WO2008038467A1

WO2008038467A1 - Integrated intermediate electrode and pressure gradient type plasma gun

Info

Publication number: WO2008038467A1
Application number: PCT/JP2007/065737
Authority: WO
Inventors: Atsuhiro Terakura; Masao Marunaka; Takayuki Tsuchiya
Original assignee: Shinmaywa Industries, Ltd.
Priority date: 2006-09-25
Filing date: 2007-08-10
Publication date: 2008-04-03
Also published as: TW200826748A; JPWO2008038467A1

Abstract

An integrated intermediate electrode (G) comprises a first conductive housing (11), a first conductive sleeve (12) provided concentrically to the first housing in contact with the inner circumferential surface of the first housing, a first magnet (15) contained in the first housing concentrically thereto, a second conductive housing (17) provided coaxially with the first housing, a second conductive sleeve (18) provided concentrically to the second housing in contact with the inner circumferential surface of the second housing, and a second magnet (21) contained in the second housing concentrically thereto. The first housing and the second housing are integrated through an insulating member (16).

Description

Specification

Integrated intermediate electrode and pressure gradient type plasma gun using the same

Technical field

The present invention relates to a pressure gradient type plasma gun used as a plasma source of a film forming apparatus and an intermediate electrode used therefor.

Background art

Conventionally, a pressure gradient type plasma gun has been used as a plasma source of a film forming apparatus.

The pressure gradient type plasma gun comprises a cylindrical container, a force sword, an annular first intermediate electrode, an annular second intermediate electrode, and insulation between the first intermediate electrode and the second intermediate electrode. The components are provided coaxially and configured.

In such a pressure gradient type plasma gun, a first intermediate electrode and a second intermediate electrode are temporarily assembled using a temporary assembly member, and the temporary assembly is mounted on the pressure gradient plasma gun. It is done. However, when temporarily assembling the first intermediate electrode and the second intermediate electrode, the temporarily assembled member may fall off, which is inconvenient to handle. In addition, there is also a problem that when the first intermediate electrode and the second intermediate electrode are provisionally assembled, the weight of the provisionally assembled device increases.

[0004] Therefore, as shown in Patent Document 1, a pressure gradient type plasma gun in which an intermediate electrode is attached by using a set member incorporating an insulating member is disclosed. In such a pressure gradient type plasma gun, since the first intermediate electrode and the second intermediate electrode can be attached separately, the first intermediate electrode and the second intermediate electrode can be attached so that the temporary assembly member will not fall off. Improves the work efficiency.

Patent Document 1: Japanese Patent Application Laid-Open No. 11 256319

Disclosure of the invention

Problem that invention tries to solve

However, in the configuration of Patent Document 1, it is necessary to provide supporting means for supporting the set member on the first intermediate electrode and the second intermediate electrode, and there is a problem that the structure becomes complicated. In the related art, in order to maintain the airtightness of the first intermediate electrode and the second intermediate electrode, sealing is performed by welding a lid to a housing constituting the first intermediate electrode and the second intermediate electrode. . However, if the housing is sealed by welding, it is difficult to disassemble and adjust the inner part of the intermediate electrode due to leakage current, etc., and maintenance is bad! There was also.

The present invention has been made to solve the above problems, and has a simple structure and reduced weight to improve the convenience of handling, as well as maintenance when disassembling and adjusting. It is an object of the present invention to provide an intermediate electrode improved in the above and a pressure gradient type plasma gun using the same.

Means to solve the problem

[0008] In order to solve the above problems, the integrated intermediate electrode of the present invention comprises a conductive first housing, a housing, and a contact with the inner peripheral surface of the first housing concentric with the first housing. A conductively conductive first sleeve, a first magnet concentrically accommodated in the first housing with the first housing, and a conductive provided coaxially with the first housing A second housing having conductivity, a second sleeve having conductivity provided concentrically with the second housing and in contact with the inner peripheral surface of the second housing, and the second housing in the second housing And a second magnet coaxially accommodated in the two housings, wherein the first housing and the second housing are integrated via an insulating member.

With such a configuration, mounting to a device (for example, a film forming device) using a pressure gradient plasma gun incorporating the same becomes easy.

