JPWO2012073345A1 - Light receiving module for light emitting element and inspection device for light emitting element - Google Patents

Abstract

It is an object to provide a light-receiving element light-receiving module and a light-emitting element inspection device capable of accurately calculating the amount of light emitted from the light-emitting element. The light-receiving element light-receiving module 1 of the present invention is disposed opposite to an LED 101, receives a light emitted from the LED 101 and measures the amount of light, and a wavelength measuring unit for measuring the light emitted from the LED 101. The light guide 104 is a space formed by a plane formed by the surface of the LED 101 facing the photodetector 105 and a plane formed by the surface of the photodetector 105 facing the LED 101. The light guide unit 104 is formed so that the extending direction of the light guide unit 104 does not coincide with the optical axis from the LED 101.

Description

  The present invention relates to a light-receiving element light-receiving module and a light-emitting element inspection apparatus that receive light from a light-emitting element such as a chip and perform light amount measurement, wavelength measurement, and the like.

Patent Document 1 discloses a technique that enables inspection of a top-emitting LED and a bottom-emitting LED. Specifically, a technique is disclosed in which a light amount detector and a wavelength measuring fiber are provided not only above the probe needle but also below the stage.
Patent Document 2 discloses a technique in which an optical fiber input unit is vertically provided at the center of a light receiving surface of a photoelectric conversion device, and the received light amount and the emission spectrum are simultaneously measured for simultaneously measuring the emitted light amount and the emission spectrum.

JP 2007-19237 A Japanese Patent Laid-Open No. 9-113411

However, in the method described in Patent Document 1, it is possible to measure the amount of light only in the range of about ± 10 ° of the light emission angle range of the LED, and it is difficult to accurately calculate the amount of light emitted by the LED.
Moreover, in the method described in Patent Document 2, an issue angle can be set in a wide angle range, but a special photoelectric conversion device is required.

  The present invention has been made in view of the above problems, and an example of the object thereof is to provide a light receiving module for a light emitting element and a light emitting element inspection apparatus capable of accurately calculating the amount of light emitted by the light emitting element. That is.

  The light receiving module for a light emitting element according to the present invention is disposed opposite to the light emitting element, receives a light emitted from the light emitting element and measures the amount of light, and measures a wavelength of the light emitted from the light emitting element. A light guide section that leads to the wavelength measuring section, wherein the light guide section includes a plane formed by a surface of the light receiving element facing the light receiving section, and a surface of the light receiving section facing the light emitting element. The planar surface to be formed is arranged so as to extend in the space to be formed, and the extending direction of the light guide part is formed so as not to coincide with the optical axis from the light emitting element.

It is explanatory drawing of the light emission condition of LED in the 1st Embodiment of this invention. It is explanatory drawing of the light quantity ratio and intensity | strength difference ratio of cos-type LED and donut-type LED. It is explanatory drawing of the light reception module for light emitting elements of 1st Embodiment. It is explanatory drawing explaining the position of an optical fiber. It is explanatory drawing of the outline | summary of the inspection apparatus for light emitting elements. It is explanatory drawing of a probe needle. It is explanatory drawing of the specific form of a probe needle and a positioning unit. It is explanatory drawing about the angle of the inclined surface of an optical fiber. It is explanatory drawing about the angle of an inclined surface when optical fiber itself inclines. It is explanatory drawing of the inclination direction of the inclined surface of an optical fiber. It is a modification which provides the transparent member which is a light guide member in the front-end | tip of an optical fiber. It is a modification which provides the reflective film which is a reflective member in the outer peripheral part of a transparent member. It is a modification which provides only a reflective member. It is explanatory drawing of the light guide method at the time of arrange | positioning an optical fiber in the normal line direction ((theta) = 0 degree) of LED. It is explanatory drawing about the light reflected by the inclined surface.

  Hereinafter, the first embodiment of the present invention will be described in detail with reference to FIG. FIG. 1 is an explanatory diagram of a light emission state of the LED 101 according to the first embodiment of the present invention.

