JP2005255429A - Ozone generating tube, and ozone generating apparatus equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide technique by which an abnormal discharge between a cylindrical grounding electrode and a metal connecting part of a cylindrical high-voltage electrode is hardly caused. <P>SOLUTION: The subject ozone generating apparatus is equipped with an ozone generating tube having an electrode structure which comprises: the cylindrical grounding electrode open at both ends; and the long high-voltage electrode composed of a plurality of high-voltage electrodes connected via a conductive metal terminal disposed on the end face of the electrode, with each electrode concentrically disposed inside the grounding electrode forming a gap therebetween and having a dielectric layer formed on the face opposing to the grounding electrode. The apparatus is equipped with: an insulating component at the end of the high-voltage electrode, the insulating component which can keep the creeping distance between the conductive metal terminal and the grounding electrode to be long enough to prevent thermal breakdown of the dielectric material; and an insulating ring having ozone resistance between the above insulating component and the end face of the high-voltage electrode so that the ozone-resistant insulating ring is pushed to the surface of the high-voltage electrode surface by the insulating component to improve the dielectric durability between the end face of the high-voltage electrode and the grounding electrode. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to an ozone generator tube that can generate ozone by applying an alternating high voltage between opposing electrodes, and suppresses damage to a dielectric formed on the surface of the high voltage electrode even if abnormal discharge occurs. It relates to an ozone generator tube. Moreover, it is an ozone generator provided with the ozone generation pipe | tube, Comprising: It is related with the ozone generator used for a water and sewage process, a pulp bleaching process, a sterilization process, etc. In particular, when the applied voltage of the alternating high voltage applied between the ground electrode and the high voltage electrode rises for some reason, the conductive metal terminal or conductive metal terminal provided on the ground electrode and the high voltage electrode The present invention relates to an ozone generator tube capable of suppressing breakage of a dielectric formed on the surface of a high voltage electrode due to heat generated by the discharge, and an ozone generator including the ozone generator tube.

Ozone gas is used for sterilization treatment, bleaching treatment, and the like, and its production technology has been studied for a long time. For example, many research results have been reported on an ozone generator equipped with an ozone generator tube, such as an electrode structure in an ozone generator tube, a space between counter electrodes, and a method of passing a cooling medium.
As an electrode structure of a conventionally known ozone generating tube, for example, an electrode structure as shown in FIGS. 7 and 8 is known.

FIG. 7 shows an electrode structure of a cylindrical electrode type ozone generating tube. There, a cylindrical high-voltage electrode 2 in which a metal film (electrode) is formed on the inner surface of a dielectric 3 of a one-end open tube made of glass or ceramics, and a constant gap as a discharge space 4 is maintained outside thereof, A cylindrical ground electrode 1 is disposed on the outside so as to wrap around the side surface of the dielectric 3 disposed on the surface of the cylindrical high voltage electrode 2 (see, for example, Non-Patent Document 1).
By supplying a source gas 6 containing oxygen into the discharge space 4, connecting an AC high voltage power source (not shown) between the electrodes, and applying an AC high voltage between the electrodes, the discharge space A silent discharge (ozonizer discharge) is uniformly generated within 4 and an ozonized gas 7 is generated.

FIG. 8 shows an electrode structure of a cylindrical electrode type ozone generating tube different from the above.
Therein, a long metal connecting rod 9 is provided at the center of the cylindrical high voltage electrode 2, and a plurality of cylindrical high voltage electrodes 2 having a dielectric 3 formed on the surface of the cylindrical high voltage electrode 2 are connected. The cylindrical ground electrode 1 is arranged coaxially with the cylindrical high voltage electrode 2 through the discharge space 4 outside the cylindrical high voltage electrode 2 (see, for example, Patent Document 1).
By supplying a source gas 6 containing oxygen into the discharge space 4, connecting an AC high voltage power source (not shown) between the electrodes, and applying an AC high voltage between the electrodes, the discharge space A silent discharge (ozonizer discharge) is uniformly generated within 4 and an ozonized gas 7 is generated.
The ozone generator tube of FIG. 7 and the ozone generator of FIG. 8 are provided with a device (not shown) for cooling the electrode on one side of the electrode to cool the electrode.

