JP5096539B2 - Plasma gun - Google Patents

Description

  The present invention relates to a plasma gun used in physical vapor deposition (PVD) or chemical vapor deposition (CVD).

  As PVD, an ion plating method, a vacuum deposition method, a sputtering method, and the like are known.

  For example, in the ion plating method, an ion plating apparatus as shown in FIG. 4 is known. In this ion plating apparatus, a plasma gun 1 having a cathode 1a and an intermediate electrode 1b is attached to a side surface of a vacuum chamber 2, and a negative voltage is applied from a discharge power source 3 while receiving a carrier gas such as argon gas. Plasma discharge is performed by the plasma gun 1 to generate plasma 4, and this plasma 4 is emitted into the vacuum chamber 2 through the converging air-core coil 5. The magnet 6 is installed in the vacuum chamber 2 as an anode (hearth). The deposited metal 7 such as titanium is irradiated to melt and vaporize the deposited metal 7. At this time, the vapor-deposited metal particles separated from the electrons and + ionized are attracted to the surface of the work W to which a negative voltage is applied by the ion integrated power source 8 in the vacuum chamber 2 to be in close contact with each other to form a metal film.

  In the vacuum chamber 2, first, the internal air is exhausted to the outside through an exhaust port 2a connected to a vacuum pump (not shown) to increase the degree of vacuum. In addition, by introducing a reactive gas such as nitrogen into the vacuum chamber 2 from the reactive gas inlet 2b, the deposited metal particles become a film of a compound that has reacted with the reactive gas, and the surface of the workpiece W Formed.

  As an intermediate electrode of a plasma gun used in such an ion plating method, a plate-like first flange portion having a first opening through which plasma flows out, and the first opening on one main surface of the first flange portion. A conductive first housing having a cylindrical first body projecting so as to surround the first tubular member, and a tubular first electrode member inserted into an inner hole of the first body of the first housing And an annular first magnet fitted on the outer peripheral surface of the first body portion of the first housing, and a first stop member (nut) that stops the first magnet from being removed from the first body portion of the first housing. ), A ring-shaped insulating member disposed coaxially with the first opening at the tip of the first body of the first housing, a plate-like second flange having a second opening through which plasma flows, and the A cylindrical second trunk projecting on one main surface of the second flange so as to surround the second opening A conductive second housing having a cylindrical shape, a cylindrical second electrode member fitted into an inner hole of the second body of the second housing, and an outer peripheral surface of the second body of the second housing. An annular second magnet, a second stop member (nut) that stops the second magnet from coming off from the second body of the second housing, and a fastener, the second housing comprising: One main surface of the second flange portion is opposed to one main surface of the first flange portion of the first housing, and the second opening is positioned coaxially with the first opening of the first housing; And the front end of the second body part is arranged so as to sandwich the insulating member between the front end of the first body part of the first housing, and the first flange part of the first housing and the second housing Are known to be fastened to each other by the fasteners. See Patent Document 1).

Japanese Patent Laying-Open No. 2008-66241 (page 4, FIG. 1)

  Since the intermediate electrode of the plasma gun has a structure in which the first magnet and the second magnet are provided outside the first housing and the second housing, the first housing and the second housing can be reduced in size and weight. Although there are advantages that can be made, there are also the following problems.

  That is, the annular first magnet fitted on the outer peripheral surface of the first body portion of the first housing is formed by the first stop member (nut) screwed into the first body portion of the first housing. An annular second magnet fitted to the outer peripheral surface of the second body of the second housing is fixed so as not to come off from the first body, and the second stop is screwed into the second body of the second housing. Since the structure is such that a member (nut) prevents the second barrel from coming off, it is necessary to process a threaded groove in the first barrel and the first stopper, and the second barrel and It is necessary to process a screwing groove in the second stopper member.

  Further, the first flange portion of the first housing is disposed such that an annular insulating member is sandwiched between the front end of the first body portion of the first housing and the front end of the second body portion of the second housing. And the second flange portion of the second housing are fastened to each other by the fastener. Therefore, the size and material of the insulating member are limited, and it is limited to a ceramic product having a predetermined hardness even if it is small.