[0010] The first housing has a U-shaped cross section so that the surface facing the second housing is open, and the second housing is open the surface facing the first housing. The insulating member is formed coaxially with the first housing and the second housing, and the open faces of the first housing and the second housing are The first magnet is accommodated in the space between the first housing and the insulating member, and the second magnet is accommodated in the space between the second housing and the insulating member. A magnet is accommodated, and the first housing, the insulating member, and the second housing are mutually fastened by fasteners! // ,. [0011] With such a configuration, the number of components constituting the intermediate electrode is reduced, so that the weight can be reduced, and the convenience of handling is improved. Further, by releasing the fastening of the fastener and removing the lid by the insulating member, disassembly and adjustment can be performed even when a problem occurs inside the intermediate electrode, and the maintainability is improved.

The first housing, the insulating member, and the second housing may be joined in an airtight or liquid-tight manner in order.

A cooling medium channel is usually formed inside the intermediate electrode, and the cooling medium is circulated through the cooling medium channel. Therefore, with such a configuration, leakage of the cooling medium is prevented.

[0014] The bonding is preferably made air tight or liquid tight using an O-ring! /, Preferably!

With such a configuration, the first housing, the insulating member, and the second housing can be easily made airtight or liquid tight.

The pressure gradient plasma gun of the present invention includes any one of the integral intermediate electrodes configured as described above.

With such a configuration, the workability at the time of attaching the intermediate electrode to the pressure gradient type plasma gun is improved.

In the pressure gradient type plasma gun according to the present invention, a collar, the integrated intermediate electrode, an insulating pipe, and a force sword are provided, and the end of the insulating pipe remote from the integrated intermediate electrode is closed. And the pressure gradient type plasma gun may be configured to be mutually fastened by a fastener.

With such a configuration, it becomes easy to assemble the pressure gradient plasma gun.

The above object, other objects, features and advantages of the present invention will be apparent from the following detailed description of preferred embodiments with reference to the attached drawings.

Effect of the invention

Since the integrated intermediate electrode of the present invention is configured as described above, the convenience of handling is improved with a simple configuration and reduced weight, and the maintenance property at the time of disassembly and adjustment is achieved. The effect is improved.

In addition, since the pressure gradient type plasma gun of the present invention is configured as described above, an intermediate voltage can be obtained. The effect of facilitating the attachment of the pole is achieved.

Brief description of the drawings

[FIG. 1] FIG. 1 is a schematic view showing a schematic configuration of a sheet plasma film forming apparatus using a pressure gradient type plasma gun according to an embodiment of the present invention.

[FIG. 2] FIG. 2 is a cross-sectional view schematically showing a state where the pressure gradient plasma gun of the embodiment of the present invention is cut vertically along the central axis.

[FIG. 3] FIG. 3 is a view showing an integral type intermediate electrode constituting the pressure gradient type plasma gun of FIG. 2, wherein (a) is a left side view and (b) is a center axis of the integral type intermediate electrode. FIG. 7 is a cross-sectional view showing a state of being cut vertically along the line, and FIG.

Explanation of sign

1 pressure gradient type plasma gun

2 Force Sword Mount

3 Discharge gas introduction hole

4 Coolant channel

6 Insulated pipe

7 Discharge gas flow path

8 Force Sword

10 cylinder

11 First housing

12 first sleeve

13

14, 20 Coolant channel

15 Permanent magnet (1st magnet)

16 insulation member

17 second housing

18 second sleeve

19 second protective plate

21 Electromagnetic coil (second magnet) O ring groove

○ Ring

Insulated collar bolt insertion holes a, 25b, 25c penetration collar insulation collar bolt (fastener) bolt hole

a, 28b through hole c screw hole

Insulating lid member Sheet plasma forming chamber Cylindrical member

First annular coil Mizukyu magnet

Second annular coil Cylindrical plasma Sheet-like plasma First flange Deposition chamber

Channo

To

Second line

Substrate holder

Target holder target

51 insulation member 52 Exhaust port

53 Bano Reb

54 vacuum pump

59 Second flange

60 anode chamber

61 3rd annular coil

62 Cylindrical member

63 anode

64 permanent magnet

111, 171 Coolant inlet

112, 172 coolant outlet

113, 173 O-ring groove

114 screw holes

201 central axis

G integrated intermediate electrode

G 1st intermediate electrode

G 2nd intermediate electrode

2

R, R, R resistor

V 1 2

V main bias voltage application device

V, V bias voltage application device

twenty three

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Embodiment (Embodiment)

