments, the piston shaft 50 may be formed as a square axis, and the inner opening of the coil spring 40 that fits into the piston shaft 50 may be formed in a rectangular shape. In short, what is necessary is just to form so that the relative rotation of the piston shaft 50 and the coil spring 40 may be restrict | limited.

(Fourth embodiment of pitch changing mechanism)
12 (a) and 12 (b) are views in which a side surface of the pitch changing mechanism 4 according to the fourth embodiment is partially broken. FIG. 12 (a) shows an initial state where the pitch is large, and FIG. Indicates a state where the pitch is small. FIG. 13 is a side view of the cylindrical body 8 used for the pitch changing mechanism 4. Even in this embodiment, the lowest claw piece 30a is a fixed claw piece fixed on the blade 10, and the other four claw pieces 30 and 30 are movable claw pieces.
The pitch changing mechanism 4 includes a cylindrical body 8 provided on the blade 10, and a claw piece guide shaft 81 is provided inside the cylindrical body 8 so as to extend vertically. The cylindrical body 8 is provided so as to be rotatable in a horizontal plane around the claw piece guide shaft 81, and the claw piece 30 penetrates the outer surface and the inner side of the cylindrical body 8 on the peripheral surface of the cylindrical body 8. , 30 are provided with a plurality of spiral grooves 80, 80. The vertical length of the spiral groove 80 corresponding to one round of the outer peripheral surface of the cylindrical body 8 is called a spiral pitch. The spiral groove 80 is formed such that the upper spiral groove 80 has a larger helical pitch and the lower spiral groove 80 has a smaller helical pitch. This is because, as described above, in order to reduce the gap between the adjacent claw pieces 30 and 30 equally, it is necessary to increase the descending amount of the upper claw pieces 30.
Each claw piece 30 has a base end portion fitted into the claw piece guide shaft 81 and a distal end portion passing through the spiral groove 80 and facing the center portion of the semiconductor wafer 9. The claw piece guide shaft 81 is an angular axis, and the claw piece 30 in the present embodiment has a rectangular through hole 35 formed in the main body 31 as shown in FIG. Therefore, even if the cylindrical body 8 rotates, the claw piece 30 does not rotate in conjunction with it, and only raising and lowering is allowed.
Various mechanisms for rotating the cylindrical body 8 are conceivable. As an example, as shown in FIGS. 12A and 12B, one end portion of the timing belt 82 is wound around the lower end portion of the cylindrical body 8, and the timing belt 82 is wound. A configuration is conceivable in which the other end is connected to a linear drive device (not shown) such as a motor or an air cylinder provided on the second arm 21. Such a motor or air cylinder may be provided in the blade 10.

As shown in FIG. 12A, the cylindrical body 8 is rotated in the clockwise direction when viewed from above, from the initial state in which the upper and lower adjacent claw pieces 30 are separated by a predetermined interval. Each claw piece 30, 30 descends along the spiral groove 80. As described above, the upper spiral groove 80 has a larger spiral pitch, and the lower spiral groove 80 has a smaller spiral pitch. Therefore, the uppermost claw piece 30 has the largest descending amount, and the lower claw piece 30 has the smaller descending amount. Become. When the uppermost claw piece 30 is in the lowered state, the interval between the adjacent claw pieces 30, 30 is shorter than that in the initial state shown in FIG. 12 (a), as shown in FIG. Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened.
After the plurality of semiconductor wafers 9 and 9 are taken out at the processing booth, the end effector device 1 including the pitch changing mechanism 4 returns to the initial state facing the hoop. At this time, the cylindrical body 8 is rotated counterclockwise as viewed from above, and the claw pieces 30 and 30 are raised as shown in FIGS. 12 (b) to 12 (a). The pitch changing mechanism 4 returns to the initial state.
The claw piece guide shaft may be provided outside the cylindrical body 8, and the claw piece 30 may be fitted in the spiral groove 80 of the cylindrical body 8 (see FIG. 13, the claw piece guide shaft is not shown in FIG. 13). In this case, the spiral groove 80 does not need to penetrate the outer side and the inner side of the cylindrical body 8, and may be formed on the peripheral surface.

(Fifth embodiment of pitch changing mechanism)
14 (a) and 14 (b) are partially cutaway side views of the pitch changing mechanism 4 according to the fifth embodiment, and show another example of the operating mechanism 5 that lifts and lowers the claw pieces 30 and 30. FIG. . FIG. 14A shows an initial state where the pitch is large, and FIG. 14B shows a state where the pitch is small.
The operating mechanism 5 includes a hollow fixed shaft 6 erected on the blade 10, and a telescopic shaft 60 having a lower surface opened and fitted to the fixed shaft 6 so as to be movable up and down from the upper side of the fixed shaft 6. As in the first embodiment, a coil spring 40 having a plurality of claw pieces 30 and 30 for each pitch is fitted to the outside of the fixed shaft 6 and the telescopic shaft 60. A flange 61 is provided at the upper end of the telescopic shaft 60, and the uppermost claw piece 30 is attached to the flange 61. Accordingly, when the telescopic shaft 60 moves up and down, the coil spring 40 expands and contracts, and the vertical distance between the adjacent claw pieces 30 and 30 changes. The uppermost claw piece 30 may not be attached to the flange 61, and the uppermost claw piece 30 may be in press contact with the urging force of the coil spring 40.
The actuating mechanism 5 includes a cylinder (not shown) positioned on the base end side of the second arm 21, and the cylinder and the flange 61 are connected by a wire 62 that passes through the fixed shaft 6 and the telescopic shaft 60. Is done. The wire 62 extends downward from the lower surface of the flange 61, wraps around a pulley 63 disposed below the fixed shaft 6 in the blade 10, extends horizontally, and is connected to the cylinder. The rotation center axis of the pulley 63 is substantially orthogonal to the pulley 63 and the wire 62 between the cylinders.

When the cylinder pulls the wire 62 horizontally from the initial state shown in FIG. 14 (a), the wire 62 is converted into a downward pulling movement by the pulley 63, and the flange 61 is pulled downward. The coil spring 40 is pushed downward against the elastic urging force and contracts until the adjacent coils come into close contact with each other. As a result, as shown in FIG. 14 (b), the interval between the adjacent claw pieces 30, 30 is as follows. Compared to the initial state shown in FIG. Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened.
After the plurality of semiconductor wafers 9 and 9 are taken out at the processing booth, the end effector device 1 provided with the pitch changing mechanism 4 returns to the position facing the hoop. At that time, the cylinder releases the drawing of the wire 62. The coil spring 40 is raised by the elastic restoring force, the interval between the adjacent claw pieces 30 and 30 is widened, and the pitch changing mechanism 4 returns to the initial state.
In the present embodiment, the cylinder that is the drive source of the operation mechanism 5 is provided outside the blade 10 and on the base end side of the second arm 21. That is, the cylinder is not provided in or on the blade 10. Therefore, this also makes it possible to reduce the size of the pitch changing mechanism 4 so as to be suitable for incorporation into the end effector device 1.
In the present embodiment, the weight of the cylinder is not added to the tip of the second arm 21, so the weight on the tip of the second arm 21 can be reduced, and the tip of the second arm 21 can be reduced. Can be operated smoothly.

(Sixth embodiment of pitch changing mechanism)
FIGS. 15A and 15B are views in which a side surface of the pitch changing mechanism 4 according to the sixth embodiment is partly broken. FIG. 15A shows an initial state where the pitch is large, and FIG. Indicates a state where the pitch is small. The actuating mechanism 5 includes a fixed shaft 6 and a telescopic shaft 60, and a coil spring 40 having a plurality of claw pieces 30, 30 for each pitch fits outside the fixed shaft 6 and the telescopic shaft 60. The configuration in which the flange 61 is pulled downward by the wire 62 is the same as in the fifth embodiment. However, in this embodiment, the tip of the rotary shaft 64 extending from the motor or rotary actuator (not shown) provided on the second arm 21 is disposed below the fixed shaft 6 in the blade 10. The pulley 63 is connected to the pulley 63 and directly rotated by the rotating shaft 64. The rotation center axis of the pulley 63 is substantially parallel to the longitudinal direction of the rotation shaft 64.
From the initial state shown in FIG. 15A, the motor or the rotary actuator is energized to rotate the rotating shaft 64 and the pulley 63, and pull the wire 62 downward. Then, the coil spring 40 is pushed downward by the flange 61 and contracts until the adjacent coils come into close contact with each other against the elastic biasing force. As a result, as shown in FIG. 15B, the interval between the adjacent claw pieces 30 is shortened compared to the initial state shown in FIG. Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened. The subsequent operation is the same as that of the fifth embodiment, and the description is omitted.

