JPH11139809A - Both-side-cooled ozonizer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact and inexpensive both-side-cooled ozonizer which is suitable for the supply of a small amount of ozone. SOLUTION: In this ozonizer, a casing consists of a shell 1a that is made of stainless steel and provided with two flanges on the both sides respectively and two side plates 21b and 22b made of stainless steel and in the casing, one ozone generator consisting of a high-voltage electrode 6 and a grounding electrode 5 is housed. The grounding electrode 5 is fitted to the above flanges respectively and the grounding electrode 5 is airtightly fixed and held with the both side plates 21b and 22b and O-rings 83 and 84. Tubular connecting members 63 and 64 are welded to the high-voltage electrode 6 and airtightly held and fixed to the side plates 21b and 22b respectively by tightening the members 63 and 64 respectively with sockets 98 and 99 insulated with insulating members 65 and 66 respectively. A voltage to be applied to the high-voltage electrode 6 and cooling water and supplied through the socket 98 and the connecting member 63.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozonizer for generating ozone used for water treatment and the like, particularly to a double-sided cooling ozonizer capable of generating high-concentration ozone.

[0002]

2. Description of the Related Art Ozonizers are widely used in water treatment facilities and the like in order to utilize the sterilizing, decoloring and deodorizing powers of ozone. FIGS. 8A and 8B show a model of the configuration of a double-sided cooling ozonizer described in Japanese Patent Application No. 8-135608 filed by the present applicant. FIG. 8A is an overall sectional view, and FIG. FIG. 2 is an enlarged partial cross-sectional view showing a part of the ozone generating tube.

[0003] The housing of the ozonizer is composed of a cylindrical body 1 made of stainless steel having both ends opened, and two stainless steel side plates 21 and 22 fastened to both open ends. It is configured. Since the two side plates 21 and 22 and the body 1 need to be air-tightly connected, screws (not shown) are provided at both ends of the opening via flat packings (simply packing in FIG. 6) 81 and 82, respectively. It is connected using fastening means such as. At least one pair of support plates 41 and 42 made of stainless steel for holding a large number of ozone generating tubes are fitted on the inner side of the body 1 at appropriate intervals. The tube wall of the body 1 has a gas inlet 11 for supplying a raw material gas at an intermediate position between the side plate 21 and the support plate 41 on the side plate 21 side, and supports the side plate 22 and the side plate 22 on the opposite side. At a position intermediate the plate 42, there is a gas outlet 12 for taking out a gas containing the generated ozone. Further, a cooling water inlet 13 for flowing cooling water and a cooling water outlet 14 for discharging cooling water are provided substantially at an intermediate position between the two support plates 41 and 42. Usually, a cooling water inlet 13 is provided at a lower portion, and a cooling water outlet 14 is provided at an upper portion. Further, a voltage introduction terminal 72 is mounted at a position near the side plate 21 of the body 1.

[0004] The ozone generating tube supported by the supporting plates 41 and 42 has a cylindrical ground electrode 5 made of stainless steel or the like on the ground side having open ends, and a substantially constant gap length inside the ground electrode 5. And a high-voltage electrode 6 disposed via a discharge gap 56 having Ground electrode 5
Is a metal tube 51 made of stainless steel, and a lining is inserted on the inner surface (a glass tube is inserted inside the metal tube 51, and the glass is softened by induction heating under an internal pressure.
And a glass dielectric layer 52 formed by a technique for forming a glass layer on the inner surface of the glass substrate 51. The high-voltage electrode 6 is formed in a cylindrical shape whose both ends are closed, and two cooling pipes are connected to one end surface. Cooling water flows from the cooling pipe into the high-voltage electrode 6 to cool the high-voltage electrode 6.
The cooling water is branched from a pair of manifolds 95 and 96 provided at the upper and lower positions at one end of the body 1 and supplied to the cooling pipes of the respective high-voltage electrodes 6 by the insulating tubes 97. The insulating tube 97 is used for the high voltage electrode 6.
The reason why the ion exchanger 94 is provided in the cooling water system is to keep the electric resistance value of the cooling water high and to prevent insulation failure caused by the cooling water. It is. Protrusions 61 for holding the discharge gap 56 are formed by welding on both sides of the lower portion of the outer surface of the high-voltage electrode 6 near both ends. The ozone generating tube is fitted in through holes formed in the support plates 41 and 42 and supported by the support plates 41 and 42, and the contact portion is
It is sealed by an O-ring (not shown) so that the cooling water does not leak.