Conventionally known ozone generators have been studied in various ways to improve the amount of ozone generated. One method is to lengthen the cylindrical high-voltage electrode. For example, in the case of the electrode structure shown in FIG. 7, the structure shown in FIG. 9 has a structure in which a maximum of two cylindrical high-voltage electrodes 2 are inserted into the same cylindrical ground electrode 1.
A source gas 6 containing oxygen is supplied into the discharge space 4 from two directions as shown in the figure, and an AC high voltage power source (not shown) is connected between the electrodes, and an AC is supplied between the electrodes. By applying a high voltage, silent discharge (ozonizer discharge) is uniformly generated in the discharge space 4, and the ozonized gas 7 is generated and discharged from one place as shown in the figure. In this case, power is supplied to the high voltage electrode at the end of the high voltage electrode that is not encased in the dielectric.

  In the ozone generating tube shown in FIG. 8, a plurality of cylindrical high-voltage electrodes 2 are connected to enable the lengthening. Electric power is supplied to the cylindrical high-voltage electrode 2 at the source gas inlet side of the elongated high-voltage electrode, and the plurality of cylindrical high-voltage electrodes 2 are electrically connected to each other by a metal connecting rod 9. A discharge is generated between the cylindrical ground electrode 1 and the cylindrical high voltage electrode 2 to generate ozone. In this case, since the connection portion between each cylindrical high-voltage electrode 2 and the metal connecting rod 9 is exposed in the discharge space 4, when the applied voltage rises for some reason, the cylindrical ground electrode 1 and the cylindrical high voltage An abnormal discharge occurs between the connecting portions of the electrode 2, and the heat generated by the discharge may damage the dielectric 3 of the high-voltage electrode, and the ozone generation operation must be stopped. It can also be a thing.

JP-A-4-214004 5th Annual Meeting of the Japan Ozone Society (p81-84)

Accordingly, an object of the present invention is to provide a technique that makes it difficult for abnormal discharge to occur between the cylindrical ground electrode and the metal connection portion of the cylindrical high-voltage electrode. An object of the present invention is to provide a technique for making a dielectric formed on the surface of a high-voltage electrode difficult to be destroyed by heat generated by the occurrence of abnormal discharge. Furthermore, it is intended to provide a technology for improving the electrical connection between the elongated cylindrical high-voltage electrodes, particularly the cylindrical high-voltage electrodes, and ensuring the path of the cooling medium. It is also to provide an ozone generator tube and an ozone generator having the same.

While the present inventor has devised to solve the above-described problems, the length of the cylindrical high-voltage electrode is further increased, and the accompanying electrode cooling is less likely to cause abnormal discharge, electrical connection, the path of the cooling medium, and the cylinder. In order to solve the problems of ground electrode and cylindrical high voltage electrode connection part insulation, the following problems are solved by applying the high voltage electrode connection part insulation technique described below.

The high voltage electrode connection part insulation technique is as follows.
Cylindrical ground electrode open at both ends, concentrically arranged inside the ground electrode via a gap, has a high-voltage power supply terminal on the inlet side of the source gas, and has a dielectric on the opposite surface of the ground electrode A raw material containing oxygen, comprising an ozone generator tube comprising a high voltage electrode having a body layer and a housing containing the ozone generator tube, and having a cooling mechanism on at least one side of the electrode In the ozone generator that generates ozonized gas by discharging gas, the end of the high voltage electrode due to the occurrence of abnormal discharge such as creeping discharge that occurs at the high voltage power supply terminal of the ground electrode and high voltage electrode during excessive applied voltage operation In order to prevent thermal breakdown or discharge breakdown of the dielectric formed on the surface, the high voltage electrode end is insulated against ozone on the surface of the high voltage electrode by the insulation component having a long creepage distance between the power feeding terminal and the ground electrode. Have By pressing the edge ring, by having a part of the dielectric strength was improved between the ground electrode and the high voltage electrode end portion side, and suppress occurrence of abnormal discharge at the electrode end, to realize the electrode breakage reduction.

