JPWO2008038467A1 - Integrated intermediate electrode and pressure gradient plasma gun using the same - Google Patents

Abstract

The integrated intermediate electrode (G) of the present invention includes a conductive first housing (11), a conductive material provided concentrically with the first housing and in contact with the inner peripheral surface of the first housing. A first sleeve (12) having electrical properties, a first magnet (15) accommodated in the first housing concentrically with the first housing, and a conductive property provided coaxially with the first housing. A second housing (17), a conductive second sleeve (18) concentrically with the second housing and in contact with the inner peripheral surface of the second housing; and the second housing A second magnet (21) concentrically accommodated with the second housing, and the first housing and the second housing are integrated via an insulating member (16).

Description

  The present invention relates to a pressure gradient plasma gun used as a plasma source of a film forming apparatus and an intermediate electrode used therefor.

  Conventionally, a pressure gradient type plasma gun has been used as a plasma source of a film forming apparatus. The pressure gradient plasma gun includes a cylindrical container, a cathode, an annular first intermediate electrode, an annular second intermediate electrode, and an insulating member interposed between the first intermediate electrode and the second intermediate electrode. Are provided coaxially.

  In such a pressure gradient type plasma gun, the first intermediate electrode and the second intermediate electrode are temporarily assembled using a temporary assembly member, and the temporarily assembled one is attached to the pressure gradient type plasma gun. However, when the first intermediate electrode and the second intermediate electrode are temporarily assembled, the temporary assembly member may drop off, which is inconvenient to handle. In addition, when the first intermediate electrode and the second intermediate electrode are temporarily assembled, there is a problem that the weight of the temporarily assembled one increases.

Therefore, as shown in Patent Document 1, a pressure gradient plasma gun is shown in which an intermediate electrode is attached using a set member incorporating an insulating member. In such a pressure gradient type plasma gun, the first intermediate electrode and the second intermediate electrode can be attached separately, so that the temporary assembly member does not fall off, and the first intermediate electrode and the second intermediate electrode are attached. Workability during installation is improved.
JP 11-256319 A

  However, in the configuration of Patent Document 1, it is necessary to provide support means for supporting the set member on the first intermediate electrode and the second intermediate electrode, and there is a problem that the structure becomes complicated.

  Conventionally, in order to maintain the airtightness of the first intermediate electrode and the second intermediate electrode, sealing is performed by welding a lid to the housing constituting the first intermediate electrode and the second intermediate electrode. However, when the housing is sealed by welding, there is a problem in that it is difficult to disassemble and adjust when a malfunction occurs in the intermediate electrode due to electric leakage or the like, and maintenance is poor.

  The present invention has been made in order to solve the above-described problems, and has a simple configuration and reduces the weight to improve the convenience of handling and improve the maintainability when performing disassembly and adjustment. An object of the present invention is to provide an intermediate electrode and a pressure gradient type plasma gun using the same.

  In order to solve the above problems, an integrated intermediate electrode of the present invention is provided with a conductive first housing, concentric with the first housing, and in contact with the inner peripheral surface of the first housing. A first sleeve having electrical conductivity, a first magnet accommodated in the first housing concentrically with the first housing, and a second housing having electrical conductivity provided coaxially with the first housing; A conductive second sleeve provided concentrically with the second housing and in contact with an inner peripheral surface of the second housing; and accommodated in the second housing concentrically with the second housing. A second magnet, and the first housing and the second housing are integrated via an insulating member.

  With such a configuration, attachment to an apparatus (for example, a film forming apparatus) using a pressure gradient type plasma gun incorporating the same becomes easy.

  The first housing has a U-shaped cross-section so that a surface facing the second housing is opened, and the second housing is formed so that a surface facing the first housing is opened. The insulating member is formed coaxially with the first housing and the second housing, and the open surfaces of the first housing and the second housing are covered with the insulating member. The first magnet is accommodated in the space between the first housing and the insulating member, and the second magnet is accommodated in the space between the second housing and the insulating member. And the said 1st housing, the said insulating member, and the said 2nd housing may be mutually fastened with the fastener.