(Seventh Embodiment of Pitch Change Mechanism)
16 (a) and 16 (b) are partially cutaway side views of the pitch changing mechanism 4 according to the seventh embodiment. FIG. 16 (a) shows an initial state with a large pitch, and FIG. Indicates a state where the pitch is small. The actuating mechanism 5 includes a fixed shaft 6 and a telescopic shaft 60, and a coil spring 40 including a plurality of claw pieces 30, 30 for each pitch is fitted on the outside of both shafts 6, 60, and a flange 61 of the telescopic shaft 60. Is pulled downward in the same manner as in the fifth and sixth embodiments. However, in the present embodiment, the flange 61 is moved up and down by the air cylinder 55 disposed in the telescopic shaft 60 instead of the wire 62. The air cylinder 55 is a double-acting type in which a piston rod 57 is provided in a cylindrical cylinder body 56 so that the piston rod 57 can be protruded and retracted, and is reciprocated by introducing air into the cylinder body 56 or sucking air from the cylinder body 56. . The tip of the piston rod 57 is connected to the flange 61, and the flange 61 is moved up and down.
In the initial state shown in FIG. 16 (a), the piston rod 57 protrudes upward from the cylinder body 56. When air is sucked from the cylinder body 56, the piston rod 57 is lowered and the flange 61 is lowered as shown in FIG. 16 (b). The coil spring 40 is pushed downward against the elastic biasing force and contracts until the adjacent coils come into close contact with each other. As a result, the interval between the adjacent claw pieces 30 and 30 becomes shorter than in the initial state. Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened. The subsequent operation is the same as that of the fifth embodiment, and the description is omitted.

(Eighth embodiment of pitch changing mechanism)
17 (a) and 17 (b) are partially cutaway side views of the pitch changing mechanism 4 according to the eighth embodiment. FIG. 17 (a) shows an initial state with a large pitch, and FIG. Indicates a state where the pitch is small. The actuating mechanism 5 includes a fixed shaft 6 and a telescopic shaft 60, and a coil spring 40 including a plurality of claw pieces 30, 30 for each pitch is fitted on the outside of both shafts 6, 60, and a flange 61 of the telescopic shaft 60. The configuration in which the air cylinder 55 is pulled downward is the same as in the seventh embodiment. However, in this embodiment, the air cylinder 55 is a single-acting type that moves the piston rod 57 only in one direction by performing only one of air suction and air introduction. In such a single-acting air cylinder 55, when the suction or introduction of air is interrupted, the piston rod 57 is moved before the air is sucked or introduced by the spring built in the cylinder body 56. Return to position. For convenience of explanation, it is assumed that the air cylinder 55 only sucks air.
In the initial state shown in FIG. 17A, the piston rod 57 protrudes upward from the cylinder body 56. When the cylinder body 56 sucks air, the piston rod 57 is lowered and the flange 61 is lowered as shown in FIG. The coil spring 40 is pushed downward against the elastic biasing force and contracts until the adjacent coils come into close contact with each other. As a result, the interval between the adjacent claw pieces 30 and 30 becomes shorter than in the initial state. Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened. When the cylinder body 56 releases air suction, the piston rod 57 is raised by the spring built in the cylinder body 56 and returns to the initial state.
In general, the single-acting air cylinder 55 is simpler and less expensive than the double-acting air cylinder 55. Therefore, the pitch changing mechanism 4 that can be incorporated into the end effector device 1 can be configured with a simple configuration at low cost.

(Ninth embodiment of pitch changing mechanism)
18 is a plan view of the pitch changing mechanism 4 according to the ninth embodiment, FIG. 19 is a perspective view of the main part of the pitch changing mechanism 4, and FIGS. 20 (a) and 20 (b) are shown in FIG. It is the side view which looked at the pitch change mechanism 4 from the B1 direction. FIG. 20A shows an initial state where the pitch is large, and FIG. 20B shows a state where the pitch is small. Even in this embodiment, the pitch changing mechanism 4 raises and lowers the four claw pieces 30 and 30 at different height positions, and each claw piece 30 supports the peripheral edge portion of the corresponding semiconductor wafer 9. The upper claw piece 30 has the same movement stroke as in the above embodiments.
The pitch changing mechanism 4 includes an elongated swing plate 7 that swings in a vertical plane about a central axis 70 inside the blade 10 and inside the mounting position of the semiconductor wafer 9. Raises and lowers the nail pieces 30, 30. Various configurations for swinging the swing plate 7 are conceivable. For example, a small motor may be connected to the central shaft 70. A plurality of long holes 71 are formed in the swing plate 7 along the longitudinal direction of the swing plate 7 in correspondence with the number of the claw pieces 30. The claw pieces 30 and 30 are each attached to a substantially L-shaped support shaft 72. Each support shaft 72 extends vertically and has a vertical shaft 73 with the claw piece 30 attached to the upper end portion, and a lower end portion of the vertical shaft 73. Is integrally provided with a horizontal shaft 74 extending horizontally. The tip of the horizontal shaft 74 is fitted into the corresponding elongated hole 71, and the support shaft 72 has a lower height on the claw piece 30 supported by the vertical shaft 73. It fits in the long hole 71 on the central shaft 70 side. Thereby, the raising / lowering stroke becomes longer as the upper claw piece 30.
Each vertical shaft 73 is fitted in a thrust bearing (not shown) provided on the blade 10 so that each vertical shaft 73 moves up and down straight.

In the initial state shown in FIG. 20A, the swing plate 7 is inclined with the tip portion facing upward as shown by the solid line, and the tip portion is in contact with the upper stopper 77 in the blade 10. An inclination angle of the swing plate 7 with respect to the horizontal plane at this time is defined as θ. In the initial state, the upper and lower adjacent claw pieces 30 are positioned at substantially equal intervals.
If the swing plate 7 swings downward about the central shaft 70 from the initial state, the support shafts 72 and 72 are lowered at a time. Since the upper claw piece 30 has a longer lowering stroke than the lower claw piece 30, the distance between the claw pieces 30 adjacent to the upper and lower sides is narrow, and as shown in FIG. The interval between the wafers 9 and 9 is also shortened.
When the oscillating plate 7 is tilted with its tip portion downward and the angle with the horizontal plane becomes θ, that is, when the oscillating plate 7 rotates downward by an angle 2θ from the initial state, the oscillating plate 7 is moved to the blade 10. It stops in contact with the inner lower stopper 78. The upper and lower adjacent claw pieces 30 and 30 are positioned at substantially equal intervals, and the intervals are shorter than the initial state.
Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened.
After a plurality of semiconductor wafers are taken out at the processing booth, the end effector device 1 including the pitch changing mechanism 4 returns to a position facing the hoop. At that time, if the swing plate 7 is rotated upward by an angle 2θ around the central axis 70, the claw pieces 30 and 30 return to the initial state.

