JP6608571B1 - Ozone generator and ozone generator set - Google Patents

Abstract

Even if the number of discharge units is increased in order to increase the amount of ozone generated, the object is to suppress the increase in the size of the ozone generator. A plurality of cylindrical discharge units (2) that generate ozone by discharge, a radiator (3) having an insertion hole into which a plurality of discharge units are inserted in a direction orthogonal to the axial direction of the discharge unit, and a radiator The ozone generator (1) includes a cooler that sends out a refrigerant that cools the refrigerant, and the direction in which the cooler sends out the refrigerant is parallel to the direction in which the plurality of discharge units are arranged.

Description

  The present application relates to an ozone generator and an ozone generator set.

Ozone (O ₃ ) has a strong oxidizing power. Ozone is used in various fields such as water purification, sterilization, sterilization and deodorization in the water and sewage treatment field, and surface cleaning in the semiconductor manufacturing field because of its strong oxidizing power. With the recent increase in environmental awareness and increasing demand for electronic devices, the demand for highly efficient and compact ozone generators is increasing.

As a method for industrially generating ozone, oxygen (O ₂ ) or a raw material gas containing oxygen is caused to flow through a discharge gap, an electric field is applied to the discharge gap to generate a silent discharge, and ozone is generated with this discharge energy. The method is common. In the current ozone generator, the energy that contributes to ozone generation in the input power is about 10%, and the remaining 90% is released as thermal energy into the discharge gap. When the discharge gap becomes a high temperature due to this thermal energy, the generated ozone is decomposed by heat and the efficiency of ozone generation is significantly reduced. Therefore, in the ozone generator, the discharge gap is generally cooled by a cooler.

  As an ozone generator equipped with a cooler, a plurality of cylindrical discharge units are arranged in one direction, air cooling fins in contact with the discharge units are installed, and a direction orthogonal to the direction in which the plurality of discharge units are arranged in one direction An ozone generator that blows cooling air from the direction to cool the discharge unit has been disclosed (see, for example, Patent Document 1).

Japanese Patent Laying-Open No. 2015-67464

  The cylindrical discharge unit is advantageous in that the specific surface area of the discharge gap is large in order to maintain stable discharge and obtain high ozone generation efficiency. Moreover, there is a limit to the amount of ozone generated by one discharge unit. Therefore, when increasing the amount of ozone generated, it is necessary to lengthen the discharge units and increase the number of discharge units arranged side by side. In conventional ozone generators, cooling air is blown from a direction orthogonal to the direction in which a plurality of discharge units are arranged in one direction to cool the discharge units, so the number of discharge units is increased in order to increase the amount of ozone generated. If it increases, it is necessary to expand the area which blows cooling air. Therefore, it is necessary to increase the number of coolers as the number of discharge units increases, and there is a problem that the ozone generator becomes large.

  The present application has been made to solve the above-described problems, and an object thereof is to suppress the increase in the size of an ozone generator even when the number of discharge units is increased in order to increase the amount of ozone generated.

Ozone generator of the present application includes a plurality of discharge units cylindrical for generating ozone by discharge, a plurality of insertion holes in which a plurality of discharge units in a direction perpendicular to the axial direction are inserted respectively arranged in the discharge unit A radiator and a cooler that sends out the refrigerant that cools the radiator are provided, and the direction in which the cooler sends out the refrigerant is parallel to the direction in which the plurality of discharge units are arranged.

  Since the ozone generator of the present application has a direction in which the cooler delivers the refrigerant in a direction parallel to the direction in which the plurality of discharge units are arranged, even when the number of discharge units is increased in order to increase the amount of ozone generated, An increase in the size of the ozone generator can be suppressed.

