KR100485108B1 - Ozone generator - Google Patents

Abstract

The ozone generator includes a container having a source gas chamber for accommodating a source gas through an inlet at one end and an ozonizing gas chamber in communication with an outlet at the other end for accommodating the ozone gas, and a source gas chamber and an ozonized gas A cylindrical tube ground electrode having a dielectric on an inner circumferential surface for communicating the chamber, a hollow cylindrical high voltage electrode concentrically arranged at the cylindrical tube ground electrode with a predetermined discharge gap with respect to the dielectric, and between the ground electrode and the high voltage electrode It includes a high frequency power supply for applying a voltage to. Cooling water is supplied to a water jacket formed in the container surrounding the ground electrode and supplied to the hollow cylindrical high voltage electrode to cool both electrodes. The cylindrical tube ground electrode and the hollow cylindrical high voltage electrode form an ozone generating tube, and the ozone generating apparatus is equipped with a plurality of ozone generating tubes.

Description

Ozone Generator {OZONE GENERATOR}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator for use in an industrial field in which large amounts of ozone, such as water and sewage treatment and pulp bleaching, are required.

As an industrial-scale ozone generator described above, an ozone generator for ozonizing an oxygen-containing raw material gas by using an silent discharge known from Japanese Patent Application Laid-Open No. 2-184506 (US Pat. No. 5,034,198) is provided. The patent application is referred to herein.

25 to 27 show the structure of the ozone generator of the prior art described above. 25A and 25B, the container of the ozone generator includes a cylindrical body 1 such as stainless steel having strong corrosion resistance against ozone, end plates 2 and 3 for closing openings at both ends of the body 1, and It will basically include a pair of circular bulkheads 5, 6 arranged with spaces to form a water jacket 4 surrounding the ground electrode located at the center of the body as described later. At the periphery of the main body 1, a source gas inlet 7 is provided between the end plate 2 and the partition wall 5, and the ozone gas outlet 8 is between the other end plate 3 and the partition wall 6. A cooling water inlet 9 and a cooling water outlet 10 for supplying cooling water through the water jacket 4 formed between the partitions 5 and 6 from the outside are also provided.

Further, the inner side of the main body 1 is disposed concentrically with respect to the ground electrode 11 so as to form a discharge gap between the tubular cylindrical ground electrode 11 made of stainless steel, which is resistant to ozone, and the ground electrode. A plurality of pairs of ozone generating tubes each composed of the high voltage electrodes 13 are provided, and the ozone generating tubes extend between the partitions 5 and 6 arranged horizontally through the partitions. The high voltage electrode 13 is connected to the high voltage terminal of the high frequency power supply 16 by a bus bar 14 arranged inside the main body 1 through a bushing 15 provided in the main body 1. In addition, the ground side of the high frequency power supply 16 is grounded together with the main body 1.

Further, the connection portion between the main body 1 and the partitions 5 and 6 and between the partitions 5 and 6 and the ground electrode 11 penetrating the partitions is liquid-sealed seam welded to form an integral structure. The end plates 2, 3 are held on opposite ends of the body 1 with screws or the like through an airtight sealing member 17 such as a flat gasket or an O-ring.

Next, the detailed structure of the conventional ozone generating tube is shown in Figs. 26A and 26B. In particular, the high-voltage electrode 13 concentrically arranged on the cylindrical tube ground electrode 11 has a round end glass tube 13a with one end closed and a metal film formed by sputtering on the inner circumferential surface of the glass tube 13a. 13b, thereby forming a relatively uniform discharge gap 12 over the entire length of the electrode. In addition, the bus bar 14 and the metal film 13b which are connected to the chamber are connected through the conductive contraction portion 13c. The coolant flowing into the water jacket 4 is usually recycled using water and via an external recycle pump (not shown) and a cooling heat exchanger (not shown).

By taking the arrangement described above, the oxygen-containing raw material gas (oxygen or air that has been wetted in advance and introduced into the gas chamber) supplied from the gas inlet 7 to the raw material gas chamber is discharged along the ozone generating tube incorporated in the main body. 12) flow within. In this state, when an AC voltage from the high frequency power supply 16 is applied between the ground electrode 11 and the high voltage electrode 13, oxygen in the source gas is ozonated by the silent discharge generated in the discharge gap. The oxidized gas flows into the ozone gas chamber in the main body and is supplied to the ozone user through the gas outlet. The released heat associated with ozone generation (ozone generating reaction is an exothermic reaction) is transferred to the cooling water flowing inside the water jacket 4 and removed from the system. The gas outlet 8 is provided with a discharge valve (not shown) for gas pressure adjustment, whereby the internal pressure of the gas chamber can be adjusted to a positive pressure relative to atmospheric pressure. In a practical product, one ozone generator unit uses tens to hundreds of parallel disposed ozone generator tubes.

Fig. 27 is a schematic diagram showing the arrangement relationship of the main unit, power source and cooling water system auxiliary device of the ozone generator of the prior art, wherein the main unit (container) 18 of the ozone generator is an external cooling water pipe 19 as cooling water supply means. The cooling water is recycled through the recirculation pump 20 and the cooling heat exchanger (21). The high frequency power supply 16 also includes a combination of an inverter 16a and a step-up converter 16b for converting commercial power into high frequency power, and the main unit 18 through the high voltage cable 22 to supply power. Is connected to.

However, the ozone generator of the prior art has the following problems.

1) Increasing the power density (discharge power per unit discharge area) supplied to the discharge electrode to increase the concentration of generated ozone, the charged particles in the plasma collide with the electrodes to heat the electrode to decompose the generated ozone (The decomposition reaction of ozone is an exothermic reaction, and therefore the decomposition is accelerated by the temperature rise). Therefore, the electrode portion must be cooled more effectively. However, in the electrode cooling structure of the prior art, only the ground electrode is cooled from the outer peripheral surface side by the water flowing inside the water jacket, and the high voltage electrode facing across the discharge gap is not directly water cooled.

On the other hand, considering the heat dissipation in the discharge gap between the electrodes, the surface of the dielectric in addition to the heat dissipation in the discharge gap is formed because a creeping streamer is formed on the surface of the dielectric (glass tube) in connection with the silent discharge. Substantial amounts of heat dissipation also occur in the phases.

Therefore, in the electrode cooling structure of the prior art, the discharge gap acts as a kind of thermal insulation layer, and it is not possible to effectively remove the heat released on the high voltage electrode side, thereby reducing the reduced ozone generating efficiency and the concentration of generated ozone. do.

