CN113646260A

CN113646260A - Ozone generating device and ozone generating device set

Info

Publication number: CN113646260A
Application number: CN201980094120.3A
Authority: CN
Inventors: 内藤皓贵; 和田升
Original assignee: Mitsubishi Electric Corp
Current assignee: Mitsubishi Electric Corp
Priority date: 2019-04-17
Filing date: 2019-04-17
Publication date: 2021-11-12
Also published as: JP6608571B1; JPWO2020213083A1; WO2020213083A1

Abstract

The purpose is to suppress the enlargement of an ozone generating device even if the number of discharge cells is increased in order to increase the amount of ozone generated. An ozone generating device (1) is provided with: a plurality of cylindrical discharge cells (2) for generating ozone by discharge; a heat sink (3) having an insertion hole into which a plurality of discharge cells are inserted in an array in a direction orthogonal to the axial direction of the discharge cells; and a cooler that outputs a refrigerant that cools the radiator, wherein a direction in which the cooler outputs the refrigerant is parallel to a direction in which the plurality of discharge cells are arranged.

Description

Ozone generating device and ozone generating device set

Technical Field

The present application relates to an ozone generating device and an ozone generating device unit.

Background

Ozone (O)₃) Has strong oxidizing power. Ozone is used in many fields, such as water purification, sterilization, and deodorization in the field of water purification and sewage treatment, and surface cleaning in the field of semiconductor manufacturing, by utilizing its strong oxidizing power. With the recent increasing awareness of environmental protection, the increasing demand for electronic devices, and the like, there has been a growing demand for efficient and compact ozone generatorsAnd (4) increasing.

As a method for industrially producing ozone, there is generally the following method: make oxygen (O)₂) Or the raw gas containing oxygen flows through the discharge gap, and the discharge gap is applied with an electric field to generate silent discharge, and ozone is generated by the discharge energy. According to the present ozone generating apparatus, the energy contributing to the generation of ozone among the input power is about 10%, and the remaining 90% of the energy is released as thermal energy in the discharge gap. When the discharge gap becomes high temperature due to the thermal energy, the generated ozone is decomposed by the heat to cause a significant decrease in the ozone generation efficiency. Therefore, in the ozone generating apparatus, the discharge gap is generally cooled by a cooler.

As an ozone generating device provided with a cooler, the following ozone generating device is disclosed: a plurality of discharge cells each having a cylindrical shape are arranged in one direction, air-cooling fins are provided in contact with the discharge cells, and cooling air is blown from a direction orthogonal to the direction in which the plurality of discharge cells are arranged in one direction to cool the discharge cells (see, for example, patent document 1).

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2015-67464

Disclosure of Invention

Technical problem to be solved by the invention

In the case of a cylindrical discharge cell, it is advantageous that the specific surface area of the discharge gap is large in order to maintain stable discharge and obtain high ozone generation efficiency. In addition, the amount of ozone generated with 1 discharge cell is limited. Therefore, in the case where the amount of ozone generation is to be increased, it is necessary to lengthen the discharge cells and increase the number of discharge cells arranged in line. In the conventional ozone generating apparatus, since the discharge cells are cooled by blowing cooling air from a direction orthogonal to a direction in which the plurality of discharge cells are arranged in one direction, when the number of discharge cells is increased in order to increase the amount of ozone generated, it is necessary to enlarge an area over which the cooling air is blown. Therefore, the number of discharge cells also increases, and the size of the ozone generator increases.

The present application has been made to solve the above-described technical problem, and an object thereof is to suppress an increase in size of an ozone generating apparatus even when the number of discharge cells is increased in order to increase the amount of ozone generated.

Means for solving the problems

The ozone generating device of the present application is provided with: a plurality of discharge cells having a cylindrical shape, which generate ozone by discharge; a heat sink having an insertion hole into which the plurality of discharge cells are inserted in an aligned manner in a direction orthogonal to an axial direction of the discharge cells; and a cooler that outputs a refrigerant that cools the radiator, wherein a direction in which the cooler outputs the refrigerant is parallel to a direction in which the plurality of discharge cells are arranged.

