KR20130086114A - Transfer device for plate-like member, and suction pad - Google Patents

Transfer device for plate-like member, and suction pad Download PDF

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Publication number
KR20130086114A
KR20130086114A KR1020127023034A KR20127023034A KR20130086114A KR 20130086114 A KR20130086114 A KR 20130086114A KR 1020127023034 A KR1020127023034 A KR 1020127023034A KR 20127023034 A KR20127023034 A KR 20127023034A KR 20130086114 A KR20130086114 A KR 20130086114A
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KR
South Korea
Prior art keywords
plate
protective sheet
protrusion
suction pad
pad
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KR1020127023034A
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Korean (ko)
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KR102043656B1 (en
Inventor
노리오 코야마
타카시 하시모토
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니폰 덴키 가라스 가부시키가이샤
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Publication of KR20130086114A publication Critical patent/KR20130086114A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • B65G2249/045Details of suction cups suction cups

Abstract

As a conveying apparatus of a plate-shaped member which conveys the glass plate P as a plate-shaped member by the negative pressure which acts through a adsorption pad, the adsorption pad 30 has the projection 39 on the inner surface, and the glass plate ( When adsorb | sucking the protective sheet B superimposed on the surface of P), the projection 39 penetrates through the protective sheet B, and the ventilation part b1 is formed around the penetrating part by the processus | protrusion of the protective sheet, The glass plate P is adsorbed and held together with the protective sheet B through the vent.

Description

TRAINFER DEVICE FOR PLATE-LIKE MEMBER, AND SUCTION PAD}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conveying apparatus for conveying a plate-shaped member such as a laminated sheet and a metal sheet formed by laminating a glass sheet, a resin sheet, a glass layer and a resin layer, and a suction pad for the apparatus. A conveying apparatus and a suction pad for conveying an accompanying plate-shaped member with a protective sheet.

For example, the glass substrate used for manufacture of display panels for image display apparatuses, such as a liquid crystal display and a plasma display, the glass substrate used as an electronic display function element, or the base material for thin film formation, the glass plate material for building structures, etc. Is collectively called a glass plate) and is conveyed to a predetermined position in processes such as production, conveyance, and storage. In the conveyance, the conveying apparatus of the type which adsorb | sucks a glass plate with a suction pad and moves the said suction pad to a predetermined position by a moving means is widely used. The adsorption pad connected to a vacuum source adsorb | sucks a glass plate by making the inside of a pad into negative pressure in the state stuck to the glass plate.

On the other hand, the glass plate is covered with a protective sheet (paper) such as paper or synthetic resin in order to prevent scratches and stains after processing or to prevent abrasion due to contact between the glass plates during loading into the packing pallet. Are often transported to. In addition, the glass plate for flat panel displays adsorb | sucks to a suction pad through a protective sheet so that the contact mark of a suction pad may not be left. In any case, since the negative pressure of the adsorption pad acts on the protective sheet first, it is necessary to adsorb the glass plate through the protective sheet.

For example, when using a breathable protective sheet such as paper, the adsorption force can be applied to the glass plate through the protective sheet. For example, in the conveying apparatus of patent document 1, patent document 2, and patent document 3, negative pressure is made to extend to a glass plate by using a breathable protective sheet, such as porous. However, in these cases, the material of the protective sheet is limited. In particular, when the glass sheet laminated to the packing pallet is transferred to a truck or the like, the glass sheet may be shifted due to vibration. Thus, as a protective sheet, a foamed resin sheet which is cushioned and hard to be shifted is often used. The glass plate cannot be adsorbed through the sheet.

On the other hand, in the apparatus of patent document 4, only the foamed resin sheet used as a protective sheet is adsorb | sucked by an adsorption pad once, and a cut part is formed by making a sheet surface contact a needle-shaped or knife-shaped sticking member, and makes it breathable. Then, the protective sheet is moved onto the glass plate, and a suction pad is attached to the cutout forming position and sucked to cause negative pressure to reach the glass plate. According to this apparatus, the negative pressure can be surely extended to the glass plate regardless of the material of the protective sheet. However, it is necessary to go through the step of forming a cutout by adsorbing only the protective sheet once, and there is a drawback that the process and the apparatus are complicated.

