TWI460405B - Light amount measuring device and light amount measuring method - Google Patents

Description

Light quantity measuring device and light quantity measuring method

The present invention relates to a light amount measuring device and a light amount measuring method for a light emitting diode.

In the process of the light-emitting diode, there is an inspection step for checking whether the expected amount of light can be obtained from the manufactured light-emitting diode to manage the screening of the defective product and the process capability of the production line. In the inspection step, the means for measuring the amount of light of the light-emitting diode must have a simple structure and a high-precision measurement.

Patent Document 1 discloses a semiconductor inspection apparatus for fixing a light-receiving surface of a light-receiving device at a position where a light beam is incident in an angular range of 5° to 35° with respect to a light emission direction of a substrate surface of the wafer, and the light-receiving device is used for crystal alignment. The optical semiconductor element on the circle is subjected to light quantity measurement.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 11-340512

[The problem that the invention wants to solve]

However, since the light-receiving surface in Patent Document 1 is fixed to be inclined to the optical semiconductor element, it is possible to measure a light beam having a specific angular component, but there is still room for improvement in measuring a light beam of a full-angle component with high precision. Further, in Patent Document 1, since the influence of the arrangement relationship of the optical semiconductor elements on the wafer on the measurement of the light beam is not considered, improvement in high-precision measurement is required. Further, in Patent Document 1, in order to perform high-accuracy measurement, it is necessary to provide a reflection device in the wafer itself, and the structure is too complicated. Therefore, it is difficult to use the semiconductor inspection apparatus of Patent Document 1 in the inspection step.

The present invention has been made in view of the above circumstances as a problem. That is, an object of the present invention is to provide a light amount measuring device which is simple in structure and capable of measuring a light-emitting diode with high precision.

The light quantity measuring device according to claim 1 is a light quantity measuring device for a light emitting diode, comprising: a light receiving unit disposed to face the light emitting diode and receiving the radial light emitted by the light emitting diode Light, and measuring the amount of light; a probe for supplying power to the light emitting diode to cause the light emitting diode to emit light; and a light receiving range setting mechanism for emitting light according to the light emitting diode The angle of the central axis is set to a range of light that is received by the light-receiving portion, that is, a light-receiving range, and a plurality of the light-emitting diodes are arranged on a dicing sheet. When the light receiving unit receives the light emitted from the plurality of arranged light emitting diodes, the setting unit sets the light receiving range to be different regardless of the arrangement form of the plurality of light emitting diodes. The measurement error of the amount of light is below a predetermined ratio.

The method for measuring the amount of light in the eighth aspect of the present invention is a method for measuring the amount of light of a light-emitting diode, wherein a light-receiving mechanism is disposed opposite to a plurality of the light-emitting diodes arranged on the dicing sheet, and is received by the light-emitting diode. Radial light having the following steps: a light emitting step of supplying power to the light emitting diode to cause the light emitting diode to emit light; and a light receiving range setting step based on the light emitting diode The angle of the central axis of the light is set in the range of the light emitted by the light receiving means, that is, the light receiving range, and the measuring step, and the amount of light received by the light receiving means is measured. The light receiving range setting step sets the light receiving range to the arrangement form of the light emitting diodes regardless of the plurality of arrays when the light receiving unit receives the light emitted from the plurality of arranged light emitting diodes. The measurement error of the amount of received light is equal to or less than a predetermined ratio.

The light quantity measuring device according to claim 9 of the present invention is a light quantity measuring device for a light emitting diode, The method includes a light receiving unit that receives the radial light emitted from the light emitting diode and measures the amount of light, and a probe that supplies power to the light emitting diode to make the light emitting diode And a measurement range setting mechanism for determining a range of light measured by the light-receiving portion, that is, a range of light emitted from the light-emitting diode, based on an angle with respect to an emission central axis of the light-emitting diode The setting is performed, wherein a plurality of the light-emitting diodes are arranged on a dicing sheet, and the measuring range setting means sets the light range of the maximum value of the angle of the emitted light to 75°±10° as the measuring range. .

The method for measuring the amount of light according to claim 10 of the present invention is a method for measuring the amount of light of a light-emitting diode, which receives a radial light emitted from a plurality of the light-emitting diodes arranged on a dicing sheet by using a light-receiving mechanism, and has the following Step: a light-emitting step of supplying power to the light-emitting diode to cause the light-emitting diode to emit light; and a measuring range setting step according to an angle with respect to a central axis of the light-emitting diode The light emitted from the light-emitting diode sets a measurement range which is a light range measured by the light-receiving means, and a measurement step of measuring the amount of light received by the light-receiving means, and the measurement range setting step is issued. The range of light in which the maximum value of the angle is 75° ± 10° is set as the measurement range.

1‧‧‧ light receiving module

3‧‧‧Light measuring device

10‧‧‧Semiconductor wafer

11‧‧‧Cut slices

12‧‧‧ wafer ring

101‧‧‧Lighting diode

101a‧‧‧Lighting surface

101b‧‧‧Lighting diode

101c‧‧‧Lighting diode

103‧‧‧Loading table

103a‧‧‧glass table

103b‧‧‧cutting piece

105‧‧‧Photodetector

107‧‧‧ Keeping Department

107a‧‧‧Shading Department

107b‧‧‧ Side section

107c‧‧‧Circular opening

107d‧‧‧Circular opening

108‧‧·score ball

108a‧‧‧ inner wall

108b‧‧‧ openings

109‧‧‧Probe

111‧‧‧Signal line

113‧‧‧Amplifier

115‧‧‧Communication line

117‧‧‧Light Guide

119‧‧‧ fiber

120‧‧‧ Wavelength Measurement Department

121‧‧‧Spectroscope

123‧‧‧ reflector

123a‧‧·reflecting surface

124‧‧‧ aperture

125‧‧‧Electrical Characteristics Measurement Department

126‧‧ ‧ Fresnel lens

127‧‧‧ reflector

127a‧‧‧reflecting surface

151‧‧‧ Calculation Department

153‧‧‧HV unit

155‧‧‧ESD unit

157‧‧‧Switch unit

159‧‧‧ Positioning unit

D1‧‧‧ boundary width

D2‧‧‧ boundary width

LCA‧‧‧Lighting Center Shaft

1(a) to 1(c) are explanatory views of the light-emitting state of the light-emitting diode measured by the light amount measuring device according to the embodiment of the present invention.

2(a) to 2(c) are explanatory views of the luminous intensity distribution of the light-emitting diode measured by the light amount measuring device according to the embodiment of the present invention.

Fig. 3 is an explanatory view of a light receiving module of the light quantity measuring device according to the embodiment of the present invention.

Fig. 4 is an explanatory view showing a light quantity measuring device according to an embodiment of the present invention.

5(a) and 5(b) are explanatory views showing an arrangement pattern of light-emitting diodes measured by a light amount measuring device according to an embodiment of the present invention.

6(a) and 6(b) show the use of a light amount measuring device according to an embodiment of the present invention. A photometric measurement result chart of various arrangements of the measured light-emitting diodes.

7(a) and 7(b) are explanatory views of the influence of the arrangement form of the light-emitting diodes measured by the light amount measuring device according to the embodiment of the present invention on the amount of light.

8(a) and 8(b) are diagrams showing the results of measurement of the light amount of various types of light-emitting diodes measured by the light amount measuring apparatus according to the embodiment of the present invention.

Fig. 9 is a view showing a light amount estimation error of the light amount measuring device according to the embodiment of the present invention.

FIG. 10 is an explanatory diagram of the first embodiment of the light receiving range setting means of the light amount measuring device according to the embodiment of the present invention.

Fig. 11 is an explanatory view showing a second embodiment of the light receiving range setting means of the light amount measuring device according to the embodiment of the present invention.

Fig. 12 is an explanatory view showing a third embodiment of a light receiving range setting mechanism of the light amount measuring device according to the embodiment of the present invention.

Fig. 13 is an explanatory view showing a fourth embodiment of the light receiving range setting means of the light amount measuring device according to the embodiment of the present invention.

Fig. 14 is an explanatory view showing a fifth embodiment of the light receiving range setting means of the light amount measuring device according to the embodiment of the present invention.

Fig. 15 is an explanatory view showing a first modification of the light receiving module of the light amount measuring device according to the embodiment of the present invention.

Fig. 16 is an explanatory view showing a second modification of the light receiving module of the light quantity measuring device according to the embodiment of the present invention.

Fig. 17 is an explanatory view showing a third modification of the light receiving module of the light quantity measuring device according to the embodiment of the present invention.

Fig. 18 is an explanatory diagram showing an application example of a mounting table of the light quantity measuring device according to the embodiment of the present invention.

<Lighting status of light-emitting diode>

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Fig. 1 is an explanatory view showing a state of light emission of the light-emitting diode 101 measured by the light amount measuring device 3 according to the embodiment of the present invention.

As shown in FIG. 1(a), light emitted from the light-emitting surface 101a of the light-emitting diode (hereinafter referred to as LED (Light Emitting Diode)) 101 is radially formed.

The light emitting surface 101a of Fig. 1(a) is located above the LED 101. The normal line of the light-emitting surface 101a of the LED 101 is referred to as an emission center axis LCA.

When one direction on the plane including the light-emitting surface 101a is taken as the reference axis (X-axis), the angle rotated counterclockwise from the X-axis on the plane is defined as φ. Further, when φ is fixed, the angle with the central axis of illumination LCA is defined as θ.

When the LED 101 emits light, the intensity of light emitted from the light-emitting surface 101a differs depending on the angle θ or the like sandwiched by the central axis of illumination LCA.

The amount of light is such that the value of φ is 0° to 360°, and the value of θ is all accumulated from 0° to 90°, and the opposite side of the LED 101 is also calculated, and the two are combined. value.

By knowing the amount of light, it is possible to check whether or not the LED 101 is suitable for various modes of use.

The value of the light intensity emitted from the LED 101 differs depending on the different θ and φ. In order to visually express the light intensity, it is explained using the figure of FIG. 1(b).

In Fig. 1(b), the intersection of the X-axis and the Y-axis is represented by θ = 0°. Each point on the circle represents the position of each φ of θ = 90°.

(c) of Fig. 1 is a cross-sectional view showing a value of φ at a fixed position.

Here, the light intensity is defined as the light emission intensity E(θ) at the same distance from the LED 101 and at an angle θ with respect to the light emission center axis LCA. This luminous intensity E(θ) corresponds to the luminous intensity distribution of each θ as shown.

Further, in the description of FIG. 1, it is assumed that the measurement is performed far enough from the LED 101. The LED 101 can be regarded as a point. The LED 101 is extremely small compared to the general photodetector 105 (see FIG. 3), and thus such an assumption can be established. Unless otherwise stated in the description of FIG. 2 and subsequent steps, the same is true.

FIG. 2 is an explanatory diagram of the luminous intensity distribution of the light-emitting diode 101 measured by the light amount measuring device 3 according to the embodiment of the present invention.

