JPWO2013008418A1 - 無鉛圧電磁器組成物およびその製造方法、ならびにその組成物を用いた圧電素子、超音波加工機、超音波駆動デバイスおよびセンシングデバイス - Google Patents
無鉛圧電磁器組成物およびその製造方法、ならびにその組成物を用いた圧電素子、超音波加工機、超音波駆動デバイスおよびセンシングデバイス Download PDFInfo
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- JPWO2013008418A1 JPWO2013008418A1 JP2012549192A JP2012549192A JPWO2013008418A1 JP WO2013008418 A1 JPWO2013008418 A1 JP WO2013008418A1 JP 2012549192 A JP2012549192 A JP 2012549192A JP 2012549192 A JP2012549192 A JP 2012549192A JP WO2013008418 A1 JPWO2013008418 A1 JP WO2013008418A1
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- piezoelectric ceramic
- ceramic composition
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- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
- B06B1/0618—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile of piezo- and non-piezoelectric elements, e.g. 'Tonpilz'
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/222—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines using piezoelectric devices
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
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- H10N30/09—Forming piezoelectric or electrostrictive materials
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Abstract
Description
本発明の一実施形態としての圧電磁器組成物は、圧電特性を有する化合物からなる第1結晶相と、圧電特性を有しない化合物からなる第2結晶相とから主になる無鉛圧電磁器組成物である。一実施形態としての典型的な無鉛圧電磁器組成物では、第2結晶相の割合は0モル%(mol%)を超え20モル%未満であり、残部は第1結晶相である。以下では、第1結晶相を「母相」や「KNN相」とも呼び、第2結晶相を「副相」や「NTK相」とも呼ぶ。
(KaNabLicEd)eDOf
A1-xTi1-xB1+xO5
B1.第1の製造方法:
図2は、圧電素子の製造方法を示す説明図である。図2の製造方法による圧電素子は、無鉛圧電磁器組成物で形成された圧電磁器を備える機器である。
図24は、圧電素子の製造方法を示す説明図である。図24の製造方法による圧電素子は、無鉛圧電磁器組成物で形成された圧電磁器を備える機器である。
C1.圧電素子:
図3は、一実施形態の圧電素子100を示す斜視図である。図3の圧電素子100は、図2の製造方法で製造され、圧電磁器110と、二つの電極120,130とを備える。圧電素子100の圧電磁器110は、無鉛圧電磁器組成物で形成され、図3の例では、その形状は円板状である。圧電素子100の二つの電極120,130は、圧電磁器110を間に挟み込む状態で取り付けられ、図3の例では、その形状は圧電磁器110と同様に円板状であり、圧電磁器110の両端面にそれぞれ取り付けられている。
図4は、一実施形態のセンシングデバイス200を示す分解斜視図である。センシングデバイス200は、図2の製造方法による圧電素子を用いた検出装置であり、図4の例では、いわゆる非共振型ノックセンサである。センシングデバイス200は、主体金具210と、絶縁スリーブ220と、絶縁板230と、圧電素子240と、絶縁板250と、特性調整用ウェイト260と、ワッシャ270と、ナット280と、ハウジング290とを備える。
図5は、一実施形態の超音波駆動デバイス300を示す縦断面図である。超音波駆動デバイス300は、図2の製造方法による圧電素子を用いた駆動装置であり、図5の例では、いわゆるランジュバン型超音波振動子である。超音波駆動デバイス300は、圧電素子対310と、前面板320と、裏打板330と、中心ボルト340とを備える。
図6は、一実施形態の超音波加工機400を示す斜視図である。超音波加工機400は、図2の製造方法による圧電素子を用いた加工装置であり、図6の例では、被加工対象を切削する切削工具である。超音波加工機400は、基材410と、圧電素子420と、砥石部430と、スピンドル440と、取り付け治具450とを備える。
20…第2結晶相(副相、NTK相)
100…圧電素子
110…圧電磁器
120…電極
200…センシングデバイス
210…主体金具
210a…透孔
210b…ネジ山
210c,210d…溝
212…筒体
214…座面部分
220…絶縁スリーブ
230…絶縁板
240…圧電素子
242…薄板電極
244…圧電磁器
246…薄板電極
250…絶縁板
260…特性調整用ウェイト
270…ワッシャ
280…ナット
290…ハウジング
300…超音波駆動デバイス
310…圧電素子対
312…圧電素子
313…電極板
314…圧電素子
315…電極板
320…前面板
322…円錐部
328…超音波放射面
330…裏打板
332…円錐部