As described in FIG. 1A, the LED 101 emits light from the light emitting surface 101a.
Here, the LED 101 is an example of a light emitting element, and the same applies to other light emitting elements.
Note that θ is an angle from the normal direction of the light emitting surface 101a.
The LED 101 emits light for each angle θ.
FIGS. 1B and 1C are light amount distribution diagrams of the LED 101 at an angle θ.
FIG. 1B shows an example of the LED 101 (cos type) having the strongest light quantity when θ is 0 °, and FIG. 1C shows the LED 101 having the strongest light quantity when θ is around 30 ° (doughnut). Type).
When a large number of LEDs 101 are manufactured, a manufacturing error exists to some extent.
Even if an LED 101 having the characteristics shown in FIG. 1B is manufactured on the wafer of the LED 101, the LED 101 that has a peak at a position where θ is not 0 ° as shown in FIG. 1C is manufactured. Will be.
However, the light receiving module 1 for light emitting element measures from the LED 101 having the characteristic (cos type characteristic) as shown in FIG. 1B to the LED 101 having the characteristic (doughnut type characteristic) as shown in FIG. Must.
As an actual example, a plurality of LEDs 101 were extracted from the manufactured LED 101 wafer, and each light quantity distribution was measured. As a result, the peak position (angle) of the light intensity of the LED 101 was different depending on each LED 101. The position of is substantially within the range up to θ = 30 °.
This means that the peak position (angle) of the intensity of the light intensity of almost all LEDs 101 manufactured falls within the range from θ = 0 ° to θ = 30 °.
That is, the LED 101 having a cos-type cross section of the (stereoscopic) light amount distribution having a peak position of θ = 0 ° and ± 90 °, and a donut having a peak at θ = 30 ° where the peak position is most shifted. It can be assumed that the LED 101 having the mold characteristics is an extreme product of the LED 101 that may be manufactured on the same LED 101 wafer.
Then, if the extreme extreme LED 101 of the LED 101 that peaks at θ = 30 ° and the LED 101 that peaks at θ = 0 ° can be accurately measured within a certain error range, this error is less than this certain error. The LED 101 (LED 101 having a peak at a position where θ is not 0 ° to 30 °) within the extreme ranges can be measured.
This means that almost all of the LEDs 101 that can be manufactured can be accurately measured within a certain error range.
This makes it possible to accurately measure the LED 101, which is a problem of the present embodiment.
A specific method for measuring from the LED 101 having the cos-type characteristics to the LED 101 having the donut-type characteristics will be described later in the description of FIG.

  FIG. 2 is an explanatory diagram of the light amount ratio and the intensity difference ratio of the cos-type LED 101 and the donut-type LED 101.

Here, the light amount ratio indicates the light amount when light is received in the range from θ = 0 ° to the illustrated angle θ.
Therefore, the value of the light amount ratio with respect to the entire light emission when θ = 90 ° is 100%.
Further, the cos type LED 101 shows a higher value than the donut type LED 101. This is because the cos-type LED 101 has the highest intensity at θ = 0 ° (hereinafter also referred to as peak intensity as necessary), and the intensity decreases as θ increases. This is because the value of the light amount ratio increases faster than the LED 101 having a depression lower than the intensity of the cos type that does not have the intensity.
The intensity difference ratio is calculated by the following formula.
Intensity difference ratio = (cos type light quantity ratio−doughnut type light quantity ratio) / (cos type light quantity ratio + doughnut type light quantity ratio / 2) × 100
As shown in FIG. 2, the intensity difference ratio becomes maximum near θ = 0 °, and then gradually decreases.
The intensity difference ratio becomes 10% or less when θ = about 60 ° or more.
That is, if light is received so that θ = about 60 ° or more, even if the LED 101 is a donut type and the peak position is the LED 101 having a peak at θ = 30 °, it is a cos type. Even if the LED 101 has a peak at θ = 0 ° where the peak is not shifted at all, the light intensity can be measured with an error in the range of 10% or less.
As a result, it is possible to measure the LED 101 (= almost all manufactured LEDs 101) having a cos type peak at θ = 30 ° or less with an accuracy of 10% or less.
The intensity difference ratio is preferably as small as possible, and it is more preferable to set the value of θ to be measured to be larger than 60 ° and further reduce the intensity difference ratio to less than 10%.
However, setting the value of θ to 90 ° means that all the light emitted by the LED 101 is received, which is not realistic.

Now, how the measurement can be performed up to a range where θ is about 60 ° (or more) will be described below.
Specifically, a photodetector 105 (Photo Detector) that receives light emitted from the LED 101 is placed as close as possible to the LED 101.
Another method is to increase the area of the photodetector 105.
However, in order to increase the area of the photo detector 105, for example, there is an example in which a solar cell panel exceeding 100 mm is used. However, such a method requires the photo detector 105 for investigating the light quantity of the LED 101. Performance (for example, response speed, etc.) cannot be satisfied.
Actually, a protective glass for protection is arranged on the surface of the photodetector 105, and the light incident on the photodetector 105 is reflected to some extent by the protective glass.
However, even in this case, if the photodetector 105 can receive light in the range of about θ = 70 °, the intensity difference ratio can be kept at 10% or less.

  FIG. 3 is an explanatory diagram of the light-receiving element-use light receiving module 1 according to the first embodiment.

As shown in FIG. 3, the light-receiving element-use light receiving module 1 includes a work 102 (sample mounting table), an optical fiber 103, a photodetector 105, a holder 107, a signal line 111, a signal processing board 113, a communication line 115, A spacer 117 and a wavelength measuring unit 121 (see also FIG. 4) are included.
However, all of these are not indispensable components of the light receiving module 1 for light emitting elements, and it is sufficient to have at least the optical fiber 103, the photodetector 105, the holder 107, and the signal line 111.
The light-emitting element inspection device 3 (see also FIG. 5) includes a probe needle 109, an electric characteristic measuring unit 119, and a tester 151 for inspecting the electric characteristics of the LED 101 in addition to the light-receiving element light-receiving module 1. doing.
LED101 is arrange | positioned on the workpiece | work 102 installed horizontally.
A holder 107 is disposed at a position facing the workpiece 102 with a space therebetween.
A photo detector 105 is disposed inside the holder 107.
The LED 101, the workpiece 102, and the photodetector 105 are arranged in parallel to each other.
The probe needle 109 is in contact with the LED 101 and applies a voltage to the LED 101 when measuring the amount of light and measuring the electrical characteristics.
The probe needle 109 may move while the workpiece 102 and the LED 101 are fixed, and the probe needle 109 and the LED 101 may contact each other. Conversely, the workpiece 102 and the LED 101 may move while the probe needle 109 is fixed, and the probe needle 109 and the LED 101 may come into contact with each other.
The probe needle 109 is connected to the electrical characteristic measurement unit 119.

