KR20130086114A - Transfer device for plate-like member, and suction pad - Google Patents
Transfer device for plate-like member, and suction pad Download PDFInfo
- Publication number
- KR20130086114A KR20130086114A KR1020127023034A KR20127023034A KR20130086114A KR 20130086114 A KR20130086114 A KR 20130086114A KR 1020127023034 A KR1020127023034 A KR 1020127023034A KR 20127023034 A KR20127023034 A KR 20127023034A KR 20130086114 A KR20130086114 A KR 20130086114A
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- KR
- South Korea
- Prior art keywords
- plate
- protective sheet
- protrusion
- suction pad
- pad
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Abstract
As a conveying apparatus of a plate-shaped member which conveys the glass plate P as a plate-shaped member by the negative pressure which acts through a adsorption pad, the adsorption pad 30 has the projection 39 on the inner surface, and the glass plate ( When adsorb | sucking the protective sheet B superimposed on the surface of P), the projection 39 penetrates through the protective sheet B, and the ventilation part b1 is formed around the penetrating part by the processus | protrusion of the protective sheet, The glass plate P is adsorbed and held together with the protective sheet B through the vent.
Description
BACKGROUND OF THE
For example, the glass substrate used for manufacture of display panels for image display apparatuses, such as a liquid crystal display and a plasma display, the glass substrate used as an electronic display function element, or the base material for thin film formation, the glass plate material for building structures, etc. Is collectively called a glass plate) and is conveyed to a predetermined position in processes such as production, conveyance, and storage. In the conveyance, the conveying apparatus of the type which adsorb | sucks a glass plate with a suction pad and moves the said suction pad to a predetermined position by a moving means is widely used. The adsorption pad connected to a vacuum source adsorb | sucks a glass plate by making the inside of a pad into negative pressure in the state stuck to the glass plate.
On the other hand, the glass plate is covered with a protective sheet (paper) such as paper or synthetic resin in order to prevent scratches and stains after processing or to prevent abrasion due to contact between the glass plates during loading into the packing pallet. Are often transported to. In addition, the glass plate for flat panel displays adsorb | sucks to a suction pad through a protective sheet so that the contact mark of a suction pad may not be left. In any case, since the negative pressure of the adsorption pad acts on the protective sheet first, it is necessary to adsorb the glass plate through the protective sheet.
For example, when using a breathable protective sheet such as paper, the adsorption force can be applied to the glass plate through the protective sheet. For example, in the conveying apparatus of
On the other hand, in the apparatus of patent document 4, only the foamed resin sheet used as a protective sheet is adsorb | sucked by an adsorption pad once, and a cut part is formed by making a sheet surface contact a needle-shaped or knife-shaped sticking member, and makes it breathable. Then, the protective sheet is moved onto the glass plate, and a suction pad is attached to the cutout forming position and sucked to cause negative pressure to reach the glass plate. According to this apparatus, the negative pressure can be surely extended to the glass plate regardless of the material of the protective sheet. However, it is necessary to go through the step of forming a cutout by adsorbing only the protective sheet once, and there is a drawback that the process and the apparatus are complicated.
Then, an object of this invention is to provide the conveying apparatus which can carry out adsorption | suction of plate-shaped members, such as a glass plate, through a protective sheet easily and reliably, and a suction pad for it.
In order to achieve the above object, the present invention is a conveying apparatus of a plate-like member for conveying the plate-shaped member in a state in which the plate-like member is adsorbed and held by a negative pressure acting through the adsorption pad, the adsorption pad is provided on its inner surface. When the protective sheet superposed on the surface of the plate-like member is adsorbed by negative pressure, the projection penetrates the protective sheet and a vent is formed around the through portion of the protective sheet by the projection, It is an object of the present invention to provide a conveying apparatus for a plate member, wherein the plate member is adsorbed and held together with the protective sheet by a negative pressure acting on the plate member through the vent.
As described above, the transfer device has protrusions on its inner surface, and the protrusions penetrate the protective sheet when the protective sheet on the surface of a plate-like member such as a glass plate is adsorbed by negative pressure. Thereby, the ventilation sheet is provided with the ventilation part around the perforation part by a processus | protrusion, and a suction pad adsorbs-holds a plate-shaped member with a protection sheet by the negative pressure which acts on a plate-shaped member through the said ventilation part. Therefore, adsorption | suction of the glass plate through a protective sheet can be performed simply and reliably based on the simple structure which forms a processus | protrusion in the pad inner surface, and forms a ventilation part in a protection sheet by the said processus | protrusion using a negative pressure.
The projection may have a cutting edge extending in the protruding direction on the surface thereof. This cutting edge penetrates through the protective sheet when the protective sheet is adsorbed by the suction pad, and reliably forms a vent around the through portion.
