JPWO2007108142A1 - Ozone generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ozone generator capable of generating high-concentration ozone with high efficiency by defining the gap length of an annular discharge gap with high accuracy, and capable of performing assembly work in a short time. A cylindrical first electrode and a cylindrical second electrode disposed on the inner peripheral side of the first electrode are provided, and the first electrode and the second electrode are connected to a common central axis. An ozone generator having an annular discharge gap disposed concentrically around and extending between the first electrode and the second electrode along the central axis, and further disposed in the annular discharge gap The spacer wire extends substantially over the entire length of the annular discharge gap in the central axis direction, and defines the gap length in the radial direction of the annular discharge gap.

Description

  The present invention relates to an ozone generator that industrially generates ozonized gas used in water treatment facilities and the like.

  Ozonized gas has a deodorizing and sterilizing action and is used in water treatment facilities and the like. As a method for industrially generating ozone, a general method is to generate ozonized gas by flowing oxygen or a raw material gas containing oxygen through a minute gap and applying an electric field to the minute gap to generate silent discharge. It is.

  As a conventional ozone generator, for example, one disclosed in Japanese Patent Application Laid-Open No. 4-214003 is known. An ozone generation cell of this conventional ozone generator is shown in FIGS. 17A and 17B. FIG. 17A is a cross-sectional view of this conventional ozone generation cell, and FIG. 17B is a vertical cross-sectional view taken along line AA of FIG. 17A. This conventional ozone generation cell has a ground electrode 1 and two divided high voltage electrodes 2A and 2B.

  The ground electrode 1 is composed of a metal cylinder. The two high-voltage electrodes 2A and 2B are composed of metal cylinders sealed at both ends, and are arranged concentrically on the inner peripheral side of the ground electrode 1 respectively. An annular discharge gap 3 is formed between the inner peripheral surface. The annular discharge gap 3 is formed between the ground electrode 1 and the high-voltage electrodes 2A, 2A arranged concentrically so as to surround a central axis common to them. The two high-voltage electrodes 2A and 2B are arranged side by side in the extension direction of the central axis, and an insulating film 2a of a dielectric layer is deposited on the outer surface of each high-voltage electrode 2A and 2B.

  Each high-voltage electrode 2 </ b> A, 2 </ b> B is held at the central portion on the inner peripheral side of the ground electrode 1 using a plurality of spring members 4. The plurality of spring members 4 are arranged at three equal intervals on the outer periphery of both end portions of each high-voltage electrode 2A, 2B, and play a role of defining the gap length in the radial direction of the discharge gap 3. The high-voltage electrodes 2A and 2B are electrically connected to each other by contact pins 6 inserted into the sleeve 5.

  In this conventional ozone generating cell, three spring members 4 are arranged at equal intervals at three locations on the outer periphery of the end of each high-voltage electrode 2A, 2B to which the insulating film 2a is applied, and each high-voltage electrode 2A, 2B. Is inserted into the inner peripheral side of the ground electrode 1 and assembled in a state in which an annular discharge gap 3 is formed between the insulating film 2a of each of the high-voltage electrodes 2A and 2B and the inner peripheral surface of the ground electrode 1. Oxygen or oxygen-containing source gas dried from one end of the annular discharge gap 3 is caused to flow through the discharge gap 3 at a predetermined flow rate, and a predetermined alternating voltage is applied between the high-voltage electrodes 2A and 2B and the ground electrode 1. By performing silent discharge, ozonized gas can be continuously generated.

  In an ozone generating cell that generates an ozonized gas by silent discharge, it is an important point to increase discharge efficiency that the discharge gap through which the gas is circulated has a uniform narrow gap length. In the conventional ozone generation cell, as shown in FIGS. 17A and 17B, a thin metal plate is folded in two along the outer peripheral surface at both ends of the insulating film 2a applied to the high-voltage electrodes 2A and 2B. The three spring members 4 are arranged at equal intervals. In this configuration, the spring member 4 disposed in the tangential direction on the surface of the insulating film 2a of each high-voltage electrode 2A, 2B is a simple leaf spring, and an accurate spring force can be obtained by making the thickness and width constant. And the gap length of the discharge gap 3 is to be kept constant. Further, if a single tube type high voltage electrode having a length substantially equal to the total length of the two divided tube type high voltage electrodes 2A and 2B is used, it is difficult to maintain the gap length of the discharge gap 3 uniformly. Therefore, a device is used to maintain the accuracy of the gap length of the discharge gap 3 by using two high-voltage electrodes 2A and 2B of the split tube type.

  The spring member 4 is fixed at a predetermined position on the surface of each of the high-voltage electrodes 2A and 2B to which the insulating film 2a is applied and is assembled by being inserted into the inner periphery of the ground electrode 1, but the spring member 4 is assembled to each high-voltage electrode 2A, In order to fix to 2B, the method of fixing with a double-sided adhesive tape or an adhesive is used, and the inner periphery of the end portion of the ground electrode 1 has a chamfered shape so that the high-voltage electrodes 2A and 2B can be easily inserted. The high-voltage electrodes 2A and 2B that are processed and provided with the spring member 4 are inserted into the inner periphery of the ground electrode 1 and assembled.

JP-A-4-214003

  If two high voltage electrodes 2A and 2B of the split tube type are used as in the conventional ozone generation cell, the accuracy of the gap length of the discharge gap 3 can be ensured to some extent, but there is a problem that the cost increases. As shown in FIGS. 18A and 18B, a single tube having a length substantially equal to the total length of the two high-voltage electrodes 2A and 2B is used instead of the two high-voltage electrodes 2A and 2B of the split tube type for cost reduction. In the ozone generation cell using the high voltage electrode 2 of the type, the ground electrode 1 or the high voltage electrode 2 is bent due to its attachment, and is bent due to its own weight. Therefore, as shown in FIGS. 18A and 18B The gap length of the discharge gap 3 changes in the extending direction of the center line of the electrodes 1 and 2. 18A is a cross-sectional view of an ozone generation cell using a single tube type long high-voltage electrode 2, and FIG. 18B is a vertical cross-sectional view thereof. Spacers 4 </ b> A and 4 </ b> B are disposed on the outer periphery of both ends of the high-voltage electrode 2.

FIG. 19 shows the ozone generation characteristics of the ozone generation cell shown in FIGS. 18A and 18B. In FIG. 19, the horizontal axis indicates the so-called specific energy density obtained by dividing the discharge power [W] by the gas flow rate [L / min], and the vertical axis indicates the ozone concentration (g / Nm ³ ). Nm ³ represents the volume in the standard state. In the figure, the solid line represents the theoretical design value, and the symbol ■ represents the experimental value. As is clear from FIG. 19, it can be seen that the ozone generation efficiency obtained is lower than the theoretical design value, and the performance degradation is particularly remarkable in the high concentration region.

  FIG. 20A illustrates a case where the ground electrode 1 and the high-voltage electrode 2 are eccentric. Eccentric means that the center is shifted. In FIG. 20A, the high-voltage electrode 2 is decentered downward by an eccentric amount s with respect to the ground electrode 1, and the gap length of the discharge gap 3 on the upper side of the high-voltage electrode 2 is (d + s). The case where the gap length of the discharge gap 3 is (ds) is illustrated. FIG. 20B shows the result of analyzing the ozone generation characteristics when the ground electrode 1 and the high-voltage electrode 2 are eccentric. In FIG. 20B, the horizontal axis indicates the eccentricity s, and the vertical axis indicates the ozone concentration. FIG. 20B shows the characteristics when the gap length d in the radial direction of the discharge gap 3 is 0.2 (mm), 0.3 (mm), and 0.4 (mm), respectively.

  Referring to FIG. 20B, it can be seen that in the ideal state (eccentricity s = 0), the ozone concentration increases as the gap length d of the discharge gap 3 decreases. On the other hand, the shorter the gap length d of the discharge gap 3, the greater the influence of the eccentricity s on the ozone generation characteristics. For example, in the region where δ> 0.05 (mm), the gap length d of the discharge gap 3 is 0. It can be seen that the ozone generation characteristics are better when the gap length d is 0.3 (mm) than when it is 2 (mm). Therefore, it can be said that the accuracy of the gap length d of the discharge gap 3 needs to be kept higher as the gap length d of the discharge gap 3 becomes smaller. As shown in FIG. 18A, when the gap length of the discharge gap 3 changes in the extending direction of the central axis of the electrodes 1 and 2, the eccentric amount s of the discharge gap 3 is along the central axis. Since it has changed, it is necessary to consider the characteristics of FIG. 20B.

