JPWO2011155443A1 - Plate-shaped member transfer device and suction pad - Google Patents

Plate-shaped member transfer device and suction pad Download PDF

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JPWO2011155443A1
JPWO2011155443A1 JP2011524098A JP2011524098A JPWO2011155443A1 JP WO2011155443 A1 JPWO2011155443 A1 JP WO2011155443A1 JP 2011524098 A JP2011524098 A JP 2011524098A JP 2011524098 A JP2011524098 A JP 2011524098A JP WO2011155443 A1 JPWO2011155443 A1 JP WO2011155443A1
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plate
protrusion
suction pad
protective sheet
transfer device
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JP5803670B2 (en
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小山 範男
範男 小山
橋本 隆志
隆志 橋本
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • B65G2249/045Details of suction cups suction cups

Abstract

吸着パッドを介して作用する負圧により板状部材としてのガラス板Pを吸着保持した状態で移送する板状部材の移送装置であって、吸着パッド30は内面に突起39を有し、ガラス板Pの表面に重ねられた保護シートBを吸着したとき、突起39が保護シートBを貫通すると共に、保護シートの突起による貫通部分の周囲に通気部b1が形成され、該通気部を介してガラス板Pを保護シートBと共に吸着保持する。A plate-shaped member transfer device that transfers a glass plate P as a plate-shaped member while being sucked and held by a negative pressure acting through the suction pad, the suction pad 30 having protrusions 39 on the inner surface, When the protective sheet B stacked on the surface of P is adsorbed, the projection 39 penetrates the protective sheet B, and a ventilation part b1 is formed around the penetration part by the projection of the protection sheet. The plate P is sucked and held together with the protective sheet B.

Description

本発明は、ガラス板、樹脂板、ガラス層と樹脂層とを積層して構成される積層体板、金属板等の板状部材を移送する移送装置及びその装置のための吸着パッドに関し、より詳しくは、保護シートを伴った板状部材を保護シートと共に移送するための移送装置及び吸着パッドに関する。   The present invention relates to a glass plate, a resin plate, a laminate plate formed by laminating a glass layer and a resin layer, a transfer device for transferring a plate member such as a metal plate, and a suction pad for the device, and more Specifically, the present invention relates to a transfer device and a suction pad for transferring a plate-like member with a protective sheet together with the protective sheet.

例えば、液晶ディスプレイ、プラズマディスプレイ等の画像表示機器用ディスプレイパネルの製作に用いられるガラス基板、電子表示機能素子や薄膜形成用の基材として用いられるガラス基板、建築構造物用のガラス板材等(以下、これらを総称してガラス板という)は、製造、搬送、保管等の工程において所定の位置へ移送される。その移送には、ガラス板を吸着パッドで吸着し、該吸着パッドを移動手段により所定位置へ移動するタイプの移送装置が広く用いられている。真空源に接続された吸着パッドは、ガラス板にあてがった状態でパッド内を負圧とすることにより、ガラス板を吸着する。   For example, glass substrates used for manufacturing display panels for image display devices such as liquid crystal displays and plasma displays, glass substrates used as substrates for electronic display functional elements and thin film formation, glass plates for building structures, etc. These are collectively referred to as a glass plate) and are transferred to a predetermined position in processes such as production, conveyance, and storage. For the transfer, a transfer device of a type in which a glass plate is sucked by a suction pad and the suction pad is moved to a predetermined position by a moving means is widely used. The suction pad connected to the vacuum source sucks the glass plate by applying a negative pressure to the inside of the pad while being applied to the glass plate.

一方、加工後の傷や汚れの防止のため、或いは、梱包パレットへの積載時にガラス板同士の接触による擦過傷を防止するために、ガラス板は、表面を紙、合成樹脂等の保護シート(合紙)で覆った状態で移送されることが多い。また、フラットパネルディスプレイ用のガラス板は、吸着パッドの接触痕を残さないように、保護シートを介して吸着パッドで吸着する。いずれの場合も、吸着パッドの負圧はまず保護シートに作用するので、保護シートを介してガラス板を吸着する必要がある。 On the other hand, in order to prevent scratches and dirt after processing, or to prevent scratches due to contact between the glass plates when they are loaded on the packing pallet, the surface of the glass plate is a protective sheet (paper, synthetic resin, etc.). It is often transported in a state covered with paper. Moreover, the glass plate for flat panel displays adsorb | sucks with a suction pad through a protective sheet so that the contact trace of a suction pad may not be left. In any case, since the negative pressure of the suction pad first acts on the protective sheet, it is necessary to suck the glass plate through the protective sheet.

例えば紙等の通気性のある保護シートを使用する場合には、保護シートを通して吸着力をガラス板に作用させることができる。例えば、特許文献1,2及び3に記載された移送装置では、多孔質等、通気性のある保護シートを用いることにより、負圧をガラス板に及ぼしている。しかしながら、これらの場合には保護シートの材質が限定されてしまう。特に、梱包パレットに積層したガラス板をトラック等で移送すると、振動でガラス板がずれることがあるので、保護シートとしてクッション性があり、ずれが生じ難い発泡樹脂シートを用いることが多くなっており、この場合は保護シートを介してガラス板を吸着することができない。 For example, when an air-permeable protective sheet such as paper is used, an adsorption force can be applied to the glass plate through the protective sheet. For example, in the transfer devices described in Patent Documents 1, 2, and 3, negative pressure is exerted on the glass plate by using a porous or other breathable protective sheet. However, in these cases, the material of the protective sheet is limited. In particular, when a glass plate laminated on a packing pallet is transported by a truck or the like, the glass plate may be displaced due to vibration. Therefore, a foamed resin sheet that has cushioning properties and is less likely to be displaced is often used as a protective sheet. In this case, the glass plate cannot be adsorbed through the protective sheet.