The projections may form a polygonal weight shape, and the polygonal ridgeline may constitute the cutting edge. Thereby, the hole formed in the protective sheet forms a ventilation portion by a gap extending in the radial direction from the ridgeline of the polygon weight. In particular, since the gap is formed to extend over the protective sheet extended by suction, the suction force acts on the plate member more effectively.
The suction pad may include a base portion connected to a vacuum source, a skirt portion extending from the base portion in a bowl shape to form an opening end surface, and the protrusion may be formed on the base portion. The protrusion formed in the base portion is located at the inner end of the ball-shaped skirt portion. Therefore, it is possible to reliably prevent the plate-shaped member from contacting the projection when suctioned by the negative pressure. In particular, this point is effective when the skirt portion elastically deforms to the plate-shaped member side upon suction.
The suction pad includes a base portion connected to a vacuum source, and a skirt portion extending from the base portion into a ball shape to form an opening end surface, and the protrusion is formed near a boundary between the base portion and the skirt portion. Can be. The suctioned protective sheet deforms almost along the skirt portion and the base portion to reach the projections. On the other hand, when the skirt portion is elastically deformed due to suction, the deformation amount decreases at the proximal end side close to the base portion, so that the plate-shaped member is difficult to reach near the boundary between the skirt portion and the base portion, and the contact with the projection is surely prevented.
The said suction pad is provided with the stopper extended from the inner surface to the opening end surface side, and the said stopper can be extended to the position ahead of the said opening end surface beyond the front-end | tip part of the said projection. When the adsorption pad is used, even when the protective sheet is adsorbed, even if the skirt is bent and the plate-shaped member approaches the projection, the plate-shaped member contacts the stopper, thereby restricting the movement toward the projection. It is certainly prevented from receiving.
The protrusion may be made of metal. Thereby, the machinability which penetrates a protective sheet at the time of adsorption by an adsorption pad becomes favorable, and favorable machinability is maintained over a long term.
In order to achieve the above object, the present invention is an adsorption pad leading to a vacuum source for generating a negative pressure, the adsorption pad having a projection on the inner surface of the pad, the projection has a cutting edge extending in the protruding direction on the surface To provide a pad.
Thus, since the adsorption pad has protrusions on its inner surface, when the protective sheet is superposed on the surface of the plate-like member, the protrusion penetrates through the adsorbed protective sheet. Thereby, the ventilation sheet is provided with the ventilation part around the perforation part by a processus | protrusion, and a suction pad adsorbs-holds a plate-shaped member with a protection sheet by the negative pressure which acts on a plate-shaped member through the said ventilation part. Therefore, based on the simple structure which forms a processus | protrusion in a pad inner surface, and forms a ventilation part in a protection sheet by the said processus | protrusion using negative pressure, adsorption of the plate-shaped member through a protection sheet can be performed simply and reliably.
The projections may form a polygonal weight shape, and the polygonal ridgeline may constitute the cutting edge. Thereby, the hole formed in the protective sheet forms a ventilation portion by a gap extending in the radial direction from the ridgeline of the polygon weight. In particular, since the gap is formed to extend on the protective sheet extended by suction, the suction force acts on the plate member more effectively.
(Effects of the Invention)
As mentioned above, according to this invention, the conveying apparatus which can carry out adsorption | suction of plate-shaped members, such as a glass plate, through a protective sheet easily and reliably, and a suction pad for it can be provided.
1 is a front view schematically showing one embodiment of a conveying apparatus according to the present invention.
It is a longitudinal cross-sectional view which shows the adsorption pad in the conveyance apparatus shown in FIG.
3 is a bottom view of the adsorption pad shown in FIG. 2.
4 is a longitudinal cross-sectional view showing a state of use of the adsorption pad shown in FIG. 2.
It is a bottom view which shows the form of a perforation of the protective sheet in the use state of FIG.
FIG. 6A is a diagram showing the shape of the projections used in the adsorption pad of FIG. 2. FIG.
FIG. 6B is a diagram illustrating another form of the projection used for the adsorption pad of FIG. 2. FIG.
FIG. 6C is a diagram illustrating another embodiment of the projection used for the adsorption pad of FIG. 2.
FIG. 6D is a diagram showing another embodiment of the projection used for the adsorption pad of FIG. 2. FIG.
6E is a view showing another embodiment of the projection used for the adsorption pad of FIG. 2.
FIG. 6F is a diagram illustrating another embodiment of the projection used for the adsorption pad of FIG. 2.
It is a longitudinal cross-sectional view which shows another embodiment of the adsorption pad which concerns on this invention.
FIG. 8 is a bottom view of the adsorption pad shown in FIG. 7. FIG.
It is a longitudinal cross-sectional view which shows another form of a suction pad.
It is a longitudinal cross-sectional view which shows another form of a suction pad.
It is a longitudinal cross-sectional view which shows another form of a suction pad.