2) In order to improve the ozone generation efficiency, it is important to form a discharge gap uniformly in an optimal state for maintaining a stable silent discharge between the ground electrode and the high voltage electrode. However, in the structure of the prior art, since the glass tube as the dielectric is directly inserted into the tube of the ground electrode, uniformity along the longitudinal direction of the discharge gap is limited by the dimensional accuracy of the glass tube, which is 2 mm in the actual product. It is difficult to set the following.

3) In the structure of the prior art, since the ground electrode is integrally welded to the partition wall of the gas chamber, it is difficult to inspect or replace the ground electrode.

4) Also, since the glass tube as a dielectric is disposed outside the high voltage electrode, there is a risk of damaging the glass tube by tapping against another structure when removing the high voltage electrode for repair or inspection. In addition, the metal film (electrode portion) sputtered on the inner side of the glass tube tends to be peeled off during the repeated heating cycle of operation and stopping of the ozone generator due to the difference in thermal expansion coefficient between the glass tube and the metal film.

It is a main object of the present invention to provide an ozone generating apparatus which is capable of generating a high concentration of ozone effectively and having a high electrode cooling efficiency and a simple structure. Still another object of the present invention is to provide an ozone generating apparatus which is configured to simply remove the ozone generating tube and has excellent performance, reliability and water retention.

The ozone generator of the present invention,

A container having a source gas chamber for accommodating the source gas through the inlet at one end and an ozone gas chamber communicating with the outlet at the other end for accommodating the ozonated gas;

A cylindrical tube ground electrode having a dielectric on its inner peripheral surface for communicating the source gas chamber with the ozonation gas chamber;

A hollow cylindrical high voltage electrode having a predetermined discharge gap with respect to the dielectric and disposed concentrically with the cylindrical tube ground electrode,

A high frequency power supply for applying a voltage between the ground electrode and the high voltage electrode;

Cooling water supply means surrounding the ground electrode and supplying cooling water to the hollow cylindrical high voltage electrode formed in the container,

The cylindrical tube ground electrode and the hollow cylindrical high voltage electrode form an ozone generating tube, and the ozone generating apparatus includes a plurality of ozone generating tubes.

Here, the cooling water may be pure water having a specific resistance value of 200 µcm or more.

The flow rate of pure water flowing inside the hollow cylindrical high voltage electrode may be set to 20 cm / sec or more.

The hollow cylindrical high voltage electrode has a bending precision set to 0.2 mm or less per electrode length and a roundness set to ± 0.1 mm or less, and the cylindrical ground electrode has a bending precision set to 0.3 mm or less per electrode length and ± 0.3 mm or less With a roundness set to, the discharge gap between the dielectric on the inner peripheral surface of the ground electrode and the high voltage electrode may be set to less than 1 mm over the entire length of the electrode.

The ozone generator also includes electrode fixing means for fixing the high voltage electrode at a predetermined position inside the ground electrode.

The electrode fixing means may have protrusions formed on the outer circumferential surface of the high voltage electrode.

The electrode holding means also includes a stopper piece of insulating material disposed at the gas outlet side of the high voltage electrode and fixed to the ground electrode side for axially positioning the high voltage electrode.

The electrode fixing means may include spring bodies distributed in a circumferential direction on the outer circumferential surface of the high voltage electrode.

The high voltage electrode may be made of an ozone resistant metal material and may have a thickness of 2 mm or less.

The surface of the high voltage electrode may be coated with chromium oxide.

The ground electrode may be of an ozone resistant metal material, and its entire inner peripheral surface may be lined with glass as a dielectric.

The vessel is a horizontal type comprising a body having a rectangular cross section and an end plate for closing its front and rear ends through an airtight member and a pair of partition walls forming a source gas chamber, an ozonizing gas chamber and a water jacket in the body. It may be a container, wherein the ground electrode is detachably disposed between the pair of partition walls to penetrate the partition walls in a liquid tight manner, and the inlet and outlet and the coolant inlet and outlet for the water jacket may be provided on the peripheral surface of the body.

The ozonation gas chamber may have a depth of 30 cm or less.

The source gas inlet may be provided on the upper side of the main body, and the ozonation gas outlet may be provided on the lower side of the main body.

The portion where the ground electrode penetrates the partition wall may include a sealing member and a fixing member for fixing the sealing member and the ground electrode.

The ozone generator also includes a conductive coil spring wound around the peripheral surface of the ground electrode, which coil spring is held on the partition wall by the bolt together with the electrode fixing member.

The ozone generator also includes a diaphragm located substantially at the center of the water jacket to form a U-shaped coolant passage, wherein the coolant inlet and outlet may be provided on the bottom surface of the body in communication with the coolant passage.

The upper part of the water jacket can be open to the atmosphere, and the cooling water supply pipe and the outlet outlet pipe can be provided in the upper part of the water jacket.

The ozone generator also includes a nitrogen gas bubble tube provided to bubble nitrogen gas from the outside into the cooling water in the water jacket.

The ozone generator also includes a membrane seal provided on the surface of the coolant contained in the water jacket to prevent the coolant from directly contacting the atmosphere.

The ozone generator also includes a leak sensor disposed at the bottom of the gas chamber.

The ozone generator includes a cooling water distributor disposed in a source gas chamber or an ozonation gas chamber, and an ozone resistant insulated tube provided between the distributor and the high voltage electrode.

At least one end plate may be provided with a monitoring window to observe the inside of the main body.

At least one of the end plates may be hinged to one end of the body as a door.

Each high voltage electrode may be connected via an overcurrent protection fuse to a bus bar of a high frequency power supply leading to the vessel.

The vessel and its peripherals can be arranged on a common pedestal as a single unit.

The objects, other objects, effects, features and advantages of the present invention described above can be clearly understood from the description of the preferred embodiments with reference to the accompanying drawings.

An embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the description of all the embodiments shown in the drawings, the same reference numerals as in FIG. 25 denote the same parts and the description thereof will be omitted.

FIG. 1A shows the overall structure of one embodiment of the present invention, the detailed structure of each of which is shown after FIG. First, the main features of the present invention different from the prior art shown in Fig. 25 are as follows.

a) The main body 1 of the container has a rectangular cross section as shown in FIG.

b) In the ozone generating tube incorporated in the main body 1, unlike the structure of the prior art, the cylindrical tube ground electrode 11 is a metal tube (stainless steel tube 11a) and a glass dielectric lined on the inner side of the metal tube ( 11b), wherein the glass dielectric is cooled through the metal tube 11a by the cooling water supplied to the water jacket 4. In addition, the high voltage electrode 13 arranged concentrically over the discharge gap 12 inside the ground electrode 11 has a hollow cylindrical structure made of stainless steel, and is cooled by the flow of coolant in the high voltage electrode 13. It is cooled directly.

c) Since pure water having a high electrical insulation resistance is used as the cooling water supplied to the water jacket 4 and the high voltage electrode 13, a short circuit of the high voltage electrode 13 to the ground side through the cooling water is prevented, and Power loss due to leakage current and an increase in coolant temperature is prevented.

d) The discharge gap 12 between the ground electrode 11 and the high voltage electrode 13 of the ozone generating tube is set to less than 1 mm over the entire length of the electrode.

