TWI759864B - Detection apparatus and light-receiving device thereof - Google Patents

Abstract

The present invention provides a detection apparatus and a light-receiving device thereof. The light-receiving device includes a telecentric lens assembly, an image processing module, and a calculation module. The telecentric lens assembly has a light entrance end and a light exit end, and is configured to guide a plurality of first light beams, which are emitted from a plurality of lighting chips and travel therein by passing through the light entrance end, to travel out of the light exit end so as to form a plurality of second light beams each having a smaller divergence angle. The image processing module is disposed on the light exit end of the telecentric lens assembly for receiving and processing each of the second light beams to calculate a RGB gray scale value of the corresponding lighting chip. The calculation module is electrically coupled to the image processing module for receiving the RGB gray scale value of each of the lighting chips to calculate a light parameter of each of the lighting chips.

Description

Detection equipment and its light-receiving device

The present invention relates to a detection device, in particular to a detection device capable of simultaneously detecting a plurality of light-emitting wafers and a light-receiving device thereof.

Existing inspection equipment for detecting a plurality of light-emitting chips, which takes the sum of the light emitted by a plurality of the light-emitting chips as a single surface light source, and then divides the sum of the light parameters inferred according to the surface light source by a plurality of The number of the light-emitting wafers is used as the light parameter of each light-emitting wafer. That is to say, the existing detection equipment cannot individually detect the light parameters of one of the light-emitting wafers among the plurality of light-emitting wafers.

Therefore, the inventor believes that the above-mentioned defects can be improved. Nate has devoted himself to research and application of scientific principles, and finally proposes an invention with reasonable design and effective improvement of the above-mentioned defects.

The embodiments of the present invention provide a detection device and a light-receiving device thereof, which can effectively improve the defects that may occur in the existing detection device.

The embodiment of the present invention discloses a detection device, which includes: an electrical detection device, including: a probe card; an optical alignment module, the position of which corresponds to the probe card; Corresponding to the probe card, and the light-transmitting carrier plate is used to carry a plurality of light-emitting wafers A bearing surface and a light emitting surface on the opposite side of the bearing surface; wherein, the probe card can be used to simultaneously supply power and electrically detect the transparent a plurality of the light-emitting chips on the optical carrier, so that each of the light-emitting chips emits a first light beam with a first divergence angle toward the light-emitting surface; and a light-receiving device disposed adjacent to the light-emitting surface The light-emitting surface of the light-transmitting carrier disc, and the light-receiving device includes: a telecentric lens group, which includes a light-incoming end and a light-emitting end; wherein, the telecentric lens group is used to guide the light from the light-emitting a plurality of the first rays of light that pass through the light-incident end and penetrate into it, and make the plurality of first rays pass through the light-emitting end to form a plurality of second rays; wherein, each The second divergence angle of the second light is smaller than the first divergence angle corresponding to the first light; an image processing module is disposed at the light-emitting end of the telecentric lens group for receiving and process each of the second light rays passing through the light-emitting end to calculate the corresponding RGB grayscale value of the light-emitting chip; and an arithmetic module electrically coupled to the image processing The module is used for receiving the RGB grayscale values of each of the light-emitting chips and calculating the light parameters of each of the light-emitting chips.

The embodiment of the present invention also discloses a light receiving device of a detection device, which includes: a telecentric lens group, which includes a light entrance end and a light output end; wherein, the telecentric lens group is used to guide the light emitted by a plurality of light-emitting chips And a plurality of first rays penetrate into it from the light entrance end, and make a plurality of the first rays pass through the light exit end and form a plurality of second rays that do not overlap each other; wherein, each The second divergence angle of the second light is smaller than the first divergence angle corresponding to the first light; an image processing module, which is arranged at the light output end of the telecentric lens group, is used to receive and process the self Each of the second rays of light emitted from the light-emitting end is used to calculate the corresponding RGB grayscale value of the light-emitting chip; and an arithmetic module is electrically coupled to the image processing module, It is used to receive the RGB grayscale values of each of the light-emitting chips and calculate the light parameters of each of the light-emitting chips.

