JP2005255432A - Method for generating ozone and ozone generating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ozone generating tube which has a long electrode structure prepared by connecting a plurality of high-voltage electrodes to each other and has an electrode structure with the gap between opposing electrodes kept more uniform, and with which the generated ozone is not thermally decomposed, and an ozone generating apparatus. <P>SOLUTION: The ozone generating tube has the electrode structure comprising a cylindrical grounding electrode and a counter electrode which is composed of the plurality of high-voltage electrodes concentrically disposed inside the grounding electrode forming a gap therebetween and having a feeder terminal for supplying high voltage in the entrance side of a source material gas and which has a dielectric layer formed on at least one surface. The ozone generating tube has a pass hole for a coolant on the end face of the high-voltage electrode and has a connecting tool composed of a flexible conductive metal pipe and a connecting terminal. The end faces of the high-voltage electrodes are connected with the connecting tool to allow the coolant to pass through. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to an ozone generator tube capable of efficiently generating ozone and an ozone generator equipped with the ozone generator tube. The present invention also relates to an ozone generation method using an ozone generation tube and an ozone generation device including the ozone generation tube, and a counter electrode included in the ozone generation tube and the ozone generation device. In particular, it is a counter electrode composed of a ground electrode and an elongated high voltage electrode, which can maintain a uniform gap length and is inside a high voltage electrode with a cooling medium (hereinafter sometimes referred to as a refrigerant). The present invention relates to an ozone generating tube provided with a counter electrode capable of effectively cooling an electrode from the above and an ozone generating device including the ozone generating tube.

Ozone is used for water and sewage treatment, sterilization treatment, bleaching treatment, etc., and it is regarded as important for its effectiveness, and a technique for efficiently generating ozone has been studied. For example, many research results have been reported on the structure of electrodes in an ozone generator tube, the space between counter electrodes, and a cooling method for an ozone generator equipped with an ozone generator tube. In particular, in an ozone generating tube, when a long electrode is used, an ozonized gas can be generated more efficiently. Therefore, a device for manufacturing a long electrode has been devised.

7 and 8 show examples of the counter electrode of a conventionally known cylindrical electrode type ozone generating tube.
FIG. 7 is a cross-sectional view of the counter electrode of the cylindrical electrode type ozone generating tube, and the electrode is an outer surface of the cylindrical high voltage electrode 2 having an end face to which the feeding terminal 8 is connected on the ozonized gas 7 discharge side. Further, a dielectric 3 made of glass or ceramics is disposed so as to cover the end of the cylindrical high-voltage electrode 2 on the supply side of the raw material gas 6, and the cylindrical ground electrode is connected to the inner surface of the cylindrical ground electrode 1 via a gap spacer 12. 1 is arranged so as to face the cylindrical high-voltage electrode 2.
By supplying a source gas 6 containing oxygen into the discharge space 4, connecting an AC high voltage power source (not shown) between the opposing electrodes, and applying an AC high voltage between both electrodes, Silent discharge (ozonizer discharge) is uniformly generated in the space 4.

FIG. 8 is a cross-sectional view of an ozone generating tube having a cylindrical electrode different from the above, and the counter electrode is a dielectric material inside a long cylindrical ground electrode 1 via a gap spacer 12. A plurality of cylindrical high-voltage electrodes 2 having a surface 3 are arranged, and the cylindrical high-voltage electrodes 2 are connected to each other by a long connecting rod provided at the center of the cylindrical high-voltage electrode 2 ( For example, see Patent Document 1).
By supplying a source gas 6 containing oxygen into the discharge space 4, connecting an AC high voltage power source (not shown) between the electrodes, and applying an AC high voltage between the electrodes, the discharge space The silent discharge (ozonizer discharge) is uniformly generated in the 4.
In this technology, a method of connecting a plurality of high-voltage electrodes with a connecting rod is adopted, and a long high-voltage electrode is connected to one long ground electrode by connecting a plurality of electrodes. It was extremely difficult to hold the gaps so as to maintain such a gap length. If the counter electrode cannot be maintained with a uniform gap length, it is impossible to stably generate ozonized gas having a high ozone concentration. Furthermore, since the contact between the connecting surfaces of the cylindrical high-voltage electrodes 2 and the connecting rods 9 is unstable, even if an alternating high voltage is applied between the two electrodes, there is a possibility that uniform discharge will not occur. In addition to being difficult to make, the ozone generation characteristics may be reduced.

