JP5395142B2 - Ozone generator - Google Patents

Description

  The present invention relates to an ozone generator that generates ozone using silent discharge.

  Conventionally, many ozone generators used for water treatment use silent discharge. The basic structure of an ozone generator using silent discharge is that a cylindrical dielectric tube having a metal film formed on its inner surface is placed inside the cylindrical metal tube, and a predetermined gap is formed between the inner wall of the metal tube and the outer wall of the dielectric tube. It is the structure inserted so that it may have a dimension. A source gas containing oxygen (air, oxygen gas, or the like) is flowed through the gap, and a high-voltage AC voltage is applied between the metal tube and the metal film on the inner surface of the dielectric tube, via the dielectric of the dielectric tube. The source gas is discharged by generating an alternating electric field in the gap, and ozone is generated by ozonizing oxygen in the source gas. In the ozone generator having such a structure, in order to prevent creeping discharge near the end of the dielectric tube and direct discharge between metals, an contrivance has been made such as providing an insulator near the end of the dielectric tube. . (For example, Patent Documents 1, 2, and 3)

  On the other hand, especially in an ozone generator used for a large amount of water treatment, in recent years, with an increase in the processing amount, it is required to increase the processing amount without increasing the size of the device. In order to satisfy such requirements, it is necessary to increase the amount of ozone generated per unit size, and for this purpose, it is necessary to increase the discharge power density. However, as the discharge power density increases, the thermal problem also increases.

JP-A-63-25203 Japanese Patent Laid-Open No. 7-81904 JP 10-338503 A

  The thermal problem is often caused by various causes such as non-uniformity of cooling and non-uniformity of input power, that is, non-uniformity of discharge. There were many problems that were not.

  As a result of detailed examinations by the inventors, a thermal problem caused by nonuniform cooling of the dielectric tube facing the vicinity of the end of the metal tube has been clarified.

  The present invention has been made in order to solve the problem of non-uniformity of cooling near the end of a metal tube, which has been clarified for the first time by the inventors. Conventionally, the temperature of the dielectric tube opposed to the vicinity of the end portion of the metal tube is higher than that of other portions, and the upper limit of the discharge power density is determined by the temperature of this portion. On the other hand, in the present invention, an ozone generator that can make the temperature distribution of the dielectric tube more uniform than the conventional one, increase the discharge power density as a whole, and thereby realize downsizing or large capacity of the device. The purpose is to provide.

An ozone generator according to the present invention includes an airtight sealed container, and two tube plates which are conductive metal plates having holes and which partition the interior of the airtight sealed container into three spaces and are provided at predetermined intervals. The metal tube provided so as to connect the holes of the two tube plates and the spacer are held inside the metal tube so that the outer wall and the inner wall of the metal tube have a predetermined gap. A dielectric tube provided, and an AC high-voltage power supply for applying an AC high voltage between the metal tube and the metal electrode, and at least the gap from one of the three spaces. A source gas containing oxygen is allowed to flow through the other space at both ends, and the metal electrode inside the dielectric tube is set to a high potential, and the metal tube and the tube plate are set to the ground potential to discharge the source gas flowing through the gap. To generate ozone and Thickness that covers the outer peripheral surface of the dielectric tube at the portion facing the tube plate in an ozone generator configured to cool by flowing cooling water into the space partitioned by the plate, the outer wall of the metal tube, and the inner wall of the sealed container A discharge suppression member, which is a thin metal material, is provided, and the discharge suppression member is in electrical contact with a metal tube or tube plate.

  According to the present invention, since the discharge suppressing member, which is a thin metal material that covers the outer peripheral surface of the portion of the dielectric tube facing the tube plate, is provided, the discharge power in the gap of the portion facing the tube plate portion is reduced. Decrease. Therefore, the temperature rise of the dielectric tube at the portion facing the tube plate can be made smaller than before, and the temperature distribution of the dielectric tube can be made more uniform than before. As a result, it is possible to provide an ozone generator that can increase the discharge power density as a whole, and that can realize downsizing of the apparatus or increase in capacity.