(Tenth embodiment of pitch changing mechanism)
FIGS. 21A and 21B are views in which a side surface of the pitch changing mechanism 4 according to the tenth embodiment is partly broken. FIG. 21A shows an initial state where the pitch is large, and FIG. Indicates a state where the pitch is small. FIG. 21 (c) is a cross-sectional view of the pitch changing mechanism 4 of FIG. 21 (a) as seen from the rear side, broken along the plane including the arrows C1-C1.
In the present embodiment, the plurality of claw pieces 30, 30 are fitted on a piston shaft 50 that is a square shaft provided with a flange 51 at the upper end. The lifting mechanism of the piston shaft 50 is the same as in the third embodiment. The upper and lower adjacent claw pieces 30 and 30 are connected by a clip 45 that is an elastic member. The clip 45 protrudes from the upper and lower ends of the arc-shaped support piece 46 so that the leg pieces 47 and 47 spread outward from each other. When the clip 45 is pressed so as to narrow the angle between the leg pieces 47 and 47, the pressing direction is Elastic force is generated in the opposite direction. As shown in FIG. 21 (c), the clip 45 is located at the end in the width direction of the claw piece 30, but the clips 45 adjacent in the vertical direction are alternately provided at the end of the claw piece 30 on the opposite side. Thereby, the elastic force of the clip 45 is equally exerted on the both ends of the claw piece 30 in the width direction.

When the piston shaft 50 is lowered from the initial state shown in FIG. 21 (a), the flange 51 pushes the leg piece 47 of the clip 45 in a direction in which the angle between the leg pieces 47, 47 becomes smaller, and the clip 45 is elastic. Shrinks against power. Since the distance between pitches becomes short, the space | interval between adjacent claw pieces 30 and 30 also becomes short. As described above, since the claw piece 30 receives the lower surface of the peripheral edge of the semiconductor wafer 9, the interval between the semiconductor wafers 9 and 9 adjacent to each other in the vertical direction is also shortened. Thus, the plurality of wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened.
After a plurality of semiconductor wafers are taken out at the processing booth, the end effector device 1 including the pitch changing mechanism 4 returns to a position facing the hoop. At that time, as shown in FIG. 21B to FIG. 21A, the piston shaft 50 is raised. The clip 45 is elastically restored in the direction in which the angle between the leg pieces 47 is increased, and the pitch changing mechanism 4 returns to the initial state. That is, even if the piston shaft 50 does not pull up the clip 45, the pitch changing mechanism 4 returns to the initial state.

(Eleventh embodiment of pitch changing mechanism)
FIGS. 22A and 22B are views in which a side surface of the pitch changing mechanism 4 according to the eleventh embodiment is partially broken. FIG. 22A shows an initial state where the pitch is large, and FIG. Indicates a state where the pitch is small. The actuating mechanism 5 includes a fixed shaft 6 and a telescopic shaft 60 provided with a flange 61 at the upper end, and a coil spring including a plurality of claw pieces 30 and 30 for each pitch outside the fixed shaft 6 and the telescopic shaft 60. The configuration in which 40 is fitted is the same as in the fifth embodiment. In the present embodiment, a substantially triangular rocker 67 that rocks in a vertical plane about a central axis 70 provided in the blade 10 is provided. One end of the oscillator 67 and the flange 61 of the telescopic shaft 60 are connected by a vertical wire 65, and a cylinder or motor (not shown) provided on the second arm 21 and the other end of the oscillator 67 are connected to a horizontal wire. 62 or a bar.

When the horizontal wire 62 or the rod is pulled by a cylinder or a motor from the initial state shown in FIG. 22A, the oscillator 67 rotates clockwise about the central axis 70. For this reason, the vertical wire 65 is pulled downward, the flange 61 is lowered, and the coil spring 40 is pushed downward against the elastic biasing force and contracts until the adjacent coils come into close contact with each other. As a result, as shown in FIG. 22B, the interval between the adjacent claw pieces 30 is shortened compared to the initial state shown in FIG. Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened.
When the tension of the horizontal wire 62 or the rod is released, the coil spring 40 is elastically restored and the flange 61 is raised. The pitch between the adjacent claw pieces 30 and 30 is widened, and the pitch changing mechanism 4 returns to the initial state.
22 (a) and 22 (b), the connection point between one end of the oscillator 67 and the vertical wire 65 is S1, and the connection point between the other end of the oscillator 67 and the horizontal wire 62 or bar is S2. To do. A distance L1 from the central axis 70 to the connection point S1 is longer than a distance L2 from the central axis 70 to the connection point S2. Thereby, even if the distance which pulls the horizontal wire 62 with a cylinder or a motor is short, the distance which the vertical wire 65 descends the flange 61 can be lengthened. That is, even if the cylinder or motor of the second arm 21 is compact, the coil spring 40 can be greatly contracted.
The oscillator 67 may be L-shaped. In short, it is only necessary to maintain the positional relationship between the central axis 70, the connection point S1, and the connection point S2 as described above.

(Twelfth embodiment of pitch changing mechanism)
23 (a) and 23 (b) are partial cutaway views of the side of the pitch changing mechanism 4 according to the twelfth embodiment. FIG. 23 (a) shows an initial state with a large pitch, and FIG. 23 (b). Indicates the state when the pitch is small.
The present embodiment has basically the same configuration as that of the eleventh embodiment, but the vertical distance L3 from the central axis 70 to the connection point S2 is shorter than that of the eleventh embodiment. Thereby, even when the thickness of the blade 10 is thin, the coil spring 40 provided with the claw piece 30 can be contracted using the oscillator 67.

(13th Embodiment of Pitch Change Mechanism)
FIG. 24 is an exploded perspective view of the pitch changing mechanism 4 according to the thirteenth embodiment, and the coil spring 40 is omitted for convenience of illustration. 25 (a) and 25 (b) are cross-sectional views of the pitch changing mechanism 4 as seen from the direction D1 in FIG. FIG. 25 (a) shows an initial state where the pitch is large, and FIG. 25 (b) shows a state where the pitch is small.
In the present embodiment, the plurality of claw pieces 30 are attached to the outer peripheral surface of the coil spring 40 at regular intervals over the top and bottom, as in the first embodiment, and the lowest claw piece 30a is fixed. It is a nail piece. The coil spring 40 is fitted to a lifting shaft 100 provided on the blade 10 in a vertical direction. The elevating shaft 100 is provided with a housing 101 at the upper end, and a screw shaft 102 is formed downward from the central portion in the longitudinal direction. The length of the screw shaft 102 is the amount by which the uppermost claw piece 30 is moved up and down. It is determined according to the longest lifting stroke. A part of the peripheral surface of the screw shaft 102 forms a vertically long cutout 103, and the screw shaft 102 has a substantially D-shaped cross section. The lowermost claw piece 30a is formed integrally with a receiving ring 14 fixed on the blade 10, and a restriction hole 15 corresponding to the D-shaped cross-sectional shape of the screw shaft 102 is opened in the receiving ring 14. Has been. When the screw shaft 102 is fitted into the restriction hole 15, the screw shaft 102 is restricted from rotating about the longitudinal axis, and only the lifting operation is allowed.

As shown in FIGS. 25A and 25B, a bracket 110 having a recess 111 on the upper surface is attached to a position corresponding to the lifting shaft 100 on the lower surface of the blade 10. Bearings 112 and 112 are respectively attached to the lower surface and the lower surface of the blade 10. A pulley assembly 120 (see FIG. 24) is disposed between the lower surface of the blade 10 and the bracket 110. The pulley assembly 120 is configured by protruding receiving tubes 122 and 122 from the upper and lower surfaces of the driven pulley 121, respectively. The driven pulley 121 is hollow, and a screw surface 123 into which the screw shaft 102 is screwed is formed on the inner surface of each receiving tube 122. Each receiving tube 122 is fitted to the bearings 112 and 112 to be rotatable.
The second arm 21 (see FIG. 1) is provided with a motor (not shown) that rotates the driven pulley 121, and an endless belt 124 is laid between the motor and the driven pulley 121. When the motor rotates, the driven pulley 121 rotates and the receiving cylinder 122 rotates. The receiving cylinder 122 applies a rotational force to the screw shaft 102. As described above, since the screw shaft 102 is fitted in the restriction hole 15 and its rotation is restricted, the screw shaft 102 can only be raised and lowered by the rotation of the driven pulley 121. forgiven.