[0005] The reason why stainless steel is used for the housing, the ozone generating tube, and the like is that stainless steel has resistance to the strong oxidizing action of ozone. One of the high-frequency voltages supplied from the high-frequency power supply 73 to the ozone generating tube is
Is supplied to the high-voltage electrode 6 of each ozone generating tube via a lead wire 71 from a voltage introducing terminal 72 mounted on the ozone generating tube. The other of the high-frequency voltage of the high-frequency power supply 73 is connected to the ground potential point,
At the same time, it is connected to the body 1 and to the ground electrode 5 via a lead wire (not shown).

The cooling water for cooling the ground electrode 5 of the ozone generating tube is shared with the cooling water for the high-voltage electrode 6 described above by the heat exchanger 93.
The cooling water is pressurized by a pump 92 and supplied to a water jacket 3 from a cooling water inlet 13 through a cooling pipe 91 to cool the ground electrode 5, and is cooled from a cooling water outlet 14 through a cooling pipe 91 to a heat exchanger. Return to 93. Since this cooling system also serves to cool the high-voltage electrode 6, the cooling system is a water supply system using high-purity water, and includes the ion exchanger 94 as described above. Although cooling of the ground electrode 5 does not require high-resistance pure water, pure water is used to simplify the cooling system.

In such a double-sided cooling ozonizer,
The raw material gas (such as air or oxygen) containing oxygen supplied from the gas inlet 11 flows into the discharge gap 56 from the opening of the ground electrode 5 on the side plate 21 side, and a part of oxygen is discharged by the silent discharge in the discharge gap 56. It is ozonized and becomes gas containing ozone and is taken out from the gas outlet 12. Gas outlet
A pressure regulating valve (not shown) is attached to the rear of the pump 12 to adjust the gas pressure value to, for example, 1.7 atm, and to supply the gas containing ozone to the consuming equipment.

[0008] The above-mentioned double-sided cooling ozonizer according to the prior art is usually equipped with tens to hundreds of ozone generating tubes, and such ozonizers have a large volume of several tens of kilograms / hour. Suitable for supplying ozone. However, for applications in which a small amount of ozone of several tens to several hundred grams / hour is sufficient, the number of required ozone generating tubes is reduced from one to several, and a plurality of tubes are housed in one housing. Ozonizers have the problem that they are rather large and their prices are high.

[0009]

SUMMARY OF THE INVENTION An object of the present invention is to provide a small and inexpensive double-sided cooling ozonizer suitable for supplying a small amount of ozone of several tens to several hundreds grams / hour.

[0010]

In order to solve the above-mentioned problems, according to the present invention, there is provided a cylindrical ground electrode having both ends opened and a dielectric layer formed on the inner surface, and a gap formed inside the ground electrode. An ozone generating tube composed of a cylindrical high-voltage electrode having a closed-end structure, which is arranged via a cooling water introduced therein, and a cylindrical body and an opening which are open at both ends are hermetically sealed. A housing including two side plates for closing the housing and containing the ozone generating tube, a water jacket provided between the housing and the ground electrode for cooling the ground electrode, and supplying power to the ozone generating tube In a double-sided cooling ozonizer that includes a power supply and generates ozone by discharging a source gas containing oxygen introduced into the housing, one housing includes one ozone generation tube (the invention of claim 1). .