これに関し、特許文献4に記載の装置では、保護シートとして用いられる発泡樹脂シートのみを、一旦吸着パッドで吸着し、針状またはナイフ状の突き刺し部材にシート面を接触させることにより、切り込みを形成して通気性を持たせる。そして、その保護シートをガラス板上に移動させ、切り込み形成位置に吸着パッドをあてがって吸引することにより、負圧をガラス板に及ぼす。この装置によれば、保護シートの材質に拘わらず、負圧を確実にガラス板に及ぼすことができる。しかしながら、一旦保護シートのみを吸着して切り込みを形成するという工程を経る必要があり、工程と装置が複雑化するという欠点があった。 In this regard, in the apparatus described in Patent Document 4, only the foamed resin sheet used as the protective sheet is once adsorbed by the suction pad, and the sheet surface is brought into contact with the needle-like or knife-like piercing member to form the cut. And give it breathability. And the negative pressure is exerted on a glass plate by moving the protection sheet on a glass plate, applying a suction pad to a notch formation position, and attracting | sucking. According to this apparatus, a negative pressure can be reliably exerted on the glass plate regardless of the material of the protective sheet. However, it has been necessary to go through a process of forming a cut by adsorbing only the protective sheet, and there is a drawback that the process and the apparatus are complicated.

特開2004−136926(段落0009)JP2004-136926 (paragraph 0009) 実公昭60−11860(第2欄)Shoko Sho 60-11860 (column 2) 特開2004−153157(段落0013)JP2004-153157 (paragraph 0013) 特開2005−75482(段落0041〜0045)JP-A-2005-75482 (paragraphs 0041-0045)

そこで、本発明は、保護シートを介したガラス板等の板状部材の吸着を簡便且つ確実に行なうことができる移送装置及びそのための吸着パッドを提供することを目的とする。 Then, an object of this invention is to provide the transfer apparatus which can perform simply and reliably adsorption | suction of plate-shaped members, such as a glass plate, via a protective sheet, and an adsorption pad for it.

前記目的を達成するため、本発明は、吸着パッドを介して作用する負圧により板状部材を吸着保持した状態で、前記板状部材を移送する板状部材の移送装置であって、前記吸着パッドはその内面に突起を有し、前記板状部材の表面に重ねられた保護シートを負圧により吸着したとき、前記突起が前記保護シートを貫通すると共に、前記保護シートの前記突起による貫通部分の周囲に通気部が形成され、該通気部を介して前記板状部材に作用する負圧により前記板状部材を前記保護シートと共に吸着保持することを特徴とする板状部材の移送装置を提供するものである。   In order to achieve the above object, the present invention provides a plate-like member transfer device for transferring the plate-like member in a state where the plate-like member is sucked and held by a negative pressure acting via a suction pad, the suction member being The pad has a protrusion on its inner surface, and when the protective sheet superimposed on the surface of the plate-like member is adsorbed by negative pressure, the protrusion penetrates the protective sheet, and the portion of the protective sheet penetrated by the protrusion An apparatus for transferring a plate-like member is provided, wherein a ventilation portion is formed around the plate member, and the plate-like member is sucked and held together with the protective sheet by a negative pressure acting on the plate-like member through the ventilation portion. To do.

この移送装置は上記のように、吸着パッドがその内面に突起を有し、ガラス板等の板状部材の表面の保護シートを負圧により吸着したとき、突起が保護シートを貫通する。これに伴って、保護シートには突起による貫通部分の周囲に通気部が形成され、吸着パッドは、該通気部を介して板状部材に作用する負圧により板状部材を保護シートと共に吸着保持する。したがって、パッド内面に突起を設け、負圧を利用して該突起により保護シートに通気部を形成するという簡単な構成に基づき、保護シートを介したガラス板の吸着を簡便且つ確実に行なうことができる。   As described above, in this transfer device, the suction pad has a protrusion on its inner surface, and when the protective sheet on the surface of a plate-like member such as a glass plate is sucked by negative pressure, the protrusion penetrates the protective sheet. Along with this, a ventilation part is formed around the penetrating part by the protrusion in the protection sheet, and the suction pad adsorbs and holds the plate member together with the protection sheet by negative pressure acting on the plate member through the ventilation part. To do. Therefore, it is possible to easily and reliably adsorb the glass plate through the protective sheet based on a simple configuration in which a protrusion is provided on the inner surface of the pad and a ventilation portion is formed in the protective sheet by the protrusion using negative pressure. it can.

前記突起は、その表面に突出方向に沿って延びる切刃を有したものとすることができる。この切刃は、保護シートが吸着パッドに吸着されたときに、該保護シートを貫通し、貫通部分の周囲に通気部を確実に形成する。   The protrusion may have a cutting edge extending along a protruding direction on a surface thereof. This cutting blade penetrates the protective sheet when the protective sheet is adsorbed by the suction pad, and reliably forms a ventilation portion around the penetrating portion.

前記突起は、多角錘形状をなし、該多角錘形状の稜線が前記切刃を構成したものとすることができる。これにより、保護シートに形成される孔は、多角錘の稜線から放射方向に延びる切れ目により通気部を生じさせる。特に、その切れ目は、吸引により展延している保護シート上で長く延びるように形成されるので、吸引力がより効果的に板状部材に作用する。   The protrusion may have a polygonal pyramid shape, and the polygonal pyramid ridge line may constitute the cutting blade. Thereby, the hole formed in a protection sheet produces a ventilation part by the cut | interruption extended in the radial direction from the ridgeline of a polygonal pyramid. In particular, since the cut is formed so as to extend long on the protective sheet that is spread by suction, the suction force acts on the plate member more effectively.