That is, the invention according to claim 1 of the present invention includes a cylindrical ground electrode having both ends open, a concentric cylinder disposed inside the ground electrode via a gap, and a dielectric on the surface facing the ground electrode. In an ozone generator tube having a layer structure and an electrode structure comprising a high voltage electrode provided with a conductive metal terminal on an end face, and generating ozonized gas by discharge from a source gas containing oxygen, the high voltage An insulating part having a creeping distance between the conductive metal terminal and the ground electrode on the end face of the electrode so as to prevent thermal breakdown due to discharge of the dielectric, and between the insulating part and the end face of the high voltage electrode An ozone generating tube characterized in that an insulating ring is disposed on the high voltage electrode end surface by means of the insulating component, and the dielectric strength between the high voltage electrode end surface and the ground electrode is improved. .
The invention according to claim 2 of the present invention is the ozone generating tube according to claim 1, wherein the high voltage electrode is a long high voltage electrode in which a plurality of high voltage electrodes are connected by conductive metal connection terminals. An insulating component having a creeping distance between a conductive metal connection terminal and a ground electrode on an end surface of the plurality of high-voltage electrodes so as to prevent thermal breakdown due to discharge of the dielectric, and the insulating component and the An insulating ring is disposed between the end faces of the high voltage electrode, and the insulating ring is pressed against the end face of the high voltage electrode by the insulating component.
The invention according to claim 3 of the present invention is the ozone generating tube according to claim 1 or 2, wherein the insulating component causes an abnormal discharge on the dielectric surface to occur in a creepage distance between the conductive metal terminal and the ground electrode. It is characterized in that it is an insulating part that is long so that it does not.
The invention according to claim 4 of the present invention is the ozone generating tube according to claim 1 or 2, wherein the conductive metal terminal is provided at an end of the high voltage electrode disposed at the source gas inlet on the source gas inlet side. Is a high-voltage power supply terminal.

In the invention according to claim 5 of the present invention, a cylindrical ground electrode having both ends open, a concentric cylinder disposed inside the ground electrode via a gap, and a dielectric layer on the surface facing the ground electrode An ozone generator tube having an electrode structure formed of a high voltage electrode provided with a conductive metal terminal on an end surface, and a housing containing the ozone generator tube, and a source gas containing oxygen is discharged by discharge In an ozone generator for generating ozonized gas, an insulating component having a creepage distance between a conductive metal terminal and a ground electrode on the end face of the high voltage electrode so as to prevent thermal destruction due to discharge of the dielectric, And an insulating ring is disposed between the insulating part and the end face of the high-voltage electrode, and the insulating ring is pressed against the end face of the high-voltage electrode by the insulating part, and the dielectric strength between the end face of the high-voltage electrode and the ground electrode It is characterized by improving.
The invention according to claim 6 of the present invention is the ozone generator according to claim 5, wherein the high voltage electrode is an elongated high voltage electrode in which a plurality of high voltage electrodes are connected by a conductive metal connection terminal. An insulating component having a creeping distance between a conductive metal connection terminal and a ground electrode on an end surface of the plurality of high-voltage electrodes so as to prevent thermal breakdown due to discharge of the dielectric, and the insulating component and the An insulating ring is disposed between the end faces of the high voltage electrode, and the insulating ring is pressed against the end face of the high voltage electrode by the insulating component.
The invention according to claim 7 of the present invention is characterized in that the insulating component is an insulating component in which the creeping distance between the conductive metal terminal and the ground electrode is increased so as not to cause abnormal discharge on the dielectric surface. .
The invention according to claim 8 of the present invention is the ozone generator according to claim 5 or 6, wherein the conductive metal terminal is provided at the end of the high voltage electrode disposed at the source gas inlet on the source gas inlet side. Is a high-voltage power supply terminal.

Hereinafter, the present invention will be described in detail.
The electrode of the counter electrode of the present invention has a configuration in which a cylindrical ground electrode is coaxially disposed outside a cylindrical high voltage electrode having a dielectric layer on the surface with a space interposed therebetween. These cylindrical high-voltage electrode, cylindrical ground electrode, and dielectric are not particularly limited, and general ones can be used. A general method can be used for the means for facing and the means for disposing the dielectric.