  In that respect, in Patent Document 2, as a counter electrode of the ozone generating tube, a stainless steel nut is welded to the tip of the high voltage electrode, and the tip of the high voltage electrode is screwed with a stainless steel connecting member to connect. Is disclosed. Certainly, this technique also improves the electrical connection of the connected cylindrical high-voltage electrode 2, and the high voltage is applied so that the gap between the counter electrodes is kept uniform according to the warp and the bending of the ground electrode and the high-voltage electrode. While it was possible to connect the electrodes, it was still not satisfactory and there was a need to develop a new technology that could maintain a more uniform gap length.

  Accordingly, an ozone generator tube has been developed in which a plurality of high voltage electrodes are connected to each other through a universal joint, has a long electrode structure, and the gap between the counter electrodes is more uniformly maintained (Patent Document 3). See). With this technology, it is possible to take a long electrode structure, and it is possible to maintain a uniform gap length with higher accuracy than before, but the electrode cannot be cooled from the inside, Cooling is inadequate, the generated ozonized gas is decomposed, the generation efficiency of ozone is lowered, and a new inconvenience that an ozonized gas having a high ozone concentration cannot be obtained has arisen.

In addition, the flow of the refrigerant | coolant in the ozone generation pipe of a prior art example is shown in FIG.
On the outer surface of the cylindrical high voltage electrode 2 having an end face to which the feeding terminal 8 is connected to the ozonized gas 7 discharge side, a dielectric 3 made of glass or ceramics or the like is provided on the source gas 6 supply side of the cylindrical high voltage electrode 2. From the cooling device 20, an electrode of an ozone generating tube that is arranged so as to cover up to the end portion and arranged so that the cylindrical ground electrode 1 faces the cylindrical high voltage electrode 2 through the gap spacer 12 outside the dielectric 3 is provided. The outside of the cylindrical ground electrode 1 is cooled by moving the cooling medium 21 as shown by the arrows in FIG.

JP-A-4-214004 Japanese Patent Laid-Open No. 11-147702 JP 2003-146622 A

In view of the state of the prior art, it is a counter electrode composed of a long high voltage electrode in which a ground electrode and a plurality of high voltage electrodes are connected to each other, and the gap between the counter electrodes is more uniformly maintained An ozone generator tube having such a structure that the electrode can be cooled from the inside of the elongated high-voltage electrode, and in addition, the ozonized gas can be efficiently generated and the generated ozone is not thermally decomposed, and the ozone It is an object of the present invention to provide an ozone generator having a generator tube. Further, the ozone generator tube as described above, which has good electrical connection, ensures a path through which the cooling medium can move smoothly, and enables an even discharge process, and its It is also an object of the present invention to provide an ozone generating device including an ozone generating tube.

As a method for cooling the inside of the elongated high-voltage electrode while the inventors devised to solve the above problems, a flexible conductive metal pipe and a connection terminal are provided on the end face of the high-voltage electrode. When the high-voltage electrodes are connected via the connection jig, the above-mentioned problems such as the electrical connection, the path of the cooling medium, and the smooth movement of the cooling medium can be solved. The present invention has been reached.