Effects of the invention

In the ozone generating device of the present application, the direction in which the cooler outputs the refrigerant is set to be parallel to the direction in which the plurality of discharge cells are arranged, and therefore, even when the number of discharge cells is increased in order to increase the amount of ozone generated, the size of the ozone generating device can be suppressed from increasing.

Drawings

Fig. 1 is a sectional view of an ozone generating apparatus according to embodiment 1.

Fig. 2 is a sectional view of the ozone generating apparatus according to embodiment 1.

Fig. 3 is a perspective view of the heat sink according to embodiment 1.

Fig. 4 is a sectional view of the ozone generating apparatus according to embodiment 1.

Fig. 5 is a sectional view of an ozone generating apparatus according to embodiment 2.

Fig. 6 is a sectional view of an ozone generating apparatus according to embodiment 2.

Fig. 7 is a perspective view of a heat sink according to embodiment 2.

Fig. 8 is a sectional view of an ozone generating device of embodiment 3.

Fig. 9 is a sectional view of an ozone generating device of embodiment 3.

Fig. 10 is a schematic view of an ozone generator unit according to embodiment 4.

Reference numerals

1: an ozone generating device; 2: a discharge unit; 3: a heat sink; 4: an air supply fan; 6: a spacer; 10: a ground electrode; 11: a dielectric cylinder; 12: a high voltage electrode; 21: a fin; 22: a groove; 23: a heat relaxation section; 24: a wind tunnel; 40: a high voltage power supply; 41: a power supply terminal; 42: a lead-in terminal; 50. 51: a header pipe; 70: ozone generating device unit.

Detailed Description

The following describes an ozone generation device and an ozone generation device unit for implementing embodiments of the present application in detail with reference to the drawings. In the drawings, the same reference numerals denote the same or equivalent parts.

Embodiment 1.

Fig. 1 is a sectional view showing the structure of an ozone generating apparatus according to embodiment 1. In fig. 1, an ozone generating device 1 includes a plurality of discharge cells 2 in a cylindrical shape, a heat sink 3 having insertion holes into which the discharge cells 2 are inserted, and a blower fan 4 serving as a cooler for cooling the heat sink 3. The discharge cells 2 are arranged in a direction orthogonal to the axial direction of the discharge cells 2. The blower fan 4 outputs cooling air W. The direction in which the cooling air W is output is parallel to the direction in which the discharge cells 2 are arranged. The discharge cell 2 includes a ground electrode 10 as an outer electrode, a dielectric cylinder 11, and a high-voltage electrode 12 as an inner electrode. A discharge gap G is formed between the dielectric cylinder 11 and the ground electrode 10 of the discharge cell 2. Here, the axial direction of the cylindrical discharge cells 2 is defined as the x-axis direction, the direction in which the discharge cells 2 are arranged is defined as the y-axis direction, and the direction orthogonal to the x-axis direction and the y-axis direction is defined as the z-axis direction. The cooling air W output from the blower fan 4 flows in the y-axis direction, which is the same direction as the direction in which the discharge cells 2 are arranged.

Fig. 2 is a sectional view as seen from the direction of line a-a of fig. 1. As shown in fig. 2, in the discharge cell 2, a ground electrode 10 as a cylindrical conductive member and a cylindrical dielectric cylinder 11 having a central axis matching the central axis of the ground electrode 10 in the inside thereof are arranged concentrically. The dielectric cylinder 11 is supported by the spacer 6 inside the ground electrode 10, and a discharge gap G is formed between the ground electrode 10 and the dielectric cylinder 11. The high voltage electrode 12 is a thin film conductive member formed on the inner surface of the dielectric cylinder 11. One end portion of the dielectric cylinder 11 is closed to prevent gas from circulating inside the dielectric cylinder 11. The other end of the dielectric cylinder 11 is opened to supply a high voltage. The discharge cell 2 is constituted by a ground electrode 10, a dielectric cylinder 11, and a high voltage electrode 12. A manifold 50 for introducing a source gas containing oxygen into the discharge cells 2 is provided at one end of the discharge cells 2. Further, a header pipe 51 through which ozone-containing gas containing ozone is led out from the discharge unit 2 is provided at the other end portion of the discharge unit 2. In fig. 2, an arrow 60 indicates a flow direction of the raw material gas, and an arrow 61 indicates a flow direction of the ozone-containing gas. In fig. 2, the output direction of the cooling air W is a direction perpendicular to the paper surface.

