CN212674415U

CN212674415U - Detection equipment and light receiving device of detection equipment

Info

Publication number: CN212674415U
Application number: CN202022123517.3U
Authority: CN
Inventors: 李茂杉; 张伯墉; 张凯宇
Original assignee: Gallant Precision Machining Co Ltd
Current assignee: Gallant Precision Machining Co Ltd
Priority date: 2020-09-24
Filing date: 2020-09-24
Publication date: 2021-03-09
Anticipated expiration: 2030-09-24

Abstract

The utility model discloses a check out test set and check out test set receive light device, receive light device contains a telecentric lens group, an image processing module and a calculation module. Telecentric lens group includes one and goes into optical end and an optical end to be used for guiding a plurality of luminescence chips and send and certainly go into the optical end and penetrate the first light of multichannel in it, certainly the optical end is worn out and is formed less multichannel second light of dispersing the angle. The image processing module is arranged at the light emitting end of the telecentric lens group and used for receiving and processing each second light ray penetrating out of the light emitting end so as to calculate the corresponding RGB gray scale value of the light emitting chip. The calculation module is electrically coupled to the image processing module and is used for receiving the RGB gray scale values of each light emitting chip and calculating the optical parameters of each light emitting chip. Accordingly, the light receiving device is provided with the telecentric lens group to obtain the optical parameters of each light emitting chip.

Description

Detection equipment and light receiving device thereof

Technical Field

The utility model relates to a check out test set especially relates to a check out test set that can detect a plurality of luminescence chips simultaneously and receive light device thereof.

Background

The existing detection equipment for detecting a plurality of light-emitting chips is characterized in that light rays emitted by the plurality of light-emitting chips are combined to be used as a single surface light source, and then the light parameter total deduced according to the surface light source is divided by the number of the plurality of light-emitting chips to be used as a light parameter of each light-emitting chip. That is, the existing detection apparatus cannot individually detect the optical parameter of one light emitting chip among a plurality of light emitting chips.

The present inventors have considered that the above-mentioned drawbacks can be improved, and have made intensive studies and use of scientific principles, and finally have proposed a novel and effective method for improving the above-mentioned drawbacks.

SUMMERY OF THE UTILITY MODEL

An embodiment of the utility model provides a check out test set and receipts light device thereof can improve the defect that current check out test set probably produced effectively.

The embodiment of the utility model discloses check out test set, it includes: an electrical property detection device, comprising: a probe card; an optical alignment module corresponding to the probe card; the position of the light-transmitting carrier disc corresponds to the probe card, and the light-transmitting carrier disc is provided with a bearing surface for bearing the light-emitting chips and a light-emitting surface positioned on the opposite side of the bearing surface; the probe card can be used for simultaneously supplying power and electrically detecting the plurality of light-emitting chips on the light-transmitting carrier disc after the probe card is aligned by the optical alignment module, so that each light-emitting chip emits a first light ray with a first divergence angle towards the light-emitting surface; and a light receiving device, which is adjacently arranged on the light-emitting surface of the light-transmitting carrying disc, and the light receiving device comprises: a telecentric lens group which comprises a light inlet end and a light outlet end; the telecentric lens group is used for guiding a plurality of first light rays which penetrate out of the light-emitting surface and penetrate into the telecentric lens group from the light-entering end, and enabling the plurality of first light rays to penetrate out of the light-emitting end and form a plurality of second light rays; the second divergence angle of each second light ray is smaller than the first divergence angle of the corresponding first light ray; the image processing module is arranged at the light-emitting end of the telecentric lens group and used for receiving and processing each second light ray penetrating out from the light-emitting end so as to calculate the RGB gray scale value of the corresponding light-emitting chip; and an operation module, which is electrically coupled to the image processing module, for receiving the RGB gray scale value of each light emitting chip and calculating the optical parameters of each light emitting chip.

Preferably, the light receiving device further includes a light reduction mirror disposed between the light entrance end of the telecentric lens group and the light exit surface of the light transmissive carrier, and the light reduction mirror is used to reduce the light intensity of each first light ray.