  With such a configuration, since the number of components constituting the intermediate electrode is reduced, the weight can be reduced and the convenience of handling is improved. Further, by releasing the fastening of the fastener and removing the lid by the insulating member, it is possible to perform disassembly and adjustment even in the case where a failure occurs in the intermediate electrode, and the maintainability is improved.

  The first housing, the insulating member, and the second housing may be joined in order to be airtight or liquid tight.

  Usually, a cooling medium flow path is formed inside the intermediate electrode, and the cooling medium is circulated through the cooling medium flow path. Thus, with such a configuration, leakage of the cooling medium is prevented.

  The joint is preferably airtight or liquid tight using an O-ring.

  With such a configuration, the first housing, the insulating member, and the second housing can be easily airtight or liquid tight.

  The pressure gradient type plasma gun of the present invention includes any one of the integrated intermediate electrodes configured as described above.

  With such a configuration, workability when attaching the intermediate electrode to the pressure gradient plasma gun is improved.

  In the pressure gradient plasma gun of the present invention, a collar, the integrated intermediate electrode, an insulating tube, and a cathode mount that includes a cathode and closes an end of the insulating tube that is far from the integrated intermediate electrode. The pressure gradient type plasma gun may be configured by being fastened to each other.

  With such a configuration, it becomes easy to assemble a pressure gradient type plasma gun.

  The above object, other objects, features, and advantages of the present invention will become apparent from the following detailed description of the preferred embodiments with reference to the accompanying drawings.

  Since the integrated intermediate electrode of the present invention has the above-described configuration, it has a simple configuration, reduces the weight, improves the convenience of handling, and improves the maintainability when performing disassembly and adjustment. Play.

  In addition, since the pressure gradient type plasma gun of the present invention is configured as described above, there is an effect that it is easy to attach the intermediate electrode.

FIG. 1 is a schematic diagram showing a schematic configuration of a sheet plasma film forming apparatus using a pressure gradient type plasma gun according to an embodiment of the present invention. FIG. 2 is a cross-sectional view schematically illustrating a state in which the pressure gradient plasma gun according to the embodiment of the present invention is cut vertically along the central axis. 3A and 3B are views showing an integrated intermediate electrode constituting the pressure gradient type plasma gun of FIG. 2, wherein FIG. 3A is a left side view, and FIG. Sectional drawing which shows the state cut | disconnected, (c) is a right view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Pressure gradient type plasma gun 2 Cathode mount 3 Discharge gas introduction hole 4 Cooling medium flow path 6 Insulating tube 7 Discharge gas flow path 8 Cathode 10 Cylindrical body 11 1st housing 12 1st sleeve 13 1st protection plates 14 and 20 Cooling medium Flow path 15 Permanent magnet (first magnet)
16 Insulating member 17 Second housing 18 Second sleeve 19 Second protective plate 21 Electromagnetic coil (second magnet)
22 O-ring groove 23 O-ring 24 Insulating collar 25 Bolt insertion hole 25a, 25b, 25c Through hole 26 Insulating collar 27 Bolt (fastener)
28 Bolt hole 28a, 28b Through hole 28c Screw hole 29 Insulation lid member 30 Sheet plasma forming chamber 31 Cylindrical member 32 First annular coil 33 Permanent magnet 34 Second annular coil 36 Cylindrical plasma 37 Sheet plasma 39 First flange 40 Membrane chamber 41 Chamber 42 Upper lid 43 Lower lid 44 Base material holder 45 Base material 48 Target holder 49 Target 50, 51 Insulating member 52 Exhaust port 53 Valve 54 Vacuum pump 59 Second flange 60 Anode chamber 61 Third annular coil 62 Cylindrical member 63 Anode 64 Permanent magnet 111, 171 Cooling medium inlet 112, 172 Cooling medium outlet 113, 173 O-ring groove 114 Screw hole 201 Central axis G Integrated intermediate electrode G ₁ First intermediate electrode G ₂ Second intermediate electrode R _V , R ₁ , _{R 2} resistor _{V 1} main bias voltage applying device _V 2, _{V 3} via Voltage applying device

  Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment)
FIG. 1 is a schematic diagram showing a schematic configuration of a sheet plasma film forming apparatus using a pressure gradient type plasma gun according to an embodiment of the present invention. FIG. 2 is a cross-sectional view schematically illustrating a state in which the pressure gradient plasma gun according to the embodiment of the present invention is cut vertically along the central axis. 3A and 3B are diagrams showing an integrated intermediate electrode constituting the pressure gradient type plasma gun of FIG. 2, wherein FIG. 3A is a left side view, and FIG. 3B is a vertical view of the integrated intermediate electrode along the central axis. Sectional drawing which shows the state cut | disconnected, (c) is a right view. In FIG. 3B, the portion where the insulating collar and the fastener pass through the first and second housings and the insulating member is shown as a partially cutaway BB cross-sectional view. Hereinafter, the pressure gradient plasma gun and the integrated intermediate electrode according to the present embodiment will be described with reference to FIGS. 1 to 3. In the following description, the left side of FIG. 1 and the left side of FIG. 2 will be referred to as the front side, and the right side of FIG. 1 and the right side of FIG.

  As shown in FIG. 1, the pressure gradient type plasma gun 1 of this embodiment is used for a sheet plasma film forming apparatus 100, for example. Here, the sheet plasma film forming apparatus 100 is exemplified as the film forming apparatus in which the pressure gradient type plasma gun 1 of the present embodiment is used, but it is needless to say that the present invention is not limited to this. The configurations of the pressure gradient type plasma gun 1 and the integrated intermediate electrode G will be briefly described here and will be described in detail later.

The pressure gradient plasma gun 1 includes a cathode mount 2 and a cylindrical body 10 attached to the cathode mount 2. The cathode mount 2 is provided with a cathode 8. The cylindrical body 10 includes an insulating tube 6 and an integrated intermediate electrode G. The integrated intermediate electrode G includes a first intermediate electrode G ₁ , a second intermediate electrode G _2, and an insulating member 16.

The anode 63 to be described later cathode 8 and (cathode mount 2), via a resistor R _V are connected to the main bias voltage negative terminal and the positive terminal of the application device V _1. The first intermediate electrode G ₁ via a resistor R _1, and is connected to the main bias voltage positive terminal of the application device V _1. The second intermediate electrode G ₂ is, via a resistor R _2, and is connected to the main bias voltage positive terminal of the application device V _1. A predetermined bias voltage is applied between the cathode 8 and the anode 63 by the combination of the main bias voltage applying device V ₁ and the resistors R _V , R ₁ , R ₂ . Thereby, a cylindrical plasma 36 is generated in the vicinity of the cathode 8 of the pressure gradient plasma gun 1.

  The rear end of the sheet plasma forming chamber 30 is connected to the front end of the pressure gradient type plasma gun 1. The sheet plasma forming chamber 30 is formed by closing the rear end and the front end of the cylindrical member 31 by an insulating lid member 29 having an open central portion and a first flange 39 having an open central portion, respectively. The cylindrical member 31 is made of a nonmagnetic material. A first annular coil 32 that arranges the shape of the introduced cylindrical plasma 36 is disposed around the rear end side of the cylindrical member 31. A pair of permanent magnets 33 is disposed in front of the position where the first annular coil 32 of the cylindrical member 31 is disposed. The pair of permanent magnets 33 are arranged so that their north poles face each other. The pair of permanent magnets 33 forms the introduced cylindrical plasma 36 into a sheet-like plasma (hereinafter referred to as sheet-like plasma) 37. Further, a second annular coil 34 that arranges the shape of the formed sheet-like plasma 37 is disposed around the front end side of the cylindrical member 31.

  The rear end of the film forming chamber 40 is connected to the front end of the sheet plasma forming chamber 30. The sheet plasma 37 formed in the sheet plasma forming chamber 30 is introduced into the film forming chamber 40.

  The film forming chamber 40 includes a cylindrical chamber 41. One end of the chamber 41 is closed by an upper lid 42, and the other end of the chamber 41 is closed by a lower lid 43. The chamber 41 is made of a nonmagnetic material such as stainless steel. An exhaust port 52 is formed at an appropriate position of the chamber 41. The exhaust port 52 is configured to be opened and closed by a valve 53. A vacuum pump 54 is connected to the exhaust port 52. The vacuum pump 54 evacuates the film forming chamber 40 (chamber 41) to a predetermined pressure at which the sheet-like plasma 37 can be transported. A target holder 48 and a substrate holder 44 are disposed inside the chamber 41 so as to face each other with the introduced sheet-like plasma 37 interposed therebetween.

