JPWO2008143118A1 - トンネル型磁気検出素子 - Google Patents
トンネル型磁気検出素子 Download PDFInfo
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- JPWO2008143118A1 JPWO2008143118A1 JP2009515182A JP2009515182A JPWO2008143118A1 JP WO2008143118 A1 JPWO2008143118 A1 JP WO2008143118A1 JP 2009515182 A JP2009515182 A JP 2009515182A JP 2009515182 A JP2009515182 A JP 2009515182A JP WO2008143118 A1 JPWO2008143118 A1 JP WO2008143118A1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
- H01F10/3272—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
- Y10T428/1114—Magnetoresistive having tunnel junction effect
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
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- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Hall/Mr Elements (AREA)
- Magnetic Heads (AREA)
- Mram Or Spin Memory Techniques (AREA)
Abstract
Description
前記絶縁障壁層は、Mg−Oで形成され、
前記フリー磁性層は、軟磁性層と、前記軟磁性層と前記絶縁障壁層との間に位置して、前記軟磁性層よりもスピン分極率が高いエンハンス層とを有して構成され、
前記軟磁性層内には、前記積層体を構成する各層の界面と平行な面方向に向けて、Co−Fe−B、Co−B、Fe−B、あるいはCo−Feのいずれかで形成された挿入磁性層が挿入され、前記軟磁性層が前記挿入磁性層を介して、膜厚方向に複数層に分断されていることを特徴とするものである。
前記反強磁性層3上には固定磁性層4が形成されている。前記固定磁性層4は、下から第1固定磁性層4a、非磁性中間層4b、第2固定磁性層4cの順で積層された積層フェリ構造である。前記反強磁性層3との界面での交換結合磁界(Hex)及び非磁性中間層4bを介した反強磁性的交換結合磁界(RKKY的相互作用)により前記第1固定磁性層4aと第2固定磁性層4cの磁化方向は互いに反平行状態にされる。前記固定磁性層4を積層フェリ構造で形成することにより前記固定磁性層4の磁化を安定した状態にできる。また前記固定磁性層4と反強磁性層3との界面で発生する交換結合磁界を見かけ上大きくすることができる。なお前記第1固定磁性層4a及び第2固定磁性層4cは、夫々、例えば10〜40Å程度で形成され、非磁性中間層4bは8Å〜10Å程度で形成される。
前記フリー磁性層6上にはTa等で形成された保護層7が形成されている。
図2に示すように、前記フリー磁性層6は、下からエンハンス層12、第1軟磁性層13、挿入磁性層14及び第2軟磁性層15の順に積層されている。
以上により下地層1から保護層7までが積層された積層体10を形成する。
上記の積層体における各層の括弧内の数値は平均膜厚を示し単位はÅである。
前記積層体を形成した後、270℃で3時間40分間、熱処理を行った。
上記の実施例1の積層体から、挿入磁性層14を形成しない試料を作製し、その試料を従来例1とした。
従来例1の積層体を形成した後、実施例1と同様の熱処理を施した。
した。
上記の積層体における各層の括弧内の数値は平均膜厚を示し単位はÅである。
前記積層体を形成した後、270℃で3時間40分間、熱処理を行った。
上記の実施例2の積層体から、挿入磁性層14を形成しない試料を作製し、その試料を従来例2とした。
従来例2の積層体を形成した後、実施例2と同様の熱処理を施した。
した。
上記の積層体における各層の括弧内の数値は平均膜厚を示し単位はÅである。
前記積層体を形成した後、270℃で3時間40分間、熱処理を行った。
上記の実施例2の積層体から、挿入磁性層14を形成しない試料を作製し、その試料を従来例3とした。
従来例3の積層体を形成した後、実施例3と同様の熱処理を施した。
4 固定磁性層
4a 第1固定磁性層
4b 非磁性中間層
4c 第2固定磁性層
5 絶縁障壁層
6 フリー磁性層
7、23 保護層
10 積層体
12、27 エンハンス層
13 第1軟磁性層
14 挿入磁性層
15 第2軟磁性層
17 下側絶縁障壁層
18 上側絶縁障壁層
22 絶縁層
23 ハードバイアス層
25、28 軟磁性層
30 レジスト層
Claims (7)
- 下から磁化方向が固定される固定磁性層、絶縁障壁層、及び、磁化方向が外部磁界に対して変動するフリー磁性層の順に、あるいは、下から前記フリー磁性層、前記絶縁障壁層、及び、前記固定磁性層の順に積層された積層部分を備える積層体を有し、
前記絶縁障壁層は、Mg−Oで形成され、
前記フリー磁性層は、軟磁性層と、前記軟磁性層と前記絶縁障壁層との間に位置して、前記軟磁性層よりもスピン分極率が高いエンハンス層とを有して構成され、