Fig. 2(a) is the same as Fig. 1(c).

As shown in Fig. 2(a), the luminous intensity E is the light intensity in each of θ of the fixed angle φ angle from the distance r of the LED 101 at a fixed position.

Generally, each of the LEDs 101 has a different luminous intensity due to its kind and manufacturing error. The different LEDs 101 may have a cos type LED 101 as shown in Fig. 2(b), and a ring type LED 101 as shown in Fig. 2(c).

The cos-type and ring-shaped LED 101 is only an example, and the LED 101 having these two characteristics is not limited to the measurement target. Of course, in general, the LEDs 101 generally have a characteristic of a cos type having a peak intensity at θ = 0° and a ring type having a peak intensity at θ = 30°. That is, most of the general LEDs 101 to be inspected have peak intensities in a range of θ of 0° to 30°.

Once the luminous intensity distribution is known, the next step can be performed to find the amount of light of the LED 101.

In other words, the luminous intensity E(θ) is integrated by the circumference around the central axis of the light emission LCA (integrated from φ=0° to =360°), and the circumferential luminous intensity L(θ) is obtained. The luminous intensity L(θ) is L(θ)=E(θ). 2πγ. Sin θ is expressed. By integrating θ=0° to θ° of the circumferential light emission intensity L(θ), the amount of light S(θ) on the light-emitting surface 101a side can be obtained.

Further, by multiplying S(θ) by the fixed coefficient α, the amount of light on the back side of the LED 101 (opposite side of the light-emitting surface 101a) can be calculated.

Next, the amount of light of the LED 101 can be calculated by adding the amount of light S(θ) on the light-emitting surface 101a side to the amount of light on the back side (S(θ).α).

In addition, it is understood that the difference between the amount of light on the light-emitting surface 101a side and the amount of light on the back surface side of the LED 101 manufactured by the same process is substantially constant. Therefore, as long as one LED 101 is actually measured to obtain the coefficient α, the same value can be applied to the other LEDs 101.

<Light quantity measuring device>

The structure of the light amount measuring device 3 will be described below with reference to Figs. 3 and 4 .

3 is an explanatory view of the light receiving module 1 of the light amount measuring device 3 according to the embodiment of the present invention.

Fig. 4 is an explanatory view showing a light amount measuring device 3 according to an embodiment of the present invention.

The light amount measuring device 3 is a device that can simultaneously measure the amount of light emitted by the LED 101 and the wavelength.

The light amount measuring device 3 includes at least a mounting table 103, a probe 109, a light receiving module 1, an electrical property measuring unit 125, an arithmetic unit 151, and an output unit 163.

The mounting table 103 is a measurement sample stage on which the inspection target LED 101 is placed.

The placing table 103 has a substantially uniform flat shape and is provided to be substantially horizontal.

The mounting table 103 and the LEDs 101 mounted thereon are substantially parallel to each other.

The mounting table 103 has at least a glass table 103a and a dicing sheet 103b.

The glass table 103a uses a light-transmitting material such as sapphire or glass to form a substantially uniform flat plate shape.

The surface of the dicing sheet 103b has adhesiveness and is laminated on the glass table 103a. The LED 101 is placed on the dicing sheet 103b.

The mounting table 103 having the dicing sheet 103b can easily transfer the LED 101 to the mounting table 103 at the time of measurement, and suppress the displacement thereof.

Further, as in the case where a plurality of LEDs 101 are arranged on the dicing sheet 11 as will be described later with reference to Fig. 5, the dicing sheets 11b can be entirely transferred to the glass table 103a instead of the dicing sheet 103b.

The probe 109 supplies power to the LED 101 to cause the LED 101 to emit light. The probe 109 is substantially parallel to the light-emitting surface 101a of the LED 101, and radially extends in a direction perpendicular to the normal line of the LED 101.

The probe 109 of FIG. 3 contacts the electrode of the LED 101 and applies a voltage when measuring the optical characteristics (light amount, wavelength) of the LED 101. Further, the probe 109 is connected to the electrical characteristic measuring unit 125 of the light amount measuring device 3 which will be described later with reference to Fig. 4, and the electrical characteristics of the LED 101 can be simultaneously measured.

When the probe 109 is brought into contact with the LED 101, the probe 109 can be moved while the mounting table 103 and the LED 101 are in a fixed state. Conversely, the table 103 and the LED 101 may be moved while the probe 109 is stationary.

The light receiving module 1 receives the light emitted by the LED 101 and has a function of converting the received light into an electronic signal.

The light receiving module 1 is disposed to face the LED 101 and is substantially parallel to the light emitting surface 101a.

As shown in FIG. 3, the light receiving module 1 includes at least a photodetector 105, a holding portion 107, a signal line 111, an amplifier 113, and a communication line 115.

The holding portion 107 holds a housing such as the photodetector 105 therein. The holding portion 107 is disposed at a position facing the mounting table 103 in a space.

The holding portion 107 is disposed substantially in parallel with the mounting table 103, the LEDs 101 placed on the mounting table 103, and the photodetector 105.

The holding portion 107 is movable in the vertical direction while maintaining the substantially parallel arrangement relationship. By the movement of the holding portion 107, the photodetector 105 and the LED 101 can be moved closer to or away from each other to change the magnitude of θ. It is not always necessary that the holding portion 107 moves, or the placing table 103 may move.

Further, as shown in FIG. 3, in the present embodiment, among the radial light emitted from the LED 101, the range of light received by the light receiving module 1 (hereinafter referred to as "light receiving range") is relatively The angle θ of the central axis of illumination LCA of the light emitted by the LED 101 is indicated. The φ associated with the light receiving range is based on 0° ≦ φ ≦ 360 °.

For example, when θ of FIG. 3 is θ=50°, the light amount measuring device 3 causes the light receiving module 1 to receive light of θ=50° among the light emitted from the LED 101. That is, the light receiving module 1 The light receiving range is in the range of 0° ≦ θ ≦ 50°. Further, the value of θ is the maximum value of the boundary angle of the predetermined light receiving range, and is also referred to as "light receiving angle" in the present embodiment.

The holding portion 107 includes at least a shielding portion 107a, a side surface portion 107b, and a circular opening portion 107c.

The side surface portion 107b has a substantially cylindrical shape extending in the direction of θ = 0°.

The center of the shielding portion 107a and the side surface portion 107b is substantially the same as the emission central axis LCA of the light-emitting surface 101a of the LED 101 in the direction of θ = 0°.

A photodetector 105 is disposed in a hollow space formed by the inner peripheral surface of the side surface portion 107b.

A circular opening portion 107c that forms a cylindrical hollow portion is formed in a central portion of the shielding portion 107a.

Thereby, the light detector 105 can receive the light emitted from the LED 101 by the circular opening portion 107c.

The photodetector 105 receives the light emitted from the LED 101. The photodetector 105 generates an analog signal based on the amount of the received light intensity. The photodetector 105 outputs the generated analog signal to the amplifier 113 via the signal line 111. This type of ratio signal is equivalent to the amount of light received. The photodetector 105 can also measure the luminous intensity distribution from the intensity of each θ of the received light.

The amplifier 113 amplifies and AD converts the analog signal output from the photodetector 105, and converts it into a voltage value detectable by the calculation unit 151. The amplifier 113 outputs a digital signal represented by a voltage value after the conversion to the calculation unit 151 via the communication line 115.

Further, as shown in FIG. 4, the light receiving module 1 has a wavelength measuring unit 120.

The wavelength measuring unit 120 includes at least a light guiding unit 117, an optical fiber 119, and a spectroscope 121.

The light guiding portion 117 has an incident surface 117a that receives light emitted from the LED 101, and the light is incident on the inside of the light guiding portion 117. The light incident from the incident surface 117a is guided to be substantially parallel to the longitudinal direction of the light guiding portion 117.

The light guiding portion 117 is disposed on the outermost peripheral line K of the light received by the photodetector 105. Light guide The portion 117 is equidistant from the LED 101 to be measured. Further, the light guiding portion 117 is held to be rotatable in the angular direction of θ and φ. In summary, the light guiding portion 117 is maintained at a position that does not affect the light receiving by the photodetector 105.

The light guiding portion 117 guides the light incident on the incident surface 117a to the spectroscope 121 via the optical fiber 119.

The spectroscope 121 measures the wavelength and intensity (including the luminescence intensity) of the light guided by the light guiding unit 117, and outputs it to the calculation unit 151.

The light receiving module 1 has a wavelength measuring unit 120 in addition to the photodetector 105. The light amount measuring device 3 including the light receiving module 1 can simultaneously measure the amount of light up to a predetermined angle and the wavelength at a predetermined angle. Therefore, the light amount measuring device 3 can perform measurement of each of the LEDs 101 continuously and at high speed.

The electrical characteristic measurement unit 125 includes at least a positioning unit 159, an HV unit 153, an ESD unit 155, and a switching unit 157.

The positioning unit 159 positions and fixes the probe 109. Specifically, in the form in which the placement table 103 moves, the positioning unit 159 has a function of holding the tip end position of the probe 109 at a fixed position. Conversely, in the form in which the probe 109 is moved, the positioning unit 159 has a function of moving the tip end position of the probe 109 to a predetermined position on the mounting table 103 on which the LED 101 is placed, and holding the position.

The HV unit 153 has a function of applying a rated voltage and detecting various electrical characteristics of the LED 101 of the rated voltage.

Generally, in the voltage application state by the HV unit 153, the light emitted from the LED 101 is measured by the photodetector 105.

The various characteristic messages detected by the HV unit 153 are output to the calculation unit 151.

The ESD unit 155 is a unit that performs electrostatic discharge by applying an instantaneous large voltage to the LED 101 and checks whether it is subjected to electrostatic breakdown or the like.

The electrostatic destruction message detected by the ESD unit 155 is output to the calculation unit 151.

The switching unit 157 performs switching of the HV unit 153 and the ESD unit 155.

The voltage applied to the LED 101 by the probe 109 is changed by the switching unit 157. Then, by this change, the inspection items of the LED 101 can be changed to detect various characteristics at the rated voltage or to detect whether they are damaged by static electricity.

The calculation unit 151 receives the information of the amount of received light and the intensity of the light emitted from the amplifier 113, the information of the wavelength of the light and the intensity of the light emitted from the spectroscope 121, various electrical characteristic information detected by the HV unit 153, and the static electricity detected by the ESD unit 155. Destroy the input of messages, etc.

The calculation unit 151 performs classification and analysis of various characteristics of the LED 101 based on the inputs. After analyzing various characteristics, the calculation unit 151 performs image output, message output, and the like from the analysis unit 163 as needed.

<Arrangement pattern of light-emitting diodes>

Hereinafter, an arrangement form of the LEDs 101 measured by the light amount measuring device 3 will be described with reference to Fig. 5 .