The target holder 48 holds the target material 49. The target holder 48 is attached to the chamber 41 via the insulating member 51. The target holder 48 is hermetically attached to the chamber 41. A bias voltage applying device V ₂ is connected to the target holder 48. The bias voltage applying device V _2, a negative bias voltage with respect to the potential of the sheet-shaped plasma 37 is applied to the target holder 48. As a result, the target material 49 is sputtered by the plasma particles in the sheet-like plasma 37.

On the other hand, the base material holder 44 holds the base material 45 that forms a film. The substrate holder 44 is attached to the chamber 41 via the insulating member 50. The substrate holder 44 is hermetically attached to the chamber 41. A bias voltage applying device V ₃ is connected to the base material holder 44. By this bias voltage applying device V ₃ , a negative bias voltage with respect to the potential of the sheet-like plasma 37 is applied to the substrate holder 44. Thereby, the sputtered target material is deposited on the base material 45, and a film is formed.

The rear end of the anode chamber 60 is connected to the front end of the film forming chamber 40. The anode chamber 60 is formed by closing the rear end and the front end of the cylindrical member 62 with a second flange 59 and an anode 63 each having an open central portion. The cylindrical member 62 is made of glass, for example. Around the cylindrical member 62, a third annular coil 61 for adjusting the shape of the sheet-like plasma 37 is disposed. The anode 63 is, as described above, is connected to the positive terminal of the main bias voltage applying device V _1. A permanent magnet 64 is provided on the back surface of the anode 63. The permanent magnet 64 is provided such that its south pole is in contact with the anode 63. The permanent magnet 64 adjusts the shape of the end of the sheet plasma 37.

Further, the sheet plasma film forming apparatus 100 includes a control device (not shown). The control device controls operations of the main bias voltage application device V ₁ , the bias voltage application devices V ₂ , V _{3, and the} like. The control device includes an arithmetic device such as a microcomputer, and controls necessary components of the sheet plasma apparatus 100 to control the operation of the sheet plasma apparatus 100. Here, in this specification, the control device means not only a single controller but also a controller group in which a plurality of controllers cooperate to execute control. Therefore, the control device does not necessarily need to be configured by a single controller, and a plurality of controllers are distributed and configured to control the operation of the sheet plasma apparatus 100 in cooperation with each other. Also good.

  The operation of the sheet plasma film forming apparatus 100 configured as described above will be briefly described.

  The cylindrical plasma 36 generated by the pressure gradient type plasma gun 1 is formed into a sheet plasma 37 by a pair of permanent magnets 33 in the sheet plasma forming chamber 30. The sheet-like plasma 37 is introduced into the film forming chamber 40 and the target material 49 is sputtered. The sputtered target particles are deposited on the base material 45 disposed at a position opposed to each other with the sheet-like plasma 37 interposed therebetween to form a film.

  Next, the pressure gradient type plasma gun 1 of this embodiment will be described in detail with reference to FIG. In FIG. 2, for convenience of explanation, as described above, the left side of FIG. 2 is the front side and the right side is the rear side.

  As shown in FIG. 2, the pressure gradient plasma gun 1 of this embodiment includes a cathode mount 2. A discharge gas introduction hole 3 is formed in the central portion of the cathode mount 2 (more precisely, it is located on the central axis 201 of the insulating tube 6 described later), from which a discharge gas such as argon gas is introduced. Is done. A cooling medium flow path 4 is formed inside the cathode mount 2, and the cooling medium is circulated through the cooling medium flow path 4 by a cooling medium flow mechanism (not shown). Examples of the cooling medium include liquids such as water, pure water, ethylene glycol aqueous solution (antifreeze), and fluorine-based refrigerants. Examples of gases include helium, argon, and nitrogen.