Preferably, the light receiving device further includes: a spectrometer electrically coupled to the operation module; and a spectroscope connected to the telecentric lens group and used for receiving each second light ray; the position of the spectroscope corresponds to the image processing module and the spectrometer, and each second light ray received by the spectroscope is guided to the image processing module and the spectrometer; the spectrometer can calculate an average spectrum of the plurality of light-emitting chips according to the plurality of second light rays received by the spectrometer; the calculation module can calculate the optical parameters of each light-emitting chip according to the RGB gray-scale value and the average spectrum.

Preferably, the image processing module comprises: an image receiver adjacent to the light-emitting end of the telecentric lens group and capable of receiving any one of the second light rays by a plurality of pixels to correspondingly generate a light-emitting chip image; and a signal processing unit electrically coupled to the image receiver and the operation module; the signal processing unit can be used for carrying out image processing on each light-emitting chip image so as to calculate the corresponding RGB gray-scale value.

Preferably, the number of the plurality of light emitting chips that the light-transmitting carrying disc can be used to carry is more than 100, and the plurality of light emitting chips are disposed on a carrier, and the telecentric lens group of the light-receiving device can be used to simultaneously guide a plurality of first light rays emitted by more than 100 light emitting chips so as to form a plurality of second light rays that are more than 100 and are not overlapped with each other.

The embodiment of the utility model provides a also disclose a check out test set's receipts light device, it includes: a telecentric lens group which comprises a light inlet end and a light outlet end; the telecentric lens group is used for guiding a plurality of first light rays which are emitted by the plurality of light-emitting chips and penetrate into the telecentric lens group from the light-in end, and enabling the plurality of first light rays to penetrate out from the light-out end and form a plurality of second light rays; the second divergence angle of each second light ray is smaller than the first divergence angle of the corresponding first light ray; the image processing module is arranged at the light-emitting end of the telecentric lens group and used for receiving and processing each second light ray penetrating out from the light-emitting end so as to calculate the RGB gray scale value of the corresponding light-emitting chip; and an operation module, which is electrically coupled to the image processing module, for receiving the RGB gray scale values of each light emitting chip and calculating the optical parameters of each light emitting chip.

Preferably, the telecentric lens group of the light receiving device can be used for simultaneously guiding a plurality of channels of first light rays emitted by more than 100 light emitting chips so as to form a plurality of channels of second light rays which are not overlapped with each other and more than 100 channels of second light rays.

To sum up, the embodiment of the utility model discloses detection equipment and receipts light device thereof is through a plurality of the light of luminescence chip gets into be provided with before the image processing module telecentric lens group, with through telecentric lens group comes to separate a plurality ofly the light of luminescence chip, every the light of luminescence chip can be quilt alone image processing module with the calculation module detects, and then learns every the optical parameter of luminescence chip.

For a further understanding of the features and technical content of the present invention, reference should be made to the following detailed description and accompanying drawings, which are only intended to illustrate the present invention, and not to limit the scope of the present invention.

Drawings

Fig. 1 is a schematic view of a detection apparatus according to a first embodiment of the present invention.

Fig. 2 is a partial schematic view of fig. 1.

Fig. 3 is a partial schematic view of fig. 2.

Fig. 4 is a partial schematic view of a detection apparatus according to a second embodiment of the present invention.

Fig. 5 is a partial schematic view of fig. 4.

Detailed Description

The following is a description of the embodiments of the present invention with reference to the "detecting device and the light receiving device thereof" by specific embodiments, and those skilled in the art can understand the advantages and effects of the present invention from the disclosure of the present specification. The present invention may be practiced or carried out in other different embodiments, and various modifications and changes may be made in the details of this description based on the different points of view and applications without departing from the spirit of the present invention. The drawings of the present invention are merely schematic illustrations, and are not drawn to scale, but are described in advance. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.

It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or from one signal to another signal. In addition, the term "or" as used herein should be taken to include any one or combination of more of the associated listed items as the case may be.

[ example one ]

Please refer to fig. 1 to 3, which illustrate a first embodiment of the present invention. The present embodiment discloses a detection apparatus 100 capable of simultaneously detecting electrical and optical parameters of a plurality of light emitting chips 200 (e.g., light emitting diode chips). The detection apparatus 100 includes an electrical detection device 1 and a light receiving device 2 disposed adjacent to the electrical detection device 1.