前記吸着パッドは、真空源に接続されるベース部と、該ベース部から椀状に延びて開口端面を形成するスカート部とを備え、前記突起が、前記ベース部に設けられているものとすることができる。このようにベース部に設けられた突起は、椀状のスカート部の奧端に位置することとなる。したがって、負圧による吸引時に板状部材が突起に接触するのを確実に防止することができる。特に、スカート部が吸引に伴って板状部材側へ弾性変形する場合にこの点が効果的である。   The suction pad includes a base portion connected to a vacuum source and a skirt portion extending from the base portion in a bowl shape to form an opening end surface, and the protrusion is provided on the base portion. be able to. Thus, the protrusion provided on the base portion is located at the heel end of the skirt-like skirt portion. Therefore, it is possible to reliably prevent the plate-like member from coming into contact with the protrusion during suction by negative pressure. This point is particularly effective when the skirt portion is elastically deformed toward the plate-like member with suction.

前記吸着パッドは、真空源に接続されるベース部と、該ベース部から椀状に延びて開口端面を形成するスカート部とを備え、前記突起が、前記ベース部と前記スカート部との境界近傍に設けられているものとすることができる。吸引された保護シートは、スカート部及びベース部にほぼ沿うように変形して突起に到達する。一方、スカート部が吸引に伴って弾性変形する場合、ベース部に近い基端部側で変形量が小さくなるので、板状部材は、スカート部とベース部との境界近傍に到達し難く、突起への接触が確実に防止される。   The suction pad includes a base portion connected to a vacuum source, and a skirt portion extending from the base portion in a bowl shape to form an opening end surface, and the protrusion is in the vicinity of a boundary between the base portion and the skirt portion It can be provided. The sucked protection sheet is deformed so as to substantially follow the skirt portion and the base portion and reaches the protrusion. On the other hand, when the skirt part is elastically deformed with suction, the deformation amount is small on the base end side near the base part, so that the plate-like member is difficult to reach the vicinity of the boundary between the skirt part and the base part. Contact with is reliably prevented.

前記吸着パッドは、その内面から開口端面側へ延びるストッパを備えており、該ストッパは、前記突起の先端部を越え前記開口端面よりも手前の位置まで延びているものとすることができる。この吸着パッドを用いれば、保護シートを吸着した際に、スカート部が撓んで板状部材が突起に接近しても、板状部材が、ストッパに当接することにより、それ以上の突起側への移動が制限されるので、突起に接触して板状部材が損傷を受けるのが確実に防止される。   The suction pad may be provided with a stopper extending from the inner surface thereof toward the opening end surface, and the stopper may extend beyond the tip of the protrusion to a position before the opening end surface. If this suction pad is used, even if the skirt is bent and the plate-shaped member approaches the protrusion when the protective sheet is sucked, the plate-shaped member comes into contact with the stopper, so Since the movement is restricted, it is reliably prevented that the plate-like member is damaged due to contact with the protrusion.

前記突起は、金属製とすることができる。これにより、吸着パッドによる吸着の際に保護シートを貫通する切削性が良好となり、また長期間に亘って良好な切削性が維持される。   The protrusion can be made of metal. Thereby, the machinability which penetrates a protection sheet at the time of adsorption | suction by an adsorption pad becomes favorable, and favorable machinability is maintained over a long period of time.

前記目的を達成するため、本発明は、負圧を発生させる真空源に通じる吸着パッドであって、パッド内面に突起を有し、該突起がその表面に突出方向に沿って延びる切刃を有することを特徴とする吸着パッドを提供するものである。   In order to achieve the above object, the present invention is a suction pad that communicates with a vacuum source that generates a negative pressure, and has a protrusion on the inner surface of the pad, and the protrusion has a cutting edge extending along the protruding direction on the surface. The suction pad characterized by this is provided.

このように吸着パッドは、その内面に突起を有しているので、板状部材の表面に保護シートが重ねられている場合は、吸着した保護シートを突起が貫通する。これに伴って、保護シートには突起による貫通部分の周囲に通気部が形成され、吸着パッドは、該通気部を介して板状部材に作用する負圧により板状部材を保護シートと共に吸着保持する。したがって、パッド内面に突起を設け、負圧を利用して該突起により保護シートに通気部を形成するという簡単な構成に基づき、保護シートを介した板状部材の吸着を簡便且つ確実に行なうことができる。   Thus, since the suction pad has a protrusion on its inner surface, when the protective sheet is stacked on the surface of the plate-like member, the protrusion penetrates the sucked protective sheet. Along with this, a ventilation part is formed around the penetrating part by the protrusion in the protection sheet, and the suction pad adsorbs and holds the plate member together with the protection sheet by negative pressure acting on the plate member through the ventilation part. To do. Therefore, it is possible to simply and reliably adsorb the plate-like member via the protective sheet based on a simple configuration in which a protrusion is provided on the inner surface of the pad and a ventilation portion is formed in the protective sheet by using the negative pressure. Can do.

前記突起は、多角錘形状をなし、該多角錘形状の稜線が前記切刃を構成したものとすることができる。これにより、保護シートに形成される孔は、多角錘の稜線から放射方向に延びる切れ目により通気部を生じさせる。特に、その切れ目は、吸引により展延している保護シート上で長く延びるように形成されるので、吸引力がより効果的に板状部材に作用する。   The protrusion may have a polygonal pyramid shape, and the polygonal pyramid ridge line may constitute the cutting blade. Thereby, the hole formed in a protection sheet produces a ventilation part by the cut | interruption extended in the radial direction from the ridgeline of a polygonal pyramid. In particular, since the cut is formed so as to extend long on the protective sheet that is spread by suction, the suction force acts on the plate member more effectively.