That is, according to the first aspect of the present invention, a cylindrical ground electrode having both ends opened, and a concentric cylinder disposed inside the ground electrode via a gap, a high voltage is provided on the inlet side of the source gas. A dielectric layer formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode, comprising a long high voltage electrode connected to a plurality of high voltage electrodes including a high voltage electrode having a power supply terminal for supply The counter electrode for an ozone generating tube having a configuration in which the adjacent end faces of the high voltage electrode are connected to each other by a connecting jig composed of a flexible conductive metal pipe and a connecting terminal. It is an invention of a counter electrode for a tube.
According to a second aspect of the present invention, a cylindrical ground electrode having both ends opened, a concentric cylinder disposed inside the ground electrode via a gap, and a feed terminal for supplying a high voltage on the inlet side of the source gas A plurality of high voltage electrodes including a high voltage electrode having a length of a high voltage electrode connected to each other, and a dielectric layer formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode In the counter electrode for an ozone generating tube, a refrigerant passage hole is provided in each end face of the plurality of high voltage electrodes, and the end faces provided with the refrigerant passage hole and the adjacent end faces of the high voltage electrode are flexible. A connection jig composed of a metal pipe and a connection terminal, which is connected to the inside of the adjacent high voltage electrode so that the refrigerant can pass therethrough and does not exude the refrigerant, and has both ends of the elongated high voltage electrode Metal pie on the surface But wherein the internal of the high voltage electrode and the metal pipe refrigerant is provided so as not to ooze is capable Moreover refrigerant passage.

According to a third aspect of the present invention, a cylindrical ground electrode having both ends opened, a concentric cylinder disposed inside the ground electrode via a gap, and a feed terminal for supplying a high voltage on the inlet side of the source gas A plurality of high-voltage electrodes including a high-voltage electrode having a length, and a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high-voltage electrode. In the ozone generating tube provided with the counter electrode, the end faces of the adjacent high voltage electrodes are connected to each other by a connection jig formed from a flexible conductive metal pipe and a connection terminal.
According to a fourth aspect of the present invention, a cylindrical ground electrode having both ends opened, a concentric cylinder disposed inside the ground electrode via a gap, and a feed terminal for supplying high voltage to the inlet side of the source gas A plurality of high-voltage electrodes including a high-voltage electrode having a length, and a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high-voltage electrode. In the ozone generating tube provided with the counter electrode, each of the plurality of high voltage electrodes is provided with a refrigerant passing hole, and the adjacent end faces of the high voltage electrode are flexible. A connecting jig composed of a conductive metal pipe and a connecting terminal, which is connected to the inside of the adjacent high-voltage electrode so that the refrigerant can pass through it and prevents the refrigerant from oozing out. On both ends of the electrode Genus pipe, the inside of the high voltage electrode and the metal pipe, characterized in that is provided so as refrigerant is not ooze is capable Moreover refrigerant passage.

The invention according to claim 5 of the present invention is arranged in a concentric cylindrical shape with a cylindrical ground electrode having both ends open and a gap inside the ground electrode, and is used for supplying a high voltage to the inlet side of the source gas. A long high voltage electrode including a plurality of high voltage electrodes including a high voltage electrode having a power supply terminal, and forming a dielectric layer on at least one of the opposing surfaces of the ground electrode and the high voltage electrode In the ozone generator having the ozone generating tube having the counter electrode having the above-described configuration and the housing having the ozone generating tube built in, the conductive metal pipe and the connecting terminal in which the end surfaces of the adjacent high voltage electrodes are flexible to each other It is connected with the connection jig formed from.
The invention according to claim 6 is a cylindrical ground electrode having both ends opened, a concentric cylinder disposed inside the ground electrode via a gap, and a feed terminal for supplying high voltage on the inlet side of the source gas A plurality of high-voltage electrodes including a high-voltage electrode having a length, and a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high-voltage electrode. In an ozone generator comprising an ozone generator tube provided with a counter electrode and a housing containing the ozone generator tube, a refrigerant passage hole is provided in each end face of the plurality of high voltage electrodes, and the refrigerant passage A connecting jig composed of a conductive metal pipe and connecting terminals, which are end surfaces provided with holes and the adjacent end surfaces of the high voltage electrodes are flexible, and allows the refrigerant to pass through the adjacent high voltage electrodes. Refrigerant oozes Metal pipes are provided on both end faces of the high-voltage electrode that are connected so as not to be long, so that the refrigerant can pass through the high-voltage electrode and the metal pipe, and the refrigerant is not oozed out. It is characterized by that.
The invention according to claim 7 is a method for generating ozonized gas using the ozone generator tube according to any one of claims 3 to 4, and is provided on one end face of the elongated high-voltage electrode provided in the ozone generator tube. A method for generating ozonized gas, wherein a cooling medium is passed from a metal pipe end to a metal pipe on the other end surface, and the elongated high voltage electrode is cooled from the inside.
The invention according to claim 8 is a method for generating ozonized gas using the ozone generator according to any one of claims 5 to 6, and is provided on one end face of the elongated high-voltage electrode provided in the ozone generator. A method for generating ozonized gas, wherein a cooling medium is passed from a metal pipe end to a metal pipe on the other end surface, and the elongated high voltage electrode is cooled from the inside.