  Regarding the ozone generation characteristics in the case where the eccentricity s is present, “Discharge gap length variation on the ozone generation characteristics” already published in pages 125 to 12 of Vol. Introduced in a paper entitled “Impact” and quantified by the inventors. When the eccentricity amount s exists, the gap length d of the discharge gap 3 changes, and the gas flow rate in the portion where the gap length d is small decreases, so that the ozone concentration in that portion increases locally, and the efficiency increases. Incurs a decline. A more detailed explanation is given below.

The gas flow rate Q flowing through the discharge gap 3 is given by the following equation (1).
Q = (π × D × d ³ ) / (12 × μ × L) ΔP (1)
Here, D is the diameter of the inner periphery of the ground electrode 1, d is the gap length of the discharge gap 3, μ is the viscosity coefficient, L is the tube length, and ΔP is the pressure difference between the inlet and outlet. The cross-sectional area S of the flow path is expressed by the following formula (2).
S = π {(D + 2d) ² −D ² } (2)
If D >> d in equation (2), the following equation (3) is obtained.
S = 4πD × d (3)
Therefore, when D is constant, S∝d.
Q∝ (π × D × d ³ ) ∝S ³ (4)
It becomes. That is, in the portion where the gap length d of the discharge gap 3 is small, the gas flow becomes poor. The effect appears in proportion to d ³ or S ³ . Therefore, a slight distribution of the gap length d of the discharge gap 3 greatly affects the gas flow. For this reason, it is particularly important to eliminate the change in the gap length of the discharge gap 3 in the extending direction of the central axis of the electrodes 1 and 2 as shown in FIG. 18A in order to maintain the ozone generation efficiency. I can say that.

  As described above, the conventional ozone generating cell shown in FIGS. 17A and 17B has three spring members 4 arranged in the circumferential direction in the discharge gap 3 between the high-voltage electrodes 2A and 2B and the ground electrode 1. The high voltage electrodes 2A, 2B and the ground electrode 1 are concentric. However, since the spring member 4 can be inserted only in several places in the extending direction of the central axis of the high voltage electrodes 2A, 2B, the high voltage electrode It was difficult to secure the discharge gap 3 having a uniform gap length by compensating for the weights of 2A and 2B. Further, since the spring member 4 has a flat plate shape and is adhered to the outer periphery of the high-voltage electrodes 2A and 2B with a double-sided adhesive tape or the like, a complicated work is required for the assembly, and the work is a long time. Further, the three spring members 4 mounted in the tangential direction of the outer periphery of the high-voltage electrodes 2A and 2B have a circumscribed circle at their ends larger than the inner diameter of the ground electrode 1 and are smoothly inserted into the inner diameter part of the ground electrode 1. Therefore, there is a problem that it is necessary to take measures to do this, which is a complicated operation and a long working time.

  In addition, since it takes a long time to assemble the ozone generation cell, it takes time to disassemble, inspect, and reassemble the ozone generator that regularly assembled multiple ozone generation cells. As a result, the work time becomes longer and the inspection cost becomes higher. Of course, it is difficult to form a uniform discharge gap length in the extending direction of the central axis of the high-voltage electrodes 2A and 2B, and high ozone generation efficiency cannot be maintained. Further, in order to reduce the cost, when using a single tube type long high voltage electrode 2, it is difficult to keep the gap length of the discharge gap 3 constant in the extending direction of the central axis of the high voltage electrode 2. There was a very serious problem that the generation efficiency was lowered.

  The present invention has been made to remedy the above problems, and an object of the present invention is to provide an ozone generator that can make the gap length of the annular discharge gap substantially uniform and has high ozone generation efficiency. .

  An ozone generator according to a first aspect of the present invention includes a cylindrical first electrode and a cylindrical second electrode, and the first electrode and the second electrode are connected to each other around a common central axis. An ozone generator that is concentrically arranged and forms an annular discharge gap extending along the central axis between the first electrode and the second electrode, and further a spacer arranged in the annular discharge gap The spacer wire is provided so as to extend over substantially the entire length of the annular discharge gap in the central axis direction, and to define a gap length in the radial direction of the annular discharge gap.

  An ozone generator according to a second aspect of the present invention includes a cylindrical first electrode and a cylindrical second electrode, and the first electrode and the second electrode are arranged around a common central axis. An ozone generator that concentrically arranges, forms an annular discharge gap between them, and generates a silent discharge in the annular discharge gap, thereby converting the raw material gas passing through the annular discharge gap into an ozonized gas. And further comprising a spacer wire disposed in the annular discharge gap, the spacer wire extending over a range of 80% or more of the annular discharge gap in the central axis direction, and the diameter of the annular discharge gap. The gap length in the direction is defined.

  An ozone generator according to a third aspect of the present invention is an ozone generator having an ozone cell structure, and the ozone cell structure is disposed between a pair of end plates facing each other and the pair of end plates. Each ozone generation cell includes a plurality of ozone generation cells, each of which includes a cylindrical first electrode disposed between the pair of end plates, and a cylindrical second electrode disposed on the inner peripheral side of the first electrode. The first electrode and the second electrode are arranged concentrically around a common central axis, and an annular discharge gap extending along the central axis is formed between them. Each of the ozone generation cells has a spacer wire disposed in the annular discharge gap, and the spacer wire extends over substantially the entire length of the annular discharge gap in the central axis direction. In the radial direction of the discharge gap Characterized by defining the gap length.

  An ozone generator according to a fourth aspect of the present invention includes a first electrode configured by a metal cylinder, and a second electrode in which a conductive layer is formed on a peripheral surface of the insulating cylinder, and the metal electrode of the first electrode An ozone generator in which an insulating tube of the second electrode is arranged on the inner peripheral side of the metal tube around a central axis, and an annular discharge gap is formed between the metal tube and the insulating tube, A spacer portion is provided on one of the inner peripheral surface of the tube and the outer peripheral surface of the insulating tube, and the spacer portion is arranged in the radial direction of the annular discharge gap in substantially the entire range of the annular discharge gap in the central axis direction. It is characterized in that the gap length is defined.

  An ozone generator according to a first aspect of the present invention includes a spacer wire disposed in an annular discharge gap, and the spacer wire extends over substantially the entire length in the central axis direction of the annular discharge gap. Since the gap length in the radial direction is defined, the gap length of the annular discharge gap can be made substantially uniform over the entire extended length, and an ozone generator having high ozone generation efficiency can be obtained.

  The ozone generator according to the second aspect of the present invention includes a spacer wire disposed in the annular discharge gap, and the spacer wire extends over a range of 80% or more in the central axis direction of the annular discharge gap. In addition, since the gap length in the radial direction of the annular discharge gap is defined, the gap length of the annular discharge gap can be made substantially uniform over the entire extended length, and an ozone generator having high ozone generation efficiency can be obtained.

  In the ozone generator according to the third aspect of the present invention, each ozone generating cell has a spacer wire disposed in the annular discharge gap, and the spacer wire has a substantially entire length in the central axis direction of the annular discharge gap. Since the gap length in the radial direction of the annular discharge gap is defined, the gap length of the annular discharge gap of each ozone generation cell can be made almost uniform over the entire extended length, and ozone with high ozone generation efficiency can be obtained. A generator can be obtained.

  An ozone generator according to a fourth aspect of the present invention has a spacer portion on either the inner peripheral surface of the metal cylinder of the first electrode or the outer peripheral surface of the insulating cylinder of the second electrode. Regulates the radial length of the annular discharge gap in almost the entire range of the annular discharge gap in the central axis direction, so the gap length of the annular discharge gap can be made almost uniform throughout the extended length, and ozone is generated. A highly efficient ozone generator can be obtained.

  Several embodiments of the present invention will be described below with reference to the drawings.

Embodiment 1 FIG.
FIG. 1 is a cross-sectional view showing the overall configuration of Embodiment 1 of the ozone generator according to the present invention. The ozone generator 100 according to the first embodiment includes an external tank 101 and an ozone cell structure 110 inside the external tank 101. The ozone cell structure 110 is disposed at the center inside the external tank 101. A source gas chamber 102 is formed on the left side of the ozone cell structure 110 and an ozonized gas chamber 103 is formed on the right side thereof.

