JPS63242903A - Ozonizer - Google Patents

Ozonizer

Info

Publication number
JPS63242903A
JPS63242903A JP7880787A JP7880787A JPS63242903A JP S63242903 A JPS63242903 A JP S63242903A JP 7880787 A JP7880787 A JP 7880787A JP 7880787 A JP7880787 A JP 7880787A JP S63242903 A JPS63242903 A JP S63242903A
Authority
JP
Japan
Prior art keywords
electrodes
discharge
plate
ceramic
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7880787A
Other languages
Japanese (ja)
Other versions
JPH0415162B2 (en
Inventor
Hiroichi Shioda
博一 塩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ISHIMORI SEISAKUSHO KK
Sapporo Breweries Ltd
Ebara Research Co Ltd
Original Assignee
ISHIMORI SEISAKUSHO KK
Sapporo Breweries Ltd
Ebara Research Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ISHIMORI SEISAKUSHO KK, Sapporo Breweries Ltd, Ebara Research Co Ltd filed Critical ISHIMORI SEISAKUSHO KK
Priority to JP7880787A priority Critical patent/JPS63242903A/en
Publication of JPS63242903A publication Critical patent/JPS63242903A/en
Publication of JPH0415162B2 publication Critical patent/JPH0415162B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To enable long-term operation by efficient electric discharge in a device having electrodes set both sides of ceramic, by specifying material of the ceramic, thickness of discharges electrode and setting the opposite electrode through a film of a specific material. CONSTITUTION:Discharge electrodes 2, 2... made of oxidation-resistant metal having 0.01-1mm thickness are set on one side of a ceramic plate 1 made of Al2O3 having >=96% purity in such a way that the ends of the discharge electrodes are subjected to pressure welding to the plate 1 and intervals between the neighboring electrodes 2 are channels R for a raw material gas. The metallic opposite electrode 3 is subjected to pressure welding through an insulating metallic oxide film 3a to the other side of the plate 1. An output end of a voltage generating device 4 is connected to at least one of the electrodes 2, 2... and 3 and AC high voltage is impressed between both the electrodes. Consequently, since the plate 1 has about 10-50 dielectric constant, concentration of electric charge and flow of overcurrent are extremely suppressed and further point discharge at the film 3a are relieved. Since the electrodes 2 are thin and show elasticity as metal, the electrodes elastically fix the plate 1 and act as a cushioning material for vibration. Therefore deterioration of the plate 1 is not promoted.

Description

【発明の詳細な説明】 「産業上の利用分野1 本発明はオゾン発生装置に関するもので、さらに詳しく
は放電により原料空気または酸素をオゾン化するオゾン
発生装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION INDUSTRIAL APPLICATION FIELD 1 The present invention relates to an ozone generator, and more particularly to an ozone generator that ozonizes raw air or oxygen by electric discharge.

「従来の技術j 従来、この種のオゾン発生装置としては各種のものが提
案され、近時はセラミックスの優れた誘電性、耐熱性、
耐酸化性に着目して、セラミックスを中央にしてその両
側に電極を配設するものが主流となってきている。
``Conventional technology'' Various types of ozone generators have been proposed in the past, and recently ceramics have been developed with excellent dielectric properties, heat resistance,
Focusing on oxidation resistance, the mainstream is to use ceramics in the center and electrodes on both sides.

r発明が解決しようとする問題点1 しかし、この種セラミックススを説電体として使用した
オゾン発生装置は、セラミックススの誘電率からすると
該セラミックスの厚みが1mm程度で放電電極の先端を
セラミックス表面に接触して配することが可能で、電極
間隔を狭めることで小型化と高効率化が実現できるが、
このセラミックスは耐衝撃性に劣るとともに、振動によ
る疲労及び劣化現象を呈する性質を有している。
Problem to be Solved by the Invention 1 However, in an ozone generator using this kind of ceramic soot as an electrolyte, the thickness of the ceramic is about 1 mm, considering the dielectric constant of the ceramic soot, and the tip of the discharge electrode is placed on the ceramic surface. It is possible to place the electrodes in contact with each other, and by narrowing the electrode spacing, it is possible to achieve smaller size and higher efficiency.
This ceramic has poor impact resistance and has the property of exhibiting fatigue and deterioration phenomena due to vibration.

したがフて、このセラミックスを誘電体として両側に距
離を狭めて電極を対設すると、該セラミックスは局所的
に集中する尖頭放電により劣化が促進され実用的に長時
間のオゾン発生運転ができないという欠点を有していた
However, if this ceramic is used as a dielectric and electrodes are placed opposite each other at a narrow distance on both sides, the ceramic will deteriorate due to the locally concentrated peak discharge, making it impossible to practically operate the ceramic for long periods of time to generate ozone. It had the following drawback.