上記したように、本発明によれば、保護シートを介したガラス板等の板状部材の吸着を簡便且つ確実に行なうことができる移送装置及びそのための吸着パッドを提供することができる。   As described above, according to the present invention, it is possible to provide a transfer device that can easily and reliably suck a plate-like member such as a glass plate via a protective sheet, and a suction pad therefor.

本発明に係る移送装置の一実施形態を概略的に示す正面図である。It is a front view showing roughly one embodiment of the transfer device concerning the present invention. 図1に示した移送装置における吸着パッドを示す縦断面図である。It is a longitudinal cross-sectional view which shows the suction pad in the transfer apparatus shown in FIG. 図2に示した吸着パッドの底面図である。It is a bottom view of the suction pad shown in FIG. 図2に示した吸着パッドの使用状態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the use condition of the suction pad shown in FIG. 図4の使用状態における保護シートの穿孔形態を示す底面図である。It is a bottom view which shows the punching | piercing form of the protection sheet in the use condition of FIG. 図2の吸着パッドに用いられる突起の形態を示す図である。It is a figure which shows the form of the processus | protrusion used for the suction pad of FIG. 図2の吸着パッドに用いられる突起の他の形態を示す図である。It is a figure which shows the other form of the protrusion used for the suction pad of FIG. 図2の吸着パッドに用いられる突起の他の形態を示す図である。It is a figure which shows the other form of the protrusion used for the suction pad of FIG. 図2の吸着パッドに用いられる突起の他の形態を示す図である。It is a figure which shows the other form of the protrusion used for the suction pad of FIG. 図2の吸着パッドに用いられる突起の他の形態を示す図である。It is a figure which shows the other form of the protrusion used for the suction pad of FIG. 図2の吸着パッドに用いられる突起の他の形態を示す図である。It is a figure which shows the other form of the protrusion used for the suction pad of FIG. 本発明に係る吸着パッドの他の実施形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows other embodiment of the suction pad which concerns on this invention. 図7に示した吸着パッドの底面図である。It is a bottom view of the suction pad shown in FIG. 吸着パッドの他の形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the other form of a suction pad. 吸着パッドの他の形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the other form of a suction pad. 吸着パッドの他の形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the other form of a suction pad. 吸着パッドの他の形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the other form of a suction pad. 吸着パッドのさらに他の形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the other form of a suction pad. 吸着パッドのさらに他の形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the other form of a suction pad. 吸着パッドのさらに他の形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the other form of a suction pad.

以下、本発明の実施形態について添付図面を参照しつつ説明する。図面中の同一又は同種の部分については、同じ番号を付して説明を一部省略する。   Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The same or similar parts in the drawings are denoted by the same reference numerals and description thereof is partially omitted.

図1は、本発明に係る移送装置の一実施形態を概略的に示す正面図である。この移送装置は、レール10に支持された移動手段1と、該移動手段1に結合された吸着装置3とを備えている。   FIG. 1 is a front view schematically showing an embodiment of a transfer device according to the present invention. This transfer device includes a moving means 1 supported by a rail 10 and a suction device 3 coupled to the moving means 1.

移動手段1は、レール10に沿って摺動する摺動部11と、該摺動部に結合されて鉛直軸線回りの回動を可能にする旋回部12と、該旋回部に結合されて上下方向に伸縮する昇降部13と、該昇降部の下端部に結合されて水平軸線回りに回動する第一アーム14と、該第一アームに結合され先端部に吸着装置3を支持し水平軸線回りに回動する第二アーム15とを備えている。   The moving means 1 includes a sliding portion 11 that slides along the rail 10, a swiveling portion 12 that is coupled to the sliding portion and allows rotation about a vertical axis, and is coupled to the swiveling portion to move up and down. An elevating part 13 that expands and contracts in the direction, a first arm 14 that is coupled to the lower end of the elevating part and rotates about a horizontal axis, and a horizontal axis that is coupled to the first arm and supports the suction device 3 at the tip. And a second arm 15 that rotates around.

レール10は、天井等に架設され、板状部材、例えばガラス板Pを移送すべきステーション間に延びている。摺動部11、旋回部12、昇降部13、第一アーム14、第二アーム15は、例えば各々に内蔵された電動モータ等の駆動手段により、所定の動作をするように構成されている。これには、公知の種々の構造を適用することができるので、ここでは詳細な説明を省略する。また、移動手段としては、レールに支持するものの他、床面上に設置された旋回アームに揺動アームを支持したもの、ロボットアーム状のもの等、種々の形態とすることができる。   The rail 10 is installed on a ceiling or the like, and extends between stations to which a plate-like member, for example, a glass plate P is to be transferred. The sliding part 11, the turning part 12, the elevating part 13, the first arm 14, and the second arm 15 are configured to perform predetermined operations by driving means such as an electric motor incorporated therein, for example. Since various known structures can be applied to this, detailed description is omitted here. Moreover, as a moving means, it can be set as various forms, such as what supported a rocking arm on the turning arm installed on the floor surface, what was supported on a rail, and a robot arm-like thing.

