JP2002255514A - Ozone generator - Google Patents

Ozone generator

Info

Publication number
JP2002255514A
JP2002255514A JP2001054104A JP2001054104A JP2002255514A JP 2002255514 A JP2002255514 A JP 2002255514A JP 2001054104 A JP2001054104 A JP 2001054104A JP 2001054104 A JP2001054104 A JP 2001054104A JP 2002255514 A JP2002255514 A JP 2002255514A
Authority
JP
Japan
Prior art keywords
ozone
discharge gap
ozone generator
ground electrode
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001054104A
Other languages
Japanese (ja)
Inventor
Hisamichi Ishioka
久道 石岡
Ryutaro Takahashi
龍太郎 高橋
Takaya Nishikawa
孝也 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP2001054104A priority Critical patent/JP2002255514A/en
Publication of JP2002255514A publication Critical patent/JP2002255514A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an ozone generator whose ozone generation efficiency is high, preventing an uneven discharge due to a biased flow of a source gas in a discharge gap. SOLUTION: A ozone generation tube is composed of a cylindrical earth electrode which forms a dielectric layer 52 on the inner wall of the circumstance, and a hollow cylindrical high voltage electrode 6 which is concentrically arranged through a discharge gap 56 inside of the dielectric layer 52 of the earth electrode, and a chassis housing the ozone generation tube and having two side panels to airtightly keep a cylindrical body section whose both ends are open and an open mouth is provided, a water jacket which forms a cooling water flow passage for cooling the earth electrode is provide between this chassis and the earth electrode, and an electric source which supplies an electric power to the ozone generation tube is provided, and in the ozone generator which generates ozone by discharging source gas by passing the gas containing oxygen introduced into the chassis through the discharge gap 56, partition members are installed in the discharge gap to make the discharge gap 56 into a helical passage 30 of the source gas (for example, the helical passage is formed by a wire 31a).

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、上下水処理やパ
ルプ漂白処理などに用いるオゾンを発生するオゾン発生
装置、特に、そのオゾン発生管の放電部の構成に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator for generating ozone used for water and sewage treatment, pulp bleaching, and the like, and more particularly, to a configuration of a discharge portion of the ozone generating tube.

【0002】[0002]

【従来の技術】オゾン発生装置は、オゾンが持つ殺菌・
脱色・脱臭力を利用して水処理施設などにおいて広く使
用されており、その装置構成や運転方法などに関し、多
くの提案がなされている(例えば、特開平9−3158
03号公報,特開平11−130409号公報等参
照)。
2. Description of the Related Art An ozone generator has a sterilizing and
It is widely used in water treatment facilities and the like utilizing the decolorizing and deodorizing power, and many proposals have been made regarding the device configuration and operation method (for example, Japanese Patent Application Laid-Open No. 9-3158).
03, JP-A-11-130409, etc.).

【0003】図5は、前記特開平11−130409号
公報に記載された、所謂、片面冷却方式のオゾン発生装
置の構造を示すもので、(a)は全体の断面図、(b)
はオゾン発生管の一部を拡大して示す部分断面図であ
る。また、図6は、前記特開平9−315803号公報
に記載された、所謂、両面冷却方式のオゾン発生装置の
オゾン発生管の断面構造を示す。
FIG. 5 shows the structure of a so-called single-sided cooling type ozone generator described in the above-mentioned Japanese Patent Application Laid-Open No. H11-130409, wherein FIG.
FIG. 2 is an enlarged partial cross-sectional view showing a part of the ozone generating tube. FIG. 6 shows a cross-sectional structure of an ozone generating tube of a so-called double-sided cooling type ozone generating device described in Japanese Patent Application Laid-Open No. 9-315803.

【0004】前記2種類のオゾン発生装置は、オゾン発
生管の冷却が片面か両面かの相違を除いて、基本的構造
は同一であるので、従来のオゾン発生装置の構造の詳細
に関して、図5を用いて以下に説明する。
[0004] The two types of ozone generators have the same basic structure except that the cooling of the ozone generation tube is performed on one side or on both sides. This will be described below with reference to FIG.

【0005】オゾン発生装置の筐体は、両端が開口して
いる筒状をしたステンレス鋼からなる胴部1と、その両
開口端部に締め付けられている2つステンレス鋼からな
る側板21及び22とによって構成されている。2つの
側板21及び22と胴部1とは気密に結合される必要が
あるため、両開口端部のそれぞれに平パッキン(図5で
は単にパッキン)81及び82を介して、図示しないネ
ジなどの締め付け手段を用いて結合されている。
[0005] The housing of the ozone generator comprises a cylindrical body 1 made of stainless steel having both ends opened, and side plates 21 and 22 made of two stainless steels fastened to both open ends. And is constituted by. Since the two side plates 21 and 22 and the body 1 are required to be air-tightly connected, flat ends (in FIG. 5, simply packings) 81 and 82 are provided on both ends of the opening, respectively. They are connected using fastening means.