  For this reason, the conventional plasma gun has problems in terms of assembling parts and cost.

  The present invention has been made in view of these points, and an object of the present invention is to provide a plasma gun that is improved in terms of component assembly and cost.

The invention described in claim 1 is for generating and converging a cathode to which a negative voltage is applied while being supplied with a carrier gas, and to which a positive voltage is applied coaxially with respect to the cathode. The intermediate electrode includes a first intermediate electrode disposed on the cathode side, a second intermediate electrode disposed on the opposite side of the cathode to the first intermediate electrode, and the intermediate electrode In the plasma gun, comprising: an insulating member disposed between the first intermediate electrode and the second intermediate electrode; and a fastening member for fastening the first intermediate electrode and the second intermediate electrode to each other. The first intermediate electrode and the second intermediate electrode each have a flange portion fastened to each other by the fastening member and a body portion protruding in a direction facing each other from the center portion of these flange portions, and at the center portion. Conductive with each hole The first electrode mounting base and the second electrode mounting base, and the cylindrical first electrode member and the second electrode member respectively fitted in the respective holes in the center of the first electrode mounting base and the second electrode mounting base And an annular first magnet and a second magnet respectively fitted on the outer peripheral surfaces of the respective body portions of the first electrode mounting base and the second electrode mounting base, and the insulating member includes the first magnet an insulating body portion positioned, so as to protrude above the insulation, respectively Re body portion or Raso integrally fitted to be respectively on the outer peripheral surface of said first magnet and said second magnet between the said second magnet It is the plasma gun which comprised the 1st fitting part and the 2nd fitting part.

Those The invention described in claim 2, the plasma gun according to claim 1, wherein the insulation body part, first the fitting portion and the second consists of the fitting part insulating member, is integrally molded by an insulating heat-resistant resin It is.

  According to a third aspect of the present invention, both the first magnet and the second magnet in the plasma gun according to the first or second aspect are annular permanent magnets.

  According to the first aspect of the present invention, the first intermediate electrode and the second intermediate electrode are formed on the outer peripheral surfaces of the respective body portions of the first electrode mounting base and the second electrode mounting base, respectively. And an insulating body that is fitted between the first magnet and the second intermediate electrode, and is disposed between the first magnet and the second magnet. A first fitting portion and a second fitting portion, which are integrally projected from the first portion, are fitted on the outer peripheral surfaces of the first magnet and the second magnet, respectively, and the first electrode mounting base and the second electrode Since the flange portions of the mounting base are fastened to each other by the fastening member, the first magnet and the second magnet can be simultaneously fixed together with the insulating member between the flange portions. There is no need to provide separate magnet fixing means Component assembly performance and can be improved in cost. Furthermore, the first fitted portion and the second fitted portion of the insulating member can also serve as a protective cover for protecting the first magnet and the second magnet.

  According to the second aspect of the present invention, since the insulating member is integrally formed with the insulating heat-resistant resin, high reliability with respect to heat resistance, electrical insulation and the like can be ensured by a lightweight and inexpensive insulating member.

  According to the third aspect of the present invention, since the first magnet and the second magnet are both annular permanent magnets, at least one of the conventional methods is related to wiring and insulation compared to the case of using an electromagnet. The first magnet and the second magnet can be easily fixed by the insulating member, and heat generation from the magnet does not occur, so that heat resistance and cooling performance can be improved.

It is a perspective sectional view showing one embodiment of a plasma gun concerning the present invention. It is a partially broken front view which shows the cathode cooling structure of a plasma gun same as the above. It is a partially broken front view which shows the 1st intermediate electrode cooling structure of a plasma gun same as the above. It is the schematic which shows the general ion plating apparatus using a plasma gun.

  Hereinafter, the present invention will be described in detail based on the embodiment shown in FIGS. In addition, the ion plating apparatus shown by FIG. 4 is referred as needed.