各ステーションにおいてガラス板Pは、単体または積層、水平、垂直または斜め等、いずれの設置状態であってもよい。また、ガラス板Pは、表面保護等のために保護シートが重ねられている。保護シート(いわゆる合紙)は、発泡樹脂シート等の合成樹脂、紙等とされる。保護シートBは伸縮性を有するのが望ましい。これにより、後述する吸着パッドによる吸着時に、保護シートは皺にならずにパッド内面に倣って変形し易く、突起によって確実に貫通孔を形成することができる。   In each station, the glass plate P may be in any installation state such as a single unit or stacked layers, horizontal, vertical or diagonal. Further, the glass sheet P is overlaid with protective sheets for surface protection and the like. The protective sheet (so-called slip sheet) is a synthetic resin such as a foamed resin sheet, paper, or the like. The protective sheet B is desirably stretchable. Thereby, at the time of adsorption | suction by the suction pad mentioned later, a protection sheet does not become a wrinkle but is easy to deform | transform along a pad inner surface, and a through-hole can be reliably formed with a protrusion.

吸着装置3は、第二アーム15の先端部に支持された支持板31と、該支持板に取り付けられた複数の吸着パッド30と、一端が支持板31に接続され、他端が摺動部11を経て図外の真空源に接続された吸引ホース33とを備えている。   The suction device 3 includes a support plate 31 supported at the tip of the second arm 15, a plurality of suction pads 30 attached to the support plate, one end connected to the support plate 31, and the other end a sliding portion. 11 and a suction hose 33 connected to a vacuum source (not shown).

支持板31は、この実施形態においては、移送すべきガラス板よりやや小さい寸法の平板状をなし、内部に通気路が形成されている(図示略)。通気路は、吸引ホース33の接続部34から各吸着パッド30へと延びている。   In this embodiment, the support plate 31 has a flat plate shape with dimensions slightly smaller than the glass plate to be transferred, and has a ventilation path formed therein (not shown). The air passage extends from the connection portion 34 of the suction hose 33 to each suction pad 30.

吸着パッド(吸着ヘッド)30は、図2の縦断面図、図3の底面図で示すように、ベース部35と、該ベース部から椀状に延びたスカート部37とを備えている。ベース部35は、ベース本体351と、該ベース本体から延び支持板31の通気路に接続されるアダプタ352とを備えている。アダプタ352には、通気路に作用する負圧を伝えるための通孔352aが形成され、ベース本体351には通孔352aに連通する貫通孔351aが形成されている。アダプタ352の外周面にはねじ部が形成され、これにナット353が螺合されている。吸着パッド30は、支持板31等のパッド取り付け板(ブラケット)の貫通孔にアダプタ352を挿入し、ナット353を締結することによって取り付けられる。   As shown in the longitudinal sectional view of FIG. 2 and the bottom view of FIG. 3, the suction pad (suction head) 30 includes a base portion 35 and a skirt portion 37 extending from the base portion in a hook shape. The base portion 35 includes a base main body 351 and an adapter 352 extending from the base main body and connected to the air passage of the support plate 31. The adapter 352 is formed with a through hole 352a for transmitting a negative pressure acting on the air passage, and the base body 351 is formed with a through hole 351a communicating with the through hole 352a. A threaded portion is formed on the outer peripheral surface of the adapter 352, and a nut 353 is screwed into the threaded portion. The suction pad 30 is attached by inserting an adapter 352 into a through hole of a pad attachment plate (bracket) such as the support plate 31 and fastening a nut 353.

スカート部37は、シリコン、NBR等の可撓性材料で形成され、ベース本体351から椀状に延びており、ベース本体351と反対側に開口端面371を形成している。ベース本体351及びスカート部37は、吸着パッド30が吸引力を作用させるための凹陥状内面38を形成している。   The skirt portion 37 is formed of a flexible material such as silicon or NBR, extends from the base body 351 in a bowl shape, and forms an open end surface 371 on the opposite side of the base body 351. The base body 351 and the skirt portion 37 form a concave inner surface 38 for allowing the suction pad 30 to apply a suction force.

この実施形態においてスカート部37は、ベース部35側から開口端面371側へベル状に拡径した形状となっている。これにより、保護シートにあてがわれた際に先端部が撓みやすく、スカート部内の負圧維持が確実となる。また、これに代えて、スカート部37は、図9(d) に示すように、ベース部35側で平面上に延び、ほぼ同径で開口端面371まで延びる筒状とすることもできる。この場合は、保護シートとの密着性を高めるために、先端部に可撓性に富むパッド372を設けるのが望ましい。   In this embodiment, the skirt portion 37 has a bell-like diameter expanded from the base portion 35 side to the opening end surface 371 side. Thereby, when it applies to a protective sheet, a front-end | tip part tends to bend and the negative pressure maintenance in a skirt part is ensured. Alternatively, as shown in FIG. 9 (d), the skirt portion 37 may have a cylindrical shape extending on a plane on the base portion 35 side and extending to the opening end surface 371 with substantially the same diameter. In this case, it is desirable to provide a pad 372 with high flexibility at the tip in order to improve the adhesion with the protective sheet.

吸着パッド30はさらに、穿孔用の突起39を備えている。突起39は、凹陥状内面38から開口端面371に向かって延びている。この突起39は、鋭利な先端部391を有し、その基端部はベース部35に固着されている。この固着は、接着、融着、ねじ止め等によって行なうことができ、接着には、例えば、シアノアクリレート系瞬間接着剤、エポキシ系接着剤、2液混合アクリル系接着剤等を用いることができる。或いは、ベース本体351及びスカート部37の成形時に突起39をインサート成形してもよい。突起39は、保護シート穿孔の良好な切削性が維持されるように、超硬合金等、硬度の高い金属製とするのが望ましい。   The suction pad 30 further includes a perforation protrusion 39. The protrusion 39 extends from the recessed inner surface 38 toward the opening end surface 371. The protrusion 39 has a sharp tip portion 391, and the base end portion is fixed to the base portion 35. This fixing can be performed by bonding, fusing, screwing, or the like. For bonding, for example, a cyanoacrylate instantaneous adhesive, an epoxy adhesive, a two-component mixed acrylic adhesive, or the like can be used. Alternatively, the protrusion 39 may be insert-molded when the base body 351 and the skirt portion 37 are molded. The protrusion 39 is preferably made of a metal having high hardness such as a cemented carbide so as to maintain good machinability of the protective sheet perforation.