  The rear end of the cylindrical insulating tube 6 is attached to the front end of the cathode mount 2. The insulating tube 6 is made of an insulating material such as glass or ceramics. The insulating tube 6, the integrated intermediate electrode G and the insulating collar 24, which will be described later, constitute the cylindrical body 10. The cylinder 10 is a cylinder in this embodiment. The opening of the cylinder 10 (see FIG. 1) constitutes a plasma outlet.

  The cathode mount 2 is provided with a cathode 8 so as to protrude above the central axis 201 of the insulating tube 6 inside the insulating tube 6. The cathode 8 includes a discharge gas flow path 7. The discharge gas introduced from the discharge gas introduction hole 3 flows through the discharge gas channel 7.

An integrated intermediate electrode G is attached to the front end of the insulating tube 6. Integrated intermediate electrode G, as described above, the first intermediate electrode G _1, and the insulating member 16 is configured to include a second intermediate electrode G _2. The configuration of the integrated intermediate electrode G will be described in detail later.

  The rear end of the short cylindrical insulating collar 24 is attached to the front end of the integrated intermediate electrode G. The insulating collar 24 is arranged coaxially with the insulating tube 6, and seal members (not shown) such as O-rings are arranged on both end faces thereof. As a material constituting the insulating collar 24, an insulator such as polytetrafluoroethylene or ceramics is used. The front end of the insulating collar 24 is attached to an annular plate-shaped guide member (not shown). The insulating collar 24 ensures insulation between the integrated intermediate electrode G and the guide member.

  The pressure gradient type plasma gun 1 is attached to the sheet plasma film forming apparatus 100 (more specifically, the insulating lid member 29 of the sheet plasma forming chamber 30) via a guide member.

  Next, the structure of the integrated intermediate electrode G will be described in detail with reference to FIG. In the following description, the front end and the rear end correspond to “front” and “rear” described in FIG.

As shown in FIGS. 3A, 3 </ b> B, and 3 </ b> C, the integrated intermediate electrode G includes a first intermediate electrode G ₁ including the first housing 11 and a second intermediate electrode including the second housing 17. an electrode G _2, is configured to include an insulating member 16.

The first housing 11 is attached to the front end of the insulating tube 6 (see FIG. 2). The first housing 11 is formed in an annular shape having a U-shaped cross section. The shape of the first housing 11 is not limited to an annular shape, and may be formed in an annular shape such as a quadrangle or a hexagon. The cross section of the first housing 11 is formed in a U shape so that the surface facing the second housing 17 is opened, and is a space surrounded by the first housing 11 and the short cylindrical insulating member 16. Constitutes the cooling medium flow path 14. The first housing 11 is provided with a cylindrical first sleeve 12 so as to contact the inner peripheral surface thereof. For example, a male screw groove is formed on the outer periphery of the first sleeve 12, and the male screw groove is provided so as to be screwed into a female screw groove formed on the inner periphery of the first housing 11. The first sleeve 12 is provided concentrically with the first housing 11. The first housing 11 and the first sleeve 12 constitutes a first intermediate electrode _{G 1.} The first sleeve 12 is made of a high melting point and conductive material, such as tungsten or molybdenum. The first sleeve 12 improves the heat resistance of the first housing 11 against the generated cylindrical plasma 36.

A cooling medium inlet 111 and a cooling medium outlet 112 are formed in the first housing 11. In the present embodiment, the cooling medium inlet 111 and the cooling medium outlet 112 pass through portions that are opposite to each other in the circumferential direction of the outer peripheral wall of the first housing 11 and that are located in the horizontal direction with respect to the center of the first housing 11. It is formed as follows. A cooling medium circulation mechanism (not shown) is connected to the cooling medium inlet 111 and the cooling medium outlet 112, and the cooling medium is circulated through the cooling medium flow path 14 by the cooling medium circulation mechanism. As the cooling medium, for example, water, pure water, ethylene glycol aqueous solution (antifreeze), fluorine-based refrigerant, and the like can be used for the liquid, and for gas, for example, helium, argon, nitrogen, and the like can be used. The first housing 11 accommodates an annular permanent magnet (first magnet) 15 having a rectangular cross section along the inner periphery of the cooling medium flow path 14. The shape of the permanent magnet 15 is appropriately changed according to the shape of the first housing 11 and may be formed in an annular shape such as a quadrangle or a hexagon. The permanent magnet 15 is accommodated concentrically with the first housing 11. In other words, the cooling medium is circulated in the cooling medium channel 14 formed inside the first intermediate electrode G _1, the permanent magnet 15 is in contact with the cooling medium. The permanent magnet 15 is positioned by being sandwiched between the inner peripheral wall of the first housing 11 and the side wall of the insulating member 16.

