JP3837878B2 - Double-sided cooling ozonizer - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a double-sided cooling ozonizer capable of generating particularly high-concentration ozone among ozonizers for generating ozone used for water treatment and the like.
[0002]
[Prior art]
Ozonizers are widely used in water treatment facilities and the like in order to utilize the bactericidal, decolorizing and deodorizing power of ozone.
FIG. 8 shows a model of the structure of a double-sided cooling ozonizer described in Japanese Patent Application No. 8-135608 filed by the present applicant, where (a) is an overall cross-sectional view and (b). FIG. 3 is a partial cross-sectional view showing an enlarged part of an ozone generating tube.
[0003]
The housing of the ozonizer is constituted by a barrel-shaped body 1 made of stainless steel having both ends open and side plates 21 and 22 made of two stainless steels fastened to both ends of the opening. Yes. Since the two side plates 21 and 22 and the body portion 1 need to be airtightly connected to each other, screws (not shown) are connected to both opening end portions through flat packings (simply packings in FIG. 6) 81 and 82, respectively. It is connected using a fastening means such as. On the inner surface side of the body portion 1, support plates 41 and 42 made of at least a pair of stainless steel for holding a large number of ozone generating tubes are fitted at appropriate intervals. The tube wall of the body 1 has a gas inlet 11 for supplying a raw material gas at a position intermediate between the side plate 21 and the support plate 41 on the side plate 21 side, and supports the side plate 22 on the opposite side and the side plate 22 side. There is a gas outlet 12 for taking out the gas containing the generated ozone at a position intermediate to the plate 42. Further, a cooling water inlet 13 for allowing cooling water to flow in and a cooling water outlet 14 for discharging the cooling water are provided substantially opposite to each other between the two support plates 41 and 42. Usually, the cooling water inlet 13 is provided in the lower part and the cooling water outlet 14 is provided in the upper part. In addition, a voltage introduction terminal 72 is mounted at a position near the side plate 21 of the body 1.
[0004]
The ozone generating tubes supported by the support plates 41 and 42 are a discharge electrode having a substantially constant gap length inside the ground electrode 5 and a ground electrode 5 made of cylindrical ground-side stainless steel or the like that is open at both ends. The high-voltage electrode 6 is disposed with a gap 56 interposed therebetween. The ground electrode 5 includes a metal tube 51 made of stainless steel, and a lining (a glass tube is inserted inside the metal tube 51 and the glass is softened by induction heating in a state where internal pressure is applied. The glass dielectric layer 52 is formed by a technology for forming a glass layer on the glass dielectric layer 52. The high voltage electrode 6 is formed in a cylindrical shape closed at both ends, and two cooling pipes are connected to one end surface. Cooling water flows from the cooling pipe into the high voltage electrode 6 to cool the high voltage electrode 6. The cooling water is branched from a pair of manifolds 95 and 96 provided at the upper and lower positions of one end of the body portion 1 and supplied to the cooling pipes of the high voltage electrodes 6 by the insulating tubes 97. The insulating tube 97 is used to electrically insulate the high voltage electrode 6 and the body 1 from each other, and the ion exchanger 94 is installed in the cooling water system because the electric resistance value of the cooling water is determined. This is because the insulation is not caused by cooling water while keeping it high. Near both ends of the lower portion of the outer surface of the high-voltage electrode 6, a protrusion 61 for holding the discharge gap 56 is formed by welding. The ozone generating tube is fitted into through holes formed in the support plates 41 and 42 and supported by the support plates 41 and 42, and the contact portion is not shown so that the cooling water does not leak. Sealed by a ring.
[0005]
The reason why stainless steel is used for the housing, the ozone generating tube, etc. is that stainless steel has resistance to the strong oxidizing action of ozone.
One of the high-frequency voltages supplied from the high-frequency power source 73 to the ozone generator tube is supplied from the voltage introduction terminal 72 attached to the body 1 to the high voltage electrode 6 of each ozone generator tube via the lead wire 71. The other of the high-frequency voltages of the high-frequency power source 73 is connected to the ground potential point, and is simultaneously connected to the body 1 and is connected to the ground electrode 5 through a lead wire (not shown).