From the initial state shown in FIG. 25A, the motor is energized to rotate the driven pulley 121. As the screw shaft 102 is lowered, the casing 101 is also lowered, and the coil spring 40 is pushed downward against the elastic biasing force. As a result, as shown in FIG. 25 (b), adjacent coils of the coil spring 40 are in close contact with each other, and the distance between the adjacent claw pieces 30, 30 is shorter than that in the initial state shown in FIG. 25 (a). . Thus, the plurality of semiconductor wafers 9 and 9 taken out from the hoop are sent to the processing booth with the vertical interval shortened.
After a plurality of semiconductor wafers are taken out at the processing booth, the end effector device 1 including the pitch changing mechanism 4 returns to a position facing the hoop. At that time, the coil spring 40 that reversely rotates the motor and raises the screw shaft 102 extends upward by the elastic restoring force, the vertical gap between the adjacent claw pieces 30 and 30 is widened, and the pitch changing mechanism 4 returns to the initial state.
In FIGS. 25A and 25B, the coil spring 40 is wound clockwise when viewed from above, but the screw shaft 102 into which the coil spring 40 is fitted is generally formed clockwise when viewed from above. Therefore, when the coil spring 40 is expanded and contracted, the inside of the coil spring 40 may be caught on the screw shaft 102. Therefore, the coil spring 40 is preferably formed in a left-handed manner.

In addition, in the end effector apparatus 1 of said embodiment, it was supposed that the space | interval between adjacent claw pieces 30 and 30 was shrunk | reduced until it conveys to a processing booth from an initial state.
However, as a matter of course, the interval between the adjacent claw pieces 30 and 30 may be widened during the period from the initial state to the transfer to the processing booth.
In the above description, the case of two pitches has been described. However, an arbitrary pitch between the maximum pitch and the minimum pitch can be realized.
In the above description, the semiconductor wafer 9 has been described on the assumption that it is supported substantially horizontally by the claw pieces 30, 30, 30, but it is not necessarily required to be substantially horizontal.
The blade 10 does not have to have a plate shape as shown in FIG. For example, a structure such as a ramen structure combining frames may be used. In short, any structure that can hold the supporting unit and can support a plurality of semiconductor wafers is acceptable.
In the present application, “gripping” means that the semiconductor wafer can be transported by the end effector device, and includes modes other than the edge grip. For example, the semiconductor wafer 9 may be supported only on the lower surface. In this case, the deviation between the semiconductor wafer 9 and the claw piece 30 is limited by the frictional force.
Further, the coil spring 40 of the pitch changing mechanism 4 does not need to be contracted until adjacent coils come into close contact with each other.

(Second Embodiment of End Effector Device)
FIG. 26 is an enlarged perspective view of the end effector device 1 according to the second embodiment. The end effector device 1 includes a flat blade 10 having a base end attached to the tip of the second arm 21 and two pitch changing mechanisms 4 and 4 attached to the tip of the blade 10 so as to be separated from each other. And a support unit 3 provided on the second arm 21 so as to face the base end portion of the blade 10. As described above, the pitch changing mechanism 4 changes the vertical pitch of the plurality of semiconductor wafers 9 that are spaced apart from each other in the vertical direction, but the configuration is different from the pitch changing mechanism 4 of the above embodiment. The support unit 3 is provided with a pitch changing mechanism 4 on the outer surface of the box 350, and first guide pins 310, 310 facing the periphery of the semiconductor wafer 9 with a slight gap on both sides of the pitch changing mechanism 4. Configured. On the second arm 21, a drive source unit 600 to be described later is disposed on the side of the support unit 3.
The box 350 is moved on the tip of the second arm 21 by a plunger (not shown) provided on the second arm 21. Specifically, the box 350 moves between an advanced position that moves toward the tip of the blade 10 and a retracted position that moves from the advanced position toward the base end of the blade 10.
The pitch changing mechanism 4 located at the tip of the blade 10 is provided on the upper surface of the blade 10. The pitch changing mechanism 4 may be provided on the blade 10. For example, the pitch changing mechanism 4 may be provided on the lower surface of the blade 10. However, for convenience of explanation, it is assumed that the pitch changing mechanism 4 is provided upward from the blade 10 in the following example.

27 (a) and 27 (b) are plan views of the end effector device 1 showing the operation of the support unit 3, wherein (a) shows the retracted position and (b) shows the advanced position. Each pitch changing mechanism 4 includes a plurality of claw pieces 30, 30 that are spaced apart from each other in the vertical direction and each hold the peripheral edge of the semiconductor wafer 9. The shape of the claw piece 30 is the same as that shown in FIG. 4, and the claw piece 30 constitutes the “holding portion” in the present invention. Three claw pieces 30, 30, 30 at the same height of each pitch changing mechanism 4 hold the peripheral edge of one semiconductor wafer 9.
In the retracted position shown in FIG. 27A, the pitch changing mechanism 4 of the support unit 3 is out of the position where the semiconductor wafer 9 should be held. In this state, a plurality of semiconductor wafers 9 taken out from the hoop and arranged apart from each other in the vertical direction are transferred onto the blade 10.
When the semiconductor wafer 9 is transferred onto the blade 10, as shown in FIG. 27B, the support unit 3 moves toward the advanced position. The claw pieces 30 of the pitch changing mechanism 4 of the support unit 3 hold the peripheral edge of the semiconductor wafer 9.

As shown in FIG. 27B, three claw pieces 30, 30, 30 at the same height of each pitch changing mechanism 4 are arranged radially with respect to the center C of the semiconductor wafer 9. Since the horizontal plane on which the semiconductor wafer 9 is to be located is determined by the three claw pieces 30, 30, 30, each semiconductor wafer 9 is stably held substantially horizontally by the three claw pieces 30, 30, 30.
In the advanced position of the support unit 3 shown in FIG. 27 (b), the two second guide pins 500 that are positioned away from the first guide pins 310, 310 are erected and face the periphery of the semiconductor wafer 9. . The reason for this will be described later.
For convenience of explanation, it is assumed that the support unit 3 moves on the blade 10 between the advanced position and the retracted position. However, instead of or together with this, one or both of the pitch changing mechanisms 4 may be moved toward the center of the semiconductor wafer 9 or the base end portion of the blade 10.

(14th Embodiment of Pitch Change Mechanism)
28 (a), 28 (b), and 28 (c) are diagrams showing the configuration and operation of the pitch changing mechanism 4 according to the fourteenth embodiment, and the pitch changing located at the tip of the blade 10 shown in FIG. The mechanism 4 is viewed from the B direction. The pitch changing mechanism 4 has a rotating member 450 that rotates in a vertical plane around a horizontal line. The rotating member 450 connects the first link member 400 having a long plate shape, the second link member 410 provided so as to form a parallel link with the first link member 400, and the link members 400, 410. A plurality of connection link members 420 are provided. The plurality of connection link members 420 are provided at equal intervals along the longitudinal direction of the link members 400 and 410.
As shown in FIG. 28 (a), the connecting link member 420 is provided obliquely with respect to the two link members 400, 410, and the two link members 400 are provided by a rotating shaft 430 provided on the two link members 400, 410. , 410 is attached to be rotatable. The claw piece 30 is provided on the upper end portion of the connection link member 420 in a posture capable of holding the peripheral edge portion of the semiconductor wafer 9. The second link member 410 has a drive shaft 440 disposed coaxially with a rotation shaft 430 provided at one end (the left end in FIG. 28A), and a vertical surface is formed by the rotation of the drive shaft 440. Rotate inside.
In the state shown in FIG. 28 (a), each claw piece 30 is positioned on substantially the same horizontal plane, and the positions of the claw piece 30 and both link members 400, 410 at this time are defined as “standby positions”.

  When the second link member 410 is rotated counterclockwise from the standby position by the rotation of the drive shaft 440, the first link member 400 is also rotated by the connection link member 420 as shown in FIG. Since the connection link member 420 is rotatably attached to the link members 400 and 410 by the rotation shaft 430, the connection link member 420 and the claw piece 30 maintain the posture before the rotation. The claw piece 30 rises as the claw piece 30 is located farther from the drive shaft 440, and the vertical distance between adjacent claw pieces 30 becomes wider than the standby position. The plurality of claw pieces 30 are provided at equal intervals in pitch. The positions of the claw piece 30 and the link members 400 and 410 at this time are defined as “intermediate positions”.