Further, in this embodiment, the partition wall in which two coolant distributors 23 form an end plate 3 and a water jacket 4 on the ozone outlet side for introduction and discharge of the coolant to supply water to the high voltage electrode from the outside. It is provided in the ozone gas chamber 200 between (6), and each of these cooling water distributors is connected to the high voltage electrode 13 by the insulated tube 24. As shown in FIG. In addition, in view of corrosion resistance to ozone, the insulation tube is ozone resistant such as polytetrafluoroethylene resin (PTFE), tetrafluoroethylene-hexafluoropropylene copolymer resin (FEP) or perfluoroalkoxy polymer (PFA). It can be manufactured from a synthetic resin material having a.

In addition, the depth of the ozonation gas chamber 200 may be set to less than 30 cm. In other words, if the volume of the ozonized gas chamber is too large, the time until the ozone concentration reaches equilibrium is long. If the volume of the ozonation gas chamber 200 is V1 and the flow rate of the ozonation gas flowing through the chamber is V2 / min, the replacement rate of the chamber 200 is several times V1 / V2 from the experimental results. In this respect, the smaller the volume of the ozonation gas chamber 200 is, the better. Then, if the depth of the ozonation gas chamber is set to about 30 cm as described above in the state having a cross-sectional area in which a predetermined number of ozone generating tubes can be arranged, the cooling water distributor 23 is held down while keeping the volume of the chamber at a low value. And the installation space of the insulated tube disposed in the chamber 200 can be ensured.

In addition, the external coolant pipe 19 is connected between the coolant inlet and outlet distributors 23 and between the inlet 9 and the outlet 10 of the water jacket 4 formed in the main body 1. A recirculation pump 20, a heat exchanger 21 and an ion exchanger 25 for purifying water are provided in the piping passage, and the pure water is a water jacket 4 surrounding the ground electrode 11 to cool the individual electrodes. And high voltage electrode 13.

Next, the detailed structure of each part shown in FIG. 1 is demonstrated with reference to FIG. First, an end plate 2 having a rectangular cross section as shown in Figs. 2A and 2B is held at one end of the body 1, and the end plate 3 is bolted to the other end of the body through the sealing member 17. Reserved by. In this embodiment, the sealing member 17 is made of fluoro rubber, chlorosulfonate polyethylene rubber, ethylene-propylene rubber, polytetrafluoroethylene resin (PTFE), tetrafluoroethylene-hexafluoropropylene copolymer resin (FEP). ) Or a frame-shaped flat gasket made of a material having ozone resistance such as perfluoroalkoxy polymer (PFA), for example, an end face or end plates (2, 3) of the body (1) using an adhesive; It is attached to the leading edge of the. As the sealing member 17, an O-ring can also be used in addition to the said gasket.

Further, by taking the rectangular cross section as shown and having the containers arranged horizontally, the following advantages can be obtained as compared to the prior art having a round cross section. Specifically, according to a simulation performed at the time of the flow of the coolant in the water chamber 4 in a plane perpendicular to the electrode axis, the flow of the coolant in the vicinity of the vessel wall has a rectangular cross section compared to the round cross section of the main body 1. It appeared to be more uniform in. In addition, when comparing a container of a round cross section having a diameter of 1 m and a container having a rectangular cross section having a side of 1 m, the number of ozone generating tubes that can be incorporated into the main body 16 is 61 in a round cross section of a container and has a rectangular cross section. 85 in the container. Therefore, the container of rectangular cross section has high space efficiency.

Next, the detailed structure of the ozone generating tube is shown in Figs. 3A and 3B. In these figures, the ground electrode 11 is formed by lining the inner surface of the cylindrical metal tube 11a with glass 11b by welding or the like. The glass dielectric is interposed between the ground electrode 11 and the high voltage electrode 13 as in the prior art, but the glass 11b is heated because the glass 11b is lined on the inner surface of the metal tube 11a of the ground electrode. It can be effectively cooled with cooling water flowing inside the water jacket 4 through the conductive metal pipe 11a. In addition, since the weak and easily broken glass 11b is surrounded by the metal tube 11a and the outside thereof is protected, there is no possibility of being damaged during repair or reassembly. In addition, since the glass dielectric layer 11b is always subjected to compressive stress in the operating temperature range due to the coefficient of thermal expansion different from that of the metal tube 11a, the mechanical strength of the glass dielectric layer 11b is increased and is not easily damaged.

The power W applied to the ozone generator is expressed by the following equation.

W = f * Cg * S {(Vs + Ve) 2Ep-(1 + Ca / Cg) (Vs + Ve)}

Where f: frequency, Ca and Cg: capacitance of gap and dielectric, S: discharge immunity, Ep: peak voltage, VS and Ve: discharge start voltage and disappearance voltage.

Therefore, since the glass 11b is welded to the metal tube 11a, it is preferable that the transmittance is high, the dielectric loss is small, the breakdown voltage is high, and the softening temperature is low. From this point of view, one of soda glass, lead glass and boron silicate glass is used. do. On the other hand, from the viewpoint of ozone resistance, it is preferable to use stainless steel selected from SUS304, SUS316, SUS304L, and SUS316L as the material of the metal tube 11a. In order to maintain the discharge gap uniformly less than 1 mm in the manufacture of the ground electrode, it should be processed with an electrode bending precision of 0.3 mm or less and roundness of ± 0.3 mm or less per electrode length.

On the other hand, a hollow cylindrical high voltage electrode 13 concentrically arranged in the ground electrode 11 for direct cooling with pure water flowing in the electrode is welded to the inlet and outlet pipes 13a and 13b at one end of the electrode. The inlet pipe 13a extends adjacent to the other end of the electrode 13 in order to smooth the flow of the cooling water in the high voltage electrode 13. Since the surface of the high voltage electrode 13 is exposed to ozone, as its material, stainless steel selected from SUS304, SUS316, SUS304L and SUS316L is used as the ground electrode in terms of ozone resistance, and the thickness thereof is the heat transfer to the coolant. In consideration of this, it is set to 2 mm or less. The silent discharge between the electrodes collects small streamers, the surface of the high voltage electrode is locally heated and sputtered by each streamer, and the sputtered particles tend to settle on the surface or flow downstream along the ozonizing gas. And this leads to weakening of the electrode. Therefore, in this embodiment, the surface of the high voltage electrode 13 was coated with chromium oxide 13c to prevent the electrode from weakening.