[0006]
The cooling water for cooling the ground electrode 5 of the ozone generating tube is cooled by the heat exchanger 93 and pressurized by the pump 92 in common with the cooling water of the high voltage electrode 6 described above, and the cooling water passes through the cooling pipe 91. The ground electrode 5 is supplied from the inlet 13 to the water jacket 3 to cool the ground electrode 5, and returns from the cooling water outlet 14 through the cooling pipe 91 to the heat exchanger 93. Since this cooling system also serves to cool the high voltage electrode 6, it is a water supply system using high-purity water, and includes the ion exchanger 94 as described above. Although cooling of the ground electrode 5 does not require high-resistance pure water, pure water is used to simplify the cooling system.
[0007]
In such a double-sided cooling ozonizer, a source gas (such as air or oxygen) containing oxygen supplied from the gas inlet 11 flows into the discharge gap 56 from the opening of the ground electrode 5 on the side plate 21 side, and in the discharge gap 56 A part of oxygen is ozonized by silent discharge, and is extracted from the gas outlet 12 as a gas containing ozone. A pressure regulating valve (not shown) is mounted behind the gas outlet 12, and the pressure value of the gas is adjusted to, for example, 1.7 atm to supply a gas containing ozone to the consuming equipment.
[0008]
The conventional double-sided cooling ozonizer as described above is usually equipped with several tens to several hundreds of ozone generating tubes, and such an ozonizer supplies a large amount of ozone at a level of several tens of kilograms / hour. Suitable for doing. However, for applications where a small amount of ozone supply of tens to hundreds of grams / hour is sufficient, the number of ozone generation tubes required is one to several, and multiple units are housed in a single housing. The ozonizer has a problem that it is rather large and expensive.
[0009]
[Problems to be solved by the invention]
An object of the present invention is to provide a small and inexpensive double-sided cooling ozonizer suitable for supplying a small amount of ozone of tens to hundreds of grams / hour.
[0010]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, in the present invention, a cylindrical ground electrode having both ends open and a dielectric layer formed on the inner surface, and a gap is disposed inside the ground electrode and introduced into the interior. It consists of an ozone generator tube consisting of a cylindrical high-voltage electrode with both ends closed and cooled by the cooled cooling water, and a cylindrical body having both ends open and two side plates for hermetically closing the opening. And a single housing containing the ozone generating tube, a water jacket provided between the housing and the ground electrode for cooling the ground electrode, and a power source for supplying power to the ozone generating tube. In a double-sided cooling ozonizer that generates ozone by discharge of a source gas containing oxygen introduced into the tube, a high voltage is attached to both ends of one ozone generator tube built in the housing and a high voltage electrode of the ozone generator tube. Electrode and electricity A metal pipe having a screw connected to the source and introducing or discharging cooling water and having a screw at the tip, and an insulating member penetrating the side plate and penetrating the metal pipe at the outer periphery of the metal pipe. The screw of the metal pipe protruding from the member is hermetically tightened with a socket (invention of claim 1).
[0011]
Since one ozone generating tube is housed in one housing, standardization by a compact optimum design is possible and mass production is possible. If one unit is insufficient, a plurality of units may be operated in parallel as necessary. In addition, since the metal pipe for voltage introduction and cooling water to the high voltage electrode is drawn out to the side surface in the center of the side plate, only the connection portion of the cooling water for the ground electrode is mounted on the side surface in the longitudinal direction of the ozonizer. The structure is reduced and the thickness of the ozonizer is reduced.
[0012]
In the invention of claim 1, the metal pipe is provided with at least one annular groove, and an O-ring is fitted in the annular groove (invention of claim 2). By this O-ring, an airtight seal between the metal pipe and the insulating member is completely ensured. In the invention of claim 1 or claim 2, the insulating member is provided with a collar (invention of claim 3). The creepage distance of the insulating member is greatly increased by the collar, and electrical insulation can be ensured even if condensation occurs.
[0013]
As a means for connecting to the ground electrode, there is provided a conductive screw connected to the ground potential side of the power source, hermetically penetrating the casing, and being in contact with the ground electrode (invention of claim 4). . Since the screw is brought into contact with the ground electrode through the casing, the potential of the ground electrode can be kept at the ground potential completely. The interior of the water jacket is partitioned into a spiral continuous space by a spiral partition member (invention of claim 5). The cooling water is uniformly circulated by the spiral partition member, and the flow rate of the cooling water is increased. The housing is arranged so that the axial direction of the housing is vertical, and the cooling water inlet is provided at the lower portion of the housing and the cooling water outlet is provided at the upper portion of the housing. Since the cooling water is flowed from the bottom to the top in the vertical arrangement, bubbles do not remain in the cooling space.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of a double-sided cooling ozonizer according to the present invention will be described using examples. Also in this invention, since the basic configuration is the same as that of the prior art, the same reference numerals are used for portions having the same functions as those of the prior art.