  A conductive metal terminal is provided on the end surface of the cylindrical high voltage electrode. This conductive metal terminal plays several roles. For example, a high-voltage electrode disposed at a position closest to the source gas inlet side containing oxygen in the ozone generation tube (a high-voltage electrode disposed at the source gas inlet) The conductive metal terminal provided on the end surface on the source gas inlet side of the material gas functions as a high voltage power supply terminal (sometimes referred to as a power supply terminal) when an alternating high voltage is applied between the opposing electrodes. The conductive metal terminal only needs to have a shape capable of achieving a function capable of supplying an AC high voltage to be applied, and is made of a material capable of supplying an AC high voltage to be applied. Examples of the conductive metal terminal include a combination of a conductive metal rod or a conductive metal pipe, and a joint screw (hereinafter sometimes referred to as a connection joint terminal). When the conductive metal terminal is a metal pipe, it functions as a cooling medium passing terminal.

In the present invention, a long high voltage electrode in which a plurality of high voltage electrodes are connected by conductive metal connection terminals (sometimes referred to as connection terminals) can be employed as an electrode constituting the counter electrode. The conductive metal connection terminal includes a conductive metal rod and a joint screw or a conductive metal pipe and a joint screw. The conductive metal connection terminal plays several roles. If the high voltage electrode is connected by the conductive metal connection terminal so that the cooling medium can pass, the conductive metal connection terminal also serves as a passage for the cooling medium. In this case, the conductive metal connection terminal needs to be hollow, and it is particularly advantageous to use a conductive metal connection terminal composed of a joint screw and a flexible conductive metal pipe. Further, when it is not necessary to use the passage of the cooling medium, a joint screw and a conductive metal rod may be used.
The joint screw, conductive metal pipe, flexible conductive metal pipe, and conductive metal rod are already known and can be obtained by purchasing a commercial product. In the present invention, it is preferable to use a highly flexible pipe manufactured from a conductive metal material such as stainless steel.
Using the conductive metal connection terminal using such a pipe with excellent flexibility, when connecting the high voltage electrodes, it is possible to delicately absorb the warping and bending of the ground electrode and the high voltage electrode, It is possible to make the gap length between the counter electrodes uniform. In addition, a hole for passage of the cooling medium is provided on the surface of the end of the high voltage electrode, and the hole is provided with a high voltage current so that the cooling medium does not leak at the conductive metal connection terminal using a pipe having excellent flexibility. When the conductive metal terminals including the conductive metal pipe are provided on both sides of the elongated high voltage electrode while the extreme parts are connected to each other, the cooling medium smoothly passes through the high voltage electrode and the pipe. It is also possible.

It is one of the features of the present invention that an insulating component as referred to in the present invention is provided on the end surface of the cylindrical high voltage electrode.
As an example of the insulating component, a hole for insertion of a metal rod or a metal pipe constituting a conductive metal terminal or a conductive metal connection terminal is provided in the vicinity of the center, and the hole is formed on one end face where the hole is formed. A cylindrical insulator in which a ring-shaped groove for arranging an insulating ring is provided at the center, and a recess for adjusting a creepage distance is provided at the other end face where the hole is formed, with the hole as the center.
An insulating ring is disposed in the ring-shaped groove for insulating ring arrangement of this insulating component, and the end surface of the high voltage electrode and the ground electrode are pressed against the end surface of the high voltage electrode using the insulating ring. The dielectric strength between the two can be improved. At this time, the insulating component can be pressed against the end face of the high voltage electrode by tightening with a joint screw (also referred to as a connection joint terminal) constituting the conductive metal terminal or the conductive metal connection terminal.
In the present invention, it is necessary to secure a sufficient creeping distance so that abnormal discharge such as creeping discharge does not occur. There are various methods for securing the creepage distance. For example, a method of increasing the creepage distance by deepening the recess for adjusting the creepage distance of the insulating component, or the surface of the recess for adjusting the creepage distance of the insulating component. For example, there is a method of increasing the creepage distance by processing the shape into a shape such as a waveform, a sawtooth waveform, and an uneven shape. In this way, the creepage distance can be increased.
Here, the creepage distance is the shortest distance along the surface of the insulating component between the conductive metal terminal or conductive metal connection terminal provided at the end of the high voltage electrode and the ground electrode, and the ozone generator. Is the sum of the path where dielectric breakdown occurs and the discharge gap length of the spatial distance.
Further, the insulating ring is not particularly limited, but it is preferable to use an O-ring made of an ozone resistant material.