そこで、本発明は上記欠点を解決すべくなされたもので
、セラミックスの両面に圧接して電極を配設して効率的
な放電を行なうも、放電による衝撃・振動が緩和され長
時間の運転が可能なオゾン発生装置を提供することを目
的としたものであるr問題点を解決するための手段j 上記の目的に沿い、先述特許請求の範囲を要旨とする本
発明の構成は前述問題点を解決するために、純度96%
以上のアルミナによって構成されるセラミックス板1の
一面に、厚み0.01mm以上1mm以下の耐酸化金属
製の放電電極2.2.2・・・をその下端がセラミック
ス板1に圧接され、隣り合う放電電極2.2の間隙が原
料気体の流路Rとなるように立設し、上記セラミックス
板1の他面には絶縁性金属酸化膜3aを介して金属製の
相手電極3を圧接し、上記放電電極2.2.2・・・と
相手電極3との双方またはいずれか一方には交流高圧電
圧発生装置4の出力端を連結して該放電電極2.2.2
・・・と相手電極3との間に交流高圧電圧を印加するよ
うなしたことを特徴とする技術的手段を講じたものであ
る。
Therefore, the present invention has been made to solve the above-mentioned drawbacks.Although electrodes are placed in pressure contact with both sides of ceramics to perform efficient discharge, the shock and vibration caused by discharge are alleviated, and long-time operation is possible. Means for Solving the Problems In accordance with the above object, the structure of the present invention as summarized in the claims described above solves the problems described above. To solve the problem, 96% purity
On one surface of the ceramic plate 1 made of the above alumina, discharge electrodes 2.2.2 made of oxidation-resistant metal with a thickness of 0.01 mm or more and 1 mm or less are pressed at their lower ends to the ceramic plate 1, and the adjacent The discharge electrode 2.2 is erected so that the gap between the discharge electrodes 2 and 2 becomes a flow path R for the raw material gas, and a metal counterpart electrode 3 is pressed onto the other surface of the ceramic plate 1 via an insulating metal oxide film 3a. An output end of an AC high voltage generator 4 is connected to both or either one of the discharge electrodes 2.2.2... and the counterpart electrode 3.
. . . and the mating electrode 3, a technical measure is adopted characterized in that an AC high voltage is applied between the electrode 3 and the mating electrode 3.

r作用J それ故本発明オゾン発生装置は、セラミックス板1が純
度96%以上のアルミナであると、誘電率が10乃至5
0程度となるため、放電電極2゜2.2・・・の先端と
相手電極3とを該セラミックスの両面に接触せしめても
電荷の集中や過電流が流れることが顕著に抑制され、加
えて、絶縁性金属酸化膜3aは尖頭放電を緩和する。
r effect J Therefore, in the ozone generator of the present invention, when the ceramic plate 1 is made of alumina with a purity of 96% or more, the dielectric constant is 10 to 5.
0, so even if the tip of the discharge electrode 2゜2.2... and the mating electrode 3 are brought into contact with both sides of the ceramic, concentration of charge and overcurrent flow are significantly suppressed, and in addition, , the insulating metal oxide film 3a alleviates the peak discharge.

そこで、交流高圧電圧発生装置4により放電電極2,2
.2・・・と相手電極3との間に交流高圧電圧を印加す
ると、夫々の放電電極2の先端には第4図及び第5図に
示す山型の放電界Pが生じ、この放電界Pは印加電圧を
低電圧(第4図実施例で3 KV)より高電圧(第5図
実施例で9KV)とするとその高さが増して放電界Pの
領域を順次増加するものである。
Therefore, the AC high voltage generator 4 is used to generate the discharge electrodes 2 and 2.
.. 2... and the mating electrode 3, a mountain-shaped discharge field P shown in FIGS. 4 and 5 is generated at the tip of each discharge electrode 2, and this discharge field P When the applied voltage is increased from a low voltage (3 KV in the embodiment shown in FIG. 4) to a higher voltage (9 KV in the embodiment shown in FIG. 5), its height increases and the area of the discharge field P gradually increases.

また、放電電極2,2.2・・・は薄く金属としての弾
力を呈するため、その先端をセラミック板1に圧接する
と該セラミック板1を弾止し、このセラミック板1に生
ずる振動の緩衝体として作用するものである。
In addition, since the discharge electrodes 2, 2, 2, . It acts as a.