FIG. 1 is a schematic view showing a schematic configuration of a sheet plasma film-forming apparatus using a pressure gradient type plasma gun according to an embodiment of the present invention. FIG. 2 is a cross-sectional view schematically showing the pressure gradient type plasma gun according to the embodiment of the present invention vertically cut along the central axis. FIG. 3 is a view showing an integrated intermediate electrode constituting the pressure gradient type plasma gun of FIG. 2, wherein (a) is a left side view, and (b) is vertically arranged along the central axis of the integrated intermediate electrode. Disconnected state And (c) is a right side view. In FIG. 3 (b), the part where the insulating collar and the fastener pass through the first and second housings and the insulating member is shown as a partially cut BB sectional view. The pressure gradient plasma gun and the integral intermediate electrode according to the present embodiment will be described below with reference to FIGS. 1 to 3. In the following description, the left side of Fig. 1 and the left side of Fig. 2 will be referred to as the front side, and the right side of Fig. 1 and the right side of Fig. 2 will be described as the rear side.

As shown in FIG. 1, the pressure gradient type plasma gun 1 of the present embodiment is used, for example, in a sheet plasma film forming apparatus 100. Here, it is needless to say that the force s exemplified for the sheet plasma film forming apparatus 100 as the film forming apparatus in which the pressure gradient type plasma gun 1 of the present embodiment is used is not limited to this. The configurations of the pressure gradient type plasma gun 1 and the integral intermediate electrode G will be briefly described here and will be described in detail later.

The pressure gradient type plasma gun 1 includes a force sword mount 2 and a cylinder 10 attached to the cathode mount 2. The force sword mount 2 is provided with a force sword 8. The cylindrical body 10 includes an insulating pipe 6 and an integral intermediate electrode G. The integrated intermediate electrode G is configured to include a first intermediate electrode G, a second intermediate electrode G, and an insulating member 16.

1 2

[0029] Force Sword 8 (Force Sword Mount 2) and the anode 63 described later

V

The negative terminal and the positive terminal of the source voltage application device V are respectively connected. The first intermediate electrode G is connected to the positive electrode terminal of the main bias voltage applying device V described above via the resistor R. The second intermediate electrode G is connected to the main bias voltage mark described above via the resistor R.

twenty two

It is connected to the positive terminal of the feeder V. Main bias voltage application device V and resistors R and R

1 I V

, R together with the bias voltage between Force Sword 8 and Anode 63

1 2

Is applied. As a result, cylindrical plasma 36 is generated in the vicinity of the force sword 8 of the pressure gradient type plasma gun 1.

The rear end of the sheet plasma forming chamber 30 is connected to the front end of the pressure gradient type plasma gun 1. The sheet plasma forming chamber 30 is formed such that the rear end and the front end of the cylindrical member 31 are respectively closed by the insulating cover member 29 whose central portion is open and the first flange 39 whose central portion is open. The cylindrical member 31 is made of a nonmagnetic material. A first annular cavity for adjusting the shape of the introduced cylindrical plasma 36 around the rear end side of the cylindrical member 31 32 are provided. Further, a pair of permanent magnets 33 is disposed in front of the position where the first annular coil 32 of the tubular member 31 is disposed. The pair of permanent magnets 33 are disposed such that their respective N poles face each other. The pair of permanent magnets 33 form the introduced cylindrical plasma 36 into a sheet-like plasma (hereinafter referred to as a sheet-like plasma) 37. Furthermore, around the front end side of the cylindrical member 31, a second annular coil 34 for arranging the formed sheet-like plasma 37 is disposed! /.

The rear end of the film forming chamber 40 is connected to the front end of the sheet plasma forming chamber 30. The sheet-like plasma 37 formed in the sheet plasma forming chamber 30 is introduced into the film forming chamber 40.