Fig. 5 is an explanatory view showing an arrangement of LEDs 101 measured by the light amount measuring device 3 according to the embodiment of the present invention.

In the process of the LED, there is a cutting step of the LED wafer in which the semiconductor wafer 10 shown in FIG. 5(a) is cut into pieces.

The semiconductor wafer 10 is attached to the adhesive sheet 11 having adhesiveness. The dicing sheet 11 retains its shape by the wafer ring 12.

The LED 101 becomes a wafer through this cutting process. The diced plurality of wafer-shaped LEDs 101 are arranged on the dicing sheet 11.

After the dicing step, the width of the boundary of the wafer-shaped LED 101 is expanded by using a wafer expanding device, and an inspection step accompanying the measurement of the amount of light is performed. Further, the inspection step of the light amount measurement may be performed while the LED 101 is transferred from the dicing sheet 11 to the dicing sheet 103b on the glass table 103a after the dicing step, and the width of the boundary is expanded.

Figure 5(b) is a schematic illustration of a portion of a wafer-like LED 101 whose width has been expanded Figure.

The boundary width in the column direction (left-right direction) of FIG. 5(b) is taken as d1, and the boundary width in the row direction (up-and-down direction) is taken as d2. The interval between the LEDs 101 varies depending on the widths of the boundary widths d1 and d2.

As shown in FIG. 5(b), among the wafer-shaped LEDs 101, the LEDs 101 surrounded by the adjacent LEDs are regarded as the LEDs 101b. Further, among the wafer-shaped LEDs 101, the LEDs 101 located at the corner positions are not surrounded by the adjacent LEDs, and the LEDs 101 are regarded as the LEDs 101c.

In the case of the wafer-shaped LED 101, when the amount of light is measured in a state in which a plurality of LEDs 101 are arranged, the LEDs adjacent to the LEDs 101 to be measured are shielded from the light emitted from the LEDs 101 when θ is around 90°. The LED 101 that is blocked by the adjacent LEDs will have a lower luminous intensity as θ approaches 90°.

On the other hand, it is most preferable to measure the amount of light in a state in which the LEDs 101 are in a single piece, and to have no influence on the emission intensity distribution from the adjacent LEDs. However, in the LED inspection step, all of the LEDs 101 are taken out as a single piece for measurement, and this complicated operation causes an increase in man-hours, which is not realistic.

Therefore, in the state in which the plurality of LEDs 101 are arranged, the light amount measuring device 3 must be able to eliminate the influence of the adjacent LEDs on the emission intensity distribution as much as possible to measure the amount of light.

<Light measurement result>

Next, the light amount measurement result of the light amount measuring device 3 having the above configuration will be described with reference to Figs. 6 to 9 .

First, the influence of measurement in a state in which a plurality of LEDs 101 are arranged will be described with reference to FIGS. 6 and 7.

Fig. 6 is a view showing the results of measurement of the light amount in various arrangements of the LEDs 101 measured by the light amount measuring device 3 according to the embodiment of the present invention.

Fig. 7 is an explanatory view showing the influence of the arrangement pattern of the LEDs 101 measured by the light amount measuring device 3 according to the embodiment of the present invention on the amount of light.

Fig. 6(a) is a graph showing the relationship between the light receiving range and the amount of light of the light receiving module 1.

The horizontal axis of Fig. 6(a) indicates that the light receiving range of the light receiving module 1 is represented by the light receiving angle θ. The vertical axis of Fig. 6(a) indicates the percentage of the amount of light received by the light receiving module 1 as the total amount of light of the LED 101.

The measurement conditions 1 to 5 differ depending on the arrangement of the LEDs 101. The details of the measurement conditions 1 to 5 are shown in Table 1. The measurement conditions other than this are all the same.

Condition 1 is a comparative example and is a sheet LED 101 having no adjacent LEDs. Condition 1 does not have an influence on the distribution of luminous intensity from adjacent LEDs, and is an ideal measurement condition.

As shown in FIG. 5(b), the condition 2 is an LED 101c located at a corner position among the wafer-shaped LEDs 101. The width of the boundary is d1 = 30 μm and d2 = 30 μm.

As shown in FIG. 5(b), the condition 3 is an LED 101b located at a central position among the wafer-shaped LEDs 101. The width of the boundary is d1 = 150 μm and d2 = 150 μm.

As shown in FIG. 5(b), the condition 4 is an LED 101b located at a central position among the wafer-shaped LEDs 101. The width of the boundary is d1 = 100 μm and d2 = 50 μm.

As shown in FIG. 5(b), the condition 5 is an LED 101b located at a central position among the wafer-shaped LEDs 101. The width of the boundary is d1 = 30 μm and d2 = 30 μm.

In the measurement conditions 1 to 5, with the conditions 1 to 5, the interval between adjacent LEDs becomes narrower and narrower.

The graph of Fig. 6(a) shows a different curve of the various arrangements of the LEDs 101.

In the region where the light receiving angle θ is in the range of θ=75°, the curve of the light amount of the condition 1 is the lowest. Next, the curves of Condition 2, Condition 3, and Condition 4 are from low to high. The curve of the amount of light of Condition 5 is the highest.

In other words, it can be seen that in the region where the light receiving angle θ is in the range of θ=75°, the curve of the amount of light increases as the interval between the adjacent LEDs becomes narrower.

This is because, as shown in FIG. 7(a), the narrower the interval from the adjacent LEDs, the light that is not directly reaching the angular component of the photodetector 105 is reflected by the adjacent LEDs and reaches the photodetector 105. The more light of the angle component θa.

The light receiving angle θ is in a region larger than θ=75°, and conversely, the curve of the light amount of the condition 1 is the highest. Next, the curves of Condition 2, Condition 3, and Condition 4 are high to low. The curve of the amount of light of Condition 5 is the lowest.

That is, it can be seen that in the region where the light receiving angle θ is larger than θ=75°, as the interval from the adjacent LED is narrower, the curve of the amount of light is lower.

This is because, as shown in FIG. 7(b), the narrower the interval from the adjacent LEDs, the more the light of the angular component θb blocked by the adjacent LEDs among the light reaching the angular component of the photodetector 105.

Next, it is understood that the change curves of the conditions 1 to 5 are all in the vicinity of the light receiving angle θ in the vicinity of θ=75° (point P in Fig. 6(a)).

In other words, it can be seen that the plurality of LEDs 101 arranged in a wafer shape at a light receiving angle θ in the vicinity of θ=75° have substantially the same amount of light regardless of the position of the LEDs 101. Further, it is understood that the plurality of LEDs 101 arranged in a wafer shape in the vicinity of the light receiving angle θ at θ=75° have substantially the same amount of light regardless of the interval between the adjacent LEDs.

This is because the light receiving angle θ is in the vicinity of θ=75°, is reflected by the adjacent LED and reaches the optical inspection. The light of the angle component θa of the detector 105 and the light of the angle component θb blocked by the adjacent LEDs reach equilibrium. Since the light of the angle component θa and the light of the angle component θb reach equilibrium, the light receiving angle θ is approximately the same as the amount of light in the state of the slice without adjacent LEDs in the vicinity of θ=75°.

Fig. 6(b) is a graph showing the relationship between the light receiving range of the light receiving module 1 and the light amount deviation based on the light amount measurement result of Fig. 6(a). The measurement conditions of Fig. 6(b) are the same as those of Fig. 6(a).

The horizontal axis of Fig. 6(b) indicates the light receiving range of the light receiving module 1 as the light receiving angle θ. The vertical axis of Fig. 6(b) shows the light amount deviation δ between the condition 1 measured in the individual sheet state and the conditions 2 to 5 measured in the plurality of array states.

The peak of the light amount deviation δ is displayed in the vicinity of θ=20° to 30° at the light receiving angle θ.

It can be seen that the measurement in the plurality of array states is most deviated from the measurement in the individual sheet state when the light receiving angle θ is in the vicinity of θ=20° to 30°.

In particular, the narrower the interval from the adjacent LEDs, the larger the light amount deviation δ, and the larger the deviation from the measurement in the patch state. This is the same as the description of FIG. 6(a) because the angle component θa in the received light is large.

The light receiving angle θ decreases from θ=20° to 30° to θ=75° as the light receiving angle θ increases.

In other words, it can be seen that the measurement of the plurality of alignment states is close to the measurement of the sheet state by increasing the light receiving angle θ from θ=20° to 30° to θ=75°.

In particular, the narrower the interval between adjacent LEDs, the light amount deviation δ decreases sharply as the light receiving angle θ increases. Therefore, it can be seen that the narrower the interval between adjacent LEDs, the more the advantage of increasing the light receiving angle θ.

When the light receiving angle θ is θ=65° to 85°, the light amount deviation amount δ of the conditions 2 to 5 is ±6% or less. In particular, when the light receiving angle θ is in the vicinity of θ=75°, the light amount deviation amount δ of the conditions 2 to 5 is almost zero.

That is, when the light receiving angle θ is θ=75°±10°, a plurality of wafers are arranged. The LED 101, regardless of the spacing or arrangement position between adjacent LEDs, becomes smaller as measured in the slice state. In other words, it is understood that when the light receiving angle θ is measured at θ=75°±10°, even in the measurement in a plurality of array states, the same measurement as in the individual sheet state can be reproduced.

When the light receiving angle θ exceeds θ=85°, on the contrary, the light amount deviation δ of the condition 5 is greater than ±6%.

That is, once the light receiving angle θ is set to exceed θ=85°, the light amount deviation of the LED 101 having a narrow interval from the adjacent LEDs is greater than ±6%.

Next, the influence of different types of the LEDs 101 on the light quantity measurement results will be described using FIG.

Fig. 8 is a graph showing measurement results of light amounts of various types of LEDs 101 measured by the light amount measuring device 3 according to the embodiment of the present invention.

Fig. 8(a) is a graph showing the relationship between the light receiving range and the amount of light of the light receiving module 1.

Fig. 8(b) is a graph showing the relationship between the light receiving range of the light receiving module 1 and the light amount deviation based on the light amount measurement result of Fig. 8(a).

In FIG. 8, the LEDs 101 in the state of each piece are measured using the light quantity measuring apparatus 3 for 10 kinds of actual products which are different from each other.

Table 2 shows the details of the 10 actual products which are different from each other used in the measurement of Fig. 8.

The LED 101 used in the measurement of Fig. 8 has a substantially cuboid or cubic shape. W, D, and H in Table 2 indicate the outer dimensions of the LED 101 in the width direction, the depth direction, and the height direction, respectively.

The amount of light when the light receiving angle θ=90° of the 10 actual products that are different from each other is taken as 100%, and the two types with the largest deviation of the light amount in the light receiving range are selected as the Max type and the Min type, which are plotted in Fig. 8(a). in. The Max type is the category 9 in Table 2, and the Min type is the category 2 in Table 2.

The light amount deviation δ between the Max type and the Min type is plotted in Fig. 8(b).