In addition, in a practical product, the high voltage electrode is about 7 cm in diameter and about 1 m in length, and the discharge gap between the electrode and the ground electrode 11 is determined by the bending accuracy of the electrode. Therefore, in order to set a uniform discharge gap of less than 1 mm over the entire length of the electrode, it is desirable to make a high voltage electrode having a bending accuracy of less than 0.2 mm per 1 m of electrode length and a roundness within ± 0.1 mm.

Further, in order to maintain a predetermined discharge gap 12 between the ground electrode 11 of the ozone generating tube and the high voltage electrode 13 in the assembled state in which the high voltage electrode 13 is inserted into the ground electrode 11, FIG. In the arrangement shown in Fig. 3B, the projections 26 serving as spacers are dispersed and formed in a plurality of positions on the surface of the high voltage electrode 13. The projection 26 is formed by welding the welding bead at two positions spaced in the circumferential direction on opposite ends of the high voltage electrode 13 and grounding the tip of the welding bead according to a predetermined discharge gap. When the projections 26 are inserted downward and inserted into the ground electrode 11, the high voltage electrode 13 enters the inside of the glass 11b on the ground electrode side through all four projections 26 formed at the front end and the rear end. In contact with the peripheral surface, it is possible to form and maintain a uniform discharge gap between the ground electrode.

In addition, when the source gas flows in the discharge gap 12, a pressure difference is generated between the gas inlet side and the outlet side of the high voltage electrode 13. In this case, if the axial pressure acting on the high voltage electrode due to the pressure difference is larger than the static friction coefficient of mass X (the coefficient of friction between glass / stainless steel is about 0.7), the high voltage electrode 13 It is moved axially from a predetermined position during operation. Then, in the arrangement shown in Fig. 3, an insulator stopper piece 27 is provided on the gas outlet side of the high voltage electrode 13 as an electrode fixing means for positioning and fixing the high voltage electrode 13. The piece 27 is held on the inner circumference of the ground electrode 11 with the hose band 29 through the bracket 28. By adopting such an arrangement, even when the axial pressure is applied to the high voltage electrode 13 due to the gas pressure difference, the electrode 13 does not touch the stopper piece 27 and does not move from the predetermined position.

As another electrode fixing means, a curved leaf spring 30 may be provided on the surface facing radially to the projection 26 formed on the surface of the high voltage electrode 13, and the high voltage electrode 13 is a ground electrode. In the state inserted in 11, the leaf spring 30 is pressed against the glass surface. In this structure, since the high voltage electrode 13 is pressurized by the force of the leaf spring 30, the electrode itself is not moved even when the gas pressure difference is applied across both ends of the high voltage electrode 13 as described above.

Next, the supporting structure of the ground electrode 11 incorporated in the container will be described with reference to FIGS. 4 and 5. In FIG. 4A showing one of the partitions, the ground electrode 11 is disposed over the pair of right and left partitions 5 and 6 forming the water jacket 4, 1 as described above, and the partitions It is arrange | positioned detachably at the through-holes 5a and 6a provided in the inside. The peripheral edge of the ground electrode 11 penetrating the partition wall is coupled to the electrode holding member 32 having an O-ring as a sealing member and an inclined surface 31s for fixing the O-ring, and the electrode holding member 32 is grounded. It is held by the bolt 33 so that the electrode 11 may be retained in the partitions 5 and 6. By taking this structure, leakage of water and gas between the water jacket and the gas chamber is prevented. During maintenance such as periodic inspection, the electrode fixing member 32 can be removed to easily pull the ground electrode 11 out of the partition wall.

In addition, since the ground electrode 11 is grounded by contact with the partitions 5 and 6 to form a complete ground as shown in Fig. 4B, the ground electrode 11 is grounded to achieve conductivity to the partitions 5 and 6 through the spring 34. It is preferable that the electrode 11 is wound in a circle together with the conductive coil spring 34 and the tip thereof is attached to the retaining bolt 33 of the electrode fixing member 32 described above. By taking this arrangement, the discharge current in the ground electrode 11 flows well so as to be grounded through the spring 34 and the bolt 33 and the partitions 5 and 6. When the ground electrode 11 contacts only the partitions 5 and 6, the potential of the ground electrode 11 tends to increase due to poor contact, and in the worst case, discharge does not occur between the high voltage electrodes. The arrangement prevents such a malfunction.

5A to 5F show practical examples of the electrode fixing member 32 described above. The electrode fixing member 32 is divided into two parts, a fixing guide 32a forming an inclined surface 32s as shown in FIGS. 5A and 5B, and a ring-shaped fixing plate 32b as shown in FIGS. 5C and 5D. Include. When mounting the ground electrode 11, first attach the O-ring to the ground electrode 911 to cover the O-ring with the fixing guide 32a, and place the fixing plate 32b on the fixing guide 32a, and then the bolt 33 To the bulkheads (5, 6) together. On the other hand, as shown in Figs. 5E and 5F, the guide 32a and the fixing plate 32b are integrally formed.

Next, a power supply structure to the high voltage electrode 13 will be described with reference to FIGS. 6 and 7. First, in Figs. 6A and 6B, the high voltage electrode 13 assembled in the container is connected to the bus bar 14 which leads to the main body 1 via the bushing 15 via a fuse for overcurrent protection.

As described above, if an abnormal discharge occurs during the operation of increasing the current in the electrode by providing a fuse for each high voltage electrode 13, only the fuse 35 connected to the electrode in which the abnormal operation occurs stops the power supply to the electrode. The remaining normal working electrodes are powered. Therefore, even if abnormal operation occurs in several of the plurality of electrodes 13, the operation of the ozone generator is continued until the power supply to the phase electrode is stopped without completely stopping the ozone generator.

Further, in this embodiment, the fuses 35 arranged on the vertical line are combined as a group as shown in Fig. 6B, and each group of fuses 35 is each a plurality of bus bars 14a arranged in the vertical direction. And individual bus bars 14a are connected by different lead wires 14b.