The film forming chamber 40 includes a cylindrical chamber 41. One end of the chamber 41 is closed by the upper lid 42, and the other end of the chamber 41 is closed by the lower lid 43. The chamber 41 is made of a nonmagnetic material, such as stainless steel. An exhaust port 52 is formed at an appropriate position of the chamber 41. The exhaust port 52 is configured to be openable and closable by a valve 53. A vacuum pump 54 is connected to the exhaust port 52. The vacuum pump 54 evacuates the inside of the film forming chamber 40 (chamber 41) to a predetermined pressure at which the sheet-like plasma 37 can be transported. Inside the chamber 41, a target holder 48 and a substrate holder 44 are disposed to face each other with the introduced sheet-like plasma 37 interposed therebetween.

The target holder 48 holds the target material 49. The target holder 48 is attached to the chamber 41 via the insulating member 51. The target holder 48 is airtightly attached to the chamber 41. A bias voltage application device V is connected to the target holder 48. Sheet-like plasma is produced by this bias voltage application device V.

twenty two

A negative bias voltage for the 37 potential is applied to the target holder 48. As a result, the target material 49 is sputtered by plasma particles in the sheet plasma 37.

On the other hand, the substrate holder 44 holds the substrate 45 which forms a film. The substrate holder 44 is attached to the chamber 41 via the insulating member 50. The substrate holder 44 is airtightly attached to the chamber 41. The substrate holder 44 is provided with a bias voltage application device V.

3 is connected. The potential of the sheet-like plasma 37 is set by the bias voltage application device V. Negative bias voltage is applied to the substrate holder 44. Thereby, the sputtered target material is deposited on the substrate 45 to form a film.

The rear end of the anode chamber 60 is connected to the front end of the film forming chamber 40. The anode chamber 60 is formed such that the rear end and the front end of the cylindrical member 62 are closed by a second flange 59 and an anode 63 which are open at the central portion, respectively. The cylindrical member 62 is made of, for example, glass. A third annular coil 61 is provided around the cylindrical member 62 to adjust the shape of the sheet-like plasma 37. The anode 63 is connected to the positive terminal of the main bias voltage applying device V as described above. A permanent magnet 64 is provided on the back surface of the anode 63. The permanent magnet 64 is provided such that its south pole is in contact with the anode 63. The permanent magnet 64 shapes the end of the sheet-like plasma 37.

In addition, the sheet plasma film forming apparatus 100 is provided with a controller, which is not shown! The control device controls the operation of the main bias voltage application device V, bias voltage application device V, V, etc.

one two Three

Do. The control device is configured by an arithmetic device such as a microcomputer, and controls the necessary components of the sheet plasma device 100 to control the operation of the sheet plasma device 100. Here, in the present specification, a control device also means a controller group in which a plurality of controllers cooperate with one another to execute control. Therefore, the control device does not necessarily have to be configured as a single controller, but a plurality of controllers are distributed, and they are configured to cooperate to control the operation of the sheet plasma apparatus 100. Good.

The operation of the sheet plasma film forming apparatus 100 configured as described above will be briefly described.

The cylindrical plasma 36 generated by the pressure gradient type plasma gun 1 is formed into a sheet-like plasma 37 by the pair of permanent magnets 33 of the sheet plasma forming chamber 30. The sheet-like plasma 37 is introduced into the film forming chamber 40 and sputters the target material 49. The target particles subjected to the scan are deposited on a substrate 45 disposed opposite to each other across the sheet plasma 37 to form a film.

Next, the pressure gradient type plasma gun 1 of the present embodiment will be described in detail with reference to FIG. In FIG. 2, for convenience of description, as described above, the left side of FIG. 2 is the front side, and the right side is the rear side. As shown in FIG. 2, the pressure gradient type plasma gun 1 of the present embodiment is provided with a force sword mount 2. A discharge gas introduction hole 3 is formed in the central portion of the force sword mount 2 (more precisely, on the central axis 201 of the insulating tube 6 described later), from which a discharge gas such as argon gas flows. be introduced. Further, a cooling medium channel 4 is formed inside the force sword mount 2, and the cooling medium is circulated through the cooling medium channel 4 by a cooling medium circulation mechanism (not shown). As a cooling medium, for example, water, pure water, ethylene glycol aqueous solution (antifreeze), fluorine-based refrigerant and the like can be mentioned as a liquid, and as a gas, for example, helium, argon, nitrogen and the like can be mentioned.