前記軟磁性層内には、前記積層体を構成する各層の界面と平行な面方向に向けて、Co−Fe−B、Co−B、Fe−B、あるいはCo−Feのいずれかで形成された挿入磁性層が挿入され、前記軟磁性層が前記挿入磁性層を介して、膜厚方向に複数層に分断されていることを特徴とするトンネル型磁気検出素子。 - 前記挿入磁性層は、組成式が{CoXFe100−X}100−YBY(ただし原子比率Xは0以上で100以下の範囲内であり、組成比Yは0at%以上で30at%以下の範囲内である)から成る磁性材料で形成される請求項1記載のトンネル型磁気検出素子。
- 前記挿入磁性層は、Fe−B、あるいは、Co−Fe−Bで形成される請求項2記載のトンネル型磁気検出素子。
- 原子比率Xは0以上で50以下の範囲内であり、組成比Yは10at%以上で30at%以下の範囲内である請求項3記載のトンネル型磁気検出素子。
- 前記挿入磁性層の平均膜厚は、2Å以上で10Å以下の範囲内である請求項1ないし4のいずれかに記載のトンネル型磁気検出素子。
- 前記軟磁性層はNi−Feで形成され、前記エンハンス層はCo−Feで形成される請求項1ないし5のいずれかに記載のトンネル型磁気検出素子。
- 下から前記固定磁性層、前記絶縁障壁層、及び、前記フリー磁性層の順に積層されている請求項1ないし6のいずれかに記載のトンネル型磁気検出素子。
Priority Applications (1)
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JP2009515182A JP4914495B2 (ja) | 2007-05-22 | 2008-05-15 | トンネル型磁気検出素子 |
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JP2007134975 | 2007-05-22 | ||
JP2007134975 | 2007-05-22 | ||
JP2009515182A JP4914495B2 (ja) | 2007-05-22 | 2008-05-15 | トンネル型磁気検出素子 |
PCT/JP2008/058907 WO2008143118A1 (ja) | 2007-05-22 | 2008-05-15 | トンネル型磁気検出素子 |
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JPWO2008143118A1 true JPWO2008143118A1 (ja) | 2010-08-05 |
JP4914495B2 JP4914495B2 (ja) | 2012-04-11 |
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JP2009515182A Expired - Fee Related JP4914495B2 (ja) | 2007-05-22 | 2008-05-15 | トンネル型磁気検出素子 |
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US (1) | US8208231B2 (ja) |
JP (1) | JP4914495B2 (ja) |
WO (1) | WO2008143118A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US20090174971A1 (en) * | 2008-01-03 | 2009-07-09 | Yoshihiro Tsuchiya | Cpp-type magneto resistive effect element having a pair of magnetic layers |
US9082872B2 (en) | 2013-01-02 | 2015-07-14 | Headway Technologies, Inc. | Magnetic read head with MR enhancements |
KR20150102302A (ko) | 2014-02-28 | 2015-09-07 | 에스케이하이닉스 주식회사 | 전자 장치 및 그 제조 방법 |
KR20160073782A (ko) | 2014-12-17 | 2016-06-27 | 에스케이하이닉스 주식회사 | 전자 장치 및 그 제조 방법 |
US9733317B2 (en) | 2014-03-10 | 2017-08-15 | Dmg Mori Seiki Co., Ltd. | Position detecting device |
US10367137B2 (en) | 2014-12-17 | 2019-07-30 | SK Hynix Inc. | Electronic device including a semiconductor memory having a variable resistance element including two free layers |
KR20160073859A (ko) * | 2014-12-17 | 2016-06-27 | 에스케이하이닉스 주식회사 | 전자 장치 및 그 제조 방법 |
US9761793B1 (en) | 2016-05-18 | 2017-09-12 | Samsung Electronics Co., Ltd. | Magnetic memory device and method for manufacturing the same |