そして、この放電界Pが発生した放電電極2゜2により
形成された流路R内を原料気体が流れて原料気体の酸素
はオゾン化さるものである。
Then, the raw material gas flows through the flow path R formed by the discharge electrode 2.degree. 2 where this discharge field P is generated, and the oxygen in the raw material gas is converted into ozone.

r実施例」 次に、本発明の実施例を第1図乃至第5図に従って説明
すれば以下の通りである。
Embodiment 1 Next, an embodiment of the present invention will be described below with reference to FIGS. 1 to 5.

図中、1が純度96%以上のアルミナによって構成され
るセラミックス板である、このセラミックス板1は所望
の厚みを有するもので、本実施例では厚み1mmの薄板
状のものを使用しているが、話電率からするとこれより
も薄いことが望ましいのは熱論であるが、機械的強度の
面から0.01mm以上の厚みを有することが実用的で
ある。
In the figure, 1 is a ceramic plate made of alumina with a purity of 96% or more. This ceramic plate 1 has a desired thickness, and in this example, a thin plate with a thickness of 1 mm is used. Although it is theoretically desirable that the thickness be thinner than this in terms of telephone coverage, it is practical to have a thickness of 0.01 mm or more in terms of mechanical strength.

またこのセラミックス板1は、その形状を薄板形に変え
従来公知な円筒状となしてもよいものである。
Further, the shape of the ceramic plate 1 may be changed to a thin plate shape and may be made into a conventionally known cylindrical shape.

そして、上記セラミックス板1の一面には、厚み0.0
1mm以上1mm以下の耐酸化金属製の放電電極2,2
.2・・・をその下端がセラミックス板1に圧接され、
隣り合う放電電極2.2の間隙が原料気体の流路Rとな
るように立設しである。
One surface of the ceramic plate 1 has a thickness of 0.0
Discharge electrodes 2, 2 made of oxidation-resistant metal with a diameter of 1 mm or more and 1 mm or less
.. 2... is pressed at its lower end to the ceramic plate 1,
The discharge electrodes 2.2 are erected so that the gap between adjacent discharge electrodes 2.2 forms a flow path R for the raw material gas.

上記放電電極2,2.2・・・はチタン等の耐酸化金属
を使用し、基板部2aより一体的に突設するか、図示は
していないが該基板部2aに基端部を埋設してしてあり
、また同様に図示はしていないが該放電電極2,2.2
・・・の先端は、この基板部2aをセラミックス板1ま
たは後述する相手電極3に絶縁して螺締する等の手段で
締着する際に該セラミックス板1の一面に圧接(第1図
において、符号5は密閉容器壁で、この密閉容器壁5は
放電電極2より多少短く形成するか、多少の伸縮性を有
するものを使用している。)されるようになっている、
なお、セラミックス板1を円筒状となしたと鰺は、基板
部2aはセラミックス円筒体より大径でその内面に放射
状に放電電極2.2,2・・・を突設し、この放電電極
2.2゜2・・・の先端部の内径がセラミックス円筒体
の外径よりは、わずかに小径となるようになすとよい。
The discharge electrodes 2, 2.2, etc. are made of oxidation-resistant metal such as titanium, and are either integrally protruded from the substrate portion 2a, or have their base ends buried in the substrate portion 2a (not shown). Similarly, although not shown, the discharge electrodes 2, 2.2
The tips of the... are pressed into contact with one surface of the ceramic plate 1 (as shown in Fig. , reference numeral 5 denotes a closed container wall, and this closed container wall 5 is formed to be somewhat shorter than the discharge electrode 2, or is made of a material having some elasticity.)
In addition, when the ceramic plate 1 is made into a cylindrical shape, the substrate part 2a has a larger diameter than the ceramic cylinder and has discharge electrodes 2.2, 2, . . . protruding radially from its inner surface. It is preferable that the inner diameter of the tip of the ceramic cylinder is slightly smaller than the outer diameter of the ceramic cylinder.

また、上記流路Rは、隣り合う放電型gi2. 2と、
基板部2aと、セラミックス板1とで囲まれ第2図左側
より原料気体が流入し、同第2図右側よりオゾン化され
て流出するものである。なお、第3図例は上記放電電極
2を並行板状にするのにかえてスパイラル状となしたも
のであり、基板部2aの中央に原料気体の流入口2bを
密閉容器壁5に流出口5aを設けてなり、流入口2bよ
り流入した原料気体は、基板部2aとセラミックス板1
との間を放M!、74m 2でスパイラル状に仕切られ
た流路Rを通ってオゾン化されて流出口5aより流出す
るようになしである。
Further, the flow path R is connected to the adjacent discharge type gi2. 2 and
Surrounded by the substrate portion 2a and the ceramic plate 1, raw material gas flows in from the left side in FIG. 2, and flows out after being ozonized from the right side in FIG. In the example shown in FIG. 3, the discharge electrode 2 is formed into a spiral shape instead of a parallel plate shape, and an inlet 2b for raw material gas is formed in the center of the substrate portion 2a, and an outlet is formed in the wall 5 of the sealed container. 5a, and the raw material gas flowing in from the inlet 2b flows between the substrate portion 2a and the ceramic plate 1.
Release masturbation between you and me! , 74 m 2 and passes through a spirally partitioned channel R, where it is ozonized and flows out from the outlet 5a.

