JPH10298741A - Device for drawing out intermediate electrode coil of plasma gun - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for drawing out intermediate electrode coil of plasma gun that does not have a trouble for a long time, in the device for drawing out magnet coil of intermediate electrode. SOLUTION: This device for drawing out intermediate electrode coil of plasma gun for supplying the power source to the coil magnet 281 in the state of assuring water tightness from outside the housing case 283 by using a hole penetrating the inside and outside of a housing case 283 which is applied to the second intermediate electrode 28 of the plasma gun having the coil magnet 281 which is housed in the water-tight housing case 283 and is cooled by using a refrigerant within this housing case 283. The drawing out wire 281a itself of the coil magnet 281 is installed in the state of assuring the water tightness to the outside of the housing case 283. The device has a main cylindrical body 285a which is screwed into the hole of the housing case 283, an elastic cylindrical body 285d which is housed within the cylinder of this main cylindrical body 285a and has a hole through which the drawing out wire 281a of the coil magnet 281 passes and an insulating cylindrical body 285c which presses this elastic cylindrical body 285d.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film forming chamber defined by a vacuum vessel, which guides a plasma beam generated by a plasma source to an anode, ionizes an adhered material, is disposed above the anode, and applies a voltage. TECHNICAL FIELD The present invention relates to an intermediate electrode coil extraction device of a plasma gun used for a vacuum film formation device for forming a film on a coated substrate surface.

[0002]

2. Description of the Related Art Vacuum film forming apparatuses using a plasma gun include an ion plating apparatus and a plasma CVD apparatus.

For example, as a plasma gun of an ion plating apparatus, a pressure gradient plasma gun source or H
CD plasma guns are known. An ion plating apparatus using such a plasma gun is provided with a plasma beam generator (plasma gun source), and a plasma beam is generated between a hearth (anode) placed in a vacuum vessel and the plasma beam generator. Is generated, and the evaporation material as the adhesion material placed on the hearth is heated and evaporated. Then, the vapor-deposited metal particles from the vapor-deposited material are ionized and activated by the plasma beam, and the ion particles adhere to the surface of the substrate at a negative voltage to form a film on the substrate.

FIG. 2 is a side sectional view showing an example of a conventional ion plating apparatus. Referring to FIG. 2, this ion plating apparatus has an airtight vacuum vessel 10. A plasma beam generator (for example, a pressure gradient type plasma gun) 20 is attached to the vacuum vessel 10 via a guide unit 12. Outside the guide section 12, a steering coil 31 for guiding the plasma beam is provided. Plasma beam generator 20
First and second for converging the plasma beam
Are arranged concentrically.
A permanent magnet 271 is incorporated in the first intermediate electrode 27 so that the magnetic pole axis is parallel to the central axis of the plasma generator 20, and a coil 281 is incorporated in the second intermediate electrode 28.

[0005] The plasma beam generator 20 is provided with an insulating tube (for example, a glass tube) 21 connected to a passage defined by the first and second intermediate electrodes 27 and 28. A Mo cylinder 22 is arranged in the insulating tube 21.
A Ta pipe 23 is arranged in the Mo cylinder 22.
The space defined by the Mo cylinder 22 and the Ta pipe 23 is L
It is isolated by aB ₆ made of an annular plate 24. Insulating tube 21,
A conductor plate 25 is attached to one end of the Mo cylinder 22 and the Ta pipe 23. A carrier gas (an inert gas such as Ar) is introduced from a carrier gas inlet 26 formed in the conductor plate portion 25, and the carrier gas passes through the Ta pipe 23.

In the vacuum vessel 10, a substrate 100 as an object to be processed is arranged by being supported by a transfer device 61. A DC power supply for negative bias is connected to the substrate 100. A substrate 100 is provided on the bottom surface of the vacuum vessel 10.
A hearth (anode) 41 is arranged so as to oppose to. An annular auxiliary anode 42 is arranged on the outer periphery of the hearth 41.

[0007] The negative end of the variable power supply 90 is connected to the conductor plate 25. The positive end of the variable power supply 90 is connected to the first and second terminals via resistors R1 and R2, respectively.
Are connected to the intermediate electrodes 27 and. On the other hand, the hearth 41 includes a variable power supply 90 and resistors R1 and R1.
2 is connected. A gas inlet 10a for introducing a carrier gas (an inert gas such as Ar or He) and an exhaust port 10b for exhausting the inside of the vacuum vessel 10 are formed on the side wall of the vacuum vessel 10. I have.