It is side surface sectional drawing which shows schematic structure of the ozone generator by Embodiment 1 of this invention. It is an expanded sectional view which shows the principal part of the ozone generator by Embodiment 1 of this invention. It is an expanded sectional view of the AA position of FIG. 2 which shows the principal part of the ozone generator by Embodiment 1 of this invention. It is an expanded sectional view which shows the principal part of the ozone generator by Embodiment 2 of this invention. It is an expanded sectional view of the AA position of FIG. 4 which shows the principal part of the ozone generator by Embodiment 2 of this invention. It is a figure which shows the discharge suppression member by Embodiment 3 of this invention. It is a figure which shows schematic structure of the dielectric tube of the state which affixed the discharge suppression member by Embodiment 3 of this invention. It is an expanded sectional view which shows the principal part of the ozone generator by Embodiment 3 of this invention. It is an expanded sectional view which shows the principal part of the ozone generator by Embodiment 4 of this invention. It is an expanded sectional view of the AA position of FIG. 9 which shows the principal part of the ozone generator by Embodiment 4 of this invention. It is side surface sectional drawing which shows schematic structure of the ozone generator by Embodiment 5 of this invention.

Embodiment 1 FIG.
Embodiment 1 of the present invention will be described below with reference to FIGS. FIG. 1 is a side sectional view showing a schematic configuration of an ozone generator according to Embodiment 1 of the present invention, FIG. 2 is an enlarged sectional view showing a main part of the present invention, and FIG. FIG. 3B is a schematic view of a state where a discharge suppressing member, which will be described later, is attached to the dielectric tube, as viewed from above in FIG. FIG. 2 shows the vicinity of the tube plate 11 and only one side with respect to the central axis of the metal tube 4 or the dielectric tube 5.

In FIG. 1, 1 is a cylindrical airtight sealed container, 2 is a source gas inlet, 3 is an ozonized gas outlet, 11 is a first tube plate that partitions a space 100 on the source gas inlet side of the sealed container, and 12 is a sealed container. 1 is a second tube plate that partitions the space 200 on the ozonized gas outlet side, and 4 is a tube between the hole formed in the first tube plate 11 and the hole formed in the second tube plate 12. A metal tube fixedly connected to the plates 11 and 12 so as to be airtight, and serves as a ground electrode. The metal tube 4 is usually cylindrical, but the cross-sectional shape is not necessarily a circle. The two tube plates 11 and 12 are conductive metal plates and have the same potential as the metal tube 4. Reference numeral 13 denotes a space defined by the first tube plate 11, the second tube plate 12, the outer wall of the metal tube 4 and the inner wall of the sealed container 1, and the space 13 is filled with cooling water and the cooling water flows. 5 is a dielectric tube provided coaxially with the metal tube 4, 6 is a metal film provided on the inner wall of the dielectric tube 5, 7 is a power supply element for supplying power to the metal film 6, 8 is a discharge suppressing member, 9 is a high voltage insulator and 10 is an AC high voltage power source. Since the metal film 6 operates as a metal electrode and is discharged through the dielectric of the dielectric tube 5, the dielectric tube 5 and the metal film 6 may be collectively referred to as a high voltage electrode tube 50 hereinafter.
1 shows only one pair of the metal tube 4 and the high-voltage electrode tube 50 in the hermetic sealed container 1, but in a large-capacity ozone generator, the metal tube 4 and A large number of pairs of high voltage electrode tubes are provided.