Japanese Patent Publication 2004-136926 (paragraph 0009) Japanese public utility model construction office 60-11860 (the second column) Japanese Patent Publication 2004-153157 (paragraph 0213) Japanese Patent Laid-Open 2005-75482 (paragraphs 041 to 0045)

Then, an object of this invention is to provide the conveying apparatus which can carry out adsorption | suction of plate-shaped members, such as a glass plate, through a protective sheet easily and reliably, and a suction pad for it.

In order to achieve the above object, the present invention is a conveying apparatus of a plate-like member for conveying the plate-shaped member in a state in which the plate-like member is adsorbed and held by a negative pressure acting through the adsorption pad, the adsorption pad is provided on its inner surface. When the protective sheet superposed on the surface of the plate-like member is adsorbed by negative pressure, the projection penetrates the protective sheet and a vent is formed around the through portion of the protective sheet by the projection, It is an object of the present invention to provide a conveying apparatus for a plate member, wherein the plate member is adsorbed and held together with the protective sheet by a negative pressure acting on the plate member through the vent.

As described above, the transfer device has protrusions on its inner surface, and the protrusions penetrate the protective sheet when the protective sheet on the surface of a plate-like member such as a glass plate is adsorbed by negative pressure. Thereby, the ventilation sheet is provided with the ventilation part around the perforation part by a processus | protrusion, and a suction pad adsorbs-holds a plate-shaped member with a protection sheet by the negative pressure which acts on a plate-shaped member through the said ventilation part. Therefore, adsorption | suction of the glass plate through a protective sheet can be performed simply and reliably based on the simple structure which forms a processus | protrusion in the pad inner surface, and forms a ventilation part in a protection sheet by the said processus | protrusion using a negative pressure.

The projection may have a cutting edge extending in the protruding direction on the surface thereof. This cutting edge penetrates through the protective sheet when the protective sheet is adsorbed by the suction pad, and reliably forms a vent around the through portion.

The projections may form a polygonal weight shape, and the polygonal ridgeline may constitute the cutting edge. Thereby, the hole formed in the protective sheet forms a ventilation portion by a gap extending in the radial direction from the ridgeline of the polygon weight. In particular, since the gap is formed to extend over the protective sheet extended by suction, the suction force acts on the plate member more effectively.

The suction pad may include a base portion connected to a vacuum source, a skirt portion extending from the base portion in a bowl shape to form an opening end surface, and the protrusion may be formed on the base portion. The protrusion formed in the base portion is located at the inner end of the ball-shaped skirt portion. Therefore, it is possible to reliably prevent the plate-shaped member from contacting the projection when suctioned by the negative pressure. In particular, this point is effective when the skirt portion elastically deforms to the plate-shaped member side upon suction.

The suction pad includes a base portion connected to a vacuum source, and a skirt portion extending from the base portion into a ball shape to form an opening end surface, and the protrusion is formed near a boundary between the base portion and the skirt portion. Can be. The suctioned protective sheet deforms almost along the skirt portion and the base portion to reach the projections. On the other hand, when the skirt portion is elastically deformed due to suction, the deformation amount decreases at the proximal end side close to the base portion, so that the plate-shaped member is difficult to reach near the boundary between the skirt portion and the base portion, and the contact with the projection is surely prevented.

The said suction pad is provided with the stopper extended from the inner surface to the opening end surface side, and the said stopper can be extended to the position ahead of the said opening end surface beyond the front-end | tip part of the said projection. When the adsorption pad is used, even when the protective sheet is adsorbed, even if the skirt is bent and the plate-shaped member approaches the projection, the plate-shaped member contacts the stopper, thereby restricting the movement toward the projection. It is certainly prevented from receiving.

The protrusion may be made of metal. Thereby, the machinability which penetrates a protective sheet at the time of adsorption by an adsorption pad becomes favorable, and favorable machinability is maintained over a long term.

In order to achieve the above object, the present invention is an adsorption pad leading to a vacuum source for generating a negative pressure, the adsorption pad having a projection on the inner surface of the pad, the projection has a cutting edge extending in the protruding direction on the surface To provide a pad.