The ozone generating device 1 includes a plurality of (3 in fig. 1) discharge cells 2. The discharge cells 2 are arranged at equal intervals along the air blowing direction of the air blowing fan 4. The axial direction of each discharge cell 2 is a direction orthogonal to the air blowing direction. Therefore, the axes of the respective discharge cells 2 are parallel to each other.

The discharge unit 2 is configured to have airtightness, except for the introduction portion and the discharge portion of the raw material gas and the ozone-containing gas. A power supply terminal 41 is inserted into the open end of the dielectric cylinder 11 of the discharge cell 2, and the power supply terminal 41 is electrically contacted to the high voltage electrode 12. The power supply terminal 41 is connected to the high-voltage power supply 40 via an introduction terminal 42 provided in the manifold 50. The ground terminal of the high voltage power supply 40 is electrically connected to the ground electrode 10 to become the same potential as the ground electrode 10. An ac high voltage is applied to the high-voltage electrode 12 from the high-voltage power supply 40 via the power supply terminal 41, and a discharge is generated in the discharge gap G by the ac high voltage.

Fig. 3 is a perspective view of the heat sink 3. The heat sink 3 includes 3 insertion holes 31 arranged in the y-axis direction so that 3 discharge cells 2 can be arranged in the y-axis direction in the direction in which the cooling air W is output. The ground electrode 10 of the discharge cell inserted into the insertion hole 31 is configured to contact the inner wall of the insertion hole 31. Further, the heat sink 3 has fins 21 extending in a direction parallel to the y-axis direction in the direction in which the cooling air W is output and grooves 22 formed between the fins 21 in the outer peripheral portion thereof. The cooling air W output from the air supply fan passes through the groove 22. That is, the direction of the cooling air output by the blower fan 4 is set to be parallel to the direction in which the plurality of discharge cells 2 are arranged.

In the ozone generating apparatus of the present embodiment, the ground electrode 10 is made of a conductive material, and a metal material having excellent corrosion resistance, such as stainless steel or titanium, is particularly preferably used. The ground electrode 10 can be formed thin within a range in which the mechanical strength thereof can be maintained, or can be formed as a thin film on the inner surface of the heat sink 3. By forming the ground electrode 10 to be thin or to be a thin film, the thermal conductivity in the thickness direction of the ground electrode 10 is improved, and the cooling performance of the ozone generating apparatus 1 can be improved. Further, the surface of the ground electrode 10 exposed to the discharge gap G may be covered with an insulating material having good corrosion resistance. By covering the ground electrode 10 with an insulating material having good corrosion resistance, a general-purpose conductive material having poor corrosion resistance can be used as the ground electrode 10, and the manufacturing cost of the ozone generating device 1 can be reduced. Further, by applying heat-dissipating grease, conductive grease, or the like between the ground electrode 10 and the heat sink 3, the minute gap between the ground electrode 10 and the heat sink 3 can be filled with the grease. As a result, the thermal conductivity between the ground electrode 10 and the heat sink 3 can be improved.

The dielectric cylinder 11 is made of an insulating material, and ceramics having good corrosion resistance, such as quartz, borosilicate glass, and alumina, can be used.

The high voltage electrode 12 is made of a conductive material, and is preferably a conductive thin film formed on the inner surface of the dielectric cylinder 11 by a method such as wet coating, plating, thermal spraying, vacuum deposition, or sputtering. By forming the high-voltage electrode 12 by these methods, the adhesion between the dielectric cylinder 11 and the high-voltage electrode 12 can be improved, and abnormal discharge occurring between the dielectric cylinder 11 and the high-voltage electrode 12 can be suppressed. Further, by forming the high-voltage electrode 12 as a thin film, the weight of the high-voltage electrode 12 can be reduced, and the mechanical strength required for the dielectric cylinder 11 and the spacer 6 can be relaxed.