1 is a cross-sectional view of an ozone generator according to Embodiment 1. FIG. 1 is a cross-sectional view of an ozone generator according to Embodiment 1. FIG. 1 is a perspective view of a radiator according to Embodiment 1. FIG. 1 is a cross-sectional view of an ozone generator according to Embodiment 1. FIG. It is sectional drawing of the ozone generator which concerns on Embodiment 2. FIG. It is sectional drawing of the ozone generator which concerns on Embodiment 2. FIG. It is a perspective view of the heat radiator which concerns on Embodiment 2. FIG. FIG. 4 is a cross-sectional view of an ozone generator according to Embodiment 3. FIG. 4 is a cross-sectional view of an ozone generator according to Embodiment 3. It is a schematic diagram of the ozone generator set which concerns on Embodiment 4.

  Hereinafter, an ozone generator and an ozone generator set according to an embodiment for carrying out the present application will be described in detail with reference to the drawings. In the drawings, the same reference numerals indicate the same or corresponding parts.

Embodiment 1 FIG.
1 is a cross-sectional view showing a configuration of an ozone generator according to Embodiment 1. FIG. In FIG. 1, an ozone generator 1 includes a plurality of cylindrical discharge units 2, a radiator 3 having an insertion hole into which the discharge unit 2 is inserted, and a blower fan 4 as a cooler for cooling the radiator 3. It has. The discharge units 2 are arranged side by side in a direction orthogonal to the axial direction of the discharge units 2. The blower fan 4 sends out the cooling air W. The direction in which the cooling air W is sent out is a direction parallel to the direction in which the discharge units 2 are arranged. The discharge unit 2 includes a ground electrode 10 that is an outer electrode, a dielectric cylinder 11, and a high-voltage electrode 12 that is an inner electrode. A discharge gap G is formed between the dielectric cylinder 11 of the discharge unit 2 and the ground electrode 10. Here, the axial direction of the cylindrical discharge unit 2 is the x-axis direction, the direction in which the discharge units 2 are arranged is the y-axis direction, and the direction orthogonal to the x-axis direction and the y-axis direction is the z-axis direction. The cooling air W sent from the blower fan 4 flows in the y-axis direction, which is the same direction as the direction in which the discharge units 2 are arranged.

  FIG. 2 is a cross-sectional view seen from the direction of line AA in FIG. As shown in FIG. 2, the discharge unit 2 includes a ground electrode 10 that is a cylindrical conductive member, and a cylindrical dielectric cylinder 11 having a central axis that coincides with the central axis of the ground electrode 10 therein. Are arranged concentrically. The dielectric cylinder 11 is supported inside the ground electrode 10 by the spacer 6, and a discharge gap G is formed between the ground electrode 10 and the dielectric cylinder 11. The high voltage electrode 12 is a thin film conductive member formed on the inner surface of the dielectric cylinder 11. One end of the dielectric cylinder 11 is closed so that gas does not flow through the dielectric cylinder 11. The other end of the dielectric cylinder 11 is opened to supply a high voltage. The grounding electrode 10, the dielectric cylinder 11, and the high voltage electrode 12 constitute the discharge unit 2. At one end of the discharge unit 2, a header 50 into which a source gas containing oxygen is introduced into the discharge unit 2 is provided. The other end of the discharge unit 2 is provided with a header 51 from which ozone-containing gas containing ozone is led out from the discharge unit 2. In FIG. 2, the arrow 60 represents the flow direction of the source gas, and the arrow 61 represents the flow direction of the ozone-containing gas. In FIG. 2, the cooling air W is sent in a direction perpendicular to the paper surface.

  The ozone generator 1 includes a plurality (three in FIG. 1) of discharge units 2. Each discharge unit 2 is arranged at equal intervals in the blowing direction of the blower fan 4. The axial direction of each discharge unit 2 is a direction orthogonal to the blowing direction. Therefore, the axes of the respective discharge units 2 are parallel to each other.

  Except for the introduction part and the lead-out part of the source gas and the ozone-containing gas, the discharge unit 2 is configured to be airtight. A feed terminal 41 is inserted into one end of the dielectric cylinder 11 of the discharge unit 2 that is open, and the feed terminal 41 is in electrical contact with the high voltage electrode 12. The power supply terminal 41 is connected to the high voltage power supply 40 via an introduction terminal 42 provided on the header 50. The ground terminal of the high voltage power supply 40 is electrically connected so as to have the same potential as the ground electrode 10. An alternating high voltage is applied from the high voltage power supply 40 to the high voltage electrode 12 through the power supply terminal 41, and a discharge is generated in the discharge gap G by the alternating high voltage.