The method of providing the insulating component on the end surface of the cylindrical high voltage electrode is not particularly limited as long as a conductive metal rod or a conductive metal pipe and a combination of them and a joint screw are used. More specifically, after inserting a conductive metal rod or conductive metal pipe into a conductive metal rod or conductive metal pipe insertion hole of an insulating part and inserting an insulating ring into a predetermined position of the insulating part, the conductive metal rod Alternatively, the conductive metal pipe is electrically connected well to the cooling medium passage hole provided in advance on the end face of the cylindrical high voltage electrode, and is further connected and fixed so that the cooling medium can pass therethrough. Next, the insulating component is pressed against the cylindrical high-voltage electrode surface with a joint screw.
The phrase “connecting through the cooling medium” means that the high-voltage electrodes are connected so that the cooling medium can freely pass through the conductive metal terminals or the conductive metal connection terminals. This means that the medium does not ooze out. Better results are achieved when using conductive metal terminals or conductive metal connection terminals using flexible conductive metal pipes. Also, good electrical connection means that when an AC high voltage is applied to one cylindrical high-voltage electrode, the other cylindrical high-voltage electrode connected to the cylindrical high-voltage electrode also generates a substantially uniform discharge. It means that it is electrically connected as possible.

According to the present invention, it is possible to provide an ozone generator tube or an ozone generator that makes it difficult for abnormal discharge to occur at the high voltage power supply terminals of the cylindrical ground electrode and the cylindrical high voltage electrode. Since abnormal discharge is less likely to occur, the generation of heat due to discharge can be suppressed, and a practical effect of reducing damage to the dielectric can be brought about. This is because even if the voltage applied to the ozone generator tube or ozone generator rises for some reason, abnormal discharge of the high voltage power supply terminals of the cylindrical ground electrode and the cylindrical high voltage electrode is less likely to occur. Makes it possible to operate the generator.
Furthermore, a plurality of cylindrical high voltage electrodes can be connected to make the high voltage electrode long and the ozonized gas generation amount can be improved. In addition, when a hollow metal pipe is used, the electrode can be cooled from the inside of the high voltage electrode, so that decomposition of ozone can be further suppressed and ozonized gas having a high ozone concentration can be generated. Become.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the present invention will be described in detail with reference to the drawings.
An example of the counter electrode of the ozone generating tube of the present invention is shown in FIG.
There, a cylindrical high-voltage electrode 2 having a dielectric 3 formed on the surface thereof via a discharge space 4 is disposed concentrically inside the cylindrical ground electrode 1, and conductive metal terminals ( The feed terminal 8) is arranged on the cylindrical high-voltage electrode 2 with an insulating part 10 interposed. The conductive metal terminal (feeding terminal 8) is connected to the cylindrical high voltage electrode 2 so that the electrical connection is good.
An AC high voltage is applied between the cylindrical ground electrode 1 and the cylindrical high voltage electrode 2 having the dielectric 3 formed on the surface thereof, and a discharge is generated in the space 4 formed between the electrodes. The raw material gas 6 supplied into the ozone generating tube is subjected to a discharge treatment in the discharge space 4 to generate an ozonized gas 7. The insulating component 10 in the ozone generating tube is arranged, and the creeping distance between the conductive metal terminal (feeding terminal 8) and the cylindrical ground electrode 1 is set to such a length as to prevent thermal destruction due to the discharge of the dielectric. Therefore, even if the applied voltage rises for some reason during the operation for generating ozone, the occurrence of abnormal discharge between the conductive metal terminal (feeding terminal 8) and the cylindrical ground electrode 1 is suppressed. Thus, stable ozone generation work is possible.

FIG. 2 is an enlarged view of both ends of the cylindrical high voltage electrode 2.
The insulating component includes an ozone-resistant insulating casing 10a and an insulating ring (O-ring) 10b partially inserted into a groove provided in the casing. A recessed portion is formed on the opposite side of the insulating ring (O-ring) 10b insertion portion of the insulating housing 10a, and the creepage distance between the power supply terminal 8 (conductive metal terminal) and the cylindrical ground electrode 1 is thermally caused by the discharge of the dielectric. It is formed with a depth sufficient to prevent the destruction. The insulating casing 10a is pressed by the connection joint terminal 11b of the power supply terminal 8, and is in press contact with the end portion of the cylindrical high voltage electrode. The insulating ring 10b is crushed between the dielectric 3 and the insulating housing 10a, and the feeding terminal connecting portion of the cylindrical high voltage electrode 2 is sealed. In the case where the insulating ring 10b is an O-ring, it is desirable to set the value so as to maintain a function of maintaining airtightness, which is the original function of the O-ring. Specifically, although depending on the material of the O-ring, 8 to 30% is appropriate as the deformation rate of the crushing margin. Maintaining airtightness with an insulator means that when a discharge occurs outside the insulator, the discharge cannot reach the inside until the breakdown voltage of the insulator is reached. Therefore, the connection between the ground electrode 1 and the cylindrical high voltage electrode 2 between the power supply terminals 8 is insulated.