As shown in Fig. 8(b), the light amount deviation δ of the ten actual products different from each other decreases as the light receiving angle θ increases.

The light amount deviation δ indicating that the light receiving angle θ is θ=65° to 85° is less than 5%.

Therefore, it is understood that the light receiving angle θ of θ=65° to 85° is derived from the pattern of FIG. 6 as the light receiving angle θ at which the amount of light generated by the type of the LED 101 is different.

Further, although not shown, in the same manner as in FIG. 6, when the types 1 to 10 are measured in a plurality of array states, and the results are expressed by the light receiving angle θ, the types 1 to 10 are changed in the vicinity of θ=75°. The curve is also all around the point (refer to point P in Fig. 6(a)).

Next, the result of estimating the error of the light amount measurement by the light amount measuring device 3 based on the light amount deviation of the arrangement pattern of the LEDs 101 and the variation of the light amount of the type will be described with reference to FIG. 9.

Fig. 9 is a view showing the light amount estimation error of the light amount measuring device 3 according to the embodiment of the present invention. Figure.

The horizontal axis of FIG. 9 indicates that the light receiving range of the light receiving module 1 is represented by the light receiving angle θ. The vertical axis of Fig. 9 shows the light amount estimation error.

The arrangement error of Fig. 9 shows an error estimated from the light amount deviation δ of the arrangement form shown in Fig. 6. Specifically, the arrangement error of FIG. 9 is obtained by estimating the value (|δ|/2) which is half of the light amount deviation δ of the arrangement form by ±.

The type error of Fig. 9 shows an error estimated from the light amount deviation δ of the arrangement form as shown in Fig. 8. Specifically, the type error of FIG. 9 is obtained by estimating the value (|δ|/2) which is half of the light amount deviation δ of the type on ±.

The arrangement + type error of FIG. 9 is an error of the light amount measurement by the light amount measuring device 3 estimated based on the arrangement error and the type error. Specifically, the arrangement + type error of FIG. 9 is obtained by multiplying the arrangement error by 2 and adding the type error by 2, and calculating the square root of the added value.

The peak of the arrangement + type error is displayed in the vicinity of θ=20° to 30° at the light receiving angle θ.

This shows that the alignment error around θ = 20° ~ 30° has a peak which has a large influence on the error.

The light receiving angle θ decreases from θ=20° to 30° to θ=70° as the light receiving angle θ increases.

That is, it can be seen that the received light angle θ is reduced by θ=20° to 30° to θ=70° by increasing the light receiving angle θ.

When the light receiving angle θ is in the vicinity of θ=65° to 85°, the arrangement + type error shows a value smaller than ±4%.

In other words, it is understood that the error of the light amount measurement in the light amount measuring device 3 can be suppressed to less than ±4% by setting the light receiving angle θ to θ=75°±10°, and high-precision measurement can be realized.

In general, the measurement accuracy of the light quantity measuring device is required to be suppressed to ±5% or less. The light amount measuring device 3 of the present embodiment can obtain a measurement accuracy that satisfies the market requirement and is less than ±4% by setting the light receiving angle θ to θ=75°±10°. therefore, Setting the light receiving angle θ to θ=75°±10° has a criticality.

In particular, when the light receiving angle θ is in the vicinity of θ=70° to 80°, the value of the display arrangement + type error is less than ±2%. Further, when the light receiving angle θ is in the vicinity of θ=70° to 80°, the display + type error is flat.

Therefore, by setting the light receiving angle θ to θ=75°±5°, the error in the light amount measurement in the light amount measuring device 3 can be suppressed to less than ±2%, and the error can be kept constant.

In the actual measurement, when the light receiving angle θ is adjusted, the position of the light receiving module 1 or the mounting table 103 or the arrangement of the LEDs 101 may be displaced, and it is difficult to completely complete the light receiving angle θ and θ=75° each time. Consistent. However, the light amount measuring device 3 of the present embodiment can set the light receiving angle θ to θ=75°±5°, and the error can be kept less than ± even if the light receiving angle θ is changed by ±5° by the above-described shift or the like. 2% fixed value. This is because the display error is a flat variation curve of less than ±2% in the range where the light receiving angle θ is θ=75°±5°. In other words, the light amount measuring device 3 can obtain measurement accuracy far higher than the market by setting the light receiving angle θ to θ=75°±5°, and can perform measurement stably. Therefore, setting the light receiving angle θ to θ=75°±5° is more critical.

When the light receiving angle θ exceeds θ=80°, the arrangement + type error increases as the light receiving angle θ increases.

That is, it can be seen that once the light receiving angle θ exceeds θ=80°, the error can be suppressed without increasing the light receiving angle θ.

In particular, when the light receiving angle θ exceeds θ=85°, the arrangement + type error is greater than ±4%. Therefore, it is preferable to set the light receiving angle θ to θ=85° or less.

In this way, the light quantity measuring device 3 can set the light receiving angle θ to θ=75°±10°, and suppress the measurement error to less than ±4% regardless of the arrangement pattern of the LED 101 (±5 required in the market) % or less), high-precision measurement with a simple structure is realized.

The error of the conventional light quantity measuring device is ±10% or more. Therefore, in order to improve the determination Accuracy, the closer the light receiving angle θ is to θ=90°.

However, it is difficult to set the light receiving angle to be around θ=90° by narrowing the distance between the light receiving module and the LED.

Therefore, in order to measure light having a light receiving angle θ close to θ=90°, a conventional light quantity measuring device uses an integrating sphere or a reflector that surrounds the LED at least in a range of θ=90° or more to measure the amount of light of the LED. .

When the measurement is performed using the integrating sphere or the above-described reflector, it is necessary to carry the LED into the integrating sphere at each measurement, or it is necessary to perform the alignment of the reflector, etc., resulting in an increase in the number of man-hours in the inspection step. Moreover, it is even more difficult to directly measure in a state in which a plurality of wafers are arranged in a row. In addition, if the reflector is in contact with the LED as described above, it may cause problems such as LED damage or disordered alignment. Moreover, the measurement accuracy with an error of ±10% or more is also too low.

On the other hand, the light amount measuring device 3 of the present embodiment can set the light receiving angle θ to θ=75°±10° (more preferably, it is set to θ=75°±5°) without using an integrating sphere or reflector. Alternatively, a plurality of arrays of LEDs 101 can be directly measured to reproduce the measurement in a single chip state. Further, the light amount measuring device 3 can suppress the error in the measurement of the light amount to ±5% or less required by the market regardless of the arrangement position of the plurality of LEDs 101 arranged in a wafer shape and the interval between the adjacent LEDs. Specifically, even if a type error is added, the error can be less than ±4% when θ=75°±10° and less than ±2% when θ=75°±5°.

Therefore, the light amount measuring device 3 can stably arrange the wafers in a simple configuration by setting the light receiving angle θ to θ=75°±10° (more preferably, θ=75°±5°). The light amount of the plurality of LEDs 101 is measured with high precision. Further, the light amount measuring device 3 does not need to extract a single piece from the wafer-shaped LED 101 for measurement, and can significantly accelerate the inspection step.

As shown in FIG. 3, the probe 109 is inserted between the LED 101 and the light receiving module 1. Therefore, light directly incident on the probe 109 from among the light emitted from the LED 101 may be reflected by the probe 109 and cannot be received by the light receiving module 1. The amount of attenuation of the amount of light caused by the influence of the probe 109 is substantially fixed to 15% or less depending on the configuration of the probe 109.

The result of the light amount measurement described above with reference to Figs. 6 to 9 is the result of adding the amount of light amount attenuation caused by the influence of the probe 109, and the light amount estimation error of Fig. 9 shows the light amount estimation error including the influence. In other words, even if the photodetector 105 of the light receiving module 1 has an area of about 15% that cannot be received by light, as long as the area does not change with time, measurement with a small amount of light estimation error can be realized.

The light receiving module 1 of the present embodiment is composed of one photodetector 105, and its light receiving surface is circular. However, the light receiving module 1 may also be composed of a plurality of photodetectors 105, and the light receiving surface may be square.

<light receiving range setting mechanism>

Next, the light receiving range setting means constituting the light amount measuring device 3 will be described with reference to Figs. 10 to 14 .

FIG. 10 is an explanatory diagram of the first embodiment of the light receiving range setting mechanism of the light amount measuring device 3 according to the embodiment of the present invention.

Fig. 11 is an explanatory view showing a second embodiment of the light receiving range setting means of the light amount measuring device 3 according to the embodiment of the present invention.

Fig. 12 is an explanatory view showing a third embodiment of the light receiving range setting means of the light amount measuring device 3 according to the embodiment of the present invention.

Fig. 13 is an explanatory view showing a fourth embodiment of the light receiving range setting means of the light amount measuring device 3 according to the embodiment of the present invention.

Fig. 14 is an explanatory view showing a fifth embodiment of the light receiving range setting means of the light amount measuring device 3 according to the embodiment of the present invention.

Further, the illustration of the probe 109 is omitted in FIGS. 10 to 14. In addition, in FIGS. 10 to 14, the holding portion 107, the mounting table 103, the LED 101, and the photodetector 105 are arranged substantially in parallel with each other. In FIGS. 10 to 13, the light receiving angle of the light receiving module 1 before the light receiving range is set is schematically indicated as θ1, and the light receiving angle of the light receiving module 1 after the light receiving range is set is represented as θ2.

The light amount measuring device 3 sets the light receiving range of the light receiving module 1 based on the light receiving angle θ. The light receiving range is the range of light received by the light receiving module 1 among the light emitted from the LED 101 as described above. As described above, the light receiving angle θ is the maximum value of the boundary of the predetermined light receiving range.

As shown in FIG. 10, the light receiving module 1 of the light amount measuring device 3 of the first embodiment directly receives the light emitted from the LED 101.

The light amount measuring device 3 of the first embodiment has a moving mechanism that moves the light receiving module 1 in the vertical direction.

The moving mechanism can be constituted by an actuator (not shown) attached to the holding portion 107. The moving mechanism moves the light receiving module 1 along the light emission center axis LCA. Therefore, even if the light receiving module 1 is moved by the moving mechanism, the holding portion 107, the mounting table 103, the LED 101, and the photodetector 105 maintain an arrangement relationship substantially parallel to each other.

Once the light receiving module 1 is moved by the moving mechanism, the proximity or distance between the photodetector 105 and the LED 101 changes the magnitude of the received light angle θ.

The light amount measuring device 3 of the first embodiment changes the distance between the photodetector 105 and the LED 101 by the moving mechanism, and adjusts the light receiving angle θ to θ=75°±10°. In the light amount measuring device 3 of the first embodiment, the light receiving range of the light receiving module 1 is set by adjusting the light receiving angle θ to θ=75°±10° by the moving mechanism.

In other words, the light amount measuring device 3 of the first embodiment sets the light receiving range to 0°≦θ≦75°±10° (0°≦θ≦65° to 0°≦θ≦85°) by the moving mechanism. By this setting, the light receiving module 1 can receive light having a range of θ=75°±10° (0°≦θ≦65° to 0°≦θ≦85°) from the light emitted from the LED 101.