  Next, the operation will be described. The source gas is a gas containing oxygen that is a source of ozone, such as oxygen or air, and the source gas is supplied from the source gas inlet 2 of the hermetic sealed container 1. The dielectric tube 5 is formed in a cylindrical shape in which the end on the side to which the source gas is supplied is opened and the other end is closed. Usually, the power supply to the metal electrode, that is, the metal film 6 is performed by electrically contacting the metal film 6 by the power supply element 7 through the insulator such as the high-pressure insulator 9 from the space 100 side on the source gas inlet side as shown in FIG. Done. In addition, since one of the dielectric tubes 5 is closed, the source gas passes through the gap between the dielectric tube 5 and the metal tube 4. The raw material gas is ozonized by silent discharge while passing through the gap, and is supplied from an ozonized gas outlet 3 to an ozone treatment device (not shown). Examples of the dielectric forming the dielectric tube 5 include materials having a high relative dielectric constant, such as glass, ceramics, quartz, and enamel, as is well known in the art. A predetermined gap 20 is formed between the outer wall of the dielectric tube 5 and the inner wall of the metal tube 4, and this gap 20 is kept in a narrow dimension of 0.3 mm or less by an appropriate spacer, for example. .

  The dielectric tube 5 protrudes from the source gas inlet side tube plate 11 into the source gas inlet side space 100, and a metal film 6 is also formed on the inner wall of this portion. The protruding dimension is such that the space between the metal film 6 provided on the inner wall of the dielectric tube 5 at a high voltage potential and the tube plate 11 at the ground potential passes through the outer surface of the dielectric tube 5. Therefore, the distance is such that creeping discharge does not occur. Further, since the feeding element 7 is provided outside the position of the tube plate 11, that is, in the position of the raw material gas inlet side space, the metal film 6 is also formed on the inner wall portion of the dielectric tube 5 facing the tube plate 11. It is configured. For this reason, the source gas passing through the gap facing the tube plate 11 is also discharged. On the other hand, in the first embodiment, the metal film 6 is not formed on the inner wall portion of the dielectric tube 5 facing the second tube plate 12, that is, the tube plate 12 provided on the ozonized gas outlet side. In this gap, no discharge occurs.

  In the first embodiment, the discharge suppression member 8 is provided in the gap portion facing the first tube plate 11 (hereinafter also simply referred to as the tube plate 11) that partitions the space where the source gas inlet 2 is provided. . 2 and 3 are detailed cross-sectional views of a portion where the discharge suppressing member 8 is provided. As shown in FIG. 3, a thin rectangular plate-like member formed of glass fiber or the like having a thickness of substantially the gap dimension d (see FIG. 2) is placed along the surface of the dielectric tube 5 with an adhesive. Affixed. As shown in FIG. 3A, two discharge suppression members 8 are provided at symmetrical positions around the dielectric tube 5, and a portion where the discharge suppression member 8 is not affixed serves as a gap 201 as a source gas. Is flowing. In the example shown in FIG. 3A, the volume of the discharge suppression member 8 is set to approximately 50% with respect to the volume of the gap facing the tube plate 11 when the discharge suppression member 8 is not provided. By providing the discharge suppression member 8, the volume of the gap is reduced by the amount occupied by the discharge suppression member 8, and the volume that can be discharged is reduced. Therefore, the unit length (dielectric tube of the dielectric tube) in the portion where the discharge suppression member 8 is provided The discharge power per unit (in the axial direction) decreases compared to the case where the discharge suppression member 8 is not provided.

  In FIG. 2, the diameters of the holes in the tube plates 11 and 12 are equal to the inner diameter of the metal tube 4, and the tube plates 11 and 12 and the metal tube 4 are connected to each other. The outer diameter of the metal tube 4 and the outer diameter of the metal tube 4 may be made equal and the metal tube 4 may be inserted into the holes of the tube plates 11 and 12 for connection. Alternatively, the hole may be a counterbore and the metal tube 4 may be partially inserted and connected to the tube plates 11 and 12, and any method may be used as long as the metal plate and the metal tube are connected. However, the connection needs to be electrically connected.

  In the present invention, “facing the tube sheet” refers to a portion included in a range in which the width (thickness) of the tube sheet 11 is extended. For example, the discharge suppression member 8 in FIG. 2 is provided so as to fill a gap portion “opposing the tube sheet”.