FIG. 3 shows an example of an electrode structure that is a different example from the above of the counter electrode of the ozone generating tube of the present invention and that employs an elongated cylindrical high voltage electrode in which a plurality of cylindrical high voltage electrodes 2 are connected in series. Show.
The cylindrical ground electrode 1 has an electrode structure in which a plurality of cylindrical high voltage electrodes 2 having a dielectric 3 formed on the surface via a discharge space 4 are arranged concentrically, and each cylindrical high voltage electrode 2 is connected to an insulating component 10 and a connection. It has a structure of being connected via a terminal 11 (conductive connecting metal terminal). The elongated high voltage electrode is obtained by connecting using the connection terminal (conductive connection metal terminal) shown in FIG. The connection terminal includes a flexible pipe 11a and a connection joint terminal 11b. When the cylindrical high-voltage electrode 2 is cooled, an electrode having a structure that allows a cooling medium to flow through the electrode connector by using a hollow flexible pipe is used. When the cooling structure is unnecessary, it can be realized by using a non-oxidizable material such as stainless steel that can be electrically connected and that can flexibly deform the flexible portion.
Although FIG. 3 shows a structure in which two cylindrical high voltage electrodes 2 are connected, more than two cylindrical high voltage electrodes 2 can be connected, and the long cylindrical ground electrode 1 is warped or bent. Can be absorbed by shortening the length of the cylindrical high-voltage electrode 2, and can also be absorbed by the flexible pipe of the electrode connector 11a.

An example different from the above of the counter electrode provided in the ozone generator of the present invention is shown in FIG.
In FIG. 5, when the electrode structure shown in FIG. 3 is connected in parallel with a plurality of electrode structures having a large number of cylindrical high-voltage electrodes to be connected, a large volume of ozone generation is required. It has a useful structure.
In this case, an electrode structure in which a plurality of cylindrical high-voltage electrodes 2 having a dielectric 3 formed on the surface thereof via a discharge space 4 inside the cylindrical ground electrode 1 is disposed concentrically is defined as one unit. The cylindrical high voltage electrode 2 is connected via an insulating component 10 and a connection terminal 11 in a structure connected in parallel.
When the cylindrical high-voltage electrodes 2 are connected to each other via the insulating component 10 and the connection terminal 11, the description is omitted here because it is the same as that in FIG. An alternating high voltage is applied between the cylindrical ground electrode 1 and the cylindrical high voltage electrode 2 via the feeding terminal 8 of the cylindrical high voltage electrode 2 to generate a discharge in the space 4 formed between the electrodes. The cylindrical high voltage electrodes 2 are electrically connected to each other well, and a uniform discharge is generated in the discharge space 4 in the ozone generating tube. The raw material gas 6 supplied into the ozone generator tube is subjected to a discharge treatment in the discharge space 4 to generate an ozonized gas 7, which is discharged out of the ozone generator.