The holder 107 has a shielding part 107a and a cylindrical side part 107b.
The photodetector 105 is disposed in the hollow space inside the side surface portion 107b.
A circular opening 107c that forms a frustoconical hollow portion is formed at the center of the shielding portion 107a. Due to the circular opening 107c, the photodetector 105 can receive the light emitted from the LED 101.
The central axis of the side surface portion 107b, the central axis of the shielding portion 107a, the central axis of the circular opening 107c, the central axis of the photodetector 105, and the normal line of the light emitting surface 101a of the LED 101 are the same (hereinafter, the same axis is referred to as “common”. Axis ").
A circular opening 107c that forms a frustoconical hollow portion is formed from an opening surface 107d.
The opening surface 107d is formed so that the diameter increases toward the side where the LED 101 is disposed.
The reason why the circular opening 107c is circular will be described.
In a normal case, the LED 101 (the light emitting surface 101a of the LED 101) has a square shape. Moreover, when measuring the light quantity of LED101, the case where LED101 is measured in the state rotated to some extent within the horizontal surface of a workpiece | work can be considered.
In this case, if the circular opening 107c is not circular but has the same square shape as the LED 101, the light at the four corners of the LED 101 may not pass through the opening when the LED 101 is rotated.
If there is light that cannot pass through the circular opening 107c, the amount of light is reduced correspondingly, resulting in a measurement error.
On the other hand, if the opening is circular, even if the LED 101 rotates to some extent, the light is incident from the circular opening 107c only by matching the normal line of the light emitting surface 101a with the central axis of the circular opening 107c. The
That is, since the circular opening 107c has a circular shape, the light quantity of the LED 101 can be accurately measured.
Further, the opening end 107e which is the outer peripheral end of the opening 107d on the photo detector 105 side, and the photo detector end 105a and the LED 101 which are the outer peripheral ends of the surface facing the LED 101 of the photo detector 105 are formed in a straight line. The
An opening surface end 107e and a photodetector end 105a are formed on a straight line of θ that is a constant angle (see also FIG. 1). Here, the angle of θ has an angle of about 60 ° or more as described above.
By configuring in this way, the photodetector 105 can receive the light of the LED 101 in a range of θ = 60 ° or more.
In addition, the opening end 107e, the photodetector end 105a, and the LED 101 are formed in a straight line, so that all the light that has passed through the opening end 107e can be received by the photodetector 105. By receiving the maximum amount of light, the light receiving angle is maximized, and the stability of measurement is further improved.

An electrical property measuring unit 119 is formed outside the outer peripheral surface 107f of the side surface 107b of the photodetector 105.
The electrical characteristic measuring unit 119 has a function of holding the probe needle 109 and a function of measuring electrical characteristics.
Further, when the probe needle 109 moves and comes into contact with the LED 101, the electrical characteristic measuring unit 119 also has a function of moving and positioning the probe needle 109.

The photodetector 105 receives the light from the LED 101 and outputs an electrical signal proportional to the amount of light as an analog value.
The analog value representing the light amount is output to the signal processing board 113 via the signal line 111.
The signal processing board 113 amplifies the analog value with a predetermined amplification degree, and then performs A / D conversion from the analog value to a digital value.
Then, the light amount information converted into the digital value is output to the tester 151 via the communication line (see also FIG. 5).
The signal processing board 113 is physically connected to the holder 107 through the spacer 117.

  FIG. 4 is an explanatory diagram for explaining the position of the optical fiber 103.

The optical fiber 103 constitutes the light guide unit 104. In other words, the optical fiber 103 has a function of taking light emitted from the LED 101 disposed on the workpiece 102 and guiding it to the wavelength measuring unit 121.
The optical fiber 103 has two surfaces, an inclined surface 103a that is an end surface in the longitudinal direction of the optical fiber 103 and a side surface 103b that is a side peripheral surface. Note that the inclined surface 103 a includes one that is not inclined with respect to the longitudinal direction of the optical fiber 103.
The optical fiber 103 is formed perpendicular to the common axis. However, it may have a certain angle.
The optical fiber 103 passes through the inside of the shielding part 107 a of the holder 107. More specifically, it extends in the normal direction with respect to the cross section of the shielding portion 107a (a surface that includes an axis parallel to the common axis and is perpendicular to the paper surface). Note that the direction in which the optical fiber 103 extends may have a certain angle with respect to the normal direction.
The inclined surface 103a of the optical fiber 103 is located inside the circular opening 107c. That is, the optical fiber 103 penetrates through the opening surface 107d of the circular opening 107c.
Further, the optical fiber 103 extends into a space 127 formed by a first plane 124 formed by a surface facing the LED 101 of the photodetector 105 and a second plane 125 formed by a surface facing the photodetector 105 of the LED 101. Exist.
In other words, the light guided by the optical fiber 103 is guided through the space 127 in a direction orthogonal (or substantially orthogonal) to the common axis.