【0006】胴部1の内面側には、多数のオゾン発生管
を保持するための、少なくとも一対のステンレス鋼から
なる支持板41及び42が互いに適当な間隔をおいて嵌
め込まれている。胴部1の管壁には、側板21と側板2
1側の支持板41との中間の位置に原料ガスを供給する
ためのガス入口11があり、反対側の側板22と側板2
2側の支持板42との中間の位置に生成されたオゾンを
含むガスを取り出すためのガス出口12がある。
At least one pair of support plates 41 and 42 made of stainless steel for holding a large number of ozone generating tubes are fitted on the inner surface side of the body 1 at appropriate intervals. The side plate 21 and the side plate 2 are provided on the tube wall of the body 1.
A gas inlet 11 for supplying a source gas is provided at a position intermediate between the first side support plate 41 and the side plate 22 and the second side plate 2 on the opposite side.
A gas outlet 12 for taking out the generated gas containing ozone is provided at a position intermediate with the support plate 42 on the second side.

【0007】更に、2つの支持板41及び42の中間の
位置に、冷却水を流入させるための冷却水入口13と、
冷却水を排出する冷却水出口14とが、ほぼ対向して設
けられている。通常は、冷却水入口13が下部に、冷却
水出口14が上部に設けられる。また、胴部1の側板2
1に近い位置に、電圧導入端子72が装着されている。
Further, a cooling water inlet 13 for flowing cooling water is provided at an intermediate position between the two support plates 41 and 42,
A cooling water outlet 14 for discharging the cooling water is provided substantially opposite to the cooling water outlet 14. Normally, a cooling water inlet 13 is provided at a lower portion, and a cooling water outlet 14 is provided at an upper portion. Also, the side plate 2 of the body 1
A voltage introduction terminal 72 is mounted at a position close to 1.

【0008】支持板41及び42に支持されるオゾン発
生管は、両端が開口している円筒状の接地側のステンレ
ス鋼からなる接地電極5と、接地電極5の内側にほぼ一
定のギャップ長をもつ放電ギャップ56を介して配置さ
れている高電圧電極6とで構成されている。
The ozone generating tube supported by the supporting plates 41 and 42 has a cylindrical grounding electrode 5 made of stainless steel on the grounding side with both ends open, and a substantially constant gap length inside the grounding electrode 5. And a high-voltage electrode 6 disposed with a discharge gap 56 between them.

【0009】接地電極5は、図5(b)に示すように、
ステンレス鋼からなる金属管51と、この内面にライニ
ング(金属管51の内側にガラス管を挿入し、内圧を加
えた状態で誘導加熱によってガラスを軟化させ、金属管
51の内面にガラス層を形成する技術)によって形成さ
れたガラス誘電体層52とからなっている。
As shown in FIG. 5B, the ground electrode 5
A metal tube 51 made of stainless steel and a lining on the inner surface thereof (a glass tube is inserted inside the metal tube 51, and the glass is softened by induction heating while applying an internal pressure to form a glass layer on the inner surface of the metal tube 51. And a glass dielectric layer 52 formed by the above-described technique.

【0010】高電圧電極6の外面下部の両端付近には、
放電ギャップ56を保持するための突起体61が溶接に
よる肉盛りによって形成されている。このオゾン発生管
は、支持板41及び42に形成されている貫通孔に嵌め
込まれて支持板41及び42に支持されており、その接
触部は、冷却水が漏れないように図示しないOリングに
よってシールされている。
Near both ends of the lower portion of the outer surface of the high voltage electrode 6,
A protrusion 61 for holding the discharge gap 56 is formed by welding. The ozone generating tube is supported by the support plates 41 and 42 by being fitted into through holes formed in the support plates 41 and 42, and the contact portion thereof is provided by an O-ring (not shown) so that cooling water does not leak. Sealed.

【0011】高周波電源73からオゾン発生管に供給さ
れる高周波電圧の一方は、胴部1に装着されている電圧
導入端子72からリード線71を介して各オゾン発生管
の高電圧電極6に供給される。高周波電源73の高周波
電圧の他方は、接地電位点に接続され、同時に胴部1に
接続されており、図示していないリード線を介して接地
電極5に接続されている。
One of the high-frequency voltages supplied from the high-frequency power supply 73 to the ozone generating tube is supplied from the voltage introducing terminal 72 mounted on the body 1 to the high-voltage electrode 6 of each ozone generating tube via the lead wire 71. Is done. The other of the high-frequency voltage of the high-frequency power supply 73 is connected to the ground potential point, is also connected to the body 1, and is connected to the ground electrode 5 via a lead wire (not shown).