  First, an embodiment shown in FIGS. 1 to 3 will be described.

  As shown in FIG. 1, a plasma gun 1 has a cathode 1a to which a negative voltage is applied while being supplied with a carrier gas, and is arranged coaxially with respect to the cathode 1a and is applied with a positive voltage. And an intermediate electrode 1b for generating and converging plasma.

  The cathode 1a is provided with a carrier gas inlet 12 for introducing an inert gas such as argon gas as a carrier gas at the center of a stainless steel cathode mounting base 11, and the carrier gas inlet 12 is electrically conductive. A pipe-like auxiliary cathode 14 and a cylindrical protective member 15 are concentrically attached via an attachment member 13, a main cathode 16 is attached to the tip of the auxiliary cathode 14, and an insulating cylindrical tube is provided on the outermost side. A (glass tube) 17 is provided, and the cathode mounting base 11 is fastened to the intermediate electrode 1b by a plurality of first fastening members 19 insulated by an insulating heat resistant resin cover 18. The cathode mounting base 11 has an annular recess 11a formed at the center, and a lid 11b is welded along the periphery of the recess 11a.

  The intermediate electrode 1b has a first intermediate electrode 21 disposed on the cathode 1a side, a second intermediate electrode 22 disposed on the opposite side of the first intermediate electrode 21 from the cathode 1a, and the first intermediate electrode 21b. An insulating member 23 is disposed between the electrode 21 and the second intermediate electrode 22, and the first intermediate electrode 21 and the second intermediate electrode 22 are insulated by a heat-resistant insulating resin cover 24. The fastening members 25 are fastened to each other.

  The first intermediate electrode 21 and the second intermediate electrode 22 include a first electrode mounting base 26 and a second electrode mounting base 27 made of stainless steel each having a hole in the center. The first electrode mounting base 26 and the second electrode mounting base 27 are connected to each other from the flange portions 28 and 28 fastened to each other by the second fastening member 25, and from the central portion of the flange portions 28 and 28. Annular recesses 31, 31 are formed in the flanges 28, 28 from the opposite sides of the body parts 29, 29 projecting in opposite directions, and on the opposite sides of the body parts 29, 29, respectively. Lids 32, 32 are welded along the periphery.

  A cylindrical first electrode member 33 and a second electrode member 34 are fitted into the respective holes in the center of the first electrode mounting base 26 and the second electrode mounting base 27, and the first electrode mounting base An annular first magnet 35 and a second magnet 36 are fitted on the outer peripheral surfaces of the body portions 29 and 29 of the 26 and the second electrode mounting base 27, respectively. The first magnet 35 and the second magnet 36 are both annular permanent magnets, and an N pole is disposed on the axial cathode side and an S pole is disposed on the opposite side in the axial direction.

The insulating member 23 is positioned such that an annular insulating main body 37 is sandwiched between the first magnet 35 and the second magnet 36, and the first magnet 35 extends from the outer peripheral surface of the insulating main body 37. A cylindrical first fitted portion 38 and a second fitted portion 39 are integrally projected on the outer peripheral surface of the second magnet 36 , and the outer peripheral surfaces of the first magnet 35 and the second magnet 36 are integrally provided. each of the above you fitted on.

  The insulating main body 37, the first fitted portion 38, and the second fitted portion 39 of the insulating member 23 are integrally formed of an insulating heat resistant resin.

  The plasma gun 1 is provided inside an annular insulating member (not shown) joined to the lid portion 32 of the second intermediate electrode 22 and the focusing air core coil 5 as shown in FIG. It is attached to the side surface of the vacuum chamber 2 through a guide tube.