  A raw material gas supply unit 104, an ozonized gas extraction unit 105, a high voltage supply unit 106, and a cooling water header 107 are provided outside the external tank 101. The source gas supply unit 104 communicates with the source gas chamber 102 inside the external tank 101, and the source gas, for example, oxygen gas or oxygen-containing gas containing oxygen is supplied from the source gas supply unit 104. The ozonized gas extraction unit 105 communicates with the ozonized gas chamber 103 inside the external tank 101, and the generated ozonized gas is extracted from the ozonized gas extraction unit 105. The high voltage supply unit 106 is connected to an AC high voltage power supply 108 installed outside the external tank 101, and supplies an AC high voltage from the AC high voltage power supply 108 to the ozone cell structure 110. The cooling water header 107 supplies cooling water to the ozone cell structure 110 and cools the ozone cell structure 110.

  The ozone cell structure 110 includes a pair of metal end plates 111 and 112 and a plurality of ozone generation cells 120. A metal end plate 111 that separates the ozone structure 110 and the source gas chamber 102 and a metal end plate 112 that separates the ozone structure 110 and the ozonized gas chamber 102 are disposed to face each other. These metal end plates 111 and 112 are arranged in parallel to each other, and a plurality of ozone generation cells 120 are arranged between them. Each ozone generation cell 120 receives the supply of the source gas from the source gas chamber 102, ozonizes the source gas to generate an ozonized gas, and supplies it to the ozonized gas chamber 103.

  2A is a transverse sectional view showing one ozone generation cell 120, and FIG. 2B is a longitudinal sectional view thereof. Each of the plurality of ozone generation cells 120 is configured as shown in FIGS. 2A and 2B.

  The ozone generation cell 120 according to the first embodiment includes the ground electrode 10, the high-voltage electrode 20, and the spacer assembly 40 that defines the annular discharge gap 30 therebetween. The ground electrode 10 is composed of a metal cylinder 11, and this metal cylinder 11 constitutes a first electrode. A cooling water reservoir 13 is formed around the metal cylinder 11. The metal cylinder 11 is made of, for example, a metal and has a cylindrical shape. The metal cylinder 11 penetrates a pair of metal end plates 111 and 112 in a direction perpendicular to them, and both ends thereof are fixed to the metal end plates 111 and 112 by welding or the like. Is done. The cooling water reservoir 13 is formed between the metal end plates 111 and 112 on the outer periphery of the metal cylinder 11 so as to surround the metal cylinder 11. The cooling water reservoir 13 communicates with the cooling water header 107 and receives supply of the cooling water 14 from the cooling water header 107. The cooling water 14 cools the metal end plates 111 and 112 and the metal cylinder 11.

  The metal end plates 111 and 112 and the metal cylinder 11 are made of, for example, stainless steel so as not to be corroded by the cooling water 14. The metal end plates 111 and 112 are attached to the external tank 101 and are electrically grounded through the external tank 101. Since both ends of the metal cylinder 11 are fixed to the metal end plates 111 and 112, they are electrically grounded.

  The high voltage electrode 20 includes an insulating cylinder 21, a conductive layer 22, and a high voltage supply circuit 23. The insulating cylinder 21 is, for example, a cylindrical glass tube. The left end portion of the glass tube is opened, and the right end portion is a hemispherical closed end portion 21a. The closed end 21 a prevents gas from flowing inside the insulating cylinder 21. The conductive layer 22 is deposited on the entire inner surface of the insulating cylinder 21 except for the closed end portion 21a. The insulating cylinder 21 and the conductive layer 22 constitute a second electrode. The high voltage supply circuit 23 includes a high voltage fuse 24 and a high voltage power supply line 25. The high voltage fuse 24 is connected to the high voltage supply unit 106 and receives an AC high voltage from the high voltage supply unit 106. The high-voltage power supply line 25 connects the high-voltage fuse 24 and the conductive layer 22, and supplies an AC high-voltage that has passed through the high-voltage fuse 24 to the conductive layer 22.

  The insulating cylinder 21 of the high-voltage electrode 20 is disposed concentrically with the metal cylinder 11 in the central portion on the inner peripheral side of the metal cylinder 11 of the ground electrode 10. A central axis CC in FIG. 2A is a central axis common to the metal cylinder 11 and the insulating cylinder 21. The high voltage electrode 20 is a single tube type high voltage electrode, and the insulating cylinder 21 of the high voltage electrode 20 is longer than the interval between the metal end plates 111 and 112. Specifically, the opened left end portion of the insulating cylinder 21 penetrates the metal end plate 111 and protrudes into the source gas chamber 102. The closed end 21 a of the insulating cylinder 21 extends to a position that substantially coincides with the metal end plate 112.

  An annular discharge gap 30 is formed between the metal cylinder 11 of the ground electrode 10 and the insulating cylinder 21 of the high-voltage electrode 20. The annular discharge gap 30 is formed around the central axis CC between the inner peripheral surface of the metal tube 11 and the outer peripheral surface of the insulating tube 21. The gap length in the radial direction of the annular discharge gap 30, that is, in the radial direction around the central axis C-C is defined as d. The gap length d is the distance between the inner peripheral surface of the metal cylinder 11 and the outer peripheral surface of the insulating cylinder 21 in a plane perpendicular to the central axis CC. The gap length d is a minute gap of, for example, 1.0 (mm) or less. The discharge gap 30 also extends along the central axis CC, and the length of the annular discharge gap 30 in the direction of the central axis CC is Lg. The annular discharge gap 30 has openings 31 and 32 at both ends in the direction of the central axis CC. The length Lg is a dimension between the opening 31 and the opening 32, which is substantially equal to the distance between the metal end plates 111 and 112.

  One opening 31 of the annular discharge gap 30 is located on the inner periphery of the metal end plate 111. The opening 31 communicates with the source gas chamber 102, and the source gas from the source gas chamber 102 is supplied to the annular discharge gap 30 from the opening 31. The other opening 32 is located on the inner periphery of the metal end plate 112. The opening 32 communicates with the ozonized gas chamber 103, and ozonized ozonized gas is supplied to the ozonized chamber 103 in the annular discharge gap 30. An AC high voltage is applied between the conductive layer 22 of the high voltage electrode 20 and the metal cylinder 11 of the ground electrode 10, and silent discharge occurs in the annular discharge gap 30. Oxygen gas contained in the raw material gas is ozonized by this silent discharge.

  The spacer assembly 40 includes a plurality of spacer wires 41 and one spacer fastener 43. FIG. 2C is an explanatory diagram of the spacer assembly 40. The plurality of spacer wires 41 are respectively disposed in the annular discharge gap 30 and define the gap length d of the discharge gap 3. The plurality of spacer wires 41 are formed of a wire having a circular cross section having the same outer diameter φ. The outer diameter φ of the spacer wire 41 is slightly smaller than the gap length d of the discharge gap 30, and each spacer wire 41 is provided on both the inner peripheral surface of the metal tube 11 and the outer peripheral surface of the insulating tube 21. Contact. In other words, as a result of each spacer wire 41 being sandwiched between the inner peripheral surface of the metal tube 11 and the outer peripheral surface of the insulating tube 21, the gap length d of the annular discharge gap 30 is defined by the spacer wire 41.

The outer diameter φ of each spacer wire 41 is slightly smaller than the gap length d depending on the gap length d to be set. Specifically, the outer diameter φ is set within a range satisfying the following expression (5). It is practical to do.
1.05φ <(φee−φhe) / 2 = d <1.2φ (5)
Here, φee represents the diameter of the inner peripheral surface of the metal cylinder 11 of the ground electrode 10 and φhe represents the diameter of the outer peripheral surface of the insulating cylinder 21 of the high-voltage electrode 20. If the outer diameter φ of each spacer wire 41 is larger than the range of the formula (5), the high-voltage electrode 20 cannot be inserted into the ground electrode 10, and the outer diameter φ is smaller than the range of the formula (5). If it is small, the error of the gap length d of the annular discharge gap 30 becomes too large, so that an optimum value of the outer diameter φ exists as shown in the equation (5).

  The gap length d of the annular discharge gap 30 is 1.0 (mm) or less, and is specifically set to 0.2 (mm), 0.3 (mm), or 0.4 (mm), for example. However, other values of 0.1 (mm) or less can be used. In the first embodiment, the gap length d is set to 0.2 (mm), for example, and the outer diameter φ of each spacer wire 41 is d / 1.05 to d / 1.2 according to the equation (5). Scope.