The optical fiber 103 (light guide unit 104) for measuring the wavelength extends in the space 127 formed by the first plane 124 and the second plane 125, so that the photodetector 105 and the LED 101 are brought close to each other. , Θ = 60 ° or more can be set.
That is, the optical fiber 103 (light guide unit 104) for measuring the wavelength extends into the space 127 formed by the first plane 124 and the second plane 125, so that the optical fiber 103 (guide) It can be prevented that the light unit 104) becomes an obstacle and the photodetector 105 and the LED 101 cannot be brought close to each other.
As a result, it is possible to accurately measure almost all of the plurality of LEDs 101 having different characteristics.

Further, the extending direction of the optical fiber 103 constituting the light guide unit 104 is configured not to coincide with the optical axis of the LED 101.
That is, the direction of light guided by the optical fiber 103 and the direction of light incident on the inclined surface 103a of the optical fiber 103 do not match. In other words, as shown in FIG. 4, when light enters the optical fiber 103, the light refracts and travels in the direction before entering.
With this configuration, the photodetector 105 and the LED 101 can be brought close to each other.
The reason will be explained.
If the direction guided by the optical fiber 103 matches the direction of the light before entering the optical fiber 103, the optical fiber 103 is in a state where the angle with the normal direction of the LED 101 is small.
For example, in FIG. 3, in the case of the optical fiber 103 that guides light as it is in the direction of θ = 60 °, the inside of the photodetector 105 must be penetrated.
In order to avoid this, the photodetector 105 must be kept away from the LED 101. As a result, the photodetector 105 cannot receive light in the range up to θ = 60 °.
The object of the present embodiment for receiving light in the range up to θ = 60 ° cannot be achieved.
If the optical fiber 103 is disposed through the photodetector 105, the direction of the light before entering the optical fiber 103 can be matched, and the photodetector 105 can be brought close to the LED 101. If it comprises, it will be necessary to produce the photodetector 105 which has a through-hole specially, and there exists a problem that it will cause the complexity of a structure, the increase in cost, etc.

  FIG. 5 is an explanatory diagram of an outline of the light-emitting element inspection apparatus 3.

The light-emitting element inspection device 3 includes a light-emitting element light-receiving module 1, an electrical characteristic measuring unit 119, and a tester 151.
The light receiving module 1 for light emitting element includes a workpiece 102 (sample mounting table), an optical fiber 103, a photodetector 105, a holder 107, a signal line 111, a signal processing board 113, a communication line 115, a spacer 117, and a wavelength measuring unit 121. The electrical characteristic measuring unit 119 includes an HV unit 153, an ESD unit 155, a switching unit 157, and a positioning unit 159.

The photodetector 105 receives the light emitted from the LED 101 and outputs an electrical signal proportional to the amount of light to the signal processing board 113 as an analog signal.
The signal processing board 113 amplifies the analog signal and converts it into a digital signal. The light amount information converted into a digital signal by the signal processing board 113 is output to the tester 151 via the communication line 115.

The optical fiber 103 as the light guide unit 104 guides the light emitted from the LED 101 to the wavelength measurement unit 121.
Then, the wavelength measuring unit 121 measures the wavelength of the light emitted from the LED 101 and outputs this wavelength information to the tester 151 as a digital value.

The probe needle 109 has a function of applying a voltage for causing the LED 101 to emit light by physically contacting the surface of the LED 101.
The probe needle 109 is positioned and fixed by a positioning unit 159.
If the positioning unit 159 is of a type in which the workpiece 102 moves, the positioning unit 159 has a function of holding the tip position of the probe needle 109 at a fixed position. Conversely, the positioning unit 159 may be any of the type probe 109 is moved, is moved to a predetermined position on the workpiece 102 to the position of the tip of the probe needle 109 LED 101 is placed, thereafter its position Has the function of holding.

The HV unit 153 has a role of detecting various characteristics of the LED 101 with respect to the rated voltage by applying the rated voltage.
Normally, the photodetector 105 and the wavelength measuring unit 121 measure the light emitted from the LED 101 in a state where the voltage from the HV unit 153 is applied.
Various characteristic information detected by the HV unit 153 is output to the tester 151.

The ESD unit 155 is a unit that inspects whether or not the LED 101 is electrostatically discharged by applying a large voltage to the LED 101 for a moment to cause electrostatic discharge.
The electrostatic breakdown information detected by the ESD unit 153 is output to the tester 151.

The switching unit 157 switches between the HV unit 153 and the ESD unit 155.
That is, the voltage applied to the LED 101 via the probe needle 109 is changed by the switching unit 157. And by this change, the inspection item of LED101 is each changed to the detection of the various characteristics in a rated voltage, or the presence or absence of an electrostatic breakdown.