  Since the plasma gun 1 connected to the vacuum chamber 2 as described above needs to maintain airtightness, the plasma gun 1 is not provided between the cathode mounting base 11 of the cathode 1a and one end face of the cylindrical tube (glass tube) 17. A seal member 51 such as a ring is provided, and a seal member 52 such as an O-ring is provided between the other end surface of the cylindrical tube (glass tube) 17 and the first electrode mounting base 26 of the first intermediate electrode 21. Seal members 53, 53 such as O-rings are provided between the body portions 29, 29 of the first intermediate electrode 21 and the second intermediate electrode 22 and the insulating main body portion 37 of the insulating member 23, and Seal members similar to the seal members 51 and 52 are provided on the annular insulating member (not shown) joined to the lid portion 32 and the end surface portion of the guide tube.

  Further, since the plasma gun 1 is heated to a high temperature by discharge, a first cooling means 61 is provided in the cathode mounting base 11 of the cathode 1a for efficient cooling, and the first intermediate electrode is provided. A second cooling means 62 is provided in the first electrode mounting base 26 of the 21, and a third cooling means 63 is provided in the second electrode mounting base 27 of the second intermediate electrode 22.

  FIG. 2 shows a first cooling means 61, which is provided with an annular cooling fluid passage groove 64 around the carrier gas inlet 12 in the cathode mounting base 11, and a radius from a part of the cooling fluid passage groove 64. A radially expanding groove 65 is formed so as to expand outward in the direction, and the radial partition plate extends from the cooling fluid passage groove 64 to the radially expanding groove 65 so as to bisect the radially expanded groove 65. The cooling fluid inlet 67 is provided in the lid portion 11b with respect to the radially enlarged groove 65a located on one side of the partition plate 66, and the radially enlarged groove located on the other side of the partition plate 66. A cooling fluid outlet 68 is provided in the lid 11b with respect to 65b.

  At a position in the cooling fluid passage groove 64 on the cooling fluid outlet portion 68 side from the partition plate 66 and slightly upstream from the cooling fluid outlet portion 68, a claw-shaped cooling fluid guide portion 69 flows the cooling fluid. It is installed in the circumferential direction so as to cut at the tip.

  FIG. 3 shows the second cooling means 62, and an annular cooling fluid passage groove is formed around the hole in the first electrode mounting base 26 where the first electrode member 33 provided in the body 29 is fitted. 71 is provided, and a radially expanded concave groove 72 is formed so as to expand radially outward from a part of the cooling fluid passage groove 71, and the cooling fluid is divided so as to divide the radially expanded concave groove 72 into two equal parts. A radial partition plate 73 is provided from the passage groove 71 to the radially enlarged concave groove 72, and the flange portion 28 of the first electrode mounting base 26 is provided with respect to the radially enlarged concave groove 72a located on one side of the partition plate 73. The cooling fluid inlet portion 74 is provided, and the cooling fluid outlet portion 75 is provided in the flange portion 28 of the first electrode mounting base 26 with respect to the radially enlarged concave groove 72b located on the other side of the partition plate 73.

  In the cooling fluid passage groove 71 on the cooling fluid outlet portion 75 side of the partition plate 73 and at a position slightly upstream of the cooling fluid outlet portion 75, a claw-shaped cooling fluid guide portion 76 flows the cooling fluid. It is installed in the circumferential direction so as to cut at the tip.

  Since the third cooling means 63 provided in the second electrode mounting base 27 of the second intermediate electrode 22 has the same structure as the second cooling means 62, description thereof is omitted.

  Next, when the intermediate electrode 1b is assembled, the annular first magnet 35 and second magnet are formed on the outer peripheral surfaces of the body portions 29, 29 of the first electrode mounting base 26 and the second electrode mounting base 27. 36, and the insulating main body 37 of the insulating member 23 is sandwiched between the first magnet 35 and the second magnet 36, and on the outer peripheral surfaces of the first magnet 35 and the second magnet 36. In the state where the first fitted portion 38 and the second fitted portion 39 of the insulating member 23 are fitted, the flange portions 28, 28 of the first electrode mounting base 26 and the second electrode mounting base 27 are By fastening together with the second fastening member 25, the insulating member 23, the first magnet 35 and the second magnet 36 are simultaneously fixed, and the first fitted portion 38 and the first fitting portion 38 of the insulating member 23 are fixed. Two first fitting portions 39 protect the first magnet 35 and the second magnet 36.