In the light amount measuring device 3 of the first embodiment, the moving mechanism functions as a light receiving range setting means. Further, the moving mechanism can move the mounting table 103 on which the LED 101 is placed without moving the light receiving module 1, or can move both the mounting table 103 and the light receiving module 1.

As shown in FIG. 11, the light receiving module 1 of the light amount measuring device 3 of the second embodiment directly receives the light receiving module 1 Light emitted by LED 101.

The light amount measuring device 3 of Embodiment 2 has a diaphragm 124 that shields a portion of the light emitted from the LED 101.

The diaphragm 124 changes the opening size of the circular opening portion 107c of the holding portion 107. The aperture 124 is formed in a substantially disk shape with the central axis of illumination LCA as a central axis.

The aperture 124 is disposed between the light receiving module 1 and the LED 101. The diaphragm 124 is disposed substantially in parallel with the holding portion 107, the mounting table 103, the LED 101, and the photodetector 105. In addition, the diaphragm 124 may be formed integrally with the shielding portion 107a.

The aperture 124 changes its position in the radial direction of the opening edge in order to change the opening size of the circular opening portion 107c. Once the position in the radial direction of the opening edge of the aperture 124 is changed, the inclination angle of the straight line connecting the opening edge with the LED 101 with respect to the illumination central axis LCA also changes. This angle of inclination of the aperture 124 defines the range of light that can reach the photodetector 105. The aperture 124 can change the light receiving angle θ by changing the position of the radial direction of the opening edge.

The light amount measuring device 3 of the second embodiment adjusts the light receiving angle θ using the diaphragm 124 so that θ = 75 ° ± 10 °. In the light amount measuring device 3 of the second embodiment, the light receiving angle θ is adjusted to θ=75°±10° by the diaphragm 124 to set the light receiving range of the light receiving module 1.

In other words, the light amount measuring device 3 of the second embodiment sets the light receiving range to 0 ° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦ θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °) using the diaphragm 124. By this setting, the light receiving module 1 can receive light having a range of θ=75°±10° (0°≦θ≦65° to 0°≦θ≦85°) from the light emitted from the LED 101.

In the light amount measuring device 3 of the second embodiment, the diaphragm 124 functions as a light receiving range setting means.

As shown in FIG. 12, in the light amount measuring device 3 of the third embodiment, the light receiving module 1 does not directly receive a part of the light emitted from the LED 101.

The light quantity measuring device 3 of Embodiment 3 has a reflector 123 for emitting from the LED 101 The light is reflected to the light receiving module 1.

The reflector 123 is externally connected to the inclined surface 107d which is an inner peripheral surface of the shielding portion 107a constituting the holding portion 107.

The reflector 123 has a sloped surface 107d as a base end, and its tip end extends toward the LED 101 side (lower side) along the light emission center axis LCA. The inner peripheral surface of the reflector 123 extending toward the LED 101 side forms a reflecting surface 123a.

The reflecting surface 123a of the reflector 123 is formed of a reflective material having high reflectance characteristics such as silver or aluminum. The reflecting surface 123a forms a substantially truncated cone-shaped hollow space whose upper end is reversed with the central axis of the light emission LCA as the central axis. The reflecting surface 123a of the hollow space having a slightly truncated cone shape which is upside down is formed, and the diameter of the cross section in the axial direction is smaller as it goes toward the LED 101. Therefore, the reflecting surface 123a can reflect the light emitted from the LED 101 to the photodetector 105.

The reflector 123 changes the position of the reflecting surface 123a of the extended distal end portion by changing the extending length from the inclined surface 107d toward the LED 101 side. When the position of the reflecting surface 123a of the distal end surface is changed, the inclination angle of the straight line connecting the reflecting surface 123a and the LED 101 with respect to the central axis of the light emission LCA also changes. This angle of inclination of the reflector 123 defines the range of light that can reach the photodetector 105. The reflector 123 can change the light receiving angle θ by changing the length of the extension from the inclined surface 107d toward the LED 101 side.

The light amount measuring device 3 of the third embodiment adjusts the light receiving angle θ using the reflector 123 so that θ = 75 ° ± 10 °. In the light amount measuring device 3 of the third embodiment, the light receiving angle θ is adjusted to θ=75°±10° by the reflector 123 to set the light receiving range of the light receiving module 1.

In other words, the light amount measuring device 3 of the third embodiment uses the reflector 123 to set the light receiving range to 0 ° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦ θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °). By this setting, the light receiving module 1 can receive light having a range of θ=75°±10° (0°≦θ≦65° to 0°≦θ≦85°) from the light emitted from the LED 101.

In the light amount measuring device 3 of the third embodiment, the reflector 123 functions as a light receiving range setting means.

As shown in FIG. 13, in the light amount measuring device 3 of the fourth embodiment, the light receiving module 1 does not directly receive a part of the light emitted from the LED 101.

The light amount measuring device 3 of the fourth embodiment has a Fresnel lens 126 for refracting light emitted from the LED 101 to the light receiving module 1.

The Fresnel lens 126 is formed in a substantially disk shape with the central axis of the light emission LCA as a central axis.

The Fresnel lens 126 is disposed between the light receiving module 1 and the LED 101. The Fresnel lens 126 is disposed substantially in parallel with the holding portion 107, the mounting table 103, the LED 101, and the photodetector 105. In addition, a plurality of Fresnel lenses 126 may be provided.

The Fresnel lens 126 is movable in the up and down direction along the light emission center axis LCA. Once the position of the Fresnel lens 126 in the up-and-down direction is changed, the inclination angle of the straight line connecting the outer circumference of the Fresnel lens 126 and the LED 101 with respect to the light-emitting central axis LCA also changes. This angle of inclination of the Fresnel lens 126 defines the range of light that can reach the photodetector 105. The Fresnel lens 126 can change the light receiving angle θ by changing the position of the outer circumference in the up and down direction.

The light amount measuring device 3 of the fourth embodiment adjusts the light receiving angle θ using the Fresnel lens 126 so that θ = 75 ° ± 10 °. In the light amount measuring device 3 of the fourth embodiment, the light receiving angle θ is adjusted by the Fresnel lens 126 to θ=75°±10° to set the light receiving range of the light receiving module 1.

In other words, the light amount measuring device 3 of the fourth embodiment uses the Fresnel lens 126 to set the light receiving range to 0 ° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦ θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °). By this setting, the light receiving module 1 can receive light having a range of θ=75°±10° (0°≦θ≦65° to 0°≦θ≦85°) from the light emitted from the LED 101.

In the light amount measuring device 3 of the fourth embodiment, the Fresnel lens 126 functions as a light receiving range setting means.

As shown in FIG. 14, in the light amount measuring device 3 of the fifth embodiment, the light receiving module 1 does not directly receive a part of the light emitted from the LED 101.

The light quantity measuring device 3 of Embodiment 5 has a function for reflecting light emitted from the LED 101 to The reflector 127 of the light receiving module 1 and a moving mechanism for moving the light receiving module 1 in the vertical direction.

The reflector 127 included in the light amount measuring device 3 of the fifth embodiment has the same structure as the reflector 123 of the third embodiment.

That is, the reflector 127 extends toward the LED 101 side along the light emission center axis LCA, and this inner peripheral surface forms the reflection surface 127a. Further, the reflector 127 can change the above-described inclination angle of the straight line connecting the reflection surface 127a of the tip end portion and the LED 101 by changing the extension length of the inclined surface 107d toward the LED 101 side to change the light receiving angle θ.

However, the reflector 127 is different from the reflector 123 of the embodiment 3 in that the light reflected by the reflecting surface 127a is defined as light in the range of 70° < θ ≦ 85° among the light emitted from the LED 101.

Further, the moving mechanism of the light amount measuring device 3 of the fifth embodiment has the same configuration as the moving mechanism of the first embodiment.

In other words, the moving mechanism of the light amount measuring device 3 of the fifth embodiment moves the light receiving module 1 along the light emission center axis LCA. Further, the moving mechanism of the light amount measuring device 3 of the fifth embodiment can change the light receiving angle θ by changing the distance between the photodetector 105 and the LED 101.

However, the moving mechanism of the light amount measuring device 3 of the fifth embodiment differs from the moving mechanism of the first embodiment in that the light directly received by the photodetector 105 from the LED 101 is limited to θ ≦ 70° among the light emitted from the LED 101. Light within the range.

In general, a protective material for protecting the light-receiving surface is often provided on the light-receiving surface of the photodetector. Affected by the refractive index of the protective material, light having an incident angle greater than 70° among the light incident on the photodetector increases the reflection component of the surface of the protective material. Therefore, light larger than θ=70° is directly received by the photodetector, and is less likely to be reflected by the reflector or the like, and the incident angle toward the photodetector is suppressed to 70° or less, and the correct amount of light can be measured. And improve the measurement accuracy.

The light amount measuring device 3 of the fifth embodiment adjusts the light receiving angle θ to θ=75°±10° by the moving mechanism and the reflector 127. That is, in the light quantity measuring device 3 of the fifth embodiment, The light receiving angle θ is adjusted to θ=75°±10° by the moving mechanism and the reflector 127 to set the light receiving range of the light receiving module 1.

In other words, the light amount measuring device 3 of the fifth embodiment sets the light receiving range to 0° ≦ θ ≦ 75 ° ± 10 ° (0° ≦ θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °) by using the moving mechanism and the reflector 127. .

However, the light quantity measuring device 3 is adjusted such that light in the range of 0° ≦ θ ≦ 70° is directly received by the photodetector 105, and light in the range of 70° < θ ≦ 85° causes the photodetector 105 to pass through the reflecting surface 127a. receive.

Once the light receiving range is set as above, the light receiving module 1 directly receives the light within the range of θ=70° (light in the range of 0°≦θ≦65° to 0°≦θ≦70°) among the light emitted from the LED 101. Light. Further, the light receiving module 1 receives light in a range (70° < θ ≦ 85°) that is larger than θ=70° and θ=85° among the light emitted from the LED 101 via the reflecting surface 127a.

In the light amount measuring device 3 of the fifth embodiment, the moving mechanism and the reflector 127 function as a light receiving range setting means.

Further, in the above description, the light receiving range of the light quantity measuring device 3 of the first embodiment and the second embodiment in which the light receiving module 1 directly receives light is set to 0° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦ θ ≦ 65° to 0°≦θ≦85°). However, the light receiving ranges of the light amount measuring devices 3 of the first embodiment and the second embodiment may be set to be limited to 0°≦θ≦65° to 0°≦θ≦70°.

Further, in the above description, the light receiving range of the light amount measuring device 3 of the third embodiment and the fourth embodiment in which the light receiving module 1 does not directly receive light is set to 0° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦). θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °). However, the light receiving ranges of the light amount measuring devices 3 of the third embodiment and the fourth embodiment can be set to 0° ≦ θ ≦ 70° to 0° ≦ θ ≦ 85°.