突起39は、保護シートに形成した孔の周縁部分が突起周面全体に密着するのを回避する異形断面形状とされており、この実施形態では、図6(1a)、 (1b) に示すように三角錐状をなしている。これに代えて、図6(2a)、(2b) に示す四角錐状等、他の多角錘状とすることもできる。多角錘状とする場合は、これらの図に示すように、錘面392は、隣り合う稜線を結ぶ平面より凹状となっているのが望ましい。これにより、後述する通気部が形成されやすくなり、保護シートを通じた吸引力がガラス板により効果的に作用する。   The protrusion 39 has an irregular cross-sectional shape that prevents the peripheral edge portion of the hole formed in the protective sheet from sticking to the entire peripheral surface of the protrusion, and in this embodiment, as shown in FIGS. 6 (1a) and (1b). It has a triangular pyramid shape. Alternatively, other polygonal pyramids such as a quadrangular pyramid shown in FIGS. 6 (2a) and (2b) may be used. In the case of a polygonal pyramid shape, as shown in these drawings, the weight surface 392 is preferably concave from the plane connecting adjacent ridge lines. Thereby, the ventilation part mentioned later becomes easy to be formed and the suction power through a protection sheet acts more effectively by a glass plate.

図示の実施形態においては、例えば、スカート部37は、外径を50〜150mm、高さを5〜20mmとすることができ、その場合、突起39は、高さを5〜10mm、基端部の径を2〜5mmとすることができる。   In the illustrated embodiment, for example, the skirt portion 37 can have an outer diameter of 50 to 150 mm and a height of 5 to 20 mm. In this case, the protrusion 39 has a height of 5 to 10 mm and a proximal end portion. The diameter can be 2 to 5 mm.

突起39はまた、図6(3a)、 (3b) に示すように円錐状とし、円形断面の一部に通気部形成用の溝393を設けたものとすることもできる。単なる円錐状の突起は、保護シートの孔周縁部分が突起周面全体に密着し易く、その結果、吸着パッドの負圧が十分にガラス板に及ばない場合がある。これに対し、溝393を設けた突起39は、たとえ保護シートが周面に密着しても溝393との間に間隙が生じているので、その間隙を通気部として負圧がガラス板に到達することとなる。   The projection 39 may be conical as shown in FIGS. 6 (3a) and (3b), and a groove 393 for forming a ventilation portion may be provided in a part of the circular cross section. In a simple conical protrusion, the peripheral edge portion of the hole of the protective sheet tends to adhere to the entire peripheral surface of the protrusion, and as a result, the negative pressure of the suction pad may not sufficiently reach the glass plate. On the other hand, the protrusion 39 provided with the groove 393 has a gap with the groove 393 even if the protective sheet is in close contact with the peripheral surface, so that the negative pressure reaches the glass plate with the gap as a ventilation portion. Will be.

この移送装置は次のようにして使用される。まず、レール10に沿って移動手段1を所定のピックアップ位置に至らせる。図1は、ピックアップ位置において斜めに立て掛けられていたガラス板を吸着した状態を示している。移動手段1を操作して、ガラス板Pを覆っている保護シートBに吸着パッド30をあてがう。そして、図外の真空源から吸引ホース33及び支持板31を通じて吸着パッド30に負圧を作用させる。これにより、図4に示すように、保護シートBが吸着パッド30の凹陥状内面38側へ吸引される。そして、突起39の先端部391を越えて吸引されることにより、保護シートBに穿孔b0が形成される。さらに、突起39による三角形の穿孔b0は、各頂点(多角錘の稜線)から放射方向に延びる切れ目により通気部b1を生じさせる。特に、保護シートBはスカート部37とガラス板Pとの間に挟まれた状態で吸引され展延しているので、通気部(切れ目)b1は長く延びるように形成される。通気部b1は、保護シートBの表裏面を貫通して形成される結果、吸引力が効果的にガラス板に作用する。但し、突起39を五角錐以上の多角錘にすると、穿孔b0の周縁部分が突起周面全体に密着し易くなり、また、通気部b1が形成されにくく、保護シートの材質等によっては、十分な空気流が得られないことがある。   This transfer device is used as follows. First, the moving means 1 is brought to a predetermined pickup position along the rail 10. FIG. 1 shows a state in which a glass plate that has been leaned diagonally at the pickup position is adsorbed. By operating the moving means 1, the suction pad 30 is applied to the protective sheet B covering the glass plate P. Then, a negative pressure is applied to the suction pad 30 through a suction hose 33 and a support plate 31 from a vacuum source not shown. Thereby, as shown in FIG. 4, the protective sheet B is sucked toward the recessed inner surface 38 side of the suction pad 30. Then, the perforation b <b> 0 is formed in the protective sheet B by being sucked beyond the tip 391 of the protrusion 39. Further, the triangular perforation b0 by the protrusion 39 generates a ventilation part b1 by a cut extending in a radial direction from each vertex (ridge line of the polygonal pyramid). Particularly, since the protective sheet B is sucked and spread while being sandwiched between the skirt portion 37 and the glass plate P, the ventilation portion (cut) b1 is formed to extend long. The ventilation part b1 is formed through the front and back surfaces of the protective sheet B. As a result, the suction force effectively acts on the glass plate. However, if the protrusion 39 is a polygonal pyramid having a pentagonal pyramid or more, the peripheral portion of the perforation b0 is easily adhered to the entire peripheral surface of the protrusion, and the ventilation portion b1 is difficult to be formed. Air flow may not be obtained.