  The plurality of spacer wires 41 are arranged in the annular discharge gap 30 so as to continuously extend substantially parallel to the central axis C-C around the central axis C-C at equal angular intervals. Specifically, for example, four spacer wires 41 are arranged around the central axis C-C so as to extend substantially parallel to the central axis C-C at an angular interval of 90 degrees. When the length along the central axis CC of each spacer wire 41 is Ls, the length Ls is slightly longer than the length Lg of the annular discharge gap 30 in the central axis CC direction, and Ls> Lg Is done. As a result, each spacer wire 41 extends over the entire length Lg of the annular discharge gap 30 in the central axis C-C direction, and continues from the opening 31 at one end of the annular discharge gap 30 to the opening 32 at the other end. And extend. As a result of each spacer wire 41 extending over the entire length Lg of the annular discharge gap 30 in the central axis CC direction, the gap length d of the annular discharge gap 30 is equal to the length Lg of the central discharge line CC direction. It is defined almost uniformly by each spacer wire 41 over its entire length.

  Even if the length Ls of each spacer wire 41 is slightly shorter than the length Lg of the annular discharge gap 30, the gap length d of the annular discharge gap 30 extends over the entire length Lg of the annular discharge gap 30. Can be defined almost uniformly. Specifically, when the spacer wires 41 are continuously arranged over a range of 80% or more of the length Lg of the annular discharge gap 30 in the central axis CC direction, the gap length d of the annular discharge gap 30 is set. Can be defined almost uniformly over the entire length Lg of the annular discharge gap 30.

  As a result of a plurality of, for example, four spacer wires 41 being arranged in the annular discharge gap 30 substantially parallel to the central axis CC line, the source gas from the source gas chamber 102 is discharged between the spacer wires 41. The gap 30 passes along the central axis CC. A high-voltage AC voltage is applied from the high-voltage supply circuit 23 between the conductive layer 22 of the high-voltage electrode 20 and the metal cylinder 11 of the ground electrode 10, and silent discharge is generated in the discharge gap 30 based on the high-voltage AC voltage. appear. The raw material gas that passes through the discharge gap 30 between the spacer wires 41 is ozonized based on the silent discharge generated in the discharge gap 30 to become ozonized gas. The ozonized gas is collected in the ozonized gas chamber 103 and is taken out from the ozonized gas take-out unit 105 and used. When the temperature of the discharge gap 30 rises, the ozone generation efficiency decreases, so that the ground electrode 10 is cooled with the cooling water 14. If the insulating cylinder 21 is electrically destroyed, an accident in which excessive current flows intensively between the high-voltage electrode 20 and the ground electrode 10 occurs. Therefore, a structure for preventing the accident by inserting the high-voltage fuse 24 is taken. ing.

  The spacer fastener 43 is constituted by an annular plate, specifically, a circular annular plate. The outer diameter of the spacer fastener 43 is substantially equal to the inner diameter of the metal cylinder 11, and the inner diameter is set to fit into the hemispherical closed end 21 a of the insulating cylinder 21. The spacer fastener 43 is fitted into the hemispherical closed end 21 a of the insulating cylinder 21 and is supported by the insulating cylinder 21. The spacer fastener 43 has the same number of spacer installation holes 44 as the plurality of spacer wires 41. For example, when four spacer wires 41 are used, the four spacer installation holes 44 are formed in the spacer fastener 43 at equal angular intervals, specifically, at an angular interval of 90 degrees.

  In the spacer assembly 40 shown in FIG. 2C, two wire rods 42A and 42B having the same outer diameter φ are used, and four spacer wires 41 are formed by the two wire rods 42A and 42B. The The wire 42A is bent so as to have two spacer wires 41 and a connecting portion 41a that connects them. The wire 42A is bent at substantially right angles so that the two spacer wires 41 are parallel to each other at both ends of the connecting portion 41a, and the two spacer wires 41 are inserted into the two adjacent spacer installation holes 44. Inserted and retained. The length of the connecting portion 41 a is equal to the interval between the adjacent spacer installation holes 44. Similarly, the other wire rod 42B is bent at a right angle so that the two spacer wires 41 are parallel to each other at both ends of the connecting portion 41b, and these two spacer wires 41 are left in the two remaining spacer installation holes 44. Inserted and held. In this way, the plurality of spacer wires 41 are fitted into the closed end portion 21a of the insulating tube 21 of the high-voltage electrode 20 by one spacer fastener 43, and the spacer fastener 43 is fitted into the high-voltage electrode 20 in a state of being held. The high voltage electrode 20 can be easily installed concentrically with the ground electrode 10 by inserting it from the end into the inner peripheral side of the metal tube 11 of the ground electrode 10.

  In the first embodiment, as each spacer wire 41, a metal wire, for example, a so-called platinum clad tungsten wire in which the surface of tungsten is coated with platinum is used. The reason for selecting platinum clad tungsten is that it can be obtained at a relatively low price, platinum has high sputter resistance, and tungsten has a high mechanical strength. However, not only this platinum clad tungsten but a metal wire with high mechanical strength, such as tungsten, stainless steel, titanium, aluminum, etc., and a non-metal wire can also be used. As the non-metallic wire, for example, a wire made of Teflon (registered trademark), EPDM rubber, or Kapton can be used.

  In particular, when tungsten or titanium was used, it was recognized that the metal surface was oxidized during use to form tungsten oxide or titanium oxide, and the ozone generation efficiency was improved by their catalytic effect. In addition, stainless steel or aluminum is characterized by extremely low material costs. In the first embodiment, a plurality of spacer wires 41 are arranged in the discharge gap 30 over almost the entire length Lg of the discharge gap 30, and the gap length d of the discharge gap 30 is used. It is an important point to prescribe almost uniformly.

Embodiment 2. FIG.
FIG. 3 is an explanatory view of a spacer assembly 40A used in the ozone generator according to the second embodiment. The ozone generator of the second embodiment uses the spacer assembly 40A shown in FIG. 3 instead of the spacer assembly 40 used in the first embodiment, but the other configuration is the same as that of the first embodiment.

  In the spacer assembly 40 </ b> A, a holding portion 41 c is formed at one end of each of the four spacer wires 41. The spacer fastener 43 is configured in the same manner as the spacer fastener 43 in the spacer assembly 40 shown in FIG. 2C and has four spacer installation holes 44. The four spacer wires 41 are inserted into the spacer installation holes 44 so as to extend substantially parallel to the center axis CC of the ground electrode 10 and the high-voltage electrode 20, and are held by the spacer fastener 43 by the holding portion 41c. The In the holding portion 41 c, each spacer wire 41 is a large diameter portion having a large diameter, and the high voltage electrode 20 in which the spacer fastener 43 is fitted in the hemispherical closed end portion 21 a is a closed end in which the spacer fastener 43 is fitted. When inserted into the inner circumference of the metal cylinder 11 of the ground electrode 10 from the portion 21a, the spacer wires 41 are prevented from being detached by the holding portions 41c, and the assembly work of the ozone generating cell 120 is simplified. Further, in the holding portion 41c, each spacer wire 41 can be welded to the spacer fastener 43, and in this case, the assembly operation of the ozone generation cell 120 is similarly simplified.

  FIG. 4 shows the ozone generation characteristics of the ozone generation cell 120 used in the ozone generators of the first and second embodiments. The horizontal axis of FIG. 4 is the specific energy density (Specific Energy Density), and the vertical axis is the ozone concentration (Ozone Concentration). In FIG. 4, the curve of ◆-◆ indicates the ozone generation characteristics of the ozone generation cell 120 used in the first and second embodiments, and the symbol ■ indicates the experimental value shown in FIG. 19 for comparison. Shows again. As is clear from the curve of ◆-◆ in FIG. 4, according to the ozone generation cell used in the first and second embodiments, the ozone generation characteristics are improved particularly in the high concentration region as compared with the conventional ozone generation cell. As a result, it has been clarified that the performance almost satisfying the theoretical design value shown in FIG. 19 can be obtained.

  In order to know the reason why the ozone generation characteristics are greatly improved in the ozone generation cell 120 of the first and second embodiments, the insulating cylinder 21 of the high-voltage electrode 20 and the spacer assemblies 40 and 40A are provided in the metal cylinder 11 of the ground electrode 10. After installing, the dimensions of each part were measured. The results are shown in FIGS. 5A and 5B. 5A is a transverse sectional view, and FIG. 5B is a longitudinal sectional view. As a result of the analysis, the metal tube 11 of the ground electrode 10 is bent in the extending direction of the central axis CC as shown in FIG. 5A due to the influence of welding distortion at the time of attachment to the metal end plates 111 and 112. Turned out to be.