[First embodiment]
FIG. 1 is a cross-sectional view showing the structure of a first embodiment of a double-sided cooling ozonizer according to the present invention, and FIG. 2 is a partially enlarged cross-sectional view showing the structure of the connecting portion of the high voltage electrode.
[0015]
First, the overall configuration will be described with reference to FIG.
In the casing constituted by the body 1a and the two side plates 21b and 22b, a pair of electrodes consisting of the ground electrode 5 and the high voltage electrode 6 are housed. The supply system, the cooling system for cooling the ground electrode 5 and the high voltage electrode 6 with cooling water, and the supply system for the raw material gas are integrated to form a so-called single-sided double-sided cooling ozonizer having one ozone generating tube. Has been.
[0016]
The cylindrical body 1a made of stainless steel is provided with flanges having holes that are just sized to fit the ground electrode 5 at both ends, and the length of the both ends of the ground electrode 5 protrudes somewhat from the flange. The length to be set. With the ground electrode 5 fitted into this hole and with both ends protruding somewhat, O-rings 83 and 84 made of fluorine rubber are fitted in the vicinity of both ends of the ground electrode 5 protruding to the outside of the flange. When the side plates 21a and 22a are fastened by fastening means such as screws (not shown), the body 1a and the ground electrode 5 are integrated in an airtight manner to form a water jacket 3 between them, and at the same time, the body 1a. And the side plates 21a and 22a are integrated.
[0017]
Near both ends of the body portion 1a, a cooling water inlet 13 and a cooling water outlet 14 for supplying cooling water for cooling the ground electrode 5 to the water jacket 3 are provided. Usually, both are provided at substantially diagonal positions.
The side plates 21a and 22a are made of stainless steel. In the central part, connecting members 63 and 64 of the high voltage electrode 6 for supplying high frequency voltage and cooling water to the high voltage electrode 6 are electrically insulated by insulating members 65 and 66, respectively, and airtightly penetrated. The high voltage electrode 6 is positioned, held, and fixed. Further, the side plate 21a is provided with a gas inlet 211 which is a supply port for the source gas, and the side plate 22a is provided with a gas outlet 221 for taking out ozonized gas.
[0018]
In this embodiment, the side plates 21a and 22a are made of stainless steel, but may be made of fluorine resin.
As in the prior art, the ground electrode 5 has a glass dielectric layer 52 formed on the inner surface of a metal tube 51 made of stainless steel by lining. The high voltage electrode 6 is made of stainless steel, has a cylindrical shape with lids at both ends, and is inserted into the ground electrode 5 while holding a uniform discharge gap 56. The connecting members 63 and 64 described above are attached to the center portions of the lids at both ends by welding. In order to maintain a uniform discharge gap 56, a plurality of protrusions 61 are formed on the lower portion of the high voltage electrode 6 by overlay welding.
[0019]
Next, a configuration method in the vicinity of the connection member 63 of the high voltage electrode 6 will be described in detail with reference to FIG.
The connecting members 63 and 64 of the high voltage electrode 6 are made of stainless steel pipes, one end of which is aligned with the hole in the center of the lid on the side of the high voltage electrode 6 and welded to the other end. Has a screw formed.
[0020]
The configuration method in the vicinity of the connecting member 63 is as follows.
(1) Insert the ground electrode 5 into the body 1a with both ends projecting little by little.
(2) Insert the high voltage electrode 6 with the connecting members 63 and 64 into the ground electrode 5.
(3) The side plates 21b and 22b are fixed to both sides of the body 1a with bolts (not shown). At this time, the connecting members 63 and 64 are inserted through holes formed in the central portions of the side plates 21b and 22b. At the time of fixing, the O-rings 83 and 84 ensure an airtight seal among the side plates 21b and 22b, the trunk portion 1a, and the ground electrode 5.
(4) The insulating member 65 is passed outside the connecting member 63, the insulating member 66 is passed outside the connecting member 64, and the insulating members 65 and 66 are screwed into the respective screws formed on the side plates 21b and 22b and fixed. . At the time of fixing, an airtight seal is secured between the side plate 21b and the insulating member 65 and between the side plate 22b and the insulating member 66 by the O-ring 85 and 86 (not shown).