Since one ozone generating tube is housed in one case, standardization by compact and optimal design is possible, and mass production is possible. If one is insufficient, a plurality of units may be operated in parallel as needed. In the invention of claim 1, a metal pipe which is attached to both ends of the high voltage electrode, connects the high voltage electrode and a power source, introduces or discharges cooling water, and has a screw at a tip end, and a metal pipe having an outer peripheral portion. An insulating member penetrating the side plate and penetrating the metal pipe, wherein a screw of the metal pipe protruding from the insulating member is airtightly tightened by a socket.
Invention). Metal pipes for introducing voltage to the high-voltage electrode and for cooling water are drawn out to the side in the center of the side plate, so that only the connection for cooling water for the ground electrode is attached to the lengthwise side of the ozonizer. The thickness of the ozonizer is reduced.

In the invention of claim 2, the metal pipe has at least one annular groove, and an O-ring is fitted into the annular groove (the invention of claim 3). The O-ring completely secures the hermetic seal between the metal pipe and the insulating member. In the invention of claim 2 or claim 3, the insulating member is provided with a collar (the invention of claim 4).
The brim greatly increases the creepage distance of the insulating member, so that electrical insulation can be ensured even when dew condensation occurs.

As means for connection to the ground electrode, there is provided a conductive screw connected to the ground potential side of the power supply, airtightly penetrated through the housing, and in contact with the ground electrode. Invention). Since the housing is brought into contact with the ground electrode through the screw, the potential of the ground electrode can be completely maintained at the ground potential. The inside of the water jacket is partitioned into a spirally continuous space by a spiral partition member (the invention of claim 6). The cooling water is circulated uniformly by the spiral partition member, and the flow rate of the cooling water is increased.
The housing is arranged so that the axial direction of the housing is vertical, the cooling water inlet is provided at the lower part of the housing, and the cooling water outlet is provided at the upper part of the housing. Since the cooling water flows vertically from the bottom, no air bubbles remain in the cooling space.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the double-sided cooling ozonizer according to the present invention will be described with reference to examples. Also in the present invention, since the basic configuration is the same as that of the conventional technology, the portions having the same functions as those of the conventional technology are denoted by the same reference numerals. [First Embodiment] FIG. 1 is a sectional view showing the structure of a first embodiment of a double-sided cooling ozonizer according to the present invention, and FIG. 2 is a partially enlarged sectional view showing the structure of a connection portion of a high-voltage electrode. is there.

First, the overall configuration will be described with reference to FIG.
A set of electrodes including a ground electrode 5 and a high-voltage electrode 6 is housed in a housing composed of the body 1a and the two side plates 21b and 22b. A supply system, a cooling system for cooling the ground electrode 5 and the high-voltage electrode 6 with cooling water, and a supply system for the source gas are integrated into a so-called single double-sided cooling ozonizer having one ozone generating tube. Have been.

The cylindrical body 1a made of stainless steel has
At both ends, a flange having a hole having a size into which the ground electrode 5 is just fitted is provided, and the length is set so that both ends of the ground electrode 5 protrude somewhat from the flange. The ground electrode 5 is fitted into this hole, and both ends of the ground electrode 5 project from the flange.
84, the side plates 21a and 22a are tightened from the outside by tightening means such as screws (not shown), whereby the body 1a and the ground electrode 5 are air-tightly integrated, and the water jacket 3 is formed therebetween. The body 1a and the side plates 21a and 22a are integrated at the same time.

A cooling water inlet 13 and a cooling water outlet 14 for supplying cooling water for cooling the ground electrode 5 to the water jacket 3 are provided near both ends of the body 1a. Usually, both are provided at substantially diagonal positions. Side plates 21a and 22a are made of stainless steel. At the center thereof, connecting members 63 and 64 of the high-voltage electrode 6 for supplying high-frequency voltage and cooling water to the high-voltage electrode 6 are electrically insulated by insulating members 65 and 66, respectively, and penetrate airtightly. Then, the high-voltage electrode 6 is positioned and held / fixed. Further, the side plate 21a is provided with a gas inlet 211 which is a supply port of the raw material gas, and the side plate 22a
Gas outlet 221 for taking out ozonized gas
Is provided.