  However, in the first and second embodiments, since the spacer wire 41 is disposed over almost the entire length of the annular discharge gap 30 in the direction of the central axis CC, the insulating tube 21 (glass tube) of the high-voltage electrode 20 is grounded. It has been clarified that a highly accurate gap length d is formed in the entire area of the annular discharge gap 30 by being deformed along the bend of the metal cylinder 11 constituting the electrode 10. Even if the spacer assemblies 40 and 40A of the first and second embodiments are used, if the geometric strength of the insulating cylinder 21 (glass tube) constituting the high-voltage electrode 20 is too large, for example, the diameter of the insulating cylinder 21 is large. If the insulating cylinder 21 is too thick, or if the thickness in the radial direction of the insulating cylinder 21 is too large, the insulating cylinder 21 will not be deformed along the bend of the metal cylinder 11 constituting the ground electrode 10, so that a sufficient effect may not be obtained. found.

Here, the condition of the insulating cylinder 21 (glass tube) for obtaining a sufficient effect will be considered. For the insulating cylinder 21 (glass tube), for example, both end support and equally distributed load are assumed. Deflection δ at a distance x from the end of the length L of the insulating tube 21 (glass tube) can be expressed by the following equation (6).
δ = (wL ⁴ / 24EI) × {(x / L) − (2 × ³ / L ³ ) + (x ⁴ / L ⁴ )} (6)
Where w: equally distributed load (w = 2R / L, where R is the reaction force at both ends), E: longitudinal elastic modulus (Young's modulus), I: secondary moment of section, L: insulating cylinder 21 (glass tube) X: represents the position.

The maximum deflection amount δmax can be expressed by the following equation (7), with x = L / 2 in equation (6).
δmax = 5 wL ⁴ / 384EI (7)
As is apparent from this equation (7), the maximum deflection amount δmax is inversely proportional to the product EI of the longitudinal elastic modulus (Young's modulus) E and the cross-sectional secondary moment I for the same bending moment.

Further, when the outer diameter of the insulating cylinder 21 (glass tube) is d2 and the inner diameter is d1, the sectional second moment I in the insulating film 21 (glass tube) is expressed by the following equation (8).
I = (64 / π) × {(d2) ⁴ − (d1) ⁴ } (8)
As a result of performing various tests, it is considered that the product EI needs to be in a range satisfying the relationship of the following formula (9) in order to obtain a sufficient effect in the first and second embodiments.
EI <2.5 × 10 ⁸ (N · mm ² ) (9)
When the insulating cylinder 21 is a glass tube, since the Young's modulus E of the glass is about 65 × 10 ³ (N / mm ² ), the equation (9) can be transformed into the following equation (10).
I <3.8 × 10 ³ (mm ⁴ ) (10)

  FIG. 6 shows the relationship between the outer diameter d2 of the glass tube constituting the insulating cylinder 21 and the thickness t (= (d2−d1) / 2) in the radial direction from the expressions (8) and (10). The horizontal axis in FIG. 6 indicates the outer diameter d2 of the glass tube constituting the insulating cylinder 21, and the vertical axis indicates the thickness t. As apparent from FIG. 6, it is understood that the thickness t needs to be reduced when the outer diameter d2 of the glass tube constituting the insulating cylinder 21 is increased. On the other hand, since silent discharge is generated in the annular discharge gap 30, the glass tube constituting the insulating cylinder 21 is required to have a withstand voltage function of about 5 (kV), and therefore performance of about 20 (kV / mm). In the case of a glass tube having a thickness of 0.25 (mm) or less, it is not practical. Therefore, from FIG. 6, in Embodiments 1 and 2, in order to obtain a sufficient effect by configuring the insulating tube 21 with a glass tube, the outer diameter d2 of the glass tube forming the insulating tube 21 is 30 (mm). Hereinafter, it can be said that the thickness t needs to be 0.25 (mm) or more. This is an important design condition. In practice, the glass tube constituting the insulating cylinder 21 has an outer diameter d2 of 5 (mm) or more and a thickness t of 5.0 (mm) or less, so the outer diameter d2 is 5 to 30 (mm). ), And the thickness t is 0.25 to 5.0 (mm).

Embodiment 3 FIG.
FIG. 7A is a transverse sectional view showing an ozone generation cell 120A used in Embodiment 3 of the ozone generator according to the present invention, and FIG. 7B is a side view thereof. In the third embodiment, all the ozone generation cells 120 in the first embodiment are replaced with the ozone generation cells 120A shown in FIGS. 7A and 7B. The ozone generation cell 120A includes a ground electrode 10, a high voltage electrode 20, and a spacer assembly 40B. An insulating cylinder 21A is used for the high voltage electrode 20. The insulating cylinder 21A is composed of a glass tube whose both ends are open. The spacer assembly 40B includes a plurality of spacer wires 41, a spacer fastener 43A, and a plug member 45. The other configuration is the same as that of the first embodiment.

  In the first and second embodiments, the insulating cylinder 21 having the hemispherical closed end portion 21a, for example, a glass tube is used. However, the glass tube having the closed end portion 21a is expensive. The insulating cylinder 21A was constituted by a cheaper glass tube having both ends opened. A conductive film 22 is formed on the entire inner peripheral surface of the insulating cylinder 21A. The stopper member 45 of the spacer assembly 40B is fitted and fixed to the inner periphery of the opened right end portion of the insulating cylinder 21A. The plug member 45 is made of an ozone-resistant material, for example, fluorine resin, silicon, viton, etc., and closes the right end portion of the insulating cylinder 21A. The plug member 45 prevents gas from flowing into the insulating cylinder 21A.

  In the spacer assembly 40 </ b> B, the plurality of spacer wires 41 are held using the plug member 45. The plurality of spacer wires 41 are arranged in an annular discharge gap 30 formed between the metal tube 11 of the ground electrode 10 and the insulating tube 21A of the high-voltage electrode 20. As in the first embodiment, the plurality of spacer wires 41 are spaced apart from each other in the circumferential direction of the annular discharge gap 30 and in a range of 80% or more in the central axis CC direction of the annular discharge gap 30. It is extended continuously. Spacer fasteners 43 </ b> A that hold the plurality of spacer wires 41 are fixed to the plug member 46 using screws 46. By fixing the spacer fastener 43A to the plug member 45, the operation of inserting the insulating tube 21A holding the spacer wire 41 on the outer periphery into the inner periphery of the metal tube 11 of the ground electrode 10 is facilitated.

Embodiment 4 FIG.
FIG. 8A is a front view showing an ozone generation cell 120B used in Embodiment 4 of the ozone generator according to the present invention, and FIG. 8B is a side view thereof. In the fourth embodiment, all the ozone generation cells 120 in the first embodiment are replaced with the ozone generation cells 120B shown in FIGS. 8A and 8B. The ozone generation cell 120B of the fourth embodiment has a ground electrode 10, a high voltage electrode 20, and a spacer assembly 40C. As in the third embodiment, an insulating cylinder 21A is used for the high-voltage electrode 20, and the insulating cylinder 21A is composed of a glass tube having both ends opened. The spacer assembly 40C includes one spacer wire 41, a spacer fastener 43A, and a plug member 45. The other configuration is the same as that of the first embodiment. Although FIG. 8A is a front view, only the metal tube 11 of the ground electrode 10 is shown in cross section.

  In the fourth embodiment, similarly to the third embodiment, the insulating cylinder 21A is configured by a glass tube having both ends open at a lower cost. A conductive layer 22 is formed on the entire inner peripheral surface of the insulating cylinder 21A. The stopper member 45 of the spacer assembly 40C is fitted and fixed to the opened right end portion of the insulating cylinder 21. The plug member 45 is made of an ozone-resistant material, for example, fluorine resin, silicon, viton, etc., and closes the right end portion of the insulating cylinder 21A. The plug member 45 prevents gas from flowing into the insulating cylinder 21A.

  In the spacer assembly 40 </ b> C, only one spacer wire 41 is held using the plug member 45. The one spacer wire 41 is spirally disposed in an annular discharge gap 30 formed between the metal cylinder 11 of the ground electrode 10 and the insulating cylinder 21A of the high-voltage electrode 20. The one spacer wire 41 is spirally wound in the same shape as the coil around the central axis CC of the insulating cylinder 21A. This single spiral spacer wire 41 is continuously wound over the entire length of the length Lg of the annular discharge gap 30 in the direction of the central axis CC as in the first embodiment. Even if it is continuously wound in a range of 80% or more, the gap length can be defined almost uniformly over the entire length Lg of the annular discharge gap 30.