Thus, since the adsorption pad has protrusions on its inner surface, when the protective sheet is superposed on the surface of the plate-like member, the protrusion penetrates through the adsorbed protective sheet. Thereby, the ventilation sheet is provided with the ventilation part around the perforation part by a processus | protrusion, and a suction pad adsorbs-holds a plate-shaped member with a protection sheet by the negative pressure which acts on a plate-shaped member through the said ventilation part. Therefore, based on the simple structure which forms a processus | protrusion in a pad inner surface, and forms a ventilation part in a protection sheet by the said processus | protrusion using negative pressure, adsorption of the plate-shaped member through a protection sheet can be performed simply and reliably.

The projections may form a polygonal weight shape, and the polygonal ridgeline may constitute the cutting edge. Thereby, the hole formed in the protective sheet forms a ventilation portion by a gap extending in the radial direction from the ridgeline of the polygon weight. In particular, since the gap is formed to extend on the protective sheet extended by suction, the suction force acts on the plate member more effectively.

(Effects of the Invention)

As mentioned above, according to this invention, the conveying apparatus which can carry out adsorption | suction of plate-shaped members, such as a glass plate, through a protective sheet easily and reliably, and a suction pad for it can be provided.

1 is a front view schematically showing one embodiment of a conveying apparatus according to the present invention.
It is a longitudinal cross-sectional view which shows the adsorption pad in the conveyance apparatus shown in FIG.
3 is a bottom view of the adsorption pad shown in FIG. 2.
4 is a longitudinal cross-sectional view showing a state of use of the adsorption pad shown in FIG. 2.
It is a bottom view which shows the form of a perforation of the protective sheet in the use state of FIG.
FIG. 6A is a diagram showing the shape of the projections used in the adsorption pad of FIG. 2. FIG.
FIG. 6B is a diagram illustrating another form of the projection used for the adsorption pad of FIG. 2. FIG.
FIG. 6C is a diagram illustrating another embodiment of the projection used for the adsorption pad of FIG. 2.
FIG. 6D is a diagram showing another embodiment of the projection used for the adsorption pad of FIG. 2. FIG.
6E is a view showing another embodiment of the projection used for the adsorption pad of FIG. 2.
FIG. 6F is a diagram illustrating another embodiment of the projection used for the adsorption pad of FIG. 2.
It is a longitudinal cross-sectional view which shows another embodiment of the adsorption pad which concerns on this invention.
FIG. 8 is a bottom view of the adsorption pad shown in FIG. 7. FIG.
It is a longitudinal cross-sectional view which shows another form of a suction pad.
It is a longitudinal cross-sectional view which shows another form of a suction pad.
It is a longitudinal cross-sectional view which shows another form of a suction pad.
9D is a longitudinal sectional view showing another embodiment of the suction pad.
10A is a longitudinal cross-sectional view showing still another embodiment of the adsorption pad.
10B is a longitudinal cross-sectional view showing still another embodiment of the adsorption pad.
10C is a longitudinal cross-sectional view showing still another embodiment of the adsorption pad.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring an accompanying drawing. The same or similar parts in the drawings are denoted by the same reference numerals, and a part of the description is omitted.

1 is a front view schematically showing one embodiment of a conveying apparatus according to the present invention. This transfer apparatus is provided with the movement means 1 supported by the rail 10, and the adsorption | suction apparatus 3 couple | bonded with the said movement means 1.

The moving means 1 includes a sliding portion 11 sliding along the rail 10, a turning portion 12 coupled to the sliding portion to enable rotation around a vertical axis, and coupled to the turning portion to move up and down. A lifting unit 13 extending and contracted in a direction, a first arm 14 coupled to the lower end of the lifting unit and pivoting around a horizontal axis, and being coupled to the first arm to support the adsorption device 3 at the distal end and horizontally. The 2nd arm 15 which rotates around an axis line is provided.

The rail 10 is installed on a ceiling or the like and extends between stations to which the plate-like member, for example, the glass plate P, is to be transferred. The sliding part 11, the turning part 12, the lifting part 13, the 1st arm 14, and the 2nd arm 15 are predetermined | prescribed operation | movement by drive means, such as an electric motor built in each, for example. It is configured to Since various well-known structures are applicable to this, detailed description is abbreviate | omitted here. Moreover, as a moving means, it can be made into various forms, such as a thing supported by the rail, the rocking arm supported by the swinging arm provided on the bottom surface, and a robot arm shape.