  FIG. 3 is a perspective view of the radiator 3. The radiator 3 includes three insertion holes 31 arranged in the y-axis direction so that the three discharge units 2 can be arranged in the y-axis direction in the direction in which the cooling air W is sent out. The ground electrode 10 of the discharge unit inserted into the insertion hole 31 and the inner wall of the insertion hole 31 are configured to contact each other. Further, the outer peripheral portion of the radiator 3 has fins 21 extending in a direction parallel to the y-axis direction in which the cooling air W is sent out, and grooves 22 formed between the fins 21. The cooling air W sent from the blower fan passes through the groove 22. That is, the direction of the cooling air sent out by the blower fan 4 is a direction parallel to the direction in which the plurality of discharge units 2 are arranged.

  In the ozone generator of the present embodiment, the ground electrode 10 is made of a conductive material, and it is desirable to use a metal material having excellent corrosion resistance such as stainless steel or titanium. The ground electrode 10 can be made thin as long as its mechanical strength can be maintained, or can be a thin film formed on the inner surface of the radiator 3. By making the ground electrode 10 thin or thin, the thermal conductivity in the thickness direction of the ground electrode 10 can be improved, and the cooling performance of the ozone generator 1 can be improved. Further, the surface exposed to the discharge gap G of the ground electrode 10 may be covered with an insulating material having excellent corrosion resistance. By covering the ground electrode 10 with an insulating material having excellent corrosion resistance, a general-purpose conductive material having poor corrosion resistance can be used for the ground electrode 10, and the manufacturing cost of the ozone generator 1 can be reduced. Can do. Further, by applying heat-dissipating grease, conductive grease or the like between the ground electrode 10 and the radiator 3, a minute gap can be filled between the ground electrode 10 and the radiator 3 with these greases. As a result, the thermal conductivity between the ground electrode 10 and the radiator 3 can be improved.

  The dielectric cylinder 11 is made of an insulating material, and ceramics having excellent corrosion resistance such as quartz, borosilicate glass, and alumina can be used.

  The high voltage electrode 12 is made of a conductive material, and is preferably a conductive thin film formed on the inner surface of the dielectric cylinder 11 by a method such as wet coating, plating, thermal spraying, vacuum deposition, or sputtering. By forming the high voltage electrode 12 by these methods, the adhesion between the dielectric cylinder 11 and the high voltage electrode 12 can be improved, and an abnormality that occurs between the dielectric cylinder 11 and the high voltage electrode 12 can be achieved. Discharge can be suppressed. Moreover, by forming the high voltage electrode 12 as a thin film, the weight of the high voltage electrode 12 can be reduced, and the mechanical strength required for the dielectric cylinder 11 and the spacer 6 can be reduced.

  The power supply terminal 41 is made of a conductive material, and it is particularly desirable to use a metal material having excellent corrosion resistance such as stainless steel or titanium. The power supply terminal 41 is electrically connected to the high voltage electrode 12 by a method such as a crimp terminal, soldering, or mechanical contact. In particular, by making the tip of the power supply terminal 41 into a brush shape, when the power supply terminal 41 is inserted into the dielectric cylinder 11, the high voltage electrode 12 and the tip of the brush of the power supply terminal 41 are in contact at a plurality of points. This is preferable because an electrical connection can be ensured reliably.

  The spacer 6 is made of a conductive material or an insulating material having excellent corrosion resistance. The spacer 6 is provided to hold the dielectric cylinder 11 inside the ground electrode 10 so that the width of the discharge gap G is approximately constant in the circumferential direction of the discharge unit 2. The spacer 6 is a tape-shaped component or a spring-shaped component having elasticity in a direction perpendicular to the axis of the discharge unit 2 and is evenly arranged in the circumferential direction of the dielectric cylinder 11, so that the gap of the discharge gap G can be varied. Can be suppressed.