To sum up, in the detection device and the light receiving device disclosed in the embodiments of the present invention, the telecentricity is disposed before the light of the plurality of light-emitting chips enters the image processing module. a lens group to separate the light of a plurality of the light-emitting chips through the telecentric lens group, and the light of each light-emitting chip can be independently detected by the image processing module and the calculation module, and then Know the light parameters of each of the light-emitting wafers.

In order to further understand the features and technical content of the present invention, please refer to the following detailed description and accompanying drawings of the present invention, but these descriptions and drawings are only used to illustrate the present invention, rather than make any claims to the protection scope of the present invention. limit.

100: Testing equipment

1: Electrical testing device

11: Probe card

12: Optical alignment module

13: Translucent carrier disc

131: Bearing surface

132: light-emitting surface

14: Transfer module

2: Light receiving device

21: Telecentric lens group

211: Lighting end

212: light output end

22: Image processing module

221: Image receiver

222: Signal processing unit

23: Calculation module

24: ND filter

25: Beamsplitter

26: Spectrometer

200: Luminous Chip

300: Carrier

L1: first ray

σ1: first divergence angle

L2: second ray

σ2: Second divergence angle

FIG. 1 is a schematic diagram of a detection device according to Embodiment 1 of the present invention.

FIG. 2 is a partial schematic view of FIG. 1 .

FIG. 3 is a partial schematic view of FIG. 2 .

FIG. 4 is a partial schematic diagram of a detection device according to Embodiment 2 of the present invention.

FIG. 5 is a partial schematic view of FIG. 4 .

The following are specific embodiments to illustrate the embodiments of the “detection device and its light-receiving device” disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to the actual size, and are stated in advance. The following embodiments will further describe the related technical contents of the present invention in detail, but the disclosed contents are not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", "third" and the like may be used herein to describe various elements or signals, these elements or signals should not be subject to these terms. These terms are primarily used to distinguish one element from another element, or a signal from another signal. In addition, the term "or", as used herein, should include any one or a combination of more of the associated listed items, as the case may be.

[Example 1]

Please refer to FIG. 1 to FIG. 3 , which are Embodiment 1 of the present invention. This embodiment discloses a detection apparatus 100, which can simultaneously detect electrical properties and optical parameters of a plurality of light-emitting wafers 200 (eg, light-emitting diode wafers). The detection apparatus 100 includes an electrical detection device 1 and a light receiving device 2 disposed adjacent to the electrical detection device 1 .

It should be noted that the light receiving device 2 is described as being matched with the electrical detection device 1 in this embodiment, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the light receiving device 2 can also be used alone (eg, sold) or used in conjunction with other devices (eg, different from the electrical detection device in this embodiment). 1 of other detection devices).

The electrical detection device 1 includes a probe card 11 , an optical alignment module 12 (eg, a photosensitive coupling element, CCD) whose position corresponds to the probe card 11 , and the position is the same as that of the probe card 11 . Correspondingly, a transparent carrier plate 13 and a transfer module 14 are provided. The probe card 11 , the optical alignment module 12 , and the transparent carrier plate 13 may be installed on the transfer module 14 , so that the probe card 11 can pass through the transfer module 14 and multi-axial displacement.

Furthermore, the type of the probe card 11 can be adjusted and changed according to the design requirements. For example, the probe card 11 can be a cantilever probe card, a vertical probe card, or a MEMS probe card. The invention is not limited herein. The optical alignment module 12 and the transparent carrier plate 13 are respectively located on opposite sides of the probe card 11, so that the optical alignment module 12 can detect the probe card 11 and the probe card 11. The relative position of the light-transmitting carrier disc 13 .

In more detail, the light-transmitting carrier 13 is transparent in this embodiment, and the light-transmitting carrier 13 has a carrier surface 131 for carrying a plurality of light-emitting chips 200 and a carrier surface 131 located on the carrier. A light emitting surface 132 on the opposite side of the surface 131 . Wherein, the number of the light-emitting chips 200 that can be carried by the light-transmitting carrier 13 is preferably more than 100 and disposed on a carrier 300 (eg, a blue adhesive film), but the present invention is not limited to limited to this. For example, in other embodiments not shown in the present invention, the light-transmitting carrier 13 can also be used to carry a plurality of light-emitting chips 200 that are not arranged on any carrier; alternatively, the light-transmitting carrier 13 The number of the plurality of light-emitting chips 200 that can be used to carry the light-emitting chips 200 may also be less than 100.