The power supply terminal 41 is made of a conductive material, and a metal material having excellent corrosion resistance, such as stainless steel or titanium, is preferably used. The power supply terminal 41 is electrically connected to the high voltage electrode 12 by a crimping terminal, welding, mechanical contact, or the like. In particular, it is preferable to form the tip of the power supply terminal 41 in a brush shape, because the high-voltage electrode 12 comes into contact with the tip of the brush of the power supply terminal 41 at a plurality of points when the power supply terminal 41 is inserted into the dielectric cylinder 11, and electrical connection can be ensured more reliably.

The spacer 6 is made of a conductive material, an insulating material, or the like having good corrosion resistance. The spacer 6 is provided to hold the dielectric cylinder 11 inside the ground electrode 10 in such a manner that the width of the discharge gap G is substantially constant in the circumferential direction of the discharge cell 2. The spacers 6 are formed of a tape-shaped member or a spring-shaped member having elasticity in a direction orthogonal to the axis of the discharge cell 2, and are uniformly arranged in the circumferential direction of the dielectric cylinder 11, so that variation in the gap of the discharge gap G can be suppressed.

The gap of the discharge gap G is preferably in the range of 0.1mm to 10 mm. If the gap of the discharge gap G is 0.1mm or more, it becomes easy to uniformly maintain the gap of the discharge gap G in the circumferential direction of the discharge cell 2. In addition, if the gap of the discharge gap G is 10mm or less, it is not necessary to increase the voltage for forming the discharge to a voltage more than necessary. The gap of the discharge gap G is particularly preferably in the range of 0.2mm to 0.6 mm. By setting the gap of the discharge gap G in this range, the specific surface area of the discharge gap G is increased, and the cooling efficiency of the discharge gap G can be improved.

The

manifolds

50 and 51 are made of a conductive material or an insulating material having good corrosion resistance. Since the discharge cell 2 needs to be made airtight, stainless steel, fluorine resin, or the like having good workability is preferably used for the

manifolds

50 and 51. In the case where a conductive material such as stainless steel is used for the

header pipes

50 and 51, it is necessary to secure an insulation distance between the high-voltage electrode 12 and the

header pipes

50 and 51 so as not to cause discharge between the high-voltage electrode 12 and the

header pipes

50 and 51. When the

header pipes

50 and 51 are made of an insulating material such as a fluororesin, the

header pipes

50 and 51 can be made compact because no electric discharge occurs between the high-voltage electrode 12 and the

header pipes

50 and 51.

In the ozone generating apparatus of the present embodiment, the raw material gas is caused to flow in one direction from the manifold 50 to the manifold 51. Therefore, the ozone generated in the discharge gap G always flows toward the manifold 51, and does not flow backward in the direction of the manifold 50. Therefore, when ozone is present in the discharge cells 2, the raw material gas is constantly circulated through the discharge cells 2, so that the backflow of ozone can be prevented, and the manifold 50, the introduction terminal 42, and the like can be prevented from being corroded by the backflow of ozone. Further, by preventing the backflow of ozone, general-purpose materials with poor corrosion resistance can be used for the header pipe 50, the introduction terminal, and the like, and therefore, the cost of the apparatus can be reduced.

The introduction terminal 42 is a terminal that electrically connects the high-voltage power supply 40 and the power supply terminal 41 while maintaining airtightness inside the manifold 50. As the introduction terminal 42, a general-purpose voltage introduction terminal composed of, for example, a conductor, an insulator, and a pad can be used. The blower fan 4 may be any fan capable of generating an air flow for cooling the discharge unit 2, and a general-purpose blower such as a propeller fan may be used.

The heat sink 3 is made of a material having good thermal conductivity, and preferably, a conductive material having good thermal conductivity such as aluminum or copper is used. In particular, by using aluminum which is inexpensive and has good workability, the manufacturing cost of the heat sink 3 can be reduced.

The raw material gas may contain at least oxygen, and air, oxygen, or a mixed gas of oxygen and an inert gas, or the like may be used. As the inert gas, a rare gas, carbon dioxide, or the like can be used. The pressure of the source gas supplied to the discharge gap G is preferably 0.05MPaG to 0.2 MPaG. If the ratio is 0.05MPaG or more, ozone is efficiently generated. In addition, if the pressure is 0.2MPaG or less, it is not necessary to increase the discharge pressure of the raw material gas supply device to a pressure higher than necessary. By setting the pressure of the raw material gas to 0.05MPaG to 0.2MPaG, the ozone generation efficiency can be economically improved. In addition, the following advantages are provided: even when the size of the ozone generating device is increased, by setting the ozone generating device to be less than 0.2MPaG, the ozone generating device does not conform to the second type pressure vessel regulation any more, and the legal restrictions are reduced, so that the device is easy to handle.