The tester 151 receives input of light amount information detected by the signal processing board 113, wavelength information detected by the wavelength measurement unit 121, various electrical characteristic information detected by the HV unit 153, and electrostatic breakdown information detected by the ESD unit 153.
Then, the tester 151 analyzes and sorts the characteristics of the LED 101 from this input.
For example, the tester 151 performs the classification that the LED 101 that does not have a certain performance should be discarded. Further, the separation is performed for each light quantity and wavelength.
The physical separation is performed in a step after the inspection by the light emitting element inspection apparatus 3.

  FIG. 6 is an explanatory diagram of the probe needle 109.

The probe needle 109 need not be merely in contact with the LED 101 but needs to be in contact (crimping) with a certain pressure. For this purpose, the direction in which the probe needle 109 extends is preferably in a state where the angle with the normal direction of the LED 101 is small.
However, if the direction in which the probe needle 109 extends in such a state that the angle with the normal direction of the LED 101 is small, the probe needle 109 becomes an obstacle, and a situation in which the photodetector 105 and the LED 101 cannot be brought close to each other occurs. .
Therefore, in the first embodiment, the photodetector 105 and the LED 101 can be brought close to each other by making the probe needle 109 as horizontal or substantially horizontal as possible as shown in FIG. 6 (FIG. 3).
In addition, the probe needle tip 109d of the probe needle 109 is bent so that the contact pressure between the probe needle 109 and the LED 101 can be increased and the angle with respect to the normal direction of the LED 101 is small.
Thus, the photodetector 105 and the LED 101 can be brought close to each other while the tip of the probe needle 109 is crimped to the LED 101.
In other words, the probe needle 109 is a space formed by the first plane 124 formed by the surface facing the LED 101 of the photodetector 105 and the second plane 125 formed by the surface facing the photodetector 105 of the LED 101. It can also be said that it extends to 127.

As shown in FIG. 6A, the probe needle 109 has a probe needle first portion 109a and a probe needle second portion 109b. FIG.6 (b) is an enlarged view of b part of Fig.6 (a).
As shown in FIG. 6B, the probe needle 109 has a probe needle third portion 109c and a probe needle tip portion 109d at the tip portion of the probe needle second portion 109b.
As shown in FIG. 6B, the probe needle 109 is bent from the probe needle third portion 109c and the probe needle tip portion 109d extends. The probe needle tip 109d is pressure-bonded to the LED 101.
The probe needle third portion 109c has a truncated cone shape.
The probe needle second portion 109b is refracted and extends toward the photodetector 105 as viewed from the probe needle first portion 109a.
The probe needle first portion 109a, the probe needle second portion 109b, and the probe needle third portion 109c are held at an angle of less than 10 ° with respect to the horizontal.
Since it comprised in this way, it becomes possible to make LED101 adjoin to the photodetector 105. FIG.

  FIG. 7 is an explanatory diagram of specific forms of the probe needle 109 and the positioning unit 159.

As shown in FIG. 7A, the probe needle 109 may be formed by a needle holding mechanism 159a.
In this case, the needle holding mechanism 159 a is disposed on the outer portion of the outer peripheral surface 107 f of the holder 107. The reason is that the needle holding mechanism 159a has a large thickness in the common axis direction, and if the needle holding mechanism 159a is provided at the internal direction position of the common shaft (position where the shielding portion 107a exists), the LED 101 is brought close to the photodetector 105. This is because it becomes difficult.
In other words, with such a configuration, the LED 101 can be brought close to the photodetector 105.

As shown in FIG. 7B, the probe needle 109 may be formed of a probe card 159b.
In this case, the probe card 159b is arranged in the space on the side where the LED 101 is present at the position where the shielding part 107a of the holder 107 is present.
The reason is that the probe card 159b has a small thickness in the common axis direction and can be disposed in a space on the side where the LED 101 is present at the position where the shielding portion 107a is present.
If comprised in this way, the length of the probe needle | hook 109 will be short, and it will become possible to hold | maintain the probe needle | hook 109 more stably.
Further, with such a configuration, the LED 101 can be brought close to the photodetector 105.
The probe card 159b is positioned by a probe card spacer 161.

  FIG. 8 is an explanatory diagram regarding the angle of the inclined surface 103 a of the optical fiber 103.

FIG. 8 is an example for the following case.
When the optical fiber 103 is configured in parallel to the LED 101 and the photodetector 105 as shown in FIG.
The inclined surface 103a is inclined by θ2 with respect to the light guide direction of the optical fiber 103 (the direction in which the optical fiber 103 extends), and the inclined surface 103a is opposite to the LED 101 (the direction toward the photodetector 105). )
When the position of the inclined surface 103a is arranged at a position having an angle of θ3 with respect to the normal line of the light emitting surface 101a of the LED 101.
In such a case, the incident angle of the light incident on the inclined surface 103a is 90 ° −θ3 + θ2. The direction of light after entering the inclined surface 103a is the refraction angle.
In this case, when the refraction angle coincides with θ2, the light incident on the inclined surface 103a is refracted and proceeds in the light guide direction.
For that purpose, it is necessary to satisfy the following formula.
sin (90 ° −θ3 + θ2) = nsinθ2
Here, n is the refractive index of the optical fiber with respect to air.
If θ2 which is the angle of the inclined surface 103a and θ3 which is the angle of the inclined surface 103a with respect to the normal line of the light emitting surface 101a of the LED 101 are selected so as to satisfy this equation, the light guided to the optical fiber 103 is transmitted to the optical fiber 103. It can propagate straight in the extending direction.
The light guided to the optical fiber 103 is propagated straight, so that the light can be reliably guided to the wavelength measuring unit 121.