An example different from the above of the counter electrode of the ozone generating tube of the present invention is shown in FIG.
In FIG. 6, the counter electrode shown in FIG. 1 has a structure in which the feeding terminal 8 of the cylindrical high-voltage electrode 2 has a pipe shape, and the cooling medium flows inside the feeding terminal 8.
A cylindrical high voltage electrode 2 having a dielectric 3 formed on the surface of the cylindrical ground electrode 1 through a discharge space 4 is arranged concentrically, and power supply terminals 8 are cylindrically connected to both ends of the cylindrical high voltage electrode 2. It is attached so as to be electrically connected to the high voltage electrode 2. Further, the insulating component 10 is attached to both ends of the cylindrical high voltage electrode 2.
An AC high voltage is applied between the cylindrical ground electrode 1 and the cylindrical high voltage electrode 2 to generate a uniform discharge in the space 4 formed between the electrodes. The raw material gas 6 supplied into the ozone generating tube is subjected to a discharge treatment in the discharge space 4 to generate an ozonized gas 7. The electrodes provided in the ozone generation tube are cooled by a cooling medium 21 supplied from the cooling device 20. That is, the cooling medium 21 supplied from the cooling device 20 passes through the inside of the cylindrical high-voltage electrode from the feeding terminal 8 (conductive metal connection terminal) provided at the end of the cylindrical high-voltage electrode 2, and the other cylindrical high-voltage electrode. It cools with the cooling system which returns to a cooling device through the electroconductive metal connection terminal provided in the extreme part.
In this case, as is well known, the ozone concentration is improved by the effect of cooling the electrodes, and the amount of ozone generated is also improved. Although not shown in the drawing, the performance equivalent to that described above can be obtained also by cooling the electrode by flowing a cooling medium outside the cylindrical ground electrode 1 in FIG.

From the above description, the present invention can also be described as follows.
(1) A cylindrical ground electrode having both ends open, and a concentric cylinder disposed inside the ground electrode via a gap, having a high-voltage power supply terminal on the inlet side of the source gas, and facing the ground electrode A high-voltage power supply between the ground electrode and the high-voltage electrode in the operation of an excessively applied voltage in an ozone generator tube that consists of a high-voltage electrode with a dielectric layer formed on the surface and generates ozonized gas by discharging raw material gas containing oxygen The creepage distance between the power supply terminal and the ground electrode at the high-voltage electrode end to prevent thermal breakdown due to the discharge of the dielectric formed on the surface of the high-voltage electrode due to the occurrence of creeping discharge or abnormal discharge occurring at the terminal Ozone generation characterized in that the insulation strength between the end face of the high voltage electrode and the ground electrode is improved by pressing the ozone resistant O-ring against the surface of the high voltage electrode with the insulation part having a longer length and the insulation part. .
(2) Cylindrical ground electrode with both ends open, concentric cylinder disposed inside the ground electrode via a gap, having a high voltage power supply terminal on the inlet side of the source gas, and facing the ground electrode An ozone generator tube comprising a high voltage electrode having a dielectric layer formed on the surface, and a housing containing the ozone generator tube, and having a structure in which a cooling mechanism is provided on at least one side of the electrode; In an ozone generator that generates ozonized gas by discharging raw material gas containing high voltage electrode terminals due to the occurrence of creeping discharge or abnormal discharge that occurs at the high voltage power supply terminal of the ground electrode and high voltage electrode during excessive applied voltage operation In order to prevent thermal breakdown due to the discharge of the dielectric formed on the surface of the part, there is an insulating part with a long creepage distance between the power supply terminal and the ground electrode at the end of the high voltage electrode and ozone on the surface of the high voltage electrode by the insulating part. Resistance By pressing the O-ring with, characterized in that the high-voltage electrode end portion surface has improved dielectric strength between the ground electrode, the ozone generating apparatus.
(3) The insulating part is provided with a hole for insertion of a metal rod or metal pipe constituting a conductive metal terminal or a conductive metal connection terminal substantially near the center, and the hole is formed on one end face where the hole is formed. An insulating housing having a ring-shaped groove for disposing an insulating ring as a center, and a recess for adjusting a creepage distance with the hole as a center at the other end face where the hole is formed ( 1) The ozone generating tube according to the above.
(4) The insulating part is provided with a hole for insertion of a metal rod or metal pipe constituting a conductive metal terminal or a conductive metal connection terminal substantially near the center, and the hole is formed on one end face where the hole is formed. An insulating housing having a ring-shaped groove for disposing an insulating ring as a center, and a recess for adjusting a creepage distance with the hole as a center at the other end face where the hole is formed ( 2) Ozone generator as described.