Next, the basic operation of the ozone generating apparatus of the present embodiment will be described. The raw material gas containing oxygen is introduced from the outside into the header pipe 50. The source gas introduced into the header pipe is led out from the header pipe 51 to the outside through the discharge gap G formed between the ground electrode 10 and the dielectric cylinder 11. The blower fan 4 is activated to blow cooling air to the radiator 3. Thereafter, the high voltage power supply 40 is operated to apply an ac high voltage between the ground electrode 10 and the high voltage electrode 12, thereby forming a discharge in the discharge gap G. Between the ground electrode 10 and the high-voltage electrode 12, discharge is formed uniformly in the circumferential direction and the axial direction of the discharge cell 2. During the passage of the raw material gas through the discharge gap G, oxygen contained in the raw material gas comes into contact with the electric spark to generate ozone. Since the discharge cells 2 are cylindrical members extending in a direction perpendicular to the paper surface in fig. 1, the raw material gas is repeatedly exposed to the spark while passing through the discharge gap G, and a large amount of ozone is generated. Heat generated inside the discharge cells 2 due to the discharge is transferred to the heat sink 3 by heat conduction, and is cooled by the cooling air.

Next, the mechanism of generating and decomposing ozone by electric discharge and the influence of the temperature T of the discharge gap G in the generation and decomposition of ozone will be described. When an alternating high voltage is applied between the ground electrode 10 and the high voltage electrode 12, electrons existing in the space of the discharge gap G by the high voltage are accelerated. At this time, when the oxygen molecule collides with the high-energy electron, the decomposition reaction represented by formula (1) occurs. Here, e is an electron, and O is atomic oxygen.

e+O₂→2O……(1)

A part of the atomic oxygen generated in formula (1) is converted into ozone by the reaction represented by formula (2). Here, M is a third body of reaction, representing any molecule or atom in the gas.

O+O₂+M→O₃+M……(2)

On the other hand, decomposition reactions of ozone represented by the formulas (3) and (4) also occur simultaneously in the discharge gap G.

O₃+M→O₂+O+M……(3)

O₃+e→O₂+O+e……(4)

The above is a mechanism for generating and decomposing ozone by electric discharge.

Next, the influence of the temperature of the discharge gap G will be described. Reaction rate constant k of formula (2) relating to generation of ozone₂And the reaction rate constant k of the formula (3) relating to decomposition₃Are represented by formula (5) and formula (6), respectively. Here, Ea and Eb are activation energies (positive values) determined by the type of the third body M.

k₂∝exp(Ea/T)……(5)

k₃∝exp(－Eb/T)……(6)

As expressed by the formulas (5) and (6), k is higher when the temperature T of the discharge gap G is higher₂Become smaller, k₃Becomes larger. That is, when the temperature T becomes high, the amount of ozone generated based on the reaction shown in formula (2) decreases, and the amount of ozone decomposed based on the reaction shown in formula (3) increases. Therefore, in order to efficiently generate ozone, it is important to keep the temperature of the discharge gap G low.

In the case where the ozone generation amount of the ozone generating device is to be increased, it is necessary to increase the number of discharge cells arranged in a row. Since the area over which the cooling wind is blown is enlarged as the number of discharge cells increases when the discharge cells are cooled by blowing the cooling wind from the direction orthogonal to the direction in which the plurality of discharge cells are arranged in one direction, the cooler needs to be increased.

In contrast, in the ozone generating device of the present embodiment, since the discharge cells are cooled by blowing the cooling air from the direction parallel to the direction in which the plurality of discharge cells are arranged in one direction, even if the number of discharge cells increases, the blowing distance is simply increased and the area through which the cooling air is blown is not increased. That is, the ozone generating apparatus of the present embodiment can suppress an increase in size without increasing the number of coolers even when the amount of ozone generated is increased.