It should be noted that, in the present embodiment, the light receiving device 2 is described in combination with the electrical property detection device 1, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the light receiving device 2 can be applied separately (e.g., sold) or used with other devices (e.g., other detection devices different from the electrical detection device 1 of the present embodiment).

The electrical testing apparatus 1 includes a probe card 11, an optical alignment module 12 (e.g., a CCD) corresponding to the probe card 11, a transparent tray 13 corresponding to the probe card 11, and a transfer module 14. The probe card 11, the optical alignment module 12, and the transparent carrier plate 13 may be mounted on the transfer module 14, so that the transfer module 14 can perform multi-axial displacement.

Furthermore, the type of the probe card 11 can be adjusted according to design requirements, such as: the probe card 11 may be a cantilever probe card, a vertical probe card, or a micro-electromechanical probe card, but the invention is not limited thereto. The optical alignment module 12 and the transparent carrier plate 13 are respectively located on two opposite sides of the probe card 11, so that the optical alignment module 12 can detect the relative position of the probe card 11 and the transparent carrier plate 13.

In more detail, the light-transmitting carrier 13 is transparent in the embodiment, and the light-transmitting carrier 13 has a carrier 131 for carrying the light-emitting chips 200 and a light-emitting surface 132 located on the opposite side of the carrier 131. The number of the light emitting chips 200 that can be carried by the transparent carrying tray 13 is preferably more than 100 and is disposed on a carrier 300 (e.g., a blue adhesive film), but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the transparent carrier 13 can also be used to carry a plurality of light emitting chips 200 that are not disposed on any carrier; alternatively, the number of the light-emitting chips 200 that can be carried by the light-transmitting carrier 13 may also be less than 100.

As described above, the probe card 11 can be used to simultaneously supply power and electrically detect (e.g., voltage, current, and power) the light-emitting chips 200 on the transparent carrier 13 after passing through the alignment of the optical alignment module 12, so that each light-emitting chip 200 emits a first light L1 having a first divergence angle σ 1 toward the light-emitting surface 132. In this embodiment, the first divergence angle σ 1 of each of the first light beams L1 is 110 degrees to 130 degrees, but the present invention is not limited thereto.

The light receiving device 2 is disposed adjacent to the light emitting surface 132 of the light-transmitting carrier 13; that is, the light receiving device 2 is located on the light emitting path of each of the light emitting chips 200. Furthermore, two first light beams L1 emitted by any two adjacent light emitting chips 200 are illustrated as being partially overlapped with each other when reaching the light receiving device 2 in this embodiment, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, two first light beams L1 emitted by any two adjacent light emitting chips 200 may not overlap each other when reaching the light receiving device 2.

In this embodiment, the light receiving device 2 includes a telecentric lens assembly 21, an image processing module 22 located at one side of the telecentric lens assembly 21, and an arithmetic module 23 electrically coupled to the image processing module 22.

It should be noted that the shortest distance between the light receiving device 2 and the light transmissive tray 13 (e.g., the distance between the light incident end 211 and the light emitting surface 132) may be between 80 millimeters (mm) and 150 mm, but the value may be adjusted and varied according to design requirements, and is not limited to this embodiment.

The telecentric lens assembly 21 may be formed by matching a plurality of lenses, and the telecentric lens assembly 21 includes a light-entering end 211 adjacent to the light-exiting surface 132 and a light-exiting end 212 far away from the light-entering end 211; that is, the light-entering end 211 is located on the light-exiting path of each of the light-emitting chips 200.

Furthermore, the telecentric lens assembly 21 is used for guiding a plurality of first light beams L1 passing through the light exit surface 132 and passing through the light entrance end 211, and making a plurality of first light beams L1 pass through the light exit end 212 to form a plurality of second light beams L2. Wherein a second divergence angle σ 2 of each of the second light rays L2 is smaller than the first divergence angle σ 1 of the corresponding first light ray L1.