The rear end of the cylindrical insulating tube 6 is attached to the front end of the force sword mount 2. The insulating tube 6 is made of an insulating material, such as glass or ceramics. The insulating tube 6 and the integral intermediate electrode G and the insulating collar 24 which will be described later respectively constitute the cylindrical body 10. The cylindrical body 10 is a cylindrical body in the present embodiment. The opening of the cylinder 10 (see FIG. 1) constitutes the plasma outlet.

The force sword mount 2 is provided with a force sword 8 so as to protrude above the central axis 201 of the insulating tube 6 inside the insulating tube 6. The force sword 8 is provided with a discharge gas flow path 7. The discharge gas introduced from the discharge gas introduction hole 3 flows through the discharge gas passage 7.

An integral intermediate electrode G is attached to the front end of the insulating tube 6. As described above, the integral intermediate electrode G includes the first intermediate electrode G, the insulating member 16 and the second intermediate electrode G.

1 2 is configured. The configuration of the integral intermediate electrode G will be described in detail later.

At the front end of the integral intermediate electrode G, the rear end of a short cylindrical insulating collar 24 is attached. The insulating collar 24 is disposed coaxially with the insulating tube 6, and a seal member (not shown), for example, an O-ring, is disposed on both end surfaces thereof. As a material for forming the insulating collar 24, an insulator such as polytetrafluroethylene or ceramics is used. The front end of the insulating collar 24 is attached to an annular plate-like guide member (not shown). The insulating collar 24 ensures the insulation between the integral intermediate electrode G and the guide member.

Then, the pressure gradient type plasma gun 1 is attached to the sheet plasma film forming apparatus 100 (more specifically, the insulating lid member 29 of the sheet plasma forming chamber 30) through the guide member. Next, the structure of the integral intermediate electrode G will be described in detail with reference to FIG. In the following description, the front end and the rear end correspond to “front” and “rear” described in FIG.

As shown in FIG. 3 (a), (b) and (c), the integrated intermediate electrode G is provided with a first intermediate electrode G provided with a first housing 11 and a second provided with a second housing 17. 2 intermediate electrode G and insulating member 16

1 2

It is comprised including.

The first housing 11 is attached to the front end of the insulating pipe 6 (see FIG. 2). The first housing 11 is formed in an annular shape having a U-shaped cross section. The shape of the first housing 11 is not limited to an annular shape, and may be formed into an annular shape such as a quadrangle or a hexagonal shape. The cross section of the first housing 11 is formed in a U shape such that the surface facing the second housing 17 is open, and is surrounded by the first housing 11 and the short cylindrical insulating member 16. The space force cooling medium channel 14 is configured. The first housing 11 is provided with a tubular first sleeve 12 in contact with the inner circumferential surface thereof. For example, a male thread groove is formed on the outer periphery of the first sleeve 12, and this male thread groove is provided so as to be screwed into a female thread groove formed on the inner periphery of the first housing 11. The first sleeve 12 is provided concentrically with the first housing 11. The first housing 11 and the first sleeve 12 constitute a first intermediate electrode G. The first sleeve 12 is made of a high melting point and conductive material such as tungsten or molybdenum. The first sleeve 12 improves the heat resistance of the first housing 11 to the generated cylindrical plasma 36.

A cooling medium inlet 111 and a cooling medium outlet 112 are formed in the first housing 11. In the present embodiment, the cooling medium inlet 111 and the cooling medium outlet 112 are a circumferentially opposite portion of the outer peripheral wall of the first housing 11, and penetrate a portion positioned in a horizontal direction with respect to the center of the first housing 11. It is formed as. A cooling medium circulation mechanism (not shown) is connected to the cooling medium inlet 111 and the cooling medium outlet 112, and the cooling medium is circulated in the cooling medium channel 14 by the cooling medium circulation mechanism. As a cooling medium, for example, water, pure water, ethylene glycol aqueous solution (antifreeze), fluorine-based refrigerant and the like can be mentioned as a liquid, and as gas, for example, helium, argon, nitrogen and the like can be mentioned. In the first housing 11, an annular permanent magnet (having a rectangular cross section along the inner circumference of the cooling medium channel 14) The first magnet 15 is housed. The shape of the permanent magnet 15 is appropriately changed in accordance with the shape of the first housing 11, and may be formed into, for example, an annular shape such as a square or a hexagon. The permanent magnet 15 is accommodated concentrically with the first housing 11. In other words, the cooling medium is circulated through the cooling medium channel 14 formed inside the first intermediate electrode G, and the permanent magnet 15 is in contact with the cooling medium. The permanent magnet 15 is positioned by being sandwiched by the inner peripheral wall of the first housing 11 and the side wall of the insulating member 16.

