JPWO2009110110A1 - 分光モジュール - Google Patents
分光モジュール Download PDFInfo
- Publication number
- JPWO2009110110A1 JPWO2009110110A1 JP2008557373A JP2008557373A JPWO2009110110A1 JP WO2009110110 A1 JPWO2009110110 A1 JP WO2009110110A1 JP 2008557373 A JP2008557373 A JP 2008557373A JP 2008557373 A JP2008557373 A JP 2008557373A JP WO2009110110 A1 JPWO2009110110 A1 JP WO2009110110A1
- Authority
- JP
- Japan
- Prior art keywords
- light
- substrate
- spectroscopic
- alignment marks
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 238000001514 detection method Methods 0.000 abstract description 35
- 230000002093 peripheral effect Effects 0.000 abstract description 16
- 239000010410 layer Substances 0.000 description 48
- 239000011347 resin Substances 0.000 description 11
- 229920005989 resin Polymers 0.000 description 11
- 230000031700 light absorption Effects 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 7
- 239000010931 gold Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910018885 Pt—Au Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000000820 replica moulding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0237—Adjustable, e.g. focussing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
Description
Claims (4)
- 一方の面から入射した光を透過させる基板と、
前記基板の他方の面に設けられ、前記基板に入射した光を透過させるレンズ部と、
前記レンズ部に形成され、前記レンズ部に入射した光を分光する分光部と、
前記一方の面に設けられ、前記分光部によって分光された光を検出する光検出素子と、を備え、
前記分光部は、回折部、反射部、及び前記回折部と一体的に形成された縁部を有し、
前記縁部には、アライメントマークが設けられた平面が、前記一方の面及び前記他方の面の少なくとも一方と略平行となるように形成されていることを特徴とする分光モジュール。 - 前記アライメントマークは、前記回折部と一体的に形成されていることを特徴とする請求項1記載の分光モジュール。
- 前記アライメントマークは、前記回折部を挟むように、当該回折部における溝の配列方向に沿って少なくとも一対形成されていることを特徴とする請求項1記載の分光モジュール。
- 前記光検出素子は、前記分光部に進行する光が通過する光通過孔を有することを特徴とする請求項1記載の分光モジュール。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008557373A JP5094743B2 (ja) | 2008-03-04 | 2008-06-10 | 分光モジュール |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008053715 | 2008-03-04 | ||
JP2008053715 | 2008-03-04 | ||
JP2008557373A JP5094743B2 (ja) | 2008-03-04 | 2008-06-10 | 分光モジュール |
PCT/JP2008/060574 WO2009110110A1 (ja) | 2008-03-04 | 2008-06-10 | 分光モジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009110110A1 true JPWO2009110110A1 (ja) | 2011-07-14 |
JP5094743B2 JP5094743B2 (ja) | 2012-12-12 |
Family
ID=41055685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008557373A Active JP5094743B2 (ja) | 2008-03-04 | 2008-06-10 | 分光モジュール |
Country Status (7)
Country | Link |
---|---|
US (2) | US7961317B2 (ja) |
EP (2) | EP2116828A4 (ja) |
JP (1) | JP5094743B2 (ja) |
KR (1) | KR101518518B1 (ja) |
CN (2) | CN101636645B (ja) |
TW (1) | TWI470193B (ja) |
WO (1) | WO2009110110A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009300417A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュールの製造方法及び分光モジュール |
JP5205239B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光器 |
JP5205241B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュール |
JP2009300422A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP5415060B2 (ja) | 2008-05-15 | 2014-02-12 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5205242B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光器の製造方法 |
JP5207938B2 (ja) | 2008-05-15 | 2013-06-12 | 浜松ホトニクス株式会社 | 分光モジュール及び分光モジュールの製造方法 |
JP5592089B2 (ja) | 2009-08-19 | 2014-09-17 | 浜松ホトニクス株式会社 | 分光モジュール及びその製造方法 |
JP2011053143A (ja) * | 2009-09-03 | 2011-03-17 | Hamamatsu Photonics Kk | 分光モジュール |
DE102009046831B4 (de) * | 2009-11-18 | 2015-02-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Strahlungserzeugungsvorrichtung zum Erzeugen einer elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung und Verfahren zur Herstellung derselben |
CN103348270B (zh) * | 2011-02-08 | 2016-08-17 | 浜松光子学株式会社 | 光学元件及其制造方法 |
DE102011080276A1 (de) * | 2011-08-02 | 2013-02-07 | Carl Zeiss Ag | Spektrometer |
CN103476237B (zh) * | 2013-08-27 | 2018-01-12 | 深圳Tcl新技术有限公司 | Led、led灯条及led灯条贴附二次透镜的方法 |