  One end of the spiral spacer wire 41 is held by the spacer fastener 43 and fixed to the plug member 46. The spiral spacer wire 41 is fitted into the inner periphery of the metal cylinder 11 together with the insulating cylinder 21 </ b> A in a state where one end thereof is held by the spacer fastener 43. The spiral spacer wire 41 is initially wound around the outer periphery of the insulating cylinder 21A at a small pitch. However, as the helical spacer wire 41 is fitted into the inner periphery of the metal cylinder 11, the spiral contact between the metal cylinder 11 and the insulating cylinder 21A. The pitch is increased, and the pitch is increased. Finally, the annular discharge gap 30 is continuously wound in a range of 80% or more of the length Ls in the central axis CC direction.

  In the spacer assembly 40C of the fourth embodiment, since only one spacer wire 41 is used, the structure of the spacer assembly 40C is simplified, and the assembly operation of the ozone generation cell 120B is simplified.

  The configuration in which one spacer wire 41 is spirally arranged in the annular discharge gap 30 can also be adopted in the first embodiment. In this case, one spacer wire 41 is held by the spacer fastener 43 of the spacer assembly 40 in the first embodiment, and this one spacer wire 41 is spirally arranged in the annular discharge gap 30.

Embodiment 5 FIG.
FIG. 9A is a cross-sectional view of an ozone generation cell 120C used in Embodiment 5 of the ozone generator according to the present invention, and FIG. 9B is a side view thereof. In the fifth embodiment, all the ozone generation cells 120 in the first embodiment are replaced with the ozone generation cells 120C shown in FIGS. 9A and 9B. In the ozone generation cell 120C of the fifth embodiment, a plurality of spacer assemblies 40D are used. In the spacer assembly 40C, each of the plurality of spacer wires 41 is fixed to the metal cylinder 11 by the spacer assembly 40C. The other configuration is the same as that of the first embodiment.

  Each spacer assembly 40 </ b> D has a spacer wire 41 and two spacer fixtures 47. These spacer fixing tools 47 are fixed to both ends of the spacer wire 41, and each spacer fixing tool 47 is fixed to the outer surface of the metal end plates 111 and 112 by screws 48 and fixed to the metal tube 11. In the fourth embodiment, since the spacer wire 41 is fixed to the metal cylinder 11, the operation of inserting the insulating cylinder 21 </ b> A of the high voltage electrode 20 into the inner periphery of the metal cylinder 11 is further simplified.

  In FIG. 9A, the insulating cylinder 21 is formed of a glass tube having a closed end portion 21a. However, as in Embodiments 3 and 4, it is also possible to use the insulating cylinder 21A made of a glass tube having both ends opened and seal the right end with the plug member 45.

Embodiment 6 FIG.
FIG. 10A is a side view showing a part of an ozone cell structure 110A used in Embodiment 6 of the ozone generator according to the present invention, and FIG. 10B is a longitudinal sectional view of the part. In the sixth embodiment, the ozone cell structure 110 in the first embodiment is replaced with an ozone cell structure 110A shown in FIGS. 10A and 10B. The ozone cell structure 110 </ b> A includes a plurality of ozone generation cells 120 disposed between a pair of opposing metal end plates 111 and 112, and a spacer assembly 50. In the spacer assembly 50 used in the sixth embodiment, the spacer wires 41 arranged in the annular discharge gaps 30 of the two adjacent ozone generation cells 120 of the plurality of ozone generation cells 120 are used as a common wire. 51 and held in the ozone cell structure 110A. The common wire 51 includes spacer wires 41 in two adjacent ozone generation cells 120 and connecting wires 51a and 51b connecting the spacer wires 41. The other configuration is the same as that of the first embodiment.

  The connecting wire 51 a is disposed outside the metal end plate 111, and the connecting wire 51 b is disposed outside the metal end plate 112. The connecting wires 51 a and 51 b are configured as an extended portion of each spacer wire 41 of two adjacent ozone generation cells 120 by the common wire 51. These connecting wires 51a and 51b connect the spacer wires 41 arranged in the annular discharge gap 30 between two adjacent ozone generating cells 120, and connect the spacer wires 41 of these ozone generating cells 120 to the ozone cell structure 110A. Hold. In the sixth embodiment, since each spacer wire 41 of each ozone generation cell 120 is held by the ozone structure 110, a high voltage is provided on each inner periphery of the metal tube 11 of the ground electrode 10 of each ozone generation cell 120. The operation of inserting the electrode 20 can be easily performed.

  In FIGS. 10A and 10B, attention is paid to two ozone generation cells 120a and 120b adjacent in the vertical direction, for example. One common wire 51 becomes one spacer wire 41 of the ozone generation cell 120a, and penetrates the annular discharge gap 30 of the ozone generation cell 120a from the outside of the metal end plate 111 in the extending direction of the central axis thereof. It reaches the outside of the end plate 112 and becomes the connecting wire 51b outside the metal end plate 112, and reaches the outside of the metal end plate 112 of the adjacent ozone generation cell 120b. Furthermore, the common wire 51 becomes the spacer wire 41 of the ozone generation cell 120b from the outside of the metal end plate 112, penetrates the annular discharge gap 30 of the ozone generation cell 120b in the direction of the central axis CC, It reaches the outside of the metal end plate 111, becomes a connecting wire 51a outside the metal end plate 111, and returns to the outside of the metal end plate 111 of the ozone generation cell 120a. As described above, the spacer wires 41 of the two adjacent ozone generation cells 120a and 120b and the connecting wires 51a and 51b are constituted by the common wire 51 and are held by the ozone cell structure 110A. Similarly, for the other two adjacent ozone generation cells 120, the spacer wire 41 and the connecting wires 51a and 51b are configured by the common wire 51 and are held in the ozone cell structure 110A.

Embodiment 7 FIG.
FIG. 11A is a side view showing a part of an ozone cell structure 110B used in Embodiment 7 of the ozone generator according to the present invention, and FIG. 11B is a longitudinal sectional view of a part thereof. In the seventh embodiment, the ozone cell structure 110 in the first embodiment is replaced with an ozone cell structure 110B shown in FIGS. 11A and 11B. The ozone cell structure 110B includes a plurality of ozone generation cells 120 disposed between a pair of opposing metal end plates 111 and 112, and a spacer assembly 50A. In the seventh embodiment, a spacer assembly 50A is used in place of the spacer assembly 50 of the sixth embodiment. The spacer assembly 50A is obtained by adding a plurality of tension springs 52 to the spacer assembly 50 used in the sixth embodiment. The other configuration is the same as that of the sixth embodiment.

  Each of the plurality of tension springs 52 is disposed substantially at the center of the connecting wire 51 b and is disposed on the side surface of the metal end plate 112. The tension spring 52 applies tension to the spacing wire 41 of the two adjacent ozone generation cells 120. As a result, the spacer wires 41 of the two adjacent ozone generation cells 120 formed of the common wire 51 are held by the ozone cell structure 110 in a state of being pulled in the extending direction of the central axis CC. Thus, when tension is applied to the spacer wires 41 of the two adjacent ozone generation cells 120 by the tension springs 52, the operation of inserting the high voltage electrode 20 into the inner periphery of the metal cylinder 11 can be performed more easily.

Embodiment 8 FIG.
FIG. 12 is a side view showing an ozone cell structure 110C used in the eighth embodiment of the ozone generator according to the present invention. In the eighth embodiment, the ozone cell structure 110 in the first embodiment is replaced with an ozone cell structure 110C shown in FIG. The ozone cell structure 110C includes a plurality of ozone generation cells 120 disposed between a pair of opposing metal end plates 111 and 112, and a spacer assembly 50B. The spacer assembly 50B used in this eighth embodiment uses a wire fixing member 53 instead of the tension spring 52 in the spacer assembly 50A of the seventh embodiment. Others are the same as those of the seventh embodiment.

  The wire fixing members 53 are disposed at approximately the centers of the four adjacent ozone generation cells 120, respectively. The wire fixing member 53 is constituted by a screw, for example, and is screwed into the metal end plate 112 and fixed. The wire fixing member 53 fixes the connecting wire 51 b between the four adjacent ozone generation cells 120 to the metal end plate 112. For example, when attention is paid to four adjacent ozone generation cells 120a to 120d, the connection wire 51b1 connects the spacer wires 41 of the ozone generation cells 120a and 120b between the ozone generation cells 120a and 120b. The connecting wire 51b2 connects the spacer wires 41 of the ozone generating cells 120c and 120d between the ozone generating cells 120c and 120d. The wire fixing member 53 is disposed at an intersecting portion where the connecting wires 51b1 and 52b2 cross each other, and fixes the connecting wires 51b1 and 51b2 to the metal end plate 112. Similarly, with respect to the other four adjacent ozone generation cells, the wire fixing member 5 fixes the intersection of the two connecting wires to the metal end plate 112 at substantially the center thereof.