In each station, glass plate P may be any installation state, such as unity or lamination | stacking, horizontal, vertical, or existing. In addition, the protective sheet is laminated | stacked for glass plate P, etc. for surface protection. The protective sheet (so-called paper) is made of synthetic resin such as foamed resin sheet, paper, and the like. It is preferable that a protective sheet (b) has elasticity. As a result, the protective sheet is easily deformed along the inner surface of the pad so as to prevent wrinkles upon adsorption by the suction pad described later, and through holes can be reliably formed by projections.

The adsorption device 3 includes a support plate 31 supported at the distal end of the second arm 15, a plurality of adsorption pads 30 attached to the support plate, one end connected to the support plate 31, and the other end of which is a sliding part. The suction hose 33 connected to the vacuum source outside the city via 11 is provided.

In this embodiment, the support plate 31 forms the flat plate shape of the dimension slightly smaller than the glass plate to be conveyed, and the ventilation path is formed inside (not shown). The air passage extends from the connecting portion 34 of the suction hose 33 to the respective suction pads 30.

The suction pad (adsorption head) 30 is provided with the base part 35 and the skirt part 37 extended in the ball shape from the said base part, as shown in the longitudinal cross-sectional view of FIG. 2, and the bottom view of FIG. . The base part 35 is provided with the base main body 351 and the adapter 352 extended from the said base main body and connected to the ventilation path of the support plate 31. As shown in FIG. The adapter 352 is formed with a connection hole 352a for transmitting a negative pressure acting on the air passage, and the base body 351 has a through hole 351a communicating with the connection hole 352a. A threaded portion is formed on the outer circumferential surface of the adapter 352, and the nut 353 is screwed thereto. The suction pad 30 is attached by inserting the adapter 352 into the through hole of the pad mounting plate (bracket) such as the support plate 31 and fastening the nut 353.

The skirt portion 37 is formed of a flexible material such as silicon or NBR and extends in a ball shape from the base main body 351, and forms an opening end surface 371 opposite to the base main body 351. The base main body 351 and the skirt portion 37 form a concave inner surface 38 for the suction pad 30 to apply a suction force.

In this embodiment, the skirt portion 37 has a shape enlarged in the longitudinal shape from the base portion 35 side to the opening end surface 371 side. Thereby, when affixed to a protective sheet, a front-end | tip part tends to bend and the negative pressure retention in a skirt part is assured. In addition, instead of this, the skirt part 37 can also be made into the tubular shape extended on a plane from the base part 35 side to the opening end surface 371 with a substantially the same diameter, as shown to FIG. 9D. In this case, in order to improve the adhesiveness with a protective sheet, it is preferable to provide the pad 372 which is flexible in a front end part.

The suction pad 30 is also provided with a perforation projection 39. The projection 39 extends from the concave inner surface 38 toward the opening end surface 371. The protrusion 39 has a sharp tip 391, and the proximal end is fixed to the base 35. This fixing can be performed by bonding, fusion, screwing, or the like. For bonding, for example, a cyanoacrylate-based instant adhesive, an epoxy-based adhesive, a two-liquid mixed acrylic adhesive, or the like can be used. Alternatively, the protrusions 39 may be insert molded at the time of molding the base main body 351 and the skirt portion 37. The projection 39 is preferably made of metal having high hardness such as cemented carbide so as to maintain good cutting property of the protective sheet perforation.

The projection 39 has a release end surface shape in which the peripheral edge portion of the hole formed in the protective sheet is in close contact with the entire projection circumferential surface. In this embodiment, as shown in FIGS. 6A and 6B, the projection 39 forms a triangular weight shape. have. Instead of this, it can also be made into other polygonal weight shape, such as the square weight shape shown to FIG. 6C, FIG. 6D. In the case of a polygonal weight shape, as shown in these drawings, the weight surface 392 is preferably more concave than the plane connecting the adjacent ridge lines. Thereby, the ventilation part mentioned later becomes easy to be formed, and the suction force through a protective sheet acts more effectively on a glass plate.