  When the second link member 410 is rotated counterclockwise from the intermediate position by the further counterclockwise rotation of the drive shaft 440, the two link members 400, 410 are in the vertical state as shown in FIG. Become. The claw piece 30 maintains a posture capable of holding the peripheral edge of the semiconductor wafer 9. The pitch between adjacent claw pieces 30 is maximized. The position of the claw piece 30 and the link members 400 and 410 at this time is defined as an “ascending position”. That is, the pitch changing mechanism 4 converts the pitch of the plurality of claw pieces 30 holding the semiconductor wafer 9 by rotating the link members 400 and 410 in the vertical plane.

When the end effector device 1 is not used, the support unit 3 is in the retracted position. The claw pieces 30 and the link members 400 and 410 of each pitch changing mechanism 4 are in the standby position.
Before the plurality of semiconductor wafers 9 are transferred from the hoop to the end effector apparatus 1 using the end effector apparatus 1, all the pitch changing mechanisms 4 rotate the drive shaft 440 so that the claw pieces 30 are moved as shown in FIG. Reach the ascending position shown in c).
When the plurality of semiconductor wafers 9 are transferred to the end effector device 1, the support unit 3 moves from the retracted position to the advanced position while maintaining the claw pieces 30 of the pitch changing mechanism 4 at the raised position. Each semiconductor wafer 9 is held by the three claw pieces 30, 30, 30 having the same height as described above.
From this state, when the drive shaft 440 of the pitch changing mechanism 4 is rotated and both the link members 400 and 410 are rotated in the clockwise direction so that the claw piece 30 reaches the intermediate position shown in FIG. The pitch of the matching semiconductor wafers 9 is reduced. The first arm 20 and the second arm 21 are rotated to move the end effector device 1 to the processing shelf, and the semiconductor wafer 9 is processed.

In the end effector device 1 of the present embodiment, the semiconductor wafer 9 is held by the three pitch changing mechanisms 4, but the drive shafts 440 of the pitch changing mechanisms 4 rotate in synchronization with each other. A mechanism for rotating the drive shaft 440 synchronously will be described later. Accordingly, the three sets of both link members 400 and 410 rotate in synchronization with each other, and the three claw pieces 30 holding the semiconductor wafer 9 having the same height move up and down in synchronization with each other. Therefore, the semiconductor wafer 9 moves up and down stably while maintaining the posture held by the claw piece 30.
Moreover, both the link members 400 and 410 of the three pitch changing mechanisms 4 may rotate in the same direction to raise and lower the claw piece 30. In this case, the semiconductor wafer 9 moves up and down while slightly rotating about the center C shown in FIGS. 27 (a) and 27 (b). The claw pieces 30 positioned at the same height of the pitch changing mechanisms 4 are all shifted by the same horizontal amount when moving up and down. That is, the claw piece 30 does not rub the back surface of the semiconductor wafer 9. Thereby, generation | occurrence | production of the dust by the nail | claw piece 30 rubbing with the semiconductor wafer 9 can be prevented.

In the above description, both link members 400 and 410 are rotated counterclockwise in order to increase the pitch between adjacent semiconductor wafers 9. However, instead of this, as shown in FIGS. 29 (a) and 29 (b), a drive shaft 440 is provided at the other end of the second link member 410 (the right end in FIG. 29 (a)), and a connecting link member is provided. The pitch of the plurality of claw pieces 30 may be widened by tilting 420 in the opposite direction to the connection link member shown in FIGS. 28A and 28B and rotating the drive shaft 440 clockwise. That is, the pitch changing mechanism 4 shown in FIGS. 29 (a) and 29 (b) is different from the pitch changing mechanism 4 shown in FIGS. 28 (a) and 28 (b) in that the link members 400 and 410 rotate in the opposite direction during pitch conversion. Move.
Of the three pitch changing mechanisms 4, two pitch changing mechanisms 4 are configured as shown in FIGS. 28 (a) and 28 (b), and the other one pitch changing mechanism 4 is shown in FIGS. 29 (a) and 29 (b). It is good also as a structure shown in.
If the pitch changing mechanism 4 is configured in this way, when the drive shaft 440 and the link members 400 and 410 are rotated with each claw piece 30 holding the semiconductor wafer 9, the semiconductor wafer 9 is before and after the rotation. The position in the horizontal plane is shifted. However, if the two drive shafts 440 and the link members 400 and 410 are rotated in opposite directions, the positional deviation of the semiconductor wafer 9 in the horizontal plane is canceled out. Thereby, the position shift in the horizontal surface of the semiconductor wafer 9 can be suppressed.

(Pitch change mechanism drive mechanism)
The plurality, specifically, the three drive shafts 440 are rotated by one motor in the drive source unit 600 on the second arm 21. This specific configuration is shown below.
30 is a plan view showing an internal configuration of the end effector device 1, and FIG. 31 is an enlarged view of the drive source unit 600 shown in FIG. 30 as viewed from the D1 direction.
The two pitch changing mechanisms 4 provided at the distal end portion of the blade 10 are arranged such that the link members 400 and 410 are inclined with respect to a virtual line KS1 connecting the proximal end portion and the distal end portion of the blade 10. The pitch changing mechanism 4 of the support unit 3 is provided with the link members 400 and 410 orthogonal to the virtual line KS1. A direction orthogonal to the virtual line KS1 is KS2. The two pitch changing mechanisms 4 provided at the tip of the blade 10 are separated from each other along the virtual line KS2.

The drive source unit 600 includes a motor M, an intermediate gear train 610 meshed with the motor M, a swing gear 602 positioned at the downstream end of the intermediate gear train 610, and a swing center at the center of the swing gear 602. Is provided. As shown in FIG. 31, the swing member 800 has a first leg piece 801 and a second leg piece 810 extending outward from the swing center along the radial direction of the swing gear 602, and is imaginary. It swings in a plane perpendicular to KS1.
The distal end portion of the first leg piece 801 is a free end portion of the first small link 840 that is located away from the drive source unit 600 along the virtual line KS2 via an intervening link 830 whose longitudinal direction is directed to the virtual line KS2. Connected to The first small link 840 is provided with a first swing center shaft 850 at a lower end portion, and the first swing center shaft 850 is connected to the blade 10 via a first universal joint 115 provided along an imaginary line KS1. It connects with the drive shaft 440 of one pitch change mechanism 4 located in the front-end | tip part. The first universal joint 115 extends from the first swing central axis 850 along the virtual line KS1, and then tilts with respect to the virtual line KS1 toward the one pitch changing mechanism 4.
The distal end portion of the second leg piece 810 of the swing member 800 is positioned between the swing member 800 and the first small link 840 via a linear guide member 650 whose longitudinal direction is directed along the virtual line KS2. It is connected to the free end of the second small link 860. In the linear guide member 650, the interval (KA in FIG. 31) between the connection point with the second leg piece 810 and the connection point with the second small link 860 is provided so as to be expandable and contractable as described later.
The second small link 860 is provided with a second swing center shaft 870 at one end, and the second swing center shaft 870 is connected to the drive shaft 440 of the pitch changing mechanism 4 of the support unit 3.

A third rocking center shaft 820 provided concentrically with the rocking center of the rocking member 800 is connected to the other rocker 10 positioned at the tip of the blade 10 via a second universal joint 125 extending along the virtual line KS1. This is connected to the drive shaft 440 of the pitch changing mechanism 4. The second universal joint 125 extends from the third swing center axis 820 along the virtual line KS1, and then tilts with respect to the virtual line KS1 toward the other pitch changing mechanism 4.
A first air cylinder 700 and a second air cylinder 701 are provided outside the first and second universal joints 115 and 125, and this operation will be described later. The operations of the motor M and the air cylinders 700 and 701 are controlled by a control unit 900 provided outside the blade 10.
As shown in FIG. 30, the pitch changing mechanism 4 of the support unit 3 has a configuration shown in FIG. 29A in which a drive shaft 440 is provided at the right end portion of the second link member 410. Each of the two pitch changing mechanisms 4 provided on the tip end side of the blade 10 has the configuration disclosed in FIG. 28A in which a drive shaft 440 is provided at the left end portion of the second link member 410. That is, in order to move the claw piece 30 and the semiconductor wafer 9 up and down, the drive shaft 440 of the pitch change mechanism 4 of the support unit 3 and the drive shaft 440 of the pitch change mechanism 4 provided on the tip end side of the blade 10 are opposite to each other. Need to rotate in the direction.