  As shown in FIGS. 3B and 3C, a first protective plate 13 is provided at the rear end of the first housing 11. The first protective plate 13 protects the side surface (end surface) of the first housing 11 from being sputtered by plasma. Further, a screw hole 114 is formed in the rear end surface of the first housing 11 so as to have a predetermined interval in the circumferential direction. The first housing 11 and the insulating tube 6 are fastened (fixed) by screwing screws (not shown) into the screw holes 114. Furthermore, an annular O-ring groove 113 is formed on the rear end surface of the first housing 11. By inserting an O-ring (not shown) into the O-ring groove 113 and attaching the insulating tube 6, the first housing 11 and the insulating tube 6 are joined in an airtight manner.

The first front end of the intermediate electrode G _1, the short cylindrical insulating member 16 is disposed. In addition, the shape of the insulating member 16 is not limited to a cylindrical shape, and may be appropriately changed according to the shapes of the first housing 11 and the second housing 17, and may be formed in a cylindrical shape such as a quadrangle or a hexagon. . The insulating member 16 is disposed coaxially with the insulating tube 6. The insulating member 16 is made of an insulating material such as polytetrafluoroethylene or ceramics. The insulating member 16 insulates the second intermediate electrode _{G 2} to be described later and the first intermediate electrode _{G 1.}

A rear end of the second housing 17 is provided at the front end of the insulating member 16. The second housing 17 is formed in an annular shape having a U-shaped cross section. The shape of the second housing 17 is not limited to an annular shape, and may be formed in an annular shape such as a square or a hexagon according to the shape of the first housing 11. The cross section of the second housing 17 is formed in a U shape so that the surface facing the first housing 11 is opened, and is a space surrounded by the second housing 17 and the short cylindrical insulating member 16. Constitutes the coolant flow path 20. The second housing 17 is provided with an annular second sleeve 18 along the inner periphery thereof. For example, a male screw groove is formed on the outer periphery of the second sleeve 18, and the male screw groove is provided so as to be screwed into a female screw groove formed on the inner periphery of the second housing 17. The second sleeve 18 is provided concentrically with the second housing 17. A second housing 17 and the second sleeve 18, constituting a second intermediate electrode _{G 2.} The second sleeve 18 is made of a conductive material having a high melting point, such as tungsten or molybdenum. The second sleeve 18 improves the heat resistance of the second housing 17 when the generated plasma passes.

A cooling medium inlet 171 and a cooling medium outlet 172 are formed in the second housing 17. In the present embodiment, the cooling medium inlet 171 and the cooling medium outlet 172 pass through a portion that is the opposite portion of the outer peripheral wall of the second housing 17 in the circumferential direction and that is located in the horizontal direction with respect to the center of the second housing 17. It is formed as follows. A cooling medium circulation mechanism (not shown) is connected to the cooling medium inlet 171 and the cooling medium outlet 172, and the cooling medium is circulated through the cooling medium flow path 20 by the cooling medium circulation mechanism. As the cooling medium, for example, water, pure water, ethylene glycol aqueous solution (antifreeze), fluorine-based refrigerant, and the like can be used for the liquid, and for gas, for example, helium, argon, nitrogen, and the like can be used. The second housing 17 accommodates an annular electromagnetic coil (second magnet) 21 having a rectangular cross section so as to be in contact with the inner periphery of the cooling medium flow path 20. The shape of the electromagnetic coil 21 is appropriately changed according to the shape of the second housing 17, and may be formed in an annular shape such as a quadrangle or a hexagon. The electromagnetic coil 21 is accommodated concentrically with the second housing 17. In other words, the cooling medium is circulated in the cooling medium flow path 20 formed inside the second intermediate electrode G _2, the electromagnetic coil 21 is in contact with the cooling medium. The electromagnetic coil 21 is wound in an annular shape. The electromagnetic coil 21 is positioned by being sandwiched between the side wall of the insulating member 16 and the inner peripheral wall of the second housing 17.