In this ion plating apparatus, when a carrier gas is introduced from the carrier gas inlet 26,
Discharge starts between the first intermediate electrode 27 and the Mo cylinder 22. As a result, a plasma beam 300 is generated.
The plasma beam 300 is guided by the magnets of the steering coil 31 and the auxiliary anode 42 and reaches the hearth 41 and the auxiliary anode 42 used as the anode. Hearth 4
1 is provided with the plasma beam 300, the Haas 41
Is evaporated by Joule heating. The evaporated metal particles are ionized and adhere to the surface of the substrate 100 to which the negative voltage is applied, and a film is formed on the substrate 100.

FIG. 3 is a side sectional view showing an example of a conventional plasma CVD apparatus. In FIG. 2, FIG.
The same reference numerals as in FIG. 2 denote the same or similar parts as in FIG. 2, and a description thereof will be omitted. Referring to FIG. 3, in the plasma CVD apparatus, a source gas inlet 10a 'for introducing a source gas 250 as an adhering material is formed on a side wall of a vacuum vessel 10'. An anode 41 'is arranged on the bottom surface in the vacuum vessel 10'.

In this plasma CVD apparatus, the vacuum vessel 1
0 'is evacuated, and a source gas 250 is introduced from a source gas inlet 10a'.
0 generates a plasma beam 300 to generate an anode 41 '.
Lead to. Then, the source gas 250 is ionized, adheres to the surface of the substrate 100 to which the negative voltage is applied, and
A film is formed on the top surface.

FIG. 4 is a diagram showing a detailed structure of the second intermediate electrode of the vacuum film forming apparatus shown in FIGS. Referring to FIG. 4, the second intermediate electrode 28 is a coil magnet 281.
And a storage case 283 for storing the coil magnet 281 in a state of being supported and fixed by the coil case 282, a lid 284 combined with the storage case 283 in a watertight manner, and a storage case 283 for the coil magnet 281 stored in the storage case 283. A connection member 286 as a wiring structure for supplying power while maintaining watertightness from the outside;
A refrigerant pipe 287 is provided for cooling the coil magnet 281 by flowing a refrigerant in a room defined by the lid 83 and the lid 284. The wound electric wire of the coil magnet 281 is coated with insulation. The lid 284 is attached to the storage case 283,
Usually, they are joined by welding. The storage case 283 and the lid 284 are electrically insulated from the first intermediate electrode and the guide portion 12 of the vacuum vessel via insulators 292 and 291.

The connection member 286 includes an electrode bolt 286a attached to a hole in the side surface of the storage case 283 with the insulating cylinder 286d interposed therebetween, and a lead wire 281a of the coil magnet 281.
And an internal terminal 286b locked to the end of the electrode bolt 286a by a nut 286c, and crimped to an electric wire from an external power source, and an electrode bolt 286a is bolted by a bolt 286e.
Terminal 286f locked to the head of
86a, the internal terminal 286b, and the lead wire 28
An insulating resin 286g applied and dried so as to insulate the tip of the la from the storage case 283 and the refrigerant is provided, and an O-ring 286h and an O-ring 286i are formed in the holes on the side surface of the storage case 283.

[0013]

By the way, in the intermediate electrode having the electric wiring structure of the magnet coil shown in FIG. 4, as the plasma gun is used, the insulating resin formed around the internal terminals in the wiring structure becomes more and more difficult. , And often deteriorated or peeled off. In this case, the refrigerant penetrates into the degraded and peeled parts of the insulating resin, causing dielectric breakdown, breaking the lead wire of the magnet coil due to electrolytic corrosion, and depositing rust and mud in the cooling water at the joints of electric wires. In addition, the plasma gun cannot be normally operated due to dielectric breakdown. In addition, since the storage case is sealed by welding as described above, it is difficult to repair the deterioration or peeling of the insulating resin in the sealed storage case.

SUMMARY OF THE INVENTION An object of the present invention is to provide an intermediate electrode coil extracting device for a plasma gun which does not cause any trouble for a long time in the intermediate coil extracting device for the intermediate electrode.