In the ozone generating device of the present embodiment, 1 heat sink into which a plurality of discharge cells are inserted in a row is used, but a separate heat sink may be provided for each of the plurality of discharge cells. However, in the ozone generator in which the plurality of discharge cells are each provided with a separate radiator, a temperature difference may occur between the radiator on the upstream side of the cooling air and the radiator on the downstream side, and a large temperature difference may occur between the plurality of discharge cells. As a result, the ozone generation efficiency of the discharge cell located on the downstream side may be lowered. In contrast, in the ozone generating apparatus including 1 heat sink into which the plurality of discharge cells are inserted in line as in the present embodiment, the heat generated by the plurality of discharge cells is diffused throughout the heat sink via the heat sink, and thus the temperature difference between the plurality of discharge cells is reduced. As a result, a decrease in ozone generation efficiency of the discharge cells located on the downstream side can be avoided.

In the ozone generating apparatus of the present embodiment, an example in which an ac high voltage is used for discharge formation has been described, but the power supply applied to the present embodiment does not necessarily have to be an ac high voltage power supply as long as discharge can be stably formed, and may be a pulse power supply, for example.

The peak value, frequency, duty ratio, and the like of the voltage output from the high-voltage power supply can be appropriately determined according to various conditions such as the gap of the discharge gap G, the structure of the discharge cell such as the thickness of the dielectric cylinder, and the composition of the source gas. In general, the peak value of the voltage is preferably in the range of 1kV to 20 kV. If the peak value of the voltage is 1kV or more, stable discharge is formed, and if it is 50kV or less, it is not necessary to increase the size of the power supply and increase the electrical insulation.

In addition, the frequency of the voltage output from the high-voltage power supply can be appropriately selected from commercial frequencies (several tens of Hz) to ultra-short waves (several hundreds of MHz). When the voltage of the commercial frequency is used, the structure of the high-voltage power supply is simplified, and adjustment such as electrical matching is also facilitated, so that the manufacturing cost, maintenance cost, and the like can be suppressed. When a high-frequency voltage of several kHz to several hundred MHz is used, charged particles such as electrons generated by discharge are trapped in the discharge gap G under the high-frequency alternating-current electric field, and the reaction represented by formula (1) is easily performed, so that there is an advantage that the ozone generation efficiency is improved.

The fins 21 and the grooves 22 of the heat sink 3 may be formed such that the fins 21 are inclined with respect to the blowing direction of the cooling air W, or such that through holes or concave-convex portions are provided in the side surfaces of the fins 21, as long as the air blown from the blower fan 4 can be made to flow in the direction orthogonal to the axis of the discharge cell 2. By inclining the direction of blowing the cooling air W or providing through holes, concave-convex portions, and the like on the side surfaces of the fins 21, the heat conductivity from the fins 21 to the air is improved, and the cooling performance of the ozone generating apparatus 1 can be improved. The surface of the heat sink 3 may be treated by black painting, black alumite processing, or the like. By making the surface of the heat sink 3 black, heat radiation from the surface can be promoted, and the cooling performance of the ozone generating apparatus 1 can be improved.

In the case where the heat sink 3 is made of a conductive material, the ground electrode 10 and the heat sink 3 can be electrically connected to each other to have the same potential. With this configuration, the ground potential of the high-voltage power supply 40 can be connected to the heat sink 3, whereby the ground electrode 10 can be set to the same potential as the ground potential of the high-voltage power supply 40. With this configuration, it is not necessary to directly connect the ground electrode 10 and the high-voltage power supply 40, and the structure of the ozone generator is simplified.

Further, by constituting the heat sink 3 with a conductive material having excellent corrosion resistance, the heat sink 3 can also serve as the ground electrode 10. Fig. 4 is a sectional view showing the structure of another ozone generating device of the present embodiment. As shown in fig. 4, in this ozone generating apparatus, the discharge cell 2 includes a heat sink 3 serving also as a ground electrode, a dielectric cylinder 11, and a high-voltage electrode 12 serving as an inner electrode. A spacer 6 is provided between the heat sink 3 and the dielectric cylinder 11 of the discharge cell 2 to form a discharge gap G. The ozone generator thus constructed has a reduced number of parts and a reduced manufacturing cost. Even when a general-purpose conductive material having poor corrosion resistance is used as the heat sink 3, the surface exposed to the discharge gap G is covered with an insulating material having good corrosion resistance, so that the heat sink 3 can also serve as a ground electrode.