  The gap of the discharge gap G is desirably in the range of 0.1 mm to 10 mm. If the gap of the discharge gap G is 0.1 mm or more, it becomes easy to keep the gap of the discharge gap G uniform in the circumferential direction of the discharge unit 2. Moreover, if the gap of the discharge gap G is 10 mm or less, it is not necessary to increase the voltage for forming the discharge more than necessary. The gap of the discharge gap G is particularly preferably in the range of 0.2 mm to 0.6 mm. By setting the gap of the discharge gap G in this range, the specific surface area of the discharge gap G increases, and the cooling efficiency of the discharge gap G can be improved.

  The headers 50 and 51 are made of a conductive material or an insulating material excellent in corrosion resistance. Since it is necessary to make the discharge unit 2 airtight, the headers 50 and 51 are preferably made of stainless steel, fluororesin or the like having excellent workability. When a conductive material such as stainless steel is used for the headers 50 and 51, the discharge between the high voltage electrode 12 and the headers 50 and 51 is prevented from occurring between the high voltage electrode 12 and the headers 50 and 51. It is necessary to secure an insulation distance. When an insulating material such as a fluororesin is used for the headers 50 and 51, no discharge is generated between the high voltage electrode 12 and the headers 50 and 51, so that the headers 50 and 51 can be reduced in size.

  In the ozone generator of the present embodiment, the source gas is circulated in one direction from the header 50 toward the header 51. Therefore, the ozone generated in the discharge gap G always flows toward the header 51 and does not flow backward in the direction of the header 50. Therefore, when ozone is present in the discharge unit 2, the backflow of ozone can be prevented by always circulating the source gas in the discharge unit 2, and the header 50, the introduction terminal 42, etc. corrode with the backflowed ozone. Can be prevented. In addition, by preventing the backflow of ozone, a general-purpose material having poor corrosion resistance can be applied to the header 50, the introduction terminal, and the like, so that the device cost can be reduced.

  The introduction terminal 42 is a terminal that electrically connects the high-voltage power supply 40 and the power supply terminal 41 while maintaining the airtightness inside the header 50. As the introduction terminal 42, for example, a general-purpose voltage introduction terminal composed of a conductor, an insulator, and packing can be used. The blower fan 4 only needs to be able to create an airflow for cooling the discharge unit 2, and a general-purpose blower such as a propeller fan can be used.

  The radiator 3 is made of a material having excellent thermal conductivity, and it is preferable to use a conductive material having excellent thermal conductivity such as aluminum or copper. In particular, the manufacturing cost of the radiator 3 can be reduced by using aluminum that is inexpensive and excellent in workability.

  The source gas only needs to contain at least oxygen, and air, oxygen, a mixed gas of oxygen and an inert gas, or the like can be used. As the inert gas, rare gas, carbon dioxide or the like is used. The pressure of the raw material gas supplied to the discharge gap G is desirably 0.05 MPaG to 0.2 MPaG. If it is 0.05 MPaG or more, ozone is efficiently generated. Moreover, if it is 0.2 MPaG or less, it is not necessary to make the discharge pressure of a raw material gas supply apparatus higher than necessary. By setting the pressure of the raw material gas to 0.05 MPaG to 0.2 MPaG, the ozone generation efficiency can be improved economically. In addition, even when the ozone generator is increased in size, by making it less than 0.2 MPaG, the ozone generator does not correspond to the type 2 pressure vessel regulations, and the legal restrictions are reduced and the handling becomes easy. There are also advantages such as.