[0015]

According to the present invention, the present invention is applied to an intermediate electrode of a plasma gun having a coil magnet housed in a watertight housing case and cooled with a refrigerant in the housing case, An intermediate electrode coil extraction device for a plasma gun for supplying power to the coil magnet in a state where watertightness is secured from the outside of the storage case using holes penetrating into and out of the storage case. It is possible to obtain an intermediate electrode coil extraction device for a plasma gun, which is wired in a state in which watertightness is secured outside the housing case.

According to the present invention, there is also provided an elastic cylindrical body having a main cylindrical body screwed into the hole of the housing case, and a hole housed in the main cylindrical body and through which a lead wire of the coil magnet passes. And an intermediate electrode coil extraction device for the plasma gun, comprising: an insulating cylinder that presses the elastic cylinder.

Further, according to the present invention, the main cylinder body has an annular flange seat formed in the cylinder, has a threaded portion at the outer peripheral portion of both ends, and has one end watertight to a hole of the storage case. And the elastic cylinder is disposed within the cylinder of the main cylinder and at one end of the main cylinder of the flange seat, and the lead wire of the coil magnet is A through hole, wherein the insulating cylinder is inserted into the cylinder from one end side of the main cylinder, and one end of the cylinder is in contact with the elastic cylinder; An intermediate electrode coil extraction device of the plasma gun that moves to the flange seat side by screwing in a cap nut that is screwed into a screw portion formed on the side is obtained.

According to the present invention, there is also provided an intermediate electrode of the plasma gun having an insulating in-case insulating cylinder disposed so as to cover the lead wire in a region where the watertightness of the housing case is ensured. A coil extraction device is obtained.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A description will now be given, with reference to the drawings, of an apparatus for extracting an intermediate electrode coil of a plasma gun according to an embodiment of the present invention.

FIG. 1 is a sectional view of a second intermediate electrode to which the present invention is applied. 4, the same parts as those in the conventional example or the same parts are denoted by the same reference numerals as in FIG. 4, and the description will be omitted.

Referring to FIG. 1, the present apparatus comprises a coil magnet 2
The 81 outgoing line 281a itself is wired to the outside of the housing case 283 in a state where watertightness is secured. That is, there is no place where the insulating resin is applied in the storage case through which the refrigerant flows.

The drawer 285 has a main cylinder 285a, an elastic cylinder 285d, a cap nut 285e, an insulating cylinder 285c, and an in-case insulating cylinder 285b. The main cylindrical body 285a is formed of an annular flange seat 2 formed in the cylinder.
85f and a threaded portion on the outer periphery of both ends are provided. The inside of the cylinder communicates with the hole 283a of the housing case 283, and one end is screwed into the threaded portion of the hole 283a in a state where watertightness is secured. The main cylinder 285a may be either insulating or non-insulating, but is preferably made of metal from the viewpoint of the mounting strength to the housing case 283. The elastic cylindrical body 285d is disposed on the other end of the main cylindrical body 285a of the flange seat 285f (upper seat in the figure) within the main cylindrical body 285a, and has insulation and elasticity. I have. In addition, it has a through hole for the lead wire 281a. One end of the insulating cylinder 285c is inserted into the cylinder of the main cylinder 285a to press the elastic cylinder 285d, and has an insulating property. Cap nut 285
“e” is to screw into the threaded portion of the main cylindrical body 285a in a state where a part thereof is engaged with the insulating cylindrical body 285c, and press the insulating cylindrical body 285c against the elastic cylindrical body 285d. Cap nut 2
85e may also be insulating or non-insulating.

In the present drawer, the magnet coil 281
Of the main cylinder 285a and the elastic cylinder 285 from inside the storage case 283 in a state where the insulation coating is applied.
d, insulating cylinder 285c, and cap nut 285e
It is wired to the outside of the housing case 283 through the inside. When the cap nut 285e is screwed into the main cylinder 285a, the elastic cylinder 285d is pressed by the insulating cylinder 285c engaged with the cap nut 285e and deformed.
Water tightness is secured between the outer periphery of 1a and the inner periphery of the elastic cylinder 285d, and between the outer periphery of the elastic cylinder 285d and the inner periphery of the main cylinder 285a.