  Next, the function and effect of the embodiment shown in FIGS. 1 to 3 will be described.

  While supplying a carrier gas such as argon gas to the auxiliary cathode 14 of the cathode 1a, a negative voltage is applied to the auxiliary cathode 14 and the main cathode 16 from the discharge power source 3 shown in FIG. By applying a positive voltage to the first electrode member 33 of the first intermediate electrode 21 and the second electrode member 34 of the second intermediate electrode 22, a discharge occurs between these positive and negative electrodes, and plasma is generated. To do.

  The plasma is emitted into the vacuum chamber 2 while converging by the first magnet 35 and the second magnet 36 formed in an annular shape, and as shown in FIG. The deposited metal 7 such as titanium is irradiated to cause the deposited metal 7 to be dissolved and vaporized. At this time, the + ionized vapor-deposited metal particles are attracted to the surface of the workpiece W to which a negative voltage is applied by the ion integrated power supply 8 in the vacuum chamber 2 to form a metal film.

  The first cooling means 61 for cooling the cathode 1a heated by the discharge is such that the cooling fluid flowing into the annular cooling fluid passage groove 64 from the cooling fluid inlet portion 67 provided in the cathode mounting base 11 is After turning around the central portion of the cathode mounting base 11 along the cooling fluid passage groove 64, it is discharged from the cooling fluid outlet 68 to the outside, so that the mounting connected to the central portion of the cathode mounting base 11 The auxiliary cathode 14, the protective member 15, the main cathode 16, and the like can be efficiently cooled through the member 13. At that time, immediately before the cooling fluid collides with the partition plate 66 in the radial direction, the claw-shaped cooling fluid guide portion 69 changes the flow direction of the cooling fluid to the cooling fluid outlet portion 68 side, so that the cooling fluid smoothly flows to the outside. The cooling efficiency is improved.

  Similarly, the second cooling means 62 and the third cooling means 63 for cooling the first intermediate electrode 21 and the second intermediate electrode 22 heated by the discharge include the first electrode mounting base 26 and the second cooling means 63, respectively. The cooling fluid that has flowed into the annular cooling fluid passage groove 71 provided in each body portion 29 from the cooling fluid inlet portion 74 provided in each flange portion 28 of the two-electrode mounting base 27 along the cooling fluid passage groove 71. The first electrode member 33 and the second electrode member 34 are swung around the circumference of the first electrode member 33 and the second electrode member 34 and then discharged from the cooling fluid outlet 75 to the outside. Can be cooled. At that time, just before the cooling fluid collides with the radial partition plate 73, the claw-shaped cooling fluid guide 76 changes the flow direction of the cooling fluid toward the cooling fluid outlet 75, so that the cooling fluid smoothly flows to the outside. The cooling efficiency is improved.

  Further, since the annular recess 31 and the cooling fluid passage groove 71 are provided in the first electrode mounting base 26 and the flanges 28 of the second electrode mounting base 27 from the flange portions 28 to the body portions 29, respectively, The one electrode mounting base 26 and the second electrode mounting base 27 can be efficiently cooled as a whole, and not only the first electrode member 33 and the second electrode member 34 but also the first magnet 35 and the second magnet 36 are efficient. Can cool well.

  Further, the first cooling means 61 has a cooling fluid inlet portion 67 and a cooling fluid outlet portion with respect to the radially enlarged concave groove 65 formed so as to expand radially outward from a part of the cooling fluid passage groove 64. 68, and the second cooling means 62 and the third cooling means 63 are provided in a radially enlarged concave groove 72 formed so as to expand radially outward from a part of the cooling fluid passage groove 71. On the other hand, since the cooling fluid inlet portion 74 and the cooling fluid outlet portion 75 are provided, a sufficient amount of cooling fluid is supplied to the thin cathode mounting base 11, the first electrode mounting base 26 and the second electrode mounting base 27. Can be supplied.