そして、上記セラミックス板1の他面には絶縁性金属酸
化膜3aを介して金属製の相手電8i3を圧接しである
。図示例ではこの相手電極3を一面(セラミックス板1
との接触面)を数ミクロン〜1mmの厚みでアルミナ化
した絶縁性金属酸化膜3aとした平面とし、他面は放熱
用の凹凸面(実施例ではこの凹凸面は微小であるた図示
していないが、放熱翼を連設する等なしてもよいことは
熱論である)となしたアルミニューム製となしである。
A metal counterpart electrode 8i3 is pressure-welded to the other surface of the ceramic plate 1 via an insulating metal oxide film 3a. In the illustrated example, this mating electrode 3 is placed on one side (ceramic plate 1
The contact surface with the metal oxide film 3a is a flat surface made of aluminized insulating metal oxide film 3a with a thickness of several microns to 1 mm, and the other surface is an uneven surface for heat dissipation (in the example, this uneven surface is minute, so it is not shown in the figure). (Although there is no such thing, it is a matter of heat theory that it may be possible to install heat dissipation blades in a row, etc.).

そして、上記放電電極2.2.2・・・と相手電極3と
の双方またはいずれか一方には交流高圧電圧発生装置4
の出力端を連結して該放電電極2.2,2・・・と相手
電極3との間に交流高圧電圧を印加するようなしである
のは従来と同じである。
An AC high-voltage generator 4 is connected to both or one of the discharge electrodes 2, 2, 2, and the other electrode 3.
It is the same as the conventional method that the output ends of the discharge electrodes 2, 2, 2, . . .

なお、図中、6は水冷容器で一端に注水口6a、他端に
排水口6bを有し、相手電極3の裏面に流水が接触する
ようになしである。
In the figure, 6 is a water-cooled container having a water inlet 6a at one end and a drain port 6b at the other end so that running water comes into contact with the back surface of the mating electrode 3.

r発明の効果1 本発明は上記のごときで、放電電極2,2.2・・・を
セラミックス板1の一面に接触せしめてあるため、該放
電電極2,2.2・・・とセラミックス板1との接触部
近くには強い放電界Pが生じ、流路Rを通過する原料気
体を効率的にオゾン化するオゾン発生装置を提供するこ
とができるものである。ちなみに、4KVで10KHz
の電圧を印加して、酸素を5J2/分で供送したところ
500ppmのオゾン濃度が得られ、同条件で電圧のみ
を7KVとしたところオゾン濃度は3000ppmであ
った。
Effect 1 of the invention In the present invention as described above, since the discharge electrodes 2, 2.2... are brought into contact with one surface of the ceramic plate 1, the discharge electrodes 2, 2.2... and the ceramic plate A strong discharge field P is generated near the contact portion with 1, making it possible to provide an ozone generator that efficiently ozoneizes the raw material gas passing through the flow path R. By the way, 4KV is 10KHz.
When a voltage of 100 kW was applied and oxygen was supplied at a rate of 5 J2/min, an ozone concentration of 500 ppm was obtained, and when only the voltage was set to 7 KV under the same conditions, the ozone concentration was 3000 ppm.

そして、上記の放電電極2,2.2・・・とセラミック
ス板1との接触部近くに発生する放電界Pは尖頭放電と
して、セラミックス板1に衝撃を与えることになるが、
電気的には絶縁性金属酸化膜3aが尖頭放電を緩和し、
物理的には薄い放電電極2,2.2・・・の押圧による
弾止力で尖頭放電の衝撃を緩和し、この電気的な緩和効
果と物理的な緩和効果とが相乗的に発揮されてセラミッ
クス板1の疲労を防止して長期間の効率的オゾン発生運
転が可能なオゾン発生装置を提供することができるもの
である。
The discharge field P generated near the contact portion between the discharge electrodes 2, 2.2, etc. and the ceramic plate 1 impacts the ceramic plate 1 as a peak discharge.
Electrically, the insulating metal oxide film 3a alleviates peak discharge,
Physically, the impact of the peak discharge is alleviated by the elastic force generated by the pressure of the thin discharge electrodes 2, 2, 2, etc., and the electrical and physical relaxation effects are synergistically exerted. Thus, it is possible to provide an ozone generator that can prevent fatigue of the ceramic plate 1 and can operate efficiently for long-term ozone generation.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明オゾン発生装置の一実施例を示す縦断面
図、第2図は同斜視図、第3は別の実施例平面図、第4
図及び第5図は放電部位の部分断面図である。
FIG. 1 is a longitudinal sectional view showing one embodiment of the ozone generator of the present invention, FIG. 2 is a perspective view of the same, third is a plan view of another embodiment, and FIG.
5 and 5 are partial cross-sectional views of the discharge site.