In the present embodiment, the blower fan is used as the cooler and air is used as the refrigerant, but a liquid circulation pump may be used as the cooler and a liquid refrigerant such as water or freon may be used as the refrigerant. By using the liquid circulation pump as the cooler and the liquid refrigerant as the refrigerant, the cooling performance of the ozone generating device can be further improved. However, as shown in the present embodiment, when the blower fan is used as the cooler and air is used as the refrigerant, the preparation of the refrigerant, the circulation pipe, and the like are not required, and the ozone generating apparatus can be made compact, or the manufacturing cost and the maintenance cost of the ozone generating apparatus can be suppressed, as compared with the case of using the liquid circulation pump and the liquid refrigerant.

Embodiment 2.

Fig. 5 is a sectional view showing the structure of the ozone generating apparatus of embodiment 2. In fig. 5, the ozone generating device 1 includes a plurality of discharge cells 2 in a cylindrical shape, a heat sink 3 having insertion holes into which the discharge cells 2 are inserted, and a blower fan 4 that outputs cooling air W that cools the heat sink 3. The ozone generating device 1 of the present embodiment includes a heat relaxing section 23 between the discharge cell 2 and the insertion hole of the heat sink 3.

Fig. 6 is a sectional view as seen from the direction of line B-B of fig. 1. As shown in fig. 6, heat relaxing unit 23 is disposed in contact with the outer peripheral surface of discharge cell 2 and the inner peripheral surface of the insertion hole of heat sink 3.

Fig. 7 is a perspective view of the heat sink 3. The heat sink 3 includes 1 insertion hole 31 so that 3 discharge cells 2 can be arranged in the y-axis direction in the direction in which the cooling air W is output. The insertion hole 31 is inserted with a heat relaxing portion 23, and the heat relaxing portion 23 includes 3 holes into which the discharge cells 2 arranged in the y-axis direction can be inserted. The heat relaxing portion 23 is disposed in contact with the outer peripheral surface of the discharge cell inserted into the 3 holes and the inner peripheral surface of the insertion hole 31 of the heat sink 3. The heat relaxing portion 23 is made of a material having good thermal conductivity, and is preferably made of copper, silver, aluminum, or the like.

In the ozone generating device having such a configuration, as in embodiment 1, since the discharge cells are cooled by blowing the cooling air from the direction parallel to the direction in which the plurality of discharge cells are arranged in one direction, even if the number of discharge cells increases, the blowing distance is increased and the area through which the cooling air is blown is not increased. That is, the ozone generating apparatus of the present embodiment can suppress an increase in size even when the amount of ozone generated is increased.

In the ozone generating device of the present embodiment, since the heat relaxing unit 23 having good thermal conductivity is provided in contact with all the outer peripheral surfaces of the discharge cells 2, the temperatures of all the discharge cells 2 are equalized, and a decrease in the ozone generation efficiency of the discharge cell 2 located on the downstream side can be suppressed. Further, since the provision of the heat relaxation portion 23 having good thermal conductivity relaxes the high thermal conductivity required for the heat sink 3, stainless steel having poor thermal conductivity but good corrosion resistance, brass having good workability, or the like can be used as the heat sink 3.

Embodiment 3.

Fig. 8 is a sectional view showing the structure of an ozone generating device of embodiment 3. The ozone generating device of the present embodiment is a device provided with an air tunnel 24 in the same configuration as that of embodiment 1. As shown in fig. 8, the ozone generating device 1 of the present embodiment includes an air tunnel 24 that covers the periphery of the radiator 3. The cooling air W output from the air blowing fan flows through a space between the radiator 3 and the air tunnel 24. The wind tunnel 24 may be made of any material as long as it has mechanical strength against the wind pressure of the cooling wind.

In the ozone generating device configured as described above, since the flow range of the cooling air W output from the blower fan is limited to the inside of the wind tunnel, the air flow in contact with the radiator 3 increases, and the cooling performance of the ozone generating device 1 can be improved.