Further, the second divergence angle σ 2 is within 10 degrees (e.g., 1 degree to 3 degrees) in the present embodiment, so that the plurality of second light beams L2 can not overlap each other, thereby effectively avoiding the mutual interference between the plurality of second light beams L2. For example: the telecentric lens assembly 21 of the light receiving device 2 can be used to guide (located on the transparent carrying plate 13) more than 100 pieces of the plurality of light emitting chips 200 emitted from the first light L1 at the same time in this embodiment, so as to form more than 100 non-overlapping pluralities of light emitting chips L2, but the present invention is not limited thereto. For example, in another embodiment not shown in the present invention, the telecentric lens group 21 can be used to guide a plurality of the first light beams L1 overlapped with each other to form a plurality of the second light beams L2 with a lower overlapping degree, so as to reduce the mutual interference between the plurality of the second light beams L2.

The image processing module 22 is disposed at the light exit end 212 of the telecentric lens assembly 21, and is configured to receive and process each of the second light beams L2 passing through the light exit end 212, so as to calculate an RGB gray-scale value of the corresponding light emitting chip 200. Furthermore, the operation module 23 is electrically coupled to the image processing module 22, and is configured to receive the RGB gray-scale values of each of the light-emitting chips 200 and calculate the optical parameters of each of the light-emitting chips 200.

More specifically, the image processing module 22 includes an image receiver 221 (e.g., a color photosensitive coupling element) adjacent to the light-emitting end 212 and a signal processing unit 222 electrically coupled to the image receiver 221 and the operation module 23, but the invention is not limited thereto. The image receiver 221 can receive any one of the second light L2 with a plurality of pixels (pixels) thereof to generate a light-emitting chip image, and the signal processing unit 222 can be configured to perform image processing on each of the light-emitting chip images to calculate the corresponding RGB gray-scale values (0 to 65536 colors).

In the present embodiment, the signal processing unit 222 processes the light emitting chip images corresponding to all the light emitting chips 200 synchronously, but the light emitting chip image of each light emitting chip 200 is processed by the signal processing unit 222 separately; that is, each of the light emitting chip images can be independently image-processed by the signal processing unit 222, and the processing procedure thereof is carried out as follows. Sequentially passing each light-emitting chip image belonging to the Tiff image file through: step such as conversion RGB image, graying, fuzzification, binaryzation, then will every luminescence chip image conversion and drawing region of interest (ROI) image, and then calculate correspondingly RGB gray scale value, but the utility model discloses do not use this as the limit.

Accordingly, in the present embodiment, the detecting apparatus 100 may be provided with the telecentric lens assembly 21 before the light rays (e.g., a plurality of the first light rays L1) of a plurality of the light-emitting chips 200 enter the image processing module 22, so as to separate the light rays (e.g., a plurality of the second light rays L2) of the plurality of the light-emitting chips 200 by the telecentric lens assembly 21, so that the light rays (e.g., the second light rays L2) of each of the light-emitting chips 200 can be individually detected by the image processing module 22 and the operation module 23, and thus the optical parameters of each of the light-emitting chips 200 can be known.

[ example two ]

Please refer to fig. 4 and 5, which illustrate a second embodiment of the present invention. Since this embodiment is similar to the first embodiment, the same parts of the two embodiments are not described again, and the difference of this embodiment compared with the first embodiment mainly lies in the light receiving device 2.

In this embodiment, the light receiving device 2 further includes a light reducing mirror 24 located between the light incident end 211 and the light emitting surface 132, a light splitting mirror 25 connected to the telecentric lens assembly 21, and a spectrometer 26 located between the light splitting mirror 25 and the operation module 23. The light reducing mirror 24 and the image processing module 22 are respectively disposed on opposite sides of the telecentric lens assembly 21, and the light reducing mirror 24 is disposed on the light incident end 211 of the telecentric lens assembly 21 in this embodiment for reducing the light intensity of each of the first light beams L1.

That is, in the present embodiment, the light receiving device 2 can attenuate the light intensity of each of the first light beams L1 passing through it by the light reduction mirror 24, so as to avoid the high light intensity of the first light beam L1 from affecting the measurement accuracy of the following components (such as the image processing module 22 and the spectrometer 26). For example: the light reduction mirror 24 can attenuate the light intensity of each first light L1 to be less than 80% of the maximum intensity that the image processing module 22 (or the spectrometer 26) can bear, but the present invention is not limited thereto.