(5) The sockets 98 and 99 having screws formed on the inner surface are screwed into the screws of the connection members 63 and 64, and the high voltage electrode 6 is fixed. At this time, an airtight seal between the insulating member 65 and the connecting member 63 and between the insulating member 66 and the connecting member 64 is ensured by the O-ring 87 and 88 (not shown).
[0021]
As described above, the configuration in the vicinity of the connection member 63 shown in FIG. 2 is completed.
The insulating member 65 (or 66) is made of a material having ozone resistance and insulating properties such as fluorine resin. The shape is a cylindrical shape surrounding the connection member 63, but in order to improve the insulation against high voltage applied to the connection member 63, a groove for increasing the creepage distance is formed on the surface on the atmosphere side. . Further, an O-ring groove for hermetic sealing with the side plate 21b is formed on the contact surface with the side plate 21b.
[0022]
Next, a configuration example of the connecting member of the ground electrode 5 and its assembly will be described in detail with reference to FIG.
The connecting member of the ground electrode 5 is manufactured as a screw 78 made of stainless steel. The screw 78 is screwed into a screw hole formed at a position corresponding to the end of the metal plate 51 of the side plate 21b fixed to the body 1a, is brought into contact with the end of the metal plate 51, and a nut 79 It is fixed by. The screw 78 is connected to the ground potential side of the high-frequency power source 73 through a lead wire (not shown). The screw 78 may be a small size such as an M4 size, and the airtightness between the screw 78 and the side plate 21b is secured by a seal tape (not shown).
[0023]
The reason why such a reliable contact structure is employed is to avoid the following problems associated with unstable contact.
Since the ground electrode 5 is fitted into the flange of the trunk portion 1a, it is in partial contact with the flange of the trunk portion 1a. Therefore, it is considered that the ground electrode 5 maintains the ground potential. However, the contact state is an unstable contact, and the ground potential becomes unstable. If the ground potential becomes unstable, the discharge state also becomes unstable, making it difficult to keep the ozone concentration constant. Furthermore, in the worst case, the contact portion generates heat and melts. As a result, the ground electrode 5 is in a floating state in terms of potential, and the discharge cannot be maintained.
[0024]
In FIG. 5, the screw 78 passes through the side plate 21b and is brought into contact with the ground electrode 5. However, the screw 78 may be brought into contact with the ground electrode 5 through the body 1a.
In the case of a double-sided cooling ozonizer, not only the ground electrode 5 but also the high voltage electrode 6 is cooled, so that the resistance value of the cooling water needs to be high. Therefore, an ion exchanger 94 is provided in the cooling water system. In actual operation, if ion exchange water with sufficiently high resistance is set at the initial stage, it is not necessary to pass cooling water through ion exchanger 94 at all times. Sufficient resistance is maintained by passing it as necessary. can do. Further, FIG. 1 shows a case where valves are provided on both the ion exchanger 94 side and the bypass, but the bypass side valve is omitted and only a part of the water is circulated to the ion exchanger 94. Can also perform its function well.
[0025]
[Second Embodiment]
FIG. 3 is a partially enlarged cross-sectional view showing the configuration in the vicinity of the connecting member 63a for explaining the second embodiment. This embodiment is intended to further ensure an airtight seal between the connecting member and the insulating member.
The difference from the first embodiment is that a ring groove for an O-ring 89 is formed on the contact surface of the connecting member 63a with the insulating member 65, and the O-ring 89 is fitted into this groove, so that the connecting member 63a and the insulating member It is surely hermetically sealed between 65. In the case of the configuration shown in FIG. 2, when the temperature of the high voltage electrode 6 rises during discharge or the like and the dimension expands, the connecting member 63 and the socket 98 move together and the O-ring 87 is tightened. May loosen and seal performance may be reduced. On the other hand, if the sealing is performed by the O-ring 89 at the contact surface between the connecting member 63a and the insulating member 65 as shown in FIG. 3, the sealing performance can be reliably maintained.
[0026]
It should be noted that the number of O-rings should be increased in order to ensure completeness.
[Third embodiment]
FIG. 4 is a partially enlarged view showing the configuration in the vicinity of the insulating member 65a for explaining the third embodiment. This embodiment is intended to ensure insulation performance in the case of surface condensation such as the socket 98 in FIG.
[0027]
A flange 651 made of a rubber plate is fitted in the groove of the insulating member 65 in FIG. The collar 651 is, for example, a donut shape having a thickness of 3 mm and an outer diameter of 14 cm. Since the cooling water of the high-voltage electrode 6 flows inside the socket 98, when the cooling water temperature is low, condensation may occur on the surface of the socket 98. If the water drops spread on the surface of the insulating member 65, the dielectric breakdown occurs. May occur. In such a case, the collar 651 functions as a member for escaping water droplets, and prevents the water droplets from spreading greatly on the insulating member.