(Driving force transmission operation)
As described above, when the support unit 3 is in the advanced position, the claw piece 30 is in the raised position (FIG. 28 (c)). In order to reduce the pitch by rotating the motor M and moving the claw piece 30 from the raised position to the intermediate position (FIG. 28B), the following operation is performed. 32 (a) and 32 (b) are diagrams showing the rotation operation of the swing member 800. FIG.
The control means 900 energizes the motor M to rotate the motor M. The rotation of the motor M causes the swing member 800 to swing clockwise as shown in FIG. The third swing central shaft 820 of the swing member 800 rotates the drive shaft 440 of the pitch changing mechanism 4 located at the tip of the blade 10 in the clockwise direction.
The first leg piece 801 of the swing member 800 rotates the first small link 840 in the clockwise direction via the intervening link 830. By the rotation of the first small link 840, the first swinging central shaft 850 is rotated, and the drive shaft 440 of the pitch changing mechanism 4 located at the tip of the blade 10 is clocked via the first universal joint 115. Rotate in the direction.
On the other hand, the second leg piece 810 of the swing member 800 rotates the second small link 860 counterclockwise via the linear guide member 650. The second swing center shaft 870 of the second small link 860 rotates the drive shaft 440 of the pitch changing mechanism 4 of the support unit 3 in the counterclockwise direction. The linear guide member 650 is positioned below the third swing center shaft 820 of the swing member 800.
Since the pitch changing mechanism 4 positioned at the tip of the blade 10 has the configuration disclosed in FIG. 28A, the pitch between the adjacent claw pieces 30 is changed by the clockwise rotation of the drive shaft 440. Shrink. On the other hand, since the pitch changing mechanism 4 of the support unit 3 has the configuration disclosed in FIG. 29A, when the drive shaft 440 rotates counterclockwise, the pitch of the adjacent claw pieces 30 is reduced.

In order to increase the pitch between the adjacent claw pieces 30, the reverse operation is performed, that is, as shown in FIG. 32 (b), the swing member 800 is swung counterclockwise. The first small link 840 connected to the first leg piece 801 via the intervening link 830 also rotates counterclockwise. The third swing center shaft 820 and the first swing center shaft 850 are rotated counterclockwise, and the pitch between the adjacent claw pieces 30 of the pitch changing mechanism 4 located at the tip of the blade 10 is increased.
On the other hand, the second small link 860 rotates clockwise. The second swing center shaft 870 is rotated clockwise, and the drive shaft 440 of the pitch changing mechanism 4 of the support unit 3 is rotated clockwise, so that the pitch between the adjacent claw pieces 30 is widened.
Here, when the second small link 860 rotates in the clockwise direction, the linear guide member 650 moves from a position lower than the third swinging central axis 820 to an upper position. That is, when the second small link 860 is rotated in the clockwise direction, the distance (KA in FIG. 31) between the free end portion of the second leg piece 810 and the free end portion of the second small link 860 changes.
In order to cope with this, as shown in FIG. 33, the linear guide member 650 has a movable piece 670 movable along the virtual line KS2 in a main body 660 extending along the virtual line KS2 (see FIG. 10). Provided and configured. The free end portion of the second small link 860 is rotatably attached to one end portion of the main body 660, and the free end portion of the second leg piece 810 is rotatably attached to the moving piece 670. Thereby, even if the distance between the free end of the second leg piece 810 and the free end of the second small link 860 changes, the rotation of the swing member 800 is accurately transmitted to the second small link 860. Can do. You may connect the free end part of the 2nd small link 860, and the free end part of the 2nd leg piece 810 through a linear motion guide.

In the end effector device 1 of the present embodiment, the pitch conversion operation of the three pitch changing mechanisms 4 is performed by synchronizing the rotation of the three drive shafts 440 with one motor M. Thereby, it is not necessary to provide a large number of motors M in accordance with the number of pitch changing mechanisms 4, and the manufacturing cost of the entire end effector device 1 can be suppressed.
The drive source unit 600 is provided on the base end side of the robot arm from the blade, that is, on the second arm 21. Thereby, since the weight of the drive source unit 600 is not added to the tip of the robot arm, the weight on the tip of the robot arm can be reduced, and the tip of the robot arm can be operated smoothly.
Further, the two pitch changing mechanisms 4 positioned at the tip of the blade 10 are not arranged along the virtual line KS1 (see FIG. 30) from the drive source unit 600. Therefore, it is difficult to connect the drive source unit 600 and the two pitch changing mechanisms 4 with a linear member. However, the drive source unit 600 and the two pitch change mechanisms 4 can be connected by using the first and second universal joints 115 and 125 to connect the drive source unit 600 and the two pitch change mechanisms 4. . Thereby, the power from the drive source unit 600 can be transmitted to the two pitch changing mechanisms 4.

(Guide pins standing up)
As described above, when the link members 400 and 410 are rotated and the claw piece 30 is moved up and down, the position of the semiconductor wafer 9 in the horizontal plane may be shifted before and after the rotation. In this case, the semiconductor wafer 9 cannot be accurately transferred to the processing shelf in the processing booth. Therefore, as shown in FIG. 27B, in a state where the support unit 3 is in the advanced position and the claw piece 30 holds the periphery of the semiconductor wafer 9, the link members 400 and 410 are rotated to Before raising or lowering the piece 30, the first and second guide pins 310 and 500 are positioned with a slight gap around the periphery of the semiconductor wafer 9 to prevent the positional deviation of the semiconductor wafer 9 in the horizontal plane.
That is, when the claw piece 30 holds the periphery of the semiconductor wafer 9, the first and second guide pins 310 and 500 are then positioned on the periphery of the semiconductor wafer 9. And the pitch conversion operation | movement of the adjacent nail | claw piece 30 is performed. After the pitch conversion operation of the claw piece 30, the support unit 3 is retracted after the first and second guide pins 310 and 500 are retracted. This operation control is executed by the control means 900 (FIG. 30).
The first guide pins 310 are provided on the support unit 3 as described above, and are positioned on the periphery of the semiconductor wafer 9 at the advancement position of the support unit 3. The second guide pin 500 protrudes from the lower surface of the blade 10 by the first and second air cylinders 700 and 701 while the claw piece 30 holds the periphery of the semiconductor wafer 9. Hereinafter, a mechanism for causing the second guide pin 500 to protrude from the lower surface of the blade 10 will be described.

  34 (a), (b), and (c) are side views of the first air cylinder 700 shown in FIG. 30 as viewed from the E1 direction. For convenience of explanation, members located on the upper surface of the blade 10 are not shown. The second air cylinder 701 has the same configuration as the first air cylinder 700. As shown in FIG. 34 (a), the first air cylinder 700 is provided with a piston 720 from a housing 710 so as to be able to protrude and retract in a horizontal plane. A vertical hole 730 is formed at the tip of the piston 720. Below the blade 10, a second guide pin 500 is horizontally disposed on the projecting side of the piston 720, and a contact member 501 is provided at a base end portion of the second guide pin 500. Correspondingly, a contact roller 510 is provided at the upper end of the member 501, and a small shaft 520 that fits in the vertical hole 730 protrudes from the member 501. The blade 10 is provided with a contact wall 130 corresponding to the maximum protrusion amount of the piston 720. In the state shown in FIG. 34A, the second guide pin 500 is in a horizontal prone posture, and the small shaft 520 is located at the lower end of the vertical hole 730.