Although the side plates 21a and 22a are made of stainless steel in this embodiment, they may be made of fluorine resin. The ground electrode 5 has a glass dielectric layer 52 formed by lining on the inner surface of a metal tube 51 made of stainless steel, as in the prior art. The high-voltage electrode 6 is made of stainless steel, has a cylindrical shape with lids at both ends, and is inserted into the ground electrode 5 while maintaining a uniform discharge gap 56. The connecting members 63 and 64 described above are attached to the central portions of the lids at both ends by welding, respectively. Also, in order to maintain a uniform discharge gap 56,
A plurality of protrusions 61 are formed below the high-voltage electrode 6 by overlay welding.

Next, a method of forming the high voltage electrode 6 near the connection member 63 will be described in detail with reference to FIG. The connecting members 63 and 64 of the high-voltage electrode 6 are made of stainless steel pipes, one end of which is aligned with and welded to the hole in the center of the lid on the side of the high-voltage electrode 6, and the other end is connected to the other end. Is formed with a screw.

The construction method near the connecting member 63 is as follows. (1) Insert the ground electrode 5 into the body 1a with both ends slightly projecting. (2) Connect high voltage electrode 6 with connecting members 63 and 64 to ground electrode 5
Insert inside. (3) The side plates 21b and 22b are fixed to both sides of the body 1a with bolts (not shown). At this time, the connecting members 63 and 64 are
b and 22b are inserted through holes formed in the respective central portions. During this fixing, an air-tight seal between the side plates 21b and 22b, the body 1a and the ground electrode 5 is secured by the O-rings 83 and 84. (4) Pass the insulating member 65 outside the connecting member 63, and
The insulating member 66 is passed through the outside of the
Screw into and fix each screw formed in b and 22b. At this time, an air-tight seal is secured between the side plate 21b and the insulating member 65 and between the side plate 22b and the insulating member 66 by the O-ring 85 and the not-shown 86. (5) The sockets 98 and 99 each having a screw formed on the inner surface are screwed into the respective screws of the connection members 63 and 64 to fix the high-voltage electrode 6. At this time, the insulating member 65, the connecting member 63 and the insulating member
An airtight seal between each of the connection members 66 and the connection members 64 is ensured.

With the above, the configuration near the connecting member 63 shown in FIG. 2 is completed. The insulating member 65 (or 66) is made of a material having ozone resistance and insulating properties, such as fluororesin. Although the shape is a cylindrical shape surrounding the connection member 63, a groove for increasing the creepage distance is formed on the surface on the atmosphere side in order to enhance insulation against a high voltage applied to the connection member 63. . Further, O for sealing hermetically with the side plate 21b is provided.
A ring groove is formed on the contact surface with the side plate 21b.

Next, a configuration example of the connection member of the ground electrode 5 and its assembly will be described in detail with reference to FIG. The connection member of the ground electrode 5 is manufactured as a screw 78 made of stainless steel. The screw 78 is attached to the side plate 21 fixed to the body 1a.
b is screwed into a screw hole formed at a position corresponding to the end of the metal plate 51, is brought into contact with the end of the metal plate 51, and is fixed by the nut 79. The screw 78 is connected to the ground potential side of the high-frequency power supply 73 via a lead wire (not shown). The screw 78 may be of a small size, for example, M4 size, and the airtightness between the screw 78 and the side plate 21b is ensured by a seal tape (not shown).

The reason why such a reliable contact structure is employed is to avoid the following problems caused by unstable contact. Since the ground electrode 5 is fitted into the flange of the body 1a, it partially contacts the flange of the body 1a. Therefore, it is considered that the ground electrode 5 maintains the ground potential. However, the contact state is an unstable contact, and the ground potential becomes unstable. When the ground potential becomes unstable, the discharge state also becomes unstable, and it becomes difficult to keep the ozone concentration constant. Further, in the worst case, the contact portion generates heat and melts, and as a result, the ground electrode 5 becomes a potential floating state, so that the discharge cannot be maintained.