Fig. 9 is a sectional view showing the structure of another ozone generating device of the present embodiment. As shown in fig. 9, the inner wall of the air tunnel 24 of the ozone generating device 1 may be brought into contact with the fins 21 of the radiator 3. In the ozone generator configured as described above, heat conduction from the fins 21 of the heat sink 3 to the wind tunnel 24 is generated, and the cooling performance of the ozone generator 1 can be further improved. In such a configuration, the wind tunnel 24 is preferably made of aluminum or the like having good thermal conductivity.

Embodiment 4.

Fig. 10 is a schematic diagram showing the structure of an ozone generator unit according to embodiment 4. As shown in fig. 10, in the ozone generating device unit 70 of the present embodiment, 4 ozone generating devices 1 shown in embodiments 1 to 3 are provided in a stacked manner in a direction orthogonal to a direction parallel to the axial direction of the discharge cells and a direction in which the discharge cells 2 are arranged.

In the ozone generator unit 70 configured as described above, when the gas pipes are connected in parallel to the respective ozone generators 1 to operate, ozone in an amount proportional to the number of ozone generators 1 can be generated with a small installation area of the ozone generators. In addition, when the gas pipes are connected in series to the respective ozone generating devices 1 to operate them, the raw material gas repeatedly flows through the discharge gaps, and therefore, high-concentration ozone can be obtained with a small installation area of the devices.

In the ozone generating device unit 70 of the present embodiment, a high voltage can be applied in parallel to each ozone generating device 1 from a single high voltage power supply. By forming such a structure, the number of high-voltage power sources can be reduced, and manufacturing cost and maintenance cost can be reduced. In the ozone generating device unit 70 of the present embodiment, a high-voltage power supply may be provided for each ozone generating device 1. By providing each ozone generating device 1 with a high-voltage power supply, the amount of ozone generated can be individually adjusted in each ozone generating device 1, and therefore the amount of ozone generated as the ozone generating device unit 70 can be controlled with high accuracy.

In the ozone generator unit 70 configured as described above, even when 1 ozone generator 1 fails, the ozone generator unit 70 can be repaired by replacing only the failed ozone generator 1, so that the time required for maintenance of the ozone generator unit 70 is shortened, and the maintenance cost can be reduced.

Various exemplary embodiments are described in the present application, but the various features, aspects, and functions described in 1 or more embodiments are not limited to the application in a specific embodiment, and can be applied to the embodiments alone or in various combinations.

Therefore, numerous modifications not illustrated are assumed within the technical scope disclosed in the present application. For example, the case where at least 1 component is modified, added, or omitted is included, and the case where at least 1 component is extracted and combined with a component of another embodiment is also included.

Claims

1. An ozone generating device is characterized by comprising:

a plurality of discharge cells having a cylindrical shape, which generate ozone by discharge;

a heat sink having an insertion hole into which the plurality of discharge cells are inserted in an aligned manner in a direction orthogonal to an axial direction of the discharge cells; and

a cooler that outputs a refrigerant that cools the radiator,

wherein a direction in which the cooler outputs the refrigerant is a direction parallel to a direction in which the plurality of discharge cells are arranged.

2. The ozone generating apparatus as recited in claim 1,

the heat sink includes a heat relaxing portion disposed in contact with an outer peripheral surface of the discharge cell and an inner peripheral surface of the insertion hole of the heat sink.

3. The ozone generating apparatus according to claim 1 or 2,

the air duct is provided to close the refrigerant around the radiator.

4. The ozone generating apparatus as recited in claim 3,

and a part of the radiator is in contact with the inner circumferential surface of the wind tunnel.

5. The ozone generating apparatus according to any one of claims 1 to 4,

the heat sink includes fins and grooves on an outer peripheral portion thereof.

6. The ozone generating apparatus as recited in claim 5,

the fin has a plurality of concave-convex portions on a side surface.

7. The ozone generating apparatus according to any one of claims 1 to 6,

a raw material gas is introduced from one end of the discharge unit, and an ozone-containing gas is discharged from the other end of the discharge unit.

8. An ozone generating device unit is characterized in that,

the ozone generating apparatus according to any one of claims 1 to 7, wherein a plurality of the ozone generating apparatuses are provided in a stacked manner in a direction orthogonal to an axial direction of the discharge cells and a direction in which the discharge cells are arranged.