Hereinafter, the present invention will be described in detail.
The connection jig for connecting the plurality of high-voltage electrodes includes a flexible conductive metal pipe and connection terminals arranged at both ends of the pipe (for example, FIG. 3).
The flexible conductive metal pipe is already known and can be obtained by purchasing a commercial product. In the present invention, it is preferable to use a highly flexible pipe generated from a conductive metal material such as stainless steel. In addition, a connection terminal constituting a high voltage electrode connection jig is already known. The connection terminal is preferably manufactured from a conductive metal material such as stainless steel. A joint screw is effective as the connection terminal. The connection terminal can be obtained by purchasing a commercial product.
A general method may be applied as a method of arranging the connection terminals on the flexible conductive metal pipe.

In the present invention, the high-voltage electrode connection jig is used to connect the high-voltage electrodes to each other so that the cooling medium can pass therethrough. At that time, it is preferable to previously provide a hole for passage of refrigerant in the end face of the cylindrical high voltage electrode. The coolant passage hole is not particularly limited as long as the cooling medium can pass therethrough, but is preferably substantially circular and can be fitted with a flexible conductive metal pipe. One refrigerant passage hole may be provided in the substantially central portion of the end face of the high voltage electrode, or a plurality of refrigerant passage holes may be provided. Further, a part of the end face of the high voltage electrode may be extruded into a cylindrical shape, and a coolant passage hole may be provided on the convex surface.
The flexible conductive metal pipe is fixed to the end face of the high voltage electrode with a connection terminal so that the cooling medium does not ooze out. Moreover, it fixes with a connection terminal so that the end surface of a high voltage electrode and the said flexible conductive metal pipe can maintain favorable electrical connection. A general method may be applied as the method. For example, a method in which the flexible conductive metal pipe is inserted into the refrigerant passage hole provided on the flat surface of the convex portion and fixed with a connection terminal, or a diameter slightly larger than the diameter of the circular refrigerant passage hole provided on the end face of the high voltage electrode. And a method of welding the flexible conductive metal pipe to the welded nut, and the like.
Note that the cooling medium is connected so as to be able to pass through the inside of the high voltage electrode. The high voltage electrodes are connected to each other by the above method, and the cooling medium freely passes through the inside of the high voltage electrode and the flexible conductive metal pipe. It means that they are connected as much as possible, and it means that the cooling medium does not ooze out from the connection part.

If a metal pipe is provided on both end faces of the elongated high voltage electrode and a refrigerant is passed through the pipe, a preferable result can be obtained. That is, when a refrigerant is supplied from one metal pipe of the elongated high voltage electrode, the refrigerant passes through the inside of the high voltage electrode from the inside of the metal pipe, and further the flexible conduction of the connecting jig on the end face of the high voltage electrode. The refrigerant passes through the inside of the conductive metal pipe, passes through the inside of another high voltage electrode connected to the high voltage electrode, and finally the refrigerant is discharged from the other metal pipe of the elongated high voltage electrode. In addition, it is preferable to use a conductive metal pipe as the metal pipe.
The metal pipe can be fixed to both end faces of the elongated high voltage electrode with connection terminals.
If a so-called double-sided cooling method is employed in which the elongated high-voltage electrode is cooled from the inside and the conventionally known ground electrode is cooled from the outside, a further excellent effect can be obtained.
As the counter electrode, the dielectric, the ozone generating tube, the casing, the cooling medium, the cooling device, the AC high voltage power source and the like referred to in the present invention, general known ones can be used.