According to the above, the probe card 11 can be used for power supply and electrical detection (such as voltage, current, and power) of the light-transmitting carrier at the same time after being aligned by the optical alignment module 12 . The plurality of light-emitting chips 200 on the disk 13 make each of the light-emitting chips 200 emit a first light beam L1 with a first divergence angle σ 1 toward the light-emitting surface 132 . Wherein, the first divergence angle σ 1 of each of the first light rays L1 is described in this embodiment as 110 degrees to 130 degrees, but the present invention is not limited to this.

The light-receiving device 2 is disposed adjacent to the light-emitting surface 132 of the light-transmitting carrier 13 ; that is, the light-receiving device 2 is located on the light-emitting path of each of the light-emitting chips 200 . Further, when the two first light rays L1 emitted by any two adjacent light-emitting chips 200 reach the light-receiving device 2 in this embodiment, it is illustrated that they partially overlap each other. But this creation is not limited to this. For example, in other embodiments not shown in the present invention, when the two first rays L1 emitted by any two adjacent light-emitting chips 200 reach the light-receiving device 2 , the can be non-overlapping with each other.

In this embodiment, the light receiving device 2 includes a telecentric lens group 21 , an image processing module 22 located on one side of the telecentric lens group 21 , and an image processing module 22 electrically coupled to the image processing module 22 . Calculation module 23.

It should be noted that the shortest distance between the light-receiving device 2 and the light-transmitting carrier plate 13 (eg, the distance between the light-incident end 211 and the light-emitting surface 132 ) may be between 80 mm (mm)~150 mm, but this value can be adjusted and changed according to design requirements, and is not limited to this embodiment.

The telecentric lens group 21 may be composed of a plurality of lenses matched with each other, and the telecentric lens group 21 includes a light entrance end 211 adjacent to the light exit surface 132 and a light exit end 211 away from the light entrance end 211 . end 212 ; that is, the light incident end 211 is located on the light exit path of each of the light-emitting chips 200 .

Furthermore, the telecentric lens group 21 is used to guide a plurality of the first light beams L1 passing through the light exit surface 132 and entering from the light incident end 211 , and make the plurality of first light beams L1 . A light L1 exits from the light-emitting end 212 to form a plurality of second lights L2. Wherein, the second divergence angle σ 2 of each second light ray L2 is smaller than the first divergence angle σ 1 corresponding to the first light ray L1 .

Further, the second divergence angle σ 2 in this embodiment is within 10 degrees (eg, 1 to 3 degrees), so that the plurality of second light rays L2 can not overlap each other, so that Mutual interference between multiple second light beams L2 is effectively avoided. For example, in this embodiment, the telecentric lens group 21 of the light receiving device 2 can be used to simultaneously guide more than 100 light-emitting chips 200 (located on the light-transmitting carrier plate 13 ) to emit light. to form more than 100 non-overlapping second light rays L2, but the invention is not limited to this. For example, in other embodiments not shown in the present invention, the telecentric lens group 21 can be used to guide a plurality of the first light beams L1 overlapping each other, so as to form a light beam with a lower degree of overlap. A plurality of the second light beams L2 are used to reduce mutual interference between the plurality of the second light beams L2.

The image processing module 22 is disposed at the light-emitting end 212 of the telecentric lens group 21, and is used for receiving and processing each of the second light rays L2 passing through the light-emitting end 212, so as to calculate the corresponding RGB grayscale values of the light-emitting chip 200. Furthermore, the calculation module 23 is electrically coupled to the image processing module 22 for receiving the RGB grayscale values of each of the light-emitting chips 200 and calculating the value of each of the light-emitting chips 200 . light parameters.

More specifically, the image processing module 22 in this embodiment includes an image receiver 221 (eg, a color photosensitive coupling element) adjacent to the light output end 212 and electrically coupled to the image receiver 221 and a signal processing unit 222 of the calculation module 23, but the present invention is not limited to this. Wherein, the image receiver 221 can receive any one of the second light rays L2 with its multiple pixels (pixels) to generate a light-emitting chip image correspondingly, and the signal processing unit 222 can be used for each light-emitting chip. The image is subjected to image processing to calculate the corresponding RGB grayscale values (0~65536 colors).