It is a cross-sectional schematic diagram of an example of the counter electrode used for the ozone generator tube of this invention. It is an expansion cross-sectional schematic of the edge part of an example of the cylindrical high voltage electrode of this invention. It is a cross-sectional schematic of an example different from the above of the counter electrode used for the ozone generator tube of this invention. It is a cross-sectional schematic of an example of the connecting terminal which connects the high voltage electrode of this invention. It is a cross-sectional schematic diagram of an example of the principal part of the ozone generator which installed many counter electrodes of the said FIG. It is the schematic which shows the flow of the cooling medium in the ozone generation pipe of this invention. It is a cross-sectional view of an example of the counter electrode used for the ozone generation tube of a prior art example. It is a cross-sectional view of the example different from the above of the counter electrode used for the ozone generation tube of a prior art example. FIG. 8 is a cross-sectional view of an ozone generating tube provided with a cylindrical high voltage electrode that is elongated using two cylindrical high voltage electrodes of FIG. 7.

Explanation of symbols

1. 1. Cylindrical ground electrode 2. Cylindrical high voltage electrode Dielectric 4. 5. discharge space 6. Source gas Ozonized gas8. Power supply terminal 9. Connecting rod 10. Insulating part 11. Connection terminal 11a. Flexible pipe 11b. Connection joint terminal 20. Cooling device 21. Cooling medium

Claims (8)

Cylindrical ground electrode with both ends open, concentric cylinder arranged inside the ground electrode via a gap, forming a dielectric layer on the surface facing the ground electrode, and conductive metal on the end surface In an ozone generator tube having an electrode structure composed of a high voltage electrode provided with a terminal and generating ozonized gas by discharge from a source gas containing oxygen, a conductive metal terminal and a ground are connected to an end surface of the high voltage electrode An insulating component having a creeping distance between the electrodes that is long to prevent thermal breakdown due to discharge of the dielectric, and an insulating ring is disposed between the end surface of the insulating component and the high-voltage electrode, An ozone generating tube characterized by pressing an insulating ring against the end face of the voltage electrode. The high voltage electrode is an elongated high voltage electrode in which a plurality of high voltage electrodes are connected by a conductive metal connection terminal, and the end surface of the plurality of high voltage electrodes is connected between the conductive metal connection terminal and the ground electrode. An insulating component having a creeping distance increased so as to prevent thermal breakdown due to discharge of the dielectric, and an insulating ring is disposed between the end surface of the insulating component and the high voltage electrode, and the insulating component causes the high voltage electrode end to 2. The ozone generating tube according to claim 1, wherein an insulating ring is pressed against the part surface. 3. The ozone generating tube according to claim 1, wherein the insulating part is an insulating part having a creeping distance between the conductive metal terminal and the ground electrode that is long so that abnormal discharge does not occur on the dielectric surface. 3. The ozone generating tube according to claim 1, wherein the conductive metal terminal provided at the end of the high voltage electrode disposed at the source gas inlet on the source gas inlet side is a high voltage power supply terminal. Cylindrical ground electrode with both ends open, concentric cylinder arranged inside the ground electrode via a gap, forming a dielectric layer on the surface facing the ground electrode, and conductive metal on the end surface In an ozone generator comprising an ozone generating tube having an electrode structure composed of a high voltage electrode provided with a terminal and a housing containing the ozone generating tube, and generating ozonized gas by discharging a source gas containing oxygen An insulating component having a creeping distance between a conductive metal terminal and a ground electrode on the end surface of the high voltage electrode so as to prevent thermal breakdown due to discharge of the dielectric, and the insulating component and the high voltage electrode. An ozone generator, wherein an insulating ring is disposed between end surfaces, and the insulating ring is pressed against an end surface of the high voltage electrode by the insulating component. The high voltage electrode is an elongated high voltage electrode in which a plurality of high voltage electrodes are connected by a conductive metal connection terminal, and the end surface of the plurality of high voltage electrodes is connected between the conductive metal connection terminal and the ground electrode. An insulating component having a creeping distance increased so as to prevent thermal breakdown due to discharge of the dielectric, and an insulating ring is disposed between the end surface of the insulating component and the high voltage electrode, and the insulating component causes the high voltage electrode end to The ozone generator according to claim 5, wherein an insulating ring is pressed against the surface. The ozone generator according to claim 5 or 6, wherein the insulating component is an insulating component having a creeping distance between the conductive metal terminal and the ground electrode that is long so as not to cause abnormal discharge on the dielectric surface. The ozone generator according to claim 5 or 6, wherein the conductive metal terminal provided at the end of the high voltage electrode arranged at the raw material gas inlet on the raw material gas inlet side is a high voltage power supply terminal.

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