[0028]
[Fourth embodiment]
The fourth embodiment has been devised to improve the cooling efficiency of the water jacket 3 in the prior art as shown in FIG.
FIGS. 6A and 6B show the structure of the water jacket 3a in the fourth embodiment, in which FIG.
[0029]
The water jacket 3a in this embodiment has a structure in which a space surrounded by the body 1a and the ground electrode 5 is partitioned into a spiral continuous space. This partition is formed by inserting a stainless steel wire 31 having a thickness of 3 mm, for example, around the ground electrode 5 by spirally winding it at a pitch of 5 cm, for example, and then inserting it into the body 1a.
Due to the partitioning by the wire 31, the cooling water introduced from the cooling water inlet 13 circulates uniformly over the entire surface of the electrode along the wire 31 spirally, and the flow area is reduced, so the flow rate is not partitioned. Increase significantly compared to the case. As a result, the cooling efficiency of the ground electrode 5 is greatly improved.
[0030]
[Fifth embodiment]
The fifth embodiment is devised to improve the cooling efficiency of the water jacket 3 or 3a, and relates to the orientation of the ozonizer.
FIG. 7 shows a fifth embodiment, where (a) is a front view and (b) is a side view.
In this embodiment, the length direction of the ozonizer housing is arranged vertically (vertically). In the case of the prior art ozonizer, in order to arrange a large number of ozone generating tubes, a lateral structure that can be easily installed and held has been adopted. However, in the case of an ozonizer in which one ozone generating tube is accommodated in one casing, such as the double-sided cooling ozonizer according to the first aspect of the present invention, there is little need for a lateral structure, and the ground electrode and the high voltage The configuration shown in FIG. 7 that can reduce the size by increasing the cooling efficiency of the electrode is effective. That is, since the ground electrode is directly held on the side plate and the high-voltage electrode is held on the side plate via an insulating member or the like, the ozonizer case can be placed on the gantry 100 in a vertical orientation. By arranging the casing vertically with the cooling water inlet 13 and socket 98 on the bottom and the cooling water outlet 14 and socket 99 on the top, the cooling water is flowed from bottom to top, and the air bubbles inside the The ground electrode and the high voltage electrode are efficiently cooled over the entire surface. As a result, the water jacket 3 can be made smaller and the entire ozonizer can be made thinner.
[0031]
It is not always necessary that the arrangement is completely vertical, and a slight tilt is not a problem.
[0032]
【The invention's effect】
According to the present invention, in the double-sided cooling ozonizer, since one ozone generating tube is accommodated in one housing, standardization by a compact optimum design is possible and mass production is possible. When one unit is insufficient, a plurality of units may be operated in parallel as necessary. Therefore, it is possible to provide a small and inexpensive double-sided cooling ozonizer suitable for supplying a small amount of ozone of several tens to several hundred grams / hour.
[0033]
A metal pipe that is attached to both ends of the high voltage electrode, connects the high voltage electrode and the power source, introduces or discharges cooling water, and has a screw at the tip, and penetrates the side plate through the outer periphery of the metal pipe; Since the metal pipe screw protruding from the insulating member is hermetically tightened with a socket, the manifold and the insulating tube are unnecessary, and the length side of the ozonizer Has a structure in which only the cooling water connection for the ground electrode is mounted, and the thickness of the ozonizer is reduced. Therefore, a cheaper and more compact double-sided cooling ozonizer can be provided (the invention of claim 1).
[0034]
In the invention of claim 1, since the metal pipe is provided with at least one annular groove and the O-ring is fitted in the annular groove, the hermetic seal between the metal pipe and the insulating member even if the high voltage electrode is thermally expanded. Is completely secured. Therefore, a highly safe double-sided cooling ozonizer can be provided (invention of claim 2). In the first or second aspect of the invention, since the insulating member is provided with the flange, the creepage distance of the insulating member is greatly increased, and it is possible to ensure electrical insulation even if condensation occurs. Therefore, it is possible to provide a double-sided cooling ozonizer that is less likely to malfunction due to an insulation failure (invention of claim 3).
[0035]
As a means for connecting to the ground electrode, there is a conductive screw connected to the ground potential side of the power source, hermetically penetrating the casing, and in contact with the ground electrode. It can be kept at the ground potential completely. Therefore, a double-sided cooling ozonizer excellent in discharge stability can be provided (invention of claim 4).