  For cooling the dielectric tube 5, the metal tube 4 is cooled by the cooling water flowing on the outer wall of the metal tube 4, and the gas flowing through the gap 20 is cooled by the metal tube 4, and the dielectric tube 5 is cooled via the gas. Cooling takes place. The portion of the dielectric tube 5 facing the tube plate 11 is cooled from the tube plate 11 in contact with the cooling water through the gap facing the tube plate 11, and thus the portion cooled from the metal tube 4 through the gap. The cooling capacity is low because it is farther from the cooling water. For this reason, the temperature of the portion of the dielectric tube 5 facing the tube plate 11 is more likely to rise than the other portion of the dielectric tube 5. In the first embodiment, the gap 20 in the portion facing the tube plate 11 has a dischargeable volume smaller than the other portions due to the presence of the discharge suppressing member 8, and the discharge power per unit length is reduced. For this reason, even if the cooling capacity is low, the temperature rise of the dielectric tube 5 can be suppressed, and the temperature rise can be the same as or less than that of the other portions. In the case where there is no discharge suppressing member 8, the temperature rise of the portion of the dielectric tube 5 facing the tube plate 11 is larger than that of the other portions, so the temperature of this portion is the allowable upper limit temperature of the dielectric tube 5. Only the following discharge power could be applied. On the other hand, when the discharge suppression member 8 of the present embodiment is provided, the temperature of the portion facing the tube plate 11 is the same as or lower than the other portions, and therefore the upper limit of the discharge power may be limited by the temperature of this portion. Absent. Therefore, when the high-pressure electrode tube 50 and the metal tube 4 having the same dimensions as the conventional one are used, more electric power can be input compared to the conventional one. It can be an ozone generator. Moreover, it can be set as the ozone generator which is smaller and has the same ozone generation amount as the conventional one.

  Here, the amount of insertion of the discharge suppressing member 8 will be examined. The purpose of providing the discharge suppression member 8 is to suppress a temperature rise in a portion of the dielectric tube 5 facing the tube plate 11, and therefore, it is necessary to reduce the discharge power in this portion. In the state where there is no discharge suppression member 8, a discharge occurs over the entire gap facing the tube plate 11, and power is supplied. On the other hand, when the discharge suppression member 8 is inserted, no discharge occurs because there is no gas in the portion where the discharge suppression member 8 exists. Therefore, the larger the proportion of the volume occupied by the discharge suppression member 8 with respect to the volume of the gap facing the tube plate 11, the greater the reduction rate of the discharge power. From this point of view, the proportion of the volume occupied by the discharge suppression member 8 should be large, and the volume of the discharge suppression member 8 in the portion facing the tube plate 11 is the volume of the gap facing the tube plate 11 without the discharge suppression member. 20% or more is desirable. That is, by providing the discharge suppression member 8, it is desirable to reduce the volume of the gap in the portion facing the tube plate by 20% or more than the volume of the gap in the portion facing the tube plate without the discharge suppression member. . However, the gas needs to flow through this gap. From this point of view, the discharge suppressing member 8 should have as little pressure loss as possible with respect to the gas flow. The ratio of the cross-sectional area occupied by 8 may be 80% or less. As described above, the volume of the portion of the discharge suppressing member facing the tube plate is set to 20% or more of the volume of the gap facing the tube plate in the absence of the discharge suppressing member, and is perpendicular to the axis of the dielectric tube 5. In the cross section, if the ratio of the cross sectional area occupied by the discharge suppressing member 8 to the cross sectional area of the gap facing the tube plate 11 is 80% or less, there is an effect of reducing the discharge power, and the gas flow is reduced. The influence can be reduced.

  In FIG. 3A, the discharge suppressing member 8 is divided into two pieces in the circumferential direction and arranged symmetrically. However, the number of divisions is not limited to this, and may be three, four, or more. A larger number has the effect of making the discharge power uniform in the circumferential direction, but a smaller number of divisions makes assembly easier. The dimension of the dielectric tube 5 in the axial direction of the discharge suppression member 8 has been described as being the same as the thickness of the tube plate 11, but is not limited to this, and is larger than the thickness of the tube plate, that is, the tube You may protrude from the part facing the board 11. FIG. On the contrary, the dimension may be smaller than the thickness of the tube sheet 11. In any case, the volume of the discharge suppressing member in the portion facing the tube plate may be 20% or more of the volume of the gap facing the tube plate in the state where there is no discharge suppressing member.