As shown in FIGS. 3 (b) and 3 (c), a first protective plate 13 is provided at the rear end of the first housing 11. As shown in FIG. The first protective plate 13 protects the side surface (end surface) of the first housing 11 from being sputtered by plasma. Further, a screw hole 114 is formed on the rear end face of the first housing 11 so as to have a predetermined interval in the circumferential direction. By screwing a screw (not shown) into the screw hole 114, the first housing 11 and the insulating pipe 6 are fastened (fixed). Further, an annular O-ring groove 113 is formed in the rear end face of the first housing 11. By fitting an O-ring (not shown) into the O-ring groove 113 and attaching the insulating pipe 6, the first housing 11 and the insulating pipe 6 are airtightly joined.

At the front end of the first intermediate electrode G, a short cylindrical insulating member 16 is disposed. The shape of the insulating member 16 is not limited to a cylindrical shape, and may be appropriately changed according to the shapes of the first housing 11 and the second housing 17. For example, the insulating member 16 may be formed in a rectangular shape, a hexagonal shape or the like. Good. The insulating member 16 is disposed coaxially with the insulating pipe 6. The insulating member 16 is made of an insulating material such as polytetrafluoroethylene or ceramics. The insulating member 16 insulates the first intermediate electrode G from the second intermediate electrode G described later.

1 2

The rear end of the second housing 17 is provided at the front end of the insulating member 16. The second housing 17 is formed in an annular shape having a U-shaped cross section. The shape of the second housing 17 is not limited to an annular shape, and may be formed into an annular shape such as a quadrangle or a hexagonal shape according to the shape of the first housing 11. The cross section of the second housing 17 is formed in a U-shape such that the surface facing the first housing 11 is open, and a space surrounded by the second housing 17 and the short cylindrical insulating member 16. The force S constitutes the cooling medium channel 20. The second housing 17 is provided with an annular second sleeve 18 along the inner periphery thereof. For example, a male thread groove is formed on the outer periphery of the second sleeve 18, and this male thread groove is a second housing. It is provided in such a manner as to be screwed into a female screw groove formed on the inner periphery of the hook 17. The second sleeve 18 is provided concentrically with the second housing 17. The second housing 17 and the second sleeve 18 constitute a second intermediate electrode G. The second sleeve 18 is a high melting point conductive material

2

For example, it is made of tungsten or molybdenum. The second sleeve 18 improves the heat resistance of the second housing 17 when the generated plasma passes.

A cooling medium inlet 171 and a cooling medium outlet 172 are formed in the second housing 17. In the present embodiment, the cooling medium inlet 171 and the cooling medium outlet 172 pass through a circumferentially opposite portion of the outer peripheral wall of the second housing 17 and located horizontally with respect to the center of the second housing 17. It is formed as. A cooling medium circulation mechanism (not shown) is connected to the cooling medium inlet 171 and the cooling medium outlet 172, and the cooling medium is circulated in the cooling medium flow passage 20 by the cooling medium circulation mechanism. As a cooling medium, for example, water, pure water, ethylene glycol aqueous solution (antifreeze), fluorine-based refrigerant and the like can be mentioned as a liquid, and as gas, for example, helium, argon, nitrogen and the like can be mentioned. An annular electromagnetic coil (second magnet) 21 having a rectangular cross section is accommodated in the second housing 17 so as to be in contact with the inner periphery of the cooling medium flow passage 20. The shape of the electromagnetic coil 21 is appropriately changed in accordance with the shape of the second housing 17, and may be formed into, for example, an annular shape such as a square or a hexagon. The electromagnetic coil 21 is accommodated concentrically with the second housing 17. In other words, the cooling medium is circulated in the cooling medium channel 20 formed inside the second intermediate electrode G.