【0012】オゾン発生管の接地電極5を冷却する冷却
水は、熱交換器93で冷却されてポンプ92で加圧さ
れ、通常は、図示しないイオン交換器により純水にし
て、冷却配管91を通って冷却水入口13から水ジャケ
ット3に供給されて接地電極5を冷却し、冷却水出口1
4から冷却配管91を通って熱交換器93に戻る。二次
冷却水には工業用水が用いられることが多い。
The cooling water for cooling the ground electrode 5 of the ozone generating tube is cooled by a heat exchanger 93 and pressurized by a pump 92. Usually, the cooling water is converted into pure water by an ion exchanger (not shown) and the cooling pipe 91 is cooled. The cooling water inlet 13 is supplied to the water jacket 3 to cool the ground electrode 5, and the cooling water outlet 1
4 returns to the heat exchanger 93 through the cooling pipe 91. Industrial water is often used as the secondary cooling water.

【0013】従来のオゾン発生装置は前記のごとく構成
されており、ガス入口11から供給された酸素を含む原
料ガスは、側板21側の接地電極5の開口から放電ギャ
ップ56内に流れ込み、ガス出口12から流出される。
ガス出口12の下流には図示しない排気バルブが装着さ
れており、この排気バルブの弁開度を調整することによ
って、オゾン発生装置内の酸素を含む原料ガスはその圧
力値を例えば0.17MPaに調節されている。このよう
な圧力値を持つ酸素を含む原料ガスが通流されているオ
ゾン発生管の接地電極5と高電圧電極6との間に、高周
波電源73から高周波電圧を印加すると、無声放電が発
生して酸素を含む原料ガスの一部がオゾン化される。
The conventional ozone generator is configured as described above. The source gas containing oxygen supplied from the gas inlet 11 flows into the discharge gap 56 from the opening of the ground electrode 5 on the side plate 21 side, and the gas outlet Flowed out of 12.
An exhaust valve (not shown) is mounted downstream of the gas outlet 12, and by adjusting the valve opening of the exhaust valve, the pressure of the source gas containing oxygen in the ozone generator is reduced to, for example, 0.17 MPa. Has been adjusted. When a high-frequency voltage is applied from the high-frequency power supply 73 between the ground electrode 5 and the high-voltage electrode 6 of the ozone generating tube through which the source gas containing oxygen having such a pressure value flows, silent discharge occurs. Some of the source gas containing oxygen is ozonized.

【0014】なお、必要なオゾン発生量によって、胴部
1に収納するオゾン発生管の本数が異なり、1本から多
い場合には数百本となる場合もある。またガラス誘電体
層を前述のようにライニングによらずに、ガラス管を用
いる場合もある。
The number of ozone generating tubes housed in the body 1 differs depending on the required amount of generated ozone, and if the number of ozone generating tubes is larger than one, it may be several hundred. In some cases, a glass tube is used instead of lining the glass dielectric layer as described above.

【0015】次に、図6により、前記両面冷却方式のオ
ゾン発生装置について、その概要を説明する。図6はオ
ゾン発生管の断面構造を示すが、図6において、図5に
示す部材と同一の部材には、同一番号を付して説明を省
略する。図6に示すように、高電圧電極6の端部には、
冷却水の入口と出口のパイプ13a,13bとが溶接さ
れている。
Next, the outline of the ozone generator of the double-sided cooling system will be described with reference to FIG. FIG. 6 shows the cross-sectional structure of the ozone generating tube. In FIG. 6, the same members as those shown in FIG. As shown in FIG. 6, at the end of the high voltage electrode 6,
The cooling water inlet and outlet pipes 13a and 13b are welded.

【0016】高電圧電極6に外部から冷却水を供給する
ために、例えば、前記図5におけるオゾン出口側の側板
22と水ジャケット3を画成する支持板42との間のガ
ス空間に導入,排出用の2個の冷却水分配器を配置し、
この各冷却水分配器と高電圧電極6の前記パイプ13
a,13bとの間を絶縁チューブで接続配管する(この
オゾン発生装置全体の詳細は、前記特開平9−3158
03号公報参照)。
In order to supply cooling water from the outside to the high-voltage electrode 6, for example, the cooling water is introduced into a gas space between the side plate 22 on the ozone outlet side and the support plate 42 defining the water jacket 3 in FIG. Arrange two cooling water distributors for discharge,
Each cooling water distributor and the pipe 13 of the high voltage electrode 6
a and 13b are connected by an insulating tube (for details of the entire ozone generator, refer to Japanese Patent Application Laid-Open No. 9-3158).
No. 03).