Claims (1)

【特許請求の範囲】 純度96%以上のアルミナによって構成されるセラミッ
クス板1の一面に、厚み0.01mm以上1mm以下の
耐酸化金属製の放電電極2、2、2・・・をその下端が
セラミックス板1に圧接され、隣り合う放電電極2、2
の間隙が原料気体の流路Rとなるように立設し、 上記セラミックス板1の他面には絶縁性金属酸化膜3a
を介して金属製の相手電極3を圧接し、上記放電電極2
、2、2・・・と相手電極3との双方またはいずれか一
方には交流高圧電圧発生装置4の出力端を連結して該放
電電極2、2、2・・・と相手電極3との間に交流高圧
電圧を印加するようなしたことを特徴とするオゾン発生
装置。
[Claims] On one side of a ceramic plate 1 made of alumina with a purity of 96% or more, discharge electrodes 2, 2, 2, etc. made of oxidation-resistant metal with a thickness of 0.01 mm or more and 1 mm or less are arranged so that their lower ends are Adjacent discharge electrodes 2, 2 are pressure-welded to the ceramic plate 1.
The ceramic plate 1 is provided with an insulating metal oxide film 3a on the other surface.
A metal counterpart electrode 3 is pressed into contact with the discharge electrode 2 through the
, 2, 2, . An ozone generator characterized by applying an alternating current high voltage between.
JP7880787A 1987-03-31 1987-03-31 Ozonizer Granted JPS63242903A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7880787A JPS63242903A (en) 1987-03-31 1987-03-31 Ozonizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7880787A JPS63242903A (en) 1987-03-31 1987-03-31 Ozonizer

Publications (2)

Publication Number Publication Date
JPS63242903A true JPS63242903A (en) 1988-10-07
JPH0415162B2 JPH0415162B2 (en) 1992-03-17

Family

ID=13672117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7880787A Granted JPS63242903A (en) 1987-03-31 1987-03-31 Ozonizer

Country Status (1)

Country Link
JP (1) JPS63242903A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5549874A (en) * 1992-04-23 1996-08-27 Ebara Corporation Discharge reactor
KR100454331B1 (en) * 2001-07-27 2004-10-26 황현배 Ozone and anion apparatus
DE102004008431A1 (en) * 2004-02-19 2005-09-08 Uwa Umwelttechnik-Wasser-Abwasser Gmbh & Co. Kg Sandwich-type ozone generator has grooves on an electrode running the length of the discharge chamber and supporting an insulation plate on the corresponding projections
CN105692562A (en) * 2016-04-26 2016-06-22 北京天择昌宁环境技术股份有限公司 Dielectric barrier discharge plate, basic unit components of plate type ozonator and ozonator module
RU2660870C2 (en) * 2016-05-18 2018-07-10 Федеральное государственное бюджетное образовательное учреждение высшего образования "Чувашский государственный университет имени И.Н. Ульянова" Ozonator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5549874A (en) * 1992-04-23 1996-08-27 Ebara Corporation Discharge reactor
KR100454331B1 (en) * 2001-07-27 2004-10-26 황현배 Ozone and anion apparatus
DE102004008431A1 (en) * 2004-02-19 2005-09-08 Uwa Umwelttechnik-Wasser-Abwasser Gmbh & Co. Kg Sandwich-type ozone generator has grooves on an electrode running the length of the discharge chamber and supporting an insulation plate on the corresponding projections
CN105692562A (en) * 2016-04-26 2016-06-22 北京天择昌宁环境技术股份有限公司 Dielectric barrier discharge plate, basic unit components of plate type ozonator and ozonator module
RU2660870C2 (en) * 2016-05-18 2018-07-10 Федеральное государственное бюджетное образовательное учреждение высшего образования "Чувашский государственный университет имени И.Н. Ульянова" Ozonator

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