2

The electromagnetic coil 21 is in contact with the cooling medium. The electromagnetic coil 21 is wound in an annular shape. The electromagnetic coil 21 is positioned by being sandwiched by the side wall of the insulating member 16 and the inner circumferential wall of the second housing 17.

At the front end of the second housing 17, a second protective plate 19 is provided. The second protective plate 19 protects the side surface (end surface) of the second housing 17 from being sputtered by plasma. Further, an annular O-ring groove 173 is formed on the front end face of the second housing 17. By fitting an O-ring (not shown) into the O-ring groove 173 and attaching the insulating collar 24, the second housing 17 and the insulating collar 24 are airtightly joined. The insulating force roller 24 is formed in a short cylindrical shape. The shape of the insulating collar 24 is appropriately changed according to the shape of the second housing 17. For example, the insulating collar 24 is formed in a tubular shape such as a square or a hexagon. It may be

Further, bolt holes 28 are formed in the first housing 11, the second housing 17, and the insulating member 16 (see FIGS. 3 (b) and 3 (c)). The bolt holes 28 also include forces through holes 28 a and 28 b respectively formed in the first housing 1 1 and the insulating member 16 and a screw hole 28 c formed in the second housing 17. Then, a cylindrical insulating collar 26 is inserted through the through holes 28a and 28b, and a bolt (fastener) 27 is screwed into the insulating collar 26 into the threaded through hole 28c, thereby forming the first housing 11 , The insulating member 16 and the second housing 17 are mutually fastened and integrated. Thus, the insulating member 16 covers the open surfaces of the first housing 11 and the second housing 17 formed in a U-shape. That is, the open surfaces of the first housing 11 and the second housing 17 are sealed by the insulating member 16. An O-ring groove 22 is formed at a predetermined position of the first housing 11 and the second housing 17, and an O-ring 23 is fitted in the O-ring groove 22. Thus, the first housing 11, the insulating member 16 and the second housing 17 are joined in an airtight or liquid-tight manner in order. That is, when a gaseous cooling medium is used, the first housing 11, the insulating member 16 and the second housing 17 are airtightly joined in order. On the other hand, when a liquid cooling medium is used, the first housing 11, the insulating member 16 and the second housing 17 are joined in order in a liquid tight manner. Accordingly, the hermeticity between the insulating member 16 and the first housing 11 and the second housing 17 is maintained, and the leakage of the cooling medium from the integral intermediate electrode G is prevented.

In the first housing 11, the insulating member 16 and the second housing 17, bolt through holes 25 are formed at positions deviated from the bolt holes 28 by a predetermined central angle so as to penetrate them (see FIG. See Figure 3 (a) to (c)). The bolt through hole 25 comprises through holes 25a, 25b and 25c formed in the first housing 11, the insulating member 16 and the second housing 17, respectively. By screwing a bolt (fastener, not shown) into the bolt through hole 25 and screwing the bolt (fastener) into a guide member (not shown), an integral intermediate electrode G (or an integral intermediate electrode) is obtained. A pressure gradient type plasma gun 1) incorporating the pole G is attached to the sheet plasma forming chamber 30 (more specifically, the insulating lid member 29 of the sheet plasma forming chamber 30) through the guide member.

Here, first housing 11 and second housing 17 are made of an aluminum alloy. And is preferred. The weight of the first housing 11 and the second housing 17 can be reduced S because the aluminum alloy has a specific gravity smaller than that of stainless steel used for the housing of a normal intermediate electrode. This improves the operability when handling the first housing 11 and the second housing 17.

[0058] As an example of the aluminum alloy, it is possible to use, for example, aluminum magnesium alloy (JIS 5000 series), aluminum magnesium cay alloy (JIS 6000 series), and aluminum zinc-magnesium alloy (JIS 7000 series). And to maintain corrosion resistance.

In addition, the surface of the portion of the first housing 11 and the second housing 17 in contact with the cooling medium (the surface of the U-shaped inner portion of the first housing 11 and the second housing 17) It is preferable that a surface treatment layer having conductivity, non-magnetism and corrosion resistance be formed. Examples of the surface treatment layer having such conductivity, non-magnetism and corrosion resistance include an electroless Ni plating layer. As a result, deterioration in the portion where the first housing 11 and the second housing 17 contact the cooling medium is suppressed.