  The discharge suppressing member 8 is not limited to the above-described glass fiber, but is made of, for example, a fluororesin such as Teflon (registered trademark), a material rich in insulation and oxidation resistance, such as polyester, acetate, etc. Use something rich. The discharge suppressing member 8 is preferably made of a material that can be slightly deformed. If the material is deformable, when the high voltage electrode tube 50 is inserted into the metal tube 4, an error occurs between the outer diameter of the high voltage electrode tube 50 and the inner diameter of the metal tube 4, and even when the gap d is small. Since the discharge suppressing member 8 is compressed, the high-voltage electrode tube 50 can be inserted smoothly.

Embodiment 2. FIG.
4 and 5 are diagrams showing the configuration of the second embodiment of the present invention. 4 is an enlarged cross-sectional view showing a main part according to the second embodiment, and FIG. 5 is a cross-sectional view taken along the line AA in FIG. 4 shows only one side of the central axis of the metal tube 4 or the dielectric tube 5 near the tube plate 11 as in FIG.

  In the first embodiment, the discharge suppression members 8 having the same thickness as the gap dimension d are dispersed in the circumferential direction. In the second embodiment, as shown in FIG. The discharge suppression member 8 having a thickness smaller than the gap dimension d was provided over the entire circumference.

  The material of the discharge suppression member 8 used in the second embodiment is not limited to the insulating material such as the glass fiber, Teflon (registered trademark), polyester, acetate, etc. shown in the first embodiment. A metal material excellent in oxidation resistance subjected to Zn plating may be used.

  In the second embodiment, the discharge suppression member 8 covers almost 100% of the gap portion facing the tube plate 11 in the circumferential direction of the dielectric tube 5, and the gap 202 having a reduced size is formed. Yes. In the portion where the gap is narrowed, the discharge power per unit length in the axial direction is reduced compared to the discharge power per unit length of the portion where the discharge suppressing member 8 is not provided, that is, the gap size remains d. For this reason, the temperature rise of the dielectric tube 5 in the portion where the discharge suppressing member 8 exists, that is, the portion facing the tube plate is suppressed.

  Also in the second embodiment, as in the first embodiment, the larger the ratio of the volume occupied by the discharge suppression member 8 to the volume of the gap facing the tube plate 11 without the discharge suppression member 8, that is, the discharge. As the thickness of the suppression member 8 is thicker, the reduction rate of the discharge power is larger. From this point of view, it is better that the proportion of the volume occupied by the discharge suppression member 8 is larger. From this point of view, it is desirable that the volume of the discharge suppressing member 8 at the portion facing the tube plate 11 is 20% or more with respect to the volume of the gap facing the tube plate 11 without the discharge suppressing member. That is, by providing the discharge suppressing member 8, it is desirable to reduce the volume of the gap facing the tube plate of the gap by 20% or more than the volume of the gap facing the tube plate when there is no discharge suppressing member. However, the gas needs to flow through this gap. From this point of view, the discharge suppressing member 8 should have as little pressure loss as possible with respect to the gas flow. From this viewpoint, the ratio of the cross-sectional area occupied by the discharge suppressing member 8 to the cross-sectional area of the gap facing the tube plate 11 may be 80% or less. In this way, the volume of the discharge suppression member 8 at the portion facing the tube plate 11 is set to 20% or more with respect to the volume of the gap facing the tube plate 11 without the discharge suppression member. If the ratio of the cross-sectional area occupied by the discharge suppression member 8 to the cross-sectional area of the opposing gap is 80% or less, there is an effect of reducing the discharge power and the influence on the gas flow can be reduced.