In the illustrated embodiment, for example, the skirt portion 37 may have an outer diameter of 50 to 150 mm and a height of 5 to 20 mm, in which case the protrusion 39 has a height of 5 to 10 mm and a diameter of the proximal end. Can be set to 2-5 mm.

As shown in Figs. 6E and 6F, the projections 39 may be formed in a conical shape, and a vent portion forming groove 393 may be formed in a part of the circular end surface. Simple conical projections tend to be in close contact with the entire projection peripheral surface of the periphery of the hole of the protective sheet, and as a result, the negative pressure of the suction pad may not sufficiently reach the glass plate. On the other hand, even when the protective sheet is in close contact with the circumferential surface of the protrusion 39 having the groove 393, a gap is formed between the groove 393, so that the negative pressure reaches the glass plate using the gap as a vent. .

This conveying apparatus is used as follows. First, the moving means 1 is brought to a predetermined pick-up position along the rail 10. FIG. 1: has shown the state which adsorb | sucked the glass plate leaning at an angle in the pick-up position. The adsorption pad 30 is affixed to the protective sheet B which covers the glass plate P by operating the moving means 1. A negative pressure is applied to the suction pad 30 through the suction hose 33 and the support plate 31 from a vacuum source other than the drawing. As a result, as shown in FIG. 4, the protective sheet B is attracted to the concave inner surface 38 side of the suction pad 30. Then, perforations b0 are formed in the protective sheet B by being sucked beyond the tip portion 391 of the protrusion 39. In addition, the triangular perforations b0 by the projections 39 form the ventilation portion b1 by a gap extending in the radial direction from each vertex (polygonal ridgeline). In particular, since the protective sheet b is sucked and extended in a state sandwiched between the skirt portion 37 and the glass plate P, the ventilation portion (gap) b1 is formed to extend long. The vent part b1 penetrates the front and back surfaces of the protective sheet B, and as a result, the suction force acts on the glass plate effectively. However, when the projection 39 is a polygonal weight of five pentagrams or more, the peripheral edge portion of the perforation b0 is likely to be in close contact with the entire projection circumferential surface, and it is difficult to form the ventilation portion b1, which is sufficient depending on the material of the protective sheet. Air flow may not be obtained in some cases.

When suction is performed in this manner, the negative pressure from the vacuum source acts on the glass plate P through the perforation b0 and the venting portion b1, and the glass plate P is adsorbed by the suction pad 30. In this state, when the adsorption device 3 is moved to the predetermined position by the moving means 1, and the negative pressure from the vacuum source is released after the movement, the glass plate P can be installed at the predetermined position together with the protective sheet B. FIG. have. This installation may be single or stacked, horizontal, vertical or conventional. Since the suction force of the adsorption pad reaches the glass plate through the perforations b0 and the like even if some wrinkles exist in the protective sheet, the adsorption force can be reliably adsorbed. Thus, as a result of the suction force of a suction pad reliably affecting a glass plate, accidents, such as a fall of the glass plate during conveyance, can be prevented.

7 and 8 show another embodiment of the transfer apparatus of the present invention. The adsorption pad 30 in this conveying apparatus is provided with the stopper 36 extended from the concave inner surface 38 toward the opening end surface 371 side. As shown in FIG. 8, the stopper 36 has a cylindrical shape, and is provided at four positions of the base portion 35, respectively, and extends beyond the tip portion 391 of the protrusion 39 to a position ahead of the opening end surface 371. It is extended.

When the adsorption pad 30 is used, even when the skirt portion 37 bends when the protective sheet B is adsorbed, and the glass plate P approaches the protrusion 39, the glass plate P contacts the stopper 36. Since further movement to the side of the protrusion 39 is restricted, the glass plate P is prevented from being damaged in contact with the protrusion 39.

As shown in the figure, the stopper 36 may be arranged in a continuous or intermittent annular shape, such as a circular shape, a polygonal shape, in addition to distributing a plurality of them. In addition, the projection 39 may be formed outside the inside of the arrangement region of the stopper 36. In this embodiment, the projection 39 is adhered to the wall surface of the through hole 351a in the base portion 35.