That is, when the light receiving range is set from 0°≦θ≦65° to 0°≦θ≦70°, the light amount measuring device 3 of Embodiment 1 or 2 is used, and the light receiving range is set to 0°≦θ≦70°. The light quantity measuring device 3 of Embodiment 3 or 4 can be used up to 0° ≦ θ ≦ 85°.

With this selection, the light quantity measuring device 3 of the first to fourth embodiments is in phase with the fifth embodiment. In the same manner, it is possible to suppress the influence of the reflection component which is increased by the surface of the protective material of the photodetector 105, and it is possible to measure a more accurate amount of light and improve the measurement accuracy.

<Modification of Light-Receiving Module>

Hereinafter, a modification of the light receiving module 1 constituting the light amount measuring device 3 will be described with reference to Figs. 15 to 17 .

Fig. 15 is an explanatory view showing a first modification of the light receiving module 1 of the light amount measuring device according to the embodiment of the present invention.

As described above, in order to suppress the light amount measurement error regardless of the arrangement position of the LEDs 101 and the interval and type of the adjacent LEDs, the light amount measuring device 3 sets the light of the light receiving angle θ=75°±10° as the light receiving module 1 . The range of light received is critical.

However, the light receiving module 1 may not completely receive the light in the light receiving range. For example, when the light receiving module 1 is composed of a plurality of photodetectors 105, light that reaches a gap between the two photodetectors 105, or light that causes a shadow of the probe 109, or the like. As a result, in the measurement of the amount of light of the LED 101, "the area where light cannot be received" which is unavoidable in the measurement system configuration may occur in the light receiving range. Therefore, even in the light amount measuring device 3, the light receiving module 1 may not completely receive the light having the light receiving angle θ=75°±10°.

However, in the light amount measuring device 3, the light receiving module 1 completely receives the light emitted from the LED 101 within an angle range defined by the angle θ formed by the light emission center axis LCA to be θ=75°±10°. Light is not the most important. For example, in the fourth embodiment shown in FIG. 13, when the Fresnel lens 126 or the like is disposed between the LED 101 and the light receiving module 1, light loss is inevitably generated, and the absolute value of the amount of light is also reduced. However, in the light amount measuring device 3, the change curve of the amount of light that changes with the light receiving angle θ is relatively constant, and the measurement performance is not affected. This is because it is more important that the light-quantity measuring device 3 causes the light-receiving module 1 to receive an angular range defined by the angle θ with respect to the central axis of the light-emitting center LCA from the light emitted from the LED 101 to be θ=75°±10°. The amount of light within the light is proportional to the amount of light. Therefore, the light amount measuring device 3 can insert light attenuation such as an ND filter between the LED 101 and the light receiving module 1 The light receiving module 1 receives the attenuated light.

Further, the light amount measuring device 3 of the present embodiment does not have a path following the light emitted from the LED 101 to the photodetector 105, so that the light receiving module 1 receives the problem.

In other words, the light amount measuring device 3 of the present embodiment measures light in proportion to the amount of light in the angular range defined by the light receiving angle θ=75°±10°, and does not have any configuration for the light receiving module 1 itself. limited.

In the light amount measuring device 3 described above, the structure of the light receiving module 1 is as shown in Figs. 3 and 4 and has been described.

In the light receiving module 1 shown in FIGS. 3 and 4, the photodetector 105 is disposed to face the LED 101 and is substantially parallel to the light emitting surface 101a of the LED 101. Further, the photodetector 105 of FIGS. 3 and 4 is held inside the holding portion 107.

The structure of the light receiving module 1 of the light amount measuring device 3 is not limited to the structure illustrated in FIGS. 3 and 4, and may be the following structure.

As shown in FIG. 15, the light receiving module 1 of the first modification has at least an integrating sphere 108. The integrating sphere 108 is formed into a hollow slightly spherical shape.

In the light receiving module 1 of the first modification, the photodetector 105 is held in the inner wall 108a forming the internal space of the integrating sphere 108, and is not held inside the holding portion 107 shown in FIG.

The inner wall 108a is formed of a diffusible material having a good high reflectance. An opening 108b is provided at a position where the photodetector 105 is not held in the inner wall 108a.

The opening 108b guides the light emitted from the LED 101 to the inside of the integrating sphere 108.

The opening portion 108b is formed to be slightly circular. The central axis of the opening of the opening 108b substantially coincides with the central axis of illumination LCA of the light emitted from the LED 101.

The other structure of the light receiving module 1 according to the first modification is the same as that of the light receiving module 1 shown in FIGS. 3 and 4. That is, although the illustration is omitted in FIG. 15, the photodetector 105 of FIG. 15 is also connected to the amplifier 113 via the signal line 111.

The light amount measuring device 3 of the first modification does not carry the LED 101 to be inspected into the integrating sphere. In 108, the amount of light is measured while being placed outside.

In the light amount measuring device 3 of the first modification, the light emitted from the LED 101 is guided to the inside of the integrating sphere 108 by the opening portion 108b. The light guided to the inside of the integrating sphere 108 is repeatedly reflected by the inner wall 108a of the integrating sphere 108. The light repeatedly reflected by the inner wall 108a is guided by the photodetector 105 and received by the photodetector 105. The light received by photodetector 105 is proportional to the light emitted from LED 101.

Thereby, the light receiving module 1 of the first modification can receive the light emitted from the LED 101 and measure the amount of light thereof.

Further, in the light amount measuring device 3 of the first modification, an optical fiber may be provided instead of the photodetector 105 held in the inner wall 108a, or the photodetector 105 may be provided outside the integrating sphere 108. Moreover, the optical fiber can also be used to guide light to the outside of the integrating sphere 108, and the light is received by the photodetector 105 outside the integrating sphere 108. At this time, a light amount measuring device (for example, a spectroscope) other than the photodetector 105 can be used outside the integrating sphere 108.

Incidentally, in the light receiving module 1 shown in FIGS. 3 and 4, the light emitting surface 101a of the LED 101 faces the light receiving surface of the photodetector 105 substantially in parallel. In other words, in the light receiving module 1 shown in FIGS. 3 and 4, the light emission center axis LCA of the light emitted from the LED 101 is substantially parallel to the normal line of the light receiving surface of the photodetector 105. Thereby, in the light receiving module 1 shown in FIGS. 3 and 4, the angle θ of the light emitted from the LED 101 with respect to the central axis of the light emission LCA coincides with the angle of incidence of the light emitted from the LED 101 with respect to the photodetector 105.

Therefore, in the light amount measuring device 3 including the light receiving module 1 of FIGS. 3 and 4, the angular range of the light of the light amount received by the light receiving module 1 among the light emitted from the LED 101 is measured, and is incident on the photodetector 105. The angular range of light is the same.

Therefore, in the above description, the angle range in which the light received by the light receiving module 1 and the light amount is measured among the light emitted from the LED 101 is referred to as a "light receiving range". Further, the maximum value of the boundary angle of the predetermined light receiving range is referred to as "light receiving angle θ". Further, the mechanism of the light amount measuring device 3 that sets the light receiving range based on the light receiving angle θ is referred to as "light receiving range setting". mechanism".

On the other hand, in the light receiving module 1 of the first modification shown in FIG. 15, the light emitting surface 101a of the LED 101 and the light receiving surface of the photodetector 105 are not substantially parallel to each other. In the light-receiving module 1 of the first modification, the light-emission central axis LCA of the light emitted from the LED 101 and the normal to the light-receiving surface of the photodetector 105 are not substantially parallel. As a result, in the light receiving module 1 of the first modification, the angle θ with respect to the light emission center axis LCA does not coincide with the incident angle of the light emitted from the LED 101 with respect to the photodetector 105.

Therefore, in the light amount measuring device 3 including the light receiving module 1 of the first modification, the angular range of the light of the amount of light received by the light receiving module 1 among the light emitted from the LED 101 is measured, and the light incident on the photodetector 105 The range of angles is not consistent.

When the angular range of the light that has received the amount of light received by the light receiving module 1 does not coincide with the angular range of the light incident on the photodetector 105, the meaning of the "light receiving range" may be misinterpreted as being incident on the photodetector 105. The angular extent of the light.

Therefore, in the following description, the angle range in which the light received by the light receiving module 1 and the light amount is measured among the lights emitted from the LED 101 is referred to as a "measurement range". Further, the maximum value of the boundary angle of the predetermined light receiving range is referred to as "measurement angle θ". Furthermore, the mechanism of the light amount measuring device 3 that sets the measurement range based on the measurement angle θ is referred to as a "measurement range setting means" and will be described.

That is, the concept in the present invention is that the "measurement range" includes the meaning of the "light-receiving range". Similarly, the "measurement angle θ" includes the meaning of the "light-receiving angle θ". The "measurement range setting means" includes the meaning of the "light-receiving range setting means".

The measurement range setting means in the light amount measuring device 3 of the first modification is the same as the light receiving range setting means shown in one of FIGS. 10 to 14. In Fig. 15, the measurement range setting means of the modified example 1 is the same as the light receiving range setting means of the first embodiment shown in Fig. 10. In addition, in FIG. 15, the measurement angle of the light receiving module 1 before the measurement range setting is shown as θ1, and the measurement angle of the light receiving module 1 after setting the measurement range is represented as Θ2.

The light amount measuring device 3 according to the first modification uses the measurement range setting means to set the measurement range to 0 ° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦ θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °). By this setting, the light receiving module 1 can receive light in a range (0° ≦ θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °) from θ = 75 ° ± 10 ° among the light emitted from the LED 101. And measure the amount of light.

The other structure of the light amount measuring device 3 of the first modification is the same as that of the light amount measuring device 3 shown in Figs. 3 and 4 .

Fig. 16 is an explanatory view showing a second modification of the light receiving module 1 of the light amount measuring device according to the embodiment of the present invention.

According to the positional relationship between the surface electrode and the light-emitting surface 101a, the LED 101 can be classified into three types: "upper light-emitting type", "lower-side light-emitting type", and "double-sided light-emitting type".

The "upper illumination type" is a surface on the same side as the electrode of the LED 101, that is, the upper surface has a light-emitting surface 101a.

The "lower light-emitting type" has a light-emitting surface 101a on the surface opposite to the electrode of the LED 101, that is, on the lower surface.

The "double-sided light-emitting type" has a light-emitting surface 101a on the upper surface of the surface on the same side as the electrode of the LED 101, and on the lower surface of the surface opposite to the electrode.

In the light amount measuring device 3 shown in FIGS. 3 and 4, the light receiving module 1 is placed on the upper surface side of the mounting table 103 on which the LEDs 101 are placed. The light amount measuring device 3 of the light receiving module 1 having the above configuration is suitable for measuring the amount of light of the "upper light emitting type" LED 101.