7A and 7B show an example of the structure using a clip to connect the fuse 35. In this case, the fuse 35 is formed in a cylindrical shape with a spherical unit having a diameter of about 2 cm and a length of about 15 cm and terminals 35a and 35b at opposite ends. The outer casing of the main unit is made of ceramic and the terminals 35a, 35b are made of stainless steel so that the fuse 35 is not weakened even when exposed to the atmosphere of ozonated gas. One terminal 35a is fixed to the end face of the high voltage electrode 13 and the other terminal 35b is coupled to a clip 36 fixed to the bus bar 14. This structure makes it possible to fix the fuse more simply than the screwing method, and has the advantage that the fuse and the high voltage electrode are not damaged by the torque at the time of screwing.

Next, the operating characteristics of the ozone generator having the above structure will be described. First, FIGS. 19A and 19B are graphs showing the relationship between input power and ozone concentration and the relationship between input power and power consumption in order to explain the electrode cooling effect according to the present invention. The prior art electrode cooling system shown in FIG. 25 is defined as external cooling, and the electrode cooling system between the ground electrode and the high voltage electrode according to the present invention is defined as double cooling. The discharge gap between the ground electrode and the high voltage electrode is 1 mm, and the source gas is oxygen having a flow rate of 10 l / min. Here, the relative ozone concentration is a relative value of the maximum ozone concentration when the maximum ozone concentration is 1.0, the standard cooled by double cooling with cooling water at 10 ℃, the relative consumption is 1.0 to the power consumption to obtain the maximum ozone concentration If it is assumed to be a relative value for this power consumption, the relative power is a relative value to the standard power. In external cooling (cooling water temperature 30 ° C.) as shown in Fig. 19A, the ozone concentration is increased to reach the maximum value and then decreased by increasing the relative power applied to the ozone generating tube. The reason is that the discharge gap temperature increases and ozone is pyrolyzed while passing through the discharge gap. On the other hand, the ozone saturation concentration increased by 20% during the double cooling at the cooling water temperature of 30 ° C, and the saturation concentration increased by 40% during the double cooling at the cooling water temperature of 10 ° C. This is because the discharge gap temperature is reduced by the double cooling to suppress the thermal decomposition of the generated ozone and obtain a high concentration of ozone. On the other hand, as can be seen from Fig. 19B, power consumption (power required to generate a unit amount of ozone) rapidly increases while increasing relative power in the case of external cooling (coolant temperature 30 deg. C). In contrast, the individual characteristic curves are shifted at relatively large power in double cooling (cool water temperature 30 ° C.) and double cooling (cool water temperature 10 ° C.). They increase the amount of ozone generated (= ozone concentration × gas flow rate) in the double cooling compared to the outer cooling when compared at the same power, and the power consumption is inversely reduced. From these facts, it can be seen that by using a dual cooling system, the ozone generation efficiency can be improved.

20A and 20B are characteristic diagrams showing the relationship between power and ozone concentration and the relationship between power and power consumption, respectively, using discharge gap distances as parameters in the dual cooling system described above. The operating conditions are as follows: Oxygen with a cooling water temperature of 10 ° C. and a flow rate of 10 l / min was used as the source gas. As shown in Fig. 20A, when the discharge gap is 1 mm, the ozone concentration as the relative power applied to the ozone generating tube decreases after reaching the maximum value. This is because the discharge gap temperature increases and ozone pyrolysis occurs. In contrast, when the discharge gap is narrow to 0.5 mm, the ozone concentration increases by about 8%, and when the discharge gap is further reduced to 0.3 mm, the saturation concentration increases by 20%. This has the effect of narrowing the discharge gap, thereby increasing the average electron energy during discharge and improving the decomposition efficiency of oxygen molecules. In addition, when the discharge gap is narrowed, the flow velocity of the source gas increases, the residence time in the gap is reduced, and the thermal decomposition of ozone is greatly suppressed. From these facts, it can be seen that by setting the discharge gap to less than 1 mm, the concentration of generated ozone can be increased and the ozone generation efficiency can be improved.

Fig. 21 is a characteristic diagram showing the relationship between the resistance of pure water used as the coolant in the present invention and the leakage current occurring through the pure water. First, the power loss P leaking from the high voltage electrode to the ground side through the resistance of pure water R and the pure water in the cooling water pipe is expressed by the following equation.

R = V ² / (ρL / S)

P = v ² / R

Where V: applied voltage, R: leakage resistance, ρ: specific resistance of pure water, L: pipe length of the insulated tube, and S: cross-sectional area of the insulated tube.

Here, if the voltage (V) applied from the high frequency power source to the high voltage electrode is a triangle pie with 8000 V, ρ = 200 μm cm, L = 30 cm, S = 0.5 cm ² (tube inner diameter 8 mm), and power loss is at least P = 2.5 W, which is negligible compared to the power applied to the ozone generator (eg 3000 W). On the other hand, if the resistivity of pure water is less than 200 ㏀cm, leakage power loss is quickly increased. From this fact, it is preferable to use pure water having a specific resistance of 200 mPa or more as the cooling water for the dual cooling system. The specific resistance of pure water can be adjusted by bypassing the cooling water piping to the ion exchanger 25 shown in FIG. 1 to control the flow rate of the ion exchanged pure water.

22 is a characteristic diagram showing the relationship between the flow rate of cooling water and the convective heat resistance to the high voltage electrode 13 of the embodiment shown in FIG. In particular, calculations using the thermal network method in the structure of the dual cooling system shown in FIG. 1 show that about 60% of the heat released by the power applied to the electrode is transferred to the cooling water of the high voltage electrode and the remaining 40% is the ground electrode. Is delivered to the coolant. In order to effectively remove this 60% of heat, it is necessary to improve the cooling efficiency of the high voltage electrode 13, but in the state where the cooling water flows inside the hollow cylindrical high voltage electrode 13, the inner wall surface of the cooling water and the high voltage electrode 13 There is a convective heat resistance R1 represented by the following equation at the boundary between them.

R1 = 1 / (αA) = 1 / (Nλ / d)

Where α is the convective heat transfer rate, A is the heat transfer area of the high voltage electrode, N is the Nusselt number,? Is the thermal conductivity of the cooling water, and d is the equivalent diameter of the cooling water passage.

In this case, as shown in the characteristic diagram of Fig. 22, the convective heat resistance R1 is rapidly decreased by increasing the flow rate v of the cooling water, and is saturated to a constant value in the range over 20 cm / sec. According to the calculation, this saturation value is 0.025 K / watt. Therefore, in the present invention, the cooling water flow rate is set to be greater than 20 cm / sec so that the convective heat resistance is near the minimum saturation value, thereby suppressing the effect of the convective heat resistance to enhance the cooling efficiency of the high voltage electrode.