The present invention provides an ozone generator tube that can be cooled from both the outside of the ground electrode and the inside of the high-voltage electrode, and an ozone generator having the same. In this ozone generating tube and the ozone generating apparatus including the same, the electrical connection between the high voltage electrodes is sufficiently satisfactory, and the cooling medium smoothly leaks in the high voltage electrode and the flexible conductive metal pipe. The internal counter electrode and the discharge space do not reach a high temperature, the thermal decomposition of the generated ozone is greatly reduced, and a high-concentration ozonized gas can be efficiently generated. Moreover, it is possible to easily lengthen the high voltage electrode, absorb the warping and bending of the ground electrode and the high voltage electrode, and generate ozone that keeps the gap length between the ground electrode and the high voltage electrode uniform. Since it is a pipe | tube and an ozone generator provided with it, it can generate | occur | produce efficiently ozonized gas with a high density | concentration.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 shows an example of an electrode structure of an ozone generator tube of the present invention.
A dielectric layer 3 is formed inside the cylindrical ground electrode 1, and an elongated cylindrical high voltage electrode is disposed concentrically via a gap spacer 12 inside the dielectric layer 3. The elongated cylindrical high-voltage electrode is connected via a connecting jig 10 attached to both end faces of the cylindrical high-voltage electrode 2. Metal pipes 11 fixed with connection terminals are provided on both end faces of the elongated high voltage electrode.
FIG. 2 shows an example of the connecting jig 10.
The connection jig is composed of a flexible conductive metal pipe 10a and a connection terminal 10b.
FIG. 3 shows an example in which the high voltage electrode end face 26 is connected by the connecting jig 10.
A part of the end face 26 of the high voltage electrode is extruded into a cylindrical shape, a refrigerant passage hole 27 is provided on the convex surface, and the outer peripheral surface of the convex is threaded. The flexible conductive metal pipe 10a is fitted into the coolant passage hole 27, and the flexible conductive metal pipe 10a is fixed by the connection terminal 10b. The same operation is performed on a high voltage electrode end face (not shown) adjacent to the high voltage electrode end face 26, and the flexible conductive metal pipe 10a is fixed by a connection terminal (not shown). Thus, the end faces of the adjacent high voltage electrodes are connected to each other.

In FIG. 1, two cylindrical high voltage electrodes 2 are connected. However, if this structure is adopted, a plurality of cylindrical high voltage electrodes 2 can be connected. In order to increase the amount of ozone generated per electrode, it is conceivable to use a long cylindrical ground electrode 1 and to increase the length of the cylindrical high-voltage electrode 2. This tends to increase the bending of each electrode, making it difficult to smoothly manufacture the counter electrode. However, by shortening the length of the cylindrical high-voltage electrode 2, the bending of each cylindrical high-voltage electrode 2 is reduced, so that the cylindrical high-voltage electrode 2 can be inserted into the cylindrical ground electrode 1 having a large bending, and the connection treatment is performed. The flexible pipe of the tool 10 can absorb the deviation due to the bending of each cylindrical high voltage electrode 2, and the cylindrical high voltage electrode 2 can be easily elongated and cooled.
That is, by connecting the cylindrical high voltage electrodes 2 with the conductive and flexible conductive metal pipe of the connecting jig 10, it becomes possible to spatially connect the inside between the electrodes, and the high voltage to be connected. Even if the number of electrodes increases, it is possible to cool the inside of these high voltage electrodes with a refrigerant. In addition, the electrical connection is good and uniform discharge occurs.

FIG. 4 shows an ozone generating tube different from FIG. The electrode structure has a dielectric layer 3 formed outside the cylindrical high-voltage electrode 2. Other structures are the same as the electrode configuration of FIG.
FIG. 5 shows a structure in which a plurality of electrode structures shown in FIG. 4 are connected in parallel, and is a useful structure when a large volume of ozone generation is required.