In FIG. 5, the screw 78 penetrates through the side plate 21b and is in contact with the ground electrode 5, but it can also penetrate through the body 1a and contact the ground electrode 5. In the case of a double-sided cooling ozonizer, not only the ground electrode 5 but also the high-voltage electrode 6 is cooled, so that the resistance value of the cooling water needs to be high. Therefore, the cooling water system is provided with an ion exchanger 94. In the actual operation, if the ion-exchange water with a sufficiently high resistance is initially used, the cooling water will always be
It is not necessary to pass through 94, and if necessary, it is possible to sufficiently maintain the necessary resistance value. FIG. 1 shows a case where valves are provided on both the ion exchanger 94 side and the bypass. However, the valve on the bypass side is omitted and only a part of the water flows through the ion exchanger 94. Can perform its function well.

[Second Embodiment] FIG. 3 is a partially enlarged sectional view showing a structure near a connecting member 63a for explaining a second embodiment. This embodiment is intended to further ensure a hermetic seal between the connecting member and the insulating member. The difference from the first embodiment is that a ring groove for an O-ring 89 is formed on the contact surface of the connecting member 63a with the insulating member 65, and the O-ring 89 is fitted in this groove, so that the connecting member 63a and the insulating member The airtight seal between 65 and 65 is ensured. In the case of the configuration shown in FIG. 2, when the temperature of the high-voltage electrode 6 rises during discharge or the like and its size expands, the connecting member 63 and the socket 98 move outward as a unit. May be loosened and the sealing performance may be reduced. On the other hand, if the sealing is performed by the O-ring 89 on the contact surface between the connecting member 63a and the insulating member 65 as shown in FIG. 3, the sealing performance can be reliably maintained.

It is preferable to increase the number of O-rings for more completeness. [Third Embodiment] FIG. 4 is a partially enlarged view showing a structure near an insulating member 65a for explaining a third embodiment. The purpose of this embodiment is to ensure insulation performance in the case of condensation on the surface of the socket 98 in FIG.

A flange 651 made of a rubber plate is fitted in the groove of the insulating member 65 in FIG. The collar 651 is, for example, a donut having a thickness of 3 mm and an outer diameter of 14 cm. Socket 98
The cooling water of the high-voltage electrode 6 flows through the inside of the socket 98. If the cooling water temperature is low, dew may condense on the surface of the socket 98. If the water droplets spread on the surface of the insulating member 65, dielectric breakdown occurs. There is fear. In such a case, the collar 651 functions as a member for allowing water droplets to escape, and prevents the water droplets from spreading significantly on the insulating member.

[Fourth Embodiment] The fourth embodiment is designed to improve the cooling efficiency of the water jacket 3 in the prior art as shown in FIG. FIG.
The structure of a water jacket 3a in a fourth embodiment is shown,
(A) is a partial cutaway view in which a part of the trunk portion 1a is cut away, and (b) is a partial sectional view.

The water jacket 3a in this embodiment has a structure in which a space surrounded by the body 1a and the ground electrode 5 is partitioned into a spiral continuous space. This partition is formed by, for example, helically winding a stainless steel wire 31 having a thickness of, for example, 3 mm around the ground electrode 5 at a pitch of, for example, 5 cm, and then inserting the wire into the body 1a. This wire 31
The cooling water introduced from the cooling water inlet 13 is uniformly circulated spirally along the wire 31 over the entire surface of the electrode, and the flow area is reduced, so that the flow velocity is smaller than that without the partition. Significantly increase. As a result, the cooling efficiency of the ground electrode 5 is greatly improved.