As shown in FIG. 8, the optical fiber 103 has an inclined surface 103a formed at the tip, and a side surface 103b formed on a cylindrical outer peripheral surface.
The inside of the optical fiber 103 is formed by a core 103d located at the center and a clad 103c surrounding the core.
Light propagates in the core 103d while being totally reflected.

  FIG. 9 is an explanatory diagram of the angle of the inclined surface 103a when the optical fiber 103 itself is inclined.

FIG. 9 is basically the same as the case of FIG. 8 except that the optical fiber 103 is inclined by θ4 with respect to the horizontal.
In this case, in order for the light incident on the inclined surface 103a to travel in the extending direction (light guide direction) of the optical fiber 103, it is necessary to satisfy the following expression.
sin (90 ° −θ3 + θ2−θ4) = nsinθ2
If θ2 that is the angle of the inclined surface 103a, θ3 that is the angle of the inclined surface 103a with respect to the normal line of the LED 101, and θ4 that is the angle at which the optical fiber 103 is inclined with respect to the horizontal are selected so as to satisfy this equation, The light guided through the fiber 103 can propagate straight in the extending direction of the optical fiber 103.
Then, since the light guided to the optical fiber 103 is guided straight, incident light can be reliably guided to the wavelength measuring unit 121.

The inclined surface 103a is preferably subjected to APC (Angle Physical contact) polishing.
Here, APC polishing is a polishing method in which an oblique convex spherical polishing surface is applied. By this APC polishing, reflection attenuation can be suppressed.

  FIG. 10 is an explanatory diagram of the inclined direction of the inclined surface 103 a of the optical fiber 103.

As shown in FIG. 10, the inclined surface 103a of the optical fiber 103 may have various angles.
Specifically, the inclined surface 103a may be opposed to the LED 101 as shown in FIG. 10 (a), and the inclined surface 103a may extend with respect to the extending direction of the optical fiber 103 or the light guiding direction as shown in FIG. 10 (b). It does not have to be inclined. This is because the light emitted from the LED 101 can be captured even in the shapes as shown in FIGS. 10 (a) and 10 (b).
Naturally, as shown in FIG. 10C, the inclined surface 103 a having the shape described with reference to FIGS. 8 and 9 may face the photodetector 105.

  FIG. 11 is a modification in which a transparent member 123 a that is a light guide member 123 is provided at the tip of the optical fiber 103.

In general, an optical fiber used for guiding light to a wavelength measuring unit is provided with a protective tube, a metal fitting at the tip, and the like, and as a result, its outer shape is about φ10 mm.
On the other hand, the optical fiber 103 used in the embodiment as shown in FIG. 4 is used without the protective tube, and its outer shape is about φ0.5 mm.
As described above, since the outer shape φ is greatly different, the optical fiber used for guiding the light to the wavelength measuring unit 121 cannot be used as it is for the optical fiber 103 used in the embodiment shown in FIG. .
Here, it is also conceivable that the protective tube is peeled off and used for the tip of the optical fiber used to guide the light to the wavelength measuring unit 121 and a range of a certain distance from the tip.
Certainly, in this way, the optical fiber used for guiding light to the wavelength measuring unit 121 can be used as it is for the optical fiber 103 used in the embodiment as shown in FIG. However, an optical fiber without a protective tube is very fragile and may be damaged by slight contact. Further, as shown in FIGS. 11A, 11B, and 11C, the transparent member inclined surface 123c of the optical fiber needs to be processed with the inclination angle of the tip, but the optical fiber is broken during the processing. There is also a risk of doing.
When such breakage occurs, it becomes necessary to replace the fiber used to guide the light to the wavelength measuring unit 121.
Therefore, a transparent member 123 a is provided separately from the optical fiber used for guiding the light to the wavelength measuring unit 121.
As described above, since the transparent member 123a is provided separately from the optical fiber used to guide the light to the wavelength measuring unit 121 (the light guide member 123 is configured by a member different from the optical fiber), the light guide member 123 can be formed of a material having a higher strength than the optical fiber, and can be made strong against contact and the like.
In addition, since the transparent member 123a is provided separately from the optical fiber used to guide the light to the wavelength measuring unit 121 (the light guide member 123 is formed of a member different from the optical fiber), the inclination angle of the tip is changed. It is also possible to select materials suitable for processing. Furthermore, even if the transparent member 123a is damaged due to processing or the like, it is sufficient to replace only the transparent member 123a.