【0017】[0017]

【発明が解決しようとする課題】ところで、前述の従来
のオゾン発生装置においては、以下のような問題があ
る。
The above-mentioned conventional ozone generator has the following problems.

【0018】同じ仕様で製作した複数の高電圧電極を比
較したとき、同じ放電条件にもかかわらず、オゾン濃度
が異なる場合があることが判明した。
When comparing a plurality of high-voltage electrodes manufactured with the same specifications, it was found that the ozone concentration may be different despite the same discharge conditions.

【0019】図4は、従来のオゾン発生装置における放
電電力とオゾン濃度の相対値の関係を示す。接地電極は
共通で、5本の高電圧電極を交換して各オゾン濃度を測
定した。高電圧電極5本中、1本は相対的にオゾン濃度
が低い結果を示した。オゾンを発生させた後に、高電圧
電極の表面を目視で観察すると、相対的にオゾン濃度が
低い高電圧電極の表面は、放電跡(ステンレス鋼表面が
酸化され、茶色に変色した表面)にむらがあった。
FIG. 4 shows the relationship between the discharge power and the relative value of ozone concentration in a conventional ozone generator. The ground electrode was common, and five high-voltage electrodes were replaced to measure each ozone concentration. One of the five high-voltage electrodes showed a relatively low ozone concentration. When the surface of the high-voltage electrode is visually observed after ozone is generated, the surface of the high-voltage electrode having a relatively low ozone concentration has unevenness in discharge traces (a surface in which the stainless steel surface is oxidized and turns brown). was there.

【0020】放電跡にむらが生じる理由は、次のように
考えられる。高電圧電極の寸法は、直径が約7cm、長
さが約1mである。製造上の理由から、電極は弓状に曲
がりが生じており、そのため部分的に放電空隙長が異な
ることになる。原料ガスが放電空隙内部を移動すると
き、広い場所は流れやすく、狭い場所は流れにくくな
り、放電空隙内の原料ガスの偏流が生ずる。このような
理由から、曲がりが大きい高電圧電極は放電が不均一と
なり、オゾン濃度が低い傾向を示すと考えられる。
The reason why the discharge trace becomes uneven is considered as follows. The dimensions of the high voltage electrode are about 7 cm in diameter and about 1 m in length. For manufacturing reasons, the electrodes are bowed in an arcuate manner, which results in partially different discharge gap lengths. When the source gas moves inside the discharge gap, it flows easily in a wide place and hardly flows in a narrow place, so that the source gas drifts in the discharge gap. For these reasons, it is considered that a high-voltage electrode having a large bend tends to have a non-uniform discharge and a low ozone concentration.

【0021】なお、上記問題の解決策として、曲がりが
小さい高電圧電極だけを使用すれば良いが、この場合に
は歩留まりが悪くなり、コスト上問題となる。
As a solution to the above-mentioned problem, it is sufficient to use only a high-voltage electrode having a small bend. However, in this case, the yield is reduced and a problem arises in cost.

【0022】この発明は、上記のような問題点を解消す
るためになされたもので、本発明の課題は、放電空隙内
の原料ガスの偏流に伴う放電の不均一を防止し、オゾン
発生効率の高いオゾン発生装置を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to prevent non-uniform discharge caused by drift of a raw material gas in a discharge gap, and to improve ozone generation efficiency. To provide an ozone generator with high performance.

【0023】[0023]