FIG. 6 shows a structure in which both the cylindrical ground electrode 1 and the cylindrical high voltage electrode 2 are cooled with a refrigerant. A dielectric layer 3 is formed inside the cylindrical ground electrode 1, and a high voltage electrode connected via a connection jig 10 attached to both end faces of the cylindrical high voltage electrode 2 via a gap spacer 12 inside the dielectric layer 3. Deploy.
A high voltage is applied between the opposing electrodes by an AC high voltage power source (not shown), and a silent discharge (ozonizer) is generated in the discharge space 4 between the connected cylindrical high voltage electrode 2 and the cylindrical ground electrode 1. Discharge) occurs, and the raw material gas 6 supplied into the discharge space 4 is generated as an ozonized gas. Further, the refrigerant 21 moves from the cooling device 20 as indicated by the arrow in the figure, and the refrigerant 21 flows through the conductive metal pipe 11 connected to the cooling device 20, thereby causing the cylindrical high voltage electrode 2 from the inside of the cylindrical high voltage electrode 2. Cool down. Further, the refrigerant 21 from the cooling device 20 cools the cylindrical ground electrode from the outside of the cylindrical ground electrode 1. Thus, the cylindrical high voltage electrode 2 and the cylindrical ground electrode are cooled, the thermal decomposition of the ozonized gas 7 formed in the discharge space 4 is also suppressed, and the ozonized gas 7 can be generated efficiently.

From the above description, the present invention can also be described as follows.
(1) Elongation in the ozone generator tube according to any one of claims 4 to 5 or the ozone generator according to any one of claims 7 to 9 is made longer by passing a cooling medium from one end surface to the other end surface of the high voltage electrode. A method for generating ozone, comprising cooling a high voltage electrode from its inside.
(2) A cylindrical ground electrode having both ends opened, and a high voltage electrode that is concentrically disposed inside the ground electrode via a gap and has a power supply terminal for high voltage supply on the inlet side of the source gas A counter electrode having a configuration in which a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode. An ozone generator comprising an ozone generator tube and a housing containing the ozone generator tube, wherein the outside of the cylindrical ground electrode is cooled by a cooling medium and the source gas containing oxygen is supplied to the gap in the counter electrode A connecting jig formed of a connecting terminal and a flexible conductive metal pipe between the end faces of the adjacent high voltage electrodes, and the cooling medium can pass through the adjacent high voltage electrodes. Special Ozone generator to be.

It is a cross-sectional schematic diagram of an example of the counter electrode used for the ozone generator tube of this invention. It is a cross-sectional schematic diagram of an example of the connection jig which connects the high voltage electrode of this invention. It is an expanded cross-sectional view of the part which connected the high voltage electrode end surface of this invention with the connection jig. It is a cross-sectional schematic of the example different from the above of the counter electrode used for the ozone generator tube of this invention. FIG. 5 is a schematic cross-sectional view of an example of a main part of an ozone generator in which many counter electrodes of FIG. 4 are installed. It is the schematic which shows the flow of the refrigerant | coolant in the ozone generation pipe of this invention. It is a cross-sectional view of an example of the counter electrode used for the ozone generation tube of a prior art example. It is a cross-sectional view of the example different from the above of the counter electrode used for the ozone generation tube of a prior art example. It is a figure which shows the flow of the cooling medium in the ozone generation pipe of a prior art example.

Explanation of symbols

1. 1. Cylindrical ground electrode 2. Cylindrical high voltage electrode Dielectric 4. 5. discharge space 6. Source gas Ozonized gas8. Power supply terminal 9. Connecting rod 10. Connecting jig 10a. Flexible conductive metal pipe 10b. Connection terminal 11. Metal pipe 12. Gap spacer 20. Cooling device 21. Refrigerant 22. Refrigerant flow 26. High voltage electrode end face 27. Refrigerant passage hole

Claims (8)