JP7201620B2 (ja) * | 2017-12-27 | 2023-01-10 | 株式会社日立ハイテク | 凹面回折格子の製造方法 |
WO2020019812A1 (en) | 2018-07-26 | 2020-01-30 | Boe Technology Group Co., Ltd. | Microfluidic apparatus, and method of detecting substance in microfluidic apparatus |
CN109085701A (zh) * | 2018-07-26 | 2018-12-25 | 京东方科技集团股份有限公司 | 分光系统及制造方法以及包含其的光谱检测仪及制造方法 |
JP7203676B2 (ja) * | 2019-04-16 | 2023-01-13 | 株式会社ジャパンディスプレイ | 表示装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1992011517A1 (en) * | 1990-12-21 | 1992-07-09 | The Boeing Company | Planar waveguide spectrograph |
JPH0416910A (ja) * | 1990-05-11 | 1992-01-21 | Omron Corp | 光学レンズ |
DE4038638A1 (de) | 1990-12-04 | 1992-06-11 | Zeiss Carl Fa | Diodenzeilen-spektrometer |
US6224912B1 (en) | 1996-04-03 | 2001-05-01 | The Rogo Institute | Cancer-cell proliferation-suppressing material produced by cancer cells restricted by entrapment |
EP0942267B1 (de) * | 1998-03-11 | 2006-08-30 | Gretag-Macbeth AG | Spektrometer |
WO2002004901A1 (en) * | 2000-07-11 | 2002-01-17 | Adc Telecommunications, Inc. | Monitoring apparatus for optical transmission systems |
JP2004309146A (ja) * | 2003-04-02 | 2004-11-04 | Olympus Corp | 分光光度計 |
JP4409860B2 (ja) * | 2003-05-28 | 2010-02-03 | 浜松ホトニクス株式会社 | 光検出器を用いた分光器 |
JP2005172897A (ja) * | 2003-12-08 | 2005-06-30 | Konica Minolta Holdings Inc | 光通信モジュール |
JP4627410B2 (ja) * | 2004-04-20 | 2011-02-09 | 浜松ホトニクス株式会社 | 分光器を用いた測定装置 |
KR100624454B1 (ko) * | 2004-12-23 | 2006-09-18 | 삼성전기주식회사 | 하이브리드 렌즈 다이 및 하이브리드 렌즈 어레이 |
KR101503079B1 (ko) * | 2007-06-08 | 2015-03-16 | 하마마츠 포토닉스 가부시키가이샤 | 분광기 |
JP4990420B1 (ja) * | 2012-04-04 | 2012-08-01 | 浜松ホトニクス株式会社 | 分光モジュールの製造方法 |
-
2008
- 2008-06-10 CN CN2008800005120A patent/CN101636645B/zh active Active
- 2008-06-10 EP EP08765364.8A patent/EP2116828A4/en not_active Withdrawn
- 2008-06-10 KR KR1020097001351A patent/KR101518518B1/ko active IP Right Grant
- 2008-06-10 US US12/377,306 patent/US7961317B2/en active Active
- 2008-06-10 JP JP2008557373A patent/JP5094743B2/ja active Active
- 2008-06-10 CN CN201210091508.8A patent/CN102628711B/zh active Active
- 2008-06-10 WO PCT/JP2008/060574 patent/WO2009110110A1/ja active Application Filing
- 2008-06-10 EP EP14173959.9A patent/EP2801802A1/en not_active Withdrawn
- 2008-07-04 TW TW97125465A patent/TWI470193B/zh active
-
2011
- 2011-04-13 US US13/086,065 patent/US8045160B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8045160B2 (en) | 2011-10-25 |
EP2116828A4 (en) | 2014-01-08 |
US20110205538A1 (en) | 2011-08-25 |
WO2009110110A1 (ja) | 2009-09-11 |
CN102628711A (zh) | 2012-08-08 |
CN101636645A (zh) | 2010-01-27 |
US20100315633A1 (en) | 2010-12-16 |
EP2801802A1 (en) | 2014-11-12 |
US7961317B2 (en) | 2011-06-14 |
CN102628711B (zh) | 2016-01-20 |
TWI470193B (zh) | 2015-01-21 |
KR101518518B1 (ko) | 2015-05-07 |
TW200938818A (en) | 2009-09-16 |
EP2116828A1 (en) | 2009-11-11 |
KR20100119840A (ko) | 2010-11-11 |
CN101636645B (zh) | 2012-06-06 |
JP5094743B2 (ja) | 2012-12-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5094743B2 (ja) | 分光モジュール | |
KR101817911B1 (ko) | 분광 모듈 | |
KR101735131B1 (ko) | 분광 모듈 및 그 제조 방법 | |
JP5512961B2 (ja) | 分光モジュール及びその製造方法 | |
JP5205241B2 (ja) | 分光モジュール | |
WO2011125440A1 (ja) | 分光モジュール | |
JP5074291B2 (ja) | 分光モジュール | |
JP2008304385A (ja) | 分光モジュール | |
JP4887251B2 (ja) | 分光モジュール | |
JP4887250B2 (ja) | 分光モジュール | |
JP4990420B1 (ja) | 分光モジュールの製造方法 | |
JP5113947B2 (ja) | 分光モジュール | |
JP4980184B2 (ja) | 分光モジュール | |
JP4970616B2 (ja) | 分光モジュール |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120605 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120803 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120911 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120918 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5094743 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150928 Year of fee payment: 3 |