  Also in the second embodiment, as in the first embodiment, the dimension in the axial direction of the dielectric tube 5, that is, the width of the discharge suppressing member 8 is larger than the thickness of the tube plate and faces the tube plate 11. It may be protruded from the portion, or on the contrary, the dimension may be smaller than the thickness of the tube sheet 11. In any case, as long as the volume of the discharge suppressing member 8 in the portion facing the tube plate 11 is 20% or more with respect to the volume of the gap facing the tube plate 11 without the discharge suppressing member. good.

  Further, a configuration in which the first embodiment and the second embodiment are combined, that is, a configuration in which the discharge suppressing members 8 whose thickness is smaller than the dimension d of the gap is distributed around the dielectric tube 5 may be employed. Even in this case, the volume of the discharge suppressing member 8 at the portion facing the tube plate 11 is set to 20% or more with respect to the volume of the gap facing the tube plate 11 without the discharge suppressing member. If the ratio of the cross-sectional area occupied by the discharge suppression member 8 to the cross-sectional area of the gap facing the tube plate 11 in the cross section perpendicular to the axis of the tube 5 is 80% or less, the effect of reducing the discharge power is achieved. Needless to say, the influence on the gas flow can be reduced.

Embodiment 3
6 to 8 are diagrams showing the configuration of the third embodiment of the present invention. FIG. 6 is a view showing a discharge suppressing member 80 according to the third embodiment. 7 is a schematic side view showing a state in which the discharge suppressing member 80 is attached to the high-voltage electrode tube 50, and FIG. 8 shows the vicinity of the tube plate 11 when the discharge suppressing member of FIG. 6 is provided. FIG. FIG. 8 shows only one side of the central axis of the metal tube 4 or the dielectric tube 5 in the vicinity of the tube plate 11 as in FIGS. 2 and 4.

  In the first embodiment, the discharge suppressing member 8 is a rectangular member made of an insulating material. In the third embodiment, the discharge suppressing member 80 is made of a conductive material such as a metal as shown in FIG. It is comprised from the rectangular-shaped adhesion part 81 and the contact part 82 which consist of these materials. The adhesive portion 81 has a width of about 2 mm to 10 mm and a thickness of about 0.02 mm to 0.05 mm, and the length is equal to the circumferential length of the high voltage electrode tube 50. The contact portion 82 has a thickness of 0.02 mm to 0.05 mm, a width of 0.5 mm to 3 mm, and a length of about 8 mm to 15 mm. FIG. 6B is a cross-sectional view taken along the line AA in FIG. As shown in (c), it is bent twice from once to adjust the length from about 3 mm to 7 mm. By bending the contact portion 82, the thickness is adjusted from about 0.04 mm to about 0.20 mm. (When d = 0.20mm in FIG. 8)

  In the third embodiment, the discharge suppressing member 80 is made of a metal material and is brought into contact with the tube plate 11 or the metal tube 4 so that the discharge suppressing member 80 is at ground potential. In order to bring the discharge suppressing member 80 into contact with the metal portion, the contact portion 82 is bent, and the thickness of the contact portion 82 can be adjusted from about 0.04 mm to about 0.20 mm. Even if the difference between the outer diameter of the dielectric tube 5 and the inner diameter of the hole in the metal tube 4 or the tube plate 11 changes by about 0.10 mm, the contact portion 82 is brought into contact with the inner diameter portion of the hole in the metal tube 4 or the tube plate 11. be able to. In this way, since the entire metal discharge suppression member 80 is at the ground potential, no electric field is generated in the portion facing the tube plate 11 in the gap where the discharge suppression member 80 exists, and therefore no discharge occurs in this portion. .

Note that a material having springiness and strong oxidation resistance is desired for the discharge suppressing member 80 of the third embodiment. For example, a metal such as SUS, or a metal such as SUS plated with Ni or Zn is used, and an adhesive having a high adhesive strength is used.

  FIG. 7 is a side view of the high-voltage electrode tube 50 to which the discharge suppressing member 80 is attached as viewed from one direction. The discharge suppressing member 80 is provided over the entire circumference. As described above, in Embodiment 3, the adhesive portion 81 is attached in the entire circumferential direction. As described above, the thickness of the adhesive portion 81 is about 0.02 mm to 0.05 mm, and the source gas is in contact with the contact portion. The pressure loss caused by the discharge suppressing member 80 with respect to the flow of the raw material gas is so small as to hardly affect the flow.