[0060] In summary of the above matters, it is possible to assemble the integrated intermediate electrode G by fastening the first housing 11, the insulating member 16 and the second housing 17 with the bolts (fasteners) 27. . Also, the integrated intermediate electrode G can be disassembled by performing the reverse operation. Furthermore, the assembled integral intermediate electrode G can be attached to the wall (insulating member 29) of the sheet plasma forming chamber 30 via the guide member.

Since the integrated intermediate electrode G of the present embodiment is configured as described above, the number of components can be reduced, and the weight thereof can be reduced. In addition, it becomes possible to manufacture the integrated intermediate electrode G in a compact manner. This improves the workability when attaching the integrated intermediate electrode G. Furthermore, since the first magnet 15 can be removed from the first housing 11 by removing the bolt 27, and the second magnet 21 can be removed from the second housing 17, the maintainability of the intermediate electrode is improved.

In the present embodiment, the cylindrical body 10 constituting the pressure gradient type plasma gun 1 is a cylindrical body, but the cross-sectional shape is arbitrary. For example, the cross-sectional shape in the direction perpendicular to the central axis 201 is positive. It may be polygonal. In addition, the first sleeve 12 and the second sleeve 18 in which the male screw groove is formed are screwed to the inner circumferences of the first sleeve, the housing 11 and the second housing 17, respectively! The grooved first sleeve 12 and the second sleeve 18 are passed along the inner circumferences of the first housing 11 and the second housing 17, respectively, and then each of them is covered by the protection plates 13, 19 from the outside. You may insert it. With such a configuration, welding of the screw groove is prevented, and replacement of the first sleeve 12 and the second sleeve 18 is facilitated.

From the above description, many modifications and other embodiments of the present invention will be apparent to those skilled in the art. Accordingly, the above description should be construed as illustrative only and is provided for the purpose of teaching those skilled in the art the best mode of carrying out the present invention. The details of its structure and / or function may be varied substantially without departing from the spirit of the invention.

Industrial applicability

The integrated intermediate electrode of the present invention is useful as an intermediate electrode which has a simple structure and reduces weight to improve the convenience of handling, and improves the maintainability at the time of disassembly and adjustment. is there.

The pressure gradient plasma gun of the present invention is useful as a pressure gradient plasma gun with improved workability when attaching an intermediate electrode.

Claims

The scope of the claims

[1] A first housing having conductivity, a first sleeve having conductivity provided concentrically with the first housing and in contact with the inner peripheral surface of the first housing, and the first sleeve. A first magnet coaxially housed with the first housing in a housing, a conductive second housing coaxially provided with the first housing, and a second housing concentric with the second housing are provided. A conductive second sleeve provided in contact with the inner circumferential surface of the second housing; and a second magnet concentrically accommodated in the second housing with the second housing. An integrated intermediate electrode, wherein the first housing and the second housing are integrated via an insulating member.

[2] The first housing has a U-shaped cross section so that the surface facing the second housing is open, and the second housing is open the surface facing the first housing. The insulating member is formed coaxially with the first housing and the second housing, and the open faces of the first housing and the second housing are The first magnet is accommodated in the space between the first housing and the insulating member, and the second magnet is accommodated in the space between the second housing and the insulating member. The integral intermediate electrode according to claim 1, wherein a magnet is accommodated, and the first housing, the insulating member, and the second housing are mutually fastened by a fastener.

[3] The integrated intermediate electrode according to claim 2, wherein the first housing, the insulating member, and the second housing are airtightly or liquid-tightly joined in order.

[4] The integral intermediate electrode according to claim 3, wherein the bonding is air-tight or liquid-tight using an O-ring.

[5] A pressure gradient type plasma gun comprising the integrated intermediate electrode according to any one of claims 1 to 4.

[6] A collar, the integral intermediate electrode, an insulating pipe, and a force sword mount provided with a force sword for closing the end of the insulating pipe remote from the integral intermediate electrode are mutually fastened by a fastener. The pressure gradient plasma gun according to claim 5, wherein the pressure gradient plasma gun is configured to be fastened.