  Next, the basic operation of the ozone generator according to this embodiment will be described. A source gas containing oxygen is introduced into the header 50 from the outside. The source gas introduced into the header passes through the discharge gap G formed between the ground electrode 10 and the dielectric cylinder 11 and is led out from the header 51 to the outside. In addition, the blower fan 4 is activated, and cooling air is blown to the radiator 3. Thereafter, the high voltage power supply 40 is operated, an alternating high voltage is applied between the ground electrode 10 and the high voltage electrode 12, and a discharge is formed in the discharge gap G. Discharge is uniformly formed between the ground electrode 10 and the high voltage electrode 12 in the circumferential direction and the axial direction of the discharge unit 2. In the process in which the source gas passes through the discharge gap G, oxygen contained in the source gas comes into contact with the discharge, and ozone is generated. Since the discharge unit 2 is a cylindrical member extending in a direction perpendicular to the paper surface in FIG. 1, when passing through the discharge gap G, the source gas is repeatedly exposed to discharge and a large amount of ozone is generated. The heat generated inside the discharge unit 2 by the discharge is transferred to the radiator 3 by heat conduction and cooled by the cooling air.

Next, the mechanism by which ozone is generated and decomposed by discharge and the influence of the temperature T of the discharge gap G in the generation and decomposition of ozone will be described. When an alternating high voltage is applied between the ground electrode 10 and the high voltage electrode 12, electrons present in the space of the discharge gap G are accelerated by the high voltage. At this time, when oxygen molecules collide with high-energy electrons, a decomposition reaction represented by the formula (1) occurs. Here, e is an electron, and O is atomic oxygen.
e + O ₂ → 2O (1)

Part of the atomic oxygen generated by the formula (1) becomes ozone by the reaction represented by the formula (2). Here, M is the third body of the reaction and represents any molecule or atom in the gas.
O + O ₂ + M → O ₃ + M (2)

On the other hand, in the discharge gap G, ozone decomposition reaction represented by the equations (3) and (4) also occurs simultaneously.
O ₃ + M → O ₂ + O + M (3)
O ₃ + e → O ₂ + O + e (4)
The above is the mechanism by which ozone is generated and decomposed by electric discharge.

Next, the influence of the temperature of the discharge gap G will be described. The reaction rate constant k _{2 in} the formula (2) related to the generation of ozone and the reaction rate constant k _{3 in the} formula (3) related to the decomposition are expressed by the formula (5) and the formula (6), respectively. Here, Ea and Eb are activation energies (positive values) determined by the type of the third body M, respectively.
k ₂ ∝exp (Ea / T) (5)
k ₃ ∝exp (−Eb / T) (6)

(5) As represented by the formula and (6), the temperature T of the discharge gap G is increased, _{k 2} is small, _{k 3} is increased. That is, when the temperature T increases, the amount of ozone generated by the reaction shown in the equation (2) decreases, and the amount of ozone decomposed by the reaction shown in the equation (3) increases. Therefore, in order to generate ozone efficiently, it is important to keep the temperature of the discharge gap G low.

  When increasing the amount of ozone generated by the ozone generator, it is necessary to increase the number of discharge units arranged side by side. When cooling air is blown from a direction orthogonal to the direction in which a plurality of discharge units are arranged in one direction to cool the discharge unit, the cooler is increased in order to increase the area for blowing the cooling air as the number of discharge units increases. Need to increase.

  On the other hand, the ozone generator of the present embodiment cools the discharge unit by blowing cooling air from a direction parallel to the direction in which the plurality of discharge units are arranged in one direction. Even if it increases, the area which blows the cooling air is not enlarged only by the air blowing distance extending. That is, the ozone generator of the present embodiment does not need to increase the number of coolers even when the amount of ozone generation is increased, and can suppress an increase in size.

  In the ozone generator according to the present embodiment, one radiator in which a plurality of discharge units are inserted side by side is used, but each of the plurality of discharge units may be provided with an individual radiator. However, in an ozone generator in which a plurality of discharge units are provided with individual radiators, a temperature difference occurs between the radiator on the upstream side of the cooling air and the radiator located on the downstream side, and the gap between the plurality of discharge units. A large temperature difference may occur. As a result, the ozone generation efficiency of the discharge unit located on the downstream side may decrease. On the other hand, in the ozone generator having one radiator in which a plurality of discharge units are inserted side by side as in the present embodiment, the heat generated by the plurality of discharge units is diffused throughout the radiator through the radiator. Therefore, the temperature difference between the plurality of discharge units is reduced. As a result, it is possible to avoid a decrease in ozone generation efficiency of the discharge unit located on the downstream side.