FIG. 23 is a characteristic diagram showing the relationship between the plate thickness and the convective heat resistance of the hollow cylindrical high voltage electrode 13 of the embodiment shown in FIG. That is, the convective heat resistance R2 is present between the cooling water and the discharge gap of the high voltage electrode.

R2 = t (λA)

Where t is the thickness of the high voltage electrode, λ is the thermal conductivity coefficient of the high voltage electrode, and A is the heat transfer area of the high voltage electrode.

According to the above formula, the conductive heat resistance R2 is calculated for the high voltage electrode made of stainless steel, for example, when the high voltage electrode 13 is 2 mm, the conductive heat resistance is 0.0045 K / watt. On the other hand, when the thickness of the high voltage electrode is extremely reduced, it is technically difficult to manufacture a high voltage electrode having a precision accuracy of 0.2 mm or less and a roundness of ± 0.1 mm or less per electrode length, and the compressive resistance of the electrode itself is reduced. As the coolant flows inside the electrode, the electrode is deformed by hydraulic pressure. Therefore, in the present invention, the thickness of the hollow cylindrical high voltage electrode is set to 2 mm or less and 1 mm or more in consideration of the manufacturing accuracy and compression resistance described above. This makes it possible to obtain high cooling efficiency of the high voltage electrode and increases the concentration of ozone generated.

Another embodiment of the present invention is shown in Figures 8A and 8B. This embodiment is basically the same as the embodiment shown in Fig. 1, but the arrangement of the source gas inlet and the ozonized gas outlet and the structure of the water jacket are different.

That is, in the structure of FIG. 8, the source gas inlet 7 is provided on the upper surface of the main body 1 of the container, and the ozonation gas outlet 8 is provided on the lower surface of the main body 1 upside down. By taking such a structure, the gas flow path is formed such that the source gas is introduced from the upper side of the source gas chamber 100 and the ozonized gas is discharged from the lower side of the ozonized gas chamber 200, thereby obtaining flow efficiency. .

In particular, if the source gas is oxygen, for example, ozone has a specific gravity greater than oxygen. Therefore, in the structure in which the source gas inlet is provided on the lower side of the chamber and the ozone gas outlet is provided on the upper side as shown in Fig. 1 or 25, ozone tends to stay on the bottom side. Incorporating a large number of ozone generating tubes into the body causes drift of the gas flow, and tends to change the gas flow rate and the ozone concentration in the individual ozone generating tubes. However, as described above, the gas flow is formed obliquely in the container so that the gas outlet 8 is on the lower side, so that the flow of the gas flow can be prevented and the source gas can be uniformly supplied to the respective ozone generating tubes. .

In addition, in the embodiment shown in Figs. 8A and 8B, the water jacket 4 formed between the paired right and left partitions 5 and 6 of the main body 1 has an intermediate partition 37 in the wall 5 6 is provided in the middle, and the coolant inlet 9 and outlet 10 are distributed to the body sides on the lower surface side of the body 1. This forms an inverted U-shaped coolant passage in the water jacket 4 on both sides of the intermediate partition 37 between the coolant inlet 9 and the outlet 10. The lower end of the intermediate partition 37 is welded to the bottom of the main body 1 and both ends are welded to the side walls of the main body 1. Moreover, the flat packing 38 is provided on the wall surface which faces the cooling water inlet side of the intermediate | middle partition 37. As shown in FIG. By the flat packing 37, the hole of the intermediate partition 37 through which the ground electrode 11 penetrates is sealed by liquid tight sealing. The flat packing 38 has a hole having a diameter slightly smaller than the outer diameter of the electrode in the penetrating portion of the ground electrode 11 and is fixed to the intermediate partition wall 37 by bolts (not shown).

When the coolant is supplied from the coolant inlet 9 toward the water jacket 4, the coolant flows upwards in the water passage between the partition 5 and the middle partition 37, and then U at the top of the middle partition 37. In turn, it flows downward in the water passage between the intermediate partition 37 and the partition 6 and flows out of the cooling water outlet 10. As can be seen from this structure, the moving distance of the cooling water flowing in the water jacket 4 is about twice that of the structures of Figs. Even if the capacity of the cooling water is the same, the flow rate is doubled to improve the cooling efficiency of the ground electrode 11.

8, the upper surface of the water jacket 4 is open to the atmosphere side. This suppresses the application of water pressure to the main body 1 of the container and allows the pressure resistance in the structure required for the main body 1 to be within this range.

9A and 9B show an improved embodiment of the air open water jacket 4, wherein a membrane seal 39 is provided on the liquid side to cover the open side of the water jacket 4. This membrane seal 39 prevents the cooling water from directly contacting the atmosphere to prevent oxygen from the atmosphere from dissolving in the cooling water. That is, when the dissolved oxygen concentration is increased in the cooling water, the metal ground electrode 11 is oxidized and corroded to shorten its lifespan. However, by covering the open surface of the water jacket 4 with the membrane seal 39, the expanded portion of the cooling water due to the increase in the temperature of the cooling water is released from the atmosphere into the cooling water without causing an increase in the water pressure, thereby effectively suppressing the dissolution of oxygen. Done.

10A and 10B, in addition to the structure of FIG. 9, nitrogen gas is bubbled from the outside into the cooling water of the water jacket 4 to reduce the concentration of dissolved oxygen in the cooling water to prevent corrosion of the ground electrode 11. An improved embodiment is introduced. In this embodiment, the gas conduit 40 is openly opened inside the water jacket 4 and connected to a nitrogen gas source, wherein the nitrogen gas is bubbled through the gas conduit 40 into the cooling water filling the water jacket. .

FIG. 24 is a diagram showing the change of the dissolved oxygen concentration in the cooling water over time as a result of the introduction of nitrogen gas into the water jacket 4 in a bubbling manner. As can be seen from the experiment using a cooling water amount of 201 and a nitrogen gas flow rate of 1 l / min, the initial value of the dissolved oxygen concentration in the cooling water, which was 5 mg / l at the beginning of the experiment, was determined after the start of the bubbling introduction of nitrogen gas. As time passes, it reaches almost 0 mg / l after 100 minutes.

11A and 11B show an embodiment applied to a piping system for supplying cooling water to a plurality of high voltage electrodes 13 incorporated in the main body 1 of the container. In this embodiment, the insulator tube 24 connected in series between the high voltage electrodes 13 in one group of each group including a plurality of electrodes is the inlet and outlet side disposed in the ozonation gas chamber 200. It is provided between the coolant distributors 23. That is, in a real product, tens to hundreds of high voltage electrodes are integrated in a container, and when the insulated tube 240 is individually connected to each electrode between the distributors, a large number of insulated tubes are required, which complicates the piping structure. On the other hand, as described above, when the plurality of high voltage electrodes 13 in each group are provided with the insulated tube 24 connecting them in series, the piping structure and the piping work are greatly simplified.