Wherein, in this embodiment, the signal processing unit 222 processes the light-emitting wafer images corresponding to all light-emitting wafers 200 synchronously, but the light-emitting wafer images of each light-emitting wafer 200 are individually processed by the signal processing unit 222 that is, each of the light-emitting wafer images can be independently processed by the signal processing unit 222, and the processing procedure is described below. Each of the light-emitting chip images belonging to the Tiff image file is sequentially passed through the steps of: converting RGB images, grayscale, blurring, and binarization, and then converting and drawing each of the light-emitting chip images of interest A region of interest (ROI) image is then used to calculate the corresponding RGB grayscale values, but the invention is not limited to this.

Accordingly, in the present embodiment, the detection apparatus 100 can be provided with the detection device 100 before the light from a plurality of the light-emitting chips 200 (eg, a plurality of the first light rays L1 ) enter the image processing module 22 . The telecentric lens group 21 is used to separate the light of a plurality of the light-emitting chips 200 through the telecentric lens group 21 (eg, multiple channels of the second light L2 ), so that the light of each light-emitting chip 200 (eg : The second light L2) can be independently detected by the image processing module 22 and the calculation module 23, and then the light parameters of each of the light-emitting chips 200 can be obtained.

[Example 2]

Please refer to FIG. 4 and FIG. 5 , which is the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be repeated. The difference from the first embodiment above mainly lies in the light receiving device 2 .

In this embodiment, the light receiving device 2 further includes a dimming mirror 24 located between the light incident end 211 and the light exit surface 132 , and a beam splitter 25 connected to the telecentric lens group 21 . , and a spectrometer 26 located between the beam splitter 25 and the calculation module 23 . Wherein, the dimming mirror 24 and the image processing module 22 are respectively located on opposite sides of the telecentric lens group 21, and the dimming mirror 24 is arranged on the The light incident end 211 of the telecentric lens group 21 is described above, and is used to reduce the light intensity of each of the first light rays L1.

That is to say, in this embodiment, the light receiving device 2 can attenuate the light intensity of each of the first light rays L1 passing therethrough through the dimming mirror 24, so as to avoid the first light rays The light intensity of L1 is too high, which affects the measurement accuracy of the rear components (eg, the image processing module 22 and the spectrometer 26 ). For example, the dimming mirror 24 can attenuate the light intensity of each of the first light rays L1 to below 80% of the maximum intensity that the image processing module 22 (or the spectrometer 26 ) can bear, However, the present invention is not limited to this.

The beam splitter 25 is connected to the telecentric lens group 21 for receiving each of the second light rays L2. The position of the beam splitter 25 corresponds to the image processing module 22 and the spectrometer 26 , so that each second light L2 received by the beam splitter 25 is guided to the image processing module 22 . 26 with the spectrometer. Furthermore, the beam splitter 25 is built in the telecentric lens group 21 in this embodiment, but the present invention is not limited to this.

Furthermore, the spectrometer 26 can calculate an average spectrum of the plurality of light-emitting chips 200 according to the plurality of second light beams L2 received by the spectrometer 26, and the spectrometer 26 is electrically coupled to the calculation module. The group 23 is used to transmit the calculated average spectrum to the calculation module 23 . Accordingly, the calculation module 23 can calculate the light parameters (eg, peak length or half-wave width) of each of the light-emitting chips 200 according to the RGB grayscale values and the average spectrum.

To put it another way, the calculation module 23 can calculate the average spectrum The obtained light parameter of the light-emitting chip 200 is used as a reference reference value, and the light parameter of each light-emitting chip 200 is calculated by using the reference reference value to correct each of the RGB grayscale values. ; After that, the calculation module 23 calculates the light parameters (eg, peak length or half-wave width) of each of the light-emitting chips 200 according to the preset design requirements.