  In the ozone generator according to the present embodiment, an example in which an alternating high voltage is used for discharge formation has been described. However, a power source applied to the present embodiment may not necessarily have a high alternating current if a stable discharge can be formed. It is not necessary to be a voltage power supply, and may be a pulse power supply, for example.

  In addition, the peak value, frequency, duty ratio, etc. of the voltage output from the high voltage power source depend on various conditions such as the gap of the discharge gap G, the structure of the discharge unit such as the thickness of the dielectric cylinder, and the composition of the source gas It can be determined accordingly. In general, the peak value of the voltage is preferably in the range of 1 kV to 20 kV. If the peak value of the voltage is 1 kV or more, a stable discharge is formed, and if it is 50 kV or less, it is not necessary to increase the size of the power source and to enhance the electrical insulation.

  Moreover, the frequency of the voltage output from the high voltage power supply can be appropriately selected from a commercial frequency (several tens of Hz) to an ultra high frequency (several hundreds of MHz). When a commercial frequency voltage is used, the structure of the high-voltage power supply is simplified, and adjustments such as electrical matching are facilitated, and manufacturing costs and maintenance costs can be suppressed. When using a high-frequency voltage of several kHz to several hundred MHz, charged particles such as electrons generated by the discharge are trapped in the discharge gap G by a high-frequency AC electric field, and the reaction shown in the formula (1) easily proceeds. There is an advantage that the generation efficiency of ozone is improved.

  The fins 21 and the grooves 22 of the radiator 3 only have to be able to circulate the air blown from the blower fan 4 in a direction orthogonal to the axis of the discharge unit 2, and the fins 21 are inclined with respect to the direction of the cooling air W. Alternatively, a through hole, a convex recess, or the like may be provided on the side surface of the fin 21. By inclining the cooling air W with respect to the direction of the air flow or by providing a through hole, a convex recess or the like on the side surface of the fin 21, the heat transfer rate from the fin 21 to the air is improved. Cooling performance can be improved. Further, the surface of the radiator 3 may be subjected to processing such as black painting or black alumite processing. By making the surface of the radiator 3 black, the heat radiation of the surface can be promoted and the cooling performance of the ozone generator 1 can be improved.

  Further, when the radiator 3 is made of a conductive material, the ground electrode 10 and the radiator 3 can be electrically connected to have the same potential. With this configuration, the ground electrode 10 can be set to the same potential as the ground potential of the high voltage power supply 40 by connecting the ground potential of the high voltage power supply 40 to the radiator 3. With this configuration, there is no need to directly connect the ground electrode 10 and the high voltage power supply 40, and the configuration of the ozone generator is simplified.

  Furthermore, the heat radiator 3 can also serve as the ground electrode 10 by configuring the heat radiator 3 with a conductive material having excellent corrosion resistance. FIG. 4 is a cross-sectional view showing a configuration of another ozone generator according to the present embodiment. As shown in FIG. 4, in this ozone generator, the discharge unit 2 includes a radiator 3 that also serves as a ground electrode, a dielectric cylinder 11, and a high-voltage electrode 12 that is an inner electrode. A spacer 6 is installed between the radiator 3 of the discharge unit 2 and the dielectric cylinder 11 to form a discharge gap G. The ozone generator configured in this way has a reduced number of parts and reduced manufacturing costs. Even when a general-purpose conductive material having inferior corrosion resistance is used for the radiator 3, the surface exposed to the discharge gap G is covered with an insulating material having excellent corrosion resistance, so that the radiator 3 Can also be used as a ground electrode.

  In this embodiment, a blower fan is used as a cooler and air is used as a coolant. However, a liquid circulation pump can be used as a cooler, and a liquid coolant such as water or chlorofluorocarbon can be used as a coolant. By using the liquid circulation pump as the cooler and using the liquid refrigerant as the refrigerant, the cooling performance of the ozone generator can be further improved. However, as shown in the present embodiment, when a blower fan is used as a cooler and air is used as a refrigerant, preparation of refrigerant and circulation piping are compared with a case where a liquid circulation pump and a liquid refrigerant are used. The ozone generator can be made compact, and the manufacturing cost and maintenance cost of the ozone generator can be suppressed.