US9825217B1 (en) * | 2016-05-18 | 2017-11-21 | Samsung Electronics Co., Ltd. | Magnetic memory device having cobalt-iron-beryllium magnetic layers |
CN116973379B (zh) * | 2023-09-25 | 2023-12-01 | 常州市武进红东电子有限公司 | 一种钕铁硼磁钢用翻面检测生产线 |
Citations (4)
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JP2001006130A (ja) * | 1999-06-24 | 2001-01-12 | Tdk Corp | トンネル磁気抵抗効果型ヘッド |
JP2002208744A (ja) * | 2000-10-20 | 2002-07-26 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド及び磁気記録再生装置 |
JP2002359412A (ja) * | 2001-05-30 | 2002-12-13 | Sony Corp | 磁気抵抗効果素子、磁気抵抗効果型磁気センサ、磁気抵抗効果型磁気ヘッド、および磁気メモリ |
JP2003008102A (ja) * | 2001-06-22 | 2003-01-10 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
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US6937446B2 (en) | 2000-10-20 | 2005-08-30 | Kabushiki Kaisha Toshiba | Magnetoresistance effect element, magnetic head and magnetic recording and/or reproducing system |
JP3683577B1 (ja) * | 2004-05-13 | 2005-08-17 | Tdk株式会社 | 磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリおよび磁気ディスク装置 |
JP2006344728A (ja) | 2005-06-08 | 2006-12-21 | Alps Electric Co Ltd | 磁気検出素子及びその製造方法 |
JP5096702B2 (ja) | 2005-07-28 | 2012-12-12 | 株式会社日立製作所 | 磁気抵抗効果素子及びそれを搭載した不揮発性磁気メモリ |
US7764471B2 (en) * | 2007-03-12 | 2010-07-27 | Tdk Corporation | Magneto-resistance effect element having diffusion blocking layer and thin-film magnetic head |
-
2008
- 2008-05-15 WO PCT/JP2008/058907 patent/WO2008143118A1/ja active Application Filing
- 2008-05-15 JP JP2009515182A patent/JP4914495B2/ja not_active Expired - Fee Related
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2009
- 2009-11-12 US US12/617,199 patent/US8208231B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001006130A (ja) * | 1999-06-24 | 2001-01-12 | Tdk Corp | トンネル磁気抵抗効果型ヘッド |
JP2002208744A (ja) * | 2000-10-20 | 2002-07-26 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド及び磁気記録再生装置 |
JP2002359412A (ja) * | 2001-05-30 | 2002-12-13 | Sony Corp | 磁気抵抗効果素子、磁気抵抗効果型磁気センサ、磁気抵抗効果型磁気ヘッド、および磁気メモリ |
JP2003008102A (ja) * | 2001-06-22 | 2003-01-10 | Toshiba Corp | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
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US20100055501A1 (en) | 2010-03-04 |
US8208231B2 (en) | 2012-06-26 |
JP4914495B2 (ja) | 2012-04-11 |
WO2008143118A1 (ja) | 2008-11-27 |
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