FIG. 12 shows another application example, where the coolant distributor 23 and the insulator tube 24 for supplying coolant to the high voltage electrodes are inverted from the embodiment shown in FIG. ) Is arranged in. By supplying the cooling water from the source gas inlet side to the high voltage electrode, the insulated tube is not exposed to the ozonation gas, so it is not necessary to consider the ozone resistance, and thus can be made of a commonly available material such as nylon. In this embodiment, the bushing 15 and the bus bar 14 of the high voltage power supply circuit are moved to the ozonation gas chamber 200 side with respect to the structure described above.

Another embodiment according to the invention with regard to the structure of the container is shown in FIGS. 13 and 14. First, the embodiment shown in Figs. 13A and 13B is provided with a monitoring window 41 for observing the inside of the end plates 2 and 3 disposed on the front end and the rear end of the main body 1. By providing these monitoring windows 41, it is possible to visually observe the operation of the discharge state of the ozone generating tubes incorporated in the main body from the outside, and when the ozone generating tube is damaged, the damaged position can be confirmed from the outside. The position and size of the monitoring window 41 are determined so that the entire ozone generating tube incorporated in the main body can be observed.

In this embodiment, the end plates 2 and 3 are formed in the door structure attached to the main body 1 via the hinge piece 42. Reference numeral 43 is a reinforcing rib of the door plate, and 44 is a support guide for supporting the end plates 2, 3 in the closed position from the lower side. By taking such a structure, the heavy end plates 2 and 3 can be easily opened and closed without using a crane or the like at the time of maintenance such as inspection. Moreover, by providing the support guide 44, when the door is closed, the alignment state of the bolt holes provided in the end plates 2 and 3 and the main body 1 is maintained.

14A and 14B show the overall structure of the ozone generator, wherein the end plates 2, 3 of the door structure are disposed on both ends of the main body 1, as shown in FIG. The upper and lower surfaces have a source gas inlet 7, an ozone gas outlet 8, a coolant inlet 9 and an outlet 19, a bushing 15, and the like. Moreover, on the outer peripheral surface of the main body 1, the same reinforcement rib 43 as shown in FIG. 13 is provided in an appropriate position. That is, the gas pressure introduced into the vessel is, for example, the absolute pressure is 1.6 atm, and the vessel needs to have a thickness to withstand the internal pressure, but by providing the reinforcing rib 43 as shown above, the steel sheet thickness of the vessel is increased. It is possible to reduce, thereby obtaining a light weight and low cost ozone generator. In addition, because the coolant is recirculated in the body 1 during operation, if the coolant temperature is low, condensation will occur on the sidewalls and condensed water will fall on the floor to wet the floor surface. Accordingly, in this embodiment, a drain pan 45 is arranged under the container to receive condensed water away from the outer surface of the container and to be discharged out of the system through a drain pipe (not shown). In addition, the drain pan 45 may be divided into three parts, such as two end portions and one central portion, or may take an integral structure as shown.

Fig. 15 is a schematic flow circuit diagram showing a gas and cooling water piping system provided in the ozone generator, in which a flow element is provided in addition to the gas and cooling water piping system. That is, the water jacket 4 having the upper surface open to the atmosphere has an excess of water from the water jacket 4 when supplying the cooling water and the water supply pipe 46 opened at the top of the water jacket 4 to supply the cooling water after maintenance. An outlet pipe 47 for discharging water is provided. In addition, the leak sensor 1 [8] is disposed at the bottom of the source gas chamber 100 and the ozonation gas chamber 200. If the coolant leaks from the high voltage electrode or the ground electrode into the chamber, the leak sensor 48 detects the leak and sounds an alarm and stops operation. This makes it possible to prevent secondary accidents such as leakage of high voltage electricity. In addition, the cooling water supply pipe and the discharge pipe are separately provided with a drain 49 so that the cooling water can be completely removed during maintenance.

Figures 16, 17 and 18 show some embodiments in which the main unit of the ozone generator is arranged with a power supply and other peripheral devices provided on a common pedestal to reduce the installation space. Individual embodiments will be described in comparison with the prior art individual arrangement system shown in FIG. First, in the embodiment shown in Fig. 16, the step-up converter 16b of the container main unit 18 and the power supply 16 is disposed on the common pedestal 50, and the inverter 16a is the pedestal 50. It is arranged on the outside and connected to a step-up converter 16b with a cable. In addition, cooling water system peripheral devices such as the recirculation pump 20 and the heat exchanger 21 are disposed outside the pedestal 50 and connected to the main unit 18 by the cooling water pipe 19. In the prior art arrangement shown in FIG. 27, the high voltage cable 22 is provided between the main unit 18 and a step-up converter 16b disposed separately from the main unit 18, but shown in FIG. In this arrangement, the step-up converter 16b and the main unit 18 can be directly connected on the pedestal 50 to eliminate the risk of noise and electric shock.

Further, in the embodiment shown in Fig. 17, the vessel main unit 18, the step-up converter 16b, the coolant recirculation pump 20, and the heat exchanger 21 of the ozone generator are arranged on the common pedestal 50. The main unit 18, the recirculation pump 20, and the heat exchanger 21 are connected to each other by the cooling water pipe 19 on the common pedestal. This reduces the pipe length of the cooling water pipe and thus reduces the heat loss.

In addition, in the embodiment shown in Fig. 18, a quench cooler (water cooling freezer 51) is used in the recirculation pump 20 and the heat exchanger 21 of Figs. 16 and 17 to be disposed on a common pedestal 50. have.

As described above, the ozone generator is integrally formed in a unit using the common pedestal 50, so that the apparatus can be miniaturized and the amount of space is saved in addition to the above-described effects, which are superior to those of the prior art in which the apparatus is arranged separately. Can be obtained.

Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art may, in broad terms, modify and modify the embodiments in various forms within the scope of the invention, and therefore, as set forth in the appended claims. The present invention is intended to protect all changes and modifications within the spirit.

1A is a schematic cross-sectional view showing the entire structure of an ozone generating apparatus according to an embodiment of the present invention.

1B is an enlarged schematic cross-sectional view of a portion of an ozone generator.

Fig. 2A is a schematic diagram showing one end of the main body of Fig. 1A.