[Fifth Embodiment] The fifth embodiment is designed to improve the cooling efficiency of the water jacket 3 or 3a, and relates to the installation direction of the ozonizer. FIG.
Shows a fifth embodiment, in which (a) is a front view and (b) is a side view. In this embodiment, the length direction of the housing of the ozonizer is arranged vertically (vertically). In the case of the ozonizer of the related art, in order to arrange a large number of ozone generating tubes, a horizontal structure in which the ozone generating tubes are easily installed and held has been adopted. However, in the case of an ozonizer that accommodates one ozone generating tube in one housing, as in the double-sided cooling ozonizer according to the first aspect of the present invention, the need for a horizontal structure is small, and the ground electrode and high voltage The configuration shown in FIG. 7 in which the cooling efficiency of the electrodes can be increased and the size can be reduced is effective. That is, since the ground electrode is directly held on the side plate, and the high-voltage electrode is held on the side plate via an insulating member or the like, the ozonizer can be installed on the gantry 100 with the housing of the ozonizer oriented vertically. By arranging the housing vertically with the cooling water inlet 13 and the socket 98 on the lower side and the cooling water outlet 14 and the socket 99 on the upper side, the cooling water flows from the bottom up,
The air bubbles that have entered inside move upward and are discharged together with the cooling water, and the ground electrode and the high-voltage electrode are efficiently cooled over the entire surface. As a result, the water jacket 3 can be made smaller, and the entire ozonizer can be made thinner.

Note that it is not always necessary that the arrangement is completely vertical, and slight inclination is not a problem.

[0032]

According to the present invention, in the double-sided cooling ozonizer, since one ozone generating tube is housed in one housing, standardization by compact and optimal design is possible, and mass production is possible. If one is insufficient, a plurality of units may be operated in parallel as needed. Therefore, it is possible to provide a small and inexpensive double-sided cooled ozonizer suitable for supplying a small amount of ozone of several tens to several hundreds of grams / hour (the invention of claim 1).

According to the first aspect of the present invention, a metal pipe which is attached to both ends of the high voltage electrode, connects the high voltage electrode to a power source, introduces or discharges cooling water, and has a screw at a tip end thereof; The outer peripheral part has an insulating member that penetrates the side plate and the metal pipe, and the screws of the metal pipe protruding from the insulating member are airtightly tightened with sockets, so the manifold and insulating tube are unnecessary. In addition, only the connecting portion of the cooling water for the ground electrode is mounted on the side surface in the length direction of the ozonizer, and the thickness of the ozonizer is reduced. Therefore, it is possible to provide a cheaper and smaller double-sided cooling ozonizer (the invention of claim 2).

According to the second aspect of the present invention, the metal pipe has at least one annular groove, and the O-ring is fitted into the annular groove. Airtight seal is completely secured. Therefore, it is possible to provide a safe double-sided cooling ozonizer (the invention of claim 3). According to the second or third aspect of the present invention, since the insulating member is provided with the collar, the creepage distance of the insulating member is significantly increased, so that it is possible to secure electrical insulation even if dew condensation occurs. Therefore, it is possible to provide a double-sided cooling ozonizer that is less likely to malfunction due to insulation failure (the invention of claim 4).

As means for connecting to the ground electrode, a conductive screw connected to the ground potential side of the power supply, airtightly penetrated through the housing, and brought into contact with the ground electrode is provided. Can be completely maintained at the ground potential. Therefore, it is possible to provide a double-sided cooling ozonizer having excellent discharge stability (the invention of claim 5).

Since the inside of the water jacket is partitioned into a spirally continuous space by the spiral partition member, the cooling water circulates uniformly and the flow velocity of the cooling water is increased. Therefore, the cooling efficiency of the ground electrode is improved, and the characteristics of the double-sided cooling ozonizer are stabilized (the invention of claim 6). Since the housing is arranged so that the axial direction of the housing is vertical, the cooling water inlet is provided at the bottom of the housing, the cooling water outlet is provided at the top of the housing, and the cooling water flows from bottom to top. Thus, no bubbles remain in the cooling space. Therefore, the cooling efficiency of the ground electrode can be improved (the invention of claim 7).