9D is a longitudinal sectional view showing another embodiment of the suction pad.
10A is a longitudinal cross-sectional view showing still another embodiment of the adsorption pad.
10B is a longitudinal cross-sectional view showing still another embodiment of the adsorption pad.
10C is a longitudinal cross-sectional view showing still another embodiment of the adsorption pad.
EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring an accompanying drawing. The same or similar parts in the drawings are denoted by the same reference numerals, and a part of the description is omitted.
1 is a front view schematically showing one embodiment of a conveying apparatus according to the present invention. This transfer apparatus is provided with the movement means 1 supported by the
The moving means 1 includes a sliding
The
In each station, glass plate P may be any installation state, such as unity or lamination | stacking, horizontal, vertical, or existing. In addition, the protective sheet is laminated | stacked for glass plate P, etc. for surface protection. The protective sheet (so-called paper) is made of synthetic resin such as foamed resin sheet, paper, and the like. It is preferable that a protective sheet (b) has elasticity. As a result, the protective sheet is easily deformed along the inner surface of the pad so as to prevent wrinkles upon adsorption by the suction pad described later, and through holes can be reliably formed by projections.
The
In this embodiment, the
The suction pad (adsorption head) 30 is provided with the
The
In this embodiment, the
The
The
In the illustrated embodiment, for example, the
As shown in Figs. 6E and 6F, the
This conveying apparatus is used as follows. First, the moving
When suction is performed in this manner, the negative pressure from the vacuum source acts on the glass plate P through the perforation b0 and the venting portion b1, and the glass plate P is adsorbed by the
7 and 8 show another embodiment of the transfer apparatus of the present invention. The
When the
As shown in the figure, the
As mentioned above, although one Embodiment of this invention was described, this invention is not limited to this, A various change is possible as long as it does not deviate from the meaning. For example, the
A plurality of projections may be formed. FIG. 10 shows an example in which two
In the said embodiment, although the example which adsorb | sucks one glass plate using many adsorption pads was shown, you may adsorb | suck one glass plate with one or two-several adsorption pads depending on the dimension of a glass plate. In addition, in the said embodiment, although the glass plate P was made into the conveying object, the conveying object may be plate-shaped members, such as a laminated body board and a metal plate comprised by laminating | stacking a resin plate, a glass layer, and a resin layer.
1: moving means 3: adsorption device
30: suction pad 35: base portion
36: stopper 37: skirt
38: inside concave shape 39: projection
371: end face of opening B: protective sheet
P: glass plate b0: perforated
b1: gap
Claims (9)
The adsorption pad has a protrusion on its inner surface, and when the protective sheet superimposed on the surface of the plate member is sucked by negative pressure, the protrusion penetrates through the protective sheet, and An air vent is formed around the plate, and the plate member is sucked and held together with the protective sheet by a negative pressure acting on the plate member through the vent.
And said projection has a cutting edge extending in the protruding direction on its surface.
The projection has a polygon weight shape, and the polygon weight ridge line constitutes the cutting edge.
The suction pad includes a base portion connected to a vacuum source, a skirt portion extending from the base portion into a ball shape to form an opening end surface, and the protrusion is formed on the base portion. Conveying device.
The suction pad includes a base portion connected to a vacuum source, and a skirt portion extending from the base portion into a ball shape to form an opening end surface, wherein the protrusion is formed near a boundary between the base portion and the skirt portion. The conveying apparatus of the plate-shaped member made into.
The suction pad has a stopper extending from an inner surface thereof to an opening end face side, and the stopper extends beyond the distal end of the protrusion to a position ahead of the opening end face.
The projection is a plate-shaped member transfer device, characterized in that the metal.
A suction pad having a protrusion on an inner surface of the pad, the protrusion having a cutting edge extending in a protruding direction on a surface thereof.