こうして吸引が行なわれると、真空源からの負圧は、穿孔b0及び通気部b1を通じてガラス板Pに作用し、ガラス板Pは吸着パッド30に吸着される。この状態で、移動手段1により吸着装置3を所定の位置へ移動させ、移動後に真空源からの負圧を解除すれば、ガラス板Pを保護シートBと共に所定位置に設置することができる。この設置も、単体または積層、水平、垂直または斜め等、いずれであってもよい。吸着パッドの吸引力は、保護シートに多少の皺が存在しても、穿孔b0等を通じてガラス板に到達するので、確実な吸着が可能となる。このように、吸着パッドの吸引力が確実にガラス板に及ぶ結果、移送中のガラス板の落下等の事故を防止することができる。   When suction is performed in this manner, the negative pressure from the vacuum source acts on the glass plate P through the perforations b0 and the ventilation portion b1, and the glass plate P is adsorbed by the suction pad 30. In this state, if the suction device 3 is moved to a predetermined position by the moving means 1 and the negative pressure from the vacuum source is released after the movement, the glass plate P can be installed at the predetermined position together with the protective sheet B. This installation may be any of single or stacked, horizontal, vertical or diagonal. Since the suction force of the suction pad reaches the glass plate through the perforations b0 and the like even if there are some wrinkles in the protective sheet, reliable suction is possible. Thus, as a result of the suction force of the suction pad reliably reaching the glass plate, accidents such as dropping of the glass plate during transfer can be prevented.

図7及び図8は、本発明の移送装置の他の実施形態を示している。この移送装置における吸着パッド30は、凹陥状内面38から開口端面371側へ延びるストッパ36を備えている。ストッパ36は、図8に示すように、円柱状をなしベース部35の4箇所に設けられおり、各々、突起39の先端部391を越え開口端面371より手前の位置まで延びている。   7 and 8 show another embodiment of the transfer device of the present invention. The suction pad 30 in this transfer device includes a stopper 36 extending from the recessed inner surface 38 toward the opening end surface 371. As shown in FIG. 8, the stopper 36 has a columnar shape and is provided at four locations on the base portion 35, and each extends beyond the tip portion 391 of the protrusion 39 to a position before the opening end surface 371.

この吸着パッド30を用いれば、保護シートBを吸着した際に、スカート部37が撓んでガラス板Pが突起39に接近しても、ガラス板Pは、ストッパ36に当接すると、それ以上の突起39側への移動が制限されるので、突起39に接触してガラス板Pが損傷を受けるのが防止される。   If the suction pad 30 is used, even when the protective sheet B is sucked, even if the skirt portion 37 is bent and the glass plate P approaches the protrusion 39, the glass plate P will not exceed the stopper 36 when it comes into contact with the stopper 36. Since the movement toward the protrusion 39 is restricted, the glass plate P is prevented from being damaged due to contact with the protrusion 39.

ストッパ36は、図示のように、複数個を分散配置する他、円状、多角形状等の連続的または断続的な環状としてもよい。また、突起39は、ストッパ36の配置領域の内部の他、外部に設けてもよい。この実施形態では、突起39は、ベース部35における貫通孔351aの壁面に接着されている。   As shown in the figure, the stoppers 36 may be arranged in a distributed manner or in a continuous or intermittent ring shape such as a circular shape or a polygonal shape. Further, the protrusion 39 may be provided outside the inside of the arrangement area of the stopper 36. In this embodiment, the protrusion 39 is bonded to the wall surface of the through hole 351 a in the base portion 35.

以上、本発明の一実施形態について説明したが、本発明はこれに限定されるものではなく、その趣旨を逸脱しない限りにおいて種々の変更が可能である。例えば、穿孔用の突起39は、図9に例示するように、凹陥状内面38の種々の箇所に設けることができる。図9(a) はスカート部37の位置、図9(b) はベース部35の位置、図9(c) はベース部35におけるアダプタ352の位置、図9(d) はベース部端面から後退したアダプタ352の位置に、各々突起39が設けられた状態を示している。アダプタ352は、通常金属製であるので、突起39を蝋付けすることができる。また、アダプタ352と突起39とを一体に機械加工して形成してもよい。   As mentioned above, although one Embodiment of this invention was described, this invention is not limited to this, A various change is possible unless it deviates from the meaning. For example, the piercing projections 39 can be provided at various locations on the concave inner surface 38 as illustrated in FIG. 9A is the position of the skirt portion 37, FIG. 9B is the position of the base portion 35, FIG. 9C is the position of the adapter 352 in the base portion 35, and FIG. The state where the projections 39 are provided at the positions of the adapters 352 is shown. Since the adapter 352 is usually made of metal, the protrusion 39 can be brazed. Further, the adapter 352 and the protrusion 39 may be integrally machined.

突起は、複数個設けることもできる。図10は、2個の突起39を設けた例を示しており、図10(a) はスカート部37とベース部35の位置、図10(b) はベース部35の位置、図10(c) はスカート部37の位置に、各々突起39が設けられた状態を示している。このように、複数個の突起39を設けることにより、保護シートに形成される穿孔を通じてより多くの空気流を得ることができ、操作の迅速性を図ることができる。   A plurality of protrusions can be provided. 10 shows an example in which two protrusions 39 are provided. FIG. 10A shows the position of the skirt portion 37 and the base portion 35, FIG. 10B shows the position of the base portion 35, and FIG. ) Shows a state in which a projection 39 is provided at each position of the skirt portion 37. Thus, by providing the some protrusion 39, more airflow can be obtained through the perforation formed in a protection sheet, and the speed of operation can be aimed at.