  In the eighth embodiment, since the connecting wire 51b is fixed to the metal end plate 112 by the wire fixing member 53, the work for integrating the connecting wire 51b with the ground electrode 10 becomes easy.

Embodiment 9 FIG.
FIG. 13 is a longitudinal sectional view showing an ozone generation cell 120D used in Embodiment 9 of the ozone generator according to the present invention. In the ninth embodiment, all the ozone generation cells 120 in the first embodiment are replaced with the ozone generation cells 120D shown in FIG. In the ozone generation cell 120D, a plurality of spacer portions 15 are formed on the inner peripheral surface of the metal cylinder 11 constituting the ground electrode 10 without using the spacer assembly 40 used in the first embodiment. The other configuration is the same as that of the first embodiment.

  The plurality of spacer portions 15 are formed at intervals from each other in the circumferential direction of the annular discharge gap 30, similarly to the spacer wire 41 in the first embodiment. Each spacer portion 15 is continuously formed over the entire length Ls of the annular discharge gap 30 in the direction of the central axis CC, or is continuously formed in a range of 80% or more of the length Ls. The radial gap length d is regulated over almost the entire length Ls in the central axis CC direction of the annular discharge gap 30. The spacer portion 15 is configured, for example, by welding the spacer wire 41 in the first embodiment to the inner peripheral surface of the metal tube 11, or by shaving the inner peripheral surface of the metal tube 11 and integrally forming the metal tube 11. Is done. When the inner peripheral surface of the metal cylinder 11 is shaved to form the spacer portion 15 integrally with the metal cylinder 11, it is effective to etch the inner peripheral surface of the metal cylinder 11 using an acid solution. As with the spacer wire 41 in the first embodiment, the spacer portion 15 can have a circular cross section, or can have a square cross section. When the inner peripheral surface of the metal cylinder 11 is cut by etching or the like, the protruding surface 15a of the spacer portion 15 becomes an arc surface that forms a part of the circumferential surface.

  The plurality of spacer portions 15 can also be formed on the outer peripheral surfaces of the insulating cylinders 21 and 21A constituting the high-voltage electrode 20. Also in this case, the plurality of spacer portions 15 are formed at intervals in the circumferential direction of the annular discharge gap 30, and each spacer portion 15 has a length in the direction of the central axis CC of the annular discharge gap 30. It is continuously formed over a range of 80% or more of Ls. The spacer portion 15 is configured, for example, by welding the spacer wire 41 in the first embodiment to the outer peripheral surface of the insulating cylinders 21 and 21A, or by shaving the outer peripheral surface of the insulating cylinders 21 and 21A. And formed integrally. When the outer peripheral surfaces of the insulating cylinders 21 and 21A are shaved to form the spacer portion 15 integrally with the insulating cylinders 21 and 21A, it is effective to etch and configure the outer peripheral surfaces of the insulating cylinders 21 and 21A.

  In the ninth embodiment, since the spacer portion 15 is formed on the metal cylinder 11 constituting the ground electrode 10 or the insulating cylinders 21 and 21A constituting the high-voltage electrode 20, the assembly work of the ozone generating cell 120D can be easily performed. Can do.

Embodiment 10 FIG.
FIG. 14A is a transverse sectional view showing a ground electrode 10A used in Embodiment 10 of the ozone generator according to the present invention, and FIG. 14B is a longitudinal sectional view thereof. In the tenth embodiment, the ground electrodes 10 of all the ozone generation cells 120 of the first embodiment are replaced with the ground electrodes 10A shown in FIGS. 14A and 14B, and the spacer assembly 40 of each ozone generation cell 120 is removed. The The metal cylinder 11 constituting the ground electrode 10A of the tenth embodiment has a plurality of dot-like spacer portions 15B on the inner peripheral surface thereof. The other configuration is the same as that of the first embodiment.

  The plurality of dot-like spacer portions 15B are formed by applying pressure from the outer peripheral portion of the metal tube 11 and deforming the metal tube 11 so as to partially protrude on the inner peripheral surface thereof. The plurality of dotted spacer portions 15 </ b> B are formed on four parallel lines parallel to the central axis CC of the metal cylinder 11 at intervals. The four parallel lines are set around the central axis C-C at intervals of 90 degrees. The area where the plurality of dotted spacer portions 15B are scattered extends over the entire length Ls of the annular discharge gap 30 in the direction of the central axis CC, and the length of the annular discharge gap 30 in the direction of the central axis CC. A gap length d is defined for the entire length of Lg.

  Also in the tenth embodiment, since the spacer portion 15B is formed on the metal cylinder 11 constituting the ground electrode 10A, the assembly operation of the ozone generation cell 120D can be easily performed.

Embodiment 11 FIG.
FIG. 15A is a transverse sectional view showing a ground electrode 10B used in Embodiment 11 of the ozone generator according to the present invention, and FIG. 15B is a longitudinal sectional view thereof. In the eleventh embodiment, the ground electrodes 10 of all the ozone generation cells 120 of the first embodiment are replaced with the ground electrodes 10B shown in FIGS. 15A and 15B, and the spacer assembly 40 of each ozone generation cell 120 is removed. The Similarly to the metal cylinder 11 of the tenth embodiment, the metal cylinder 11 constituting the ground electrode 10B of the eleventh embodiment has a plurality of dot-like spacer portions 15B on the inner peripheral surface thereof, and has a plurality of dot-like shapes. The spacer portions 15B are formed on eight parallel lines parallel to the central axis C-C at intervals.

  The eight parallel lines are set around the central axis CC of the metal cylinder 11 at an angular interval of 45 degrees. Although the dotted spacer portions 15B are scattered on the eight parallel lines, the plurality of dotted spacer portions 15B are positioned between the dotted spacer portions 15B on the other parallel lines. Arranged to do. The area where the plurality of dotted spacer portions 15B are scattered extends over the entire length Ls of the annular discharge gap 30 in the direction of the central axis CC, and the length of the annular discharge gap 30 in the direction of the central axis CC. The gap length d is defined in the entire length of Lg. The number of parallel lines is not limited to eight, and three or more parallel lines can be set around the central axis C-C at equal angular intervals.

Embodiment 12 FIG.
FIG. 16 is a longitudinal sectional view showing an ozone generation cell 120E used in Embodiment 12 of the ozone generator according to the present invention. In the twelfth embodiment, all the ozone generation cells 120 in the first embodiment are replaced with the ozone generation cells 120E shown in FIG. In the ozone generation cell 120E, a plurality of dot-like spacers 15C are arranged in the annular discharge gap 30, and the plurality of dot-like spacers 15C constitute the inner peripheral surface of the metal cylinder 11 constituting the ground electrode 10 or the high-voltage electrode 20. The insulating cylinders 21 and 21A are attached to the outer peripheral surface using an adhesive. The spacer fastener 43 in the first embodiment is not used. The other configuration is the same as that of the first embodiment.

  Also in the twelfth embodiment, since the plurality of point-like spacers 15C are attached to the metal cylinder 11 or the insulating cylinders 21 and 21A, the assembly operation of the ozone generation cell 120E can be easily performed.

Other embodiments.
In each of the first to twelfth embodiments, in each ozone generation cell 120, the ground electrode 10 is constituted by the metal cylinder (first electrode) 11, and the high voltage electrode 20 is constituted by the insulating cylinder 21 and the conductive layer 22 (second electrode). However, the high-voltage electrode 20 can be constituted by the metal cylinder (first electrode) 11 and the ground electrode 10 can be constituted by the insulating cylinder 21 and the conductive layer 22 (second electrode). Also in this case, both ends of the metal cylinder 11 are fixed to a pair of metal end plates 111 and 112, and an insulating cylinder 21 is disposed on the inner periphery of the metal cylinder 11, and a conductive layer 22 is formed on the insulating cylinder 21. Is done. In this case, the high voltage of the AC high voltage power supply 108 of FIG. 1 is supplied to the metal cylinder 11 of each ozone generation cell 120 via the metal end plates 111 and 112, and the conductive layer 22 is grounded.

  In each of the first to twelfth embodiments, the conductive layer 22 is formed on the inner periphery of the insulating cylinder 21, but the conductive layer 22 may be changed to be formed on the entire outer peripheral surface of the insulating cylinder 21. This change is not limited to the case where the insulating cylinder 21 and the conductive layer 22 constitute the high-voltage electrode 20, but can also be adopted when the insulating cylinder 21 and the conductive layer 22 constitute the ground electrode 10.