Furthermore, according to the above description, it seems that it is appropriate to provide the transparent member 123a at the tip of the optical fiber used to guide the light to the wavelength measuring unit 121. However, the transparent member 123a should be configured as short as possible. There is a request.
This is because it is difficult to form the transparent member 123a from a material having a higher light transmittance as the optical fiber, and as a result, if the transparent member 123a is configured longer, the amount of light is reduced.
It may be necessary to bend the transparent member 123a in order to guide the light to the wavelength measuring unit 121 using the transparent member 123a after the transparent member 123a is configured long. This is because the light quantity is reduced.
Therefore, the transparent member 123a needs to be configured as short as possible. However, if the transparent member 123a is configured to be short, it becomes necessary to bring the optical fiber used for guiding light to the wavelength measuring unit 121 having φ of 10 mm up to the inside of the holder 107.
If it does so, the optical fiber used for light guide to the wavelength measurement part 121 will come to the very vicinity of LED101.
In this case, the LED 101 and the photodetector 105 must be formed apart from each other because of the amount of φ of the optical fiber used to guide the light to the wavelength measuring unit 121 and a space for holding the optical fiber.
This makes it difficult to bring the LED 101 and the photodetector 105 close to each other, which is the most important point of the present embodiment.
Therefore, in this modification, the optical fiber 103 is further interposed between the optical fiber used for guiding the light to the wavelength measuring unit 121 and the transparent member 123a.
Since it has the above configuration, the optical fiber used to guide light to the wavelength measuring unit 121 can easily bend the optical fiber and guide it to the wavelength measuring unit.
In addition to the optical fiber used to guide the light to the wavelength measuring unit 121, a transparent member 123a is provided (the light guide member 123 is formed of a member different from the optical fiber). It can be formed of a material having a higher strength than the optical fiber, and can be made stronger against contact and the like.
In addition, since the transparent member 123a is provided separately from the optical fiber used to guide the light to the wavelength measuring unit 121 (the light guide member 123 is formed of a member different from the optical fiber), the inclination angle of the tip is changed. It is also possible to select materials suitable for processing. Furthermore, even if the transparent member 123a is damaged due to processing or the like, it is sufficient to replace only the transparent member 123a.

The transparent member 123a is made of, for example, a transparent dielectric. For example, the transparent dielectric is glass or the like.
The transparent member 123a does not need to have a cylindrical shape, and may have a prismatic shape having a square bottom surface.
Further, in some cases, it may be a prismatic shape having a rectangular bottom surface. For example, the shape may be a plate glass.
Here, the transparent member 123 a is an example of the light guide member 123. In addition, the light guide unit 104 is configured by combining the transparent member 123 a and the optical fiber 103.

As shown in FIGS. 11A, 11B, and 11C, the transparent member inclined surface 123c of the transparent member 123a may face various directions as in the optical fiber 103 in FIG. .
The effect is the same as that in each direction in FIG.

  FIG. 12 shows a modification in which a reflective film as the reflective member 123b is provided on the outer peripheral portion of the transparent member 123a.

  As shown in FIG. 12, by providing the reflecting member 123b on the outer peripheral portion of the transparent member 123a, light can be reliably guided. In addition, the transparent member inclined surface 123c of the transparent member 123a may face various directions as shown in FIG.

  FIG. 13 shows a modification in which only the reflecting member 123b is provided.

  As shown in FIG. 13, only the reflection member 123 b that is the light guide member 123 may be provided to guide light.

  FIG. 14 is an explanatory diagram of a light guide method when the optical fiber 103 is disposed in the normal direction of the LED 101 (θ = 0 °).

As shown in FIG. 14, when the optical fiber 103 is arranged in the normal direction of the LED 101, the inclined surface 103a has an angle of 45 ° with respect to the extending direction (light guide direction) of the optical fiber 103, and , Facing the photodetector 105.
By doing so, light incident from the side surface 103b of the optical fiber 103 can be reflected by the inclined surface 103a and guided in the extending direction.

  FIG. 15 is an explanatory diagram of light reflected by the inclined surface 103a.

The light that has entered the inclined surface 103 a is divided into light that enters the optical fiber 103 that is the light guide unit 104 and light that is reflected.
It is preferable to arrange the reflected light so that the photodetector 105 receives the reflected light.
If comprised in this way, even if it comprises the light guide part 104 with a big transparent member like a plate glass, the light received by the photodetector 105 can be increased as much as possible.

The light receiving module 1 for a light emitting element of the present invention is disposed to face an LED 101, receives a light emitted from the LED 101 and measures the amount of light, and a wavelength measuring unit for measuring the light emitted from the LED 101. And a light guide portion 104 led to 121.
The light guide unit 104 is disposed so as to extend into a space formed by a plane formed by the surface of the LED 101 facing the photodetector 105 and a plane formed by the surface of the photodetector 105 facing the LED 101. The extending direction of 104 is formed so as not to coincide with the optical axis from the LED 101.
If comprised in this way, it will become possible to make the photodetector 105 and LED101 adjoin. Then, by making the photodetector 105 and the LED 101 close to each other, it becomes possible for the photodetector 105 to receive most of the light emitted from the LED 101.
As a result, it is possible to accurately measure a plurality of LEDs 101 having various characteristics (cos type and characteristics having different peak positions).