  The first intermediate electrode 21 and the second intermediate electrode 22 are formed on the outer peripheral surfaces of the body portions 29 and 29 of the first electrode mounting base 26 and the second electrode mounting base 27, respectively. And the second magnet 36 and the insulating member 23 disposed between the first intermediate electrode 21 and the second intermediate electrode 22 are formed between the first magnet 35 and the second magnet 36. The first fitted portion 38 and the second fitted portion 39 that are integrally projected from the insulating main body portion 37 positioned therebetween are fitted on the outer peripheral surfaces of the first magnet 35 and the second magnet 36, respectively. Since the flange portions 28, 28 of the first electrode mounting base 26 and the second electrode mounting base 27 are fastened to each other by the second fastening member 25, between the flange portions 28, 28, The first magnet 35 and the second magnet 36 together with the insulating member 23 can be fixed at the same time. It is unnecessary to provide a stone fixing means, component assembling property and can be improved in cost. Further, the first fitted portion 38 and the second fitted portion 39 of the insulating member 23 can also serve as a protective cover for protecting the first magnet 35 and the second magnet 36.

  In addition, since the insulating member 23 is integrally formed of an insulating heat-resistant resin, the lightweight and inexpensive insulating member 23 can ensure high reliability regarding heat resistance, electrical insulation, and the like.

  Furthermore, since both the first magnet 35 and the second magnet 36 are annular permanent magnets, at least one of the conventional magnets can be handled more easily with respect to wiring and insulation than the case where an electromagnet is used. The first magnet 35 and the second magnet 36 can be easily fixed by the insulating member 23, and heat generation performance and cooling performance can be improved because no heat is generated from the magnet.

  The plasma gun 1 of the present invention can be used not only as an ion plating method but also as a plasma generator in other PVD (for example, assist vapor deposition sputtering) or CVD.

  The present invention can be used in plasma gun manufacturing and sales.

1 Plasma gun
1a Cathode
1b Intermediate electrode
21 First intermediate electrode
22 Second intermediate electrode
23 Insulating material
25 Fastening member
26 First electrode mounting base
27 Second electrode mounting base
28 Flange
29 Torso
33 First electrode member
34 Second electrode member
35 First magnet
36 Second magnet
37 Insulation body
38 First fitting part
39 Second fitting part

Claims (3)

A cathode to which a negative voltage is applied while being supplied with a carrier gas, and an intermediate electrode for generating and converging plasma, which is arranged coaxially with respect to the cathode and to which a positive voltage is applied,
The intermediate electrode is
A first intermediate electrode disposed on the cathode side;
A second intermediate electrode disposed on a side opposite to the cathode with respect to the first intermediate electrode;
An insulating member disposed between the first intermediate electrode and the second intermediate electrode;
In a plasma gun comprising a fastening member for fastening the first intermediate electrode and the second intermediate electrode to each other,
The first intermediate electrode and the second intermediate electrode are
Conductive first electrode mounting having a flange portion fastened to each other by the fastening member and a body portion protruding in a direction opposite to each other from the center portion of these flange portions, and having a hole in the center portion. A base and a second electrode mounting base;
A cylindrical first electrode member and a second electrode member fitted in respective holes in the center of the first electrode mounting base and the second electrode mounting base;
An annular first magnet and a second magnet respectively fitted on the outer peripheral surfaces of the body portions of the first electrode mounting base and the second electrode mounting base;
The insulating member is
An insulating main body positioned between the first magnet and the second magnet;
The insulated projecting from the main body portion or Raso Re respective integral that and a first object fitting part and the second to be fitting portion fitted to be respectively on the outer peripheral surface of said first magnet and said second magnet A plasma gun characterized by Insulated body portion, first the fitting portion and the second insulating member made from the fitting portion, the plasma gun according to claim 1, characterized in that it is integrally molded by an insulating heat-resistant resin. The plasma gun according to claim 1 or 2, wherein both the first magnet and the second magnet are annular permanent magnets.

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