As shown in FIG. 34 (b), the piston 720 protrudes from the housing 710, and the contact roller 510 of the contact member 500 contacts the contact wall 130. The second guide pin 500 is restricted from moving further in the horizontal direction.
As shown in FIG. 34 (c), when the piston 720 still advances in the direction protruding from the housing 710 and pushes the second guide pin 500, the second guide pin 500 is restricted from traveling, so the second guide The pin 500 rotates upward about the contact roller 510. Since the second guide pin 500 rotates upward, the small shaft 520 of the second guide pin 500 moves to the upper end portion of the vertical hole 730. The second guide pin 500 is in a standing posture with the axial direction oriented in the vertical direction. When the second guide pin 500 is housed in the housing 710, the piston 720 is retracted and the reverse operation is performed. As shown in FIG. 34C, a guide ring 530 serving as a buffer may be provided on the second guide pin 500 in accordance with the height of the semiconductor wafer 9.

FIGS. 35A and 35B are side views showing another mechanism for causing the second guide pin 500 to protrude from the lower surface of the blade 10. For convenience of explanation, members located on the upper surface of the blade 10 are not shown. The proximal end portion of the second guide pin 500 is rotatably attached to the distal end portion of the piston 720, and a torsion spring 540 that urges the second guide pin 500 counterclockwise is provided at the attachment location. A plurality of rollers 550 and 550 whose lower ends are in contact with the second guide pins 500 are attached to the lower surface of the blade 10. When the piston 720 is retracted into the housing 710 as shown in FIG. The second guide pin 500 is pressed by 550. The second guide pin 500 maintains a prone posture against the urging force of the torsion spring 540.
As shown in FIG. 35 (b), when the piston 720 protrudes from the housing 710, the second guide pin 500 is pushed and gradually comes out of contact with the roller 550. When the second guide pin 500 completely comes out of contact with the roller 550, as shown in FIG. 35 (b), the second guide pin 500 assumes an upright posture by the urging force of the torsion spring 540. When the second guide pin 500 is housed in the housing 710, the piston 720 is retracted, and the second guide pin 500 is returned to the prone posture against the urging force of the torsion spring 540.

The end effector device according to each of the above embodiments has the following advantages.
1. In the above embodiment, a pitch changing function is realized in the end effector device by providing the built-in support unit with a pitch changing function. Further, according to the present invention, the blade is a member including at least one support unit, and only one blade is required. Accordingly, the weight reduction and cost reduction of the end effector device could be achieved.
2. Three claw pieces 30, 30, 30 at the same height of each support unit 3 are radially arranged with respect to the center C of the semiconductor wafer 9 (see FIGS. 3, 27 (a), (b)). . Since the horizontal plane on which the semiconductor wafer 9 is to be located is determined by the three claw pieces 30, 30, 30, each semiconductor wafer 9 is stably supported substantially horizontally by the three claw pieces 30, 30, 30.
3. In some embodiments, a drive source that operates the pitch changing mechanism 4 is provided outside the blade 10 and on the base end side of the second arm 21. That is, the drive source is not provided in or on the blade 10. Therefore, this also makes it possible to reduce the size of the pitch changing mechanism 4 so as to be suitable for incorporation into the end effector device 1.
Further, since the weight of the driving source is not applied to the tip of the second arm 21, the weight on the tip of the second arm 21 can be reduced, and the tip of the second arm 21 can be operated smoothly. it can. However, it is not essential to provide each of the drive sources on the base end side of the second arm 21. Each drive source may be provided anywhere, for example, in the blade 10 or on the blade 10.

(Fifteenth embodiment of pitch changing mechanism)
The following simple mechanism is also conceivable as the mechanism for rotating the link member in the vertical plane and converting the pitch between the adjacent semiconductor wafers 9.
36 (a), (b), and (c) are views showing another pitch changing mechanism 4, and FIG. 37 is a view of FIG. 36 (b) as viewed from the F1 direction. In the present embodiment, a drive shaft 440 is provided at one end of the first link member 400, and at the left end in FIGS. 36A, 36 </ b> B, and 36 </ b> C, and along the longitudinal direction of the first link member 400, the semiconductor wafer is provided. A plurality of circular shaft bodies 470 that receive the lower surface of 9 are provided at equal intervals. That is, the shaft body 470 constitutes the “holding portion” in the present invention. In the standby position shown in FIG. 36 (a), all the shaft bodies 470 are located in the horizontal plane.
When the first link member 400 is rotated counterclockwise from the standby position as shown in FIG. 36 (b) by the rotation of the drive shaft 440, the shaft body 470 is located far from the drive shaft 440. The vertical distance between the adjacent shaft bodies 470 becomes wider than the standby position. The plurality of shaft bodies 470 are provided at equal intervals in the vertical direction. The shaft body 470 reaches an intermediate position. As shown in FIG. 37, a gap is provided between the first link member 400 and the semiconductor wafer 9 so as not to rub against the semiconductor wafer 9.

When the first link member 400 is rotated counterclockwise from the intermediate position by the further rotation of the drive shaft 440, the first link member 400 is vertical as shown in FIG. The pitch between the adjacent shaft bodies 470 is maximized. The shaft body 470 reaches the raised position.
The shaft body 470 moves up and down while rubbing the back surface of the semiconductor wafer 9 until the lifted position is reached from the standby position. Therefore, the shaft body 470 is desirably formed of a material having a small friction with the semiconductor wafer 9, but is not limited thereto.
With the pitch changing mechanism 4 shown in FIGS. 36A, 36B, and 36C, the peripheral portion of the semiconductor wafer 9 cannot be pressed inward.
However, for example, as shown in FIG. 38, a shaft member 470 is provided with a contact member 480 that contacts the periphery of the semiconductor wafer 9, and a pressing spring 490 is fitted between the corresponding contact member 480 and the first link member 400. The contact member 480 may be pressed against the periphery of the semiconductor wafer 9. Thus, the pitch changing mechanism 4 can be suitably applied to the edge grip type end effector device 1.

FIG. 39 is a plan view of the substrate processing apparatus 250 on which the substrate transfer robot 2 shown in FIG. 1 is arranged and the substrate processing equipment 260 including the substrate processing apparatus 250. The substrate processing apparatus 250 is formed by providing a second casing 960 described later on one side of the first casing 950 that houses the substrate transfer robot 2. A plurality of hoops 230 are provided on the other side of the first casing 950. The plurality of hoops 230 are lined up in a direction orthogonal to the direction in which the semiconductor wafer 9 enters and exits the hoop 230.
A door 980 is provided at a boundary portion between the second casing 960 and the first casing 950. The first casing 950 is maintained at atmospheric pressure, while the second casing 960 is maintained in a substantially vacuum by the door 980. A delivery area 970 is provided inside the second casing 960 from the door 980 so that a plurality of semiconductor wafers 9 transferred by the substrate transfer robot 2 can reach through the door 980.

In the second casing 960, a hand device 270 is disposed at the center, and the four processing shelves 280 are disposed in the second casing 960 so as to surround the hand device 270. The hand device 270 grips the plurality of semiconductor wafers 9 that have reached the delivery area 970 and transports them to each processing shelf 280, and the semiconductor wafer 9 processed in one processing shelf 280 is transferred to another processing shelf 280. Transport. The number of processing shelves 280 in the second casing 960 is not limited to four.
The substrate processing apparatus 260 includes a plurality of the substrate processing apparatuses 250 and performs all or part of the semiconductor manufacturing process.

As described above, since the inside of the second casing 960 is kept in a vacuum, the processing can be performed in a clean environment.
The substrate processing robot 2 grips the plurality of semiconductor wafers 9 in the FOUP 230 with the end effector device 1 provided at the tip. When the substrate processing robot 2 takes out the plurality of semiconductor wafers 9 spaced apart from each other from the FOUP 230, the substrate processing robot 2 rotates around the arm support portion 23, and transfers the end effector device 1 holding the semiconductor wafer 9 to the delivery area 970. To reach. The pitch changing mechanism 4 (see FIG. 2) of the end effector device 1 operates to narrow the pitch of the adjacent semiconductor wafers 9 until the semiconductor wafer 9 is taken out from the FOUP 230 and reaches the transfer area 970. The plurality of semiconductor wafers 9 having the pitch reduced and transferred to the transfer area 970 are transferred to the processing shelves 280 by the hand device 270.