The beam splitter 25 is connected to the telecentric lens group 21 and is used for receiving each second light ray L2. The beam splitter 25 is located corresponding to the image processing module 22 and the spectrometer 26, and is used for guiding each second light ray L2 received by the beam splitter to the image processing module 22 and the spectrometer 26. Moreover, the spectroscope 25 is built in the telecentric lens assembly 21 in the embodiment, but the present invention is not limited thereto.

Furthermore, the spectrometer 26 can calculate an average spectrum of the plurality of light emitting chips 200 according to the plurality of received second light beams L2, and the spectrometer 26 is electrically coupled to the calculation module 23 for transmitting the calculated average spectrum to the calculation module 23. Accordingly, the calculation module 23 can calculate the optical parameter (such as peak length or half-wave width) of each of the light emitting chips 200 according to the RGB gray-scale values and the average spectrum.

In other words, the calculation module 23 may calculate an optical parameter of one of the light emitting chips 200 through the average spectrum as a reference value, so as to use the reference value to correct each of the RGB gray-scale values passing through, and further calculate an optical parameter of each of the light emitting chips 200; thereafter, the calculation module 23 calculates the optical parameters (such as peak length or half-wave width) of each of the light emitting chips 200 according to the default design requirements.

Accordingly, the light receiving device 2 can use the image processing module 22 and the spectrometer 26 with different detection methods, so that the operation module 23 can correct the RGB gray scale values of each of the light emitting chips 200 calculated by the image processing module 22 through the average spectrum obtained by the spectrometer 26, thereby obtaining more accurate optical parameters of each of the light emitting chips 200.

It should be noted that, although the light receiving device 2 includes the above-mentioned components in the present embodiment, the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the light-collecting device 2 can selectively omit at least one of the light-reducing mirror 24, the beam splitter 25 and the spectrometer 26 according to design requirements.

[ technical effects of the embodiments of the present invention ]

Furthermore, the embodiment of the present invention provides a detecting device and a light collecting device thereof, wherein the telecentric lens system is used to make the multichannel first light form the multichannel with smaller divergence angle to the second light, so as to effectively avoid the multichannel mutual interference between the second lights. Wherein the telecentric lens group is preferably configured such that the plurality of partially overlapping first rays form a plurality of non-overlapping second rays.

In addition, the embodiment of the utility model discloses a check out test set and receipts light device thereof can be through telecentric lens group go into the light end with the printing opacity carries and is provided with the dimming mirror between the play plain noodles of dish, make pass the every of dimming mirror the light intensity attenuation of first light, in order to avoid the light intensity of first light is too high and influences the measurement precision of back component (for example: image processing module and spectrum appearance).

Furthermore, the embodiment of the utility model provides a detection device and receipts light device thereof is disclosed, through adopting possess different detection methods image processing module with the spectrum appearance, so that the calculation module can pass through what the spectrum appearance reachd average spectrum comes to rectify from every that image processing module calculates the light emitting chip the RGB gray scale value, and then can gain more accurate every the light emitting chip the optical parameter.

The above disclosure is only a preferred and practical embodiment of the present invention, and is not intended to limit the scope of the present invention, so all the modifications of the equivalent technology made by the disclosure and drawings are included in the scope of the present invention.

Claims

1. A detection device, characterized in that the detection device comprises:

An electrical detection device, including:

a probe card;

an optical alignment module, the position of which corresponds to the probe card;

a light-transmitting carrier disk, the position of which corresponds to the probe card, and the light-transmitting carrier disk has a carrier surface for carrying a plurality of light-emitting chips and a light-emitting surface on the opposite side of the carrier surface;

Wherein, the probe card can be used to simultaneously supply power and electrically detect a plurality of the light-emitting chips on the light-transmitting carrier after being aligned by the optical alignment module, so that each The light-emitting chip emits a first light with a first divergence angle toward the light-emitting surface; and

A light-receiving device, which is disposed adjacent to the light-emitting surface of the light-transmitting carrier, and the light-receiving device includes:

A telecentric lens group includes a light incident end and a light exit end; wherein, the telecentric lens group is used to guide a plurality of channels passing through the light exit surface and penetrating into it from the light incident end. the first light rays, and make a plurality of the first light rays pass through the light-emitting end to form a plurality of second light rays; wherein, the second divergence angle of each of the second light rays is smaller than that of the corresponding first light rays the first divergence angle of the light;

an image processing module, disposed at the light-emitting end of the telecentric lens group, for receiving and processing each of the second light rays passing through the light-emitting end, so as to calculate the corresponding light emission the RGB grayscale values of the chip; and

A calculation module, which is electrically coupled to the image processing module, is used for receiving the RGB grayscale values of each of the light-emitting chips and calculating light parameters of each of the light-emitting chips.

2 . The detection apparatus according to claim 1 , wherein the light-receiving device further comprises a device located between the light-incident end of the telecentric lens group and the light-emitting surface of the light-transmitting carrier disk. 3 . A dimming mirror is provided between, and the dimming mirror is used to reduce the light intensity of each of the first light rays.

3. The detection device according to claim 1, wherein the light receiving device further comprises:

a spectrometer electrically coupled to the calculation module; and

a beam splitter connected to the telecentric lens group and used for receiving each of the second light rays; wherein, the position of the beam splitter corresponds to the image processing module and the spectrometer, and is used for the beam splitter to receive Each of the second light rays is guided to the image processing module and the spectrometer;

Wherein, the spectrometer can calculate an average spectrum of a plurality of the light-emitting chips according to the plurality of channels of the second light received by the spectrometer; the calculation module can calculate an average spectrum according to the RGB grayscale value and the average spectrum, Then, the light parameters of each of the light-emitting chips are calculated.

4. The detection device according to claim 1, wherein the image processing module comprises:

an image receiver adjacent to the light-emitting end of the telecentric lens group, and the image receiver can receive any one of the second light rays with its plurality of pixels to generate a light-emitting chip image correspondingly; and

a signal processing unit, which is electrically coupled to the image receiver and the calculation module; the signal processing unit can be used to perform image processing on each of the light-emitting chip images to calculate the corresponding RGB Grayscale value.

5 . The detection apparatus according to claim 1 , wherein the number of the plurality of light-emitting chips that can be carried by the light-transmitting carrier plate is more than 100, and the plurality of the light-emitting chips are arranged on a on the carrier, and the telecentric lens group of the light-receiving device can be used to simultaneously guide multiple channels of the first light emitted by more than 100 of the light-emitting chips, so as to form more than 100 channels that do not overlap each other of the second rays of light.

6. A light-receiving device of a detection device, wherein the light-receiving device of the detection device comprises:

A telecentric lens group, which includes a light entrance end and a light exit end; wherein, the telecentric lens group is used to guide a plurality of first channels emitted by a plurality of light-emitting chips and penetrated from the light entrance end. light, and make a plurality of the first light rays pass through the light-emitting end to form a plurality of second light rays; wherein, the second divergence angle of each second light ray is smaller than the first light ray corresponding to the first light ray. a divergence angle;

7 . The light-receiving device of claim 6 , wherein the light-receiving device further comprises a light-receiving device located between the light-incident end of the telecentric lens group and the light-emitting surface of the light-transmitting carrier disc. 8 . A dimming mirror is provided between, and the dimming mirror is used to reduce the light intensity of each of the first light rays.

8. The light-receiving device of the detection equipment according to claim 6, wherein the light-receiving device further comprises:

a spectrometer electrically coupled to the calculation module; and

a beam splitter connected to the telecentric lens group and used to receive each of the second rays; the position of the beam splitter corresponds to the image processing module and the spectrometer, and is used to make each of the received rays the second light is guided to the image processing module and the spectrometer;

9. The light receiving device of the detection equipment according to claim 6, wherein the image processing module comprises:

10 . The light-receiving device of claim 6 , wherein the telecentric lens group of the light-receiving device can be used to simultaneously guide the light emitted by more than 100 of the light-emitting chips. 11 . A plurality of the first rays are formed to form more than 100 non-overlapping second rays.