  The configuration of the discharge suppressing member shown in the third embodiment can also be used as a spacer for maintaining a gap between the high-voltage electrode tube 50 and the metal tube 4, and the high-voltage electrode tube other than the position facing the tube plate 11 is used. Several places may be arranged between 50 and the metal tube 4 to be used as spacers.

  As described above, in the third embodiment, since the metal discharge suppressing member 80 that is in contact with the tube plate 11 or the metal tube 4 at the ground potential is used, the discharge in the gap facing the tube plate 11 is performed. Is not reduced or generated, and the temperature rise of the dielectric tube 5 in this portion is suppressed, and the influence on the gas flow is small.

Embodiment 4
9 and 10 are diagrams showing a configuration according to the fourth embodiment of the present invention. FIG. 9 is an enlarged cross-sectional view showing a main part according to the fourth embodiment, and FIG. 10 is a cross-sectional view taken along line AA of FIG. FIG. 9 shows only one side of the central axis of the metal tube 4 or the dielectric tube 5 in the vicinity of the tube plate 11 as in FIGS. 2, 4, and 8.

  In the fourth embodiment, a metal material 84, which is a metal film or a metal plate having a predetermined width, for example, about the thickness of the tube plate 11, is applied to the surface of the dielectric tube 5 facing the tube plate 11. The discharge suppression member 83 is formed or affixed to the entire surface periphery of the metal plate, and the conductive lead 85 is connected to the metal material 84. Since the conductive lead 85 comes into contact with the tube plate 11 or the metal portion of the metal tube 4, the discharge suppressing member 83 becomes a ground potential, and an electric field is not generated in the portion facing the tube plate 11 in the gap. There is no discharge.

When the metal material 84 is a metal thin film, it is constituted by metal plating that is conductive even when oxidized, such as Ni or Zn. When the metal material 84 is a thin metal plate, the metal material 84 is configured using a metal having strong oxidation resistance such as SUS or a metal obtained by plating Ni or Zn on a metal such as copper.

  In the fourth embodiment, since the discharge suppression member 83 is composed of a metal material 84 that is a metal film or a metal plate and a thin conductive lead 85, the discharge suppression member 83 causes a pressure loss with respect to the flow of the source gas. Little occurs and has little effect on flow.

  As described above, in the fourth embodiment, since the metal discharge suppressing member 83 is used, no discharge is generated in the gap facing the tube plate 11, and the temperature rise of the dielectric tube 5 in this portion is suppressed. And has little effect on the gas flow.

Embodiment 5 FIG.
FIG. 11 is a schematic block diagram showing an ozone generator according to Embodiment 5 of the present invention. 1 denote the same or corresponding parts. In Embodiment 1 shown in FIG. 1, the conductive film 6 is not formed on the high-voltage electrode tube 50 at a position facing the tube plate 12 that partitions the space 200 on the ozonized gas outlet side, and the portion of the portion facing the tube plate 12 is not formed. Since the discharge was not generated in the gap, it was not necessary to provide the discharge suppressing member 8 in this portion. However, in a larger-capacity ozone generator, as shown in FIG. 11, two high-pressure electrode tubes (high-pressure electrode tubes 50 and 51) are installed in series to partition the space 200 on the ozonized gas outlet side. The conductive film 6 is formed on the high-voltage electrode tube 51 at a position opposite to the electrode, and discharge is generated even in the gap in this portion. For this reason, by providing the discharge suppression member 8 also in the gap portion facing the tube plate 12 on the ozonized gas outlet side, the discharge energy in this portion is reduced, so that the dielectric tube 5 of the high-voltage electrode tube 51 is reduced. There is an effect that the temperature rise in the portion facing the tube sheet 12 is suppressed.