INDUSTRIAL APPLICABILITY The present invention is useful for all end effectors provided with a mechanism for supporting a plurality of plate-like members in parallel with a space therebetween in the vertical direction and changing the interval between the plate-like members.

DESCRIPTION OF SYMBOLS 1 End effector apparatus 3 Support unit 4 Pitch change mechanism 5 Actuation mechanism 6 Fixed shaft 7 Oscillating plate 8 Cylindrical body 9 Semiconductor wafer 10 Blade 20 First arm 21 Second arm 30 Claw piece 55 Air cylinder 60 Telescopic shaft 80 Spiral groove

Claims (28)

An end effector device attached to the tip of a robot arm,
The end effector device has a blade having a proximal end and a distal end,
A support provided on the blade and configured to support a peripheral portion of each plate-like member and to change the interval between the plate-like members so that the plurality of plate-like members are spaced apart from each other in parallel. An end effector device comprising a unit.   A plurality of the support units are provided, and the plurality of support units include one or more base end side support units positioned closest to the base end of the blade, and the base end side support unit is a base end of the blade. Peripheral portions of the plurality of plate-like members by the base end side support unit in the forward position and the base unit facing the base end side support unit. The end effector device according to claim 1, wherein the end effector device is configured to press and hold the device.   The plurality of support units include one or more distal-side support units facing the proximal-side support unit and fixed to the blade, and the proximal-side support unit and the one or more distal ends in the advanced position The end effector device according to claim 2, wherein the end effector device is configured to hold the plurality of plate-like members with a side support unit.   Each of the support units is arranged apart from each other in the vertical direction, and a plurality of claw pieces that respectively support the peripheral portions of the plate-like members so that the plate-like members are spaced apart from each other in parallel and vertically. The end effector device according to any one of claims 1 to 3, further comprising a pitch changing mechanism that supports the plurality of claw pieces and changes a vertical interval between the plurality of claw pieces. The plurality of claw pieces include a plurality of movable claw pieces,
The pitch changing mechanism includes one or more elastic members provided on the blade to support the plurality of movable claw pieces with a space therebetween in the vertical direction and elastically deform in the vertical direction, and the one or more elastic members. The end effector device according to claim 4, further comprising an operation mechanism that elastically deforms the member in the vertical direction.   The end effector device according to claim 5, wherein the one or more elastic members are one coil spring extending in a vertical direction, and the plurality of movable claw pieces are provided on the one coil spring with a space therebetween in the vertical direction. .   The one or more elastic members are a plurality of coil springs each integrally including a movable claw piece and extending in a vertical direction, and the plurality of coil springs are stacked in a multi-stage on a blade and connected to each other. 5. The end effector device according to 5.   The one or more elastic members are a plurality of linear springs that are elastically deformed in the vertical direction, and each of the plurality of linear springs and the plurality of movable claw pieces is supported by a movable claw piece directly below the linear springs, or The end effector device according to claim 5, wherein the end effector devices are alternately arranged so as to support the movable claw pieces directly above.   The end effector device according to claim 5, wherein the plurality of claw pieces include the plurality of movable claw pieces and a fixed claw piece fixed to the blade and positioned at the lowest position.   The operating mechanism is connected to a fixed shaft erected on the blade and at least one movable claw piece, and is guided to be movable up and down on the fixed shaft, and is connected to the movable claw piece by the lifting operation. The end effector device according to any one of claims 5 to 9, further comprising a telescopic shaft for expanding and contracting the elastic member. The pitch changing mechanism has a driving source that supplies driving force to the operating mechanism,
The end effector device according to claim 10, wherein the drive source is provided closer to a robot arm proximal end than the blade.   The pitch changing mechanism is configured to change the vertical spacing of the plurality of claw pieces by a vertical driving force, and converts the driving force of the driving source in the horizontal straight direction to the vertical driving force. The end effector device according to claim 11, which is configured.   The pitch changing mechanism is configured to change the vertical distance between the plurality of claw pieces by a vertical driving force, and converts a rotational force around the horizontal axis of the driving source into a vertical driving force. The end effector device according to claim 11, which is configured.   The pitch changing mechanism is configured to change the vertical interval between the plurality of claw pieces by a vertical driving force, and converts a rotational force around a vertical axis of the driving source into a vertical driving force. The end effector device according to claim 11, which is configured.   The end effector device according to claim 10, wherein the pitch changing mechanism includes a cylinder that is disposed on the blade and raises and lowers the telescopic shaft. The blade includes a holding portion which is provided at intervals in a direction perpendicular to each axis extending in one plane and holds the peripheral portions of the plurality of plate-like members, respectively. A plurality of pitch changing mechanisms for converting the spacing in the direction perpendicular to the one plane of the member,
At least one pitch changing mechanism is provided in the support unit, and is provided so as to advance toward the distal end portion of the blade and to be retractable toward the proximal end portion, and the one pitch changing mechanism is located at the advanced position. The end effector device according to claim 1, wherein the end effector device is configured to release the holding of the plate-like member at a position where the plate-like member is held and retracted. Each of the pitch changing mechanisms includes a plurality of rotating members provided so as to rotate around the respective axes in synchronization with each other, and the holding section is provided on each of the rotating members. At intervals in the direction perpendicular to
17. The end effector device according to claim 16, wherein each of the pitch changing mechanisms is configured to be able to change an interval between the plurality of plate-like members by rotating the rotating member. Each of the pitch changing mechanisms further includes the other parallel link member provided so as to form a parallel link with the rotating member as one parallel link member, and a connection link member that connects both parallel link members,
The end effector device according to claim 17, wherein the holding portion is provided on the connection link so as to include a receiving portion for receiving a peripheral portion of the plate-like member in parallel with the one plane.   It is possible to take an advancing posture provided on the blade and having a guide surface located in the vicinity of a side edge of the plate-like member, and a retracting posture in which the whole is located within a predetermined range in a direction perpendicular to the one plane. The end effector device according to any one of claims 16 to 18, further comprising a guide member configured as described above.   The guide member has an upright posture as the advancing posture in which a base end portion is rotatably attached to the blade and a peripheral surface is positioned in the vicinity of a side edge of the plate-like member, and the predetermined range The end effector device according to claim 19, wherein the end effector device is a guide pin configured to be rotatable between a prone posture as the retracted posture prone so as to be located inside.   The at least two rotating members among the plurality of rotating members are configured to rotate in directions opposite to each other when the distance between the plurality of plate-shaped members is changed. The end effector device described.   21. The end effector device according to any one of claims 17 to 20, wherein the plurality of rotating members are configured to rotate in the same direction when the intervals of the plurality of plate-like members are changed. A plurality of the holding portions are provided on the pitch changing mechanism over the top and bottom, and each holding portion is continuous with the first slope on the lower side of the first slope and the first slope inclined inwardly downward. Formed with a second inclined surface inclined inwardly downward and having a gentler inclination angle than the first inclined surface,
The end effector device according to any one of claims 16 to 22, wherein a peripheral edge portion of the plate-like member is placed and held at a boundary between the first inclined surface and the second inclined surface inside the holding portion.   The end effector device according to any one of claims 17 to 23, wherein the plurality of rotating members are rotated by one drive source.   25. The end effector device according to claim 24, wherein the drive source is provided closer to a proximal end portion of the robot arm than the blade.   An imaginary line that passes through the driving source and connects the base end portion and the tip end portion of the blade is out of at least one pitch changing mechanism, and the driving source and the one pitch changing mechanism are connected by a universal joint. The end effector device according to claim 24 or 25.   27. The end effector device according to any one of claims 16 to 26, wherein three pitch changing mechanisms are provided apart from each other on the blade.   A substrate transfer robot comprising the end effector device according to any one of claims 1 to 27.

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