338…盲端孔
340…中心ボルト
400…超音波加工機
410…基材
420…圧電素子
430…砥石部
440…スピンドル
450…治具
本発明の一形態は、無鉛圧電磁器組成物であって、圧電特性を有するニオブ/タンタル酸アルカリ系ペロブスカイト酸化物からなる第1結晶粉末と、チタン(Ti)を含有する化合物からなる第2結晶粉末とを混合し、仮焼し、粉砕し、再度混合し、成形し、焼成してなり;前記第1結晶粉末の成分を含有し、複数の結晶粒子が堆積した状態で結合した第1結晶相と;前記第2結晶粉末の成分を含有し、前記第1結晶相の前記複数の結晶粒子間の隙間を埋める第2結晶相とから主になり;Cu(銅),Ni(ニッケル),Co(コバルト),Fe(鉄),Mn(マンガン),Cr(クロム),Zr(ジルコニウム),Ag(銀),Zn(亜鉛),Sc(スカンジウム),Bi(ビスマス)のうちの少なくとも一種の添加金属を0モル%以上5モル%以下含有し、二種類以上の添加金属を含有する場合、添加金属の一種類当たりの含有割合は1モル%未満であり;前記第2結晶相は、A 1−x Ti 1−x B 1+x O 5 で表される結晶相(元素Aはアルカリ金属のうちの少なくとも一種であり、元素BはNb(ニオブ)およびTa(タンタル)のうちの少なくとも一種であり、0≦x≦0.15を満たす)と、A 1 Ti 3 B 1 O 9 で表される結晶相(元素Aはアルカリ金属のうちの少なくとも一種であり、元素BはNb(ニオブ)およびTa(タンタル)のうちの少なくとも一種である)とのうち一方の結晶相で構成されることを特徴とする無鉛圧電磁器組成物である。この形態によれば、第2結晶相を有しない他の無鉛圧電磁器組成物よりも圧電特性を向上させることができる。
Claims (16)
- 無鉛圧電磁器組成物であって、
圧電特性を有するニオブ/タンタル酸アルカリ系ペロブスカイト酸化物からなる複数の結晶粒子が堆積した状態で結合した第1結晶相と、
チタン(Ti)を含有する化合物からなり、前記第1結晶相の前記複数の結晶粒子間の隙間を埋める第2結晶相と
から主になることを特徴とする無鉛圧電磁器組成物。 - 請求項1に記載の無鉛圧電磁器組成物であって、
前記第2結晶相の含有割合は2〜10モル%であることを特徴とする無鉛圧電磁器組成物。 - 請求項1または請求項2に記載の無鉛圧電磁器組成物であって、更に、
銅(Cu)、鉄(Fe)および亜鉛(Zn)のうち少なくとも一種の金属元素を、前記第1結晶相よりも前記第2結晶相に偏在して含有することを特徴とする無鉛圧電磁器組成物。 - 請求項1または請求項2に記載の無鉛圧電磁器組成物であって、更に、
コバルト(Co)、銅(Cu)、鉄(Fe)および亜鉛(Zn)のうち少なくとも一種の金属元素を、前記第1結晶相よりも前記第2結晶相に偏在して含有することを特徴とする無鉛圧電磁器組成物。 - 請求項1から請求項4までのいずれか一項に記載の無鉛圧電磁器組成物であって、更に、
ジルコニウム(Zr)およびカルシウム(Ca)のうち少なくとも一種の金属元素を、前記第2結晶相よりも前記第1結晶相に偏在して含有することを特徴とする無鉛圧電磁器組成物。 - 請求項1から請求項5までのいずれか一項に記載の無鉛圧電磁器組成物であって、
前記第2結晶相を形成する化合物は、A−Ti−B−O系複合化合物(元素Aはアルカリ金属、元素Bはニオブ(Nb)およびタンタル(Ta)のうちの少なくとも一種、元素Aと元素Bとチタン(Ti)の含有量はいずれもゼロで無い)であることを特徴とする無鉛圧電磁器組成物。 - 請求項6に記載の無鉛圧電磁器組成物であって、
前記元素Aがカリウム(K)であることを特徴とする無鉛圧電磁器組成物。 - 請求項6または請求項7に記載の無鉛圧電磁器組成物であって、
前記元素Bがニオブ(Nb)であることを特徴とする無鉛圧電磁器組成物。 - 請求項1から請求項8までのいずれか一項に記載の無鉛圧電磁器組成物であって、
前記第2結晶相を形成する化合物は、前記第1結晶相を形成するニオブ/タンタル酸アルカリ系ペロブスカイト酸化物よりも融点が低いことを特徴とする無鉛圧電磁器組成物。 - 無鉛圧電磁器組成物であって、
圧電特性を有するニオブ/タンタル酸アルカリ系ペロブスカイト酸化物からなる結晶粉末と、チタン(Ti)を含有する化合物からなる結晶粉末とを混合し、成形し、焼成してなることを特徴とする無鉛圧電磁器組成物。 - 請求項1から請求項10までのいずれか一項に記載の無鉛圧電磁器組成物で形成された圧電磁器と、
前記圧電磁器に取り付けられた電極と
を備えることを特徴とする圧電素子。 - 請求項11に記載の圧電素子を備えることを特徴とする超音波加工機。
- 請求項11に記載の圧電素子を備えることを特徴とする超音波駆動デバイス。
- 請求項11に記載の圧電素子を備えることを特徴とするセンシングデバイス。
- 無鉛圧電磁器組成物の製造方法であって、
圧電特性を有するニオブ/タンタル酸アルカリ系ペロブスカイト酸化物からなる第1結晶粉末と、チタン(Ti)を含有する化合物からなる第2結晶粉末とを混合して成形した成形物を作成し、
前記成形物を焼成することによって、前記第1結晶粉末の複数の結晶粒子を堆積した状態で結合させた第1結晶相を形成しつつ、前記第2結晶粉末を溶融させて前記第1結晶相の前記複数の結晶粒子間の隙間を埋める第2結晶相を形成した無鉛圧電磁器組成物を生成することを特徴とする無鉛圧電磁器組成物の製造方法。 - 無鉛圧電磁器組成物の製造方法であって、
圧電特性を有するニオブ/タンタル酸アルカリ系ペロブスカイト酸化物からなる第1結晶粉末と、チタン(Ti)を含有する化合物からなる第2結晶粉末とを混合した粉体を、第1の温度で仮焼し、
前記第1の温度で仮焼した前記粉体を混合して成形した成形物を作成し、
前記第1の温度よりも高い第2の温度で、前記成形物を焼成することによって、前記第1結晶粉末の複数の結晶粒子を堆積した状態で結合させた第1結晶相を形成しつつ、前記第2結晶粉末を溶融させて前記第1結晶相の前記複数の結晶粒子間の隙間を埋める第2結晶相を形成した無鉛圧電磁器組成物を生成することを特徴とする無鉛圧電磁器組成物の製造方法。
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