  In the first to fifth embodiments described above, the high-voltage electrode tube in which the metal film serving as the metal electrode is formed on the inner wall of the dielectric tube is used. However, a conductor such as a metal rod is formed inside the dielectric tube. May be used as a metal electrode, and a high voltage may be applied between the conductor and the metal tube 4. In this case, since discharge occurs in the gap between the conductor and the inner wall of the dielectric tube, a material tube may be configured to flow through this gap using a dielectric tube open at both ends. You may insert the cushion material which plays the role of the spacer which maintains the space | interval of a clearance gap.

  As described above, according to the present invention, the dielectric tube is held inside the metal tube so that the outer wall of the dielectric tube and the inner wall of the metal tube have a predetermined gap, and the metal electrode is provided inside the dielectric tube. In which oxygen is ozonized by applying an alternating high voltage between the metal tube and discharging a source gas containing oxygen flowing in at least the gap between the outer wall of the dielectric tube and the inner wall of the metal tube. Any structure may be used as long as the discharge suppressing member is provided in the opposing gap portion. According to such a configuration, the temperature rise of the dielectric tube at the portion facing the tube plate can be made smaller than before, and the temperature distribution of the dielectric tube can be made more uniform than before. As a result, it is possible to provide an ozone generator that can increase the discharge power density as a whole, and that can realize downsizing of the apparatus or increase in capacity.

The above first to fifth embodiments, that is, the present invention has an effect that the power density can be particularly increased. That is, it is particularly effective at a high discharge power density such that the average power density in the entire portion to be discharged is 0.2 W to 0.7 W / cm ^2. According to the present invention, the discharge is performed at such a high discharge power density. An ozone generator that can operate stably even when it is used can be provided.

  The present invention is used in the field of ozone production for producing ozone used for water treatment with ozone.

DESCRIPTION OF SYMBOLS 1 Airtight sealed container 2 Raw material gas inlet 3 Ozonized gas outlet 4 Metal pipe 5 Dielectric pipe 6 Metal film (metal electrode)
8, 80, 83 Discharge suppression member 81 Adhesive part 82 Contact part 84 Metal material 85 Conductive lead 10 AC high voltage power supply,
11 First tube sheet (tube sheet on the source gas inlet side)
12 Second tube sheet (ozonized gas outlet side tube sheet)
13 Space 20 divided by two tube plates, outer wall of metal tube, and inner wall of sealed container 20 Gap 50, 51 High-pressure electrode tube 100 Space on source gas inlet side 200 Space on ozonized gas outlet side

Claims (4)

An airtight sealed container;
A conductive metal plate having a hole, and two tube plates provided so as to partition the inside of the hermetically sealed container into three spaces;
A metal tube provided so as to connect the holes of the two tube plates;
A dielectric tube that is held inside the metal tube so that the outer wall and the inner wall of the metal tube have a predetermined gap, and has a metal electrode inside;
An AC high voltage power source for applying an AC high voltage between the metal tube and the metal electrode,
A source gas containing oxygen is allowed to flow from one of the three spaces to the other of the spaces at both ends through at least the gap, so that the metal electrode in the dielectric tube has a high potential. The metal tube and the tube plate are set to the ground potential, the raw material gas flowing in the gap is discharged to generate ozone, and the two tube plates are separated by the metal tube outer wall and the sealed container inner wall. In the ozone generator configured to flow cooling water through the space for cooling,
A discharge suppression member, which is a thin metal material that covers the outer peripheral surface of the dielectric tube at a portion facing the tube plate, is provided, and the discharge suppression member is in electrical contact with the metal tube or the tube plate An ozone generator characterized by.   2. The ozone generator according to claim 1, wherein the discharge suppression member is connected to a conductive lead that is in electrical contact with the metal tube or the tube plate.   The discharge suppressing member has an adhesive portion made of a conductive material having the same length as the outer circumference of the dielectric tube, and contact portions made of a plurality of conductive materials extending from the adhesive portion. The ozone generator according to claim 1, wherein the ozone generator is in electrical contact with the tube plate or the metal tube. Ozone generator as claimed in any one of claims 3 to average power density of discharge is characterized by a 0.2~0.7W / cm ^2.

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