【課題を解決するための手段】前述の課題を解決するた
め、この発明は、両端が開口し内周面に誘電体層を形成
した円筒管形の接地電極と、前記接地電極の誘電体層内
側に放電空隙を介して同心設置した中空筒状の高電圧電
極とからなる少なくとも1組のオゾン発生管と、両端が
開口した筒状の胴部および開口部を気密に塞ぐための2
つの側板とを有し前記オゾン発生管を内蔵する筐体と、
この筐体と接地電極との間に設けられ接地電極を冷却す
るための冷却水流路を形成する水ジャケットと、前記オ
ゾン発生管に電力を供給する電源とを備え、前記筐体内
に導入された酸素を含む原料ガスを前記放電空隙に通流
し、前記原料ガスの放電によってオゾンを生成するオゾ
ン発生装置において、前記放電空隙を原料ガスの螺旋状
流路とするための仕切り部材を、放電空隙内に配設する
ものとする(請求項1の発明)。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a cylindrical tube-shaped ground electrode having both ends opened and a dielectric layer formed on an inner peripheral surface, and a dielectric layer of the ground electrode. At least one pair of ozone generating tubes each including a hollow cylindrical high-voltage electrode concentrically provided with a discharge gap inside, and a cylindrical body having both ends opened and a tube for hermetically closing the openings.
A housing having two side plates and incorporating the ozone generating tube;
A water jacket provided between the housing and the ground electrode to form a cooling water flow path for cooling the ground electrode, and a power supply for supplying power to the ozone generating tube, and introduced into the housing. In an ozone generator for flowing a source gas containing oxygen into the discharge gap and generating ozone by discharging the source gas, a partition member for forming the discharge gap as a spiral flow path of the source gas is formed in the discharge gap. (The invention of claim 1).

【0024】上記によれば、仕切り部材によって原料ガ
スが螺旋状に放電空隙内を略均一に流通できる。その結
果、原料ガスの偏流が無くなり、電極の全面で均一な放
電が生じるので、オゾン発生効率を向上することができ
る。
[0024] According to the above, the raw material gas can be spirally and substantially uniformly circulated in the discharge gap by the partition member. As a result, the drift of the source gas is eliminated, and a uniform discharge is generated on the entire surface of the electrode, so that the ozone generation efficiency can be improved.

【0025】また、前記発明の実施態様として、下記請
求項2ないし3の発明が好適である。即ち、請求項1に
記載のオゾン発生装置において、前記螺旋状流路は、仕
切り部材としての針金を高電圧電極の外周に螺旋状に巻
き付けることにより形成された流路とする(請求項2の
発明)。
Further, as an embodiment of the above invention, the following inventions 2 and 3 are preferable. That is, in the ozone generator according to claim 1, the spiral flow path is a flow path formed by spirally winding a wire as a partition member around an outer periphery of a high-voltage electrode. invention).

【0026】さらに、前記請求項2に記載のオゾン発生
装置において、前記針金の断面形状は矩形状または円形
状とし、その材質はステンレス鋼とするものとする(請
求項3の発明)。上記請求項2ないし3の発明により、
構造が簡単にして所望のオゾン発生装置が得られる。
Further, in the ozone generating apparatus according to the second aspect, the wire has a rectangular or circular cross section, and the material thereof is stainless steel (the invention of the third aspect). According to the invention of claims 2 and 3,
The desired ozone generator can be obtained with a simple structure.

【0027】なお、前記発明により、前記図5および図
6に示した放電ギャップ56を保持するための突起体6
1は、仕切り部材がその機能を兼用できるために不要と
なる。
According to the invention, the projection 6 for holding the discharge gap 56 shown in FIGS.
1 is unnecessary because the partition member can also serve the function.

【0028】[0028]

【発明の実施の形態】図1ないし図3に基づき、本発明
の実施例について以下に述べる。なお、前記図におい
て、従来装置と同一構成部材には、同一の部番を付して
説明を省略する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In the drawings, the same components as those of the conventional device are denoted by the same reference numerals, and description thereof is omitted.

【0029】図1は、本発明に関わるオゾン発生装置の
高電圧電極の部分拡大平面図を示す。この実施例におい
ては、ステンレス鋼製の平板状針金31を高電圧電極6
の外周に螺旋状に巻き付けた例を示す。
FIG. 1 is a partially enlarged plan view of a high-voltage electrode of an ozone generator according to the present invention. In this embodiment, a stainless steel flat wire 31 is connected to the high voltage electrode 6.
An example of spirally winding around the outer periphery of the head is shown.

【0030】図2は、本発明に関わるオゾン発生装置の
オゾン発生管の部分拡大断面図を示す。図2の実施例に
おいては、ステンレス鋼製の断面円形の棒状針金31a
を高電圧電極6の外周に螺旋状に巻き付けた例を示す。
FIG. 2 is a partially enlarged sectional view of an ozone generating tube of the ozone generating apparatus according to the present invention. In the embodiment shown in FIG. 2, a rod-shaped wire 31a made of stainless steel and having a circular cross section is used.
Is spirally wound around the outer periphery of the high voltage electrode 6.