Further, in the present drawing device, the main cylinder 285a
Of the main cylindrical body 285a with respect to the flange seat 285f (see FIG.
In the area of (lower side), that is, the area in the storage case 283,
An in-case insulating cylinder 285b is provided to cover the lead wire 281a of the coil magnet 281. The in-case insulating cylinder 285b is attached to the main cylinder 285a. By having the insulated cylindrical body 285b in the case, when the lead wire 281a is moved by the flowing refrigerant or the like, the drawn wire 281a rubs against the housing case 283 or the main cylindrical body 285a, and the insulating coating is prevented from peeling or breaking. You. Further, the end of the insulated cylindrical body 285b is chamfered or curved so that the lead wire 281a is not damaged.

The drawer can be disassembled and removed even after the lid 284 is welded to the housing case 283, which is advantageous for maintenance.

[0026]

According to the present invention, an apparatus for extracting an intermediate electrode coil of a plasma gun according to the present invention includes: a main cylinder screwed into a hole of a housing case;
An elastic cylindrical body accommodated in the main cylindrical body and having a hole through which the lead wire of the coil magnet penetrates, and an insulating cylindrical body for pressing the elastic cylindrical body, wherein the lead wire of the coil magnet itself is outside the housing case. Since it is wired in a water-tight state up to that point, there is no need to apply insulating resin in the housing case as in the past, There is no problem caused by deterioration. For this reason, it is impossible to operate the plasma gun normally, and it is not necessary to perform a difficult operation for repairing the deterioration or peeling of the insulating resin in the sealed housing case.

[Brief description of the drawings]

FIG. 1 is a sectional view of an intermediate electrode coil extraction device of a plasma gun according to an embodiment of the present invention.

FIG. 2 is a side sectional view showing an ion plating apparatus as a vacuum film forming apparatus according to a conventional example.

FIG. 3 shows a plasma C as a vacuum film forming apparatus according to a conventional example.
It is a sectional side view which shows a VD apparatus.

FIG. 4 is a sectional view of a conventional apparatus for extracting an intermediate electrode coil of a plasma gun.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Vacuum container 12 Guide part 20 Plasma beam generator 27 1st intermediate electrode 28 2nd intermediate electrode 41 Haas 100 Substrate 200 Evaporation material 281 Coil magnet 281a Leader 282 Coil case 283 Storage case 283a Hole 284 Cover 285 Leader 285a Main cylinder 285b Insulated cylinder 285c Insulated cylinder 285d Elastic cylinder 285e Cap nut 285f Collar seat 286 Connection member 286a Electrode bolt 286b Internal terminal 286c Nut 286d Insulation cylinder 286e Bolt 286f External terminal 286g Insulating resin O286h Ring 287 Refrigerant piping 291, 292 Insulator

Claims (4)

[Claims] The present invention is applied to an intermediate electrode of a plasma gun provided with a coil magnet which is housed in a watertight housing case and cooled with a coolant in the housing case, and uses a hole penetrating inside and outside the housing case. In an intermediate electrode coil extraction device of a plasma gun for supplying power to the coil magnet in a state where watertightness is secured from outside the storage case,
An intermediate electrode coil extraction device for a plasma gun, wherein the extraction line of the coil magnet itself is wired in a state in which water tightness is secured outside the housing case. 2. An elastic tubular body screwed into a hole of the housing case, an elastic tubular body housed in the cylinder of the main tubular body, and having a hole through which a lead wire of the coil magnet passes therethrough, 2. The apparatus for extracting an intermediate electrode coil of a plasma gun according to claim 1, further comprising an insulating cylinder for pressing the body. 3. The main cylinder body has an annular flange seat formed in the cylinder, a threaded portion at an outer peripheral portion at both ends, and a threaded end having a watertight hole in the storage case. And the elastic cylinder is disposed within the cylinder of the main cylinder and at one end of the main cylinder of the flange seat, and includes a through hole for a lead wire of the coil magnet, The insulating cylinder,
Inserted into the cylinder from one end side of the main cylindrical body, one end is to be in contact with the elastic cylindrical body, further,
The intermediate electrode coil extraction device for a plasma gun according to claim 2, wherein the device moves to the flange seat side by screwing a cap nut screwed into a screw portion formed on one end side of the main cylindrical body. 4. The plasma gun according to claim 2, further comprising: an insulating in-case insulating cylinder disposed so as to cover the lead wire in a region where the watertightness of the storage case is ensured. Intermediate electrode coil extraction device.