Plurals including a cylindrical ground electrode having both ends opened, and a high voltage electrode that is concentrically disposed inside the ground electrode via a gap and has a power supply terminal for supplying high voltage on the inlet side of the source gas A counter electrode for an ozone generating tube having a configuration in which a plurality of high voltage electrodes are connected to each other to form a long high voltage electrode, and a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode. An opposing electrode for an ozone generating tube, wherein end faces adjacent to each other of the high voltage electrode are connected by a connection jig composed of a flexible conductive metal pipe and a connection terminal. Plurals including a cylindrical ground electrode having both ends opened, and a high voltage electrode that is concentrically disposed inside the ground electrode via a gap and has a power supply terminal for supplying high voltage on the inlet side of the source gas A counter electrode for an ozone generating tube having a configuration in which a plurality of high voltage electrodes are connected to each other to form a long high voltage electrode, and a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode. Refrigerant passage holes are provided on the respective end faces of the plurality of high voltage electrodes, and the end faces where the refrigerant passage holes are provided and the adjacent end faces of the high voltage electrodes are composed of flexible conductive metal pipes and connection terminals. The connecting jig is connected so that the refrigerant can pass through the adjacent high-voltage electrodes, and metal pipes are connected to both ends of the elongated high-voltage electrode, and the high-voltage electrodes and the inside of the metal pipe are refrigerant. Can pass Ozone generating tube for a counter electrode, characterized by being kicked. Plurals including a cylindrical ground electrode having both ends opened, and a high voltage electrode that is concentrically disposed inside the ground electrode via a gap and has a power supply terminal for supplying high voltage on the inlet side of the source gas An ozone generating tube comprising a counter electrode having a configuration in which a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode, which is made of an elongated high voltage electrode to which a plurality of high voltage electrodes are connected The ozone generating tube according to claim 1, wherein the adjacent end faces of the high-voltage electrode are connected by a connecting jig composed of a flexible conductive metal pipe and a connecting terminal. Plurals including a cylindrical ground electrode having both ends opened, and a high voltage electrode that is concentrically disposed inside the ground electrode via a gap and has a power supply terminal for supplying high voltage on the inlet side of the source gas An ozone generating tube comprising a counter electrode having a configuration in which a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode, which is made of an elongated high voltage electrode to which a plurality of high voltage electrodes are connected And a plurality of high-voltage electrodes are provided with refrigerant passage holes, and the end faces provided with the refrigerant passage holes, the adjacent end faces of the high-voltage electrodes are flexible conductive metal pipes and connection terminals. The metal pipe is connected to both ends of the elongated high voltage electrode so that the refrigerant can pass through the inside of the adjacent high voltage electrode, and the connection between the high voltage electrode and the metal pipe. Refrigerant passes inside Ozone generating tube, characterized by being capable provided. Plurals including a cylindrical ground electrode having both ends opened, and a high voltage electrode that is concentrically disposed inside the ground electrode via a gap and has a power supply terminal for supplying high voltage on the inlet side of the source gas An ozone generating tube comprising a counter electrode having a configuration in which a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode, which is made of an elongated high voltage electrode to which a plurality of high voltage electrodes are connected And an ozone generator having a housing containing the ozone generator tube, adjacent end faces of the high voltage electrode are connected to each other by a connection jig constituted by a flexible conductive metal pipe and a connection terminal. An ozone generator characterized by comprising: Plurals including a cylindrical ground electrode having both ends opened, and a high voltage electrode that is concentrically disposed inside the ground electrode via a gap and has a power supply terminal for supplying high voltage on the inlet side of the source gas An ozone generating tube comprising a counter electrode having a configuration in which a dielectric layer is formed on at least one of the opposing surfaces of the ground electrode and the high voltage electrode, which is made of an elongated high voltage electrode to which a plurality of high voltage electrodes are connected And an ozone generator having a housing containing the ozone generator tube, each of the plurality of high voltage electrodes is provided with a coolant passage hole, and the coolant passage hole is provided on the end surface. Adjacent end faces of the high-voltage electrodes are connected jigs composed of flexible conductive metal pipes and connection terminals. Both end faces of voltage electrode Metal pipe, an ozone generator, characterized in that the interior of the high voltage electrode and the metal pipe refrigerant is provided to be passed. A method for generating ozonized gas using the ozone generator tube according to claim 3, wherein one end surface of the elongated high-voltage electrode provided in the ozone generator tube is connected to the other end surface. A method of generating ozonized gas, wherein a cooling medium is passed through the metal pipe to cool the elongated high voltage electrode from the inside. A method for generating ozonized gas using the ozone generator according to claim 5, wherein one end face of the elongated high-voltage electrode provided in the ozone generator is connected to the other end face. A method of generating ozonized gas, wherein a cooling medium is passed through the metal pipe to cool the elongated high voltage electrode from the inside.

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