[Brief description of the drawings]

FIG. 1 is a sectional view showing the structure of a first embodiment of a double-sided cooling ozonizer according to the present invention.

FIG. 2 is a partially enlarged cross-sectional view showing a configuration near a connection member according to the first embodiment.

FIG. 3 is a partially enlarged cross-sectional view showing a configuration near a connection member according to a second embodiment.

FIG. 4 is a partially enlarged view showing a configuration near an insulating member of a third embodiment.

FIG. 5 is a partially enlarged cross-sectional view illustrating a configuration of a connection portion of a ground electrode according to the first embodiment.

FIG. 6 shows a configuration of a water jacket according to a fourth embodiment,
(A) is a partially cutaway view of the trunk, and (b) is a partially sectional view.

FIGS. 7A and 7B show a fifth embodiment, wherein FIG. 7A is a front view and FIG.
Is a side view

8A and 8B show the structure of a double-sided cooling ozonizer according to the related art, in which FIG. 8A is an overall sectional view, and FIG. 8B is an enlarged partial sectional view showing a part of an ozone generating tube.

[Explanation of symbols]

 1, 1a Body 11 Gas inlet 12 Gas outlet 13 Cooling water inlet 14 Cooling water outlet 21, 22, 21b, 22b Side plate 211 Gas inlet 221 Gas outlet 3, 3a Water jacket 31 Wire 41, 42 Support plate 5 Ground electrode 51 Metal Tube 52 Glass dielectric layer 56 Discharge gap 6 High voltage electrode 61 Protrusion 65, 66 Insulation member 63, 64, 63a, 64a Connection member 71 Lead wire 72 Voltage introduction terminal 73 High frequency power supply 78 Screw 79 Nut 81, 82 Packing 83, 84, 85, 86, 87, 88, 89, 90 O-ring 91 Cooling pipe 92 Pump 93 Heat exchanger 94 Ion exchanger 95, 96 Manifold 97 Insulation tube 98, 99 Socket 100 Mount

Claims (7)

[Claims] 1. A cylindrical ground electrode having both ends open and a dielectric layer formed on an inner surface, and both ends disposed through a gap inside the ground electrode and cooled by cooling water introduced therein. A housing comprising a cylindrical high voltage electrode having a closed structure, a cylindrical body having both ends opened, and two side plates for hermetically closing the openings, and a housing incorporating the ozone generation tube. And a water jacket provided between the housing and the ground electrode for cooling the ground electrode, and a power supply for supplying power to the ozone generating tube, and discharging the source gas containing oxygen introduced into the housing. A double-sided cooling ozonizer, which generates ozone by using the same, wherein one housing includes one ozone generating tube. 2. A metal pipe attached to both ends of the high-voltage electrode, connecting the high-voltage electrode and the power supply, introducing or discharging cooling water, and having a thread at a tip end. 2. An insulating member penetrating the side plate and penetrating the metal pipe, wherein a screw of the metal pipe protruding from the insulating member is airtightly tightened by a socket. Cooling ozonizer. 3. The double-sided cooling ozonizer according to claim 2, wherein the metal pipe has at least one annular groove, and an O-ring is fitted into the annular groove. 4. The double-sided cooling ozonizer according to claim 2, wherein the insulating member includes a flange. 5. A conductive screw connected to a ground potential side of the power supply, hermetically penetrated through the housing, and being in contact with the ground electrode. 2. The double-sided cooling ozonizer according to 1. 6. The double-sided cooling ozonizer according to claim 1, wherein the inside of the water jacket is partitioned into a spirally continuous space by a spiral partitioning member. 7. A housing is arranged such that an axial direction of the housing is vertical, an inlet of cooling water is provided at a lower portion of the housing, and an outlet of cooling water is provided at an upper portion of the housing. The double-sided cooling ozonizer according to claim 1, wherein