Accordingly, the light receiving device 2 can use the image processing module 22 and the spectrometer 26 with different detection methods, so that the calculation module 23 can pass the average obtained by the spectrometer 26 . The spectrum is used to correct the RGB grayscale values of each of the light-emitting chips 200 calculated by the image processing module 22 , so as to obtain more accurate light parameters of each of the light-emitting chips 200 .

It should be added that although the light receiving device 2 is described in this embodiment as including the above components, the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the light receiving device 2 may also selectively omit the dimming mirror 24 , the spectroscope 25 , and the spectrometer 26 according to design requirements at least one of them.

[Technical effects of the embodiments of the present invention]

To sum up, in the detection device and the light receiving device thereof disclosed in the embodiments of the present invention, the telecentric lens group is provided before the light from a plurality of the light-emitting chips enters the image processing module, so as to pass the light from the light-emitting chips. A telecentric lens group is used to separate the light of a plurality of the light-emitting chips, and the light of each light-emitting chip can be independently detected by the image processing module and the calculation module, and then the light of each light-emitting chip can be known. Optical parameters of the wafer.

Furthermore, in the detection device and the light-receiving device thereof disclosed in the embodiments of the present invention, the telecentric lens group is used to generate multiple first rays of light to form multiple second rays with smaller divergence angles. Mutual interference between multiple second light beams is effectively avoided. Wherein, the telecentric lens group is preferably capable of forming a plurality of the partially overlapping first rays of light to form a plurality of the second rays of light which do not overlap each other.

In addition, in the detection device and the light-receiving device thereof disclosed in the embodiments of the present invention, a dimming mirror can be arranged between the light-incident end of the telecentric lens group and the light-emitting surface of the light-transmitting carrier disk , so that the light intensity of each first light passing through the ND filter is attenuated, so as to prevent the light intensity of the first light from being too high and affecting the rear components (such as the image processing module and the the measurement accuracy of the spectrometer).

In addition, the detection device and the light-receiving device thereof disclosed in the embodiments of the present invention employ the image processing module and the spectrometer with different detection methods, so that the calculation module can obtain the result obtained by the spectrometer. The average spectrum is used to correct the RGB grayscale values of each of the light-emitting chips calculated by the image processing module, so that more accurate light parameters of each of the light-emitting chips can be obtained.

The content disclosed above is only a preferred feasible embodiment of the present invention, and is not intended to limit the patent scope of the present invention. Therefore, any equivalent technical changes made by using the contents of the description and drawings of the present invention are included in the patent scope of the present invention. Inside.

13: Translucent carrier disc 131: Bearing surface 132: Light-emitting surface 2: Light receiving device 21: Telecentric lens group 211: light-in side 212: light output end 22: Image processing module 221: Image Receiver 222: Signal Processing Unit 23: Calculation module 24: ND filter 25: Beamsplitter 26: Spectrometer 200: Luminous Chip 300: Carrier

Claims (10)