[0036]
Since the inside of the water jacket is partitioned into a spiral continuous space by the spiral partition member, the cooling water circulates uniformly and the flow rate of the cooling water is increased. Therefore, the cooling efficiency of the ground electrode is improved, and the characteristics of the double-sided cooling ozonizer are stabilized (the invention of claim 5). The casing is arranged so that the axial direction of the casing is vertical, the cooling water inlet is provided at the bottom of the casing, the cooling water outlet is provided at the top of the casing, and the cooling water flows from the bottom to the top. No air bubbles remain in the cooling space. Therefore, the cooling efficiency of the ground electrode can be improved (invention of claim 6).
[Brief description of the drawings]
1 is a cross-sectional view showing the structure of a first embodiment of a double-sided cooling ozonizer according to the present invention; FIG. 2 is a partially enlarged cross-sectional view showing the configuration in the vicinity of a connecting member of the first embodiment; FIG. 4 is a partially enlarged sectional view showing the configuration in the vicinity of the connecting member of the embodiment. FIG. 4 is a partially enlarged view showing the configuration in the vicinity of the insulating member in the third embodiment. FIG. 6 is a partially enlarged cross-sectional view showing the structure of the water jacket of the fourth embodiment, (a) is a partially cutaway view of the trunk, and (b) is a partially cross-sectional view. (A) is a front view, (b) is a side view. FIG. 8 shows a structure of a double-sided cooling ozonizer according to the prior art, (a) is an overall sectional view, and (b) is an ozone generating tube. Partial cross-sectional view showing a part of an enlarged view [Explanation of symbols]
1, 1a trunk
11 Gas inlet 12 Gas outlet
13 Cooling water inlet 14 Cooling water outlet
21, 22, 21b, 22b side plate
211 Gas inlet 221 Gas outlet
3, 3a water jacket 31 wire
41, 42 Support plate
5 Ground electrode
51 Metal tube 52 Glass dielectric layer
56 Discharge gap
6 High voltage electrode
61 Protrusion 65, 66 Insulation member
63, 64, 63a, 64a Connecting member
71 Lead wire 72 Voltage lead-in terminal
73 High frequency power supply 78 Screw
79 Nut
81, 82 packing
83, 84, 85, 86, 87, 88, 89, 90 O-ring
91 Cooling piping 92 Pump
93 Heat exchanger 94 Ion exchanger
95, 96 Manifold 97 Insulation tube
98, 99 socket
100 mount

Claims (6)

A cylindrical ground electrode having both ends open and a dielectric layer formed on the inner surface, and a cylindrical body having a closed both ends disposed inside the ground electrode via a gap and cooled by cooling water introduced into the interior An ozone generator tube composed of a high-voltage electrode, a cylindrical body having both ends open, and a single housing that includes two side plates for airtightly closing the opening and contains the ozone generator tube; A raw material containing oxygen introduced into the casing, comprising a water jacket provided between the casing and the ground electrode for cooling the ground electrode, and a power source for supplying power to the ozone generating tube In a double-sided cooling ozonizer that generates ozone by gas discharge,
One ozone generator tube built in the housing, and both ends of the high voltage electrode of the ozone generator tube are connected to the high voltage electrode and the power source to introduce or discharge cooling water and A metal pipe having a screw in the part and an insulating member penetrating the side plate and penetrating the metal pipe in the outer peripheral part of the metal pipe, and the screw of the metal pipe protruding from the insulating member is hermetically sealed with a socket Double-sided cooling ozonizer characterized by being tightened into   The double-sided cooling ozonizer according to claim 1, wherein the metal pipe is provided with at least one annular groove, and an O-ring is fitted in the annular groove. The double-sided cooling ozonizer according to claim 1, wherein the insulating member includes a collar. 4. A conductive screw connected to the ground potential side of the power source, hermetically penetrating through the casing, and in contact with the ground electrode. A double-sided cooling ozonizer according to any of the above items. The double-sided cooling ozonizer according to any one of claims 1 to 4, wherein the inside of the water jacket is partitioned into a spiral continuous space by a spiral partition member. The casing is arranged so that the axial direction of the casing is vertical, and an inlet of cooling water is provided at a lower portion of the casing and an outlet of cooling water is provided at an upper portion of the casing. The double-sided cooling ozonizer according to any one of Items 5 to 5.

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