【0031】図1および図2の実施例において、放電空
隙56は、図2に示すように、ガラス誘電体層52と高
電圧電極6で囲まれた放電空隙56が、針金31又は3
1aによって螺旋状の連続する空間に仕切られた構造と
なり、螺旋状流路30が形成される。この螺旋状流路3
0は、高電圧電極6の外周に、例えば、厚さ又は外径
0.3mmのステンレス鋼の針金31又は31aを例え
ば5cmのピッチで螺旋状に巻きつけて固定した後、接
地電極5に挿入して形成される。
In the embodiment of FIGS. 1 and 2, as shown in FIG. 2, the discharge gap 56 surrounded by the glass dielectric layer 52 and the high-voltage electrode 6 is formed by the wire 31 or 3.
1a forms a structure partitioned into a spiral continuous space, and a spiral flow path 30 is formed. This spiral channel 3
Reference numeral 0 denotes a case where a stainless steel wire 31 or 31a having a thickness or an outer diameter of, for example, 0.3 mm is helically wound at a pitch of, for example, 5 cm and fixed to the outer periphery of the high voltage electrode 6, and then inserted into the ground electrode 5. Formed.

【0032】図3は、本発明の効果を示すオゾン発生特
性であって、ガス圧力0.17MPa、冷却水温度10℃
の条件で、放電電力とオゾン濃度の関係を測定した結果
を示す。図4と同様に、放電電力の増大とともにオゾン
濃度が増大するが、放電電力1000wattのときのオゾ
ン濃度を100として規格化した。実験に用いた高電圧
電極は合計5本で、図4の従来のオゾン発生特性で使用
した高電圧電極と同一である。高電圧電極の表面に針金
を巻き、同様の測定を行った結果、5本ともほぼ同じオ
ゾン発生特性が得られた。この高電圧電極の表面を目視
で観察した結果、放電跡はいずれの電極も均一であっ
た。
FIG. 3 shows the ozone generation characteristics showing the effect of the present invention. The gas pressure is 0.17 MPa, the cooling water temperature is 10 ° C.
The results of measuring the relationship between the discharge power and the ozone concentration under the conditions described above are shown. Similar to FIG. 4, the ozone concentration increases as the discharge power increases, but the ozone concentration at a discharge power of 1000 watt was normalized to 100. A total of five high voltage electrodes were used in the experiment, which are the same as the high voltage electrodes used in the conventional ozone generation characteristics of FIG. A wire was wound around the surface of the high-voltage electrode, and the same measurement was performed. As a result, almost the same ozone generation characteristics were obtained for all five wires. As a result of visually observing the surface of the high-voltage electrode, the discharge trace was uniform for all the electrodes.

【0033】なお、上記実施例に基づく効果は、高電圧
電極6の冷却の有無、即ち、片面冷却か両面冷却か、に
かかわらず得られる。さらに、ガラス管を接地電極内部
に挿入するタイプのオゾン発生装置であっても、同じ効
果を得ることができる。
The effect based on the above embodiment can be obtained irrespective of whether or not the high-voltage electrode 6 is cooled, that is, whether single-sided cooling or double-sided cooling is performed. Further, the same effect can be obtained even with an ozone generator of a type in which a glass tube is inserted inside a ground electrode.

【0034】[0034]

【発明の効果】上記のとおり、この発明によれば、両端
が開口し内周面に誘電体層を形成した円筒管形の接地電
極と、前記接地電極の誘電体層内側に放電空隙を介して
同心設置した中空筒状の高電圧電極とからなる少なくと
も1組のオゾン発生管と、両端が開口した筒状の胴部お
よび開口部を気密に塞ぐための2つの側板とを有し前記
オゾン発生管を内蔵する筐体と、この筐体と接地電極と
の間に設けられ接地電極を冷却するための冷却水流路を
形成する水ジャケットと、前記オゾン発生管に電力を供
給する電源とを備え、前記筐体内に導入された酸素を含
む原料ガスを前記放電空隙に通流し、前記原料ガスの放
電によってオゾンを生成するオゾン発生装置において、
前記放電空隙を原料ガスの螺旋状流路とするための仕切
り部材を、放電空隙内に配設することにより、特に、前
記螺旋状流路は、仕切り部材としての針金を高電圧電極
の外周に螺旋状に巻き付けることにより形成された流路
とすることにより、簡単な構造にして、放電空隙内の原
料ガスの偏流に伴う放電の不均一を防止することがで
き、もってオゾン発生効率の高いオゾン発生装置を提供
することができる。
As described above, according to the present invention, a cylindrical tubular ground electrode having both ends open and a dielectric layer formed on the inner peripheral surface, and a discharge gap inside the dielectric layer of the ground electrode are provided. At least one pair of ozone generating tubes comprising a hollow cylindrical high-voltage electrode concentrically installed, a cylindrical body having both ends opened, and two side plates for hermetically closing the openings. A housing containing the generation tube, a water jacket provided between the housing and the ground electrode to form a cooling water flow path for cooling the ground electrode, and a power supply for supplying power to the ozone generation tube. In the ozone generator, a source gas containing oxygen introduced into the housing is passed through the discharge gap, and ozone is generated by discharging the source gas.
By disposing a partition member for forming the discharge gap as a spiral flow path of the raw material gas in the discharge gap, particularly, the spiral flow path has a wire as a partition member on the outer periphery of a high-voltage electrode. By using a flow path formed by helically winding, it is possible to provide a simple structure and prevent non-uniform discharge due to the non-uniform flow of the raw material gas in the discharge gap, and thus achieve high ozone generation efficiency. A generator can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施例に関わる高電圧電極の部分拡
大平面図
FIG. 1 is a partially enlarged plan view of a high-voltage electrode according to an embodiment of the present invention.