As shown in FIG. 16, in the light amount measuring device 3 of the second modification, the light receiving module 1 is placed on the lower surface side of the mounting table 103 on which the LEDs 101 are placed. The light amount measuring device 3 including the light receiving module 1 of the second modification is suitable for measuring the amount of light of the "lower light emitting type" LED 101.

As shown in FIG. 16, the light receiving module 1 of the second modification has the same configuration as the light receiving module 1 shown in FIGS. 3 and 4.

In the light receiving module 1 of the second modification, the photodetector 105 is placed on the table 103 via The LEDs 101 are arranged substantially in parallel. At this time, the light receiving module 1 of the second modification can be disposed in contact with the glass table 103a of the mounting table 103 without a gap. Since the probe 109 connected to the electrode of the LED 101 is not provided on the lower surface side of the mounting table 103, the light receiving module 1 disposed on the lower surface side of the mounting table 103 can be placed in contact with the glass table 103a.

Further, the light receiving module 1 (see FIG. 15) having the integrating sphere 108 may be applied to the light receiving module 1 of the second modification.

The glass table 103a of the second modification is the same as the glass table 103a of the light amount measuring device 3 shown in Figs. 3 and 4 . That is, the glass table 103a is formed of a material having a high transmittance of a wavelength bandwidth of light emitted from the LED 101. For example, the glass table 103a is preferably formed of sapphire or glass having a transmittance of 90% or more.

The dicing sheet 103b of the second modification may be a general colored dicing sheet, preferably a transparent dicing sheet. For example, the dicing sheet 103b is preferably formed of a dicing sheet having a transmittance of 80% or more with respect to the wavelength bandwidth of light emitted from the LED 101.

The other structure in the mounting table 103 of the second modification is the same as the mounting table 103 shown in FIGS. 3 and 4 .

As shown in FIG. 16, the measurement range setting means in the light amount measuring device 3 of the second modification can use the same mechanism as the light receiving range measuring means of the first embodiment shown in FIG. In addition, in FIG. 16, the measurement angle of the light receiving module 1 before the measurement range setting is shown as θ1, and the measurement angle of the light receiving module 1 after the measurement range setting is shown as θ2.

The light amount measuring device 3 according to the second modification uses the measurement range setting means to set the measurement range to 0 ° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦ θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °). With this setting, the light receiving module 1 can receive light of a range of θ=75°±10° (0°≦θ≦65° to 0°≦θ≦85°) among the light emitted from the LED 101, And measure the amount of light.

Further, the "lower-emitting type" LED 101 also has the same result as the light amount measurement results described with reference to FIGS. 6 to 9. Therefore, setting the measurement angle θ to θ=75°±10° has a criticality.

The other structure of the light amount measuring device 3 of the second modification is the same as that of the light amount measuring device 3 shown in FIGS. 3 and 4 .

Fig. 17 is an explanatory view showing a third modification of the light receiving module 1 of the light amount measuring device according to the embodiment of the present invention.

As shown in FIG. 17, in the light amount measuring device 3 of the third modification, the light receiving module 1 is placed on the upper surface side and the lower surface side of the mounting table 103 on which the LEDs 101 are placed. The light amount measuring device 3 including the light receiving module 1 of the third modification is suitable for measuring the amount of light of the "double-sided light emitting type" LED 101.

As shown in FIG. 17, each light receiving module 1 of the third modification has the same configuration as that of the light receiving module 1 shown in FIGS. 3 and 4.

In each of the light receiving modules 1 of Modification 3, each of the photodetectors 105 is disposed substantially parallel to the LEDs 101. At this time, the light receiving module 1 located on the lower side of the modification 3 is the same as the light receiving module 1 of the second modification, and can be disposed so as to be in contact with the glass table 103a of the mounting table 103 without a gap.

Further, the light receiving module 1 (see FIG. 15) having the integrating sphere 108 may be applied to each of the light receiving modules 1 of the third modification.

The glass table 103a of the third modification is the same as the modification 2, and is also the same as the glass table 103a of the light amount measuring device 3 shown in Figs. 3 and 4 .

The dicing sheet 103b of the third modification is also the same as the modification 2, and may be a general colored dicing sheet, preferably a transparent dicing sheet.

The other structure in the mounting table 103 of the modification 3 is the same as that of the mounting table 103 shown in FIGS. 3 and 4 .

The measurement range setting means in the light amount measuring device 3 of the third modification can individually adjust the measurement angle θ for each of the light receiving modules 1.

The measurement range setting means in the light amount measuring device 3 of the third modification is the same as the light receiving range measuring means shown in one of FIGS. 10 to 14. The illustration of the measurement range setting mechanism is omitted in FIG.

In the light amount measuring device 3 of the third modification, the measurement range setting means is used, and for each light receiving module 1, the measurement range is set to 0 ° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦ θ ≦ 65 ° to 0 ° ≦ θ≦85°). With this setting, the light receiving module 1 can receive light from the range of θ=75°±10° (0°≦θ≦65° to 0°≦θ≦85°) among the light emitted from the LED 101, and The amount of light was measured.

Further, the "double-sided light-emitting type" LED 101 also has the same result as the light amount measurement results described with reference to FIGS. 6 to 9. Therefore, setting the measurement angle θ to θ=75°±10° has a criticality.

The other structure of the light amount measuring device 3 of the third modification is the same as that of the light amount measuring device 3 shown in FIGS. 3 and 4 .

<Application example of placing table>

Hereinafter, an application example of the mounting table 103 constituting the light amount measuring device 3 will be described with reference to Fig. 18 .

FIG. 18 is an explanatory diagram showing an application example of the mounting table 103 of the light amount measuring device according to the embodiment of the present invention.

In the above-described light amount measuring device 3, the structure of the placing table 103 has been described as the structure shown in Figs. 3 and 4 .

The mounting table 103 shown in Figs. 3 and 4 has a glass table 103a and a dicing sheet 103b.

The structure of the mounting table 103 of the light amount measuring device 3 is not limited to the structure illustrated in FIGS. 3 and 4, and may be the following structure.

As shown in Fig. 18, the mounting table 103 of the application example has a reflecting plate 103c located under the glass table 103a.

The reflecting plate 103c is formed into a substantially uniform flat plate shape using a regular reflection material. For example, the reflecting plate 103c is preferably formed of a specular reflection material having a reflectance of 90% or more.

Further, when the reflector 103c is provided, the mounting table 103 of the application example does not have the glass table 103a.

The glass table 103a of the application example shown in Fig. 18 is the same as the modification 2 and the modification 3, and is the same as the glass table 103a of the light amount measuring device 3 shown in Figs. 3 and 4 .

The dicing sheet 103b of this application example is also the same as the modification 2 and the modification 3, and may be a general colored dicing sheet, preferably a transparent dicing sheet.

The other structure in the mounting table 103 of the application example is the same as that of the mounting table 103 shown in FIGS. 3 and 4.

The light receiving module 1 of the application example has the same structure as the light receiving module 1 shown in FIGS. 3 and 4, and is disposed on the upper surface side of the LED 101.

The mounting table 103 in the light amount measuring device 3 of the application example is suitable for measuring the amount of light emitted from the "upper light emitting type" LED 101.

Further, the light receiving module 1 (see FIG. 15) having the integrating sphere 108 may be applied to the light receiving module 1 of the application example.

The measurement range setting mechanism in the light amount measuring device 3 of the application example is the same as the light receiving range setting mechanism shown in one of FIGS. 10 to 14. The illustration of the measurement range setting mechanism is omitted in Fig. 18 .

The light amount measuring device 3 of the application example sets the measurement range to 0 ° ≦ θ ≦ 75 ° ± 10 ° (0 ° ≦ θ ≦ 65 ° to 0 ° ≦ θ ≦ 85 °) by the measurement range setting means. With this setting, the light receiving module 1 can receive light of a range of θ=75°±10° (0°≦θ≦65° to 0°≦θ≦85°) among the light emitted from the LED 101, And measure the amount of light.

Further, the light amount measuring device 3 of the application example also obtains the same result as the light amount measurement results described with reference to FIGS. 6 to 9. Therefore, setting the measurement angle θ to θ=75°±10° has a criticality.

The other structure of the light amount measuring device 3 of the application example is the same as that of the light amount measuring device 3 shown in Figs. 3 and 4 .

The above-described embodiments are merely preferred embodiments of the present invention, and the present invention is not limited to the above-described embodiments, and various changes or modifications may be made without departing from the scope of the present invention. Modifications, and techniques such as the embodiments and the modifications can be combined with each other.

When the LED 101 is the "upper light-emitting type" and the light amount of the LED 101 is measured when the reflective film is formed on the lower surface, the light amount measuring device 3 including the light-receiving module 1 on the upper surface side thereof is preferably used. For example, the light amount measuring device 3 shown in Figs. 3 and 4, the light amount measuring device 3 of the first modification shown in Fig. 15, and the like.

When the amount of light is measured when the LED 101 is the "upper light-emitting type" and the reflective film is not provided on the lower surface, it is preferable to use the light-amount measuring device 3 including the light-receiving module 1 on the upper surface side and the reflecting plate 103c, or both the upper side and the lower side. The light amount measuring device 3 having the light receiving module 1 is provided. For example, the light amount measuring device 3 of the application example shown in Fig. 18, and the light amount measuring device 3 of the modified example 3 shown in Fig. 17 and the like.

In the measurement of the amount of light when the LED 101 is in the "lower illumination type", it is preferable to use the light amount measuring device 3 including the light receiving module 1 on the lower side thereof or the light amount measuring device 3 having the light receiving module 1 on both the upper side and the lower side. For example, the light amount measuring device 3 of the second modification shown in FIG. 16 and the light amount measuring device 3 of the third modification shown in FIG.

When the amount of light of the LED 101 is "double-sided illumination type", it is preferable to use the light amount measuring device 3 having the light receiving module 1 on both the upper side and the lower side, or the light receiving module 1 on the upper side thereof and the reflecting plate 103c. Light quantity measuring device 3. For example, the light amount measuring device 3 of the third modification shown in Fig. 17 and the light amount measuring device 3 of the application example shown in Fig. 18 are used.

However, the above combinations are merely illustrative and do not exclude other combinations. The combination can be appropriately combined with the implementation device.

<Structure and Effect of Embodiment>

The light quantity measuring device 3 of the light-emitting diode according to the present embodiment includes a light receiving module 1 that is disposed to face the LED 101, receives the radial light emitted from the LED 101, and measures the amount of light; a needle 109 for supplying electric power to the LED 101 to cause the LED 101 to emit light, and a light receiving range setting mechanism for subjecting the light receiving module 1 to light emitted from the LED 101 according to an angle with respect to the central axis LCA of the LED 101 The range of the light light, that is, the light receiving range, is set in which a plurality of LEDs 101 are arranged on one of the dicing sheets 103b, and the light receiving range setting means sets the light receiving range when the light receiving module 1 receives the light emitted from the plurality of arranged LEDs 101. The measurement error of the amount of received light is equal to or less than a predetermined ratio regardless of the arrangement pattern of the LEDs 101 arranged in a plurality of rows.