  The ozone generator according to the present invention industrially generates ozonized gas used for water treatment facilities and the like.

BRIEF DESCRIPTION OF THE DRAWINGS It is a whole block diagram of Embodiment 1 of the ozone generator by this invention. 2 is a cross-sectional view of an ozone generation cell according to Embodiment 1. FIG. 2 is a longitudinal sectional view of an ozone generation cell according to Embodiment 1. FIG. 6 is an explanatory diagram of spacer assembly in Embodiment 1. FIG. It is explanatory drawing of the spacer assembly in Embodiment 2 of the ozone generator by this invention. It is an ozone generation characteristic figure which shows the effect of Embodiment 1,2. It is a cross-sectional view of an ozone generation cell showing the cause of the effects of the first and second embodiments. It is a longitudinal cross-sectional view of FIG. 5A. It is a graph which shows the relationship between the outer diameter of the insulation cylinder of the high voltage electrode of Embodiment 1, 2, and thickness. It is a cross-sectional view of the ozone generation cell in Embodiment 3 of the ozone generator by this invention. 6 is a side view of an ozone generation cell according to Embodiment 3. FIG. It is a front view of the ozone generation cell in Embodiment 4 of the ozone generator by this invention. 6 is a side view of an ozone generation cell according to Embodiment 4. FIG. It is a cross-sectional view of the ozone generation cell in Embodiment 5 of the ozone generator by this invention. It is a side view of the ozone generation cell in Embodiment 5. It is a partial side view of the ozone cell structure in Embodiment 6 of the ozone generator by this invention. FIG. 10 is a longitudinal sectional view of a part of an ozone cell structure in a sixth embodiment. It is a partial side view of the ozone cell structure in Embodiment 7 of the ozone generator by this invention. FIG. 10 is a longitudinal sectional view of a part of an ozone cell structure in a seventh embodiment. It is a partial side view of the ozone cell structure in Embodiment 8 of the ozone generator by this invention. It is a longitudinal cross-sectional view of the ozone generation cell in Embodiment 9 of the ozone generator by this invention. It is a cross-sectional view of the ground electrode in Embodiment 10 of the ozone generator by this invention. FIG. 38 is a longitudinal sectional view of a ground electrode in the tenth embodiment. It is a cross-sectional view of the ground electrode in Embodiment 11 of the ozone generator by this invention. FIG. 38 is a longitudinal sectional view of a ground electrode in the eleventh embodiment. It is a longitudinal cross-sectional view of the ozone generation cell in Embodiment 12 of the ozone generator by this invention. It is a cross-sectional view of a conventional ozone generation cell. It is sectional drawing by the AA line of FIG. 17A. It is a cross-sectional view which shows the bending of the electrode of the conventional ozone generation cell. It is a longitudinal cross-sectional view of the ozone generation cell of FIG. 18A. It is a graph showing the conventional ozone generation characteristic. It is a longitudinal cross-sectional view in case there exists eccentricity of the conventional ozone generation cell. It is a graph which shows the relationship between eccentricity and ozone concentration.

Explanation of symbols

100: ozone generator,
110, 110A, 110B, 110C: ozone cell structure,
111, 112: Metal end plate, 10, 10A, 10B: Ground electrode, 11: First electrode,
20: High voltage electrode, 21, 21A, 22: Second electrode,
40, 40A, 40B, 40C, 40D: spacer assembly,
41 spacer wire, 43, 43A: spacer fastener, 45: plug member,
47: spacer fixing member, 50: spacer assembly, 15, 15B; spacer portion.
15C: Spacer.

Claims (20)

  A cylindrical first electrode; and a cylindrical second electrode, wherein the first electrode and the second electrode are arranged concentrically around a common central axis, and the first electrode and the second electrode An ozone generator having an annular discharge gap extending along the central axis, and further comprising a spacer wire disposed in the annular discharge gap, the spacer wire having the annular discharge gap An ozone generator which extends over substantially the entire length in the central axis direction and defines a gap length in the radial direction of the annular discharge gap.   2. The ozone generator according to claim 1, wherein the spacer wire is made of a metal selected from the group including platinum clad tungsten, tungsten, stainless steel, titanium, and aluminum.   2. The ozone generator according to claim 1, wherein the spacer wire has a circular cross section.   4. The ozone generator according to claim 3, wherein the outer diameter φ of the spacer wire satisfies 1.05φ <d <1.2φ, where d is the gap length in the radial direction of the annular discharge gap. The ozone generator characterized by being set to.   2. The ozone generator according to claim 1, wherein the second electrode is formed by forming a conductive layer on a peripheral surface of an insulating cylinder, and the insulating cylinder has an outer diameter of 5 to 30 (mm) and a thickness of two. An ozone generator comprising a glass tube of 0.25 (mm) to 5.0 (mm).   2. The ozone generator according to claim 1, wherein a plurality of the spacer wires are arranged at intervals in the circumferential direction of the annular discharge gap.   2. The ozone generator according to claim 1, wherein one spacer wire is spirally arranged around the central axis. 3.   The ozone generator according to claim 6 or 7, wherein the second electrode is configured by forming a conductive layer on a peripheral surface of an insulating cylinder, and a spacer fastener is disposed on an outer periphery of an end portion of the insulating cylinder. An ozone generator characterized in that a spacer fastener holds the spacer wire.   The ozone generator according to claim 6 or 7, wherein the second electrode is configured by forming a conductive layer on a peripheral surface of an insulating cylinder, and includes a plug member fitted into an end of the insulating cylinder, A stopper member holds the spacer wire.   The ozone generator according to claim 1, further comprising spacer fixing members disposed at both ends of the first electrode, wherein the spacer wire is fixed to the first electrode by the spacer fixing member. A featured ozone generator.   A cylindrical first electrode and a cylindrical second electrode are provided, and the first electrode and the second electrode are arranged concentrically around a common central axis, and an annular discharge gap is provided therebetween. And an ozone generator for converting the raw material gas passing through the annular discharge gap into an ozonized gas by generating a silent discharge in the annular discharge gap, and further a spacer disposed in the annular discharge gap Ozone generation characterized by comprising a wire, the spacer wire extending over a range of 80% or more of the annular discharge gap in the central axis direction, and defining a gap length in the radial direction of the annular discharge gap apparatus.   12. The ozone generator according to claim 11, wherein a plurality of the spacer wires are arranged at intervals in the circumferential direction of the annular discharge gap.   The ozone generator according to claim 11, wherein one spacer wire is spirally arranged around the central axis.   An ozone generator having an ozone cell structure, wherein the ozone cell structure includes a pair of opposing end plates and a plurality of ozone generating cells disposed between the pair of end plates, and each of the ozone generating cells. Has a cylindrical first electrode disposed between the pair of end plates and a cylindrical second electrode disposed on the inner peripheral side of the first electrode, and the first electrode and the second electrode Are arranged concentrically around a common central axis and form an annular discharge gap extending along the central axis between them, and each of the ozone generating cells has the annular discharge. A spacer wire disposed in the gap, the spacer wire extending over substantially the entire length of the annular discharge gap in the central axis direction, and defining a gap length in the radial direction of the annular discharge gap; Characteristic ozone emission Apparatus.   15. The ozone generator according to claim 14, wherein the spacer wires of the two ozone generating cells are constituted by a common wire, and the common wire connects the spacer wires of the two ozone generating cells. The ozone generator characterized by including the connecting wire which does.   16. The ozone generator according to claim 15, wherein the connecting wire is coupled to a tension spring, and the tension spring applies tension to the spacer wires of the two ozone generation cells.   A first electrode composed of a metal cylinder; and a second electrode having a conductive layer formed on a peripheral surface of the insulating cylinder, the inner circumference side of the metal pipe of the first electrode centered on the central axis of the metal cylinder An ozone generator having an annular discharge gap formed between the metal tube and the insulating tube, the inner electrode of the metal tube and the outer peripheral surface of the insulating tube One of the spacers has a spacer portion, and the spacer portion defines a gap length in the radial direction of the annular discharge gap in substantially the entire length of the annular discharge gap in the central axis direction. .   18. The ozone generator according to claim 17, wherein the spacer portion is formed integrally with the metal tube on an inner peripheral surface thereof.   18. The ozone generator according to claim 17, wherein the spacer portion is formed by etching an inner periphery of the metal cylinder.   18. The ozone generator according to claim 17, wherein the spacer portion is formed integrally with the insulating cylinder on an outer peripheral surface thereof.

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