【図2】この発明の異なる実施例に関わるオゾン発生管
の部分拡大断面図
FIG. 2 is a partially enlarged sectional view of an ozone generating tube according to another embodiment of the present invention.

【図3】この発明の実施例に関わる放電電力とオゾン濃
度相対値の関係を示す図
FIG. 3 is a diagram showing a relationship between discharge power and an ozone concentration relative value according to the embodiment of the present invention.

【図4】従来のオゾン発生装置に関わる放電電力とオゾ
ン濃度相対値の関係を示す図
FIG. 4 is a diagram illustrating a relationship between discharge power and an ozone concentration relative value related to a conventional ozone generator.

【図5】従来のオゾン発生装置(片面冷却方式)の構成
の一例を示す図
FIG. 5 is a diagram showing an example of the configuration of a conventional ozone generator (single-sided cooling system).

【図6】従来の異なるオゾン発生装置(両面冷却方式)
の構成の一例に関わるオゾン発生管の部分拡大断面図
FIG. 6 shows a different conventional ozone generator (double-sided cooling system).
Partial enlarged cross-sectional view of an ozone generating tube related to an example of the configuration of

【符号の説明】[Explanation of symbols]

1:胴部、3:水ジャケット、5:接地電極、6:高電
圧電極、30:螺旋状流路、31,31a:針金、5
2:誘電体層、56:放電空隙。
1: trunk, 3: water jacket, 5: ground electrode, 6: high voltage electrode, 30: spiral flow path, 31, 31a: wire, 5
2: dielectric layer, 56: discharge gap.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 西川 孝也 神奈川県川崎市川崎区田辺新田1番1号 富士電機株式会社内 Fターム(参考) 4G042 CA01 CC03 CC11 CC13 CC16 CC20 CC21 CE04  ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Takaya Nishikawa 1-1-1, Tanabe Nitta, Kawasaki-ku, Kawasaki-shi, Kanagawa F-term in Fuji Electric Co., Ltd. 4G042 CA01 CC03 CC11 CC13 CC16 CC20 CC21 CE04

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 両端が開口し内周面に誘電体層を形成し
た円筒管形の接地電極と、前記接地電極の誘電体層内側
に放電空隙を介して同心設置した中空筒状の高電圧電極
とからなる少なくとも1組のオゾン発生管と、両端が開
口した筒状の胴部および開口部を気密に塞ぐための2つ
の側板とを有し前記オゾン発生管を内蔵する筐体と、こ
の筐体と接地電極との間に設けられ接地電極を冷却する
ための冷却水流路を形成する水ジャケットと、前記オゾ
ン発生管に電力を供給する電源とを備え、前記筐体内に
導入された酸素を含む原料ガスを前記放電空隙に通流
し、前記原料ガスの放電によってオゾンを生成するオゾ
ン発生装置において、 前記放電空隙を原料ガスの螺旋状流路とするための仕切
り部材を、放電空隙内に配設することを特徴とするオゾ
ン発生装置。
1. A cylindrical tube-shaped ground electrode having both ends open and a dielectric layer formed on an inner peripheral surface, and a hollow cylindrical high voltage concentrically installed through a discharge gap inside the dielectric layer of the ground electrode. A housing having at least one set of ozone generating tubes including electrodes, a cylindrical body having both ends opened, and two side plates for hermetically closing the openings, and housing the ozone generating tube; A water jacket provided between the housing and the ground electrode to form a cooling water flow path for cooling the ground electrode, and a power supply for supplying power to the ozone generating tube, and oxygen introduced into the housing. In the ozone generator which flows the raw material gas containing into the discharge gap and generates ozone by discharging the raw material gas, a partition member for making the discharge gap a spiral flow path of the raw material gas is formed in the discharge gap. O which is characterized by Down generator.
【請求項2】 請求項1に記載のオゾン発生装置におい
て、前記螺旋状流路は、仕切り部材としての針金を高電
圧電極の外周に螺旋状に巻き付けることにより形成され
た流路とすることを特徴とするオゾン発生装置。
2. The ozone generator according to claim 1, wherein the spiral flow path is a flow path formed by spirally winding a wire as a partition member around an outer periphery of a high voltage electrode. A characteristic ozone generator.
【請求項3】 請求項2に記載のオゾン発生装置におい
て、前記針金の断面形状は矩形状または円形状とし、そ
の材質はステンレス鋼とすることを特徴とするオゾン発
生装置。
3. The ozone generator according to claim 2, wherein the wire has a rectangular or circular cross section, and the material thereof is stainless steel.
JP2001054104A 2001-02-28 2001-02-28 Ozone generator Pending JP2002255514A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001054104A JP2002255514A (en) 2001-02-28 2001-02-28 Ozone generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001054104A JP2002255514A (en) 2001-02-28 2001-02-28 Ozone generator