  A second protection plate 19 is provided at the front end of the second housing 17. The second protective plate 19 protects the side surface (end surface) of the second housing 17 from being sputtered by plasma. An annular O-ring groove 173 is formed on the front end surface of the second housing 17. By inserting an O-ring (not shown) into the O-ring groove 173 and attaching the insulating collar 24, the second housing 17 and the insulating collar 24 are joined in an airtight manner. The insulating collar 24 is formed in a short cylindrical shape. The shape of the insulating collar 24 is appropriately changed according to the shape of the second housing 17 and may be formed in a cylindrical shape such as a quadrangle or a hexagon.

  Moreover, the bolt hole 28 is formed in the 1st housing 11, the 2nd housing 17, and the insulating member 16 (refer FIG.3 (b) and (c)). The bolt hole 28 includes through holes 28 a and 28 b formed in the first housing 11 and the insulating member 16, and a screw hole 28 c formed in the second housing 17. The cylindrical insulating collar 26 is inserted into the through holes 28a and 28b, and a bolt (fastener) 27 is inserted into the insulating collar 26 and screwed into the screw hole 28c. The member 16 and the second housing 17 are fastened and integrated with each other. Thereby, the insulating member 16 covers the open surfaces of the first housing 11 and the second housing 17 formed in a U-shape. That is, the open surfaces of the first housing 11 and the second housing 17 are sealed by the insulating member 16. An O-ring groove 22 is formed in a predetermined portion of the first housing 11 and the second housing 17, and an O-ring 23 is inserted into the O-ring groove 22. Thereby, the 1st housing 11, the insulating member 16, and the 2nd housing 17 are joined in order airtight or liquid-tight. That is, when using a gaseous cooling medium, the 1st housing 11, the insulating member 16, and the 2nd housing 17 are joined airtightly in order. On the other hand, when a liquid cooling medium is used, the first housing 11, the insulating member 16, and the second housing 17 are joined in a liquid-tight manner in order. Therefore, the insulating member 16 and the first housing 11 and the second housing 17 are kept sealed, and the cooling medium is prevented from leaking from the integrated intermediate electrode G.

  Bolt insertion holes 25 are formed in the first housing 11, the insulating member 16, and the second housing 17 so as to penetrate the bolt holes 28 at positions shifted by a predetermined center angle (FIG. 3A). ) To (c)). The bolt insertion hole 25 includes through holes 25a, 25b, and 25c formed in the first housing 11, the insulating member 16, and the second housing 17, respectively. By inserting a bolt (fastener, not shown) through the bolt insertion hole 25 and screwing the bolt (fastener) into a guide member (not shown), the integrated intermediate electrode G (or the integrated intermediate electrode G) is inserted. The incorporated pressure gradient type plasma gun 1) is attached to the sheet plasma forming chamber 30 (more specifically, the insulating lid member 29 of the sheet plasma forming chamber 30) through the guide member.

  Here, the first housing 11 and the second housing 17 are preferably made of an aluminum alloy. Since the aluminum alloy has a specific gravity smaller than that of stainless steel used in a normal intermediate electrode housing, the weight of the first housing 11 and the second housing 17 can be reduced. Thereby, workability at the time of handling the 1st housing 11 and the 2nd housing 17 improves.

  Examples of aluminum alloys include, for example, aluminum-magnesium alloys (JIS 5000 series), aluminum-magnesium-silicon alloys (JIS 6000 series), and aluminum-zinc-magnesium alloys (JIS 7000 series). It is preferable for maintaining the corrosiveness.

  Further, the surface of the portion of the first housing 11 and the second housing 17 that contacts the cooling medium (the surface of the inner portion of the first housing 11 and the second housing 17 formed in a U-shape) is electrically conductive. It is preferable that a surface treatment layer having nonmagnetic properties and corrosion resistance is formed. Examples of the surface treatment layer having such conductivity, non-magnetism, and corrosion resistance include an electroless Ni plating layer. Thereby, the deterioration in the part which the 1st housing 11 and the 2nd housing 17, and a cooling medium contact is suppressed.