Fig. 2B is a longitudinal sectional view showing the end of the main body.

Fig. 3A is a longitudinal sectional view showing an ozone generating tube.

3B is a cross-sectional view of FIG. 3A.

Fig. 4A is a sectional view of the ground electrode mounting portion of Fig. 1A.

4B is a front view of FIG. 4A.

5A and 5B are front and side views of the O-ring fixing guide, FIGS. 5C and 5D are front and side views of the fixing plate, and FIGS. 5E and 5F are views of the electrode fixing member integrally coupling the O-ring fixing guide and the fixing plate. Front view and side view.

6A and 6B are side and front views showing the power supply structure of the high voltage electrode of Fig. 1A;

7A and 7B are side and front views showing the fuse mounting structure shown in Figs. 6A and 6B, respectively.

Fig. 8A is a longitudinal sectional view showing the whole ozone generating device of another embodiment according to the present invention, and Fig. 8B is a cross sectional view showing the main body.

9A and 9B are plan and cross-sectional views showing yet another embodiment of the water jacket shown in Fig. 8A.

10A and 10B are plan and side views showing yet another embodiment of a water jacket.

11A and 11B are sectional and front views showing a cooling water supply system to a high voltage electrode.

Figure 12 is a longitudinal sectional view showing yet another embodiment of the ozone generating device according to the present invention.

13A and 13B are front and side views showing one embodiment according to the present invention in which the end plate is formed as a door structure;

14A and 14B are a plan view and a side view showing an appearance of an ozone generating apparatus according to the present invention.

Fig. 15 is a flow circuit diagram schematically showing a gas and cooling water piping system in the ozone generating device according to the present invention.

Fig. 16 is a layout diagram showing an arrangement example of the ozone generating device according to the present invention.

Figure 17 is a layout diagram showing yet another embodiment of the ozone generating apparatus according to the present invention.

18 is a layout diagram showing yet another embodiment of the ozone generating device according to the present invention;

19A and 19B are characteristic diagrams showing the relationship between input power and ozone concentration, input power and power consumption in order to compare the electrode cooling system of the present invention with those in the prior art, and FIG. 19A is a relative power and relative ozone. Fig. 19B is a characteristic diagram showing the relationship between the concentration and the relationship between the relative power and the relative power consumption.

20A and 20B are characteristic diagrams showing the relationship between input power and ozone concentration, input power and power consumption using the discharge gap between the ground electrode and the high voltage electrode, and FIG. Fig. 20B is a characteristic diagram showing a relationship between relative power and relative power consumption.

Fig. 21 is a characteristic diagram showing the relationship between the specific resistance and leakage power of pure water used as cooling water of the high voltage electrode according to the present invention.

Fig. 22 is a characteristic diagram showing the relationship between the flow rate of pure water and convective heat resistance supplied to the high voltage electrode according to the present invention.

Fig. 23 is a characteristic diagram showing the relationship between the thickness of the high voltage electrode and the convective heat resistance according to the present invention.

Fig. 24 is a characteristic diagram showing the change of dissolved oxygen concentration over time when nitrogen gas is introduced into the cooling water in the cooling water in the water jacket according to the present invention.

25A and 25B are longitudinal cross-sectional views of the ozone generator of the prior art, and cross-sectional views of the main body;

26A and 26B are longitudinal cross sectional and cross sectional views of the ozone generating tube of the prior art;

Fig. 27 is a schematic diagram showing the arrangement of the ozone generator of the prior art.

<Explanation of symbols for main parts of drawing>

1: main body

4: water jacket

6: bulkhead

8: ozonation gas outlet

11: grounding electrode

11a: metal tube

12: discharge gap

13: high voltage electrode

17: sealing member

21: heat exchanger

24: insulated tube

25: ion exchanger

27: stopper piece

32: electrode fixing member

32a: guide

32b: fixed plate

34: coil spring

45: drain pan

100: raw material gas chamber

200: ozonation gas chamber

Claims (2)

Assemble a plurality of sets of ozone generating tubes consisting of a cylindrical tubular ground electrode having a dielectric layer laminated on the inner circumferential surface and a hollow cylindrical high voltage electrode concentrically provided inside the ground electrode with a discharge gap between the dielectrics in the center of the body. A metal gas chamber having ozone resistance which opens the inlet of the source gas and the outlet of the ozonation gas on both sides, a high frequency power source for applying a voltage between the high voltage electrode and the ground electrode, and water formed in the gas chamber surrounding the ground electrode. A coolant supply means for flowing a coolant through the jacket and the water jacket and the high voltage electrode, the coolant flowing in the water jacket and the high voltage electrode to cool the both electrodes directly to cool the source gas containing oxygen introduced into the gas chamber; An ozone generating device which ozonates and is taken out by silent discharge between the electrodes, An electrode support means for holding the high voltage electrode at a predetermined position inside the ground electrode, and an stopper member made of an insulator is disposed at the gas outlet side end of the high voltage electrode as an electrode support means, and the stopper member is disposed on the ground electrode side. And fixing the high voltage electrode in the axial direction to fix the ozone generator. Assemble a plurality of sets of ozone generating tubes consisting of a cylindrical tubular ground electrode having a dielectric layer laminated on the inner circumferential surface and a hollow cylindrical high voltage electrode concentrically provided inside the ground electrode with a discharge gap between the dielectrics in the center of the body. A metal gas chamber having ozone resistance which opens the inlet of the source gas and the outlet of the ozonation gas on both sides, a high frequency power source for applying a voltage between the high voltage electrode and the ground electrode, and water formed in the gas chamber surrounding the ground electrode. A coolant supply means for flowing a coolant through the jacket and the water jacket and the high voltage electrode, the coolant flowing in the water jacket and the high voltage electrode to cool the both electrodes directly to cool the source gas containing oxygen introduced into the gas chamber; An ozone generating device which ozonates and is taken out by silent discharge between the electrodes, The gas chamber is a horizontal container including a polygonal body, an end plate for closing both front and rear end surfaces of the gas chamber through an airtight sealing member, and a pair of partition partitions forming a water jacket in the body, The ground electrode is installed to be detachably penetrating through the partition partition wall, The inlet of the source gas, the outlet of the ozonation gas, the inlet and outlet of the cooling water which flows into the water jacket are opened on the peripheral surface of the main body, A portion of the ground electrode penetrating the partition partition wall is provided with a sealing member and an electrode support member serving as a sealing press, and provided with a conductive coil spring wound around the ground electrode together with the electrode support member. And the coil spring is bolted to the partition partition wall of the gas chamber together with the electrode support member.

Images