With this configuration, the light amount measuring device 3 can realize high-accuracy measurement with a simple configuration.

Further, the light receiving module 1 and the LEDs 101 are arranged substantially in parallel, and the light receiving range setting means sets the range of light having an angle of 0° or more and 75°±10° or less among the lights emitted from the LEDs 101 as the light receiving range.

With this configuration, the light amount measuring device 3 can realize high-accuracy measurement with a simple structure, and can stably and quickly measure the amount of light of the plurality of LEDs 101 arranged in a wafer shape.

Further, the light receiving range setting mechanism has a moving mechanism that moves one or both of the mounting table 103 or the light receiving module 1 on which the dicing sheet 103b is placed, and adjusts the angle by the moving mechanism to set the light receiving range.

With this configuration, the light amount measuring device 3 can realize high-speed, high-accuracy, and stable measurement using a simpler structure.

Further, the light receiving range setting means has an aperture 124 disposed between the LED 101 and the light receiving module 1 for shielding a portion of the light emitted from the LED 101, and the aperture 124 is used to adjust the angle to set the light receiving range.

With this configuration, the light amount measuring device 3 can realize high-speed, high-accuracy, and stable measurement using a simpler structure.

Further, the light receiving range setting mechanism has a reflector 123 disposed between the LED 101 and the light receiving module 1 for reflecting the light emitted from the LED 101 to the light receiving module 1 and adjusting the angle by the reflector 123 to set Light receiving range.

With this configuration, the light amount measuring device 3 can realize high-speed, high-accuracy, and stable measurement using a simpler structure.

Further, the light receiving range setting mechanism has a Fresnel lens 126 disposed between the LED 101 and the light receiving module 1 for refracting light emitted from the LED 101 to the light receiving module 1 and adjusting by the Fresnel lens 126. This angle sets the light receiving range.

With this configuration, the light amount measuring device 3 can realize high-speed, high-accuracy, and stable measurement using a simpler structure.

The light-quantity measuring device 3 of the light-emitting diode according to the present embodiment includes a light-receiving module 1 that is disposed to face the LEDs 101 substantially in parallel, and receives the radial light emitted from the LEDs 101, and measures the amount of light. a probe 109 for supplying electric power to the LED 101 to cause the LED 101 to emit light, and a light receiving range setting mechanism for causing the light receiving mode to be emitted from the light emitted from the LED 101 according to an angle with respect to the central axis of the light emission LCA of the LED 101 The range of the light received by the group 1 is the light receiving range, and a plurality of LEDs 101 are arranged on one of the dicing sheets 103b. The light receiving range setting means selects light from the LED 101 at an angle of 0° or more and 75°±10° or less. The range is set to the light receiving range.

With this configuration, the light amount measuring device 3 can realize the high-precision, stable, and rapid measurement of the amount of light of the plurality of LEDs 101 arranged in a wafer shape with a simpler configuration.

In the method for measuring the amount of light of the light-emitting diode according to the present embodiment, one LED 101 is measured by a light receiving module 1, and the light receiving module 1 is disposed opposite to the plurality of LEDs 101 arranged on the dicing sheet 103b, and is received by the LED 101. Radial light having the following steps: a light-emitting step of supplying power to the LED 101 to cause the LED 101 to emit light; and a measurement range setting step of emitting the light from the LED 101 according to an angle with respect to the light-emitting central axis LCA of the LED 101 The light range received by the light receiving module 1 is set in the light; and a measuring step is performed to measure the amount of light received by the light receiving module 1 , wherein the light receiving range setting step is received by the light receiving module 1 When the light emitted from the plurality of LEDs 101 is arranged, the light receiving range is set to be equal to or smaller than a predetermined ratio of the amount of light of the received light regardless of the arrangement pattern of the plurality of arranged LEDs 101.

With this configuration, the light amount measuring method of the present embodiment can utilize a simple structure. High precision measurement is now available.

The light quantity measuring device 3 of the light-emitting diode according to the present embodiment includes a light receiving module 1 that receives the radial light emitted from the LED 101 and measures the amount of light thereof. A probe 109 is used. Supplying power to the LED 101 to cause the LED 101 to emit light; and a measurement range setting mechanism for making the range of light measured by the light receiving module 1 among the light emitted from the LED 101 based on the angle of the light emission center axis LCA with respect to the LED 101 The measurement range is set, and a plurality of LEDs 101 are arranged on one dicing sheet 103b, and the measurement range setting means sets the light range from the maximum value of the angle of light emitted from the LED 101 to 75 ° ± 10 ° as the measurement range.

With this configuration, the light amount measuring device 3 can realize the high-precision, stable, and rapid measurement of the amount of light of the plurality of LEDs 101 arranged in a wafer shape with a simpler configuration.

The light amount measuring method of the light-emitting diode according to the present embodiment is characterized in that one LED 101 is measured using a light receiving module 1, and the light receiving module 1 is opposed to the plurality of LEDs 101 arranged on the cutting piece 103b, and receives radiation emitted from the LED 101. The light having the following steps: a light-emitting step of supplying power to the LED 101 to cause the LED 101 to emit light; and a measuring range setting step of light emitted from the LED 101 according to an angle with respect to the central axis of the light-emitting axis LCA of the LED 101 The measurement range is set in the light range measured by the light receiving module 1, and the measurement step measures the amount of light received by the light receiving module 1, and the angle in the measurement range setting step is the largest among the emitted light. A light range of 75 ° ± 10 ° is set as the measurement range.

With this configuration, the light amount measuring method of the present embodiment can realize the high-precision, stable, and rapid measurement of the amount of light of the plurality of LEDs 101 arranged in a wafer shape with a simpler structure.

1‧‧‧ light receiving module

101‧‧‧Lighting diode

103‧‧‧Loading table

103a‧‧‧glass table

103b‧‧‧cutting piece

105‧‧‧Photodetector

107‧‧‧ Keeping Department

107a‧‧‧Shading Department

107b‧‧‧ Side section

107c‧‧‧Circular opening

109‧‧‧Probe

111‧‧‧Signal line

113‧‧‧Amplifier

115‧‧‧Communication line

LCA‧‧‧Lighting Center Shaft

Claims (9)

A light amount measuring device for measuring a light emitting diode, comprising: a light receiving portion disposed to face the light emitting diode, receiving the radial light emitted by the light emitting diode, and measuring the amount of light a probe for supplying power to the light emitting diode to cause the light emitting diode to emit light, and a light receiving range setting mechanism according to an angle with respect to a central axis of the light emitting diode The light emitted by the light-emitting diode sets a range of light that is received by the light-receiving portion, that is, a light-receiving range; wherein the light-receiving portion is disposed substantially in parallel with the light-emitting diode; and a plurality of the light-emitting diodes are arranged; When the light receiving unit receives the light emitted from the plurality of arranged light emitting diodes, the light receiving range setting means sets the angle of the emitted light to be 0° or more and 75°±10° or less. The light receiving range is set such that the measurement error of the received light amount is equal to or less than a predetermined ratio regardless of the arrangement pattern of the plurality of arrays of the light emitting diodes. The light amount measuring device according to claim 1, wherein the light receiving range setting means has a moving mechanism for moving one or both of the mounting table on which the light emitting diode is placed or the light receiving portion, and utilizing The moving mechanism adjusts the angle to set the light receiving range. The light quantity measuring device of claim 1, wherein the light receiving range setting mechanism has an aperture disposed between the light emitting diode and the light receiving portion to shield a portion of the emitted light, and the aperture is adjusted by the aperture Angle, set the light receiving range. The light quantity measuring device of claim 1, wherein the light receiving range setting mechanism has a reflector disposed between the light emitting diode and the light receiving portion for use in the transmitting The emitted light is reflected to the light receiving portion, and the angle is adjusted by the reflector to set the light receiving range. The light quantity measuring device of claim 1, wherein the light receiving range setting mechanism has a Fresnel lens disposed between the light emitting diode and the light receiving portion for refracting the emitted light to the light receiving portion The angle is adjusted by the Fresnel lens to set the light receiving range. A light amount measuring device for measuring a light emitting diode, comprising: a light receiving portion that is disposed to face substantially parallel to the light emitting diode, and receives the radial light emitted by the light emitting diode, and Measuring a light amount; a probe for supplying electric power to the light emitting diode to cause the light emitting diode to emit light; and a light receiving range setting mechanism according to a central axis of the light emitting relative to the light emitting diode The angle is set in a range of light emitted by the light-emitting diode, that is, a light-receiving range, wherein a plurality of the light-emitting diodes are arranged; and the light-receiving range setting means emits the light The range of light in which the angle is 0° or more and 75°±10° or less is set as the light receiving range. A method for measuring the amount of light is a method for measuring the amount of light of a light-emitting diode, and a light-receiving mechanism is disposed to face a plurality of aligned light-emitting diodes, and receives radial light emitted from the light-emitting diode. The method has the following steps: a light-emitting step of supplying power to the light-emitting diode to cause the light-emitting diode to emit light; and a light-receiving range setting step according to an angle with respect to a central axis of the light-emitting diode And setting a light receiving range which is a range of light emitted by the light receiving means among the light emitted from the light emitting diode; and a measuring step of measuring a light amount of light received by the light receiving means; In the light receiving range setting step, when the light receiving means receives light emitted from the plurality of arranged light emitting diodes, the angle of the emitted light is 0° or more and 75°±10° or less. The range is set to the light receiving range such that the measurement error of the received light amount is equal to or less than a predetermined ratio regardless of the arrangement pattern of the plurality of arrays of the light emitting diodes. A light quantity measuring device for measuring a light emitting diode, comprising: a light receiving unit that receives the radial light emitted from the light emitting diode and measures the amount of light; and a probe that supplies power a light emitting diode to cause the light emitting diode to emit light; and a measuring range setting mechanism for emitting light to the light emitting diode according to an angle with respect to a central axis of the light emitting diode The measurement range is set in the light range measured by the light receiving unit; wherein the plurality of light emitting diodes are arranged; the measurement range setting mechanism has a maximum value of the angle of the emitted light of 75°±10° The light range is set to the measurement range. A method for measuring the amount of light, which is a method for measuring the amount of light of a light-emitting diode, which receives a radial light emitted from a plurality of arranged light-emitting diodes using a light-receiving mechanism, and has the following steps: a light-emitting step Supplying electric power to the light emitting diode to cause the light emitting diode to emit light; a measuring range setting step of emitting light to the light emitting diode according to an angle with respect to an emission central axis of the light emitting diode The light range measured by the light receiving means, that is, the measurement range is set; and a measuring step of measuring the amount of light received by the light receiving means; The measurement range setting step sets the light range of the maximum value of the angle of the emitted light to 75°±10° as the measurement range.