上記実施形態では、多数の吸着パッドを用いて1枚のガラス板を吸着する例を示したが、ガラス板の寸法によっては、1枚のガラス板を1個または2個〜数個の吸着パッドで吸着することもできる。また、上記実施形態では、ガラス板Pを移送対象物としたが、移送対象物は、樹脂板、ガラス層と樹脂層とを積層して構成される積層体板、金属板等の板状部材であってもよい。   In the said embodiment, although the example which adsorb | sucks one glass plate using many suction pads was shown, depending on the dimension of a glass plate, one glass plate or two to several suction pads Can also be adsorbed. Moreover, in the said embodiment, although the glass plate P was made into the transfer object, transfer objects are plate-shaped members, such as a laminated board comprised by laminating | stacking a resin plate, a glass layer, and a resin layer, a metal plate, etc. It may be.

1: 移動手段
3: 吸着装置
30: 吸着パッド
35: ベース部
36: ストッパ
37: スカート部
38: 凹陥状内面
39: 突起
371:開口端面
B: 保護シート
P: ガラス板
b0: 穿孔
b1: 切れ目
1: Moving means 3: Suction device 30: Suction pad 35: Base portion 36: Stopper 37: Skirt portion 38: Recessed inner surface 39: Protrusion 371: Open end surface B: Protective sheet P: Glass plate b0: Perforation b1: Cut

Claims (9)

吸着パッドを介して作用する負圧により板状部材を吸着保持した状態で、前記板状部材を移送する板状部材の移送装置であって、
前記吸着パッドはその内面に突起を有し、前記板状部材の表面に重ねられた保護シートを負圧により吸着したとき、前記突起が前記保護シートを貫通すると共に、前記保護シートの前記突起による貫通部分の周囲に通気部が形成され、該通気部を介して前記板状部材に作用する負圧により前記板状部材を前記保護シートと共に吸着保持することを特徴とする板状部材の移送装置。
A plate-like member transfer device for transferring the plate-like member in a state where the plate-like member is sucked and held by a negative pressure acting via a suction pad,
The suction pad has a protrusion on its inner surface, and when the protective sheet stacked on the surface of the plate-like member is sucked by negative pressure, the protrusion penetrates the protective sheet and is formed by the protrusion of the protective sheet. A plate-shaped member transfer device, characterized in that a ventilation portion is formed around the penetrating portion, and the plate-like member is adsorbed and held together with the protective sheet by a negative pressure acting on the plate-like member through the ventilation portion. .
前記突起が、その表面に突出方向に沿って延びる切刃を有することを特徴とする請求項1に記載の板状部材の移送装置。   The plate-like member transfer device according to claim 1, wherein the protrusion has a cutting edge extending along a protruding direction on a surface thereof. 前記突起が多角錘形状をなし、該多角錘形状の稜線が前記切刃を構成することを特徴とする請求項2に記載の板状部材の移送装置。   The plate-like member transfer device according to claim 2, wherein the projection has a polygonal pyramid shape, and the polygonal ridge line forms the cutting blade. 前記吸着パッドは、真空源に接続されるベース部と、該ベース部から椀状に延びて開口端面を形成するスカート部とを備え、前記突起が、前記ベース部に設けられていることを特徴とする請求項1〜3のいずれか1項に記載の板状部材の移送装置。   The suction pad includes a base part connected to a vacuum source and a skirt part extending from the base part to form an opening end surface, and the protrusion is provided on the base part. The plate-shaped member transfer device according to any one of claims 1 to 3. 前記吸着パッドは、真空源に接続されるベース部と、該ベース部から椀状に延びて開口端面を形成するスカート部とを備え、前記突起が、前記ベース部と前記スカート部との境界近傍に設けられていることを特徴とする請求項1〜3のいずれか1項に記載の板状部材の移送装置。   The suction pad includes a base portion connected to a vacuum source, and a skirt portion extending from the base portion in a bowl shape to form an opening end surface, and the protrusion is in the vicinity of a boundary between the base portion and the skirt portion The plate-shaped member transfer device according to claim 1, wherein the plate-shaped member transfer device is provided. 前記吸着パッドは、その内面から開口端面側へ延びるストッパを備えており、該ストッパは、前記突起の先端部を越え前記開口端面よりも手前の位置まで延びていることを特徴とする請求項1〜5のいずれか1項に記載の板状部材の移送装置。   2. The suction pad includes a stopper extending from an inner surface thereof toward an opening end surface, and the stopper extends beyond a tip portion of the protrusion to a position before the opening end surface. The transfer apparatus of the plate-shaped member of any one of -5. 前記突起が、金属製であることを特徴とする請求項1〜6のいずれか1項に記載の板状部材の移送装置。   The plate-like member transfer device according to claim 1, wherein the protrusion is made of metal. 負圧を発生させる真空源に通じる吸着パッドであって、
パッド内面に突起を有し、該突起がその表面に突出方向に沿って延びる切刃を有することを特徴とする吸着パッド。
A suction pad leading to a vacuum source that generates negative pressure,
A suction pad having a protrusion on the inner surface of the pad, and the protrusion having a cutting edge extending along the protruding direction on the surface thereof.
前記突起が多角錘形状をなし、該多角錘形状の稜線が前記切刃を構成することを特徴とする請求項8に記載の吸着パッド。   The suction pad according to claim 8, wherein the protrusion has a polygonal pyramid shape, and the polygonal ridge line forms the cutting blade.
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