The projections form a polygonal weight shape, wherein the polygonal ridge lines constitute the cutting edge.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2010-130010 | 2010-06-07 | ||
JP2010130010 | 2010-06-07 | ||
PCT/JP2011/062938 WO2011155443A1 (en) | 2010-06-07 | 2011-06-06 | Transfer device for plate-like member, and suction pad |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20130086114A true KR20130086114A (en) | 2013-07-31 |
KR102043656B1 KR102043656B1 (en) | 2019-11-12 |
Family
ID=45098050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020127023034A KR102043656B1 (en) | 2010-06-07 | 2011-06-06 | Transfer device for plate-like member, and suction pad |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5803670B2 (en) |
KR (1) | KR102043656B1 (en) |
CN (1) | CN102870204B (en) |
TW (2) | TWI516429B (en) |
WO (1) | WO2011155443A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102344896B1 (en) * | 2021-05-31 | 2021-12-30 | 씰테크 주식회사 | Method of forming underfill, method of manufacturing semiconductor package using the same, and release film for underfill process |
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JP6470331B2 (en) * | 2017-03-13 | 2019-02-13 | 株式会社東芝 | Gripping tool, gripping system, and gripping performance evaluation method |
JP7148105B2 (en) * | 2017-09-20 | 2022-10-05 | 株式会社ハーモテック | suction device |
JP6353969B1 (en) * | 2017-11-29 | 2018-07-04 | 株式会社ユー・エム・アイ | Transport tool, transport method and transport tool unit |
JP6970431B2 (en) * | 2017-11-29 | 2021-11-24 | 三星ダイヤモンド工業株式会社 | Board unloading device |
KR102560167B1 (en) * | 2018-10-04 | 2023-07-25 | 코닝 인코포레이티드 | Apparatus of supporting debonding and method for debonding using the same |
CN113249882A (en) * | 2020-02-11 | 2021-08-13 | Juki株式会社 | Pickup head and conveying device |
CN111470317B (en) * | 2020-04-13 | 2021-09-07 | 广州大学 | Tableware sorting machine with self-cleaning sucker manipulator |
KR102279857B1 (en) * | 2020-10-08 | 2021-07-22 | (주)하이엠시 | Improved Method for manufacturing WC (Tungsten Carbide) bonding tappet used Diesel Engine |
CN114516536A (en) * | 2020-11-19 | 2022-05-20 | 日本电产三协(浙江)有限公司 | Adsorption pad and industrial robot |
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JPS6011860U (en) | 1983-07-05 | 1985-01-26 | マツダ株式会社 | seat belt device |
JPH01264798A (en) * | 1988-04-11 | 1989-10-23 | San Pearl:Kk | Manufacture of container with fine holes |
JP2000263484A (en) * | 1999-03-12 | 2000-09-26 | Shin Etsu Chem Co Ltd | Method and device for vacuum suction |
JP2004136926A (en) | 2002-10-17 | 2004-05-13 | Nippon Sheet Glass Co Ltd | Method and device for transferring curved glass sheet with slip sheet |
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JP2005075482A (en) | 2003-08-28 | 2005-03-24 | Nippon Electric Glass Co Ltd | Glass sheet packing method and glass sheet packing device |
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JPS5930703Y2 (en) * | 1979-10-18 | 1984-09-01 | 幸男 石田 | Liquid absorption cut forming device for sheet food |
JPH0513911U (en) * | 1991-06-07 | 1993-02-23 | 三菱マテリアル株式会社 | Bag cutter for hopper |
JP4297829B2 (en) * | 2004-04-23 | 2009-07-15 | リンテック株式会社 | Adsorption device |
WO2007059122A1 (en) * | 2005-11-14 | 2007-05-24 | Heat Wave Technologies Llc | Self-heating container |
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2011
- 2011-06-06 KR KR1020127023034A patent/KR102043656B1/en active IP Right Grant
- 2011-06-06 WO PCT/JP2011/062938 patent/WO2011155443A1/en active Application Filing
- 2011-06-06 JP JP2011524098A patent/JP5803670B2/en active Active
- 2011-06-06 CN CN201180022261.8A patent/CN102870204B/en active Active
- 2011-06-07 TW TW100119874A patent/TWI516429B/en active
- 2011-06-07 TW TW104135159A patent/TWI530447B/en active
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JPS6011860U (en) | 1983-07-05 | 1985-01-26 | マツダ株式会社 | seat belt device |
JPH01264798A (en) * | 1988-04-11 | 1989-10-23 | San Pearl:Kk | Manufacture of container with fine holes |
JP2000263484A (en) * | 1999-03-12 | 2000-09-26 | Shin Etsu Chem Co Ltd | Method and device for vacuum suction |
JP2004136926A (en) | 2002-10-17 | 2004-05-13 | Nippon Sheet Glass Co Ltd | Method and device for transferring curved glass sheet with slip sheet |
JP2004153157A (en) | 2002-10-31 | 2004-05-27 | Seiko Epson Corp | Vacuum pincette and semiconductor wafer carrying method |
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Publication number | Priority date | Publication date | Assignee | Title |
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KR102344896B1 (en) * | 2021-05-31 | 2021-12-30 | 씰테크 주식회사 | Method of forming underfill, method of manufacturing semiconductor package using the same, and release film for underfill process |
Also Published As
Publication number | Publication date |
---|---|
KR102043656B1 (en) | 2019-11-12 |
CN102870204B (en) | 2016-02-03 |
TW201200443A (en) | 2012-01-01 |
JP5803670B2 (en) | 2015-11-04 |
TWI530447B (en) | 2016-04-21 |
TWI516429B (en) | 2016-01-11 |
WO2011155443A1 (en) | 2011-12-15 |
CN102870204A (en) | 2013-01-09 |
JPWO2011155443A1 (en) | 2013-08-01 |
TW201604109A (en) | 2016-02-01 |
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