Embodiment 2. FIG.
FIG. 5 is a cross-sectional view showing a configuration of an ozone generator according to Embodiment 2. In FIG. 5, an ozone generator 1 includes a plurality of cylindrical discharge units 2, a radiator 3 having an insertion hole into which the discharge unit 2 is inserted, and a blower that sends cooling air W that cools the radiator 3. Fan 4 is provided. The ozone generator 1 according to the present embodiment includes a thermal relaxation portion 23 between the discharge unit 2 and the insertion hole of the radiator 3.
6 is a cross-sectional view seen from the direction of the line BB in FIG. As shown in FIG. 6, the thermal relaxation portion 23 is disposed in contact with the outer peripheral surface of the discharge unit 2 and the inner peripheral surface of the insertion hole of the radiator 3.
FIG. 7 is a perspective view of the radiator 3. The radiator 3 includes one insertion hole 31 so that the three discharge units 2 can be arranged side by side in the y-axis direction in the direction in which the cooling air W is sent out. Further, a thermal relaxation portion 23 having three holes into which the discharge units 2 arranged side by side in the y-axis direction can be inserted is inserted into the insertion hole 31. The thermal relaxation portion 23 is disposed in contact with the outer peripheral surface of the discharge unit inserted into the three holes and the inner peripheral surface of the insertion hole 31 of the radiator 3. The thermal relaxation portion 23 is made of a material having excellent thermal conductivity, and is preferably made of copper, silver, aluminum or the like.

  Since the ozone generator configured in this manner cools the discharge unit by blowing cooling air from a direction parallel to the direction in which the plurality of discharge units are arranged in one direction, as in the first embodiment. Even if the number of discharge units is increased, the area for blowing cooling air is not enlarged only by extending the blowing distance. That is, the ozone generator of the present embodiment can suppress an increase in size even when the amount of ozone generation is increased.

  Moreover, in the ozone generator of this Embodiment, since the thermal relaxation part 23 excellent in heat conductivity was provided so that it might contact all the outer peripheral surfaces of the discharge unit 2, the temperature of all the discharge units 2 was averaged. And the fall of the ozone generation efficiency of the discharge unit 2 located in the downstream can be suppressed. Furthermore, since the high thermal conductivity required for the radiator 3 is relaxed by providing the thermal relaxation portion 23 with excellent thermal conductivity, the thermal conductivity of the radiator 3 is inferior but excellent in corrosion resistance. Stainless steel and brass with excellent workability can be applied.

Embodiment 3 FIG.
FIG. 8 is a cross-sectional view showing a configuration of an ozone generator according to Embodiment 3. The ozone generator of the present embodiment is configured by providing a wind tunnel 24 in the same configuration as that of the first embodiment. As shown in FIG. 8, the ozone generator 1 according to the present embodiment includes a wind tunnel 24 that covers the periphery of the radiator 3. The cooling air W sent from the blower fan flows through the space between the radiator 3 and the wind tunnel 24. The wind tunnel 24 only needs to have mechanical strength against the wind pressure of the cooling air, and a general-purpose material can be applied.

  In the ozone generator configured in this way, the flow range of the cooling air W sent from the blower fan is limited to the inside of the wind tunnel, so that the airflow contacting the radiator 3 increases and the cooling performance of the ozone generator 1 is increased. Can be improved.

  FIG. 9 is a cross-sectional view showing a configuration of another ozone generator according to the present embodiment. As shown in FIG. 9, the inner wall of the wind tunnel 24 of the ozone generator 1 may be brought into contact with the fins 21 of the radiator 3. In the ozone generator configured as described above, heat conduction occurs from the fins 21 of the radiator 3 to the wind tunnel 24, and the cooling performance of the ozone generator 1 can be further improved. In such a configuration, the wind tunnel 24 is preferably made of aluminum or the like having excellent thermal conductivity.