  In summary, the integrated intermediate electrode G can be assembled by fastening the first housing 11, the insulating member 16, and the second housing 17 with bolts (fasteners) 27. Further, the integrated intermediate electrode G can be disassembled by performing the reverse operation. Further, the assembled integrated intermediate electrode G can be attached to the wall (insulating member 29) of the sheet plasma forming chamber 30 via a guide member.

  Since the integrated intermediate electrode G of the present embodiment has the above-described configuration, the number of components to be configured can be reduced and the weight thereof can be reduced. In addition, the integrated intermediate electrode G can be manufactured in a compact manner. Thereby, workability | operativity at the time of attaching the integrated intermediate electrode G improves. Further, by removing the bolt 27, the first magnet 15 can be removed from the first housing 11, and the second magnet 21 can be removed from the second housing 17, so that the maintainability of the intermediate electrode is improved.

  In the present embodiment, the cylindrical body 10 constituting the pressure gradient plasma gun 1 is a cylindrical body, but the cross-sectional shape thereof is arbitrary. For example, the cross-sectional shape perpendicular to the central axis 201 is a regular polygon. There may be.

  Further, the first sleeve 12 and the second sleeve 18 in which the male screw groove is formed are provided by being screwed to the inner circumferences of the first housing 11 and the second housing 17, respectively. The second sleeve 18 may be inserted along the inner circumferences of the first housing 11 and the second housing 17 and then sandwiched by the protective plates 13 and 19 from the outside. With such a configuration, welding of the thread groove is prevented, and replacement of the first sleeve 12 and the second sleeve 18 is facilitated.

  From the foregoing description, many modifications and other embodiments of the present invention are obvious to one skilled in the art. Accordingly, the foregoing description should be construed as illustrative only and is provided for the purpose of teaching those skilled in the art the best mode of carrying out the invention. The details of the structure and / or function may be substantially changed without departing from the spirit of the invention.

  The integrated intermediate electrode of the present invention is useful as an intermediate electrode that has a simple configuration, reduces weight, improves handling convenience, and improves maintainability when performing disassembly and adjustment.

  The pressure gradient type plasma gun of the present invention is useful as a pressure gradient type plasma gun with improved workability when attaching an intermediate electrode.

Claims (6)

  A first housing having conductivity, a first sleeve having conductivity provided concentrically with the first housing and in contact with the inner peripheral surface of the first housing, and the first housing having the first housing A first magnet housed concentrically with the first housing; a second housing having electrical conductivity provided coaxially with the first housing; and an inner circumference of the second housing concentrically with the second housing. A second sleeve having electrical conductivity provided so as to contact the surface; and a second magnet accommodated in the second housing concentrically with the second housing, the first housing and the second An integrated intermediate electrode in which a housing is integrated with an insulating member.   The first housing has a U-shaped cross-section so that a surface facing the second housing is opened, and the second housing is formed so that a surface facing the first housing is opened. The insulating member is formed coaxially with the first housing and the second housing, and the open surfaces of the first housing and the second housing are covered with the insulating member. The first magnet is accommodated in the space between the first housing and the insulating member, and the second magnet is accommodated in the space between the second housing and the insulating member. The integrated intermediate electrode according to claim 1, wherein the first housing, the insulating member, and the second housing are fastened to each other by a fastener.   The integrated intermediate electrode according to claim 2, wherein the first housing, the insulating member, and the second housing are joined in order to be airtight or liquid tight.   The integrated intermediate electrode according to claim 3, wherein the bonding is made airtight or liquidtight using an O-ring.   A pressure gradient type plasma gun comprising the integrated intermediate electrode according to any one of claims 1 to 4.   A collar, the integrated intermediate electrode, an insulating tube, and a cathode mount that includes a cathode and closes an end of the insulating tube far from the integrated intermediate electrode are fastened to each other by a fastener, and the pressure gradient type The pressure gradient plasma gun according to claim 5, wherein the plasma gun is configured.

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