  Further, the present invention is not limited to the above embodiment, and various changed structures and configurations may be performed.

An example of the light emitting element in the present invention is an LED. That is, the light emitting element may be any element that emits light. Here, the light is not limited to visible light, and may be, for example, infrared rays or ultraviolet rays.
An example of the light receiving unit in the present invention is the photodetector 105.
An example of the light guide unit in the present invention is the optical fiber 103. Moreover, the light guide part may be formed by the optical fiber 103, the light guide member 123, and the like. That is, the light guide part may be formed of a plurality of members as long as light can be guided.
An example of the light guide member in the present invention is a glass plate, a glass tube, a hollow waveguide, or the like.

  DESCRIPTION OF SYMBOLS 1 ... Light receiving module for light emitting elements, 3 ... Inspection apparatus for light emitting elements, 101 ... LED (light emitting element), 101a ... Light emitting surface, 103 ... Optical fiber (light guide part), 103a ... Inclined surface, 103b ... Side surface, 103c ... Cladding, 103d ... Core, 104 ... Light guide, 105 ... Photo detector (light receiving part), 109 ... Probe needle, 123 ... Light guide member (light guide part), 123a ... Transparent member (light guide part), 123b ... Reflecting member , 123c ... transparent member inclined surface, 151 ... tester

The light receiving module for light emitting element of the present invention is disposed opposite to the light emitting element, receives a light emitted from the light emitting element and measures the amount of light, and measures the wavelength of the light emitted from the light emitting element. anda guide portion for guiding to the wavelength measuring unit for the light guiding portion includes a flat surface which the light receiving portion and the opposing surfaces of the light emitting element is formed, facing the light emitting element of the light receiving portion and to extend into the space to form a plane surface is formed, the extending direction of the light guide section is arranged so as not to coincide with the optical axis from the light emitting element, further, the light guide portion Is formed with an inclined surface that is inclined at a predetermined angle with respect to a light guide direction of the light guide unit, and the inclined surface is disposed to face a surface of the light receiving unit that faces the light emitting element, and It is an incident surface for taking in the light of a light emitting element in the said light guide part.

Claims (14)

A light receiving unit that is disposed opposite to the light emitting element, receives light emitted from the light emitting element, and measures the amount of light;
A light guide that guides the light emitted from the light emitting element to a wavelength measurement unit for wavelength measurement,
The light guide unit extends in a space formed by a plane formed by a surface of the light receiving element facing the light receiving unit and a plane formed by a surface of the light receiving unit facing the light emitting element. Arranged,
The light receiving module for a light emitting element, formed so that an extending direction of the light guide portion does not coincide with an optical axis from the light emitting element. The inclined surface which inclines a predetermined angle with respect to the light guide direction of the said light guide part for taking in the light of the said light emitting element to the said light guide part is formed in the said light guide part. Light receiving module for light emitting element. The light receiving module for a light emitting element according to claim 2, wherein the inclined surface is disposed so as to face a surface of the light receiving unit that faces the light emitting element. The light receiving module for a light emitting element according to claim 3, wherein the inclination angle of the inclined surface is an angle at which light applied to the inclined surface is refracted and guided to the inside of the light guide unit. The light receiving module for a light emitting element according to claim 2, wherein the inclined surface is disposed to face a surface of the light emitting element that faces the light receiving portion. The light receiving module for a light emitting element according to any one of claims 2 to 5, wherein the light guide portion is formed of an optical fiber. The light-receiving module for a light-emitting element according to claim 6, wherein the inclined surface of the light guide unit is subjected to APC polishing. The light guide part is formed by a light guide member and an optical fiber,
The light guide member is
The inclined surface is formed at the tip,
The light-receiving module for a light-emitting element according to claim 2, wherein the light-receiving module is provided in close contact with a tip of the optical fiber. The light receiving module for a light emitting element according to claim 8, wherein the light guide member is formed of a transparent dielectric. The light receiving module for a light emitting element according to claim 9, wherein the light guide member has a side surface along the longitudinal direction coated with a reflective film. The light guide member is
Formed hollow,
The light receiving module for a light emitting element according to claim 8, wherein the light receiving module is formed of a reflecting member formed so as to surround a longitudinal axis. A holder for holding the light receiving unit;
The holder has a shielding part that covers the periphery of the light receiving surface of the light receiving part,
The light receiving module for a light emitting element according to claim 1, wherein the shielding portion is provided with a circular opening that is coaxial with a center of the light receiving portion. The light receiving module for a light emitting element according to any one of claims 1 to 12,
A probe needle for measuring electrical characteristics in contact with an electrode of the light-emitting element,
The probe needle is held outside the light-receiving module for light-emitting elements. The probe needle is
The tip that contacts the light emitting element is bent,
The other part is hold | maintained at the angle of less than 10 degrees with respect to horizontal. The inspection apparatus for light emitting elements of Claim 13.

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