A detection device comprising: An electrical detection device, including: a probe card; an optical alignment module, the position of which corresponds to the probe card; a light-transmitting carrier, the position of which corresponds to the probe card, and the light-transmitting carrier has a carrier surface for carrying a plurality of light-emitting chips and a light-emitting surface on the opposite side of the carrier surface; Wherein, the probe card can be used to simultaneously supply power and electrically detect a plurality of the light-emitting chips on the light-transmitting carrier after being aligned by the optical alignment module, so that each the light-emitting chip emits a first light with a first divergence angle toward the light-emitting surface; and A light-receiving device, which is disposed adjacent to the light-emitting surface of the light-transmitting carrier, and the light-receiving device includes: A telecentric lens group, which includes a light entrance end and a light exit end; wherein, the telecentric lens group is used to guide the multiple channels of the light passing through the light exit surface and entering it from the light entrance end. the first light rays, and make a plurality of the first light rays pass out from the light-emitting end to form a plurality of second light rays; wherein, the second divergence angle of each of the second light rays is smaller than that of the corresponding first light rays the first divergence angle of ; an image processing module, disposed at the light-emitting end of the telecentric lens group, for receiving and processing each of the second light rays passing through the light-emitting end, so as to calculate the corresponding light emission the RGB grayscale values of the chip; and A calculation module, which is electrically coupled to the image processing module, is used for receiving the RGB grayscale values of each of the light-emitting chips and calculating light parameters of each of the light-emitting chips. The detection device according to claim 1, wherein the light-receiving device further comprises a light-reducing device located between the light-incident end of the telecentric lens group and the light-emitting surface of the light-transmitting carrier disk and the dimming filter is used to reduce the light intensity of each of the first light rays. The detection device according to claim 1, wherein the light receiving device further comprises: a spectrometer electrically coupled to the calculation module; and a beam splitter connected to the telecentric lens group and used for receiving each of the second light rays; wherein, the position of the beam splitter corresponds to the image processing module and the spectrometer, and is used for the beam splitter to receive Each of the second light rays is guided to the image processing module and the spectrometer; Wherein, the spectrometer can calculate an average spectrum of a plurality of the light-emitting chips according to the plurality of channels of the second light received by the spectrometer; the calculation module can calculate an average spectrum according to the RGB grayscale value and the average spectrum , and calculate the light parameters of each of the light-emitting wafers. The detection device according to claim 1, wherein the image processing module comprises: an image receiver adjacent to the light-emitting end of the telecentric lens group, and the image receiver can receive any one of the second light rays with its plurality of pixels to correspondingly generate a light-emitting chip image; and a signal processing unit electrically coupled to the image receiver and the computing module; the signal processing unit can be used to perform image processing on each of the light-emitting chip images to calculate the corresponding RGB grayscale value. The testing apparatus according to claim 1, wherein the number of the light-emitting chips that can be carried by the light-transmitting carrier plate is more than 100 and is arranged on a carrier, and all the light-receiving devices The telecentric lens group can be used to simultaneously guide multiple channels of the first light rays emitted by more than 100 of the light-emitting chips, so as to form more than 100 channels of the second lights that do not overlap each other. A light-receiving device of a detection device, comprising: A telecentric lens group, which includes a light entrance end and a light exit end; wherein, the telecentric lens group is used to guide a plurality of first rays emitted by a plurality of light-emitting chips and penetrated from the light entrance end. , and make a plurality of the first rays pass through the light-emitting end to form a plurality of second rays; wherein, the second divergence angle of each of the second rays is smaller than the corresponding first rays of the first rays. divergence angle; an image processing module, disposed at the light-emitting end of the telecentric lens group, for receiving and processing each of the second light rays passing through the light-emitting end, so as to calculate the corresponding light emission the RGB grayscale values of the chip; and A calculation module, which is electrically coupled to the image processing module, is used for receiving the RGB grayscale values of each of the light-emitting chips and calculating light parameters of each of the light-emitting chips. The light-receiving device of the detection device according to claim 6, wherein the light-receiving device further comprises a light-receiving device located between the light-incident end of the telecentric lens group and the light-emitting surface of the light-transmitting carrier disk A dimming mirror is provided, and the dimming mirror is used to reduce the light intensity of each of the first light rays. The light-receiving device of the detection equipment according to claim 6, wherein the light-receiving device further comprises: a spectrometer electrically coupled to the calculation module; and a beam splitter connected to the telecentric lens group and used to receive each of the second rays; the position of the beam splitter corresponds to the image processing module and the spectrometer, and is used to make the received the second light is guided to the image processing module and the spectrometer; Wherein, the spectrometer can calculate an average spectrum of a plurality of the light-emitting chips according to the plurality of channels of the second light received by the spectrometer; the calculation module can calculate an average spectrum according to the RGB grayscale value and the average spectrum , and calculate the light parameters of each of the light-emitting wafers. The light receiving device of the detection equipment according to claim 6, wherein the image processing module comprises: an image receiver adjacent to the light-emitting end of the telecentric lens group, and the image receiver can receive any one of the second light rays with its plurality of pixels to generate a light-emitting chip image correspondingly; and a signal processing unit electrically coupled to the image receiver and the computing module; the signal processing unit can be used to perform image processing on each of the light-emitting chip images to calculate the corresponding RGB grayscale value. The light-receiving device of the inspection equipment according to claim 6, wherein the telecentric lens group of the light-receiving device can be used to simultaneously guide the multi-channels of the light-emitting chips emitted by more than 100 light-emitting chips. the first light rays to form more than 100 non-overlapping lines of the second light rays.

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