Publications (1)

Publication Number Publication Date
JP2002255514A true JP2002255514A (en) 2002-09-11

Family

ID=18914485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001054104A Pending JP2002255514A (en) 2001-02-28 2001-02-28 Ozone generator

Country Status (1)

Country Link
JP (1) JP2002255514A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108142A1 (en) * 2006-03-17 2007-09-27 Mitsubishi Electric Corporation Ozone producing apparatus
JP2008143729A (en) * 2006-12-07 2008-06-26 Fuji Electric Water Environmental Systems Co Ltd Ozone generating apparatus
CN102491278A (en) * 2011-11-28 2012-06-13 济南瑞清臭氧设备有限公司 Ozone discharging tube, ozone discharging chamber and vertical type ozone generating device
CN102781155A (en) * 2012-07-23 2012-11-14 西安电子科技大学 Large-area uniform high-density plasma generation system with cooled electrode
CN106793437A (en) * 2016-12-29 2017-05-31 江苏河海新能源股份有限公司 Plasma water generating means
CN115650175A (en) * 2022-09-23 2023-01-31 北京理工大学 Method for improving oxygen atom conversion efficiency of plate-type ozone generator

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56160304A (en) * 1980-05-07 1981-12-10 Mitsubishi Electric Corp Ozonizer
JPS6114104A (en) * 1984-06-22 1986-01-22 メツサー・グリースハイム・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Ozone generator
JPS6317207A (en) * 1986-07-08 1988-01-25 Fuji Electric Co Ltd Ozone-generation tube
JPH09315803A (en) * 1996-05-30 1997-12-09 Fuji Electric Co Ltd Ozonizer
JPH11130409A (en) * 1997-10-27 1999-05-18 Fuji Electric Co Ltd One-side-cooled ozonizer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56160304A (en) * 1980-05-07 1981-12-10 Mitsubishi Electric Corp Ozonizer
JPS6114104A (en) * 1984-06-22 1986-01-22 メツサー・グリースハイム・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Ozone generator
JPS6317207A (en) * 1986-07-08 1988-01-25 Fuji Electric Co Ltd Ozone-generation tube
JPH09315803A (en) * 1996-05-30 1997-12-09 Fuji Electric Co Ltd Ozonizer
JPH11130409A (en) * 1997-10-27 1999-05-18 Fuji Electric Co Ltd One-side-cooled ozonizer

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108142A1 (en) * 2006-03-17 2007-09-27 Mitsubishi Electric Corporation Ozone producing apparatus
JPWO2007108142A1 (en) * 2006-03-17 2009-08-06 三菱電機株式会社 Ozone generator
JP2008143729A (en) * 2006-12-07 2008-06-26 Fuji Electric Water Environmental Systems Co Ltd Ozone generating apparatus
CN102491278A (en) * 2011-11-28 2012-06-13 济南瑞清臭氧设备有限公司 Ozone discharging tube, ozone discharging chamber and vertical type ozone generating device
CN102781155A (en) * 2012-07-23 2012-11-14 西安电子科技大学 Large-area uniform high-density plasma generation system with cooled electrode
CN106793437A (en) * 2016-12-29 2017-05-31 江苏河海新能源股份有限公司 Plasma water generating means
CN115650175A (en) * 2022-09-23 2023-01-31 北京理工大学 Method for improving oxygen atom conversion efficiency of plate-type ozone generator
CN115650175B (en) * 2022-09-23 2023-12-01 北京理工大学 Method for improving oxygen atom conversion efficiency of plate-type ozone generator

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