As mentioned above, although one Embodiment of this invention was described, this invention is not limited to this, A various change is possible as long as it does not deviate from the meaning. For example, the perforation protrusion 39 can be formed in various places of the concave inner surface 38, as illustrated in FIG. 9A shows the position of the skirt portion 37, FIG. 9B shows the position of the base portion 35, FIG. 9C shows the position of the adapter 352 in the base portion 35, and FIG. 9D shows the adapter retracted from the end surface of the base portion. The state in which the protrusion 39 was formed in the position of 352 is shown, respectively. Since the adapter 352 is usually made of metal, the protrusion 39 may be brazed. In addition, the adapter 352 and the protrusion 39 may be integrally machined and formed.

A plurality of projections may be formed. FIG. 10 shows an example in which two protrusions 39 are formed, FIG. 10A shows the position of the skirt portion 37 and the base portion 35, FIG. 10B shows the position of the base portion 35, and FIG. 10C shows the skirt portion. The state in which the protrusion 39 was formed in the position of 37 is shown, respectively. As described above, by forming the plurality of protrusions 39, more air flow can be obtained through the perforations formed in the protective sheet, and the speed of operation can be achieved.

In the said embodiment, although the example which adsorb | sucks one glass plate using many adsorption pads was shown, you may adsorb | suck one glass plate with one or two-several adsorption pads depending on the dimension of a glass plate. In addition, in the said embodiment, although the glass plate P was made into the conveying object, the conveying object may be plate-shaped members, such as a laminated body board and a metal plate comprised by laminating | stacking a resin plate, a glass layer, and a resin layer.

1: moving means 3: adsorption device
30: suction pad 35: base portion
36: stopper 37: skirt
38: inside concave shape 39: projection
371: end face of opening B: protective sheet
P: glass plate b0: perforated
b1: gap

Claims (9)

As a conveying apparatus of the plate-shaped member which conveys the said plate-shaped member in the state which adsorbed-held the plate-shaped member by the negative pressure which acts through a suction pad:
The adsorption pad has a protrusion on its inner surface, and when the protective sheet superimposed on the surface of the plate member is sucked by negative pressure, the protrusion penetrates through the protective sheet, and An air vent is formed around the plate, and the plate member is sucked and held together with the protective sheet by a negative pressure acting on the plate member through the vent.
The method of claim 1,
And said projection has a cutting edge extending in the protruding direction on its surface.
3. The method of claim 2,
The projection has a polygon weight shape, and the polygon weight ridge line constitutes the cutting edge.
The method according to any one of claims 1 to 3,
The suction pad includes a base portion connected to a vacuum source, a skirt portion extending from the base portion into a ball shape to form an opening end surface, and the protrusion is formed on the base portion. Conveying device.
The method according to any one of claims 1 to 3,
The suction pad includes a base portion connected to a vacuum source, and a skirt portion extending from the base portion into a ball shape to form an opening end surface, wherein the protrusion is formed near a boundary between the base portion and the skirt portion. The conveying apparatus of the plate-shaped member made into.
6. The method according to any one of claims 1 to 5,
The suction pad has a stopper extending from an inner surface thereof to an opening end face side, and the stopper extends beyond the distal end of the protrusion to a position ahead of the opening end face.
7. The method according to any one of claims 1 to 6,
The projection is a plate-shaped member transfer device, characterized in that the metal.
As a suction pad to a vacuum source generating negative pressure:
A suction pad having a protrusion on an inner surface of the pad, the protrusion having a cutting edge extending in a protruding direction on a surface thereof.
The method of claim 8,
The projections form a polygonal weight shape, wherein the polygonal ridge lines constitute the cutting edge.
KR1020127023034A 2010-06-07 2011-06-06 Transfer device for plate-like member, and suction pad KR102043656B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2010-130010 2010-06-07
JP2010130010 2010-06-07
PCT/JP2011/062938 WO2011155443A1 (en) 2010-06-07 2011-06-06 Transfer device for plate-like member, and suction pad

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CN102870204B (en) 2016-02-03
TW201200443A (en) 2012-01-01
JP5803670B2 (en) 2015-11-04
TWI530447B (en) 2016-04-21
TWI516429B (en) 2016-01-11
WO2011155443A1 (en) 2011-12-15
CN102870204A (en) 2013-01-09
JPWO2011155443A1 (en) 2013-08-01
TW201604109A (en) 2016-02-01

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