Embodiment 4 FIG.
FIG. 10 is a schematic diagram showing a configuration of an ozone generator set according to Embodiment 4. As shown in FIG. 10, the ozone generator set 70 of the present embodiment has the ozone generator 1 shown in the first to third embodiments arranged in a direction parallel to the axial direction of the discharge unit and the discharge unit 2. Four are stacked in a direction perpendicular to the direction.

  In the ozone generator set 70 configured as described above, when operating by connecting gas pipes in parallel to the respective ozone generators 1, the installation area of the device is small and the number of ozone generators 1 is proportional. An amount of ozone can be generated. Moreover, when operating by connecting gas piping in series with respect to each ozone generator 1, since source gas repeatedly flows through a discharge space, high-concentration ozone can be obtained with a small installation area. .

  In the ozone generator set 70 of the present embodiment, a high voltage can be applied in parallel to each ozone generator 1 from a single high-voltage power source. With such a configuration, the number of high-voltage power supplies can be reduced, and manufacturing costs and maintenance costs can be reduced. Moreover, in the ozone generator set 70 of this Embodiment, each high voltage power supply can also be provided in each ozone generator 1 respectively. By providing each ozone generator 1 with a high voltage power supply, the ozone generation amount can be individually adjusted in each ozone generator 1, so that the ozone generation amount as the ozone generator set 70 can be controlled with high accuracy.

  Further, in the ozone generator set 70 configured as described above, even when one ozone generator 1 fails, the ozone generator set 70 can be repaired by replacing only the failed ozone generator 1. The time required for maintenance can be reduced, and the maintenance cost can be reduced.

Although various exemplary embodiments are described in this application, the various features, aspects, and functions described in one or more embodiments are limited to the application of a particular embodiment. Instead, it can be applied to the embodiments alone or in various combinations.
Accordingly, innumerable modifications not illustrated are envisaged within the scope of the technology disclosed in the present application. For example, the case where at least one component is deformed, the case where the component is added or omitted, the case where the at least one component is extracted and combined with the component of another embodiment are included.

  DESCRIPTION OF SYMBOLS 1 Ozone generator, 2 Discharge unit, 3 Radiator, 4 Blower fan, 6 Spacer, 10 Ground electrode, 11 Dielectric cylinder, 12 High voltage electrode, 21 Fin, 22 Groove, 23 Thermal relaxation part, 24 Wind tunnel, 40 High Voltage power supply, 41 feeding terminal, 42 introduction terminal, 50, 51 header, 70 ozone generator set.

Claims (9)

A plurality of cylindrical discharge units that generate ozone by discharge;
A radiator having a plurality of insertion holes to be inserted respectively are arranged a plurality of the discharge unit in a direction perpendicular to the axial direction of the discharge unit,
An ozone generator comprising a cooler for delivering a refrigerant for cooling the radiator,
The direction in which the cooler delivers the refrigerant is a direction parallel to the direction in which the plurality of discharge units are arranged.   2. The ozone generator according to claim 1, further comprising a heat relaxation portion disposed in contact with an outer peripheral surface of the discharge unit and an inner peripheral surface of the insertion hole of the radiator.   The ozone generator according to claim 1, further comprising a wind tunnel for confining the refrigerant around the radiator.   The ozone generator according to claim 3, wherein a part of the radiator is in contact with an inner peripheral surface of the wind tunnel.   The ozone generator according to any one of claims 1 to 4, wherein the radiator includes a fin and a groove on an outer peripheral portion.   The ozone generator according to claim 5, wherein the fin includes a plurality of convex and concave portions on a side surface.   The ozone generator according to any one of claims 1 to 6, wherein a raw material gas is introduced from one end of the discharge unit and an ozone-containing gas is derived from the other end. The ozone generator according to any one of claims 1 to 7, wherein the cooler actively delivers the refrigerant in a direction parallel to a direction in which the discharge units are arranged. A plurality of ozone generators according to any one of claims 1 to 8 ,
An ozone generator set characterized by being provided so as to overlap in an axial direction of the discharge unit and a direction orthogonal to a direction in which the discharge units are arranged.

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